CN114717646A

CN114717646A - Feeding pipe, feeding method and crystal growth equipment

Info

Publication number: CN114717646A
Application number: CN202210344856.5A
Authority: CN
Inventors: 陈俊宏
Original assignee: Xuzhou Xinjing Semiconductor Technology Co Ltd
Current assignee: Zhonghuan Leading Xuzhou Semiconductor Materials Co ltd; Zhonghuan Advanced Semiconductor Materials Co Ltd
Priority date: 2022-03-31
Filing date: 2022-03-31
Publication date: 2022-07-08
Anticipated expiration: 2042-03-31
Also published as: TW202325671A; CN114717646B

Abstract

The invention discloses a feeding pipe, a feeding method and crystal growth equipment, wherein the feeding pipe is used for the crystal growth equipment and comprises a pipe body and a separation assembly, the pipe body defines a feeding cavity, the feeding cavity comprises a plurality of containing cavities which are sequentially arranged along the axial direction of the pipe body, two adjacent containing cavities are communicated through a communication port, the plurality of separation assemblies are arranged at intervals along the axial direction of the pipe body, each separation assembly is arranged at the communication port, the separation assemblies have a shielding state and an avoiding state, the communication ports are shielded by the separation assemblies in the shielding state to separate the two adjacent containing cavities, and the communication ports are avoided by the separation assemblies in the avoiding state to communicate the two adjacent containing cavities. According to the feeding pipe disclosed by the invention, multiple times of adding of materials can be realized, so that the single feeding amount is effectively reduced, the impact of the feeding of the materials on molten soup is reduced, and the molten soup is prevented from splashing.

Description

Feeding pipe, feeding method and crystal growth equipment

Technical Field

The invention relates to the technical field of crystal growth, in particular to a feeding pipe, a feeding method and crystal growth equipment.

Background

In the field of crystal growth, multiple-stage pulling techniques are commonly used to reduce the cost of preparing an ingot, and after a section of the ingot is pulled, additional material (e.g., polycrystalline silicon feedstock) needs to be added to the crucible assembly via a feed tube to replenish the molten bath that was depleted by the previous pulling of the ingot, ensuring that there is sufficient molten bath for the subsequent pulling of the ingot. However, in the related art, when the material is supplemented into the crucible assembly through the feeding tube, the material drops to the molten liquid from the feeding tube under the action of gravity, so that the molten liquid is easy to splash, and the reliability of the crystal growth equipment is affected.

Disclosure of Invention

The present invention is directed to solving at least one of the problems of the prior art. Therefore, the feeding pipe provided by the invention can realize multiple addition of materials, so that the single feeding amount is effectively reduced, the impact of the material feeding on molten soup is reduced, and the molten soup is prevented from splashing.

The invention also provides a feeding method for feeding operation by adopting the feeding pipe.

The invention also provides crystal growth equipment with the feeding pipe.

A feed tube according to an embodiment of the first aspect of the invention, the feed tube being for a crystal growth apparatus and comprising: the feeding device comprises a pipe body, a feeding device and a control device, wherein the pipe body defines a feeding cavity, the feeding cavity comprises a plurality of containing cavities which are sequentially arranged along the axial direction of the pipe body, and two adjacent containing cavities are communicated through a communication opening; a plurality of partition subassemblies are a plurality of partition subassembly is followed the axial interval of body sets up, every partition subassembly is located intercommunication mouthful department, just the partition subassembly has shelters from the state and dodges the state shelter from under the state, the partition subassembly shelters from the intercommunication mouth so that adjacent two hold the chamber and cut off dodge under the state, the partition subassembly dodges the intercommunication mouth so that adjacent two hold the chamber intercommunication.

According to the feeding pipe provided by the embodiment of the invention, the feeding cavity is divided into the plurality of containing cavities by arranging the plurality of dividing assemblies, and the dividing assemblies can be switched between the shielding state and the avoiding state to communicate or separate the two adjacent containing cavities, so that materials in the feeding cavity can be added for multiple times in the feeding process, the single feeding amount is effectively reduced, the impact of the material feeding on molten soup is reduced, the molten soup is prevented from splashing, and the reliability of crystal growth equipment is improved.

In some embodiments, the communication port includes a first opening and a second opening arranged in the circumferential direction, the first opening and the second opening respectively communicate with two adjacent containing chambers, the partition assembly includes a first baffle and a second baffle, the first baffle is disposed at the first opening, the second baffle is disposed at the second opening, at least one of the first baffle and the second baffle is movable relative to the pipe body between a first position at which the at least one of the first baffle and the second baffle shields the communication port, and a second position at which the at least one of the first baffle and the second baffle avoids the communication port.

In some embodiments, at least one of the first baffle and the second baffle is rotatable relative to the tubular body, an axis of rotation of at least one of the first baffle and the second baffle coinciding with a central axis of the tubular body; and/or the rotation axis of at least one of the first baffle and the second baffle is perpendicular to the central axis of the pipe body.

In some embodiments, the rotation axis of the first baffle and the rotation axis of the second baffle are both coincident with the central axis of the pipe body, and when one of the first baffle and the second baffle is located at the first position and the other one of the first baffle and the second baffle is located at the second position, the first baffle and the second baffle are in direct face-to-face stacking along the axial direction of the pipe body.

In some embodiments, the feed tube further comprises: the third baffle plate is arranged in the feeding cavity and positioned on the upper side of the separating component, can move relative to the separating component to push the material on the separating component to the communication port, and is fixedly arranged on the cavity wall of the feeding cavity; alternatively, the third baffle may rotate around the central axis of the pipe body.

In some embodiments, the third baffle has a predetermined position where the third baffle is located at a splice between the first and second baffles.

In some embodiments, an axial end of the tubular body defines a discharge opening, the filling tube further comprising: the cover body is provided with a closed state and an open state, the cover body shields the discharge hole in the closed state, and the cover body avoids the discharge hole in the open state.

In some embodiments, the cover body is movable relative to the tube body in an axial direction of the tube body, and a side of the cover body facing the containing cavity has a guide surface extending outward in a radial direction of the tube body in a direction away from the containing cavity.

In some embodiments, the guide surfaces include a first guide surface and a second guide surface sequentially arranged along the circumferential direction of the pipe body, the first guide surface is disposed opposite to one of the first opening and the second opening, the second guide surface is disposed opposite to the other of the first opening and the second opening, on the longitudinal section of the cover body, an included angle between a first line segment corresponding to the first guide surface and the central axis of the pipe body is α, and an included angle between a second line segment corresponding to the second guide surface and the central axis of the pipe body is β, where α > β; and/or the maximum radial length of the orthographic projection of the first guide surface on the cross section of the pipe body is r1, the maximum radial length of the orthographic projection of the second guide surface is r2, and r1 is more than r 2.

In some embodiments, the cover includes a first cover and a second cover, the first cover defines the first guide surface, the second cover defines the second guide surface, and the first cover and the second cover are respectively movable relative to the tube.

The charging method according to an embodiment of the second aspect of the present invention, which uses the charging tube according to the embodiment of the first aspect described above, includes the steps of:

s1, adding materials into the containing cavities in sequence;

and S2, sequentially putting the materials in the containing cavities from bottom to top.

According to the feeding method provided by the embodiment of the invention, the materials in the plurality of containing cavities 111 are sequentially put in, so that the single putting amount is small, the impact of the materials on the molten soup is effectively reduced, and the molten soup is prevented from splashing.

In some embodiments, the plurality of containing cavities includes a first containing cavity to an nth containing cavity arranged in sequence from bottom to top, a discharge port is defined at a bottom of the first containing cavity, the filling tube further includes a cover body having a closed state in which the cover body covers the discharge port and an open state in which the cover body is free from the discharge port, and step S2 includes:

s20, putting the materials in the first containing cavity

S21, putting the materials in the second containing cavity;

s22, materials in the third containing cavity to the Nth containing cavity are sequentially conveyed to the second containing cavity, the separating component at the bottom of the second containing cavity is switched to the avoiding state from the shielding state, so that the materials conveyed from the containing cavity to the second containing cavity are thrown in the separating component until the materials conveyed from the Nth containing cavity to the second containing cavity are thrown in the separating component.

In some embodiments, the containing cavities include a first containing cavity to an nth containing cavity sequentially arranged from bottom to top, a discharge port is defined at a bottom of the first containing cavity, the feeding tube further includes a cover body, the cover body has a closed state and an open state, the cover body covers the discharge port in the closed state, the cover body avoids the discharge port in the open state, and the step S2 includes:

s24, putting the materials in the first containing cavity;

s25, materials in the second containing cavity to the Nth containing cavity are sequentially conveyed to the first containing cavity, the cover body is switched to the opening state from the closing state, so that the materials conveyed to the first containing cavity from the corresponding containing cavity are thrown in until the materials conveyed to the first containing cavity from the Nth containing cavity are thrown in.

