CN114697820B - Vibrating diaphragm, sound generating device and microphone assembly - Google Patents
Vibrating diaphragm, sound generating device and microphone assembly Download PDFInfo
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- CN114697820B CN114697820B CN202210351818.2A CN202210351818A CN114697820B CN 114697820 B CN114697820 B CN 114697820B CN 202210351818 A CN202210351818 A CN 202210351818A CN 114697820 B CN114697820 B CN 114697820B
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Classifications
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- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R7/00—Diaphragms for electromechanical transducers; Cones
- H04R7/02—Diaphragms for electromechanical transducers; Cones characterised by the construction
- H04R7/04—Plane diaphragms
- H04R7/06—Plane diaphragms comprising a plurality of sections or layers
- H04R7/10—Plane diaphragms comprising a plurality of sections or layers comprising superposed layers in contact
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R31/00—Apparatus or processes specially adapted for the manufacture of transducers or diaphragms therefor
- H04R31/003—Apparatus or processes specially adapted for the manufacture of transducers or diaphragms therefor for diaphragms or their outer suspension
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R9/00—Transducers of moving-coil, moving-strip, or moving-wire type
- H04R9/02—Details
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R9/00—Transducers of moving-coil, moving-strip, or moving-wire type
- H04R9/06—Loudspeakers
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R9/00—Transducers of moving-coil, moving-strip, or moving-wire type
- H04R9/08—Microphones
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R2231/00—Details of apparatus or processes specially adapted for the manufacture of transducers or diaphragms therefor covered by H04R31/00, not provided for in its subgroups
- H04R2231/001—Moulding aspects of diaphragm or surround
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R2307/00—Details of diaphragms or cones for electromechanical transducers, their suspension or their manufacture covered by H04R7/00 or H04R31/003, not provided for in any of its subgroups
- H04R2307/023—Diaphragms comprising ceramic-like materials, e.g. pure ceramic, glass, boride, nitride, carbide, mica and carbon materials
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R2307/00—Details of diaphragms or cones for electromechanical transducers, their suspension or their manufacture covered by H04R7/00 or H04R31/003, not provided for in any of its subgroups
- H04R2307/027—Diaphragms comprising metallic materials
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Signal Processing (AREA)
- Manufacturing & Machinery (AREA)
- Multimedia (AREA)
- Diaphragms For Electromechanical Transducers (AREA)
Abstract
The invention relates to a vibrating diaphragm, a sound generating device and a microphone assembly, wherein the vibrating diaphragm is applied to sound-electricity exchange and comprises the following components: the substrate layer is graphene or multilayer graphene; and the metal coating is compounded on the substrate layer. The material of the metal coating is one metal or at least two metals. The invention provides a vibrating diaphragm with high rigidity, low density, good heat dissipation performance, low Poisson ratio, good internal sound velocity, simple manufacture and low cost, and excellent high-frequency, medium-frequency and low-frequency sound quality.
Description
The application relates to a division application of patent application named 'vibrating diaphragm, sound generating device, microphone component and vibrating diaphragm manufacturing method', the application date of the original application is 2020, 06, 08 and 202010515756.5.
Technical Field
The invention relates to the technical field of sound-electricity exchange, in particular to a vibrating diaphragm, a sound generating device and a microphone assembly.
Background
Sound generating devices such as speakers and headphones realize conversion from electric energy to acoustic energy, microphones realize conversion from acoustic energy to electric energy, and devices for mutual conversion between electric energy and acoustic energy are collectively called electroacoustic converters/electroacoustic converters. Among them, the diaphragm is a key component of electroacoustic/electroacoustic transducer, such as: the earphone drives the vibrating diaphragm to vibrate through the coil to generate sound.
The vibration film is of various types, including paper vibration film, wooden vibration film, plastic vibration film, metal vibration film, biological vibration film, etc., some vibration films are made of single material, and some vibration films are made of composite material. Different materials of vibrating diaphragm produce huge influence to tone quality, and the main effect of vibrating diaphragm is vibrations, and the elasticity and the inertia of vibrating diaphragm material determine the vibration performance of vibrating diaphragm. The rigidity (Young modulus) of the material determines the elasticity of the vibrating diaphragm, the rigidity is high, the resonance of the vibrating diaphragm is facilitated, the cutting vibration is reduced, the sound signal can be better restored or played back when the elasticity is good, the audio performance is balanced, in addition, when the sound pressure is high, the vibrating diaphragm is prevented from being packed, in addition, the tensile strength of the material is high due to the high rigidity of the material, and the vibrating diaphragm is prevented from being damaged; the weight (density) of the material influences the inertia of the vibrating diaphragm, the inertia of the motion is small when the weight is light, the starting and stopping of the vibrating diaphragm are faster, the transient response is better, and the method is favorable for improving the definition of sound quality and the restoration of high-frequency sound segments. The higher the sound velocity inside the diaphragm, the faster the sound from the edge to the center of the diaphragm, the smaller the distance between the sound waves from different positions of the diaphragm, which is particularly important for high-frequency sound, because the sound waves of high-frequency sound are short, if the sound waves are different from each other by more than 1/2 wavelength, the sound waves cancel each other out and attenuate greatly. The smaller the thermal expansion coefficient of the vibrating diaphragm is, the better, the more the high-power voice coil can generate heat and conduct the temperature to the vibrating diaphragm, if the thermal expansion coefficient of the vibrating diaphragm is higher, the vibrating diaphragm expands, and the problems of rigidity reduction, aging, coil wiping and the like of the vibrating diaphragm are caused; meanwhile, the thermal diffusivity of the vibrating diaphragm also affects whether the vibrating diaphragm can radiate heat in time. The lower the poisson's ratio of the diaphragm, the better the poisson's ratio is, which describes the degree of deformation of the sound wave during transmission on the diaphragm, and the higher the poisson's ratio, the greater the deformation and the more distortion.
When a high quality sound quality is sought, the above requirements for the diaphragm material often contradict each other. The diaphragm made of various plastics (such as Polyarylate (PAR), polyethylene diformate (PEN), polyether ether ketone (PEEK), polyether imide (PEI) and the like) has high plasticity, is easy to process and low in cost, but has poor rigidity, the thickness of the diaphragm needs to be increased when the rigidity is increased, and the weight is increased, so that the diaphragm made of the plastics has the problems of high distortion rate, poor resolving power, insufficient dynamic state and unsmooth medium-frequency slow connection. Paper and wood diaphragm materials are light, but are highly affected by the environment, and humidity and temperature exceeding standards can damage the diaphragm. The biological vibrating diaphragm is complex in manufacture, high in cost and low in yield. The high-frequency tone performance of the metal vibrating diaphragm is best, such as a high-end product, namely a 2 ten thousand-element earphone Utopia sold under the brand of HiFi sound (strong waves) famous in France, adopts a Be beryllium metal vibrating diaphragm with extremely toxic and high risk, but the beryllium is too fragile and easy to damage, so that the beryllium is difficult to bend and cannot Be manufactured in a pressing mode, the manufacturing is complex, and in addition, the cost of the beryllium vibrating diaphragm is too high.
The graphene has excellent optical, electrical and mechanical properties, the unique thinnest performance, the thickness of the graphene is only 0.335nm, the highest strength reaches 130GPa, the Young modulus is 1TPa, the heat conductivity coefficient is as high as 5000W/m.K, and the characteristics of the graphene determine that the graphene has good low-frequency tone quality performance. However, graphene has high chemical stability.
Therefore, the conventional diaphragm cannot have or approach the high-frequency sound quality performance of the conventional metal diaphragm, and has the sound quality effect of the low-frequency sound quality performance of the graphene. The prior art adopts the concatenation of multiple different material diaphragms or the combination of the sound production part of different material diaphragms, goes to realize high frequency tone quality and low frequency tone quality, and such design has increased coil and diaphragm combination or the degree of difficulty of sound source processing, and in addition, the diaphragm of current different materials still faces rigidity difference, high density, heat dissipation poor, the preparation is complicated, with high costs and other problems respectively.
Therefore, there is a need for a diaphragm with high rigidity, low density, good heat dissipation, low poisson's ratio, good internal sound velocity, simple manufacture, and low cost, and excellent high frequency, medium frequency and low frequency sound quality.
Disclosure of Invention
In view of the above, the present invention aims to provide a diaphragm, a sound generating device and a microphone which have high rigidity, low density, good heat dissipation performance, low poisson ratio, good internal sound velocity, simple manufacture, and low cost and excellent high-frequency, medium-frequency and low-frequency sound quality. In order to achieve the above purpose, the invention adopts the following technical scheme:
a diaphragm for use in acoustic-electric interchange, the diaphragm comprising: the substrate layer is graphene or multi-layer graphene, and the metal coating is compounded on the substrate layer;
The material of the metal coating is one metal or at least two metals.
Optionally, when the material of the metal coating is a metal, the material of the metal coating is elemental beryllium or elemental titanium.
Alternatively, when the material of the metal plating layer is a metal, the material of the metal plating layer is any one of beryllium, titanium, aluminum, copper, silver, gold, magnesium, and lithium.
Alternatively, when the material of the metal plating layer is at least two metals, the material of the metal plating layer includes two metals of titanium and beryllium or two metals of magnesium and lithium.
Optionally, the thickness of the multilayer graphene is equal to 10 layers.
Optionally, the diaphragm is a composite of a multilayer graphene and a multilayer metal coating.
Optionally, the metal plating layers are distributed on two sides of the graphene, and the number of layers of the metal plating layers distributed on two sides of the graphene is different.
Alternatively, the material of the metal plating layer is compounded on the base material layer by a vacuum evaporation method, a magnetron sputtering method, or a vapor deposition method.
In order to achieve the above purpose, the invention also provides a sound generating device, which comprises a coil, wherein the coil comprises the vibrating diaphragm, and the coil drives the vibrating diaphragm to vibrate so as to generate sound waves.
In order to achieve the above purpose, the invention also provides a microphone, which comprises a back electrode plate and a vibrating diaphragm, wherein the back electrode plate and the vibrating diaphragm form a capacitor, and sound waves drive the vibrating diaphragm to vibrate so as to convert the sound waves into electric signals.
Further, in order to achieve the above object, the present invention also provides a method for manufacturing a diaphragm, including the following steps: providing a substrate layer, wherein the substrate layer is graphene or multi-layer graphene; compounding a metal coating on the substrate layer, wherein the material of the metal coating comprises any one metal of beryllium, titanium, aluminum, copper, silver, gold, magnesium and lithium; the metal coating is compounded on the substrate layer by a vacuum evaporation method, a magnetron sputtering method or a vapor deposition method.
Preferably, the magnetron sputtering method includes: heating the metal coating material to an ionic state; accelerating the ionic metal through an electric field so that the ionic metal is shot to the substrate layer;
The ionic metal is composited with the substrate layer.
Drawings
Fig. 1 is a schematic diagram of graphene and a metal coating in an embodiment of a diaphragm according to the present invention.
Fig. 2 is a schematic diagram of a multilayer graphene and a metal coating in another embodiment of a diaphragm according to the present invention.
Fig. 3 is a schematic diagram of graphene and a multilayer metal coating in another embodiment of the diaphragm of the present invention.
Fig. 4 is a schematic diagram of graphene and a multilayer metal coating in another embodiment of the diaphragm of the present invention.
Fig. 5 is a schematic diagram of an embodiment of a sound generating device according to the present invention.
Fig. 6 is a schematic diagram of a capacitive device in an embodiment of a microphone according to the present invention.
Description of main reference numerals:
The vibration film comprises the following components of a vibration film body 10, a base material layer/graphene 101, a metal plating layer 102, a coil 30 and a back electrode plate 40.
Detailed Description
The present invention will be described in further detail with reference to the drawings and examples, wherein the purpose, principle, technical solution and advantages of the present invention are more clearly understood. It should be understood that the detailed description and specific examples, while indicating the invention, are intended for purposes of illustration only and are not intended to limit the scope of the invention.
It should be noted that, in particular, connection or positional relation that can be specified according to the text or technical content of the specification, partial omission or not drawing of all the positional change patterns is made for simplicity of drawing, the omitted or not drawn positional change patterns are not explicitly described in the specification, and they are not considered to be described in detail for simplicity of explanation, and are not described in detail herein, and are collectively described.
Fig. 1 is a schematic diagram of graphene and a metal coating in an embodiment of a diaphragm according to the present invention. In the invention, graphene is in accordance with GB/T30544.13-2018, part 13 of nanotechnology terminology: graphene and related two-dimensional materials are defined, specifically, graphene is a monolayer of carbon atoms that is formed into a honeycomb structure by combining one carbon atom with 3 neighboring carbon atoms around. In particular, the invention states that, for simplicity of description, the graphene according to the invention may also comprise GB/T30544.13-2018, nanotechnology term part 13: graphene and related two-dimensional materials a conceptual structural unit describing the structure and properties of three-dimensional carbon materials formed primarily by sp2 hybridized bonding. In the present invention, the multi-layer graphene means double-layer graphene, triple-layer graphene, and few-layer graphene, that is, when the thickness defined in the above standard is equal to 10 layers. In the present invention, the term "multilayered graphene" is used to refer to a case where the thickness of the multilayered graphene exceeds 10 layers, that is, a case where the multilayered graphene is referred to as a graphite sheet.
A diaphragm shown in fig. 1 is applied to acousto-electric exchange. Referring to fig. 5, fig. 5 is a schematic diagram of an embodiment of the sound generating device of the present invention, for example, the coil 30 of the earphone drives the diaphragm 10 to vibrate, so as to convert the electrical signal into the sound wave. Referring again to fig. 6, a schematic diagram of a capacitive device in an embodiment of the microphone according to the present invention, in which the diaphragm 10 and the back plate 40 form a capacitor, and the vibration of the diaphragm 10 along with the sound wave causes a potential difference between the back plate 40 and the diaphragm to change, so as to convert an acoustic signal into an electrical signal. In other embodiments, the metal plating layer 102 of the diaphragm 10 of fig. 6 is close to the back plate 40, and the material of the layer that cannot restrict the diaphragm 10 to be close to the back plate 40 according to fig. 6 is the substrate layer 101.
In the present invention, the diaphragm 10 includes a substrate layer 101, where the substrate layer 101 is graphene or multi-layer graphene; a metal plating layer 102, wherein the metal plating layer 102 is compounded on the base material layer 101.
The pure metal vibrating diaphragm has good high-frequency tone quality, but is quite expensive, difficult to manufacture, brittle and easy to damage; in the existing vibrating diaphragm, there is also a scheme of plating metal on plastics, and the scheme is thicker, so that the sound quality is damaged. Graphene and multilayer graphene are used as new materials, and are characterized by good low-frequency sound quality. However, due to the good chemical stability, that is, the strong chemical inertness, the composition of graphene and metal to form a film with specific application cannot be realized. The background of the invention is described in connection with this and is not repeated here.
In the invention, graphene or a plurality of layers of graphene is adopted for the substrate layer 101, a metal coating 102 is compounded on the substrate layer 101 by a vacuum evaporation method, a magnetron sputtering method or a vapor deposition method to obtain a film, and the film is used as a vibrating film 10 to be applied to the field of sound-electricity exchange.
The material of the metal plating layer 102 in the present invention includes at least two metals. For example, where the metal coating 102 comprises an alloy of at least two metals, such as titanium and beryllium, in the present invention, where the description of the metal coating 102 comprises at least two metals, it is meant that the presence of these two metals is emphasized and that the presence of metals other than these two metals, i.e., an alloy of three or more metals, is also contemplated. In the embodiment, the metal titanium and the metal beryllium can form an alloy with high rigidity, low density, good heat dissipation performance, low poisson ratio and good internal sound velocity, so that the alloy has high-quality sound quality at high and medium frequencies. In this embodiment, titanium and beryllium are heated to an ionic state, the ionic state of titanium and beryllium is accelerated by an electric field, the titanium and beryllium are irradiated to the graphene substrate layer 101 at a high speed, the titanium and beryllium are compounded with the graphene substrate layer 101, the metal plating layer 102 is compounded on the substrate layer 101, the low-frequency high-quality sound quality of graphene is combined, the obtained diaphragm 10 has high-quality sound quality at high frequency, medium frequency and low frequency, and the high-quality sound quality at high, medium and low frequencies is realized on a single diaphragm.
In another embodiment, the material of the metal coating 102 includes at least two metals, magnesium and lithium, which further reduces cost and avoids the extremely toxic nature of beryllium to add a protective design to the diaphragm product.
In the present invention, the material of the metal plating layer 102 may be a metal. Typical metallic materials are any of beryllium, titanium, aluminum, copper, silver, gold, magnesium, lithium. In the present embodiment, the material of the metal plating layer 102 is beryllium.
The metal beryllium is heated to an ionic state and is emitted to the substrate layer 101 at a high speed after being accelerated by an electric field, the metal beryllium is compounded on graphene or multi-layer graphene of the substrate layer 101 to form the vibrating diaphragm 10 plated with the beryllium by the graphene, the graphene has excellent low-frequency sound quality, heat dissipation performance, poisson ratio is low, internal sound velocity is good, heat conduction performance is excellent, sound transmission effect is excellent, and the characteristics are also provided by combining the metal coating 102 with the beryllium. In the present embodiment, the diaphragm 10 can be simply manufactured at low cost by the magnetron sputtering method. The graphene and metal of the diaphragm have good heat radiation performance, and can effectively radiate heat when the diaphragm 10 is used, so that the problems of rigidity reduction, aging, ring wiping and the like caused by overhigh temperature of the diaphragm 10 are avoided.
The invention can overcome the chemical inertia of graphene and the technical bias in the prior art by the manufacturing process of a magnetron sputtering method and the like, thereby simply manufacturing the film of the graphene metal coating with low cost, and selectively applying the film to the field of acousto-electric exchange to be used as a vibrating diaphragm.
In the present invention, the material of the metal plating layer 102 may be further compounded on the substrate layer 101 by a vacuum evaporation method or a vapor deposition method, which will not be described herein.
Fig. 2 is a schematic diagram of a multilayer graphene 101 and a metal plating layer 102 in another embodiment of the diaphragm 10 according to the present invention. In this embodiment, the substrate layer 101 is a multi-layer graphene, for example, there may be up to 10 layers of graphene. It should be noted that the invention also includes substrate layers of more than 10 graphene layers if sound quality and heat dissipation performance are acceptable. In this embodiment, a multi-layer graphene and a metal coating 102 are illustrated, and as described in fig. 1 of the present specification, the metal coating may be a metal or an alloy of multiple metals. In another embodiment, the composite of the multi-layer graphene and the multi-layer metal plating layer 102 is also possible, and will not be described herein.
Fig. 3 is a schematic diagram of graphene 101 and a multilayer metal coating 102 in another embodiment of the diaphragm 10 according to the present invention. In the present embodiment, the metal plating layer 102 includes 2 or more layers, and the metal of each layer may be one metal or an alloy composed of a plurality of metals, respectively.
Fig. 4 is a schematic diagram of graphene 101 and a multilayer metal coating 102 in another embodiment of the diaphragm 10 according to the present invention. In this embodiment, the metal plating layer 102 is distributed on both sides of the graphene 101. In other embodiments, the number of layers of the metal plating layer 102 on both sides of the graphene 101 may be different, and the material of the metal may also be different, which may be one metal or an alloy composed of multiple metals.
In the present invention, a method for manufacturing the diaphragm 10 is also provided, which realizes simple and low-cost manufacturing of the diaphragm 10. Specifically, a substrate layer 101 is provided, the substrate layer 101 is graphene or multi-layer graphene, a metal plating layer 102 is compounded on the substrate layer 101, and the material of the metal plating layer 102 comprises any one metal of beryllium, titanium, aluminum, copper, silver, gold, magnesium and lithium, and in other embodiments is an alloy of multiple metals; the metal plating layer 102 is compounded on the base material layer 101 by a vacuum evaporation method, a magnetron sputtering method, or a vapor deposition method.
In this embodiment, the magnetron sputtering method is used for illustration, and the metal coating 102 material is heated to an ionic state; accelerating the ionic metal by an electric field so that the ionic metal is directed to the substrate layer 101; the ionic metal is combined with the base material layer 101 to obtain the diaphragm 10.
The invention is illustrated by the vibrating diaphragm of the drawings, but the structure, the layer number or the metal coating material of each drawing can be understood, and the explanation of the structure, the specific layer number and the metal material of the base material layer and the metal coating layer can be implemented in various embodiments.
It should be noted that, in the above embodiment, each included module is only divided according to the functional logic, but not limited to the above division, so long as the corresponding function can be implemented; in addition, the specific names of the functional units are also only for distinguishing from each other, and are not used to limit the protection scope of the present invention.
The foregoing description of the preferred embodiments of the invention is not intended to be limiting, but rather is intended to cover all modifications, equivalents, and alternatives falling within the spirit and principles of the invention.
Claims (7)
1. A diaphragm for use in acoustic-electric interchange, the diaphragm comprising: the substrate layer is multilayer graphene, and the metal coating is compounded on the substrate layer;
The material of the metal coating is one metal or at least two metals;
the thickness of the multilayer graphene is equal to 10 layers;
the vibrating diaphragm is a composite of a plurality of layers of graphene and a plurality of layers of metal plating layers;
The metal coating is distributed on two sides of the graphene, and the number of layers of the metal coating distributed on two sides of the graphene is different.
2. The diaphragm of claim 1, wherein when the metal coating is a metal, the metal coating is elemental beryllium or elemental titanium.
3. The diaphragm of claim 1, wherein when the material of the metal plating layer is a metal, the material of the metal plating layer is any one of aluminum, copper, silver, gold, magnesium, and lithium.
4. The diaphragm of claim 1, wherein when the metal plating layer is made of at least two metals, the metal plating layer is made of two metals of titanium and beryllium or two metals of magnesium and lithium.
5. The diaphragm of any one of claims 1-4, wherein the metal-plated material is compounded on the substrate layer by vacuum evaporation, magnetron sputtering, or vapor deposition.
6. A sound generating device comprising a coil, characterized in that it comprises a diaphragm according to any one of claims 1 to 5, said coil driving said diaphragm to vibrate and generate sound waves.
7. A microphone comprising a backplate, comprising a diaphragm according to any one of claims 1 to 5, the backplate and the diaphragm forming a capacitor, sound waves driving the diaphragm to vibrate, converting sound waves into electrical signals.
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| CN202210351818.2A CN114697820B (en) | 2020-06-08 | 2020-06-08 | Vibrating diaphragm, sound generating device and microphone assembly |
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| CN202210351818.2A CN114697820B (en) | 2020-06-08 | 2020-06-08 | Vibrating diaphragm, sound generating device and microphone assembly |
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| CN112188366A (en) * | 2019-07-02 | 2021-01-05 | 北京小米移动软件有限公司 | Loudspeaker and electronic equipment with same |
| CN111818425A (en) * | 2020-06-08 | 2020-10-23 | 深圳市汉嵙新材料技术有限公司 | Vibrating diaphragm, sound production device, microphone assembly and vibrating diaphragm manufacturing method |
| CN114763020A (en) * | 2021-01-11 | 2022-07-19 | 深圳市汉嵙新材料技术有限公司 | Heat conducting plate |
| CN115589562B (en) * | 2022-10-19 | 2023-08-01 | 深圳市三诺数字科技有限公司 | Preparation method of composite loudspeaker diaphragm and related equipment thereof |
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Also Published As
| Publication number | Publication date |
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| WO2021248838A1 (en) | 2021-12-16 |
| CN111818425A (en) | 2020-10-23 |
| WO2021248625A1 (en) | 2021-12-16 |
| CN114697820A (en) | 2022-07-01 |
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