CN114705357A - Phase-sensitive demodulation correction method for magnetoelastic sensor - Google Patents
Phase-sensitive demodulation correction method for magnetoelastic sensor Download PDFInfo
- Publication number
- CN114705357A CN114705357A CN202210412768.4A CN202210412768A CN114705357A CN 114705357 A CN114705357 A CN 114705357A CN 202210412768 A CN202210412768 A CN 202210412768A CN 114705357 A CN114705357 A CN 114705357A
- Authority
- CN
- China
- Prior art keywords
- phase
- magnetoelastic sensor
- demodulation
- signal
- reference signal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000012937 correction Methods 0.000 title claims abstract description 31
- 238000000034 method Methods 0.000 title claims abstract description 29
- 230000005284 excitation Effects 0.000 claims abstract description 35
- 230000003068 static effect Effects 0.000 abstract description 11
- 238000005259 measurement Methods 0.000 description 7
- 238000009434 installation Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 238000001514 detection method Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000004576 sand Substances 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L25/00—Testing or calibrating of apparatus for measuring force, torque, work, mechanical power, or mechanical efficiency
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/12—Measuring force or stress, in general by measuring variations in the magnetic properties of materials resulting from the application of stress
- G01L1/125—Measuring force or stress, in general by measuring variations in the magnetic properties of materials resulting from the application of stress by using magnetostrictive means
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measuring Magnetic Variables (AREA)
Abstract
The invention provides a phase-sensitive demodulation correction method for a magnetoelastic sensor, and relates to the technical field of sensors. The method comprises the following steps: outputting an excitation signal and a demodulation reference signal, wherein the excitation signal and the demodulation reference signal have the same frequency and the same phase, the excitation signal is used for generating an excitation current and inputting the excitation current into the magnetoelastic sensor, and the demodulation reference signal is used as a reference signal for carrying out phase-sensitive demodulation on the output signal of the magnetoelastic sensor; adjusting the phase of the demodulation reference signal to enable the output signal of the magnetoelastic sensor after phase-sensitive demodulation to be the maximum value; the adjusted phase of the demodulation reference signal is saved, and the phase of the demodulation reference signal is fixed to the adjusted phase. By adjusting the phase of the demodulation reference signal, the output signal of the magnetoelastic sensor only contains the magnitude and the stress direction of the measured force value and is irrelevant to the phase difference, so that the error of phase-sensitive demodulation caused by static impedance change is corrected.
Description
Technical Field
The invention relates to the technical field of sensors, in particular to a phase-sensitive demodulation correction method for a magnetoelastic sensor.
Background
The magnetoelastic sensor is a force measuring sensor based on the inverse magnetostriction effect, and an output force value signal is an amplitude modulation signal by applying alternating-current excitation. The sensor can obtain real force value data through demodulation processing, and the demodulation method mainly comprises detection demodulation and phase-sensitive demodulation. The phase-sensitive demodulation can not only solve amplitude-modulated signals, but also obtain the phase of the signals, and filter out interference, and has more advantages than detection demodulation. In the magnetoelastic sensor, the positive and negative of the output signal represent the stress direction, i.e. the tensile force is a positive value and the pressure is a negative value.
The introduction of phase sensitive demodulation has the negative effect that changes in the static impedance of the sensor change the phase difference, thus changing the demodulated data, i.e. causing measurement errors.
Disclosure of Invention
The present invention is directed to provide a phase-sensitive demodulation correction method for a magnetoelastic sensor to solve the problem of measurement error caused by the static impedance change of the magnetoelastic sensor.
In order to achieve the purpose, the technical scheme adopted by the invention is as follows:
the invention provides a phase-sensitive demodulation correction method for a magnetoelastic sensor, which comprises the following steps:
outputting an excitation signal and a demodulation reference signal, wherein the excitation signal and the demodulation reference signal have the same frequency and the same phase, the excitation signal is used for generating an excitation current and inputting the excitation current into the magnetoelastic sensor, and the demodulation reference signal is used as a reference signal for carrying out phase-sensitive demodulation on the output signal of the magnetoelastic sensor;
adjusting the phase of the demodulation reference signal to enable the output signal of the magnetoelastic sensor after phase-sensitive demodulation to be the maximum value;
the adjusted phase of the demodulation reference signal is saved, and the phase of the demodulation reference signal is fixed to the adjusted phase.
