CN117147022B - Force sensor nonlinear compensation method and system - Google Patents
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- G—PHYSICS
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- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/20—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress
- G01L1/22—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges
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Abstract
The invention relates to the technical field of electric digital data processing, in particular to a nonlinear compensation method and a nonlinear compensation system for a force sensor.
Description
Technical Field
The invention relates to the technical field of electric digital data processing, in particular to a nonlinear compensation method and a nonlinear compensation system for a force sensor.
Background
The sensor technology has been widely used in various scenes so far, in practical application, a great amount of data information acquired in scientific research and production processes is collected and converted into electric signals which are easy to transmit and process through a sensor, an output signal of the sensor is usually designed to be in linear relation with a measured physical quantity, but uncertain factors such as external environment interference, internal interference of the sensor and the like exist in actual measurement, and an actual output signal of the sensor is in nonlinear relation with the measured physical quantity, so that a nonlinear compensation method of the sensor is needed, and nonlinear errors of measurement signals can be adjusted, so that the output signal is only related to the measured physical quantity, and the authenticity and accuracy of measurement are ensured. In the prior art, a plurality of groups of test points are mostly adopted, each test point measures a plurality of groups of data, but the experimental sample is large, the compensation precision is not high, the compensation precision can be improved by a method for compensating hardware, the effect of temperature and circuit influence compensation is not considered, a great amount of noise exists in an internal circuit of the force sensor during measurement, and due to the complexity of the noise, the effect is often poor when the nonlinear compensation is performed by only training input and output signals through a network.
The patent application publication No. CN110879922A discloses a six-component decoupling fitting method based on an elastic model, which is characterized in that: firstly, obtaining a six-component force static force calculation relation under the theoretical rigid body assumption, and representing the relation between the output of six unidirectional force sensors and the tested thrust; establishing a second-order nonlinear fitting model, calculating by considering a theoretical six-component force static force relation, and correspondingly compensating the coupling influence of elastic change on three directions under the load of the measured thrust change on the basis of the linear elastic change of the six-component force bench deformation under the micro deformation; and finally, fitting to obtain a thrust calibration constant term coefficient, a primary term coefficient and a secondary term coefficient according to a polynary nonlinear least square fitting theory, and obtaining a calculated value of the measured thrust.
As disclosed in the patent application publication No. CN115408648A, a method, a system, a storage medium and a computing device for nonlinear compensation of a force sensor are disclosed, the traditional LMS algorithm is optimized, the convergence speed and steady-state performance of the LMS algorithm can be optimized by improving a step factor updating function containing controllable parameters, and the input signal and the output signal of the sensor are brought into the optimized LMS algorithm, so that nonlinear compensation of the force sensor can be realized, and peripheral circuits and devices are not required to be added.
The problems proposed in the background art exist in the above patents: the method and the system for compensating the nonlinearity of the force sensor are designed in order to solve the problems that a large number of input and output signals of the force sensor are required to be provided in advance, a network model is trained in advance, the training time is long, the requirement of low energy consumption cannot be met, the nonlinearity compensation of the force sensor for measuring the nonlinearity error and circuit noise caused by the change of a stress electric field and an environmental temperature is not comprehensively considered, and the final compensation precision is not high.
Disclosure of Invention
Aiming at the defects of the prior art, the invention provides a nonlinear compensation method of a force sensor, which comprises the steps of firstly collecting input signals of the force sensor, parameters of an internal circuit of the force sensor, working environment temperature of the force sensor and output signals of the force sensor, secondly carrying out nonlinear compensation on errors of measured output signals of the internal circuit of the force sensor, finally calculating the coupling degree of stress-electric field-temperature, carrying out nonlinear compensation on errors measured by the force sensor caused by temperature, stress and electric field intensity variation, providing a nonlinear compensation system of the force sensor, firstly collecting the input signals of the force sensor, the parameters of the internal circuit of the force sensor, the working environment temperature of the force sensor and the output signals of the force sensor by a measuring module of the force sensor, recording the resistance voltage variation value of the internal circuit of the force sensor, secondly, a polynomial equation which is met by a curve actually output by the force sensor is simulated through a curve fitting model of a circuit error nonlinear compensation module of the force sensor, a nonlinear compensation coefficient which is met by a measuring error of a resistance strain gauge is solved, nonlinear compensation is carried out on a circuit output signal, denoising is carried out on the compensated circuit output signal, finally, the stress-electric field-temperature coupling is calculated according to an input signal force sensor, working environment temperature and an output signal which is subjected to nonlinear compensation of an internal circuit by a force sensor environment temperature-stress-electric field error nonlinear compensation module, and the working environment temperature nonlinear compensation coefficient, the stress nonlinear compensation coefficient, the electric field nonlinear compensation coefficient and the working environment temperature of the force sensor are calculated respectively through radial vector basis function decoupling, the error of force sensor measurement caused by stress and electric field intensity change is compensated for non-linearity.
