CN1816383B - Mass spectrometer and related ionizer and methods - Google Patents
Mass spectrometer and related ionizer and methods Download PDFInfo
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- CN1816383B CN1816383B CN200480019344.1A CN200480019344A CN1816383B CN 1816383 B CN1816383 B CN 1816383B CN 200480019344 A CN200480019344 A CN 200480019344A CN 1816383 B CN1816383 B CN 1816383B
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/26—Mass spectrometers or separator tubes
- H01J49/28—Static spectrometers
- H01J49/32—Static spectrometers using double focusing
- H01J49/328—Static spectrometers using double focusing with a cycloidal trajectory by using crossed electric and magnetic fields, e.g. trochoidal type
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D59/00—Separation of different isotopes of the same chemical element
- B01D59/44—Separation by mass spectrography
- B01D59/48—Separation by mass spectrography using electrostatic and magnetic fields
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Abstract
In one embodiment, a miniaturized structure and associated method function as a mass spectrometer or analyzer and may, with modification, function as an ion generator. The miniaturized structure has a pair of generally planar parallel spaced electrodes which have projecting walls cooperating to define an ion generating chamber and an exit aperture. By controlling the electric field which is oriented perpendicular to an applied magnetic field, the ion beam may be separated into a plurality beams based upon mass to charge ratio emerging from the exit of the apparatus and when the apparatus is functioning as a mass spectrometer or analyzer impinges on an ion collector which responsively transmits information to a cooperating processor. Where it is desired to have it function as an ionizer the ion collector disposed adjacent the ion exit is eliminated.
Description
Technical field
The present invention relates to so-called cross(ed) field mass spectrometer and ion generator, it is according to the quality of the Ionized gas particle ratio to electric charge, by the mobile and separating ionised gas particle in electric field that is perpendicular to one another and magnetic field.
Background technology
Mass spectrograph is used for determining gas that the identity of composition material and quantity are early known in the liquid or solid sample.Know, in a vacuum by molecule or atom being converted to the form analysis sample of ion, with ion to the ratio of electric charge separately, and allow the ion bombardment detection device by quality in conjunction with such system.Generally referring to U.S. Patent No. 2882410; 3070951; 3590243; With 4298795.Also can be referring to U.S. Patent No. 4882485 and 4952802.
Usually, mass spectrograph comprises the ion generator intake assembly, wherein receives sample to be analyzed, high-vacuum chamber, and it cooperates with the ion generator inlet, analyzer assembly, it is placed in the high-vacuum chamber and is suitable for receiving ion from ion generator.Detector means is used to determine the sample constituent, its adopt quality to charge ratio as distinguishing characteristics.A kind of by in many known devices is included in the molecule of gaseous sample in the ion generator or the ion that atom is converted into device analysis.
The fixing gatherer and the ramped electric field of cycloidal mass spectrometer use of known prior art once only can only be at a kind of quality to the electric charge ratio.In the spectrometer system of a lot of prior aries, no matter whether ion generator is cycloid, and they are all quite big, and as a result of, has determined the design and the specification of the system that will use therein.
United States Patent (USP) 5304799 discloses a kind of cycloidal mass spectrometer, it has the shell that limits the ion trajectory volume, be used in the ion trajectory volume, setting up the field generator of electric field, with the ion generator that is used to receive the gaseous sample that will analyze and converts them to ion, ion passes orthogonal electric field and magnetic field and collides with gatherer subsequently.This mass spectrograph design has a plurality of different ions quality to the electric charge ratio, and these ions collide on gatherer according to field intensity.Cycloidal mass spectrometer and ion generator Miniaturizable to be providing volume little, the instrument that is easy to carry about with one.
It is known adopting the cross(ed) field mass spectrograph in two types problem analysis.In the identification of molecular wt and macromolecule weight, adopt the cross(ed) field mass spectrograph.In the accurate measurement of fractional isotopic abundance, also adopt the cross(ed) field mass spectrograph.
In relating to the situation of low quality to the electric charge ratio, as helium leak detector and hydrogen analyzer, it is known adopting mass spectrograph.Mass spectrograph adopts in such circumstances, because almost do not disturb in mass range owing to its sensitivity.This analyzer is used in the helium leak analyzer usually, and as sector field mass spectrometer, it is easy to make but poorer performance and usually relatively costly is provided.
Four utmost point analyzers are little and more cheap than magnetic separator, but when near mass range than low side the time, their filter quality reduces.So-called " zero slap shot (blast) " expression is because weak filter characteristic makes the contribution of the particle when four utmost points are not opened.For helium leak detector, for example, the degree of the zero slap shot some effects helium signal of hydrogen is 4amu.