Alternatively, the phase of the demodulation reference signal is updated only when the phase-sensitive demodulation correction is performed again.
Optionally, when the magnetoelastic sensor is calibrated in a laboratory and after field installation is completed, the phase-sensitive demodulation and correction are performed on the phase of the demodulation reference signal, so that the output signal of the magnetoelastic sensor after phase-sensitive demodulation is the maximum value.
Optionally, when the output signal of the magnetoelastic sensor after the phase-sensitive demodulation is the maximum value, the output signal only includes the magnitude and the force-receiving direction of the force value measured by the magnetoelastic sensor, and is independent of the phase difference between the carrier of the amplitude-modulated signal output by the magnetoelastic sensor and the demodulation reference signal.
Optionally, the phase of the demodulation reference signal is adjusted, so that an output signal of the magnetoelastic sensor after phase-sensitive demodulation is a maximum value, specifically representing: the phase of the demodulation reference signal is adjusted so that the cosine of the phase difference is the maximum value.
Optionally, the output excitation signal passes through a power amplifier, and then generates an excitation current to be input to the magnetoelastic sensor.
Optionally, the output signal of the magnetoelastic sensor and the phase-sensitive demodulation reference signal jointly act to demodulate the measured force value signal.
Optionally, the force exerted on the magnetoelastic sensor is determined as a tensile or compressive force depending on the sign of the force value signal.
Optionally, when the force value signal is positive, the force exerted on the magnetoelastic sensor is a pulling force; when the force value signal is negative, the force applied to the magnetoelastic sensor is a pressure.
The beneficial effects of the invention include:
the phase-sensitive demodulation correction method for the magnetoelastic sensor comprises the following steps: outputting an excitation signal and a demodulation reference signal, wherein the excitation signal and the demodulation reference signal have the same frequency and the same phase, the excitation signal is used for generating an excitation current and inputting the excitation current into the magnetoelastic sensor, and the demodulation reference signal is used as a reference signal for carrying out phase-sensitive demodulation on the output signal of the magnetoelastic sensor; adjusting the phase of the demodulation reference signal to enable the output signal of the magnetoelastic sensor after phase-sensitive demodulation to be the maximum value; the adjusted phase of the demodulation reference signal is saved, and the phase of the demodulation reference signal is fixed to the adjusted phase. The phase of the demodulation reference signal is adjusted, so that the output signal of the magnetoelastic sensor only contains the magnitude and the stress direction of the measured force value and is irrelevant to the phase difference, and the error of phase-sensitive demodulation caused by static impedance change is corrected.
Drawings
In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the drawings needed for the embodiments or the prior art descriptions will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art to obtain other drawings without creative efforts.
FIG. 1 is a flow chart of a phase-sensitive demodulation correction method for a magnetoelastic sensor according to an embodiment of the present invention;
fig. 2 is a functional diagram illustrating a phase-sensitive demodulation correction method for a magnetoelastic sensor according to an embodiment of the present invention.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
The introduction of phase sensitive demodulation has the negative effect that changes in the static impedance of the sensor change the phase difference and thus the demodulated data changes, i.e. measurement errors are caused. The method provided by the invention aims to solve the problem of measurement errors caused by static impedance changes of the magnetoelastic sensor in the phase-sensitive demodulation process.
The force value signal measured by the magnetoelastic sensor is represented as UsThe demodulation reference signal is cos omegact, generally, the carrier of the amplitude-modulated signal output by the sensor is the same frequency as the demodulation reference signal, but has a phase difference
The output thus phase-sensitive demodulated is
Phase difference
The method comprises two layers of meanings, firstly, the phase difference can indicate the positive and negative directions of a force value measured by a sensor, the positive value is tensile force, and the negative value is pressure; second, phase difference
The excitation power supply output from the instrument has the same frequency and phase with the demodulation reference signal, but the cable is connected with the sensor in series, and the impedance of the cable has a phase difference
In practical application in an industrial field, a sensor is usually subjected to extended wiring, so that the phase difference in the field is different from the phase difference in calibration of the sensor, namely the static impedance of the magnetoelastic sensor changes, and measurement errors are caused.