In some embodiments, one side of the cover body facing the first containing cavity has a guide surface, the guide surface extends outward in a radial direction of the pipe body towards a direction away from the containing cavity, the guide surface includes a first guide surface and a second guide surface sequentially arranged in a circumferential direction of the pipe body, the first guide surface and the second guide surface respectively correspond to different material throwing areas, the cover body can rotate around a central axis of the pipe body, and in the step S2, the first guide surface or the second guide surface is selected to guide the material in the containing cavity.

In some embodiments, in step S1, in at least two of the containing cavities, the diameter of the material in the containing cavity at the lower side is smaller than the diameter of the material in the containing cavity at the upper side.

According to an embodiment of the third aspect of the present invention, a crystal growth apparatus includes: a crystal growth furnace and a feeding pipe. The feed tube is the feed tube in the above embodiment, and the feed tube is used for feeding materials into the crystal growth furnace.

According to the crystal growth equipment provided by the embodiment of the invention, the feeding pipe in the embodiment is used for feeding the crystal growth furnace, so that the splashing of the melt of the crystal growth equipment can be reduced, the quality of the melt after melting is improved, and the crystal quality is improved.

Additional aspects and advantages of the invention will be set forth in part in the description which follows and, in part, will be obvious from the description, or may be learned by practice of the invention.

Drawings

The above and/or additional aspects and advantages of the present invention will become apparent and readily appreciated from the following description of the embodiments, taken in conjunction with the accompanying drawings of which:

FIG. 1 is a schematic view of a fill tube according to one embodiment of the present invention;

FIG. 2 is another schematic view of the filler tube illustrated in FIG. 1, with the partition assembly in an evacuated state;

FIG. 3 is a top view of the partition assembly shown in FIG. 1;

FIG. 4 is a further cross-sectional view of the filling tube illustrated in FIG. 1, with the lid in an open position;

FIG. 5 is a schematic view of a loading tube according to yet another embodiment of the present invention;

FIG. 6 is a schematic view of a loading tube according to yet another embodiment of the present invention;

FIG. 7 is a schematic view of a loading tube according to yet another embodiment of the present invention;

FIG. 8 is another schematic view of the fill tube shown in FIG. 7;

FIG. 9 is yet another schematic view of the fill tube shown in FIG. 7;

FIG. 10 is yet another schematic view of the fill tube shown in FIG. 7;

FIG. 11 is a schematic flow diagram of an addition method according to an embodiment of the present invention.

Reference numerals are as follows:

a feed tube 100,

A pipe body 10,

A feeding cavity 11, a containing cavity 111, a first containing cavity 111a, a second containing cavity 111b, a third containing cavity 111c,

A communication port 12, a first opening 121, a second opening 122, a discharge port 13,

A partition component 20, a first baffle plate 21, a second baffle plate 22, a third baffle plate 23,

Cover 30, guide surface 31, first guide surface 311, second guide surface 312, first cover 32, second cover 33.

Detailed Description

Reference will now be made in detail to embodiments of the present invention, examples of which are illustrated in the accompanying drawings, wherein like or similar reference numerals refer to the same or similar elements or elements having the same or similar function throughout. The embodiments described below with reference to the accompanying drawings are illustrative only for the purpose of explaining the present invention, and are not to be construed as limiting the present invention.

The following disclosure provides many different embodiments, or examples, for implementing different features of the invention. To simplify the disclosure of the present invention, the components and arrangements of specific examples are described below. Of course, they are merely examples and are not intended to limit the present invention. Furthermore, the present invention may repeat reference numerals and/or letters in the various examples. This repetition is for the purpose of simplicity and clarity and does not in itself dictate a relationship between the various embodiments and/or configurations discussed. In addition, the present invention provides examples of various specific processes and materials, but one of ordinary skill in the art may recognize the applicability of other processes and/or the use of other materials.

Next, with reference to the drawings, a charging tube 100 according to an embodiment of the present invention is described.

As shown in fig. 1 to 2, a feed tube 100 according to an embodiment of the present invention, the feed tube 100 being used for a crystal growth apparatus, and the feed tube 100 including a tube body 10 and a plurality of partition members 20.

The body 10 prescribes a limit to the feeding chamber 11, and feeding chamber 11 includes a plurality of chamber 111 that holds that arrange in proper order along the axial of body 10, holds chamber 111 and can be used for holding the material, and two adjacent chamber 111 that hold are through intercommunication mouth 12 intercommunication, and intercommunication mouth 12 can be prescribed a limit to by the perisporium of body 10, and then when body 10 is vertical to be set up, the upside holds the material in the chamber 111 and can fall to the downside through intercommunication mouth 12 and hold in the chamber 111 to realize the circulation that the difference held the material in the chamber 111.

The plurality of partition assemblies 20 are arranged in the feeding cavity 11, the plurality of partition assemblies 20 are arranged at intervals along the axial direction of the pipe body 10, each partition assembly 20 is arranged at the communication port 12, and the plurality of partition assemblies 20 can partition the feeding cavity 11 into a plurality of containing cavities 111; wherein, separate subassembly 20 and have the state of sheltering from and dodge the state, and under the state of sheltering from, separate subassembly 20 and shelter from intercommunication mouth 12 so that adjacent two hold chamber 111 and cut off, adjacent two are held the unable circulation of material in the chamber 111 this moment, and under the state of dodging, separate subassembly 20 and dodge intercommunication mouth 12 so that adjacent two hold chamber 111 intercommunication, adjacent two are held the material in chamber 111 this moment and can circulate through intercommunication mouth 12.

It can be seen that two adjacent containing cavities 111 can be isolated or communicated by switching the state of the partitioning component 20. When feeding in through filling tube 100, can add the material earlier to a plurality of chambeies 111 that hold, a plurality of partition subassemblies 20 are in the state of sheltering from this moment, then can put in a plurality of materials that hold in the chamber 111 according to certain order, be favorable to reducing single material input volume, for example the single puts in one and holds the material in the chamber 111 (of course, the single also can put in two at least materials that hold in the chamber 111), thereby reduce the material and put the impact to melting the hot water, and then avoid melting the hot water to splash.

It is understood that the number of the partition members 20 may be two, three or four, and the number of the partition members 20 is not particularly limited.

According to the feeding tube 100 provided by the embodiment of the invention, the feeding cavity 11 is divided into the plurality of containing cavities 111 by arranging the plurality of dividing assemblies 20, and the dividing assemblies 20 can be switched between the shielding state and the avoiding state to communicate or divide the adjacent two containing cavities 111, so that materials in the feeding cavity 11 can be added for multiple times in the feeding process, the single feeding amount is effectively reduced, the impact of the material feeding on molten soup is reduced, the molten soup is prevented from splashing, and the reliability of crystal growth equipment is improved.

In some embodiments, as shown in fig. 2, the communication port 12 includes a first opening 121 and a second opening 122 arranged along a circumferential direction of the communication port 12, the first opening 121 and the second opening 122 respectively communicate with two adjacent containing chambers 111, so that two adjacent containing chambers 111 communicate through the first opening 121, and two adjacent containing chambers 111 also communicate through the second opening 122; the partition assembly 20 includes a first blocking plate 21 and a second blocking plate 22, the first blocking plate 21 is disposed at the first opening 121, the second blocking plate 22 is disposed at the second opening 122, and at least one of the first blocking plate 21 and the second blocking plate 22 is movable relative to the tubular body 10 between a first position in which the at least one of the first blocking plate 21 and the second blocking plate 22 blocks the communication opening 12 when the partition assembly 20 is in the blocking state, and a second position in which the at least one of the first blocking plate 21 and the second blocking plate 22 is out of the communication opening 12 when the partition assembly 20 is in the out-of-the-way state.

Thus, by controlling the movement of at least one of the first shutter 21 and the second shutter 22 between the first position and the second position, the partitioning member assembly 20 can be flexibly switched between the shielding state and the avoiding state, thereby facilitating flexible charging of the charging tube 100.

It should be noted that the movement of the at least one of the first shutter 21 and the second shutter 22 from the first position to the second position is not particularly limited. Taking the first shutter 21 as an example, which is movable between a first position and a second position, for example, the first shutter 21 may rotate around the central axis of the pipe 10, or the first shutter 21 may rotate around an axis perpendicular to the central axis of the pipe 10; in the example of fig. 1, 4-7, the tubular body 10 is arranged vertically, and the first shutter 21 may be rotated horizontally about the central axis of the tubular body 10, or the first shutter 21 may be turned upside down about a horizontally extending axis.

In some embodiments, the first shutter 21 is movable relative to the tubular body 10 between a first position and a second position, the second shutter 22 is not movable, the first shutter 21 blocks the first opening 121 when in the first position, the first shutter 21 avoids the first opening 121 when in the second position, and the second shutter 22 can be always in a position to block the second opening 122. It can be seen that when the first baffle 21 moves to the second position, two adjacent containing cavities 111 are communicated through the first opening 121, and when charging is required, the first baffle 21 can be controlled to move from the first position to the second position, so that the first baffle 21 avoids the communication port 12, and materials can flow from the first opening 121 into the other containing cavity 111, so as to realize charging operation.