The present invention focuses on the field structure of cycloidal mass spectrometer, and wherein circular motion is forced by rectilinear motion.
Summary of the invention
In one embodiment of the invention, it can be used as mass spectrograph or analyzer, on first and second planes that generate electric field each other, and general parallel electrode has outstanding wall body, and this wall body limits ion generation chamber with the pedestal of the electrode of general closed planar.Vertical orientated by the relative magnetic field of electric field that electrode generates, this magnetic field is taken place well known to a person skilled in the art mode by permanent magnet or electromagnet.Some ion beam leaves by ion outlet the electric charge ratio based on quality, and other particle beams is separated the electric charge ratio based on quality, and remains in the ion generation chamber.Near functionally related with ion outlet ion trap is positioned at, and can cooperate with treating apparatus well known in the art to determine the identity of molecule or atom.Employing does not have the identical device of ion trap can make device be used as quality selectivity ion generator.Relevant method is also revealed.
The equipment of this embodiment and method are constructed to adopt 20amu or littler downhill through special.
An object of the present invention is to provide mass spectrograph, it is particularly suitable for the specific (special) requirements of low quality scope.
Further aim of the present invention provides such mass spectrograph, and wherein electric field is used for separating at the low side of mass range the track of the ion of different quality number, rather than at the high-end high-resolution power that provides of mass range.
Further aim of the present invention provides such mass spectrograph, and wherein actual focus characteristics can be by the approximate replacement of design particular field profile realization in three space dimensions.
Yet another object of the present invention provides such mass spectrograph, and wherein electrode size is little, and is simple in structure and make inexpensive.
Another object of the present invention provides analyzer or ion generator, and its imperfection to magnetic field is a robustness, and required result is not had substantive the interference, and therefore allows to use little, the not expensive magnet of volume.
These and other objects of the present invention will be understood from following more detailed description book of the present invention fully by with reference to the accompanying drawings.
Description of drawings
Fig. 1 is that the particle of lotus positive electricity be not perpendicular to the electric field middle orbit in magnetic field.
Fig. 2 illustrates four expressions with different quality to the track of the ion of electric charge ratio.
Fig. 3 illustrate different quality to track and the position associated collectors before complete cycloid of the ion of electric charge ratio by ionic bombardment.
Fig. 4 illustrates the ion of different starting velocities of relative proximity electrode pair and their track.
Fig. 5 is the expression of the equipotential lines of the electric field that produces of pair of spaced electrodes.
Fig. 6 is the perspective view of the present invention's electrode pair at interval.
Fig. 7 is the perspective view of the electrode among Figure 27 of relative proximity position.
Fig. 8 is that the part of analyzer of the present invention schematically illustrates.
Fig. 9 illustrates analyzer respectively to Figure 11, and its intermediate ion starting point is at x shaft position (Fig. 9), and y shaft position (Figure 10) is gone up different with z shaft position (Figure 11).
Figure 12 illustrates confinement capabilities on the z direction.
Figure 13 illustrates the cross section of analyzer, and the ion beam of four kinds of different low quality to the electric charge ratio wherein arranged.
Figure 14 is similar to Figure 13, but shows the track that doubles with Figure 13 comparison with voltage.
Figure 15 illustrates for having the orbital curve of different quality to 20 kinds of ions of electric charge ratio.
Figure 16 illustrates one group of ion trajectory, and they begin and have different quality to the electric charge ratio from same point.
Figure 17 illustrates the intensity of test gas mixture to the curve of quality to the ratio of electric charge, as being measured by analyzer of the present invention.
Figure 18 (a) and (b) equipotential lines in the virtual plane that analyzer obtains is shown respectively.
Figure 18 (c) (d) and 18 (e) (f) respectively the virtual plane at the varying level place such equipotential lines is shown.
Figure 19 (a) (b) illustrates the equipotential lines of obtaining from first virtual plane, and Figure 19 (c) (d) and (f) equipotential lines obtained of the virtual plane position shown in being illustrated in respectively of Figure 19 (e).
Figure 20 (a) (b), (c), (d), (e), (f) illustrates analyzer respectively, and this analyzer has virtual cutting planes and corresponding electric field equipotential lines three positions.
The specific embodiment
In traditional mass spectrograph, emphasize such feature usually, as the use in " perfection " electric field and magnetic field and quality linear relationship to the electric charge ratio, and separating ranges, as length and angle.The favorable characteristics of extra embodiment is to obtain useful and reliable information, and need not to require best feature mentioned above, particularly about common low-quality molecule at the 20amu order of magnitude, as hydrogen and helium or divalence nitrogen.