Phase difference for avoiding static impedance change of magnetic elastic sensor
The embodiment of the invention provides a phase-sensitive demodulation correction method for a magnetoelastic sensor, which is used for adjusting demodulation through software after calibration and industrial field installation of the sensor are finished respectivelyPhase of reference signal, phase difference
Is a fixed value, so that the force value signal U measured by the magnetoelastic sensor can be restoredsAnd can avoid phase difference
The variation causes measurement errors and it can be determined from the sign of the value whether it is a tensile force or a compressive force.
FIG. 1 is a flow chart of a phase-sensitive demodulation correction method for a magnetoelastic sensor according to an embodiment of the present invention; fig. 2 shows a functional schematic diagram of a phase-sensitive demodulation correction method for a magnetoelastic sensor according to an embodiment of the present invention.
As shown in fig. 1, the present invention provides a phase-sensitive demodulation correction method for a magnetoelastic sensor, the method including:
and step 101, outputting an excitation signal and a demodulation reference signal.
The excitation signal has the same frequency and the same phase as the demodulation reference signal, the excitation signal is used for generating excitation current and inputting the excitation current into the magnetoelastic sensor, and the demodulation reference signal is used as a reference signal for carrying out phase-sensitive demodulation on the output signal of the magnetoelastic sensor.
And 102, adjusting the phase of the demodulation reference signal to enable the output signal of the magnetoelastic sensor after phase-sensitive demodulation to be the maximum value.
And 103, saving the adjusted phase of the demodulation reference signal, and fixing the phase of the demodulation reference signal to the adjusted phase.
By adjusting the phase of the demodulation reference signal, the output signal of the magnetoelastic sensor only contains the magnitude and the stress direction of the measured force value and is irrelevant to the phase difference, so that the error of phase-sensitive demodulation caused by static impedance change is corrected.
Alternatively, the phase of the demodulation reference signal is updated only when the phase-sensitive demodulation correction is performed again.
Optionally, when the magnetoelastic sensor is calibrated in a laboratory and after field installation is completed, the phase-sensitive demodulation and correction are performed on the phase of the demodulation reference signal, so that the output signal of the magnetoelastic sensor after phase-sensitive demodulation is the maximum value.
Optionally, when the output signal of the magnetoelastic sensor after the phase-sensitive demodulation is the maximum value, the output signal only includes the magnitude and the force-receiving direction of the force value measured by the magnetoelastic sensor, and is independent of the phase difference between the carrier of the amplitude-modulated signal output by the magnetoelastic sensor and the demodulation reference signal.
Optionally, the phase of the demodulation reference signal is adjusted, so that an output signal of the magnetoelastic sensor after phase-sensitive demodulation is a maximum value, specifically representing: the phase of the demodulation reference signal is adjusted so that the cosine of the phase difference is the maximum value.
Optionally, the output excitation signal passes through a power amplifier, and then generates an excitation current to be input to the magnetoelastic sensor.
Optionally, the output signal of the magnetoelastic sensor and the phase-sensitive demodulation reference signal jointly act to demodulate the measured force value signal.
Optionally, the force exerted on the magnetoelastic sensor is determined as a tensile or compressive force depending on the sign of the force value signal.
Optionally, when the force value signal is positive, the force exerted on the magnetoelastic sensor is a pulling force; when the force value signal is negative, the force applied to the magnetoelastic sensor is a pressure.
In particular, the magnetoelastic sensor itself bears the weight of the pressure-equalizing plate and the housing, so that there is an unloaded output signal even if the sensor is not subjected to external forces. When the magnetoelastic sensor is used for laboratory precision calibration and after field installation is finished, the phase of the demodulation reference signal is corrected twice respectively to ensure that the phase difference is ensured
The cosine of (a) is a maximum value, i.e.
