CN105323698A - Production method of vibrating diaphragm - Google Patents
Production method of vibrating diaphragm Download PDFInfo
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- CN105323698A CN105323698A CN201410381315.5A CN201410381315A CN105323698A CN 105323698 A CN105323698 A CN 105323698A CN 201410381315 A CN201410381315 A CN 201410381315A CN 105323698 A CN105323698 A CN 105323698A
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- vibrating diaphragm
- graphene film
- ring
- film
- production method
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Abstract
The invention discloses a vibrating diaphragm and a production method thereof. The vibrating diaphragm comprises an annular vibrating diaphragm edge made of a metal, and a vibrating diaphragm film made of a planar graphite film, wherein the vibrating diaphragm film is fixedly connected with the vibrating diaphragm edge. Since the vibrating diaphragm disclosed by the invention is made of a metal ring and the graphite film, the sensitivity and strength of the vibrating diaphragm can be enhanced, and CVD, PVD, exposure, development and other processing processes are adopted, so that the demand of micro-production can be satisfied.
Description
Technical field
the present invention relates to loud speaker field, particularly a kind of vibrating diaphragm and production method thereof.
Background technology
the diaphragm that namely vibrating diaphragm vibrates, its name embodies its operating state: vibration, and its some physical features: thin.It is widely used in microphone and loud speaker as vibrational system.Along with the development of compact electronic device, the design of vibrating diaphragm also tends to microminiaturized.Although the method for existing manufacture vibrating diaphragm has obtained the vibrating diaphragm with satisfied parameter, still need to improve further and strengthen in sensitivity, intensity, weight etc.
Summary of the invention
the object of this invention is to provide one can be realize micro-production and have highly sensitive a kind of vibrating diaphragm and production method thereof.
for achieving the above object, the technical solution used in the present invention is: a kind of production method of vibrating diaphragm, and it comprises the following steps:
1) on graphene film, adhere at least two vibrating diaphragm rings, an end face of described vibrating diaphragm ring is by described plane Graphene plastic film covering;
2) outer rim along described vibrating diaphragm ring cuts described graphene film, obtains at least two vibrating diaphragms, the vibrating diaphragm edge that described vibrating diaphragm is made up of described vibrating diaphragm ring, the described graphene film composition vibrating diaphragm film after cutting.
preferably, graphene film described in step 1) is die-cut into the connected graphene film unit of at least two parts according to the shape of described vibrating diaphragm ring, is fixedly attached on corresponding described graphene film unit by described vibrating diaphragm ring by carrier.
preferably, according to the copper base unit that shape making at least two parts of described vibrating diaphragm ring are connected in step 1), adopt chemical vapour deposition technique to obtain in its superficial growth the graphene film unit that at least two parts are connected, described vibrating diaphragm ring is also fixedly attached on corresponding described graphene film unit by carrier by the graphene film unit that the part of transforming growth is connected.
preferably, graphene film described in step 1) is by repeatedly PVD(physical vapour deposition (PVD)), CVD(chemical vapour deposition (CVD)) method realize the stack combinations of graphene film and vacuum coating, thus realize the modification to graphene film.
preferably, the connected mode of described vibrating diaphragm ring and described graphene film is that glue bonds.
preferably, vibrating diaphragm ring in step 1 is copper ring, because Graphene has the ability of self-regeneration, when vibrating diaphragm ring be copper ring etc. other can be used for the metal of growing graphene time, also can pass through chemical vapour deposition technique (CVD) processing procedure by copper ring superficial growth Graphene, then allow graphene film unit link together by Graphene self-repairing capability (carbon atom has combination tendency).