In some embodiments, the second plate 22 is movable relative to the tube 10 between a first position and a second position, the first plate 21 is not movable, the second plate 22 blocks the second opening 122 when in the first position, the second plate 22 is clear of the second opening 122 when in the second position, and the first plate 21 can be always in a position blocking the first opening 121. It can be seen that when the second baffle 122 moves to the second position, two adjacent containing cavities 111 are communicated through the second opening 122, and when charging is required, the second baffle 22 can be controlled to move from the first position to the second position, so that the second baffle 22 avoids the communication opening 12, and the material can flow from the second opening 122 into another containing cavity 111, so as to implement charging operation.

In still other embodiments, the first plate 21 and the second plate 22 are both movable relative to the tubular body 10 between a first position and a second position, respectively, the first plate 21 blocking the first opening 121 when in the first position, the first plate 21 avoiding the first opening 121 when in the second position, the second plate 22 blocking the second opening 122 when in the first position, and the second plate 22 avoiding the second opening 122 when in the second position. It can be seen that when the first baffle 21 and the second baffle 22 both move to the second position, two adjacent containing cavities 111 are communicated through the first opening 121 and the second opening 122, and when charging is required, the first baffle 21 and the second baffle 22 can be controlled to move to the second position respectively, so that the first baffle 21 and the second baffle 22 both avoid the communication opening 12, and the material can flow from the first opening 121 and the second opening 122 into the other containing cavity 111, so as to implement charging operation.

It will be appreciated that the loading tube 100 may be fed through the first opening 121 toward the charging member (e.g., crucible assembly, etc.) when the first shutter 21 is moved between the first position and the second position, and that the loading tube 100 may be fed through the second opening 122 toward the charging member when the second shutter 22 is moved between the first position and the second position.

It should be noted that, in the present application, when the first baffle 21 moves between the first position and the second position, during the charging process, the first baffle 21 may move from the first position to the second position, or from the first position to any position between the first position and the second position, so that the material may flow through the first opening 121; in other words, when the first baffle 21 is at the second position, the first opening 121 is fully opened, and the material flow area is larger, and when the first baffle 21 is at any position between the first position and the second position, the first opening 121 is partially opened, and the material flow can also be realized.

Similarly, when the second baffle 22 moves between the first position and the second position, the second baffle 22 can move from the first position to the second position, or from the first position to any position between the first position and the second position during the charging process, so that the material can flow through the second opening 122; in other words, when the second baffle 22 is at the second position, the second opening 122 is fully opened, and the material flow area is large, and when the second baffle 22 is at any position between the first position and the second position, the second opening 122 is partially opened, and the material flow can also be realized.

In some embodiments, at least one of the first shutter 21 and the second shutter 22 is rotatable with respect to the tubular body 10, and an axis of rotation of at least one of the first shutter 21 and the second shutter 22 coincides with a central axis of the tubular body 10; and/or the axis of rotation of at least one of the first shutter 21 and the second shutter 22 is perpendicular to the central axis of the tubular body 10.

It should be noted that in the description of the present application, "and/or" is meant to include three parallel schemes, and taking "a and/or B" as an example, the scheme includes a scheme, or B scheme, or a scheme satisfied by both a and B.

The movement setting of the first shutter 21 and the second shutter 22 may include the following various schemes: 1. the axis of rotation of at least one of the first shutter 21 and the second shutter 22 coincides with the central axis of the tubular body 10; 2. the rotation axis of at least one of the first shutter 21 and the second shutter 22 is perpendicular to the central axis of the tubular body 10; 3. the rotation axis of one of the first and

second shutters

21 and 22 coincides with the central axis of the tubular body 10, and the rotation axis of the other of the first and

second shutters

21 and 22 is perpendicular to the central axis of the tubular body 10.

Specifically, the scheme 1 further includes the following scheme: 1.1, the first baffle 21 can rotate relative to the tube body 10, the rotation axis of the first baffle 21 is overlapped with the central axis of the tube body 10, the second baffle 22 cannot rotate relative to the tube body 10, and at the moment, the feeding tube 100 can feed materials through the first opening 121; 1.2, the second baffle 22 can rotate relative to the tube body 10, the rotation axis of the second baffle 22 coincides with the central axis of the tube body 10, the first baffle 21 cannot rotate relative to the tube body 10, and at this time, the feeding tube 100 can feed materials through the second opening 122; 1.3, the first baffle 21 and the second baffle 22 can rotate relative to the tube 10, and the rotation axis of the first baffle 21 and the rotation axis of the second baffle 22 coincide with the central axis of the tube 10. It can be understood that different schemes can be selected in the schemes 1.1, 1.2 and 1.3 according to different material feeding directions and feeding quantity requirements, so that materials are fed to different directions or different quantities are fed, and further, the crystal growth is more stable.

Similarly, the three solutions are also included in the solution 2, and after reading the above-mentioned technical solutions, those skilled in the art can easily understand that one of the first baffle 21 and the second baffle 22 can rotate, the other one of the first baffle 21 and the second baffle 22 can not rotate, and the rotation axis of the above-mentioned one of the first baffle 21 and the second baffle 22 is perpendicular to the central axis of the tube 10, or both the first baffle 21 and the second baffle 22 can rotate, and the rotation axes of the two are perpendicular to the central axis of the tube 10.

Also, in the embodiment 3, one of the first shutter 21 and the second shutter 22 has a rotation axis coinciding with the central axis of the tubular body 10 and the other has a rotation axis perpendicular to the central axis of the tubular body 10, for example, one of the first shutter 21 and the second shutter 22 rotates horizontally and the other is turned upside down, to perform the charging operation.

Therefore, the movement of the first baffle plate 21 and the second baffle plate 22 is flexible, and the differentiated requirements of charging can be met conveniently.

In some embodiments, as shown in fig. 5 and 6, the first blocking plate 21 and the second blocking plate 22 can rotate relative to the tubular body 10, when one of the first blocking plate 21 and the second blocking plate 22 is located at the first position and the other one is located at the second position, the first blocking plate 21 and the second blocking plate 22 are directly overlapped along the axial direction of the tubular body 10, and the rotation axis of the first blocking plate 21 and the rotation axis of the second blocking plate 22 are both coincident with the central axis of the tubular body 10, so that the first blocking plate 21 and the second blocking plate 22 are arranged in a staggered manner along the axial direction of the tubular body 10, and the first blocking plate 21 can be located on the upper side or the lower side of the second blocking plate 22, so that the first blocking plate 21 and the second blocking plate 22 do not interfere with each other during the rotation process.

For example, in the example of fig. 1, 5 to 7, the first shutter 21 is located on the upper side of the second shutter 22, and the first shutter 21 is always located on the upper side of the second shutter 22 during the rotation of the first shutter 21, and likewise, the second shutter 22 is always located on the lower side of the first shutter 21 during the rotation of the second shutter 22.

Of course, the present application is not so limited; in other embodiments, when the rotation axis of the first shutter 21 and the rotation axis of the second shutter 22 are coincident with the central axis of the tubular body 10, one of the first shutter 21 and the second shutter 22 has a slot, at least one of the slots is open in the circumferential direction of the tubular body 10, and the other of the first shutter 21 and the second shutter 22 can rotate to be inserted into the slot, so that the interference between the first shutter 21 and the second shutter 22 can be avoided.

It can be seen that when the first blocking plate 21 is located at the first position and the second blocking plate 22 is located at the second position, the first blocking plate 21 blocks the first opening 121, and the second blocking plate 22 escapes from the second opening 122 and blocks the first opening 121; when the first blocking plate 21 is located at the second position and the second blocking plate 22 is located at the first position, the first blocking plate 21 avoids the first opening 121 and blocks the second opening 122, and the second blocking plate 22 blocks the second opening 122. For example, in the example of fig. 3, the first opening 121 and the second opening 122 are each formed as a semicircular opening, and the first baffle 21 and the second baffle 22 are each formed substantially as a semicircular plate.

In some embodiments, as shown in fig. 3, the feeding tube 100 further includes a third baffle 23, the third baffle 23 is disposed in the feeding cavity 11, and the third baffle 23 is located on the upper side of the partition component 20, the third baffle 23 can move relative to the partition component 20 to push the material on the partition component 20 to the communication port 12, so as to ensure the feeding rate of the material in the containing cavity 111, avoid excessive material remaining in the containing cavity 111, facilitate emptying the material in the containing cavity 111, and prevent the material from being stacked, thereby improving the feeding efficiency of the feeding tube 100.

Specifically, when charging, at least one of the first baffle 21 and the second baffle 22 rotates from the first position to the second position, at least part of the communication port 12 is opened at this time, the material can be thrown through the communication port 12, and the first baffle 21 or the second baffle 22 can rotate relative to the third baffle 23, so that the material can be pushed, and the material falls from the communication port 12, thereby realizing the charging operation.

The following specifically describes the manner of disposing the third baffle 23 and the manner of using the third baffle 23.

In some embodiments, the third baffle 23 is fixedly disposed on the wall of the loading chamber 11, and at least one of the first baffle 21 and the second baffle 22 is movable relative to the tube 10, so as to facilitate the movement of the at least one of the first baffle 21 and the second baffle 22 relative to the third baffle 23.