The output of the magnetoelastic sensor after phase-sensitive demodulation is maximum
I.e. the output signal only contains the magnitude and force direction of the measured force value and the phase difference
Regardless, errors in phase sensitive demodulation due to static impedance variations are corrected. It is emphasized that the two corrections only eliminate the error caused by the static impedance change and do not change the information of the measured force value. The invention can not only restore the force value signal U measured by the magnetoelastic sensorsAnd can avoid phase difference
The variation causes measurement errors, and whether the tensile force or the compressive force is the positive or the negative of the numerical value can be judged. After phase correction, the excitation signal E of the sensor and the phase-sensitive demodulation reference signal R are only at the same frequency but different in phase, and the recorded phase angle Pr is the phase of the reference signal and is fixed. Only when the phase correction is performed, the phase angle Pr of the phase-sensitive demodulation reference signal is updated. As shown in fig. 2, after passing through the power amplifier, the excitation signal E generates an excitation current, which is input to the magnetoelastic sensor, and the output signal of the magnetoelastic sensor and the phase-sensitive demodulation reference signal act together to demodulate the measured force value signal.
The above embodiments are merely illustrative of the technical concept and features of the present invention, and the purpose thereof is to enable those skilled in the art to understand the content of the present invention and implement the present invention, and not to limit the scope of the present invention, and all equivalent changes or modifications made according to the spirit of the present invention should be covered in the scope of the present invention.
Claims (9)
1. A phase sensitive demodulation correction method for a magnetoelastic sensor, the method comprising:
outputting an excitation signal and a demodulation reference signal, wherein the excitation signal has the same frequency and the same phase as the demodulation reference signal, the excitation signal is used for generating an excitation current and is input into the magnetoelastic sensor, and the demodulation reference signal is used as a reference signal for performing phase-sensitive demodulation on an output signal of the magnetoelastic sensor;
adjusting the phase of the demodulation reference signal to enable the output signal of the magnetoelastic sensor after phase-sensitive demodulation to be the maximum value;
saving the adjusted phase of the demodulation reference signal, and fixing the phase of the demodulation reference signal to the adjusted phase.
2. The phase-sensitive demodulation correction method for a magnetoelastic sensor according to claim 1, characterized in that the phase of the demodulation reference signal is updated only when the phase-sensitive demodulation correction is performed again.
3. The phase-sensitive demodulation correction method for the magnetoelastic sensor according to claim 1, wherein the phase-sensitive demodulation correction is performed on the demodulation reference signal respectively when the magnetoelastic sensor is calibrated in a laboratory and after the magnetoelastic sensor is installed in a field, so that the output signal of the magnetoelastic sensor after the phase-sensitive demodulation is maximum.
4. The phase-sensitive demodulation correction method for a magnetoelastic sensor according to claim 1 or 3, wherein when the output signal of the magnetoelastic sensor after the phase-sensitive demodulation is the maximum value, the output signal only includes the magnitude and the force direction of the force value measured by the magnetoelastic sensor, and is independent of the phase difference between the carrier of the amplitude-modulated signal output by the magnetoelastic sensor and the demodulation reference signal.
5. The phase-sensitive demodulation correction method for the magnetoelastic sensor according to claim 4, wherein the phase of the demodulation reference signal is adjusted so that the output signal of the magnetoelastic sensor after phase-sensitive demodulation is a maximum value, which is specifically expressed as: adjusting the phase of the demodulation reference signal so that the cosine of the phase difference is a maximum value.
6. The phase-sensitive demodulation correction method for a magnetoelastic sensor according to claim 1, wherein the output excitation signal is passed through a power amplifier to generate an excitation current to be input to the magnetoelastic sensor.
7. The phase-sensitive demodulation correction method for magnetoelastic sensor according to claim 6, characterized in that the output signal of magnetoelastic sensor and the phase-sensitive demodulation reference signal act together to demodulate the measured force value signal.