In order to achieve the above purpose, the present invention provides the following technical solutions:
the nonlinear compensation method of the force sensor comprises the following specific steps:
s1: collecting input signals of the force sensor, internal circuit parameters of the force sensor, working environment temperature of the force sensor and output signals of the force sensor,
s2: non-linear compensation is carried out on the error of the output signal measured by the internal circuit of the force sensor according to the input signal, the output signal and the internal circuit parameters of the force sensor,
s3: calculating the coupling degree of stress-electric field-temperature according to the input signal of the force sensor, the working environment temperature of the force sensor and the output signal subjected to nonlinear compensation of an internal circuit, and carrying out nonlinear compensation on errors of force sensor measurement caused by the change of the working environment temperature, the stress and the electric field intensity;
specifically, the error of the output signal measured by the internal circuit of the force sensor in step S2 includes the nonlinear error of the resistance strain gauge of the internal circuit and the nonlinear error caused by circuit noise, and the specific steps of S2 are as follows:
s2.1: acquiring an input signal and an output signal of a force sensor and the variation of an internal circuit of the force sensor;
s2.2: according to the restriction of the resistance strain gauge of the internal circuit of the force sensor on the measurement precision, the resistance change rate of the strain gauge is in a nonlinear relation, so that nonlinearity exists between a final weighing value and an actual value, a polynomial equation which is met by a curve which is actually output by the force sensor is drawn through a curve fitting die, an ideal output value which is obtained by calculating the actual circuit output value and corresponds to an ideal output curve according to the polynomial equation, a nonlinear compensation coefficient which is met by the measurement error of the resistance strain gauge is calculated, and a calculation formula of the nonlinear compensation coefficient of the error of the resistance strain gauge is as follows:
；
wherein,represents the nonlinear compensation coefficient of the resistance strain gauge error, k represents the resistance number in the circuit, U represents the ideal output of the circuit, and +.>、/>、/>、/>Respectively represents the deformation constant coefficients of the resistance strain gauge,
the actual output of the circuit is represented, and the ideal output of the circuit is calculated by the following formula:
；
wherein,indicating the sensitivity of the ith resistance strain gauge,/-)>Representing poisson's ratio of elastic elements in the force sensor, F representing force sensor input signal,/>The deformation of the resistance strain gauge is represented, and S represents the elastic modulus of the elastic element;
s2.3: the noise of the force sensor circuit comprises thermal noise generated by electronic components and shot noise of measurement output, the noise of the force sensor output signal after nonlinear compensation of the resistance strain gauge error is removed, digital average filtering is adopted, the thermal noise nonlinear error brought by the electronic components is eliminated after extremum is calculated according to the square error among the input signals of the force sensor, spectral normalization processing is adopted according to the band characteristics of the shot noise of the measurement output, and the calculation formula of the noise removing process is as follows:
；
wherein,representing the actual output signal of the force sensor after denoising, < + >>Thermal noise representing electronic components, +.>The shot noise representing the measurement output is calculated by the thermal noise calculation formula of the force sensor:
；
wherein,represents the Boltzmann constant, B represents the thermal noise bandwidth, ">The temperature of the electronic component is indicated,
the shot noise calculation formula of the force sensor measurement output is:
；
wherein,representing the spectral components of the output signal of the force sensor,/->Representing the component average value, < +.>Representing component standard deviation of the force sensor output signal pixel set;
specifically, the step S3 includes the following steps:
s3.1: according to an input signal force sensor of the force sensor, the working environment temperature and an output signal subjected to nonlinear compensation of an internal circuit, stress of an elastic element of the force sensor is calculated, stress-electric field-temperature coupling is calculated, and a coupling calculation formula of the environment temperature, the stress and the electric field is as follows:
；
wherein,indicating the coupling of ambient temperature to stress and electric field, < ->An output signal representing the non-linear compensation of the force sensor via the internal circuit,/->Representing the strain coefficient of the internal circuit of the force sensor, < >>Representing the coefficient of thermal expansion of the elastic element of the force sensor, +.>Represents the cross-sectional area of the elastic element of the force sensor, < >>Representing the saturation Young's modulus of the elastic element of the force sensor, < ->Representing the correlation coefficient between the internal electric field of the force sensor and the ambient temperature curve,/->The environmental temperature change value is represented, E represents the electric field intensity of the internal circuit of the force sensor;