The mass spectrometric exploitation of cross(ed) field promptly, has the molecule identity of macromolecule weight and the measurement of fractional isotopic abundance mainly by two alanysis problematic drives.Though these two problems are from the different application according to physics, they can be considered to of equal value.In order to address these problems the high-resolution instrument of having of requirement, if can set up equations of motion and ion trajectory is measurable, then it can suitably design.Because mathematical difficulties can use any field prediction, the therefore boundary condition of exploitation from clearly limiting begins as the electric field and the magnetic field of unanimity, preferably from perfect field wire directly.The magnet and the device that produce magnetic field are the most expensive elements in many mass spectrographs.Along with the requirement of the precision that increases, cost, weight and size also increase.
Only relate to low quality to the electric charge ratio in the useful field of other mass spectrograph.The example of purposes is helium leak detector and hydrogen detector like this.Mass spectrometric advantage is its almost noiseless and sensitivity in this mass range in this specification.Be used in the analyzer in the helium leak detector, the analyzer of the little version form of big analyzer for example, as the sector field mass spectrograph, it is easy to make, but poor-performing.Yet these analyzers are more expensive relatively.
Four utmost point analyzers are littler and cheap than magnetic separators volume, but their filter quality is along with reducing than low side near mass range.So-called zero slap shot is represented because the contribution of particles that weak filter characteristic causes four utmost points not opened.For helium leak detector, this does not also mean that one, and the zero slap shot part of the hydrogen of two and three atomic mass units is disturbed with the helium signal of four atomic mass units.
Mass spectrometric analytical technology generates with sample and introduces technology, ion formation method, or the irrelevant mass spectrum of ion isolation method.Forming characteristic ion when molecule is ionized, is not complete molecule and/or one group of ion of representing the different quality of ionized molecule fragment.When these ions were separated, each ion relative abundance was to the curve formation mass spectrum of quality to electric charge ratio (m/z).Study uses the spectrum information of any other type will be easy to many from mass spectrum identification molecular proportion.Mass spectrum illustrates the quality of molecule and the quality of molecule fragment.Compare other technology, mass spectrograph provides more information about analyte by less sample.Mass spectrograph also is the technology of accurate definite quality.Other technology of comparing, the unique deficiency of mass spectrograph is that sample is consumed; Yet it needs few like this sample, so this is unimportant.
Fig. 1 illustrates the track 100 of particle 102 in consistent electric field E of lotus positive electricity, and this electric field is generally produced by parallel pole 104,106, and consistent magnetic field B is entering on the direction of the page perpendicular to electric field.Magnetic field can be produced by permanent magnet or electromagnet.In Fig. 1 and the figure below all, the known magnet assembly of those skilled in the art does not illustrate.Except these, the direction in magnetic field is by a symbolic representation.According to this symbol, north magnetic pole is always above the drawing plane, and south magnetic pole is below this plane.If do not have primary power from the particle of starting point 110 beginnings, then track is a cycloid.Electrode 104,106 forms perfect capacitor to produce uniform electric field.This is relevant with the interval between them with electrode area 104,106.
This principle is used in the cycloidal mass spectrometer of double focus equipment.Referring to United States Patent (USP) 2882410; 3070951; 3590243; With 4298795.Analyzer is exactly described double focus, if initial energy is not depended on as 112 and 114 in the position, does not also depend on the initial angle of particle, and the condition of starting point is by periodic repetitions here.In Fig. 1 and the discussion below all, will be zero if initial energy does not have different expression.
Fig. 2 illustrates four tracks 120,122,124,126, by quality the electric charge ratio is respectively 1,2, and 3 and 4 ion bombardment is supposed from the starting point between the electrode 114,116 to begin.The spacing of a cycloid, promptly the distance between two of periodic repetitions points is proportional to the ratio m/z of electric charge with quality.Therefore, the interionic distance of m/z=4 equals 4 times of interionic distance of the ion of m/z=1.This is a physical separation effect in the cycloid mass spectrometer.In Fig. 2, ion collision is respectively at gatherer 130,132, on 134,136 behind cycloid, and their discharges here.The electric current that finally enters gatherer is the measurement of quantity of the ion of time per unit impact collector.
The separation of the ion of different m/z ratios does not require the cycloid that flight is complete, and complete cycloid is to realize that the double focus characteristic is necessary.In Fig. 2, just begin when being separated in firm setting in motion.In Fig. 3, gatherer 136,137,138 and 139 are positioned between the electrode 140,144, so that track 150,152,154 and 156 is in such state, promptly for m/z=2, m/z=3, the ion of m/z=4 does not allow complete cycloid.Particle flies in the perfect capacitor of electric field unanimity.The layout remarkable advantages is that the analyzer size is dwindled among Fig. 3.Disadvantageously because track is short, so loss of significance, and since gatherer 137,138 and 139 in the focus outside, so ion beam is broadened.If the ion of identical m/z ratio begins with different energy and different angles, they will be at different position impact collectors.Showed this effect among Fig. 4,10 ion m/z=4 wherein, but in starting point 170 initial energy differences, they fly on different tracks, and cause the ion beam widened, this ion beam is part impact collector 188 only.The result causes extra resolution loss and the sensitivity that reduces.