8. The phase-sensitive demodulation correction method for a magnetoelastic sensor according to claim 7, characterized in that it is determined whether the force exerted on the magnetoelastic sensor is a tensile force or a compressive force depending on the sign of the force value signal.
9. The phase-sensitive demodulation correction method for a magnetoelastic sensor according to claim 8, characterized in that, when the force value signal is a positive value, the force applied to the magnetoelastic sensor is a tensile force; when the force value signal is negative, the force exerted on the magnetoelastic sensor is a pressure.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210412768.4A CN114705357B (en) | 2022-04-19 | 2022-04-19 | Phase-sensitive demodulation correction method for magnetoelastic sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210412768.4A CN114705357B (en) | 2022-04-19 | 2022-04-19 | Phase-sensitive demodulation correction method for magnetoelastic sensor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN114705357A true CN114705357A (en) | 2022-07-05 |
| CN114705357B CN114705357B (en) | 2024-03-26 |
Family
ID=82174952
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202210412768.4A Active CN114705357B (en) | 2022-04-19 | 2022-04-19 | Phase-sensitive demodulation correction method for magnetoelastic sensor |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN114705357B (en) |
Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE1577011A1 (en) * | 1965-07-19 | 1969-07-10 | Western Electric Co | Process for the mutual bonding of small parts to each other as well as a bonding device for carrying out this process |
| DE3633938A1 (en) * | 1986-10-04 | 1988-04-07 | Licentia Gmbh | Single-phase induction motor having a capacitor auxiliary phase |
| JP2001174263A (en) * | 1999-12-15 | 2001-06-29 | Toyota Motor Corp | Angular-velocity detecting apparatus |
| CN101119082A (en) * | 2007-06-19 | 2008-02-06 | 浙江大学 | Phase transition water cooling temperature control principle based ultra-magnetostriction microdisplacement driver |
| RU2354941C1 (en) * | 2007-09-20 | 2009-05-10 | Федеральное государственное образовательное учреждение Государственная Морская Академия им. адм. С.О. Макарова | Device to measure rotary shaft axial force and rpm |
| CN101454678A (en) * | 2006-06-07 | 2009-06-10 | Abb公司 | Method and device for demodulation of signals |
| CN101975591A (en) * | 2010-09-27 | 2011-02-16 | 上海交通大学 | Integrated magnetic elasticity sensor |
| CN205080194U (en) * | 2015-11-04 | 2016-03-09 | 浙江大学 | Non -contact fluid impedance measurement device based on radial structure |
| CN110579229A (en) * | 2019-07-11 | 2019-12-17 | 国网江苏省电力有限公司徐州供电分公司 | Piezomagnetic sensor detection system based on frequency sweep detection |
| CN114001760A (en) * | 2021-10-29 | 2022-02-01 | 上海玛吉科自动化技术有限公司 | Sensor signal modulation and demodulation method and device |
-
2022
- 2022-04-19 CN CN202210412768.4A patent/CN114705357B/en active Active
Patent Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE1577011A1 (en) * | 1965-07-19 | 1969-07-10 | Western Electric Co | Process for the mutual bonding of small parts to each other as well as a bonding device for carrying out this process |
| DE3633938A1 (en) * | 1986-10-04 | 1988-04-07 | Licentia Gmbh | Single-phase induction motor having a capacitor auxiliary phase |
| JP2001174263A (en) * | 1999-12-15 | 2001-06-29 | Toyota Motor Corp | Angular-velocity detecting apparatus |
| CN101454678A (en) * | 2006-06-07 | 2009-06-10 | Abb公司 | Method and device for demodulation of signals |
| CN101119082A (en) * | 2007-06-19 | 2008-02-06 | 浙江大学 | Phase transition water cooling temperature control principle based ultra-magnetostriction microdisplacement driver |