s3.2: decoupling according to the coupling degree of the environment temperature, the stress and the electric field and the radial basis function, respectively calculating a nonlinear compensation coefficient of the working environment temperature, a nonlinear compensation coefficient of the stress and a nonlinear compensation coefficient of the electric field, carrying out nonlinear compensation on errors measured by the force sensor caused by the change of the working environment temperature, the stress and the electric field strength of the force sensor, wherein a calculation formula of the nonlinear compensation coefficient of the working environment temperature of the force sensor is as follows:
；
wherein,nonlinear compensation for representing working environment temperature of force sensorPayment coefficient (I) of the patient>Representing a radius vector basis kernel function;
the stress nonlinear compensation coefficient of the force sensor is calculated by the following formula:
；
wherein,representing a stress nonlinear compensation coefficient of the force sensor;
the calculation formula of the nonlinear compensation coefficient of the force sensor electric field is as follows:
；
wherein,representing the nonlinear compensation coefficient of the force sensor electric field.
A force sensor nonlinear compensation system, comprising:
the sensor comprises a force sensor measuring module, a force sensor circuit error nonlinear compensation module and a force sensor environment temperature-stress-electric field error nonlinear compensation module;
the force sensor measurement module: the method comprises the steps of acquiring a force sensor input signal, a force sensor output signal, a force sensor internal circuit parameter and a force sensor working environment temperature;
the force sensor circuit error nonlinear compensation module is: the nonlinear compensation device is used for carrying out nonlinear compensation on measurement errors caused by an internal circuit in the measurement process of the force sensor;
the sensor environment temperature-stress-electric field error nonlinear compensation module is: the nonlinear compensation method is used for carrying out nonlinear compensation on measurement errors caused by the change of the ambient temperature, stress and electric field intensity in the measuring process of the force sensor;
specifically, the force sensor measurement module includes:
the force sensor device unit is used for measuring the force and comprises a force sensor elastic element and a force sensor resistance strain gauge;
the temperature measuring unit of the force sensor is used for recording the working environment temperature of the force sensor;
a force sensor internal circuit unit for recording a resistance change value of the force sensor internal circuit;
specifically, the force sensor circuit error nonlinear compensation module includes:
the circuit error nonlinear compensation unit is used for carrying out nonlinear compensation on errors caused by the change of the resistance strain gauge during the measurement of the internal circuit of the force sensor;
the noise nonlinear compensation unit is used for carrying out nonlinear compensation on thermal noise caused by the circuit element and shot noise in the measuring process;
specifically, the nonlinear compensation module for the environmental temperature-stress-electric field error of the force sensor comprises:
the environment temperature, stress and electric field coupling calculation unit is used for calculating the coupling of the working environment temperature, stress and electric field intensity of the force sensor;
and the nonlinear compensation unit is used for decoupling the working environment temperature, stress and electric field of the force sensor and compensating nonlinear errors of the side-measuring process caused by the change of the environment temperature, stress and electric field intensity.
A storage medium having instructions stored therein that, when read by a computer, cause the computer to perform the force sensor nonlinearity compensation method.
An electronic device comprising a processor and a storage medium as described above, the processor executing instructions in the storage medium.
Compared with the prior art, the invention has the beneficial effects that:
1. the improved nonlinear compensation method has the advantages of real-time property and easiness in realization, and improves the nonlinear compensation precision;
2. according to the invention, the noise of the force sensor circuit is removed, the pollution possibly generated to the output signal of the force sensor in the noise is identified, the thermal noise generated by electronic components and the shot noise of measurement output are additionally discarded in the process, and the comprehensiveness and efficiency of nonlinear compensation of the force sensor are improved;
3. the invention takes the stress of the force sensor, the coupling between the electric field and the working environment temperature into consideration, respectively performs decoupling, reduces the complexity of the force sensor when performing nonlinear compensation, does not need to increase peripheral equipment and circuits, and has universality.
Drawings
Other features, objects and advantages of the present invention will become more apparent upon reading of the detailed description of non-limiting embodiments, made with reference to the following drawings in which:
FIG. 1 is a flow chart of a method for compensating for non-linearity of a force sensor according to an embodiment of the present invention;
FIG. 2 is a circuit diagram of a Wheatstone bridge within a force sensor in accordance with an embodiment of the present invention;
FIG. 3 is a block diagram of a nonlinear compensation system of a force sensor according to an embodiment of the present invention;
fig. 4 is a diagram of an electronic device of a force sensor according to an embodiment of the present invention.
Detailed Description
The following description of the embodiments of the present invention will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present invention, but not all embodiments.
Example 1
Referring to fig. 1, an embodiment of the present invention is provided: the nonlinear compensation method of the force sensor comprises the following specific steps:
s1: acquiring a force sensor input signal, a force sensor internal circuit parameter, a force sensor working environment temperature and a force sensor output signal;
s2: according to the input signal, the output signal and the internal circuit parameters of the force sensor, nonlinear compensation is carried out on the error of the measurement output signal of the internal circuit of the force sensor;
s3: calculating the coupling degree of stress-electric field-temperature according to the input signal of the force sensor, the working environment temperature of the force sensor and the output signal subjected to nonlinear compensation of an internal circuit, and carrying out nonlinear compensation on errors of force sensor measurement caused by the change of the working environment temperature, the stress and the electric field intensity;
the nonlinear compensation comprises nonlinear compensation of a measuring signal of an internal circuit of the force sensor and nonlinear compensation of a measuring error of the force sensor caused by the ambient temperature;
the error of the measurement output signal of the internal circuit of the force sensor in the step S2 comprises nonlinear error of an internal circuit resistance strain gauge and nonlinear error caused by circuit noise, and the specific steps of the step S2 are as follows:
s2.1: acquiring an input signal and an output signal of a force sensor and the variation of an internal circuit of the force sensor;
s2.2: referring to FIG. 2, a Wheatstone bridge circuit is typically employed within the force sensor, defined by the bridge walls-/>Bridge supply voltage U and bridge output voltage +.>The method comprises the steps of converting resistance value change of a resistance strain gauge into a voltage signal, for a full-bridge type force sensor, increasing the resistance value of the transversely-adhered strain gauge after applying force, reducing a vertical plate, fitting a polynomial equation which is met by a curve actually output by the force sensor through a curve fitting die according to the restriction of the resistance strain gauge of the internal circuit of the force sensor on measurement precision, calculating an ideal output value which corresponds to an ideal output curve according to an actual circuit output value obtained by calculation of the polynomial equation, and calculating a nonlinear compensation coefficient which is met by measurement error of the resistance strain gauge, wherein a calculation formula of the nonlinear compensation coefficient of the resistance strain gauge error is as follows:
；
wherein,representing the nonlinear compensation coefficient of the resistance strain gauge error, k representing the resistance number of the internal circuit of the force sensor, U representing the ideal output of the circuit, and +.>、/>、/>、/>Respectively represents the deformation constant coefficients of the resistance strain gauge,
the actual output of the circuit is represented, and the ideal output of the circuit is calculated by the following formula:
；
wherein,indicating the sensitivity of the ith resistance strain gauge,/-)>Representing poisson's ratio of elastic elements in the force sensor, F representing force sensor input signal,/>The deformation of the resistance strain gauge is represented, and S represents the elastic modulus of the elastic element;
s2.3: the noise of the force sensor circuit comprises thermal noise generated by electronic components and shot noise of measurement output, fixed noise voltage fluctuation exists at two ends of any resistor or conductor, the thermal noise of the electronic components of the force sensor is caused, the shot noise is caused by random emission of electrons or holes, current flowing through potential barriers is caused to randomly fluctuate near the average value of the current, the noise of the force sensor output signal after nonlinear compensation of the resistance strain gauge error is removed, digital average filtering is adopted, the thermal noise nonlinear error caused by the electronic components is eliminated after the extremum is calculated according to the square error among the input signals of the force sensor, spectral normalization processing is adopted according to the band characteristics of the shot noise of the measurement output, and the calculation formula of the noise removal process is as follows:
；
wherein,representing the actual output signal of the force sensor after denoising, < + >>Thermal noise representing electronic components, +.>The shot noise representing the measurement output is calculated by the thermal noise calculation formula of the force sensor:
；
wherein,represents the Boltzmann constant, B represents the thermal noise bandwidth, ">Representing the temperature of the electronic component;
the shot noise calculation formula of the force sensor measurement output is:
；
wherein,representing the spectral components of the output signal of the force sensor,/->Representing the component average value, < +.>Representing component standard deviation of the force sensor output signal pixel set;
the step S3 comprises the following steps:
s3.1: the force detection of the force sensor is started from an elastic element of the force sensor, and the change of voltage signals of the coupling of working environment temperature and an electric field is taken as a research object, so that a simplified multi-field coupling theory suitable for the detection application of the force sensor is established, the key of realizing accurate description of the output signals of the force sensor and the guarantee of precision of the output signals is realized, the influence of the changes of the working environment temperature, the stress and the electric field intensity on the output signals of the force sensor is considered, the stress of the elastic element of the force sensor is calculated according to the input signals of the force sensor, the working environment temperature and the output signals subjected to nonlinear compensation of an internal circuit, the coupling of stress-electric field-environment temperature is calculated, and the coupling calculation formulas of the environment temperature, the stress and the electric field are as follows:
；
wherein,indicating the coupling of ambient temperature to stress and electric field, < ->An output signal representing the non-linear compensation of the force sensor via the internal circuit,/->Representing the strain coefficient of the internal circuit of the force sensor, < >>Representing the coefficient of thermal expansion of the elastic element of the force sensor, +.>Represents the cross-sectional area of the elastic element of the force sensor, < >>Representing the saturation Young's modulus of the elastic element of the force sensor, < ->Representing the correlation coefficient between the internal electric field of the force sensor and the ambient temperature curve,/->The temperature change value of the working environment of the force sensor is represented, and E represents the electric field intensity of an internal circuit of the force sensor;
s3.2: decoupling according to the coupling degree of the environment temperature, the stress and the electric field and the radial basis function, respectively calculating a nonlinear compensation coefficient of the working environment temperature, a nonlinear compensation coefficient of the stress and a nonlinear compensation coefficient of the electric field, carrying out nonlinear compensation on errors measured by the force sensor caused by the change of the working environment temperature, the stress and the electric field strength of the force sensor, wherein a calculation formula of the nonlinear compensation coefficient of the working environment temperature of the force sensor is as follows:
；
wherein,indicating the nonlinear compensation coefficient of the working environment temperature of the force sensor, < ->Representing a radius vector basis kernel function;
the stress nonlinear compensation coefficient of the force sensor is calculated by the following formula:
；
wherein,representing a stress nonlinear compensation coefficient of the force sensor;
the calculation formula of the nonlinear compensation coefficient of the force sensor electric field is as follows:
；
wherein,representing the nonlinear compensation coefficient of the force sensor electric field.
Example 2:
referring to fig. 3, the present invention provides an embodiment: a force sensor nonlinear compensation system, comprising:
the sensor comprises a force sensor measuring module, a force sensor circuit error nonlinear compensation module and a force sensor environment temperature-stress-electric field error nonlinear compensation module;
the force sensor measuring module: the method comprises the steps of acquiring a force sensor input signal, a force sensor output signal, a force sensor internal circuit parameter and a force sensor working environment temperature;
the force sensor circuit error nonlinear compensation module: the nonlinear compensation device is used for carrying out nonlinear compensation on measurement errors caused by an internal circuit in the measurement process of the force sensor;
the nonlinear compensation module of the ambient temperature-stress-electric field error of the force sensor: the nonlinear compensation method is used for carrying out nonlinear compensation on measurement errors caused by the change of the ambient temperature, stress and electric field intensity in the measuring process of the force sensor;
specifically, the force sensor measurement module includes:
the force sensor device unit is used for measuring the force and comprises a force sensor elastic element and a force sensor resistance strain gauge;
the temperature measuring unit of the force sensor is used for recording the working environment temperature of the force sensor;
a force sensor internal circuit unit for recording a resistance change value of the force sensor internal circuit;
specifically, the force sensor circuit error nonlinear compensation module includes:
the circuit error nonlinear compensation unit is used for carrying out nonlinear compensation on errors caused by the change of the resistance strain gauge during the measurement of the internal circuit of the force sensor;
the noise nonlinear compensation unit is used for carrying out nonlinear compensation on thermal noise caused by the circuit element and shot noise in the measuring process;
specifically, the nonlinear compensation module for the environmental temperature-stress-electric field error of the force sensor comprises:
the environment temperature, stress and electric field coupling calculation unit is used for calculating the coupling of the working environment temperature, stress and electric field intensity of the force sensor;
and the nonlinear compensation unit is used for decoupling the working environment temperature, stress and electric field of the force sensor and compensating nonlinear errors of the side-measuring process caused by the change of the environment temperature, stress and electric field intensity.
Example 3:
the storage medium of the embodiment of the invention stores instructions, and when the instructions are read by a computer, the computer is caused to execute the nonlinear compensation method of the force sensor.
Example 4:
referring to fig. 4, an electronic device according to an embodiment of the present invention includes a force sensor elastic element 410, a force sensor circuit 420, a processor 430, a memory 440 and a force sensor signal output display panel 450, where the electronic device may be a computer, a mobile phone, etc.;
specifically, the force sensor elastic element 410 is used to detect the pressure of an external object, the force sensor circuit 420 is used to sense the change of the physical quantity in the force sensor elastic element 410, the force sensor output signal value is calculated based on the change of the physical quantity and is provided to the processor 430, the memory 440 may store operation-related commands and data of elements included in the electronic device, for example, the memory 440 may store instructions which, when executed, cause the processor 430 to perform the operations disclosed in the present specification, the processor 430 may be electrically connected to the elements in the electronic device, and execute the instructions in the memory 440, and the force sensor output signal display panel 450 is used to display the force sensor output signal processed by the processor 430.
Those skilled in the art will appreciate that the present invention may be implemented as a system, method, or computer program product.
The foregoing description is of the preferred embodiment of the present application and is not intended to limit the invention to the particular form disclosed, but on the contrary, the intention is to cover all modifications, equivalents, alternatives, and alternatives falling within the spirit and scope of the invention.
Claims (8)
1. The nonlinear compensation method of the force sensor is characterized by comprising the following steps of:
s1: acquiring a force sensor input signal, a force sensor internal circuit parameter, a force sensor working environment temperature and a force sensor output signal;
s2: according to the input signal, the output signal and the internal circuit parameters of the force sensor, nonlinear compensation is carried out on the error of the measurement output signal of the internal circuit of the force sensor;
s3: calculating the coupling degree of stress-electric field-temperature according to the input signal of the force sensor, the working environment temperature of the force sensor and the output signal subjected to nonlinear compensation of an internal circuit, and carrying out nonlinear compensation on errors of force sensor measurement caused by the change of the working environment temperature, the stress and the electric field intensity;
the error of the internal circuit measurement output signal of the force sensor comprises nonlinear error of an internal circuit resistance strain gauge and nonlinear error caused by noise of the force sensor circuit;
the force sensor circuit noise comprises thermal noise generated by electronic components and shot noise of measurement output;
the step S2 comprises the following steps:
s2.1: acquiring an input signal and an output signal of a force sensor and the variation of an internal circuit of the force sensor;
s2.2: according to the restriction of the resistance strain gauge of the internal circuit of the force sensor on the measurement precision, a polynomial equation which is satisfied by the actual output curve of the force sensor is simulated through a curve simulation module, the nonlinear compensation coefficient which is satisfied by the measurement error of the resistance strain gauge is calculated according to the actual circuit output value which is calculated by the polynomial equation and the ideal output value which corresponds to the ideal output curve, and the calculation formula of the nonlinear compensation coefficient of the error of the resistance strain gauge is as follows:
；
wherein,representing the nonlinear compensation coefficient of the resistance strain gauge error, k representing the resistance number of the internal circuit of the force sensor, U representing the ideal output of the circuit, and +.>、/>、/>、/>Respectively represent the deformation constant coefficient of the resistance strain gauge, < ->The actual output of the circuit is represented, and the ideal output of the circuit is calculated by the following formula:
；
wherein,indicating the sensitivity of the ith resistance strain gauge,/-)>Representing poisson's ratio of elastic elements in the force sensor, F representing force sensor input signal,/>The deformation of the resistance strain gauge is represented, and S represents the elastic modulus of the elastic element;
s2.3: denoising the output signal of the force sensor after nonlinear compensation of the resistance strain gauge error, adopting digital average filtering, solving the extreme value and then eliminating the nonlinear error of thermal noise brought by electronic components according to the square error between the input signals of the force sensor, and adopting spectral normalization processing according to the band characteristics of shot noise of measurement output, wherein the calculation formula of the denoising process is as follows:
；
wherein,representing the actual output signal of the force sensor after denoising, < + >>Thermal noise representing electronic components, +.>The shot noise representing the measurement output is calculated by the thermal noise calculation formula of the force sensor:
；
wherein,represents the Boltzmann constant, B represents the thermal noise bandwidth, ">Representing the temperature of the electronic component;
the shot noise calculation formula of the force sensor measurement output is:
；
wherein,representing the spectral components of the output signal of the force sensor,/->Representing the component average value, < +.>Representing component standard deviation of the force sensor output signal pixel set;
the step S3 comprises the following steps:
s3.1: according to an input signal force sensor of the force sensor, the working environment temperature and an output signal subjected to nonlinear compensation of an internal circuit, stress of an elastic element of the force sensor is calculated, stress-electric field-temperature coupling is calculated, and a coupling calculation formula of the environment temperature, the stress and the electric field is as follows:
；
wherein,indicating the coupling of ambient temperature, stress and electric field, < >>An output signal representing the non-linear compensation of the force sensor via the internal circuit,/->Representing the strain coefficient of the internal circuit of the force sensor, < >>Representing the coefficient of thermal expansion of the elastic element of the force sensor, +.>Represents the cross-sectional area of the elastic element of the force sensor, < >>Representing the saturated young's modulus of the force sensor elastic element,representing the correlation coefficient between the internal electric field of the force sensor and the ambient temperature curve,/->The temperature change value of the working environment of the force sensor is represented, and E represents the electric field intensity of an internal circuit of the force sensor;
s3.2: decoupling is carried out according to the coupling degree of the environment temperature, the stress and the electric field and the radial basis function, and nonlinear compensation is carried out on errors measured by the force sensor caused by the change of the working environment temperature, the change of the stress and the change of the electric field intensity.
2. The force sensor nonlinear compensation system is realized based on the force sensor nonlinear compensation method according to claim 1, and is characterized by comprising a force sensor measurement module, a force sensor circuit error nonlinear compensation module and a force sensor environment temperature-stress-electric field error nonlinear compensation module;
the force sensor measuring module is used for acquiring force sensor input signals, force sensor output signals, force sensor internal circuit parameters and force sensor working environment temperature;
the force sensor circuit error nonlinear compensation module is used for carrying out nonlinear compensation on measurement errors caused by internal circuit changes in the force sensor measurement process;
the nonlinear compensation module of the environmental temperature-stress-electric field error of the force sensor is used for carrying out nonlinear compensation on measurement errors caused by temperature change, stress change and electric field intensity change of the working environment of the force sensor in the measuring process.
3. The force sensor non-linearity compensation system of claim 2, wherein the force sensor measurement module comprises:
the force sensor device unit is used for measuring the force;
and the internal circuit unit of the force sensor is used for recording the resistance change value of the internal circuit of the force sensor.
4. The force sensor nonlinear compensation system in accordance with claim 3, wherein said force sensor device unit specifically comprises: force sensor elastic element and force sensor resistance strain gage.
5. The force sensor non-linearity compensation system of claim 2, wherein the force sensor circuit error non-linearity compensation module comprises:
the circuit error nonlinear compensation unit is used for carrying out nonlinear compensation on the error of the deformation of the resistance strain gauge measured by the internal circuit of the force sensor;
and the noise nonlinear compensation unit is used for carrying out nonlinear compensation on thermal noise caused by the circuit element and shot noise in the measuring process.
6. The force sensor nonlinear compensation system of claim 2, wherein the force sensor ambient temperature-stress-electric field error nonlinear compensation module comprises:
the environmental temperature, stress and electric field coupling calculation unit is used for calculating the coupling of the environmental temperature of the force sensor to the internal stress and electric field of the force sensor;
and the nonlinear compensation unit is used for decoupling the working environment temperature, stress and electric field of the force sensor and compensating nonlinear errors of the side-measuring process caused by the change of the environment temperature, stress and electric field intensity.
7. A storage medium having instructions stored therein which, when read by a computer, cause the computer to perform the force sensor nonlinearity compensation method of claim 1.
8. An electronic device comprising a processor and the storage medium of claim 7, the processor executing instructions in the storage medium.
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