CN114700684A - Processing technology of special-shaped structural part of IC equipment - Google Patents
Processing technology of special-shaped structural part of IC equipment Download PDFInfo
- Publication number
- CN114700684A CN114700684A CN202111543026.7A CN202111543026A CN114700684A CN 114700684 A CN114700684 A CN 114700684A CN 202111543026 A CN202111543026 A CN 202111543026A CN 114700684 A CN114700684 A CN 114700684A
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- structural part
- milling
- processing
- numerical control
- allowance
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- 238000005516 engineering process Methods 0.000 title claims abstract description 8
- 238000003801 milling Methods 0.000 claims description 35
- 238000000034 method Methods 0.000 claims description 24
- 238000003825 pressing Methods 0.000 claims description 5
- 238000010438 heat treatment Methods 0.000 claims description 4
- 238000009499 grossing Methods 0.000 claims description 3
- 238000002360 preparation method Methods 0.000 claims 1
- 238000003754 machining Methods 0.000 abstract description 10
- 239000000463 material Substances 0.000 abstract description 8
- 239000004065 semiconductor Substances 0.000 abstract 2
- 238000007789 sealing Methods 0.000 abstract 1
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000005452 bending Methods 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 230000008520 organization Effects 0.000 description 1
- 238000007514 turning Methods 0.000 description 1
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Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23P—METAL-WORKING NOT OTHERWISE PROVIDED FOR; COMBINED OPERATIONS; UNIVERSAL MACHINE TOOLS
- B23P15/00—Making specific metal objects by operations not covered by a single other subclass or a group in this subclass
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23C—MILLING
- B23C3/00—Milling particular work; Special milling operations; Machines therefor
Abstract
The invention relates to a processing technology of a semiconductor equipment structural part. The structural member is a supporting structural member of semiconductor equipment parts, has a special structure and is a special-shaped member. The material is AL6061, the middle of the main body is a through circle, the periphery of the main body is provided with stations such as a side window, a sunken groove and the like, the upper surface and the lower surface of the main body are provided with sealing grooves, and an opening is arranged above the shape of one side of the main body. The invention needs to be divided into a combination mode of rough machining and finish machining when machining the structural part. The invention realizes high flatness and parallelism precision of the structural part; the structural part has almost no deformation and can meet the design requirement.
Description
Technical Field
The invention belongs to the technical field of machine manufacturing, and particularly relates to a processing technology of an IC (integrated circuit) equipment special-shaped structural part, which is a key part in a reaction cavity.
Background
With the rapid development and popularization of electronic integrated circuits, smart manufacturing, the demand for IC equipment is increasing. The part plays a key role in wafer manufacturing, and along with the continuous development of the IC equipment industry, the problem that the processing precision is not high also exists in the existing IC equipment special-shaped structural part. The structural part is a frame special-shaped part structure, and the flatness and parallelism precision are required to be high; the material is AL6061, and the structure is made by the processing of monoblock square stock, and the defective material volume of getting rid of is big, and it causes deformation easily.
Disclosure of Invention
The invention aims to solve the problem that the IC equipment is a processing technology of an IC equipment special-shaped structural part, and meets the requirements of special-shaped parts on dimensional accuracy and form and position tolerance.
In order to achieve the purpose, the invention adopts the technical scheme that:
a processing technology of an IC equipment special-shaped structural part aims at the problems that an opening is formed in the shape of one side above the special-shaped structural part, and the structural part is easy to deform and vibrate in the processing process;
the adopted processing steps are as follows:
firstly, carrying out numerical control milling, wherein the shape of a side top structural part and the upper surface of the milled structural part are subjected to removal amount limiting, the size of milled blank is ensured to meet the requirement of follow-up allowance, and the planeness after milling is required;
secondly, performing numerical control milling, milling the other side of the structural member with the visible light side of the structural member facing downwards as a reference, leaving allowance on one side of the total thickness, and processing an upper threaded hole of the process ring;
thirdly, performing numerical control milling, reversely milling the structural part on the tool through a process threaded hole, roughly milling the inner appearance of the structural part, reserving allowance, and processing the structural part and the process ring into a whole;
fourthly, performing heat treatment, namely releasing the internal processing stress of the structural part at high temperature to reduce subsequent deformation;
fifthly, carrying out numerical control milling, finishing the appearance of the side top structural part, and reserving allowance to require flatness;
sixthly, carrying out numerical control milling, reversely holding the structural part on the tool through a process threaded hole, and finely milling each station on the upper surface and the side surface of the structural part to reach the final size;
seventhly, carrying out numerical control milling, clamping a pressing plate, removing allowance of a reverse surface of the structural part and a process ring, and processing each station and inner model of the surface to reach the final size of the drawing;
and eighthly, performing bench work, smoothing the joint cutter and removing burrs at all sharp corners.
The invention has the advantages that the flatness and the parallelism precision of the structural part are high; the structural part has almost no deformation and can meet the design requirement.
Drawings
Fig. 1 is a schematic view of assembly of a structural member and a tool.