For example, the third baffle 23 is fixedly arranged on the wall of the feeding chamber 11, the third baffle 23 may be located on the upper side of the partition assembly 2, and the rotation axis of at least one of the first baffle 21 and the second baffle 22 coincides with the central axis of the tube 10: 1. the rotation axis of the first baffle 21 coincides with the central axis of the tube body 10, the second baffle 22 is not rotatable relative to the tube body 10, the first opening 121 is gradually opened in the process that the first baffle 21 rotates from the first position to the second position, and due to the blocking effect of the third baffle 23 on the materials on the first baffle 21, at least the materials on the first baffle 21 fall through the first opening 121; 2. the rotation axis of the second baffle 22 coincides with the central axis of the tube 10, the first baffle 21 cannot rotate relative to the tube 10, the second opening 122 is gradually opened when the second baffle 22 rotates from the first position to the second position, and at least the material on the second baffle 22 falls through the second opening 122 due to the blocking effect of the third baffle 23 on the material on the second baffle 22; 3. the rotation axis of the first baffle 21 and the rotation axis of the second baffle 22 both coincide with the central axis of the tube 10, so that in the process that the first baffle 21 and the second baffle 22 rotate from the first position to the second position, the materials on the first baffle 21 and the second baffle 22 flow to the communication port 12 under the action of the third baffle 23, at this time, the first baffle 21 and the second baffle 22 can sequentially rotate from the first position to the second position, for example, the first baffle 21 rotates from the first position to the second position first to open the first opening 121, so as to realize the falling of the materials on the first baffle 21, at this time, the second baffle 22 and the first baffle 21 rotate together, the second baffle 22 moves from the first position to the second position, and the first baffle 21 moves from the second position to the first position, so as to open the second opening 122, so as to realize the falling of the materials on the second baffle 22.

For another example, the third baffle 23 is fixedly disposed on the wall of the feeding chamber 11, the rotation axis of at least one of the first baffle 21 and the second baffle 22 is perpendicular to the central axis of the tube 10, and at this time, the first baffle 21 and the second baffle 22 can be respectively turned over up and down, so that most or all of the materials in the containing chamber 111 can be conveniently put in.

For another example, the third baffle 23 is fixedly disposed on the wall of the feeding chamber 11, the rotation axis of one of the first baffle 21 and the second baffle 22 coincides with the central axis of the tube 10, and the rotation axis of the other of the first baffle 21 and the second baffle 22 is perpendicular to the central axis of the tube 10. Taking the example that the rotation axis of the first baffle 21 coincides with the central axis of the tubular body 10 and the rotation axis of the second baffle 22 is perpendicular to the central axis of the tubular body 10 as an example, after reading the following technical solutions, those skilled in the art can easily understand the solution that the rotation axis of the second baffle 22 coincides with the central axis of the tubular body 10 and the rotation axis of the first baffle 21 is perpendicular to the central axis of the tubular body 10; the first baffle 21 rotates from the first position to the second position, the material on the first baffle 21 falls through the first opening 121 under the action of the third baffle 23, and the second baffle 22 can turn downwards to the second position, so that the material on the second baffle 22 can be thrown.

In some embodiments, the third baffle 23 is rotatable about the central axis of the tubular body 10, and at least one of the first and

second baffles

21, 22 is movable relative to the tubular body 10 to facilitate relative movement of the third baffle 23 and the at least one of the first and

second baffles

21, 22.

For example, the third shutter 23 may be rotatable about the central axis of the tubular body 10, the third shutter 23 may be located on the upper side of the partition assembly 2, and the axis of rotation of at least one of the first shutter 21 and the second shutter 22 coincides with the central axis of the tubular body 10: 1. the rotation axis of the first baffle 21 coincides with the central axis of the tube 10, the second baffle 22 is not rotatable relative to the tube 10, the first opening 121 is gradually opened when the first baffle 21 rotates from the first position to the second position, the material on the first baffle 21 falls through the first opening 121 due to the blocking effect of the third baffle 23, and the third baffle 23 can push the material on the second baffle 22 to the first opening 121 to fall in the movement process; 2. the rotation axis of the second baffle 22 coincides with the central axis of the tube 10, the first baffle 21 is not rotatable relative to the tube 10, the second opening 122 is gradually opened when the second baffle 22 rotates from the first position to the second position, the material on the second baffle 22 falls through the second opening 122 due to the blocking effect of the third baffle 23 on the material on the second baffle 22, and the third baffle 23 can push the material on the first baffle 21 to the second opening 122 to fall in the movement process; 3. the rotation axis of the first shutter 21 and the rotation axis of the second shutter 22 both coincide with the central axis of the tubular body 10, the first shutter 21 and the second shutter 22 are rotated in the process from the first position to the second position, the materials on the first baffle 21 and the second baffle 22 flow to the communication port 12 under the action of the third baffle 23, at this time, the first baffle 21 and the second baffle 22 can sequentially rotate from the first position to the second position, for example, the first baffle 21 rotates from the first position to the second position first, so as to open the first opening 121 and realize the falling of the material on the first baffle 21, at this time, the second baffle 22 and the first baffle 21 rotate together, the second baffle 22 moves from the first position to the second position, and the first baffle 21 moves from the second position to the first position, to open the second opening 122 and achieve the falling of the material on the second barrier 22, wherein the movement of the third barrier 23 adjusts the corresponding sequence according to the actual requirement.

For another example, the third baffle 23 can rotate around the central axis of the tube 10, the rotation axis of at least one of the first baffle 21 and the second baffle 22 is perpendicular to the central axis of the tube 10, and at this time, the first baffle 21 and the second baffle 22 can be respectively turned over up and down, so that most of or all of the materials in the containing cavity 111 can be conveniently put in.

For another example, the third baffle 23 may rotate around the central axis of the tubular body 10, the rotation axis of one of the first baffle 21 and the second baffle 22 coincides with the central axis of the tubular body 10, and the rotation axis of the other of the first baffle 21 and the second baffle 22 is perpendicular to the central axis of the tubular body 10. Taking the example that the rotation axis of the first baffle 21 coincides with the central axis of the tubular body 10 and the rotation axis of the second baffle 22 is perpendicular to the central axis of the tubular body 10 as an example, after reading the following technical solutions, those skilled in the art can easily understand the solution that the rotation axis of the second baffle 22 coincides with the central axis of the tubular body 10 and the rotation axis of the first baffle 21 is perpendicular to the central axis of the tubular body 10; the first baffle 21 rotates from the first position to the second position, the material on the first baffle 21 is pushed by the movement of the third baffle 23 to fall through the first opening 121, and the second baffle 22 can turn downward to the second position, so as to realize the throwing of the material on the second baffle 22.

Alternatively, in the example of fig. 3, the third baffle 23 extends in the radial direction of the pipe body 10, the first opening 121 and the second opening 122 are each formed as a semicircular opening, the first baffle 21 and the second baffle 22 are each formed as a substantially semicircular plate, and the length of the third baffle 23 in the radial direction of the pipe body 10 may be substantially equal to the radius of the pipe body 10.

In some embodiments, as shown in fig. 3, the third baffle 23 has a predetermined position where the third baffle 23 is located at the splice between the first and

second baffles

21 and 22. Therefore, the rotating angle of at least one of the first baffle plate 21 and the second baffle plate 22 or the rotating angle of the third baffle plate 23 can be reduced, the rotating time is shortened, and the material throwing efficiency is improved.

In the following, the following description will be given by taking as an example that the rotation axis of the first baffle 21 and the rotation axis of the second baffle 22 both coincide with the central axis of the tube 10, and the third baffle 23 is fixedly arranged on the wall of the feeding cavity 11: when carrying out the reinforced operation, first baffle 21 is rotated to the second position by the first position, third baffle 23 is located the concatenation department between first baffle 21 and the second baffle 22 all the time, put in through first opening 121 smoothly for guaranteeing the material, first baffle 21 rotates 180 can, then first baffle 21 and second baffle 22 rotate 180 together to make second baffle 22 rotate to the second position, first baffle 22 rotates to the first position, can realize the input of whole materials.

In the following description, the rotation axis of the first shutter 21 and the rotation axis of the second shutter 22 both coincide with the central axis of the tubular body 10, and the third shutter 23 is rotatable around the central axis of the tubular body 10 as an example: when feeding, the first baffle 21 rotates to the second position from the first position, the third baffle 23 can rotate from the preset position in the direction opposite to the rotating direction of the first baffle 21, the first baffle 21 and the third baffle 23 rotate 180 degrees relatively, so that all materials on the first baffle 21 can be thrown in, then the first baffle 21 and the second baffle 22 rotate 180 degrees together, and the third baffle 23 rotates in the opposite direction, so that all materials on the second baffle 22 can be thrown in.

In some embodiments, as shown in fig. 4, the axial end of the tube 10 defines the discharge hole 13, the feeding tube 100 further includes a cover 30, the cover 30 has a closed state and an open state, in the closed state, the cover 30 covers the discharge hole 13, at which time the material in the feeding cavity 11 cannot be discharged through the discharge hole 13, and in the open state, the cover 30 avoids the discharge hole 13, at which time the material in the feeding cavity 11 can be discharged through the discharge hole 13. From this, through setting up lid 30, the time of puting in of the further nimble material of control charging tube 100 of being convenient for has promoted the convenience in use of charging tube 100, is favorable to reducing the height of the dog-house of charging tube 100 simultaneously, further reduces the melt soup and splashes.

Specifically, discharge gate 13 is injectd to the lower extreme of body 10, and the crucible subassembly is located the below of discharge gate 13, when being equipped with the material in filling tube 100, discharge gate 13 can be sheltered from to lid 30 to prevent that the material from revealing, when needs are reinforced for the crucible subassembly through filling tube 100, lid 30 is switched into the open mode by the closed condition, and the material that is located discharge gate 13 top can be put into the crucible subassembly, in order to accomplish reinforced operation. The setting of lid 30 can control the input state of material to when the material falls into the crucible subassembly from lid 30, it is nearer apart from the molten liquid, and the whereabouts height is lower, can further reduce the molten liquid and splash, thereby improve crystal growth equipment's reliability.

In some embodiments, as shown in fig. 1, 4-7, the cover 30 can move relative to the tube 10 along the axial direction of the tube 10 to switch the cover 30 between the closed state and the open state, which simplifies the movement of the cover 30.

For example, when the cover 30 moves upward to the discharge port 13 along the axial direction of the pipe 10, the cover 30 may shield the discharge port 13, and when the cover 30 moves downward away from the discharge port 13 along the axial direction of the pipe 10, the cover 30 may avoid the discharge port 13. It can be seen that the material is put in through the space between lid 30 and the discharge gate 13, then can control the lid 30 through the height of controlling lid 30 and the distance between lid 30 and the discharge gate 13 to can control the flow that the material was put in, and the flow of putting in of material is different, also different from the impact to the melt soup, can make the filling tube 100 reduce the melt soup and splash when having reasonable feeding efficiency through controlling the distance between lid 30 and the discharge gate 13 from this, and then improve the reliability of crystal growth equipment.

Alternatively, the cover 30 may be moved along the axial direction of the tube 10 by connecting the cover 30 to a pulling mechanism of a crystal growth apparatus, so that the pulling mechanism moves the cover 30.

In some embodiments, as shown in fig. 4 to 7, one side of the cover 30 facing the containing cavity 111 is provided with a guide surface 31, the guide surface 31 extends outward in a radial direction of the tube 10 in a direction away from the containing cavity 111, and on a longitudinal section of the cover 30, a line segment corresponding to the guide surface 31 may be disposed obliquely relative to a central axis of the cover 30, so that the guide surface 31 may guide the material in the feeding cavity 11, and the material flows out obliquely along the guide surface 31, which is beneficial to slowing down the vertical movement of the material in the feeding cavity 11, thereby further reducing the impact of the falling material on the molten soup, and further reducing the splashing of the molten soup caused by the falling material.

Alternatively, in the example of fig. 4, the guide surface 31 is formed as a tapered surface (e.g., a conical surface, an elliptical tapered surface, etc.). Of course, the present application is not limited thereto; in other embodiments, the guide surface 31 may also be formed as a pyramid surface.

It can be understood that the material can be fed through the discharge hole 13 under the guidance of the guiding surface 31 no matter the material falls from the first opening 121 or the second opening 122.

In some embodiments, as shown in fig. 5 to 6, the guide surface 31 includes a first guide surface 311 and a second guide surface 312 sequentially arranged along the circumference of the pipe body 10, the first guide surface 311 is disposed opposite to one of the first opening 121 and the second opening 122, the second guide surface 312 is disposed opposite to the other of the first opening 121 and the second opening 122, and the first guide surface 311 and the second guide surface 312 can guide the material to different material throwing areas.

For example, the first guide surface 311 is disposed opposite to the first opening 121, so that the material falling from the first opening 121 can be discharged through the discharge port 13 under the guidance of the first guide surface 311, and the second guide surface 312 is disposed opposite to the second opening 122, so that the material falling from the second opening 122 can be discharged through the discharge port 13 under the guidance of the second guide surface 312; or, the second guide surface 312 is disposed opposite to the first opening 121, so that the material falling from the first opening 121 can be discharged through the discharge port 13 under the guidance of the second guide surface 312, and the first guide surface 311 is disposed opposite to the second opening 122, so that the material falling from the second opening 122 can be discharged through the discharge port 13 under the guidance of the first guide surface 311.

On the longitudinal section of the cover 30, an included angle between a first line segment corresponding to the first guide surface 311 and the central axis of the pipe body 10 is α, an included angle between a second line segment corresponding to the second guide surface 312 and the central axis of the pipe body 10 is β, and α > β; and/or, in the cross section of the pipe body 10, the maximum radial length of the orthographic projection of the first guide surface 311 is r1, the maximum radial length of the orthographic projection of the second guide surface 312 is r2, and r1 is more than r 2.

In some specific examples, α > β, that is, the first guide surface 311 and the second guide surface 312 are not inclined at equal angles with respect to the central axis of the pipe body 10; when the charging pipe 100 is charging, the different inclination angles of the first guide surface 311 and the second guide surface 312 can make the conveying distances of the materials guided by the first guide surface 311 and the second guide surface 312 different; for example, under the same other conditions, the radial distance between the material guided by the first guide surface 311 and the central axis of the pipe body 10 is greater than the radial distance between the material guided by the second guide surface 312 and the central axis of the pipe body 10, or the radial distance between the material throwing area corresponding to the first guide surface 311 and the central axis of the pipe body 10 is greater than the radial distance between the material throwing area corresponding to the second guide surface 312 and the central axis of the pipe body 10, or the distance between the material guided by only the first guide surface 311 and the molten soup center is greater than the distance between the material guided by the second guide surface 312; of course alpha may also be smaller than beta. Therefore, the materials can be guided to the proper material feeding area by controlling the materials guided by the first cover body 32 or the second cover body 33, for example, the proper material feeding area can be selected according to the particle size of the materials to feed so as to ensure the melt quality of the subsequent melting materials.

In some embodiments, r1 > r2, for example, the guide surface 31 is a conical surface, and then the guide length of the first guide surface 311 is different from that of the second guide surface 312, or the extension length of the first guide surface 311 in the radial direction of the pipe body 10 is different from that of the second guide surface 312 in the radial direction of the pipe body 10; the different extension lengths of the first guiding surface 311 and the second guiding surface 312 can make the material transported by the first guiding surface 311 and the second guiding surface 312 have different distances when the feeding tube 100 is feeding; for example, under the same other conditions, the radial distance between the material guided by the first guide surface 311 and the central axis of the pipe body 10 is greater than the radial distance between the material guided by the second guide surface 312 and the central axis of the pipe body 10, or the radial distance between the material throwing area corresponding to the first guide surface 311 and the central axis of the pipe body 10 is greater than the radial distance between the material throwing area corresponding to the second guide surface 312 and the central axis of the pipe body 10; of course r1 can also be smaller than r 2. Therefore, the materials can be guided to the proper material feeding area by controlling the materials guided by the first cover body 32 or the second cover body 33, for example, the proper material feeding area can be selected according to the particle size of the materials to feed so as to ensure the melt quality of the subsequent melting materials.

In some specific examples, α > β, and r1 > r2, the material can be guided to a suitable material feeding area by controlling the material guided by the first cover 32 or the second cover 33, for example, the material feeding area can be selected to feed according to the particle size of the material, so as to ensure the melt quality of the subsequent melted material.

In some embodiments, as shown in fig. 5 and 6, the cover 30 includes a first cover 32 and a second cover 33, the first cover 32 defines a first guide surface 311, the second cover 33 defines a second guide surface 312, the first cover 32 and the second cover 33 are respectively movable relative to the tube 10, so that the first cover 32 can move relative to the tube 10 along the axial direction of the tube 10, the second cover 33 can move relative to the tube 10 along the axial direction of the tube 10, and the movement of the first cover 32 and the movement of the second cover 33 are independent and non-interfering with each other, so as to flexibly adjust the throwing height of the material separated from the cover 30 when the first cover 32 guides the material, and flexibly adjust the throwing height of the material separated from the cover 30 when the second cover 33 guides the material, so as to achieve controllability of the influence on the molten soup.

In some embodiments, as shown in fig. 5 and 6, the cover 30 can rotate around the central axis of the tube 10 to make one of the first guiding surface 311 and the second guiding surface 312 guide the material, that is, in a single feeding process (for example, feeding the material in one containing cavity 111), if the material needs to be fed to a preset material feeding area and the first guiding surface 311 meets the feeding requirement, when the material falls through the first opening 121, the cover 30 can rotate to make the first guiding surface 311 and the first opening 121 face up and down along the axial direction of the tube 10 so that the material is fed under the guidance of the first guiding surface 311, and when the material falls through the second opening 122, the cover 30 can rotate to make the first guiding surface 311 and the second opening 122 face up and down along the axial direction of the tube 10 so that the material is fed under the guidance of the first guiding surface 311, so that the material is fed to a proper material feeding area in a single time.

Of course, if the second guiding surface 312 meets the feeding requirement, the second guiding surface 312 may be used to guide the material all the time in a single feeding process.

It can be seen that the cover 30 can rotate according to the falling position of the material in the containing cavity 111. In the following description, the rotation axis of the first shutter 21 and the rotation axis of the second shutter 22 both coincide with the central axis of the tube 10, the third shutter 23 is used to push the material in the partition assembly 20 to the communication port 12, the lid 30 is rotatable around the central axis of the tube 10, and the first guide surface 311 is used to guide the material: the cover 30 rotates to make the first guide surface 311 and the first opening 121 face up and down along the axial direction of the tube 10, the first baffle 21 rotates from the first position to the second position to open the first opening 121, the material on the first baffle 21 falls through the first opening 121 under the action of the third baffle 23 and is thrown under the guide of the first guide surface 311, then the cover 30 rotates to make the first guide surface 311 and the second opening 122 face up and down along the axial direction of the tube 10, the second baffle 22 and the first baffle 21 rotate together, the second baffle 22 moves from the first position to the second position, the first baffle 21 moves from the second position to the first position to open the second opening 122, and the material on the second baffle 22 falls through the second opening 122 under the action of the third baffle 23 and is thrown under the guide of the first guide surface 311.

Of course, the sequence of the movement of the first baffle 21 and the second baffle 22 can be reasonably adjusted according to actual needs, for example, the cover 30 is rotated to make the first guide surface 311 and the second opening 122 face up and down along the axial direction of the tube 10, the second baffle 22 is rotated from the first position to the second position to open the second opening 122, the material on the second baffle 21 falls through the second opening 122 under the action of the third baffle 23 and is thrown under the guide of the first guide surface 311, then the cover 30 is rotated to make the first guide surface 311 and the first opening 121 face up and down along the axial direction of the tube 10, the second baffle 22 and the first baffle 21 are rotated together, the first baffle 21 is moved from the first position to the second position, and the second baffle 22 is moved from the second position to the first position to open the first opening 121, the material on the first baffle 21 falls through the first opening 121 under the action of the third baffle 23, and is dropped under the guidance of the first guide surface 311.

Alternatively, the rotation of the cover 30 around the central axis of the tube 10 can be achieved by connecting the cover 30 to a pulling mechanism of the crystal growth apparatus, so that the pulling mechanism rotates the cover 30.

According to the charging method of the second aspect embodiment of the present invention, as shown in fig. 7 to 10, the charging method is performed using the charging tube 100 according to the above embodiment, as shown in fig. 11, and the charging method includes the steps of:

s1, adding materials into the containing cavities 111 in sequence;

s2, sequentially putting the materials in the containing cavities 111 from bottom to top.

For example, at first add the material to in the feeding chamber 11, in this application, because feeding chamber 11 is separated for a plurality of chambeies 111 that hold by a plurality of partition assembly 20, every partition assembly 20 is by having sheltering from the state and dodging the state, and when sheltering from the state, partition assembly 20 can block the material to prevent that the material from falling into the below. When materials are put into the containing cavities 111, the materials can be added into the containing cavities 111 from bottom to top, the separating assemblies 20 are respectively a first separating assembly, a second separating assembly, … and an Nth separating assembly from bottom to top, firstly, the first separating assembly is switched to a shielding state, the separating assemblies above the first separating assembly are all switched to an avoiding state, and the materials are put into the containing cavities 111 on the first separating assembly; after the material in the holding cavity 111 is added and completed, the second partition assembly is switched to a shielding state, so that the material is put in the holding cavity 111 on the second partition assembly, then the material addition is performed on the holding cavity 111 in sequence, and finally the material addition of the holding cavities 111 is completed.

When needing the filling tube 100 to feed in raw material, at first switch over first partition subassembly into the state of dodging, during material accessible intercommunication mouth 12 fell into the crucible subassembly of below this moment, the material was put in and is accomplished the back, puts in the material that makes progress and hold in the chamber 111 again, and the material that holds in the chamber 111 until will the top was put in and is accomplished. That is to say, the material is put in only to a single time and is put in the material that holds in the chamber 111 for the single volume of putting is less, in order to effectively alleviate the impact to the molten soup, avoids the molten soup to splash.

For example, the number of the partition assemblies 20 is two, the number of the containing cavities 111 is three, the three containing cavities 111 are a first containing cavity 111a, a second containing cavity 111b and a third containing cavity 111c from bottom to top, the first containing cavity 111a cannot contain materials, and the second containing cavity 111b and the third containing cavity 111c contain materials in sequence; after the loading is finished, the material in the second containing cavity 111b is put in firstly, and then the material in the third containing cavity 111c is put in.

For another example, the number of the partition assemblies 20 is three, the number of the containing cavities 111 is four, the four containing cavities 111 are a first containing cavity 111a, a second containing cavity 111b, a third containing cavity 111c and a fourth containing cavity from bottom to top, the first containing cavity 111a cannot contain materials, and the second containing cavity 111b, the third containing cavity 111c and the fourth containing cavity contain materials in sequence; after the loading is finished, the material in the second containing cavity 111b is firstly put in, then the material in the third containing cavity 111c is put in, and finally the material in the fourth containing cavity is put in. Of course, the number of the partition members 20 may be three or more.

It is understood that when the filling tube 100 includes the cover 30, the cover 30 may be disposed at the bottom of the lowermost containing cavity 111 (such as the first containing cavity 111a described above), and the lowermost containing cavity 111 may also be filled with the material to achieve the material feeding.

In some embodiments, the containing cavities 111 include first containing cavities 111a to nth containing cavities sequentially arranged from bottom to top, N is greater than or equal to 3, the bottom of the first containing cavity 111a defines the discharge port 13, the feeding tube 100 further includes a cover 30, the cover 30 has a closed state and an open state, in the closed state, the cover 30 blocks the discharge port 13, the material in the first containing cavity 111a cannot be put in the closed state, in the open state, the cover 30 avoids the discharge port 13, the material in the first containing cavity 111a can be put in the open state through the discharge port 13, step S2 includes:

s20, throwing the materials in the first containing cavity 111 a;

s21, as shown in fig. 7-8, throwing the material in the second containing cavity 111 b;

s22, as shown in fig. 9-10, the materials in the third to nth containing cavities 111c to 111b are sequentially transferred into the second containing cavity 111b, and the partition component 20 at the bottom of the second containing cavity 111b is switched from the shielding state to the avoiding state, so as to put in the materials transferred from the corresponding containing cavity 111 to the second containing cavity 111b until the materials transferred from the nth containing cavity to the second containing cavity 111b are put in.

From this, the vertical setting of body 10, then the third holds chamber 111c to the material that the N held the intracavity can fall to the second through intercommunication mouth 12 and hold in order to put in chamber 111b, is favorable to reducing the input height of single material to further reduce the impact of material to the melt soup, further effectively avoid the melt soup to splash.

Particularly, after the material is added to each holding cavity 111 of the feeding tube 100, the partition component 20 below each holding cavity 111 is in a shielding state.

For example, when the filling tube 100 adds the material, at first place the lid 30 in the closed condition, a plurality of partition components 20 all are in the state of dodging, and the material firstly falls into first holding chamber 111a, and after each holding chamber 111 accomplishes the material and adds in the filling tube 100, a plurality of partition components 20 all are in the state of sheltering from, and the lid 30 is in the closed condition. In step S20, the cover 30 is switched from the closed state to the open state, the material in the first containing cavity 111a can be put through the material outlet 13, after the material in the first containing cavity 111a is put, the cover 30 can be kept in the open state, the partition assembly 20 corresponding to the second containing cavity 111b is switched to the avoiding state, so that the material in the second containing cavity 111b is put, and then step S22 is performed.

It can be seen that in performing steps S21 and S22, the lid 30 is always in the open state, facilitating the simplified charging operation.

When N is 3, step S2 further includes: the separating component 20 corresponding to the second containing cavity 111b is switched to the avoiding state to put in the materials in the second containing cavity 111b, after the putting is completed, the separating component 20 corresponding to the second containing cavity 111b is switched to the shielding state, then the separating component 20 corresponding to the third containing cavity 111c is switched to the avoiding state, so that the materials in the third containing cavity 111c are conveyed into the second containing cavity 111b, and then the separating component 20 corresponding to the second containing cavity 111b is switched to the avoiding state to put in the materials conveyed into the second containing cavity 111b from the third containing cavity 111 c.

When N is 4, step S2 further includes: switching the partition assembly 20 corresponding to the second containing cavity 111b to an avoiding state to put in the material in the second containing cavity 111b, then switching the partition assembly 20 corresponding to the second containing cavity 111b to a shielding state, then switching the partition assembly 20 corresponding to the third containing cavity 111c to the avoiding state to transfer the material in the third containing cavity 111c to the second containing cavity 111b, then switching the partition assembly 20 corresponding to the second containing cavity 111b to the avoiding state to put in the material transferred from the third containing cavity 111c to the second containing cavity 111b, after the putting is completed, switching the partition assembly 20 corresponding to the second containing cavity 111b to the shielding state, then switching the partition assembly 20 corresponding to the fourth containing cavity to the avoiding state to transfer the material in the fourth containing cavity to the second containing cavity 111b, and then switching the partition assembly 20 corresponding to the second containing cavity 111b to the avoiding state, to dispense the material transferred from the fourth containing cavity to the second containing cavity 111 b. Of course, N may be 5 or more.

In some embodiments, as shown in fig. 1, 4-7, the containing cavities 111 include a first containing cavity 111a to an nth containing cavity sequentially arranged from bottom to top, a discharge hole 13 is defined at a bottom of the first containing cavity 111a, the feeding tube 100 further includes a cover 30, the cover 30 has a closed state and an open state, in the closed state, the cover 30 blocks the discharge hole 13, the material in the first containing cavity 111a cannot be discharged, in the open state, the cover 30 avoids the discharge hole 13, and the material in the first containing cavity 111a can be discharged through the discharge hole 13.

Step S2 includes:

s24, throwing the materials in the first containing cavity 111 a;

s25, sequentially transferring the materials in the second to nth cavities to the first cavity 111a, and switching the cover 30 from the closed state to the open state to put in the materials transferred from the corresponding cavity 111 to the first cavity 111a until the materials transferred from the nth cavity to the first cavity 111a are put in.

From this, the vertical setting of body 10, then the second holds chamber 111b to the material that the N held the intracavity can fall to first holding chamber 111a in order to put in through intercommunication mouth 12, is favorable to reducing the input height of single material to further reduce the impact of material to the melt soup, further effectively avoid the melt soup to splash.

Particularly, hold the chamber at the filling tube 100 first and accomplish the material and add the back to hold the chamber to 111a to the Nth, each separates subassembly 20 that holds under the chamber 111 and all is in the state of sheltering from, and lid 30 is in the encapsulated situation.

When N is 2, step S2 includes: the cover body 30 is switched to the open state to put in the material in the first containing cavity 111a, after the putting is completed, the cover body 30 is switched to the closed state, and then the partition component 20 corresponding to the second containing cavity 111b is switched to the avoiding state, so that the material in the second containing cavity 111b is conveyed into the first containing cavity 111a, and then the cover body 30 is switched to the open state to put in the material conveyed from the second containing cavity 111b into the first containing cavity 111 a.

When N is 3, step S2 includes: the cover body 30 is switched to an open state to put in the material in the first containing cavity 111a, after the putting is completed, the cover body 30 is switched to a closed state, then the partition assembly 20 corresponding to the second containing cavity 111b is switched to an avoiding state to transfer the material in the second containing cavity 111b to the first containing cavity 111a, then the cover body 30 is switched to an open state to put in the material transferred from the second containing cavity 111b to the first containing cavity 111a, after the putting is completed, the cover body 30 is switched to the closed state, then the partition assembly 20 corresponding to the third containing cavity 111c is switched to the avoiding state to transfer the material in the third containing cavity 111c to the first containing cavity 111a, and then the cover body 30 is switched to the open state to put in the material transferred from the third containing cavity 111c to the first containing cavity 111 a. Of course, N may be 3 or more.

From this, hold the second and hold the material that chamber 11b to Nth held the intracavity and all put in through first chamber 111a that holds, can reduce the material and put in to the input height of crucible subassembly, and then further reduce the molten liquid and splash, and then increase crystal growth equipment's reliability.

In some embodiments, as shown in fig. 1, 4-7, a side of the cover body 30 facing the first containing chamber 111a has a guide surface 31, the guide surface 31 extends outward in a radial direction of the pipe body 10 in a direction away from the containing chamber 111, and the guide surface 31 includes a first guide surface 311 and a second guide surface 312 sequentially arranged in a circumferential direction of the pipe body 10, the first guide surface 311 and the second guide surface 312 correspond to different material throwing areas, respectively, the cover body 30 is rotatable around a central axis of the pipe body 10,

in step S2, the first guide surface 311 or the second guide surface 312 is selected to guide the material in the corresponding containing cavity 111, one of the first guide surface 311 or the second guide surface 312 may be selected to guide the materials in all the containing cavities 111, or, when the materials in the two different containing cavities 111 need to be respectively put into different material putting areas, different planes may be chosen for guiding the material, for example, for the second containing cavity 111b and the third containing cavity 111c, the material throwing area of the third containing cavity 111c is located outside the material throwing area of the second containing cavity 111b, one of the first guide surface 311 and the second guide surface 312 may be selected to guide the material when the material in the second receiving cavity 111b is put, the other of the first guide surface 311 and the second guide surface 312 may be selected to guide the material when the material in the third containing cavity 111c is thrown.

In some embodiments, as shown in fig. 5 and 6, the cover 30 includes a first cover 32 and a second cover 33, the first cover 32 defines a first guide surface 311, the second cover 33 defines a second guide surface 312, and the first cover 32 and the second cover 33 can move up and down relative to the tube 10 respectively.

In step S2, each of the containing cavities 111 corresponds to a feeding height position, and the first cover 32 or the second cover 33 is moved to the feeding height position to guide the material in the corresponding containing cavity 111, so as to further ensure that the material in the containing cavity 111 is fed to the corresponding material feeding area, thereby ensuring the feeding accuracy.

It can be understood that different feeding height positions affect the radial distance between the material feeding area and the central axis of the pipe body 10 (i.e. affect the distance between the material feeding area and the molten soup center); for example, if the radial distance between the material feeding area and the central axis of the pipe 10 is larger, the corresponding feeding height position is relatively higher, that is, the position of the first cover 32 or the second cover 33 for guiding the material feeding is higher.

In some embodiments, in step S1, in at least two of the containing cavities 111, the diameter of the material in the containing cavity 111 on the lower side is smaller than the diameter of the material in the containing cavity 111 on the upper side, when the feeding tube 100 feeds the material, the material with the smaller diameter in the containing cavity 111 on the lower side is firstly fed into the molten soup, the material with the smaller diameter forms a buffer layer on the surface of the molten soup, and then the material with the larger diameter in the containing cavity 111 on the upper side is fed, the material with the larger diameter falls on the buffer layer, under the buffer action of the buffer layer, the impact of the material with the larger diameter on the molten soup can be reduced, so that the splashing of the molten soup can be reduced, meanwhile, the impact of the material on the crucible assembly can be reduced, and the crucible assembly is prevented from being broken by pounding.

For example, small-size materials are firstly added into molten soup to form a first buffer layer on the surface of the molten soup; then putting medium and small-sized materials, dropping the medium and small-sized materials onto the first buffer layer, reducing the impact of the medium and small-sized materials on the molten soup under the buffer action of the first buffer layer, and forming a second buffer layer by the medium and small-sized materials; according to a similar principle, medium-size and large-size polycrystalline silicon materials are sequentially put in, so that the problem of splashing of molten liquid can be avoided under the buffer of the buffer layer, and the crucible assembly can be prevented from being broken by large-size polycrystalline silicon blocks, so that the working reliability of equipment is ensured.

Optionally, in step S1, in the at least two holding cavities 111, the diameter of the material in the holding cavity 111 located on the lower side is smaller than the diameter of the material in the holding cavity 111 located on the upper side, and in step S2, the at least two holding cavities 111 correspond to different material throwing areas, so that the material throwing area corresponding to the material with the smaller diameter formed in the crucible assembly is located on the inner side of the material throwing area corresponding to the material with the larger diameter, that is, the material throwing area corresponding to the material with the smaller diameter is closer to the melt center than the material throwing area corresponding to the material with the larger diameter, which is beneficial for subsequent material melting, improves material melting efficiency, ensures material melting quality, and avoids the middle area of the melt from generating bubbles during material melting to affect crystal pulling, thereby facilitating the guarantee of crystal quality.

It can be understood that at least two containing cavities 111 correspond to different material putting areas, the first guide surface 311 and the second guide surface 312 may be disposed to correspond to different material putting areas, respectively, the cover 30 may rotate around the central axis of the pipe 10, and the material in the two containing cavities 111 corresponding to different material putting areas is guided by the first guide surface 311 and the second guide surface 312, respectively.

According to a crystal growing apparatus of an embodiment of a third aspect of the present invention, comprising: a crystal growth furnace and a feed tube 100. The feed tube 100 is the feed tube 100 in the above embodiment, and the feed tube 100 is used for feeding into the crystal growth furnace.

According to the crystal growth equipment provided by the embodiment of the invention, the feeding pipe 100 is adopted for feeding the crystal growth furnace, so that the splashing of molten liquid of the crystal growth equipment can be reduced, the quality of the molten liquid after melting is improved, and the crystal quality is improved.

Other configurations and operations of crystal growth apparatus according to embodiments of the present invention are known to those of ordinary skill in the art and will not be described in detail herein.

In the description of the present invention, it is to be understood that the terms "center", "length", "upper", "lower", "front", "rear", "bottom", "inner", "outer", "axial", "radial", "circumferential", and the like, indicate orientations and positional relationships based on those shown in the drawings, are merely for convenience in describing the present invention and for simplicity in description, and do not indicate or imply that the referenced device or element must have a particular orientation, be constructed and operated in a particular orientation, and thus, are not to be construed as limiting the present invention. Furthermore, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of the present invention, "a plurality" means two or more unless otherwise specified.

In the description of the present invention, it should be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly and may be, for example, fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meanings of the above terms in the present invention can be understood in specific cases to those skilled in the art.

In the description herein, references to the description of the term "one embodiment," "some embodiments," "an illustrative embodiment," "an example," "a specific example," or "some examples" or the like mean that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the invention. In this specification, the schematic representations of the terms used above do not necessarily refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.

While embodiments of the invention have been shown and described, it will be understood by those of ordinary skill in the art that: various changes, modifications, substitutions and alterations can be made to the embodiments without departing from the principles and spirit of the invention, the scope of which is defined by the claims and their equivalents.

Claims

1. A feed tube, characterized in that the feed tube (100) is for a crystal growth apparatus and comprises:

the feeding device comprises a pipe body (10), wherein the pipe body (10) defines a feeding cavity (11), the feeding cavity (11) comprises a plurality of containing cavities (111) which are sequentially arranged along the axial direction of the pipe body (10), and two adjacent containing cavities (111) are communicated through a communication port (12);

the pipe body (10) is provided with a plurality of partition components (20), the partition components (20) are arranged along the axial direction of the pipe body (10) at intervals, each partition component (20) is arranged at the position of the communicating port (12), the partition components (20) are in a shielding state and an avoiding state, the partition components (20) shield the communicating port (12) to enable the adjacent two containing cavities (111) to be separated, and the partition components (20) avoid the communicating port (12) to enable the adjacent two containing cavities (111) to be communicated in the avoiding state.

2. The charging tube according to claim 1, characterized in that the communication port (12) comprises a first opening (121) and a second opening (122) arranged in a circumferential direction, the first opening (121) and the second opening (122) respectively communicating two adjacent containing chambers (111), the partition assembly (20) comprises a first baffle (21) and a second baffle (22), the first baffle (21) being provided at the first opening (121), the second baffle (22) being provided at the second opening (122), at least one of the first baffle (21) and the second baffle (22) being movable with respect to the tube body (10) between a first position in which the at least one of the first baffle (21) and the second baffle (22) obstructs the communication port (12), in the second position, the at least one of the first and second baffles (21, 22) is clear of the communication port (12).

3. The filling tube according to claim 2, wherein at least one of the first shutter (21) and the second shutter (22) is rotatable with respect to the tubular body (10),

the axis of rotation of at least one of the first flap (21) and the second flap (22) coincides with the central axis of the tubular body (10); and/or the presence of a gas in the gas,

the axis of rotation of at least one of the first flap (21) and the second flap (22) is perpendicular to the central axis of the tube (10).

4. The filling pipe according to claim 3, wherein the axis of rotation of the first shutter (21) and the axis of rotation of the second shutter (22) both coincide with the central axis of the tubular body (10), and wherein the first shutter (21) and the second shutter (22) are in direct axial superimposition along the tubular body (10) when one of the first shutter (21) and the second shutter (22) is in the first position and the other is in the second position.

5. The feeding tube according to any one of claims 2 to 4, further comprising:

a third baffle plate (23), wherein the third baffle plate (23) is arranged in the feeding cavity (11) and is positioned at the upper side of the separation component (20), the third baffle plate (23) can move relative to the separation component (20) so as to push the materials on the separation component (20) to the communication port (12), and the third baffle plate (23),

the third baffle (23) is fixedly arranged on the cavity wall of the feeding cavity (11); alternatively, the third baffle (23) may be rotatable about the central axis of the tubular body (10).

6. The feeding tube according to claim 5, characterized in that the third baffle (23) has a predetermined position, in which the third baffle (23) is located at the junction between the first baffle (21) and the second baffle (22).

7. The filling tube according to any one of claims 2 to 4, wherein the axial end of the tubular body (10) defines a discharge orifice (13), the filling tube (100) further comprising:

the cover body (30) is provided with a closed state and an opened state, the cover body (30) shields the discharge hole (13) in the closed state, and the cover body (30) avoids the discharge hole (13) in the opened state.

8. The filling tube according to claim 7, wherein the cover (30) is movable relative to the tube (10) in the axial direction of the tube (10), and wherein the cover (30) has a guide surface (31) on a side facing the containing chamber (111), and wherein the guide surface (31) extends radially outward of the tube (10) in a direction away from the containing chamber (111).

9. The filling tube according to claim 8, wherein the guide surface (31) comprises a first guide surface (311) and a second guide surface (312) arranged in sequence along the circumferential direction of the tubular body (10), the first guide surface (311) being disposed opposite to one of the first opening (121) and the second opening (122), the second guide surface (312) being disposed opposite to the other of the first opening (121) and the second opening (122),

on the longitudinal section of the cover body (30), an included angle between a first line segment corresponding to the first guide surface (311) and the central axis of the pipe body (10) is alpha, an included angle between a second line segment corresponding to the second guide surface (312) and the central axis of the pipe body (10) is beta, and alpha is larger than beta; and/or the presence of a gas in the gas,

in the cross section of the pipe body (10), the maximum radial length of the orthographic projection of the first guide surface (311) is r1, the maximum radial length of the orthographic projection of the second guide surface (312) is r2, and r1 is more than r 2.

10. The filling tube according to claim 9, wherein the cover (30) comprises a first cover (32) and a second cover (33), the first cover (32) defining the first guide surface (311), the second cover (33) defining the second guide surface (312), the first cover (32) and the second cover (33) being movable with respect to the tube (10), respectively.

11. A feeding method, characterized in that it uses a feeding tube (100) according to any one of claims 1 to 10 for feeding, comprising the steps of:

s1, adding materials into the containing cavities (111) in sequence;

s2, sequentially feeding the materials in the containing cavities (111) from bottom to top.

12. The charging method as defined in claim 11, wherein the plurality of containing chambers (111) includes a first containing chamber (111a) to an Nth containing chamber arranged in this order from the bottom to the top, a discharge port (13) is defined at a bottom of the first containing chamber (111a), the charging tube (100) further includes a lid body (30), the lid body (30) has a closed state in which the lid body (30) covers the discharge port (13) and an open state in which the lid body (30) avoids the discharge port (13),

the step S2 includes:

s20, feeding the materials in the first containing cavity (111 a);

s21, putting the materials in the second containing cavity (111 b);

s22, materials in a third containing cavity (111c) to an Nth containing cavity (111) are sequentially conveyed into the second containing cavity (111b), the separating component (20) at the bottom of the second containing cavity (111b) is switched to the avoiding state from the shielding state, so that the materials conveyed to the second containing cavity (111b) from the corresponding containing cavity (111) are put in until the materials conveyed to the second containing cavity (111b) from the Nth containing cavity (111) are put in.

13. The charging method as defined in claim 11, wherein the containing chamber (111) comprises a first containing chamber (111a) to an Nth containing chamber (111) arranged in sequence from bottom to top, a discharge port (13) is defined at a bottom of the first containing chamber (111a), the charging tube (100) further comprises a cover body (30), the cover body (30) has a closed state in which the cover body (30) covers the discharge port (13) and an open state in which the cover body (30) is free from the discharge port (13),

the step S2 includes:

s24, feeding the materials in the first containing cavity (111 a);

s25, materials in the second containing cavity (111b) to the Nth containing cavity (111) are sequentially conveyed into the first containing cavity (111a), the cover body (30) is switched to the opening state from the closing state so as to put in the materials conveyed into the first containing cavity (111a) from the corresponding containing cavity (111) until the materials conveyed into the first containing cavity (111a) from the Nth containing cavity (111) are put in.

14. The charging method as claimed in claim 12 or 13, wherein a side of said cover body (30) facing said first containing chamber (111a) has a guide surface (31), said guide surface (31) extends radially outwardly of said pipe body (10) in a direction away from said containing chamber (111), and said guide surface (31) comprises a first guide surface (311) and a second guide surface (312) arranged in sequence along a circumferential direction of said pipe body (10), said first guide surface (311) and said second guide surface (312) respectively correspond to different material throwing areas, said cover body (30) being rotatable about a central axis of said pipe body (10),

in the step S2, the first guide surface (311) or the second guide surface (312) is selected to guide the material in the containing cavity (111).

15. The charging method as defined in claim 11, wherein in said step S1, of at least two of said containing chambers (111), the diameter of the material in said containing chamber (111) located at the lower side is smaller than the diameter of the material in said containing chamber (111) located at the upper side.

16. A crystal growth apparatus, comprising:

a crystal growth furnace;

a feeding tube (100), the feeding tube (100) being a feeding tube (100) according to any one of claims 1-10, and the feeding tube (100) being for feeding into the crystal growth furnace.