Among Fig. 4, at substantially parallel electrode 172, point 170 places between 174, the ion that has higher initial rate on the direction of motion is more by the outside of deflection cycloid 180, has ion lower or that shoulder beginning speed accordingly and flies on more close inboard 182 track.Can see of the deflection of the electric field of change in a suitable manner instinctively according to the initial energy counterion of ion.Qualitatively, field intensity becomes stronger in the zone of obviously higher initial energy flight.Then, this with ion focusing to gatherer 188, or as described below focusing on the collector slit, and their initial energies no matter.
Fig. 1 is that ion flight simulation program SIMION 3D V6.0 by national engineering laboratory and Lockheed Idaho technology company produces to Fig. 4.When the edge that limits electrode extended to the border of three-dimensional working space, the electric field of electrode unanimity can easily be simulated.Program supposition electrode infinitely extends so.SIMION is generated the electrode structure of electric field with discovery then, and this can approach is the ideal focusing field of one section cycloid track.
The simplest structure of being found is " non-perfection " capacitor, and it is made up of two parallel plates.It is big that " non-perfection " means that their area is compared in interelectrode gap.These capacitors produce fringing field, and it causes, and field intensity increases near electrode edge.
Among Fig. 5, the limited electrode 190,192 of size is connected to voltage source now, be labeled as respectively+and-.The field that is generated is represented as equipotential lines.At annular section 300, radius of curvature increases, and this is corresponding to the increase of field intensity.Have identical m/z ratio for one group, but at the different ion of starting point 302 initial energies, can select voltage by this way, promptly ion flies over half cycloid 304 and arrives the physics end of electrode zone up to their.
Simple modeling experiment has shown significant focusing trend.On z direction (be positioned at perpendicular to ion trajectory wherein plane), the field curvature direction of mistake can not receive.This speeding-up ion is away from specified path, and loses in testing process.
From planar capacitor, the shape of electrode is passed through continuous approximate precision in simulation process.U-shaped electrode with curvature correction on the z direction replaces plate electrode, adds two panels to the improved electrode of each focus characteristics.Final all sizes change in a plurality of steps to find optimum set.The characteristic of the field that is produced by these electrodes is discussed below.
The net shape of the electrode of preferred form can be seen from Fig. 6.They can be made by the reguline metal of pottery or processing by sheet metal.General construction is made up of first parts 30 that are generally U-shaped, and it has pedestal 312 and two parallel side walls 314,316, and for example panel 320, and it is connected on the U-shaped parts 310.Second electrode 326 that is generally U-shaped has pedestal 328 and two parallel side walls 330,332.Panel 336 also is connected on the electrode 326 that is generally U-shaped.An electrode 326 has two holes 340 and 344, and they will become the entrance and exit of electron beam so that ionized gas molecule or gas atom.Other electrode 310 has slit 350 in panel 320, it will become ion and arrive gatherer outlet before.After electrode 310 and 326 was assembled into suitable holder (holder), this support had the electrical insulator (not shown) of insertion or at electrode 310,326 the air gap is arranged between the final position each other shown in Fig. 7.Among Fig. 7, electrode is insulated, and electrod assembly 310 is separated by little spacing 370,372,374,376 and 378 with the adjacent components of electrode 326.
In this configuration, electrode forms cuboid.The typical sizes of first model is 14 millimeters on the x direction, be 8 millimeters on the y direction, is 7 millimeters on the z direction.The scope of size coupling without limits.The size of sample of another example is 7 millimeters * 4 millimeters * 3.5 millimeters.Because the size of each dimension does not change the ratio of the size on another dimension, major function is unaffected.The voltage that is applied to electrode must reduce the factor that reduces square doubly to obtain analyzer operation identical on the quality.Yet, in actual applications, the influence of warm-up movement, the imperfect and electromagnetism distortion in the manufacturing reduces along with field intensity and becomes more serious.
Finish the configuration of analyzer shown in Fig. 8.Well known to a person skilled in the art that magnet and vacuum chamber do not illustrate in the figure.The mode of ionized gas molecule is to not influence of separator.Yet this analyzer is particularly suitable for electron impact ionization.The current source (not shown) that is connected to filament end points 500,502 is launched electronics by heat radiation.The electromotive force 504 of the filament comparative electrode that is provided is negative, and electronics is accelerated and arrives inlet 340.The electron beam 510 that is produced keeps narrow, and the while is across the internal volume of cuboid, because electronics is parallel to the magnetic field line distribution.Electron beam 510 leaves and collides on electrode 520 through opening 334, and it is connected to comparative electrode 326 (not shown) by terminal 526 is positive electromotive force.
If ionization then takes place greater than atom or molecular ionization energy in the electrical potential difference between filament 504 and the electrode 326.Usually the ionization energy that takes place is 70eV, and wherein majority of gas demonstrates maximum ion efficient.
The ion that is produced by electron beam flies on track 530, and these tracks are half similar cycloids.If electric field is consistent with magnetic field and is perpendicular to one another, the cycloid flight that ion is proofreaied and correct along mathematics.Leave slit 350 and collision at gatherer 534 if the m/z ratio of ion and the condition coupling that is provided by the field that is applied, ion are focused, this is corresponding to sending a signal to related microprocessor (not shown).Ion with lower or higher m/z ratio misses the slit.
As described, ion generator does not discharge the physically opening of ion.The substitute is, the whole zone that produces ion produces leaves ionogenic ion beam, and this zone is the volume of electrode interior electron beam.The imaging characteristic of electric field reduces the influence of beam diameter to resolution ratio.To shown in Figure 13, these illustrate the simulation of analyzer shown in Figure 8 at Fig. 9 for this, and it is of a size of 14 millimeters (x), 7 millimeters (y) and 4 millimeters (z).For 10 ions of m/z=4, starting point is at x shaft position (Fig. 9), and y shaft position (Figure 10) and z shaft position (Figure 11) change.In Fig. 9, ion trajectory 540 covers a little 544, and in having Figure 10 of ion trajectory, it is about 30% that the extension on the y direction reduces, and Figure 11 illustrates orbit distribution influences minimum on the z direction.
Figure 12 shows the confinement capabilities on the z direction.The intermediate ion of Figure 11 shown in figure bundle 560 projects on the y-z plane.Be deflected on the x-y plane of analyzer central authorities before they arrive collector slit position 568 from 30 ions of diverse location 556 beginnings.
Simulated the separation characteristic of low m/z ratio among Figure 13.Four ion beams 570,572,574,576 of m/z ratio from 1 to 4 are from zone 584.For certain voltage that is applied to electrode 310,326 (Fig. 8), the ion (being the ion with m/z=4 among Figure 13) that only has suitable m/z ratio can pass collector slit 586 and also collide on gatherer 590.
Analyzer can use such fact be tuned to other m/z ratio, promptly the z/m reciprocal of m/z is directly proportional with the voltage of required collision collector slit.Double voltage with analyzer m/z=4 among Figure 13 be tuned to m/z=2, this is illustrated among Figure 14, it is since 592 and have track 594,596,598,700.
The track of 20 ions of m/z from 1 to 20 among Figure 15, from 704 to 706.Analyzer is tuned to m/z=4.Can see that the separation in the plane 702 no longer is the linear function of m/z ratio.The field section is being widened extension at low m/z ratio place.
Have the size listed above and the analyzer of 5 millimeters collector slit width for this, available mass range ends at m/z=18, and this is shown in Figure 16.The m/z ratio be 17,18 and 19 ion 720,722 with 724 in 728 beginnings of identical point.If ion generator is tuned to m/z=17, as shown in the curve of this simulation, the ion of m/z=17 passes the centre of collector slit 586 and leaves, and the ion of m/z=16 and m/z=18 can not arrive gatherer 50.
Figure 17 illustrates for comprising hydrogen, helium, and oxygen, the mass spectrum 4m/z=1amu of the detection gaseous compound of nitrogen and argon gas is to m/z=40amu.When low m/z ratio, analyzer provides enough resolution ratio, for example for hydrogen analyzer or helium leak detector.
Figure 18 (a)-(f), 19 (a)-(f) and 20 (a)-(f) illustrate the equipotential lines in the Different Plane in the analyzer.The residing position of the numeral on the right indication virtual plane in the potential energy diagram.
From Figure 18, we draw around the approximate consistent field of the field at center 730 convergences, and this has explained the similitude of the track that illustrates previously at cycloid.The increase of curvature is introduced into the loss that focuses on the compensation energy near the gatherer 732.
Figure 19 illustrates from the ion of z axle extreme position 734,736 beginnings will experience the strong electric field that destroys.When the ion original position is concentrated when being positioned at middle section 740, the track that acquisition occurs above, these middle section 740 place's field intensity are near consistent structure.
Near among Figure 20 (c) the regional 742 confirmation centers electric field is near uniformity.For the limited characteristic that will see among Figure 20 (a), electromotive force is crooked, as ring 744 is seen among Figure 20 (a).
Because simple in structure and physical size is little, analyzer described here can be used as low cost, but high performance ion gun, thereby ion introduced in mass spectrograph.There is not the identical set of gatherer to be had the ability by ion gun provides.If mass spectrograph by suitably be tuned to the m/z position, its quality selectivity stops the most of undesired ion from the spectrometer analysis device.This improves any mass spectrometric resolution ratio.In conjunction with four utmost point wave filters, zero slap shot can be restrained effectively.
Another significance dominance of cuboid design is used as the ion gun of closing.The ion gun of cutting out is connected to low molecule flow point and leads the vacuum of the analyzer of coefficient.As a result of, the pressure in the ion gun can be higher than analyzer, and it increases sensitivity.For this purpose, should be very narrow or even use insulator seal in the gap shown in Fig. 8.Gaseous sample can be by the almost tubule introducing of any electrode position then.
Should be appreciated that, among the embodiment of Fig. 1 to 20, microminiaturized mass spectrograph or analyzer or ion generator provide effective device, it adopts quality by adjusting electric field controls when magnetic field is arranged that the electric charge ratio is determined which type of quality can be launched or be allowed to the ion beam of electric charge ratio and leaves through outlet, and which quality cannot to the ion beam of electric charge ratio.In the countless purposes of this separation equipment and method, leak detection, the leak detection of newborn helium or hydrogen is used this equipment and method.Further, native system is designed to have the system of effective work of part cycloid ion beam.Being particularly suitable for determining to have low-quality material, is 20amu or littler as the order of magnitude.All these can realize adopting simultaneously very little shell.
Yet above for the purpose of explaining has illustrated specific embodiments, obviously, those skilled in the art can not depart from category of the present invention that claims limit and make modification on the multiple details.
Claims (34)
1. mass spectrograph, it comprises:
First electrode, pedestal and two relative sidewalls and a panel with substantial rectangular, described sidewall extends from pedestal along a direction vertical with pedestal, described panel with the plane of described pedestal and described relative sidewall perpendicular in extend the height of panel from pedestal along a described direction part, described panel only is electrically connected with described relative sidewall by described pedestal
Second electrode, has shape with the described first electrode complementation, under described first electrode and described second electrode situation spaced apart from each other, described second electrode makes the pedestal substantial registration of the win electrode and second electrode also parallel with respect to described first electrode placement, and sidewall is adjacent basically with the pedestal opposing ends, panel is then relative, thereby limits rectangular chamber in fact between first electrode and second electrode
Described first and second electrode structures become so that produce electric field betwixt,
Magnetic field generator, it is configured to so that produce the magnetic field of vertical substantially described electric field orientation,
The wall body of described first and second electrodes cooperates the qualification ion to generate chamber,
Ion generator, it is used for ion beam is introduced described mass spectrograph,
Ion outlet, its allow some ion leave described chamber and
Ion trap, its outside and contiguous described ion outlet that is placed in described ion outlet is so that receive described ion by ion outlet.
2. mass spectrograph as claimed in claim 1, wherein
Described first electrode and the described second electrode electric insulation.
3. mass spectrograph as claimed in claim 2, wherein
Described first electrode and second electrode have insulative air gap therebetween.
4. mass spectrograph as claimed in claim 2 also comprises:
Be plugged on the electrically insulating material between described first electrode and second electrode.
5. mass spectrograph as claimed in claim 1, wherein
Described mass spectrograph is configured to so that handle low-molecular-weight ion.
6. mass spectrograph as claimed in claim 5, wherein
Described low molecular weight ions has the molecular weight less than 20amu.
7. mass spectrograph as claimed in claim 1, wherein
Described mass spectrograph is configured to be the ion beam of part cycloid so that handle it.
8. mass spectrograph as claimed in claim 1, wherein
Described first electrode and second electrode cooperate to limit described ion generation chamber, and it has the length of about 7-14 millimeter, the height of the width of about 4-8 millimeter and about 3.5-7 millimeter.
9. mass spectrograph as claimed in claim 1, wherein
Described mass spectrograph is configured to so that as leakage detector.
10. mass spectrograph as claimed in claim 1, wherein
Described mass spectrograph is configured to so that detect the gas of selecting from the group of being made up of helium and hydrogen.
11. mass spectrograph as claimed in claim 1, wherein
Described ion beam is generated by electron impact ionization.
12. an ion generator, it comprises:
First electrode, pedestal and two relative sidewalls and a panel with substantial rectangular, described sidewall extends from pedestal along a direction vertical with pedestal, described panel with the plane of described pedestal and described relative sidewall perpendicular in extend the height of panel from pedestal along a described direction part, described panel only is electrically connected with described relative sidewall by described pedestal
Second electrode, has shape with the described first electrode complementation, under described first electrode and described second electrode situation spaced apart from each other, described second electrode makes the pedestal substantial registration of the win electrode and second electrode also parallel with respect to described first electrode placement, and sidewall is adjacent basically with the pedestal opposing ends, panel is then relative, thereby limits rectangular chamber in fact between first electrode and second electrode
Described first and second electrodes are configured to so that produce electric field betwixt,
Magnetic field generator, it is configured to so that produce the magnetic field of vertical substantially described electric field orientation,
The wall body of described first and second electrodes cooperates the qualification ion to generate chamber,
Ion gun, it is used for ion beam is introduced described ion generator, and ion outlet, and it allows some ion to leave described chamber.
13. ion generator as claimed in claim 12, wherein
Described first electrode and the described second electrode electric insulation.
14. ion generator as claimed in claim 13, wherein
First electrode and second electrode of described electric insulation have the air gap therebetween.
15. ion generator as claimed in claim 13 also comprises:
Be plugged on the electrically insulating material between described first electrode and second electrode.
16. ion generator as claimed in claim 12, wherein
Described ion generator is configured to so that handle low-molecular-weight ion.
17. ion generator as claimed in claim 16, wherein
Described low molecular weight ions has the molecular weight less than 20amu.
18. ion generator as claimed in claim 12, wherein
Described ion generator is configured to be the ion beam of part cycloid so that handle it.
19. ion generator as claimed in claim 12, wherein
Described first electrode and second electrode cooperate to limit described ion generation chamber, and it has the length of about 7-14 millimeter, the height of the width of about 4-8 millimeter and about 3.5-7 millimeter.
20. ion generator as claimed in claim 12, wherein
Described ion generator is configured to so that as leakage detector.
21. ion generator as claimed in claim 12, wherein
Described ion generator is configured so that to detect the gas of selecting from the group of being made of helium and hydrogen.
22. ion generator as claimed in claim 12, wherein
Described ion beam is generated by electron impact ionization.
23. the method for an analytical gas, it comprises:
First and second electrodes spaced apart from each other are provided, each of described first and second electrodes has pedestal, pedestal is orientated substantially parallel and is aligned with each other and separate, and each of first and second electrodes has a panel and a pair of relative sidewall of giving prominence to another electrode from pedestal given prominence to another electrode from pedestal, thereby limit ion generation chamber
Apply electric field to described chamber,
Apply the magnetic field that is basically perpendicular to described electric field orientation to described chamber, the electric charge ratio is set up the separation of described ion and made some ion leave described chamber based on quality to the electric charge ratio according to quality.
24. method as claimed in claim 23, wherein
The low quality ion is adopted described method.
25. method as claimed in claim 24, wherein
Quality is adopted this method less than the ion of 20amu.
26. method as claimed in claim 23, wherein
Based on the quality of described ion to the electric charge ratio, by adjusting the described path of the described ion beam of described electric field influence.
27. method as claimed in claim 23, wherein
Based on part cycloid ion beam path, influence described predetermined quality leaving to the ion of electric charge ratio.
28. method as claimed in claim 23, wherein
Adopt described ion generation chamber, it has the length of about 7-14 millimeter, the height of the width of about 4-8 millimeter and about 3.5-7 millimeter.
29. the method for a speciogenesis ion, it comprises:
First and second electrodes spaced apart from each other are provided, each of described first and second electrodes has pedestal, pedestal is orientated substantially parallel and is aligned with each other and separate, and each of first and second electrodes has a panel and a pair of relative sidewall of giving prominence to another electrode from pedestal given prominence to another electrode from pedestal, thereby limit ion generation chamber
Apply electric field to described chamber,
Apply the magnetic field that is basically perpendicular to described electric field orientation to described chamber,
According to quality to the electric charge ratio set up described ion separation and
Make some ion leave described chamber based on quality to the electric charge ratio.
30. method as claimed in claim 29, wherein
The low quality ion is adopted described method.
31. method as claimed in claim 30, wherein
Quality is adopted this method less than the ion of 20amu.
32. method as claimed in claim 29, wherein
Based on the quality of described ion to the electric charge ratio, by adjusting the described path of the described ion beam of described electric field influence.
33. method as claimed in claim 29, wherein
Based on part cycloid ion beam path, influence described predetermined quality leaving to the ion of electric charge ratio.
34. method as claimed in claim 29, wherein
Adopt described ion generation chamber, it has the length of about 7-14 millimeter, the height of the width of about 4-8 millimeter and about 3.5-7 millimeter.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US10/453,758 | 2003-06-03 | ||
| US10/453,758 US6815674B1 (en) | 2003-06-03 | 2003-06-03 | Mass spectrometer and related ionizer and methods |
| PCT/US2004/017117 WO2004108257A2 (en) | 2003-06-03 | 2004-06-02 | Mass spectrometer and related ionizer and methods |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1816383A CN1816383A (en) | 2006-08-09 |
| CN1816383B true CN1816383B (en) | 2011-08-24 |
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| CN200480019344.1A Expired - Fee Related CN1816383B (en) | 2003-06-03 | 2004-06-02 | Mass spectrometer and related ionizer and methods |
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| US (1) | US6815674B1 (en) |
| EP (1) | EP1638671A4 (en) |
| JP (1) | JP4558722B2 (en) |
| CN (1) | CN1816383B (en) |
| AU (1) | AU2004245031B2 (en) |
| CA (1) | CA2527330C (en) |
| RU (1) | RU2345441C2 (en) |
| WO (1) | WO2004108257A2 (en) |
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| GB0818342D0 (en) * | 2008-10-07 | 2008-11-12 | Science And Technology Facilities Council | Mass discriminator |
| CN101866811B (en) * | 2010-05-28 | 2011-09-28 | 中国航天科技集团公司第五研究院第五一〇研究所 | Ion source of small-sized magnetic deflection mass spectrometer |
| RU2459310C2 (en) * | 2010-08-04 | 2012-08-20 | Федеральное государственное бюджетное образовательное учреждение высшего профессионального образования "Иркутский государственный технический университет" (ФГБОУ ВПО "ИрГТУ") | Method of analysing charged particles based on energy mass and apparatus for realising said method |
| CN102479664A (en) * | 2010-11-30 | 2012-05-30 | 中国科学院大连化学物理研究所 | Flat-type ion mobility spectrum |
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| RU2554104C2 (en) * | 2013-07-22 | 2015-06-27 | Общество с ограниченной ответственностью "Научно - производственная фирма "Прогресс" | Mass-spectrometer analyser of gas leak detector |
| US9240308B2 (en) * | 2014-03-06 | 2016-01-19 | Applied Materials, Inc. | Hall effect enhanced capacitively coupled plasma source, an abatement system, and vacuum processing system |
| US10147593B2 (en) | 2014-11-19 | 2018-12-04 | Dh Technologies Development Pte. Ltd. | Ion sorter |
| RU2670268C1 (en) * | 2017-07-11 | 2018-10-22 | Закрытое акционерное общество Специальное конструкторское бюро "Хроматэк" | Quadrupole mass spectrometer |
| EP3784037A1 (en) * | 2018-04-24 | 2021-03-03 | W.L. Gore & Associates, Inc. | Flexible container for storage and transport of biopharmaceuticals |
| US10879030B2 (en) * | 2018-07-12 | 2020-12-29 | Perkinelmer Health Sciences, Inc. | Dynamic electron impact ion source |
| RU2708637C1 (en) * | 2019-04-03 | 2019-12-10 | федеральное государственное бюджетное образовательное учреждение высшего образования "Иркутский национальный исследовательский технический университет" (ФГБОУ ВО "ИРНИТУ") | Method of analyzing ions by energy, mass and charge and device for its implementation |
| CN111146070B (en) * | 2019-12-25 | 2023-06-16 | 兰州空间技术物理研究所 | Small-size high performance space detection mass spectrometer |
| US11031205B1 (en) | 2020-02-04 | 2021-06-08 | Georg-August-Universität Göttingen Stiftung Öffentlichen Rechts, Universitätsmedizin | Device for generating negative ions by impinging positive ions on a target |
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Also Published As
| Publication number | Publication date |
|---|---|
| WO2004108257A3 (en) | 2005-01-27 |
| CN1816383A (en) | 2006-08-09 |
| RU2345441C2 (en) | 2009-01-27 |
| US6815674B1 (en) | 2004-11-09 |
| RU2005140948A (en) | 2006-07-27 |
| CA2527330A1 (en) | 2004-12-16 |
| JP4558722B2 (en) | 2010-10-06 |
| JP2006526881A (en) | 2006-11-24 |
| EP1638671A2 (en) | 2006-03-29 |
| AU2004245031A1 (en) | 2004-12-16 |
| CA2527330C (en) | 2013-09-24 |
| EP1638671A4 (en) | 2008-01-23 |
| AU2004245031B2 (en) | 2009-03-26 |
| WO2004108257A2 (en) | 2004-12-16 |
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