| RU2354941C1 (en) * | 2007-09-20 | 2009-05-10 | Федеральное государственное образовательное учреждение Государственная Морская Академия им. адм. С.О. Макарова | Device to measure rotary shaft axial force and rpm |
| CN101975591A (en) * | 2010-09-27 | 2011-02-16 | 上海交通大学 | Integrated magnetic elasticity sensor |
| CN205080194U (en) * | 2015-11-04 | 2016-03-09 | 浙江大学 | Non -contact fluid impedance measurement device based on radial structure |
| CN110579229A (en) * | 2019-07-11 | 2019-12-17 | 国网江苏省电力有限公司徐州供电分公司 | Piezomagnetic sensor detection system based on frequency sweep detection |
| CN114001760A (en) * | 2021-10-29 | 2022-02-01 | 上海玛吉科自动化技术有限公司 | Sensor signal modulation and demodulation method and device |
Non-Patent Citations (5)
| Title |
|---|
| NOTOHARA, Y等: "Study on Vibration Suppression Control for Rotary Compressor", IEEJ JOURNAL OF INDUSTRY APPLICATIONS, vol. 10, no. 4, 13 August 2021 (2021-08-13) * |
| 刘晓蒙等: "各向异性磁弹性传感器及其线性度拟合直线研究", 自动化仪表, vol. 41, no. 3, 31 March 2020 (2020-03-31) * |
| 周德强;王华;陈德文;曹丕宇;: "基于磁弹性膜片位置变化对检测信号的影响分析", 传感器与微系统, no. 03, 20 March 2020 (2020-03-20) * |
| 李烨;董秀珍;刘锐岗;尤富生;史学涛;: "磁感应断层成像中的一种高精度同步相位测量方法", 仪器仪表学报, no. 04, 15 April 2009 (2009-04-15) * |
| 李黎明;黄忠全;郑小林;: "基于阻抗原理的磁弹性传感器测试仪设计", 传感器与微系统, no. 12, 20 December 2013 (2013-12-20) * |
Also Published As
| Publication number | Publication date |
|---|---|
| CN114705357B (en) | 2024-03-26 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US7331209B2 (en) | Transducer acceleration compensation with frequency domain amplitude and/or phase compensation | |
| US10545179B2 (en) | Current sensor chip with magnetic field sensor | |
| US10101230B2 (en) | Reduction of non-linearity errors in automotive pressure sensors | |
| CN101846572A (en) | Method for decreasing basic error of pressure sensor | |
| CN103245819A (en) | Method for measuring direct current or direct voltage by adopting magnetic excitation resonant piezoresistive cantilever beam | |
| CN1089161C (en) | Compensating circuit of thin film stress in sensor and method | |
| CN104678340A (en) | Measuring error correction method and system for magnetometer | |
| CN107860403A (en) | A kind of linearisation output intent of mode localization sensor | |
| CN201444169U (en) | Differential Hall unit | |
| CN108036804A (en) | A kind of device adjusted for resistance strain gage output | |
| CN114705357A (en) | Phase-sensitive demodulation correction method for magnetoelastic sensor | |
| CN117147022B (en) | Force sensor nonlinear compensation method and system | |
| CN203785751U (en) | Weighing circuit and electronic scale possessing same | |
| CN115201585A (en) | Sensitivity drift compensation method for MEMS resonant electric field sensor | |
| CN116699223A (en) | Current detection system and method based on TMR sensor | |
| CN104597276A (en) | Device for removing OFFSET from signal, method thereof, and magnetic sensor unit | |
| CN103502775A (en) | Method for correcting the voltage measured across the terminals of a sensor | |
| JPH08128911A (en) | Differential pressure measuring device | |
| CN207991561U (en) | A kind of device adjusted for resistance strain gage output | |
| CN206593749U (en) | A kind of field calibration system for magnetoelectric sensor | |
| CN103080754B (en) | Current sensor | |
| JPS62168030A (en) | Temperature compensating circuit for semiconductor pressure sensor | |
| US6928853B2 (en) | Method and device for the hysteresis correction of measured values for sensors with extensometers | |
| JP3283613B2 (en) | Load cell noise measurement device | |
| CN114689219B (en) | Differential pressure type piezoresistance sensing system and self-testing method thereof |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |