CN114709129A - Mass analyzer system and mass spectrometer - Google Patents

Mass analyzer system and mass spectrometer Download PDF

Info

Publication number
CN114709129A
CN114709129A CN202210261209.8A CN202210261209A CN114709129A CN 114709129 A CN114709129 A CN 114709129A CN 202210261209 A CN202210261209 A CN 202210261209A CN 114709129 A CN114709129 A CN 114709129A
Authority
CN
China
Prior art keywords
lens
pole
focusing
ion
electromagnet
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202210261209.8A
Other languages
Chinese (zh)
Inventor
王志强
刘权卫
张兆清
房映彤
杨菡
陈云清
马敬
侯留东
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
China Nuclear Power Engineering Co Ltd
Original Assignee
China Nuclear Power Engineering Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by China Nuclear Power Engineering Co Ltd filed Critical China Nuclear Power Engineering Co Ltd
Priority to CN202210261209.8A priority Critical patent/CN114709129A/en
Publication of CN114709129A publication Critical patent/CN114709129A/en
Pending legal-status Critical Current

Links

Images

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/025—Detectors specially adapted to particle spectrometers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/06—Electron- or ion-optical arrangements
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/06—Electron- or ion-optical arrangements
    • H01J49/067—Ion lenses, apertures, skimmers

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
  • Electron Tubes For Measurement (AREA)

Abstract

The invention discloses a mass analyzer system, which comprises an ion lens group, an analysis electromagnet and a detector, wherein the ion lens group, the analysis electromagnet and the detector adopt an asymmetric structure, the distance between the ion lens group and the analysis electromagnet is smaller than the distance between the analysis electromagnet and the detector, the deflection radius of the magnetic field center of the analysis electromagnet is 200-220mm, and the incident angle of ions output by the ion lens group entering the analysis electromagnet is smaller than the exit angle of the ions output by the analysis electromagnet. The invention also discloses a mass spectrometer. The invention has the advantages of compact layout, small occupied space, light weight and the like.

Description

Mass analyzer system and mass spectrometer
Technical Field
The invention belongs to the technical field of analysis, and particularly relates to a mass analyzer system and a mass spectrometer comprising the mass analyzer system.
Background
The Thermal Ionization Mass Spectrometry (TIMS) is an analysis and test technology for accurately measuring the isotope abundance and the isotope abundance ratio of elements developed in the 70 th century, and compared with other analysis technologies, the thermal ionization mass spectrometry has the advantages of high accuracy, high precision and the like, and is widely applied to the fields of nuclear industry, environment, geology, archaeology and the like.
The mass analyzer system is a place for performing mass separation on ions with different mass-to-charge ratios, is an important component of the thermal ionization mass spectrometer, directly determines the parameters of the thermal ionization mass spectrometer such as sensitivity, mass resolution, mass dispersion and aberration, and influences the actual analysis level of the thermal ionization mass spectrometer.
At present, three manufacturers of thermal ionization mass spectrometers worldwide mainly include zemer feier (Thermo Fisher), Ametek (Ametek) and british isotope mass spectrometry (Isotopx), and mass analyzer systems of the thermal ionization mass spectrometers produced by the three manufacturers all have unique ion optical designs, and although the mass spectrometer can achieve the purpose of mass spectrometry, the thermal ionization mass spectrometers occupy large space and weight and are not beneficial to arrangement. In addition, these thermal ionization mass spectrometers suffer from high energy consumption, low resolution, and the like.
Disclosure of Invention
The invention aims to solve the technical problems in the prior art, and provides a mass analyzer system and a mass spectrometer, which have the advantages of compact layout, small occupied space and the like.
The technical scheme for solving the technical problems is as follows:
according to an aspect of the present invention, a mass analyzer system is provided, which includes an ion lens set, an analyzing electromagnet, and a detector, wherein the ion lens set, the analyzing electromagnet, and the detector are asymmetric structures, a distance between the ion lens set and the analyzing electromagnet is smaller than a distance between the analyzing electromagnet and the detector, a magnetic field center deflection radius of the analyzing electromagnet is 200 and 220mm, and an incident angle of ions output by the ion lens set entering the analyzing electromagnet is smaller than an exit angle of ions output by the analyzing electromagnet.
Preferably, the distance between the ion lens group and the analysis electromagnet is 450-480mm, the distance between the analysis electromagnet and the detector is 570-600mm, the incident angle of the analysis electromagnet is 27-30 °, and the exit angle of the analysis electromagnet is 29-32 °.
Preferably, the ion lens group includes an accelerating pole lens, an extraction pole lens, a focusing pole X lens, a focusing pole Z lens, an ion source outlet slit, an output lens, and a high voltage power connector, the accelerating pole lens, the extraction pole lens, the focusing pole X lens, the focusing pole Z lens, the ion source outlet slit, and the output lens are sequentially arranged, and the output lens is located at a position close to the analyzing electromagnet; the high voltage power connector is electrically connected with the accelerating electrode lens, the extraction electrode lens, the focusing electrode X lens, the focusing electrode Z lens and the output lens respectively for providing voltage.
Preferably, the voltage of the high voltage power connector is less than 10KV, and the width of the ion source outlet slit is 0.2 mm.
Preferably, the high voltage power connector includes a plurality of power supply modules, which are a first module, a second module, a third module, a fourth module, a fifth module, and a sixth module, wherein:
the first module is electrically connected with the accelerator lens and is used for providing voltage to the accelerator lens in a range of 9900 +/-100V;
the second module is electrically connected with the extraction electrode lens and is used for providing voltage to the extraction electrode lens within a range of 8600 +/-300V;
the third module is electrically connected with the focusing lens and is used for providing voltage for the focusing lens in a 9000 +/-100V range;
the fourth module is electrically connected with the X lens of the focusing electrode and is used for providing voltage for the X lens of the focusing electrode within the range of 5000 +/-100V;
the fifth module is electrically connected with the focusing pole Z lens and is used for providing voltage for the focusing pole Z lens within a range of 450 +/-250V;
the sixth module is electrically connected with the output lens and used for providing the voltage range for the output lens to be 1500 +/-250V.
Preferably, the analysis electro-magnet includes yoke, pole shoe, magnetic pole coil and magnetic induction stabilizing coil, the pole shoe is located in the yoke, the magnetic pole coil with magnetic induction stabilizing coil snare is located on the pole shoe, and magnetic induction stabilizing coil is in the one end that is close to the pole shoe clearance, and magnetic pole coil is used for producing the magnetic field, and magnetic induction stabilizing coil is used for compensating the magnetic field that magnetic pole coil produced.
Preferably, the gap of the pole shoe is 12-15mm, and the magnetic pole coil and the magnetic induction stabilizing coil both adopt a current density of less than 2A/mm2Winding the low-resistance enameled wire.
Preferably, the number of faraday cups in the detector is eight or more, and each faraday cup is sequentially arranged in a line to form a focusing plane, wherein the position of the faraday cup at the most intermediate position is fixed, and the positions of the remaining faraday cups are movable in the direction of the focusing plane.
Preferably, the angle between the focusing plane and the main ion transmission optical axis of the analyzing electromagnet is 20-30 °, and the width of the receiving slit of the faraday cup is 0.8-1.0 mm.
Preferably, the system further comprises a second focusing lens and a zoom lens, wherein the second focusing lens is arranged between the ion lens group and the analysis electromagnet and is used for optimizing the focusing effect of the ion beam output by the ion lens group; the zoom lens is arranged between the analysis electromagnet and the detector and used for improving the dispersion distance.
According to another aspect of the present invention there is also provided a mass spectrometer comprising a mass analyser system as described above.
According to the mass analyzer system and the mass spectrometer, due to the adoption of the asymmetric ion optical design, relevant parameters such as the radius of a central orbit of the analysis electromagnet, the distance between the ion lens group and the analysis electromagnet, the distance between the analysis electromagnet and the detector and the like can be reduced, the structural layout of the whole system is compact, and the whole size and weight of the system can be effectively reduced. In addition, by improving the structure composition and parameters of the ion lens group, the analysis electromagnet and the detector, the performances such as resolution (more than 500), ion transmission efficiency (more than 90 percent) and the like can be improved, isotope analysis of full mass number of 3-280amu in mass number range is realized, power consumption can be reduced, and environmental protection and energy saving are realized; the ions can be further focused in the X direction and the Y direction before entering the analysis electromagnet through the second focusing lens, and the mass dispersion distance of the ions after mass separation of the analysis electromagnet can be further adjusted through the second focusing lens, so that the receiving efficiency of the detector is improved.
Drawings
FIG. 1 is a schematic diagram of a mass analyzer system in accordance with an embodiment of the invention;
FIG. 2 is a schematic diagram of an ion lens assembly according to an embodiment of the present disclosure;
FIG. 3 is a schematic structural diagram of an output lens according to an embodiment of the present invention;
FIG. 4 is a schematic diagram of an analysis electromagnet according to an embodiment of the present invention;
FIG. 5 is an exploded view of an analyzing electromagnet according to an embodiment of the present invention;
FIG. 6 is a schematic diagram of a detector according to an embodiment of the present invention;
FIG. 7 is a schematic diagram of another mass analyzer system in accordance with an embodiment of the present invention;
FIG. 8 is a schematic structural diagram of a second focusing lens in an embodiment of the invention;
FIG. 9 is a cross-sectional view of a second focusing lens in an embodiment of the invention.
In the figure: 1-an ion lens group; 2-analyzing the electromagnet; 3-a detector; 10-an accelerating polar lens; 11-an extraction lens; 12-a focusing lens; 13-a focusing polar X lens; 14-a focusing polar Z lens; 15-ion source exit slit; 16-an output lens; 20-a magnetic yoke; 21-pole piece; 22-a magnetic induction stabilizing coil; 23-pole coils; 24-a mobile device; 30-a faraday cup; 31-a secondary electron multiplier; 32-deflection electrodes; 33-high voltage connector; 41-a second pole; 161-a first electrode; 162-a second electrode; 163-a third electrode; 164-fourth electrode.
Detailed Description
In order to make those skilled in the art better understand the technical solution of the present invention, the technical solution of the present invention will be clearly and completely described below with reference to the accompanying drawings, and it is obvious that the described embodiments are a part of the embodiments of the present invention, and not all embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
In the description of the present invention, it should be noted that the indication of orientation or positional relationship, such as "on" or the like, is based on the orientation or positional relationship shown in the drawings, and is only for convenience and simplicity of description, and does not indicate or imply that the device or element referred to must be provided with a specific orientation, constructed and operated in a specific orientation, and thus, should not be construed as limiting the present invention.
In the description of the present invention, the terms "first" and "second" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implying any number of technical features indicated. Thus, features defined as "first", "second", may explicitly or implicitly include one or more of the described features. In the description of the present invention, "a plurality" means two or more unless specifically defined otherwise.
In the description of the present invention, it is to be noted that, unless otherwise explicitly specified or limited, the terms "connected," "disposed," "mounted," "fixed," and the like are to be construed broadly, e.g., as being fixedly or removably connected, or integrally connected; either directly or indirectly through intervening media, or through the interconnection of two elements. The specific meaning of the above terms in the present invention can be understood in specific cases for those skilled in the art.
Example 1
As shown in fig. 1, the present embodiment discloses a mass analyzer system, which can be used in a Thermal Ionization Mass Spectrometer (TIMS), a multi-receiver inductively coupled plasma mass spectrometer (MC-ICP-MS), etc., and comprises an ion lens set 1, an analyzing electromagnet 2, and a detector 3, wherein the ion lens set 1, the analyzing electromagnet 2, and the detector 3 are asymmetric, the distance between the ion lens set 1 and the analyzing electromagnet 2 is smaller than the distance between the analyzing electromagnet 2 and the detector 3, the magnetic field center deflection radius of the analyzing electromagnet 2 is 200-220mm, and the incident angle of the ion output by the ion lens set 1 entering the analyzing electromagnet is smaller than the exit angle of the ion output by the analyzing electromagnet.
Specifically, the ion lens group 1 is used for adjusting and focusing ions, the analyzing electromagnet 2 is used for providing a magnetic field with stable and adjustable strength, and the detector 3 is used for measuring the ion beam current strength. The distance between the ion lens group 1 and the analysis electromagnet 2 is in the range of 450-480mm, and the distance between the analysis electromagnet 2 and the detector 3 is in the range of 570-600 mm. The incident angle range of the ions output by the ion lens group 1 entering the analysis electromagnet is 27-30 degrees, and the exit angle range of the ions output by the analysis electromagnet is 29-32 degrees.
The principle of the mass analyser system is as follows: carrying out spatial separation on the mass-to-charge ratio m/e according to the different Lorentz forces on ions with different masses entering the analysis electromagnet by utilizing a uniform magnetic field;
according to the acceleration equation of ions in an electric field and the lorentz force equation in a magnetic field:
Figure BDA0003550185490000061
the ion mass to charge ratio is then:
Figure BDA0003550185490000062
wherein q represents the number of charges of the ionic band, U0Denotes acceleration voltage, m denotes mass of ion, B denotes magnetic field strength, V denotes velocity of ion, rmRepresents the magnetic field center deflection radius;
when accelerating voltage U0And after the magnetic field intensity B is adjusted to a proper value, ions with different mass-to-charge ratios (m/q) realize different deflection radiuses, and then reach different Faraday cups, and the ion beam current intensity is measured by a detector.
In the present embodiment, the distance between the ion lens group 1 and the analyzing electromagnet 2 is preferably 430mm, the distance between the analyzing electromagnet 2 and the detector 3 is preferably 580mm, the incident angle of the ion analyzing electromagnet output by the ion lens group is preferably 28 °, and the exit angle of the ion output by the analyzing electromagnet is preferably 30 °.
Compared with the prior art, the ion lens group 1 in the present embodiment has an output lens 16 added thereto, that is, as shown in fig. 2, the ion lens group 1 includes an accelerating pole lens 10, an extraction pole lens 11, a focusing lens 12, a focusing pole X lens 13, a focusing pole Z lens 14, an ion source exit slit 15, an output lens 16, and a high voltage power connector, wherein: an accelerating pole lens 10, an extraction pole lens 11, a focusing lens 12, a focusing pole X lens 13, a focusing pole Z lens 14, an ion source outlet slit 15 and an output lens 16 are sequentially arranged in parallel, and the output lens 16 is positioned at a position close to the analysis electromagnet 2; the high voltage power supply connectors are electrically connected to the accelerator lens 10, the extractor lens 11, the focus lens 12, the focus X lens 13, the focus Z lens 14, and the output lens 16, respectively, for supplying voltages to these lenses.
Specifically, the width of the ion source outlet slit 15 may be 0.2-0.3mm, preferably 0.2mm, and the distance between the ion source outlet slit 15 and the analysis electromagnet 2 may be 420-440mm, preferably 430 mm. The output lens 16 is connected with the ion source outlet slit 15 through stainless steel support rods, positioning ceramics, fastening bolts and other components, and can be adjusted and corrected before the ion beam enters the magnetic field in the analysis electromagnet, so that the ion transmission efficiency is improved (by more than 90%).
The range of the voltage provided by the high voltage power connector is preferably 0-10KV, that is, the voltage of the high voltage power connector is less than 10KV, or the maximum voltage of the high voltage power connector is 10KV, and the maximum ion acceleration voltage of the ion lens set is 10KV, which can be adjusted according to actual requirements.
In this embodiment, the high voltage power connector includes a plurality of modules, which are a first module, a second module, a third module, a fourth module, a fifth module, and a sixth module (not shown in the figure), wherein: the first module is electrically connected with the accelerator lens 10, and is used for providing voltage to the accelerator lens in a range of 9900 +/-100V, and preferably 9900V; the second module is electrically connected with the extraction electrode lens 11, and is used for providing voltage to the extraction electrode lens in the range of 8600 +/-300V, and the preferable voltage is 8600V; the third module is electrically connected with the focusing lens 12, and is used for providing voltage to the focusing lens in a range of 9000 +/-100V, and the preferred voltage is 9000V; the fourth module is electrically connected with the focusing electrode X lens 13 and is used for providing voltage to the focusing electrode X lens within the range of 5000 +/-100V, and the preferable voltage is 5000V; the fifth module is electrically connected with the focusing electrode Z lens 14 and is used for providing voltage to the focusing electrode Z lens in a range of 450 +/-250V, and the preferred voltage is 450V; the sixth module is electrically connected to the output lens 16 for providing a voltage to the output lens in the range of 1500 ± 250V, preferably 1500V. By providing a plurality of modules to supply voltages to the accelerating pole lens 10, the extracting pole lens 11, the focusing lens 12, the focusing pole X lens 13, the focusing pole Z lens 14, and the output lens 16, respectively, it is possible to facilitate optimal focusing and transmission of the ion beam.
In this embodiment, as shown in fig. 3, the output lens 16 includes four pieces of electrodes, which are a first electrode 161, a second electrode 162, a third electrode 163, and a fourth electrode 164, wherein the first electrode 161 and the second electrode 162 are in a group, and are opposite to each other and in a first direction, and a voltage between the first electrode 161 and the second electrode 162 is preferably 0-190V; the third electrode 163 and the fourth electrode 164 are in another set, and are opposite and in a second direction, and the second direction is perpendicular to the first direction, and the voltage between the third electrode 163 and the fourth electrode 164 is preferably 0-190V.
Compared with the prior art, the analysis electromagnet 2 of the present embodiment is added with the magnetic induction stabilizing coil 22. As shown in fig. 4 and 5, the analyzing electromagnet 2 of the present embodiment includes a yoke 20, a pole piece 21, a pole coil 23, a magnet power source, and a magnetic induction stabilizing coil 22, wherein: the pole shoe 21 is arranged in the magnetic yoke 20, the magnetic pole coil 23 and the magnetic induction stabilizing coil 22 are sleeved on the pole shoe 21, the magnetic induction stabilizing coil 22 is positioned at one end close to a gap of the pole shoe, and the magnetic pole coil 23 is used for generating a magnetic field; the magnetic induction stabilizing coil 22 is used for compensating the magnetic field generated by the magnetic pole coil 23 in a small amplitude in the restarting adjusting process so as to improve the stability of the magnetic field; the magnet power supply is connected with the pole coil 23 respectively and is used for providing stable and adjustable current for the pole coil.
Specifically, the magnetic field center deflection radius (also referred to as "center orbit radius") of the analysis electromagnet 2 may be 200-220mm, preferably 200mm, and compared with the prior art (above 260 mm), the magnetic field center deflection radius is significantly reduced, which is beneficial to reducing the weight of the analysis electromagnet. The material of the yoke 20 and the pole piece 21 is preferably DT4 pure iron. The gap (i.e. air gap) of the pole shoes in the analysis electromagnet 2 may be 12-15mm, preferably 14 mm. The incident angle of the ions output by the transmission ion electron microscope into the analyzing electromagnet 2 is preferably 28 °, and the exit angle of the ions output by the analyzing electromagnet 2 is preferably 30 °. The exit surface pole head in the analysis electromagnet 2 is designed by an arc surface, and the radius r of the arc surface can be 600-700mm, preferably 665mm, so as to improve the ion focusing effect.
The pole coil 23 and the magnetic induction stabilizing coil 22 are preferably both provided with a current density of less than 2A/mm2The low-resistance enameled wire is wound, so that the heating of the winding is reduced, and compared with the prior art, a cooling water machine does not need to be arranged, so that the power consumption of an instrument is reduced. Number of pole coils 23 and magnetic induction stabilizing coils 22Both are two, and both coils are themselves connected in parallel. The magnet power supply is designed by adopting conventional standard components, the output current of the magnet power supply to the magnetic pole coil 23 is preferably 0.2-16A, and the uniformity of the magnetic field generated by the magnetic pole coil 23 is less than 50 ppm.
Through the arrangement, the amplification factor (M) of the analysis electromagnet 2 can reach 1.5, and the precision is high; the continuous stability and adjustability of the magnetic field intensity between 0 and 1.24T can be realized; can meet the accurate measurement of the abundance and abundance ratio of elements in the full mass number range of 3-280 amu.
And the bottom of the analysis electromagnet can be provided with a moving device 24, and the analysis electromagnet can be leveled in the horizontal and vertical directions through the driving of the moving device.
In the present embodiment, the moving device 24 includes a horizontal adjusting unit and a vertical adjusting unit (not shown in the drawings), in which: the horizontal adjusting unit can comprise a horizontal guide rail, and the analysis electromagnet is arranged on the horizontal guide rail and can slide along the horizontal guide rail so as to adjust the position of the analysis electromagnet in the horizontal direction; the vertical adjusting unit can also adopt the same or similar structure with the horizontal adjusting unit, and the detailed description is omitted here to adjust and analyze the position of the electromagnet in the horizontal direction.
Compared with the prior art, as shown in fig. 6, the detector in this embodiment also includes a faraday cup 30, a secondary electron multiplier 31, a deflection electrode 32, a high voltage connector 33, a detector housing (not shown in the figure), and other components, an internal cavity of the detector housing is in a vacuum state, the faraday cup 30, the secondary electron multiplier 31, the deflection electrode 32, and the high voltage connector 33 are disposed in the detector housing, and the wiring manner is the same as that in the prior art, which is not described herein again, but is different therefrom:
the gain factor of the secondary electron multiplier 21 is 106 Faraday cup 20 has an amplifier high resistance value of 1011Omega, can reduce the size of the vacuum cavity (the diameter of the vacuum cavity can reach about 300 mm) in the detector shell as far as possible under the prerequisite of guaranteeing the performance requirement to reduce power consumption.
The number of the secondary electron multipliers 31 may be one or more, and a commercially available daly detector may be used. The number of the faraday cups 30 is plural, for example, more than 8, each faraday cup 30 is arranged in a row in sequence, the receiving slits of each faraday cup are in the same direction to form a focusing plane, wherein the position of the faraday cups 30 in the most intermediate order is fixed, and more specifically, when the number of faraday cups 30 is an odd number, the position of the faraday cup in the middle sequence is fixed, and when the number of faraday cups 30 is even, the position of any one of the two faraday cups 30 in the middle sequence is fixed, for example, when the number of faraday cups 30 is 8, the position of the fourth and/or fifth faraday cup is fixed, the positions of the remaining faraday cups 30 can be moved in the direction of the focal plane to adjust the positions of the respective faraday cups according to the analyzed elements, thereby ensuring sensitivity and accuracy.
The faraday cup 30 has a conventional structure, and is composed of a receiving slit, a suppression electrode, an insulating block, and a housing, and has a rectangular box shape as a whole, one side of the faraday cup is opened for receiving the ion beam, and the other sides are sealed.
In this embodiment, the width of the receiving slit of the faraday cup 30 is preferably 0.8 to 1.0 mm; the range of movement of the position of each remaining faraday cup 30, except for the most intermediate position (e.g., when the number of faraday cups is eight, the most intermediate position refers to the fourth faraday cup and/or the fifth faraday cup), is preferably 0-44 mm; the size of the faraday cup 30 is preferably 12 × 2 × 1 mm; the Faraday cup 30 can be made of stainless steel or high-purity graphite, the adjustment precision of a single Faraday cup 30 can be 10 microns, and the adjustment mode can be adjusted by adopting a stepping motor or manually adjusting by adopting a worm gear guide rail; the angle between the focal plane formed by the arrangement of the individual faraday cups 30 and the main axis of ion transmission of the analyzing electromagnet 2 may be 20-30 deg., preferably 25 deg..
With the above arrangement, when the amplifier of the Faraday cup 30 has a high impedance of 1011When the current is omega, the current detected by the Faraday cup 30 is 6.0 multiplied by 10-14A-2.7×10-10Ion current of A, detectable by a secondary electron multiplier 31(SEM) is as low as 1.6X 10-18Ion current of A。
The mass analyzer system of the embodiment can reduce relevant parameters such as the radius of a central orbit of the analyzing electromagnet, the distance between the ion lens group and the analyzing electromagnet, the distance between the analyzing electromagnet and the detector and the like by adopting the asymmetric ion optical design, so that the structural layout of the whole system is compact, and the overall size and weight of the system are effectively reduced. In addition, by improving the structure composition and parameters of the ion lens group, the analysis electromagnet and the detector, the performances such as resolution (more than 500), ion transmission efficiency (more than 90%) and the like can be improved, isotope analysis of full mass number of 3-280amu in mass number range is realized, power consumption can be reduced, and environmental protection and energy saving are realized.
Example 2
This embodiment discloses a mass analyzer system, which is different from embodiment 1 in that: as shown in fig. 7, the ion lens system further includes a second focusing lens 4 and a zooming lens 5, wherein the second focusing lens 4 is disposed between the ion lens group 1 and the analyzing electromagnet 2, and is used for optimizing the focusing effect of the ion beam output by the ion lens group, improving the flat-top effect, and further improving the transmission efficiency; the zoom lens 5 is disposed between the analyzing electromagnet 2 and the detector 3, and is used for improving the dispersion distance, so as to improve the peak-overlap capability between the plurality of groups of ion beams and the plurality of faraday cup receivers.
Specifically, the second focusing lens 4 is preferably disposed at a position closer to the inlet of the analyzing electromagnet 2, and the zoom lens 5 is preferably disposed at a position closer to the outlet of the analyzing electromagnet 2, it should be noted that, since the second focusing lens 4 and the zoom lens 5 only play a role in optimizing the focusing effect of the ion beam and improving the dispersion of the quality analyzer system, and do not affect the final focused image point (i.e., the faraday cup receiving position) of the ion beam, the second focusing lens 4 and the zoom lens 5 may also be disposed at other positions besides the above-mentioned positions, and may be flexibly selected according to the requirement.
As shown in fig. 8 and 9, the second focusing lens 4 is an electrostatic quadrupole lens, and includes four pole rods 41, where two pole rods 41 are disposed opposite to each other and are located in the same direction (e.g., horizontal direction, i.e., x-axis direction), the other two pole rods 41 are disposed opposite to each other and are located in the other direction (e.g., vertical direction, i.e., y-axis direction), and an included angle between centers of adjacent pole rods 41 and a center of an inscribed circle surrounded by the four pole rods 41 is 90 °. If a positive voltage is applied to the two poles 41 in the horizontal direction, a negative voltage of the same magnitude is applied to the two poles 41 in the vertical direction, whereas if a negative voltage is applied to the two poles 1 in the horizontal direction, a positive voltage of the same magnitude is applied to the two poles 41 in the vertical direction, and the applied voltage is preferably in the range of 0 ± 20V.
The zoom lens 5 may employ any one of a four-stage rod, a six-stage rod, an eight-stage rod, and a twelve-stage rod to perform fine adjustment within ± 5% of the mass dispersion of the ion beam. The zoom lens 5 is applied with a voltage in a manner similar to that of the second focus lens, taking a six-pole lens as an example, which includes six second poles, an x terminal, and a y terminal, one end of each second pole being connected to the x terminal, and the other end of each second pole being connected to the y terminal, and if a positive voltage is applied to the six poles on the x terminal, the six poles on the y terminal apply a negative voltage of the same magnitude, whereas if a negative voltage is applied to the six poles on the x terminal, the six poles on the y terminal apply a positive voltage of the same magnitude, and the applied voltage is preferably in a range of 0 ± 50V.
More specifically, each of the second focus lens 4 and the zoom lens 5 may be a circular pole, a semicircular pole, or any one of a hyperboloid pole, a rod-shaped pole, and a planar pole. If the pole rods are cylindrical pole rods, the radius of each cylindrical pole rod is 1.1-1.2 times of the radius of an inscribed circle surrounded by each pole rod, and the length of each pole rod is not less than 3 times of the radius of the inscribed circle; if the pole is another type of pole, the radius and length of the pole can be designed to be equivalent to the pole (cylindrical pole), and will not be described in detail here.
The mass analyzer system of this embodiment has all the advantages of the mass analyzer system in embodiment 1, and since the second focusing lens and the zoom lens are added, since the second focusing lens can further focus the ions in the X direction and the Y direction before the ions enter the analyzing electromagnet, and the zoom lens can further adjust the mass dispersion distance of the ions mass-separated by the analyzing electromagnet, the receiving efficiency of the detector can be finally improved.
Example 3
This example discloses a mass spectrometer comprising an ion source, a shielded glove box, and the mass analyzer system described in example 1.
Specifically, the mass spectrometer of this embodiment may be a Thermal Ionization Mass Spectrometer (TIMS) or a multi-receiving inductively coupled plasma mass spectrometer (MC-ICP-MS), and the detection process is as follows: ions generated by the ion source are extracted, accelerated, focused and shaped by the ion lens group 1 and then reach the analysis electromagnet 2, ions with different masses are subjected to mass separation in a fan-shaped magnetic field generated by the analysis electromagnet 2, and finally the ions reach the detector 3 for ion beam intensity detection.
The ion lens group 1, the analysis electromagnet 2 and the detector 3 in the mass analyzer system are preferably arranged in sequence from right to left, and compared with the arrangement from left to right in the prior art that the ion lens group 1, the analysis electromagnet 2 and the detector 3 are arranged, the ion source is convenient to seal between the ion source and the shielding glove box because the ion source is opened on the right side.
The mass spectrometer of this embodiment, using the mass analyzer system described in embodiment 1, has the following advantages: the structure layout is compact, the volume is small, and the size of the whole machine can be reduced to 1750 х 1050 х 1600 mm; the weight is light, and the weight of the whole machine can be reduced to 1000 Kg; the power consumption is small, the rated power of the whole machine can be up to 3.5kW, and compared with the prior art, the power is reduced by about half; the resolution ratio is high and can reach more than 500; the ion transmission efficiency is high and can reach more than 90 percent; the magnification (M) can reach 1.5, and isotope analysis of the full mass number of the mass number range of 3-280amu can be realized.
It will be understood that the above embodiments are merely exemplary embodiments taken to illustrate the principles of the present invention, which is not limited thereto. It will be apparent to those skilled in the art that various modifications and improvements can be made without departing from the spirit and substance of the invention, and these modifications and improvements are also considered to be within the scope of the invention.