Fig. 2 is a schematic view of the structure and the tool.
Fig. 3 is a schematic view of the structure.
Detailed Description
The present invention will be described in detail with reference to the accompanying reference numerals.
Referring to fig. 1-3, the process of the present invention is specified for a typical IC device structure, which has strict requirements on frame type, dimensional accuracy, etc., and is typically a special-shaped member.
A processing technology of an IC equipment special-shaped structural part aims at the problems that an opening is formed in the shape of one side above the special-shaped structural part, and the structural part is easy to deform and vibrate in the processing process;
the adopted processing steps are as follows:
firstly, carrying out numerical control milling, milling the appearance of the side top structural part 1, limiting the removal amount, ensuring that the size of the milled blank meets the requirement of follow-up allowance, and requiring the planeness after milling.
And secondly, performing numerical control milling, namely milling the other surface of the structural member 1 by taking the visible light surface of the structural member 1 as a reference, leaving allowance on the single surface of the total thickness, wherein the allowance value is between 1 and 2mm, preferably 1.5mm, and processing the process ring 2 and the threaded hole.
And thirdly, performing numerical control milling, reversely positioning the structural part 1 on a tool through a process threaded hole (the tool comprises a tool plate 3 and a zero point positioning seat 4 and can realize repeated positioning, roughly milling the inner appearance of the structural part 1, reserving allowance, and processing the structural part 1 and the process ring into a whole, wherein the allowance is between 1mm and 3mm, and preferably 2 mm.
And fourthly, performing heat treatment, and reducing finish machining deformation by releasing the internal machining stress of the structural part 1 at high temperature.
And fifthly, carrying out numerical control milling, finishing the appearance of the side top structural part 1, finishing the reference surface, and reserving allowance, wherein the allowance value is between 0.2mm and 0.8mm, preferably 0.5mm, and the flatness is required.
And sixthly, carrying out numerical control milling, reversely turning the structural part 1 to the tool through the technical threaded hole, and finely milling the stations on the upper surface and the side surface of the structural part 1 to reach the final size of the drawing.
And seventhly, carrying out numerical control milling, clamping a pressing plate, removing the allowance of the reverse surface of the structural part 1 and a process ring, and processing each station and the inner shape of the surface to reach the final size of the drawing.
And eighthly, performing bench work, smoothing the joint cutter and removing burrs at all sharp corners.
Examples
1: the structural part rough material is square stock, the material is AL6061, and the structural part needs to be roughly machined and finely machined due to the fact that the structural part rough material needs to be machined into the shape shown in the attached drawing 3, the material removal rate is high, and deformation is large.
2: in order to ensure the precision dimensional tolerance such as flatness, parallelism and the like, a structural part is clamped by using a reverse handle tool, a reverse handle hole which can be directly utilized is not formed in the surface of the structural part, an inner mould is processed into a process ring by utilizing residual materials, and the reverse handle is realized by making the process hole in the ring.
3: and performing rough machining, and estimating and analyzing a deformation value generated during rough machining of the structural member to ensure the controllability of rough machining allowance.
4: because numerical control milling processing can make the stress release of structure spare thereby bring bigger deformation, need carry out heat treatment, stabilize internal organization structure, guarantee to warp controllable.
5: the purpose of utilizing side top clamping to finish the datum plane is to ensure that the structural member is processed under the condition of no pressure, thereby ensuring the precision of the repaired surface.
6: during fine machining, stations capable of being machined are machined in place as far as possible by adopting one-time clamping, the size machined in the same sequence can meet the design requirement to the maximum extent, and the process is very critical.
7: when the process ring is removed, the side edge of the cutter is used for milling, the deformation controlled by the minimum cutting force is realized, the four corners of the pressing plate pressing structural part are removed with the allowance, and meanwhile, the requirement of thickness tolerance is met
8: and (5) ending by a fitter, and removing sharp-angled burrs generated after machining.
The process explains how to control deformation, reserve allowance and process the special-shaped parts of the frames, and aims to ensure that the parts can be processed with less bending and meet the processing requirement more quickly.
Claims (1)
1. A processing technology of an IC equipment special-shaped structural part aims at the problems that an opening is formed in the shape of one side above the special-shaped structural part, and the structural part is easy to deform and vibrate in the processing process; it is characterized in that the preparation method is characterized in that,
the adopted processing steps are as follows:
firstly, carrying out numerical control milling, wherein the shape of a side top structural part and the upper surface of the milled structural part are subjected to removal amount limiting, the size of milled blank is ensured to meet the requirement of follow-up allowance, and the planeness after milling is required;
secondly, performing numerical control milling, milling the other side of the structural member with the visible light side of the structural member facing downwards as a reference, leaving allowance on one side of the total thickness, and processing an upper threaded hole of the process ring;
thirdly, performing numerical control milling, reversely milling the structural part on the tool through a process threaded hole, roughly milling the inner appearance of the structural part, reserving allowance, and processing the structural part and the process ring into a whole;
fourthly, performing heat treatment, namely releasing the internal processing stress of the structural part at high temperature to reduce subsequent deformation;
fifthly, carrying out numerical control milling, finishing the appearance of the side top structural part, and reserving allowance to require flatness;
sixthly, carrying out numerical control milling, reversely holding the structural part on the tool through a process threaded hole, and finely milling each station on the upper surface and the side surface of the structural part to reach the final size;
seventhly, carrying out numerical control milling, clamping a pressing plate, removing allowance of a reverse surface of the structural part and a process ring, and processing each station and inner model of the surface to reach the final size of the drawing;
and eighthly, performing bench work, smoothing the joint cutter and removing burrs at all sharp corners.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111543026.7A CN114700684B (en) | 2021-12-16 | 2021-12-16 | Processing technology of special-shaped structural member of IC equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111543026.7A CN114700684B (en) | 2021-12-16 | 2021-12-16 | Processing technology of special-shaped structural member of IC equipment |
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| Publication Number | Publication Date |
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| CN114700684A true CN114700684A (en) | 2022-07-05 |
| CN114700684B CN114700684B (en) | 2024-04-12 |
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Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102006011304A1 (en) * | 2006-03-11 | 2007-09-13 | Thielenhaus Technologies Gmbh | Workpiece finish-processing method, involves following diminishing function by preset value for force based on workpiece removal in complete finish processing phase such that feed speed is decreased diminishingly during phase |
| US20140238099A1 (en) * | 2011-10-07 | 2014-08-28 | Babasaheb Neelkanth Kalyani | Process for Making Forged and Machined Components |
| CN104097033A (en) * | 2014-06-30 | 2014-10-15 | 什邡市明日宇航工业股份有限公司 | Manufacturing process for integral irregular welding box section of advanced training machine |
| CN104924040A (en) * | 2015-07-03 | 2015-09-23 | 湖北三江航天红阳机电有限公司 | Plate-type structural component machining method |
| CN107511642A (en) * | 2017-09-05 | 2017-12-26 | 中国航空工业集团公司洛阳电光设备研究所 | A kind of numerical-control processing method of low rigid interrupted cut precision rotating class part |
| CN108994543A (en) * | 2018-08-24 | 2018-12-14 | 沈阳富创精密设备有限公司 | A kind of processing technology of IC equipment configuration part |
| CN109139869A (en) * | 2018-10-29 | 2019-01-04 | 金华市凯圣机械有限公司 | A kind of special-shaped thin wall part spragging gear and its manufacturing method |
| CN109623264A (en) * | 2018-10-30 | 2019-04-16 | 沈阳富创精密设备有限公司 | A kind of process for processing PVDF, VIRGIN material parts |
| CN110877188A (en) * | 2018-09-05 | 2020-03-13 | 中航贵州飞机有限责任公司 | Machining method for airplane box part |
| CN112570986A (en) * | 2020-10-27 | 2021-03-30 | 沈阳富创精密设备股份有限公司 | Machining process of thin-wall annular part of IC (integrated circuit) equipment |
-
2021
- 2021-12-16 CN CN202111543026.7A patent/CN114700684B/en active Active
Patent Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102006011304A1 (en) * | 2006-03-11 | 2007-09-13 | Thielenhaus Technologies Gmbh | Workpiece finish-processing method, involves following diminishing function by preset value for force based on workpiece removal in complete finish processing phase such that feed speed is decreased diminishingly during phase |
| US20140238099A1 (en) * | 2011-10-07 | 2014-08-28 | Babasaheb Neelkanth Kalyani | Process for Making Forged and Machined Components |
| CN104097033A (en) * | 2014-06-30 | 2014-10-15 | 什邡市明日宇航工业股份有限公司 | Manufacturing process for integral irregular welding box section of advanced training machine |
| CN104924040A (en) * | 2015-07-03 | 2015-09-23 | 湖北三江航天红阳机电有限公司 | Plate-type structural component machining method |
| CN107511642A (en) * | 2017-09-05 | 2017-12-26 | 中国航空工业集团公司洛阳电光设备研究所 | A kind of numerical-control processing method of low rigid interrupted cut precision rotating class part |
| CN108994543A (en) * | 2018-08-24 | 2018-12-14 | 沈阳富创精密设备有限公司 | A kind of processing technology of IC equipment configuration part |
| CN110877188A (en) * | 2018-09-05 | 2020-03-13 | 中航贵州飞机有限责任公司 | Machining method for airplane box part |
| CN109139869A (en) * | 2018-10-29 | 2019-01-04 | 金华市凯圣机械有限公司 | A kind of special-shaped thin wall part spragging gear and its manufacturing method |
| CN109623264A (en) * | 2018-10-30 | 2019-04-16 | 沈阳富创精密设备有限公司 | A kind of process for processing PVDF, VIRGIN material parts |
| CN112570986A (en) * | 2020-10-27 | 2021-03-30 | 沈阳富创精密设备股份有限公司 | Machining process of thin-wall annular part of IC (integrated circuit) equipment |
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| CN114700684B (en) | 2024-04-12 |
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