further preferably, described step 1) comprises the following steps:
a) on a surface of the Copper base material of tabular, chemical vapour deposition technique is adopted to enclose graphene film;
b) enclose one deck light-sensitive surface on the surface at another of Copper base material, the width according to the shape of vibrating diaphragm and the vibrating diaphragm ring of needs makes film, is attached to above light-sensitive surface by film, and exposes;
c) remove film and wash away the not photosensitive part of light-sensitive surface, Copper base material is put into etching solution, eroding unwanted Copper base material part;
d) remove remaining light-sensitive surface, obtain the copper ring be attached on graphene film.
because technique scheme is used, the present invention compared with prior art has following advantages:
because the present invention adopts becket and graphene film to make vibrating diaphragm, the sensitivity of vibrating diaphragm, intensity can be improved, meanwhile, by processing technologys such as employing exposure, developments, the demand of micro-production can be met.
Accompanying drawing explanation
accompanying drawing 1 is embodiment one graphene film schematic diagram;
accompanying drawing 2 is the vibrating diaphragm schematic diagram before embodiment one cuts;
the vibrating diaphragm schematic diagram of accompanying drawing 3 manufactured by the present invention;
accompanying drawing 4 is the vibrating diaphragm schematic diagram before embodiment two cuts
accompanying drawing 5 is film pattern schematic diagram in embodiment three;
accompanying drawing 6 be embodiment three etch after graphene film and copper ring schematic diagram.
in above accompanying drawing: 1, vibrating diaphragm ring; 2, vibrating diaphragm film; 3, graphene film unit; 4, copper ring; 5, film; 6, graphene film.
Embodiment
below in conjunction with embodiment shown in the drawings, the invention will be further described:
embodiment one: shown in accompanying drawing 1-3, a kind of production method of vibrating diaphragm, it comprises the following steps:
a) graphene film is die-cut into the connected graphene film unit 3(of at least two parts as shown in Figure 1 according to the shape of vibrating diaphragm ring 1);
b) by carrier, vibrating diaphragm ring 1 is fixedly attached on corresponding graphene film unit 3 (as shown in Figure 2);
c) outer rim along vibrating diaphragm ring 1 cuts graphene film, obtains at least two vibrating diaphragms, and vibrating diaphragm comprises the vibrating diaphragm edge that vibrating diaphragm ring 1 forms, and the graphene film composition vibrating diaphragm film 2(after cutting as shown in Figure 3).
embodiment two: shown in accompanying drawing 3,4, the present embodiment is substantially identical with embodiment one, difference is: the present embodiment is first according to the copper base unit that shape making at least two parts of vibrating diaphragm ring 1 are connected, chemical vapour deposition technique is adopted to obtain in its superficial growth the graphene film unit 3 that at least two parts are connected, then the graphene film unit 3 that is connected of the part of transforming growth on the graphene film unit 3 by carrier vibrating diaphragm ring 1 fixedly being attached to correspondence.
in first, second above-mentioned embodiment, the material of vibrating diaphragm ring 1 is the common material for making vibrating diaphragm edge, and between vibrating diaphragm ring 1 and graphene film unit 3, logical chemical vapour deposition technique or glue (conducting resinl, elargol, UV glue etc.) are adhesively fixed.
embodiment three: shown in accompanying drawing 5-6, a kind of production method of vibrating diaphragm, it comprises the following steps:
a) on a surface of the Copper base material of tabular, chemical vapour deposition technique is adopted to enclose graphene film 6;
b) enclose one deck light-sensitive surface on the surface at another of Copper base material, the width according to the shape of vibrating diaphragm and the vibrating diaphragm ring 1 of needs makes film 5, this film 5 is provided with the pattern of multiple copper ring, is attached to above light-sensitive surface by film 5, and exposes;
c) remove film 5 and wash away the not photosensitive part of light-sensitive surface, Copper base material is put into etching solution, eroding unwanted Copper base material part;
d) remove remaining light-sensitive surface, obtain the copper ring 4 be attached on graphene film 6.
e) outer rim along copper ring 4 cuts graphene film 6, obtains at least two vibrating diaphragms (as shown in Figure 3), and vibrating diaphragm comprises the vibrating diaphragm edge that vibrating diaphragm ring 1 forms, and the graphene film 6 after cutting forms vibrating diaphragm film 2.
the vibrating diaphragm of the present embodiment has the sensitivity of high vibrating diaphragm, the feature of intensity, and meanwhile, by processing technologys such as employing exposure, developments, the precision of processing is higher, can meet the demand of micro-production.
above-described embodiment, only for technical conceive of the present invention and feature are described, its object is to person skilled in the art can be understood content of the present invention and implement according to this, can not limit the scope of the invention with this.All equivalences done according to Spirit Essence of the present invention change or modify, and all should be encompassed within protection scope of the present invention.
Claims (7)
1. a production method for vibrating diaphragm, it comprises the following steps:
1) on graphene film, adhere at least two vibrating diaphragm rings, an end face of described vibrating diaphragm ring is by described plane Graphene plastic film covering;
2) outer rim along described vibrating diaphragm ring cuts described graphene film, obtains at least two vibrating diaphragms, the vibrating diaphragm edge that described vibrating diaphragm is made up of described vibrating diaphragm ring, the described graphene film composition vibrating diaphragm film after cutting.
2. the production method of a kind of vibrating diaphragm according to claim 1, it is characterized in that: graphene film described in step 1) is die-cut into the connected graphene film unit of at least two parts according to the shape of described vibrating diaphragm ring, is fixedly attached on corresponding described graphene film unit by described vibrating diaphragm ring by carrier.
3. the production method of a kind of vibrating diaphragm according to claim 1, it is characterized in that: according to the copper base unit that shape making at least two parts of described vibrating diaphragm ring are connected in step 1), adopt chemical vapour deposition technique to obtain in its superficial growth the graphene film unit that at least two parts are connected, described vibrating diaphragm ring is also fixedly attached on corresponding described graphene film unit by carrier by the graphene film unit that the part of transforming growth is connected.
4. the production method of a kind of vibrating diaphragm according to claim 1, is characterized in that: described graphene film realizes the stack combinations of graphene film and vacuum coating by the method for repeatedly PVD or CVD.
5. the production method of a kind of vibrating diaphragm according to claim 1, is characterized in that: the connected mode of described vibrating diaphragm ring and described graphene film is that chemical vapour deposition technique or glue bond.
6. the production method of a kind of vibrating diaphragm according to claim 1, is characterized in that: the vibrating diaphragm ring in step 1 is copper ring.
7. the production method of a kind of vibrating diaphragm according to claim 6, is characterized in that: described step 1) comprises the following steps:
A) on a surface of the Copper base material of tabular, chemical vapour deposition technique is adopted to enclose graphene film;
B) enclose one deck light-sensitive surface on the surface at another of Copper base material, the width according to the shape of vibrating diaphragm and the vibrating diaphragm ring of needs makes film, is attached to above light-sensitive surface by film, and exposes;
C) remove film and wash away the not photosensitive part of light-sensitive surface, Copper base material is put into etching solution, eroding unwanted Copper base material part;
D) remove remaining light-sensitive surface, obtain the copper ring be attached on graphene film.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410381315.5A CN105323698A (en) | 2014-08-05 | 2014-08-05 | Production method of vibrating diaphragm |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410381315.5A CN105323698A (en) | 2014-08-05 | 2014-08-05 | Production method of vibrating diaphragm |
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| CN105323698A true CN105323698A (en) | 2016-02-10 |
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| CN201410381315.5A Pending CN105323698A (en) | 2014-08-05 | 2014-08-05 | Production method of vibrating diaphragm |
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106060722A (en) * | 2016-07-25 | 2016-10-26 | 北京塞宾科技有限公司 | Graphene vibrating diaphragm, vibrating diaphragm manufacturing method and microphone including vibrating diaphragm |
| CN106131756A (en) * | 2016-07-25 | 2016-11-16 | 北京塞宾科技有限公司 | A kind of Graphene vibrating diaphragm, vibrating diaphragm manufacture method and include the microphone of this vibrating diaphragm |
| CN106131755A (en) * | 2016-07-25 | 2016-11-16 | 北京塞宾科技有限公司 | There is the microphone of Graphene vibrating diaphragm |
| CN106734466A (en) * | 2016-12-13 | 2017-05-31 | 苏州和林微纳科技有限公司 | One kind can quick volume production vibrating diaphragm support processing method |
| CN110620976A (en) * | 2019-09-29 | 2019-12-27 | 歌尔科技有限公司 | A conducting film and sound generating mechanism for sound generating mechanism |
| WO2021248625A1 (en) * | 2020-06-08 | 2021-12-16 | 深圳市汉嵙新材料技术有限公司 | Vibrating diaphragm, sound production device, microphone and vibrating diaphragm manufacturing method |
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| JP2007170843A (en) * | 2005-12-19 | 2007-07-05 | Yokogawa Electric Corp | Vibration-type transducer and method for manufacturing the same |
| CN101207944A (en) * | 2006-12-18 | 2008-06-25 | 深圳市豪恩电声科技有限公司 | Method for manufacturing microphone diaphragm |
| CN103342583A (en) * | 2013-06-28 | 2013-10-09 | 潮州三环（集团）股份有限公司 | Processing method of high-precision metal patterns on surface of ceramic material product |
| CN203327227U (en) * | 2013-07-10 | 2013-12-04 | 美特科技(苏州)有限公司 | Composite diaphragm structure |
| CN103916800A (en) * | 2014-04-03 | 2014-07-09 | 美特科技(苏州)有限公司 | Composite vibration film |
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2014
- 2014-08-05 CN CN201410381315.5A patent/CN105323698A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007170843A (en) * | 2005-12-19 | 2007-07-05 | Yokogawa Electric Corp | Vibration-type transducer and method for manufacturing the same |
| CN101207944A (en) * | 2006-12-18 | 2008-06-25 | 深圳市豪恩电声科技有限公司 | Method for manufacturing microphone diaphragm |
| CN103342583A (en) * | 2013-06-28 | 2013-10-09 | 潮州三环（集团）股份有限公司 | Processing method of high-precision metal patterns on surface of ceramic material product |
| CN203327227U (en) * | 2013-07-10 | 2013-12-04 | 美特科技(苏州)有限公司 | Composite diaphragm structure |
| CN103916800A (en) * | 2014-04-03 | 2014-07-09 | 美特科技(苏州)有限公司 | Composite vibration film |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106060722A (en) * | 2016-07-25 | 2016-10-26 | 北京塞宾科技有限公司 | Graphene vibrating diaphragm, vibrating diaphragm manufacturing method and microphone including vibrating diaphragm |
| CN106131756A (en) * | 2016-07-25 | 2016-11-16 | 北京塞宾科技有限公司 | A kind of Graphene vibrating diaphragm, vibrating diaphragm manufacture method and include the microphone of this vibrating diaphragm |
| CN106131755A (en) * | 2016-07-25 | 2016-11-16 | 北京塞宾科技有限公司 | There is the microphone of Graphene vibrating diaphragm |
| CN106734466A (en) * | 2016-12-13 | 2017-05-31 | 苏州和林微纳科技有限公司 | One kind can quick volume production vibrating diaphragm support processing method |
| CN110620976A (en) * | 2019-09-29 | 2019-12-27 | 歌尔科技有限公司 | A conducting film and sound generating mechanism for sound generating mechanism |
| WO2021248625A1 (en) * | 2020-06-08 | 2021-12-16 | 深圳市汉嵙新材料技术有限公司 | Vibrating diaphragm, sound production device, microphone and vibrating diaphragm manufacturing method |
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Application publication date: 20160210 |