Claims (11)

1. A mass analyzer system comprises an ion lens group (1), an analyzing electromagnet (2) and a detector (3), and is characterized in that the ion lens group, the analyzing electromagnet and the detector adopt asymmetric structures, the distance between the ion lens group and the analyzing electromagnet is smaller than the distance between the analyzing electromagnet and the detector, the deflection radius of the magnetic field center of the analyzing electromagnet is 200-220mm, and the incident angle of ions output by the ion lens group entering the analyzing electromagnet is smaller than the exit angle of the ions output by the analyzing electromagnet.
2. The mass analyzer system of claim 1, wherein the distance between the ion lens set and the analyzing electromagnet is 450-480mm, the distance between the analyzing electromagnet and the detector is 570-600mm, the incident angle of the analyzing electromagnet is 27-30 °, and the exit angle of the analyzing electromagnet is 29-32 °.
3. A mass analyser system according to claim 1 wherein the ion lens group comprises an accelerating pole lens (10), an extraction pole lens (11), a focusing lens (12), a focusing pole X lens (13), a focusing pole Z lens (14), an ion source exit slit (15), an output lens (16), and a high voltage power connector,
the accelerating pole lens, the extraction pole lens, the focusing pole X lens, the focusing pole Z lens, the ion source outlet slit and the output lens are sequentially arranged, and the output lens is positioned close to the analysis electromagnet;
the high voltage power connector is electrically connected with the accelerating electrode lens, the extraction electrode lens, the focusing electrode X lens, the focusing electrode Z lens and the output lens respectively for providing voltage.
4. A mass analyser system according to claim 3 wherein the high voltage power connector has a voltage of 10KV or less and the ion source exit slit has a width of 0.2 mm.
5. The mass analyzer system of claim 3, wherein the high voltage power connector comprises a plurality of power supply modules, a first module, a second module, a third module, a fourth module, a fifth module, and a sixth module,
the first module is electrically connected with the accelerator lens and is used for providing voltage to the accelerator lens in a range of 9900 +/-100V;
the second module is electrically connected with the extraction electrode lens and is used for providing voltage to the extraction electrode lens within a range of 8600 +/-300V;
the third module is electrically connected with the focusing lens and is used for providing voltage for the focusing lens in a 9000 +/-100V range;
the fourth module is electrically connected with the X lens of the focusing electrode and is used for providing voltage for the X lens of the focusing electrode within the range of 5000 +/-100V;
the fifth module is electrically connected with the focusing pole Z lens and is used for providing voltage for the focusing pole Z lens within a range of 450 +/-250V;
the sixth module is electrically connected with the output lens and used for providing the voltage range for the output lens to be 1500 +/-250V.
6. A mass analyser system according to claim 1 wherein the analysis electromagnet comprises a yoke (20), a pole piece (21), a pole coil (23), and a magnetic induction stabilizing coil (22),
the pole shoe is arranged in the magnetic yoke, the magnetic pole coil and the magnetic induction stabilizing coil are sleeved on the pole shoe, the magnetic induction stabilizing coil is located at one end close to a gap of the pole shoe, the magnetic pole coil is used for generating a magnetic field, and the magnetic induction stabilizing coil is used for compensating the magnetic field generated by the magnetic pole coil.
7. A mass analyser system according to claim 6 wherein the pole piece gap is 12-15mm, and the pole coil and the magnetic induction stabilisation coil each use a current density of less than 2A/mm2Winding the low-resistance enameled wire.
8. The mass analyzer system of claim 1, wherein the number of faraday cups (30) in the detector is eight or more, each faraday cup being sequentially aligned in a row to form a focal plane, wherein the position of the most intermediate faraday cup is fixed and the remaining faraday cups are movable in position along the focal plane.
9. The mass analyzer system of claim 8, wherein the angle between the focal plane and the principal axis of ion transmission of the analyzing electromagnet is 20-30 °, and the faraday cup has a receiving slit width of 0.8-1.0 mm.
10. A mass analyser system according to any one of claims 1-9 further comprising a second focusing lens (4) and a zoom lens (5),
the second focusing lens is arranged between the ion lens group and the analysis electromagnet and is used for optimizing the focusing effect of the ion beam output by the ion lens group;
the zoom lens is arranged between the analysis electromagnet and the detector and used for improving the dispersion distance.
11. A mass spectrometer comprising a mass analyser system as claimed in any one of claims 1 to 10.
CN202210261209.8A 2022-03-16 2022-03-16 Mass analyzer system and mass spectrometer Pending CN114709129A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202210261209.8A CN114709129A (en) 2022-03-16 2022-03-16 Mass analyzer system and mass spectrometer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202210261209.8A CN114709129A (en) 2022-03-16 2022-03-16 Mass analyzer system and mass spectrometer

Publications (1)

Publication Number Publication Date
CN114709129A true CN114709129A (en) 2022-07-05

Family

ID=82168557

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202210261209.8A Pending CN114709129A (en) 2022-03-16 2022-03-16 Mass analyzer system and mass spectrometer

Country Status (1)

Country Link
CN (1) CN114709129A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115763215A (en) * 2022-09-27 2023-03-07 广州聚智科技发展有限公司 Thermal surface ionization mass spectrum structure
CN117990192A (en) * 2024-04-07 2024-05-07 米谱科技(常州)有限公司 Box assembly, balance device and leveling method of balance device

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115763215A (en) * 2022-09-27 2023-03-07 广州聚智科技发展有限公司 Thermal surface ionization mass spectrum structure
CN117990192A (en) * 2024-04-07 2024-05-07 米谱科技(常州)有限公司 Box assembly, balance device and leveling method of balance device
CN117990192B (en) * 2024-04-07 2024-06-04 米谱科技(常州)有限公司 Box assembly, balance device and leveling method of balance device

Similar Documents

Publication Publication Date Title
CN114709129A (en) Mass analyzer system and mass spectrometer
CN106548913A (en) For the device and method of high resolution electron beam imaging
JPS58161237A (en) Mass analyzer
EP2943970B1 (en) Mass spectrometer with optimized magnetic shunt
US6525314B1 (en) Compact high-performance mass spectrometer
CN1816383B (en) Mass spectrometer and related ionizer and methods
US4174479A (en) Mass spectrometer
EP2943971B1 (en) Mass spectrometer with improved magnetic sector
CN109390207B (en) Mass analyzer system with variable mass dispersion using permanent magnets
EP0202117B1 (en) Double focusing mass spectrometers
WO2013067902A1 (en) Broadband ion beam analyzer
JP5521255B2 (en) Magnetic achromatic mass spectrometer with double focusing
Matsuda et al. A new mass spectrometer at Osaka University
JP2003512703A (en) Double focusing mass spectrometer device and method related to the device
CN114899080A (en) Ion mass analyzer and ion implantation apparatus
US9396904B2 (en) Multipole lens, method of fabricating same, and charged particle beam system
CN110176384B (en) Multipole ion guide device with variable number of poles and method for applying radio frequency signal
CN221427669U (en) Focusing transmission lens device for inductively coupled plasma mass spectrometer
CN218769410U (en) Curved ion guide structure
CN117080038B (en) Ion beam analysis magnet structure and ion implantation apparatus
US4843239A (en) Compact double focussing mass spectrometer
JP3264993B2 (en) Ion implanter
Rose Optimization of imaging energy filters for high-resolution analytical electron microscopy
JPS6391945A (en) Ion beam device
Teotia et al. High-homogeneity double-focusing stigmatic analyzer magnet for electromagnetic isotope separator

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination