WO2021248838A1 - Vibrating diaphragm, sound generation device, microphone assembly, and method for making vibrating diaphragm - Google Patents

Vibrating diaphragm, sound generation device, microphone assembly, and method for making vibrating diaphragm Download PDF

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Publication number
WO2021248838A1
WO2021248838A1 PCT/CN2020/130472 CN2020130472W WO2021248838A1 WO 2021248838 A1 WO2021248838 A1 WO 2021248838A1 CN 2020130472 W CN2020130472 W CN 2020130472W WO 2021248838 A1 WO2021248838 A1 WO 2021248838A1
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Prior art keywords
diaphragm
metal
substrate layer
graphene
plating layer
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PCT/CN2020/130472
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French (fr)
Chinese (zh)
Inventor
王荣福
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深圳市汉嵙新材料技术有限公司
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Publication of WO2021248838A1 publication Critical patent/WO2021248838A1/en

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    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R7/00—Diaphragms for electromechanical transducers; Cones
    • H04R7/02—Diaphragms for electromechanical transducers; Cones characterised by the construction
    • H04R7/04—Plane diaphragms
    • H04R7/06—Plane diaphragms comprising a plurality of sections or layers
    • H04R7/10—Plane diaphragms comprising a plurality of sections or layers comprising superposed layers in contact
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R31/00—Apparatus or processes specially adapted for the manufacture of transducers or diaphragms therefor
    • H04R31/003—Apparatus or processes specially adapted for the manufacture of transducers or diaphragms therefor for diaphragms or their outer suspension
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R9/00—Transducers of moving-coil, moving-strip, or moving-wire type
    • H04R9/02—Details
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R9/00—Transducers of moving-coil, moving-strip, or moving-wire type
    • H04R9/06—Loudspeakers
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R9/00—Transducers of moving-coil, moving-strip, or moving-wire type
    • H04R9/08—Microphones
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R2231/00—Details of apparatus or processes specially adapted for the manufacture of transducers or diaphragms therefor covered by H04R31/00, not provided for in its subgroups
    • H04R2231/001—Moulding aspects of diaphragm or surround
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R2307/00—Details of diaphragms or cones for electromechanical transducers, their suspension or their manufacture covered by H04R7/00 or H04R31/003, not provided for in any of its subgroups
    • H04R2307/023—Diaphragms comprising ceramic-like materials, e.g. pure ceramic, glass, boride, nitride, carbide, mica and carbon materials
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R2307/00—Details of diaphragms or cones for electromechanical transducers, their suspension or their manufacture covered by H04R7/00 or H04R31/003, not provided for in any of its subgroups
    • H04R2307/027—Diaphragms comprising metallic materials

Definitions

  • the present invention relates to the technical field of acousto-electric interchange, in particular to a diaphragm, a sound generating device and a microphone assembly.
  • Sound generating devices such as speakers and earphones realize the conversion of electric energy into sound energy
  • the microphone realizes the conversion of sound energy into electric energy.
  • the devices that convert between electric energy and sound energy are collectively called electroacoustic converters/acoustic electric converters.
  • the diaphragm is a key component of the electroacoustic converter/acousto-electric converter.
  • the earphone drives the diaphragm to vibrate through a coil to produce sound.
  • diaphragms There are many types of diaphragms, including paper diaphragms, wooden diaphragms, plastic diaphragms, metal diaphragms, biological diaphragms, etc. Some diaphragms are made of a single material, and some are made of composite materials. The different materials of the diaphragm have a huge impact on the sound quality.
  • the main function of the diaphragm is vibration.
  • the elasticity and inertia of the diaphragm material determine the vibration performance of the diaphragm.
  • the material stiffness Youngng's modulus determines the elasticity of the diaphragm. Large stiffness is beneficial to the resonance of the diaphragm and reduces the segmentation vibration.
  • the sound signal can be better restored or played back, and the audio performance is more balanced.
  • the sound pressure When it is larger, avoid the vibration of the diaphragm.
  • the rigidity of the material can also make the material more tensile and avoid the damage of the diaphragm; the weight (density) of the material affects the inertia of the diaphragm, and the lighter weight results in low movement inertia. The faster the start and stop of the diaphragm, the better the transient response, which is conducive to improving the clarity of sound quality and the restoration of high-frequency segments.
  • the heat diffusion performance of the diaphragm also affects whether the diaphragm can dissipate heat in time.
  • Poisson's ratio describes the degree of deformation of sound waves during the transmission of the diaphragm. The higher the Poisson's ratio, the greater the deformation and the greater the distortion.
  • plastic such as: polyarylate (PAR), polyethylene diformate (PEN), polyether ether ketone (PEEK), polyether imide (PEI), etc.
  • PAR polyarylate
  • PEN polyethylene diformate
  • PEEK polyether ether ketone
  • PEI polyether imide
  • Paper and wooden diaphragm materials are light, but they are greatly affected by the environment, and excessive humidity and temperature will damage the diaphragm.
  • the production of biological diaphragms is complicated, costly, and has a low yield rate.
  • the metal diaphragm has the best high-frequency sound quality.
  • high-end products the famous French HiFi audio brand Focal, the headset Utopia, which sells for more than 20,000 yuan, uses the highly toxic and dangerous Be beryllium.
  • Metal diaphragm however, beryllium is too brittle and easily damaged, making it difficult to bend, and cannot be produced by pressing, which is complicated to produce.
  • the cost of beryllium diaphragm is too high.
  • the graphene discovered in recent years has excellent optical, electrical and mechanical properties, its unique thinnest performance, the thickness is only 0.335nm, the highest tensile strength reaches 130GPa, the Young's modulus is 1TPa, and the thermal conductivity is as high as 5000W/m ⁇ K. These characteristics of graphene determine that it should have good low-frequency sound quality. However, graphene has high chemical stability.
  • none of the existing diaphragms has or is close to the high-frequency sound quality performance of the existing metal diaphragm and the low-frequency sound quality performance of graphene.
  • the prior art uses the splicing of a variety of different material diaphragms or the combination of sound-producing parts of different material diaphragms to achieve high-frequency sound quality and low-frequency sound quality. This design increases the difficulty of coil and diaphragm combination or sound source processing.
  • the existing diaphragms of different materials also face poor rigidity, high density, poor heat dissipation, complex production, high cost and other problems.
  • the purpose of the present invention is to provide a diaphragm and sound production with high rigidity, low density, good heat dissipation performance, low Poisson's ratio, good internal sound speed, simple production, and low price.
  • Device and microphone In order to achieve the above objectives, the present invention adopts the following technical solutions:
  • a diaphragm which is used for acousto-electric interchange, the diaphragm includes: a substrate layer, the substrate layer is graphene or multi-layer graphene; and a metal plating layer, the metal plating layer is compounded on the substrate Layer up.
  • the material of the metal coating of the diaphragm includes at least two metals.
  • the material of the metal coating of the diaphragm is a metal.
  • the material of the metal coating of the diaphragm includes two metals, titanium and beryllium.
  • the material of the metal coating of the diaphragm includes two metals, magnesium and lithium.
  • the material of the metal coating of the diaphragm is any one of beryllium, titanium, aluminum, copper, silver, gold, magnesium, and lithium.
  • the vibration film is composited with the material of the metal plating layer on the substrate layer by a vacuum evaporation method, a magnetron sputtering method or a vapor deposition method.
  • a sound generating device comprising a coil and a diaphragm, the diaphragm including a substrate layer of graphene or multilayer graphene; and a metal plating layer compounded on the substrate layer; the coil drives the diaphragm to vibrate , Produce sound waves.
  • the material of the metal coating of the diaphragm includes at least two metals.
  • the material of the metal coating of the diaphragm is a metal.
  • the material of the metal coating of the diaphragm includes two metals, titanium and beryllium.
  • the material of the metal coating of the diaphragm includes two metals, magnesium and lithium.
  • the material of the metal coating of the diaphragm is any one of beryllium, titanium, aluminum, copper, silver, gold, magnesium, and lithium.
  • the vibration film is composited with the material of the metal plating layer on the substrate layer by a vacuum evaporation method, a magnetron sputtering method or a vapor deposition method.
  • a microphone includes a back electrode plate and a diaphragm, the diaphragm including a substrate layer of graphene or multilayer graphene; and a metal plating layer compounded on the substrate layer; the back electrode plate and the diaphragm
  • the membrane constitutes a capacitor, and sound waves drive the diaphragm to vibrate and convert the sound waves into electrical signals.
  • the material of the metal coating of the diaphragm includes at least two metals.
  • the material of the metal coating of the diaphragm is a metal.
  • the material of the metal coating of the diaphragm includes two metals, titanium and beryllium.
  • the material of the metal coating of the diaphragm includes two metals, magnesium and lithium.
  • the material of the metal coating of the diaphragm is any one of beryllium, titanium, aluminum, copper, silver, gold, magnesium, and lithium.
  • the vibration film is composited with the material of the metal plating layer on the substrate layer by a vacuum evaporation method, a magnetron sputtering method or a vapor deposition method.
  • a method for manufacturing a diaphragm includes the following steps: providing a substrate layer, the substrate layer being graphene or multi-layer graphene; composite metal coating on the substrate layer, the metal coating material includes beryllium, Any one metal of titanium, aluminum, copper, silver, gold, magnesium, and lithium; the metal plating layer is compounded on the substrate layer by a vacuum evaporation method, a magnetron sputtering method or a vapor deposition method.
  • the magnetron sputtering method includes: heating the metal coating material to an ionic state; accelerating the ionic metal through an electric field so that the ionic metal is directed toward the substrate layer;
  • the ionic metal is compounded with the substrate layer.
  • FIG. 1 is a schematic diagram of graphene and metal coating in an embodiment of the diaphragm of the present invention.
  • FIG. 2 is a schematic diagram of a multilayer graphene and metal coating in another embodiment of the diaphragm of the present invention.
  • FIG. 3 is a schematic diagram of graphene and multilayer metal coating in another embodiment of the diaphragm of the present invention.
  • FIG. 4 is a schematic diagram of graphene and multilayer metal coating in another embodiment of the diaphragm of the present invention.
  • Fig. 5 is a schematic diagram of an embodiment of a sound generating device of the present invention.
  • Fig. 6 is a schematic diagram of a capacitive device in an embodiment of the microphone of the present invention.
  • FIG. 1 is a schematic diagram of graphene and metal plating in an embodiment of the diaphragm of the present invention.
  • graphene refers to the definition in GB/T 30544.13-2018 "Nanotechnology Terminology Part 13: Graphene and Related Two-dimensional Materials”. Specifically, graphene is composed of one carbon atom and three surrounding Neighboring carbon atoms combine to form a monolayer of carbon atoms in a honeycomb structure.
  • the graphene described in the present invention may also include the graphene layer defined in GB/T 30544.13-2018 "Nanotechnology Terminology Part 13: Graphene and Related Two-dimensional Materials", description It is a conceptual structural unit mainly based on the structure and properties of the three-dimensional carbon material formed by sp2 hybridization.
  • multi-layer graphene refers to double-layer graphene, three-layer graphene, and few-layer graphene, that is, when the thickness defined in the above standard is less than or equal to 10 layers. It needs to be specifically noted here that in the present invention, multi-layer graphene also refers to the case where the thickness exceeds 10 layers, that is, the commonly referred to as graphite sheet, which also belongs to the multi-layer graphene of the present invention.
  • FIG. 5 is a schematic diagram of an embodiment of the sound generating device of the present invention.
  • the coil 30 of the earphone drives the vibration of the diaphragm 10 to convert electrical signals into sound waves.
  • 6 again, it is a schematic diagram of the capacitive device in an embodiment of the microphone of the present invention.
  • the diaphragm 10 and the back plate 40 constitute a capacitor. The potential difference changes, thereby converting the acoustic signal into an electrical signal.
  • the metal plating layer 102 of the diaphragm 10 in FIG. 6 is close to the back electrode plate 40, and the material of the layer that cannot restrict the proximity of the diaphragm 10 and the back electrode plate 40 according to FIG. 6 is the base layer 101.
  • the diaphragm 10 includes a substrate layer 101, the substrate layer 101 is graphene or multilayer graphene; a metal plating layer 102, the metal plating layer 102 is composited on the substrate layer 101.
  • Pure metal diaphragm has good high-frequency sound quality, but it is very expensive, difficult to make, and is brittle and easily damaged.
  • the existing diaphragm there is also a scheme of plating metal on plastic, which is thicker. Damage to the sound quality.
  • Graphene and multilayer graphene as new materials are characterized by good low-frequency sound quality.
  • due to the good chemical stability of graphene, that is, the strong chemical inertness it is impossible to realize the combination of graphene and metal to form a film for a specific purpose.
  • the background art of the present invention has made relevant introductions, which will not be repeated here.
  • graphene or multi-layer graphene is used for the substrate layer 101, and the metal plating layer 102 is compounded on the substrate layer 101 by a vacuum evaporation method, a magnetron sputtering method or a vapor deposition method to obtain a thin film.
  • the diaphragm 10 it is applied in the field of acousto-electric interchange.
  • the diaphragm of the present invention has high rigidity, low density, good heat dissipation performance, low Poisson's ratio, good internal sound velocity, simple production, and low-cost high-frequency, intermediate-frequency, and The advantages of excellent low-frequency sound quality.
  • the material of the metal plating layer 102 in the present invention includes at least two metals.
  • the metal plating layer 102 includes at least an alloy composed of two metals of titanium and beryllium.
  • “at least” means to emphasize the existence of these two metals. It also refers to the existence of metals other than these two metals, that is, an alloy composed of three or more metals.
  • metallic titanium and metallic beryllium can form an alloy with high rigidity, low density, good heat dissipation performance, low Poisson's ratio, and good internal sound velocity, so as to have high-quality sound quality at high and intermediate frequencies.
  • the titanium and beryllium containing titanium and beryllium are heated to an ionic state, and the ionic titanium and beryllium are accelerated by an electric field, and shot toward the graphene substrate layer 101 at a high speed to realize the composite of the titanium and beryllium and the graphene substrate layer 101 ,
  • the obtained diaphragm 10 has high-quality sound quality at high, mid and low frequencies, and achieves high, middle and low frequencies on a single diaphragm. Premium sound quality.
  • the material of the metal plating layer 102 includes at least two metals, magnesium and lithium, which can further reduce the cost, and can avoid the high toxicity of beryllium to increase the protective design of the diaphragm product application.
  • the material of the metal plating layer 102 may be a metal.
  • Typical metal materials are any of beryllium, titanium, aluminum, copper, silver, gold, magnesium, and lithium.
  • the material of the metal plating layer 102 is beryllium as an example.
  • the metal beryllium is heated to an ionic state, accelerated by an electric field, and then shot toward the substrate layer 101 at a high speed.
  • the metal beryllium is compounded on the graphene or multilayer graphene of the substrate layer 101 to form a beryllium-plated graphene diaphragm 10, graphene It has excellent low-frequency sound quality, heat dissipation performance, low Poisson's ratio, good internal sound velocity, and excellent thermal conductivity determine its excellent sound transmission effect. Combined with the metal coating 102 as beryllium, it also has such characteristics.
  • the diaphragm 10 can be fabricated in a low-cost and simple manner by the magnetron sputtering method.
  • the graphene and metal of the diaphragm have good heat dissipation performance, and when used as the diaphragm 10, it can effectively dissipate heat, and avoid problems such as the decrease of stiffness, aging, and ring rubbing of the diaphragm 10 due to excessive temperature.
  • the present invention can overcome the chemical inertness of graphene and technical prejudices in the prior art through magnetron sputtering and other manufacturing processes, so that the graphene metal coating film can be fabricated simply and at low cost, and the film can be selectively applied In the field of acousto-electric interchange, it is used as a diaphragm.
  • the material of the metal plating layer 102 can also be composited on the substrate layer 101 by a vacuum evaporation method or a vapor deposition method, which will not be repeated here.
  • the substrate layer 101 is a multilayer graphene, for example, there may be up to 10 layers of graphene.
  • the present invention also includes a substrate layer with more than 10 graphene layers.
  • a multi-layer graphene and a layer of metal coating 102 are used as examples.
  • the metal coating may be a metal or an alloy of multiple metals. In another embodiment, it may also be a composite of multilayer graphene and multilayer metal plating layer 102, which will not be repeated here.
  • the metal plating layer 102 includes two or more layers, and the metal of each layer may be one metal or an alloy composed of multiple metals.
  • the metal plating layer 102 is distributed on both sides of the graphene 101.
  • the number of layers of the metal plating layer 102 on both sides of the graphene 101 may be different, and the material of the metal may also be different, and it may be one metal or an alloy composed of multiple metals.
  • a method for manufacturing the diaphragm 10 is also provided, which realizes the simple and low-cost manufacturing of the diaphragm 10.
  • a substrate layer 101 is provided, the substrate layer 101 is graphene or multilayer graphene, and a metal plating layer 102 is compounded on the substrate layer 101.
  • the material of the metal plating layer 102 includes beryllium, titanium, Any one of aluminum, copper, silver, gold, magnesium, and lithium is an alloy of multiple metals in other embodiments; the metal plating layer 102 is compounded by vacuum evaporation, magnetron sputtering, or vapor deposition. On the substrate layer 101.
  • the magnetron sputtering method is used as an example to heat the metal plating layer 102 material to an ionic state; the ionic metal is accelerated by an electric field, so that the ionic metal is directed toward the substrate layer 101; The ionic metal is recombined with the substrate layer 101 to obtain the diaphragm 10.
  • the present invention is illustrated by the diaphragm of the accompanying drawings, but the structure, number of layers or metal plating material of each figure can be divided into understanding.
  • the structure of the base material layer and the metal plating layer, the specific number of layers, and the metal The explanation of the material can be implemented in each embodiment.
  • the modules included are only divided according to the functional logic, but not limited to the above-mentioned division, as long as the corresponding function can be realized; in addition, the specific name of each functional unit is also It is just for the convenience of distinguishing each other, and is not used to limit the protection scope of the present invention.

Abstract

The present invention relates to a vibrating diaphragm for acoustoelectric inter-conversion, the vibrating diaphragm comprising a substrate layer made of graphene or multiple layers of graphene, and a metal plating layer, wherein the metal plating layer is composited on the substrate layer. The material of the metal plating layer comprises at least two metals, including the two metals titanium and beryllium, or including the two metals magnesium and lithium. Alternatively, the material of the metal plating layer is any metal of beryllium, titanium, aluminum, copper, silver, gold, magnesium and lithium. The invention provides a vibrating diaphragm having a high rigidity, a low density, good heat dissipation properties, a low Poisson ratio, a good internal sound velocity, simple production, a low price, and an excellent sound quality in terms of high, middle and low frequencies.

Description

振膜、发声装置、麦克风组件及振膜制作方法Diaphragm, sounding device, microphone assembly and method for manufacturing diaphragm 技术领域Technical field
本发明涉及声电互换的技术领域，尤其涉及一种振膜、发声装置及麦克风组件。The present invention relates to the technical field of acousto-electric interchange, in particular to a diaphragm, a sound generating device and a microphone assembly.
背景技术Background technique
扬声器和耳机等发声装置实现电能到声能的转换，麦克风实现声能到电能的转换，电能与声能之间相互变换的器件统称为电声转换器/声电转换器。其中，振膜是电声转换器/声电转换器的关键部件，如：耳机是通过线圈带动振膜振动产生声音。Sound generating devices such as speakers and earphones realize the conversion of electric energy into sound energy, and the microphone realizes the conversion of sound energy into electric energy. The devices that convert between electric energy and sound energy are collectively called electroacoustic converters/acoustic electric converters. Among them, the diaphragm is a key component of the electroacoustic converter/acousto-electric converter. For example, the earphone drives the diaphragm to vibrate through a coil to produce sound.
振膜的种类很多，包括纸质振膜、木质振膜、塑料振膜、金属振膜、生物振膜等，有些振膜是单一材质，有些振膜是复合材质。振膜的不同材质对音质产生巨大的影响，振膜的主要作用是震动，振膜材质的弹性和惯性决定振膜的震动性能。材质刚度(杨氏模量)决定振膜的弹性，刚度大有利于振膜的共振，减少分割震动，弹性好则可以更好的还原或回放声音信号，音频表现也更加平衡，另外在声压较大时，避免振膜起包，此外，材质刚度好也可以让材质抗拉强度更大，避免振膜破损；材质的重量(密度)影响着振膜的惯性，重量轻则运动惯性小，振膜的启动及停止就越快，瞬态响应就越好，有利于提高音质的清晰度和高频音段的还原。振膜内部声速越高越好，声音从振膜边缘到中心就越快，从振膜不同位置出发的声波相互之间差距就越小，对于高频音就特别重要，由于高频音的声波短，如果互相之间相差超过1/2个波长，声波互相抵消衰减就会很大。振膜热膨胀系数越小越好，大功率音圈会发热较多并将温度传导到振膜，如果振膜热膨胀系数较高那么振膜就会扩张，引发振膜刚度下降、老化、擦圈等问题；同时，振膜的热扩散性能也影响到振膜能否及时散热。振膜泊松比越低越好，泊松比是描述声波在振膜上传递过程中变形的程度，泊松 比越高变形越大，失真也就越多。There are many types of diaphragms, including paper diaphragms, wooden diaphragms, plastic diaphragms, metal diaphragms, biological diaphragms, etc. Some diaphragms are made of a single material, and some are made of composite materials. The different materials of the diaphragm have a huge impact on the sound quality. The main function of the diaphragm is vibration. The elasticity and inertia of the diaphragm material determine the vibration performance of the diaphragm. The material stiffness (Young's modulus) determines the elasticity of the diaphragm. Large stiffness is beneficial to the resonance of the diaphragm and reduces the segmentation vibration. If the elasticity is good, the sound signal can be better restored or played back, and the audio performance is more balanced. In addition, the sound pressure When it is larger, avoid the vibration of the diaphragm. In addition, the rigidity of the material can also make the material more tensile and avoid the damage of the diaphragm; the weight (density) of the material affects the inertia of the diaphragm, and the lighter weight results in low movement inertia. The faster the start and stop of the diaphragm, the better the transient response, which is conducive to improving the clarity of sound quality and the restoration of high-frequency segments. The higher the sound velocity inside the diaphragm, the better, the faster the sound from the edge of the diaphragm to the center, the smaller the gap between the sound waves from different positions of the diaphragm, which is particularly important for high-frequency sounds, because of the sound waves of high-frequency sounds Short, if the difference between each other is more than 1/2 wavelength, the sound waves will cancel each other and the attenuation will be great. The smaller the coefficient of thermal expansion of the diaphragm, the better, the high-power voice coil will generate more heat and conduct the temperature to the diaphragm. If the coefficient of thermal expansion of the diaphragm is higher, the diaphragm will expand, causing the diaphragm to decrease in stiffness, aging, rubbing, etc. Problem: At the same time, the heat diffusion performance of the diaphragm also affects whether the diaphragm can dissipate heat in time. The lower the Poisson's ratio of the diaphragm, the better. Poisson's ratio describes the degree of deformation of sound waves during the transmission of the diaphragm. The higher the Poisson's ratio, the greater the deformation and the greater the distortion.
在追求优质的音质时，上述对振膜材质的要求，往往出现互相矛盾。对于各类塑料(如：聚芳酯(PAR)、聚乙烯二甲酸盐(PEN)、聚醚醚酮(PEEK)、聚醚酰亚胺(PEI)等)材质振膜而言，具有高可塑性，容易加工，成本低，但是刚性差，增加刚性则需要增加振膜的厚度，导致重量增加，因此塑料材质的振膜失真率高，解析力不好，动态不足，中频迟缓衔接不畅的问题。纸质和木质振膜材料轻，但是，对受环境影响大，湿度和温度的超标会损坏振膜。生物振膜的制作复杂，成本高昂，良品率低。金属振膜高频音质表现最佳，如高端产品，法国著名的HiFi音响品牌Focal(劲浪)旗下售价2万多元的耳机Utopia，就采用了含有剧毒、危险性较高的Be铍金属振膜，但是，铍太脆容易损坏，导致很难弯曲，不能通过压制的方式制作，制作复杂，此外，铍振膜的成本太高。In the pursuit of high-quality sound quality, the above-mentioned requirements for the material of the diaphragm often contradict each other. For all kinds of plastic (such as: polyarylate (PAR), polyethylene diformate (PEN), polyether ether ketone (PEEK), polyether imide (PEI), etc.) material diaphragm, it has high Plasticity, easy processing, low cost, but poor rigidity. Increasing rigidity requires increasing the thickness of the diaphragm, resulting in an increase in weight. Therefore, the plastic diaphragm has a high distortion rate, poor resolution, insufficient dynamics, and slow intermediate frequency connection. problem. Paper and wooden diaphragm materials are light, but they are greatly affected by the environment, and excessive humidity and temperature will damage the diaphragm. The production of biological diaphragms is complicated, costly, and has a low yield rate. The metal diaphragm has the best high-frequency sound quality. For example, high-end products, the famous French HiFi audio brand Focal, the headset Utopia, which sells for more than 20,000 yuan, uses the highly toxic and dangerous Be beryllium. Metal diaphragm, however, beryllium is too brittle and easily damaged, making it difficult to bend, and cannot be produced by pressing, which is complicated to produce. In addition, the cost of beryllium diaphragm is too high.
而近年来发现的石墨烯具有优异的光学、电学、力学特性，其独特的最薄性能，厚度仅0.335nm，最高强度达到拉伸强度130GPa，杨氏模量1TPa，导热系数高达5000W/m·K，石墨烯的这些特点决定其应该具有良好的低频音质表现。但是，石墨烯的化学稳定性高。The graphene discovered in recent years has excellent optical, electrical and mechanical properties, its unique thinnest performance, the thickness is only 0.335nm, the highest tensile strength reaches 130GPa, the Young's modulus is 1TPa, and the thermal conductivity is as high as 5000W/m· K. These characteristics of graphene determine that it should have good low-frequency sound quality. However, graphene has high chemical stability.
因此，现有振膜都不能具备或者接近既有金属振膜的高频音质表现，又有石墨烯的低频音质表现的音质效果。现有技术采用多种不同材质振膜的拼接或者不同材质振膜的发声部件的组合，去实现高频音质和低频音质，这样的设计增加了线圈与振膜组合或者声源处理的难度，此外，现有不同材质的振膜还分别面对着刚性差、密度高、散热不佳、制作复杂、成本高及其他问题。Therefore, none of the existing diaphragms has or is close to the high-frequency sound quality performance of the existing metal diaphragm and the low-frequency sound quality performance of graphene. The prior art uses the splicing of a variety of different material diaphragms or the combination of sound-producing parts of different material diaphragms to achieve high-frequency sound quality and low-frequency sound quality. This design increases the difficulty of coil and diaphragm combination or sound source processing. In addition, , The existing diaphragms of different materials also face poor rigidity, high density, poor heat dissipation, complex production, high cost and other problems.
因此，亟需一种刚性大、密度小、散热性能好、泊松比低、内部声速好且制作简单，价格低廉的高频、中频及低频音质优良的振膜。Therefore, there is an urgent need for a diaphragm with high rigidity, low density, good heat dissipation performance, low Poisson's ratio, good internal sound velocity, simple production, and low price.
发明内容Summary of the invention
有鉴于此，本发明的目的在于提供一种刚性大、密度小、散热性能好、泊松比低、内部声速好且制作简单，价格低廉的高频、中频及低频音质优良的振 膜、发声装置及麦克风。为实现上述目的，本发明采用如下技术方案：In view of this, the purpose of the present invention is to provide a diaphragm and sound production with high rigidity, low density, good heat dissipation performance, low Poisson's ratio, good internal sound speed, simple production, and low price. Device and microphone. In order to achieve the above objectives, the present invention adopts the following technical solutions:
一种振膜，应用于声电互换，所述振膜包括：基材层，所述基材层为石墨烯或者多层石墨烯；及金属镀层，所述金属镀层复合在所述基材层上。A diaphragm, which is used for acousto-electric interchange, the diaphragm includes: a substrate layer, the substrate layer is graphene or multi-layer graphene; and a metal plating layer, the metal plating layer is compounded on the substrate Layer up.
优选地，所述振膜的所述金属镀层的材料包括至少两种金属。Preferably, the material of the metal coating of the diaphragm includes at least two metals.
优选地，所述振膜的所述金属镀层的材料是一种金属。Preferably, the material of the metal coating of the diaphragm is a metal.
优选地，所述振膜的所述金属镀层的材料包括钛和铍两种金属。Preferably, the material of the metal coating of the diaphragm includes two metals, titanium and beryllium.
优选地，所述振膜的所述金属镀层的材料包括镁和锂两种金属。Preferably, the material of the metal coating of the diaphragm includes two metals, magnesium and lithium.
优选地，所述振膜的所述金属镀层的材料是铍、钛、铝、铜、银、金、镁、锂中的任何一种金属。Preferably, the material of the metal coating of the diaphragm is any one of beryllium, titanium, aluminum, copper, silver, gold, magnesium, and lithium.
优选地，所述振膜通过真空蒸镀法、磁控溅射法或者气相沉积法将所述金属镀层的材料复合在所述基材层上。Preferably, the vibration film is composited with the material of the metal plating layer on the substrate layer by a vacuum evaporation method, a magnetron sputtering method or a vapor deposition method.
一种发声装置，包括线圈，及振膜，所述振膜包括基材层为石墨烯或者多层石墨烯；及金属镀层复合在所述基材层上；所述线圈带动所述振膜震动，产生声波。A sound generating device, comprising a coil and a diaphragm, the diaphragm including a substrate layer of graphene or multilayer graphene; and a metal plating layer compounded on the substrate layer; the coil drives the diaphragm to vibrate , Produce sound waves.
优选地，所述振膜的所述金属镀层的材料包括至少两种金属。Preferably, the material of the metal coating of the diaphragm includes at least two metals.
优选地，所述振膜的所述金属镀层的材料是一种金属。Preferably, the material of the metal coating of the diaphragm is a metal.
优选地，所述振膜的所述金属镀层的材料包括钛和铍两种金属。Preferably, the material of the metal coating of the diaphragm includes two metals, titanium and beryllium.
优选地，所述振膜的所述金属镀层的材料包括镁和锂两种金属。Preferably, the material of the metal coating of the diaphragm includes two metals, magnesium and lithium.
优选地，所述振膜的所述金属镀层的材料是铍、钛、铝、铜、银、金、镁、锂中的任何一种金属。Preferably, the material of the metal coating of the diaphragm is any one of beryllium, titanium, aluminum, copper, silver, gold, magnesium, and lithium.
优选地，所述振膜通过真空蒸镀法、磁控溅射法或者气相沉积法将所述金属镀层的材料复合在所述基材层上。Preferably, the vibration film is composited with the material of the metal plating layer on the substrate layer by a vacuum evaporation method, a magnetron sputtering method or a vapor deposition method.
一种麦克风，包括背极板和振膜，所述振膜包括基材层为石墨烯或者多层石墨烯；及金属镀层复合在所述基材层上；所述背极板和所述振膜构成电容器，声波带动所述振膜震动，将声波转换为电信号。A microphone includes a back electrode plate and a diaphragm, the diaphragm including a substrate layer of graphene or multilayer graphene; and a metal plating layer compounded on the substrate layer; the back electrode plate and the diaphragm The membrane constitutes a capacitor, and sound waves drive the diaphragm to vibrate and convert the sound waves into electrical signals.
优选地，所述振膜的所述金属镀层的材料包括至少两种金属。Preferably, the material of the metal coating of the diaphragm includes at least two metals.
优选地，所述振膜的所述金属镀层的材料是一种金属。Preferably, the material of the metal coating of the diaphragm is a metal.
优选地，所述振膜的所述金属镀层的材料包括钛和铍两种金属。Preferably, the material of the metal coating of the diaphragm includes two metals, titanium and beryllium.
优选地，所述振膜的所述金属镀层的材料包括镁和锂两种金属。Preferably, the material of the metal coating of the diaphragm includes two metals, magnesium and lithium.
优选地，所述振膜的所述金属镀层的材料是铍、钛、铝、铜、银、金、镁、锂中的任何一种金属。Preferably, the material of the metal coating of the diaphragm is any one of beryllium, titanium, aluminum, copper, silver, gold, magnesium, and lithium.
优选地，所述振膜通过真空蒸镀法、磁控溅射法或者气相沉积法将所述金属镀层的材料复合在所述基材层上。Preferably, the vibration film is composited with the material of the metal plating layer on the substrate layer by a vacuum evaporation method, a magnetron sputtering method or a vapor deposition method.
一种振膜制作方法，包括如下步骤：提供基材层，所述基材层为石墨烯或者多层石墨烯；在所述基材层上复合金属镀层，所述金属镀层的材料包括铍、钛、铝、铜、银、金、镁、锂中的任何一种金属；所述金属镀层通过真空蒸镀法、磁控溅射法或者气相沉积法复合在所述基材层上。A method for manufacturing a diaphragm includes the following steps: providing a substrate layer, the substrate layer being graphene or multi-layer graphene; composite metal coating on the substrate layer, the metal coating material includes beryllium, Any one metal of titanium, aluminum, copper, silver, gold, magnesium, and lithium; the metal plating layer is compounded on the substrate layer by a vacuum evaporation method, a magnetron sputtering method or a vapor deposition method.
优选地，所述磁控溅射法包括：加热所述金属镀层材料至离子态；通过电场加速所述离子态的金属，使得所述离子态的金属射向所述基材层；Preferably, the magnetron sputtering method includes: heating the metal coating material to an ionic state; accelerating the ionic metal through an electric field so that the ionic metal is directed toward the substrate layer;
所述离子态的金属与所述基材层复合。The ionic metal is compounded with the substrate layer.
附图说明Description of the drawings
图1为本发明振膜一实施例中石墨烯及金属镀层的示意图。FIG. 1 is a schematic diagram of graphene and metal coating in an embodiment of the diaphragm of the present invention.
图2为本发明振膜另一实施例中多层石墨烯及金属镀层的示意图。2 is a schematic diagram of a multilayer graphene and metal coating in another embodiment of the diaphragm of the present invention.
图3为本发明振膜另一实施例中石墨烯及多层金属镀层的示意图。3 is a schematic diagram of graphene and multilayer metal coating in another embodiment of the diaphragm of the present invention.
图4为本发明振膜另一实施例中石墨烯及多层金属镀层的示意图。4 is a schematic diagram of graphene and multilayer metal coating in another embodiment of the diaphragm of the present invention.
图5为本发明发声装置一实施例的示意图。Fig. 5 is a schematic diagram of an embodiment of a sound generating device of the present invention.
图6为本发明麦克风一实施例中的电容器件示意图。Fig. 6 is a schematic diagram of a capacitive device in an embodiment of the microphone of the present invention.
主要元件符号说明Symbol description of main components
振膜 Diaphragm 1010
基材层/石墨烯Substrate layer/graphene 101101
金属镀层 Metal coating 102102
线圈 Coil 3030
背极板 Back plate 4040
具体实施方式detailed description
为了使发明的目的、原理、技术方案及优点更加清楚明白，以下结合附图及实施例，对本发明进行进一步详细说明。应当理解，正如本发明内容部分所述，此处所描述的具体实施例用以解释本发明，并不用于限定本发明。In order to make the objectives, principles, technical solutions, and advantages of the invention clearer, the following further describes the invention in detail with reference to the accompanying drawings and embodiments. It should be understood that, as described in the content of the present invention, the specific embodiments described here are used to explain the present invention, but not to limit the present invention.
需要特别说明的是，根据说明书的文字或者技术内容可以确定的连接或位置关系，为了图画的简洁进行了部分的省略或者没有画出全部的位置变化图，本说明书未明确说明省略的或者没有画出的位置变化图，不能认为没有说明，为了阐述的简洁，在具体阐述时不再一一进行说明，在此统一说明。It should be noted that the connection or positional relationship that can be determined according to the text or technical content of the manual. For the sake of simplicity of the picture, some omissions or not all the position changes are shown. This manual does not clearly explain the omitted or no pictures The position change diagram shown cannot be regarded as without explanation. For the sake of brevity of the explanation, the detailed explanation will not be explained one by one, and the explanation will be unified here.
请参见图1，为本发明振膜一实施例中石墨烯及金属镀层的示意图。在本发明中，石墨烯是指符合GB/T 30544.13‐2018《纳米科技 术语 第13部分：石墨烯及相关二维材料》的定义，具体而言，石墨烯是由一个碳原子与周围3个近邻碳原子结合形成蜂窝状结构的碳原子单层。在本发明特别声明，为描述的简洁，本发明所述的石墨烯也可包括GB/T 30544.13‐2018《纳米科技 术语 第13部分：石墨烯及相关二维材料》定义的石墨烯层，描述主要以sp2杂化成键所形成的三维碳材料的结构和性质的，一个概念性结构单元。在本发明中，多层石墨烯是指双层石墨烯、三层石墨烯、少层石墨烯，也就是上述标准中定义的厚度小于或者等于10层时。在此需要特别说明，在本发明中，多层石墨烯也指超过厚度超过10层的情形，也就是通常所称的石墨片，也属于本发明的多层石墨烯的一种情形。Please refer to FIG. 1, which is a schematic diagram of graphene and metal plating in an embodiment of the diaphragm of the present invention. In the present invention, graphene refers to the definition in GB/T 30544.13-2018 "Nanotechnology Terminology Part 13: Graphene and Related Two-dimensional Materials". Specifically, graphene is composed of one carbon atom and three surrounding Neighboring carbon atoms combine to form a monolayer of carbon atoms in a honeycomb structure. In the special statement of the present invention, for the sake of brevity of description, the graphene described in the present invention may also include the graphene layer defined in GB/T 30544.13-2018 "Nanotechnology Terminology Part 13: Graphene and Related Two-dimensional Materials", description It is a conceptual structural unit mainly based on the structure and properties of the three-dimensional carbon material formed by sp2 hybridization. In the present invention, multi-layer graphene refers to double-layer graphene, three-layer graphene, and few-layer graphene, that is, when the thickness defined in the above standard is less than or equal to 10 layers. It needs to be specifically noted here that in the present invention, multi-layer graphene also refers to the case where the thickness exceeds 10 layers, that is, the commonly referred to as graphite sheet, which also belongs to the multi-layer graphene of the present invention.
图1所示的一种振膜，是应用于声电互换。同时参见图5，图5为本发明发声装置一实施例的示意图，举例而言，耳机的线圈30带动振膜10的震动，可以将电信号转换为声波。再参见图6，为本发明麦克风一实施例中的电容器 件示意图，在麦克风中，振膜10与背极板40构成电容器，振膜10随声波的振动导致其与背极板40之间的电势差改变，从而将声学信号转换为电信号。在其他实施例中，图6的振膜10的金属镀层102靠近背极板40，不能根据图6限制振膜10与背极板40接近的层的材质为基材层101。The diaphragm shown in Figure 1 is used for acousto-electric interchange. Refer to FIG. 5 at the same time. FIG. 5 is a schematic diagram of an embodiment of the sound generating device of the present invention. For example, the coil 30 of the earphone drives the vibration of the diaphragm 10 to convert electrical signals into sound waves. 6 again, it is a schematic diagram of the capacitive device in an embodiment of the microphone of the present invention. In the microphone, the diaphragm 10 and the back plate 40 constitute a capacitor. The potential difference changes, thereby converting the acoustic signal into an electrical signal. In other embodiments, the metal plating layer 102 of the diaphragm 10 in FIG. 6 is close to the back electrode plate 40, and the material of the layer that cannot restrict the proximity of the diaphragm 10 and the back electrode plate 40 according to FIG. 6 is the base layer 101.
在本发明中，所述振膜10包括基材层101，所述基材层101为石墨烯或者多层石墨烯；金属镀层102，所述金属镀层102复合在所述基材层101上。In the present invention, the diaphragm 10 includes a substrate layer 101, the substrate layer 101 is graphene or multilayer graphene; a metal plating layer 102, the metal plating layer 102 is composited on the substrate layer 101.
纯金属振膜有着良好的高频音质，但是十分昂贵，且不易制作，并且较脆容易损坏；在现有的振膜中，也有将金属镀在塑料上的方案，这样的方案就较厚，对音质造成损伤。石墨烯以及多层石墨烯作为新材料，其特点是有良好的低频音质。但是，由于石墨烯的化学稳定性好，也就是化学惰性强，造成石墨烯与金属复合构成特定用途的膜是无法实现的。本发明背景技术对此进行了相关的介绍，在此不再赘述。Pure metal diaphragm has good high-frequency sound quality, but it is very expensive, difficult to make, and is brittle and easily damaged. In the existing diaphragm, there is also a scheme of plating metal on plastic, which is thicker. Damage to the sound quality. Graphene and multilayer graphene as new materials are characterized by good low-frequency sound quality. However, due to the good chemical stability of graphene, that is, the strong chemical inertness, it is impossible to realize the combination of graphene and metal to form a film for a specific purpose. The background art of the present invention has made relevant introductions, which will not be repeated here.
在本发明中，对基材层101采用石墨烯或者多层石墨烯，通过真空蒸镀法、磁控溅射法或者气相沉积法在基材层101上复合金属镀层102得到薄膜，将该薄膜作为振膜10，应用于声电互换的领域，本发明的振膜具有刚性大、密度小、散热性能好、泊松比低、内部声速好且制作简单，价格低廉的高频、中频及低频音质优良的优点。In the present invention, graphene or multi-layer graphene is used for the substrate layer 101, and the metal plating layer 102 is compounded on the substrate layer 101 by a vacuum evaporation method, a magnetron sputtering method or a vapor deposition method to obtain a thin film. As the diaphragm 10, it is applied in the field of acousto-electric interchange. The diaphragm of the present invention has high rigidity, low density, good heat dissipation performance, low Poisson's ratio, good internal sound velocity, simple production, and low-cost high-frequency, intermediate-frequency, and The advantages of excellent low-frequency sound quality.
本发明中金属镀层102的材料包括至少两种金属。举例而言，金属镀层102至少包括钛和铍两种金属组成的合金，在本发明中，描述金属镀层102包括至少两种金属时，其中，“至少”是指强调这两种金属的存在，也指还可以包括这两种金属之外的金属存在，也就是三种以上的金属构成的合金。在本实施例中，金属钛和金属铍可以构成刚性大、密度小、散热性能好、泊松比低、内部声速好合金，从而可以在高中频具备优质的音质。在本实施例中，将包含钛和铍进行加热至离子态，通过电场加速离子态的钛和铍，高速射向石墨烯基材层101，实现钛和铍与石墨烯基材层101的复合，实现在基材层101上复合金属镀层102的，结合石墨烯的低频优质的音质，得到的振膜10具备在高频、中频及低频的 优质音质，在单一振膜上实现了高中低频的优质音质。The material of the metal plating layer 102 in the present invention includes at least two metals. For example, the metal plating layer 102 includes at least an alloy composed of two metals of titanium and beryllium. In the present invention, when the metal plating layer 102 is described as including at least two metals, "at least" means to emphasize the existence of these two metals. It also refers to the existence of metals other than these two metals, that is, an alloy composed of three or more metals. In this embodiment, metallic titanium and metallic beryllium can form an alloy with high rigidity, low density, good heat dissipation performance, low Poisson's ratio, and good internal sound velocity, so as to have high-quality sound quality at high and intermediate frequencies. In this embodiment, the titanium and beryllium containing titanium and beryllium are heated to an ionic state, and the ionic titanium and beryllium are accelerated by an electric field, and shot toward the graphene substrate layer 101 at a high speed to realize the composite of the titanium and beryllium and the graphene substrate layer 101 , To achieve the composite metal plating layer 102 on the substrate layer 101, combined with the high-quality low-frequency sound quality of graphene, the obtained diaphragm 10 has high-quality sound quality at high, mid and low frequencies, and achieves high, middle and low frequencies on a single diaphragm. Premium sound quality.
在另一实施例中，金属镀层102的材料包括至少两种金属是镁和锂两种金属，可以进一步的降低成本，并且可以避免铍的剧毒性给振膜产品应用增加的防护设计。In another embodiment, the material of the metal plating layer 102 includes at least two metals, magnesium and lithium, which can further reduce the cost, and can avoid the high toxicity of beryllium to increase the protective design of the diaphragm product application.
在本发明中，金属镀层102的材料可以是一种金属。典型的金属材料是铍、钛、铝、铜、银、金、镁、锂中的任何一种金属。在本实施例中，以金属镀层102的材质是铍为例介绍。In the present invention, the material of the metal plating layer 102 may be a metal. Typical metal materials are any of beryllium, titanium, aluminum, copper, silver, gold, magnesium, and lithium. In this embodiment, the material of the metal plating layer 102 is beryllium as an example.
将金属铍加热到离子态，通过电场加速后高速射向基材层101，金属铍复合在基材层101的石墨烯或者多层石墨烯上，形成石墨烯镀铍的振膜10，石墨烯具备优良的低频音质，散热性能，泊松比低、内部声速好，导热性能优秀决定其传声效果优秀，再结合金属镀层102为铍，也具备此类特征。在本实施例中，通过磁控溅射法可以低成本的，简单的制作振膜10。该振膜的石墨烯及金属均具备良好的散热性能，在作为振膜10使用的时候，可以有效的散热，避免振膜10因为温度过高造成的刚度下降、老化、擦圈等问题。The metal beryllium is heated to an ionic state, accelerated by an electric field, and then shot toward the substrate layer 101 at a high speed. The metal beryllium is compounded on the graphene or multilayer graphene of the substrate layer 101 to form a beryllium-plated graphene diaphragm 10, graphene It has excellent low-frequency sound quality, heat dissipation performance, low Poisson's ratio, good internal sound velocity, and excellent thermal conductivity determine its excellent sound transmission effect. Combined with the metal coating 102 as beryllium, it also has such characteristics. In this embodiment, the diaphragm 10 can be fabricated in a low-cost and simple manner by the magnetron sputtering method. The graphene and metal of the diaphragm have good heat dissipation performance, and when used as the diaphragm 10, it can effectively dissipate heat, and avoid problems such as the decrease of stiffness, aging, and ring rubbing of the diaphragm 10 due to excessive temperature.
本发明通过磁控溅射法等制作工艺，可以克服石墨烯的化学惰性，克服了现有技术中的技术偏见，从而简单，低成本的制作石墨烯金属镀层的薄膜，并选择将该薄膜应用于声电互换的领域，作为振膜使用。The present invention can overcome the chemical inertness of graphene and technical prejudices in the prior art through magnetron sputtering and other manufacturing processes, so that the graphene metal coating film can be fabricated simply and at low cost, and the film can be selectively applied In the field of acousto-electric interchange, it is used as a diaphragm.
在本发明中，还可以通过真空蒸镀法或者气相沉积法将所述金属镀层102的材料复合在所述基材层101上，在此不在赘述。In the present invention, the material of the metal plating layer 102 can also be composited on the substrate layer 101 by a vacuum evaporation method or a vapor deposition method, which will not be repeated here.
图2为本发明振膜10另一实施例中多层石墨烯101及金属镀层102的示意图。在本实施例中，基材层101是多层石墨烯，举例而言，可以有多达10层的石墨烯。需要注意的是，如果在音质、散热性能可以合格的情况下，本发明也包括超过10层石墨烯的基材层。在本实施例中，以多层石墨烯和一层金属镀层102举例说明，如本说明书图1部分介绍，该金属镀层可以是一种金属，也可以是多种金属的合金。在另一实施例中，也可以是多层石墨烯和多层金属镀层102的复合，在此不在赘述。2 is a schematic diagram of the multilayer graphene 101 and the metal plating layer 102 in another embodiment of the diaphragm 10 of the present invention. In this embodiment, the substrate layer 101 is a multilayer graphene, for example, there may be up to 10 layers of graphene. It should be noted that if the sound quality and heat dissipation performance can be qualified, the present invention also includes a substrate layer with more than 10 graphene layers. In this embodiment, a multi-layer graphene and a layer of metal coating 102 are used as examples. As described in FIG. 1 of this specification, the metal coating may be a metal or an alloy of multiple metals. In another embodiment, it may also be a composite of multilayer graphene and multilayer metal plating layer 102, which will not be repeated here.
图3为本发明振膜10另一实施例中石墨烯101及多层金属镀层102的示意图。在本实施例中，金属镀层102包括2层或者2层以上，并且每层的金属可以分别为一种金属或者多种金属组成的合金。3 is a schematic diagram of the graphene 101 and the multilayer metal coating 102 in another embodiment of the diaphragm 10 of the present invention. In this embodiment, the metal plating layer 102 includes two or more layers, and the metal of each layer may be one metal or an alloy composed of multiple metals.
图4为本发明振膜10另一实施例中石墨烯101及多层金属镀层102的示意图。在本实施例中，金属镀层102是分布在石墨烯101的两侧。在其他实施例中，金属镀层102在石墨烯101两侧的层数是可以不同的，金属的材质也可以是不同的，可以为一种金属或者多种金属组成的合金。4 is a schematic diagram of the graphene 101 and the multilayer metal coating 102 in another embodiment of the diaphragm 10 of the present invention. In this embodiment, the metal plating layer 102 is distributed on both sides of the graphene 101. In other embodiments, the number of layers of the metal plating layer 102 on both sides of the graphene 101 may be different, and the material of the metal may also be different, and it may be one metal or an alloy composed of multiple metals.
在本发明中，还提供一种振膜10制作方法，实现了简单、低成本的制作振膜10。具体而言，提供基材层101，所述基材层101为石墨烯或者多层石墨烯，在所述基材层101上复合金属镀层102，所述金属镀层102的材料包括铍、钛、铝、铜、银、金、镁、锂中的任何一种金属，在其他实施例中是多种金属的合金；金属镀层102通过真空蒸镀法、磁控溅射法或者气相沉积法复合在所述基材层101上。In the present invention, a method for manufacturing the diaphragm 10 is also provided, which realizes the simple and low-cost manufacturing of the diaphragm 10. Specifically, a substrate layer 101 is provided, the substrate layer 101 is graphene or multilayer graphene, and a metal plating layer 102 is compounded on the substrate layer 101. The material of the metal plating layer 102 includes beryllium, titanium, Any one of aluminum, copper, silver, gold, magnesium, and lithium is an alloy of multiple metals in other embodiments; the metal plating layer 102 is compounded by vacuum evaporation, magnetron sputtering, or vapor deposition. On the substrate layer 101.
在本实施例中，以磁控溅射法举例说明，加热所述金属镀层102材料至离子态；通过电场加速所述离子态的金属，使得所述离子态的金属射向所述基材层101；所述离子态的金属与所述基材层101复合，得到了振膜10。In this embodiment, the magnetron sputtering method is used as an example to heat the metal plating layer 102 material to an ionic state; the ionic metal is accelerated by an electric field, so that the ionic metal is directed toward the substrate layer 101; The ionic metal is recombined with the substrate layer 101 to obtain the diaphragm 10.
本发明以附图的振膜举例说明，但能将各附图的结构、层数或者金属镀层材质进行割裂的理解，本发明中对于基材层和金属镀层的结构，具体的层数，金属材质的解释是在各个实施例中可以实施的。The present invention is illustrated by the diaphragm of the accompanying drawings, but the structure, number of layers or metal plating material of each figure can be divided into understanding. In the present invention, the structure of the base material layer and the metal plating layer, the specific number of layers, and the metal The explanation of the material can be implemented in each embodiment.
值得注意的是，上述实施例中，所包括的各个模块只是按照功能逻辑进行划分的，但并不局限于上述的划分，只要能够实现相应的功能即可；另外，各功能单元的具体名称也只是为了便于相互区分，并不用于限制本发明的保护范围。It is worth noting that, in the above-mentioned embodiment, the modules included are only divided according to the functional logic, but not limited to the above-mentioned division, as long as the corresponding function can be realized; in addition, the specific name of each functional unit is also It is just for the convenience of distinguishing each other, and is not used to limit the protection scope of the present invention.
以上所述仅为本发明的较佳实施例而已，并不用以限制本发明，凡在本发明的精神和原则之内所作的任何修改、等同替换和改进等，均应包含在本发明的保护范围之内。The foregoing descriptions are only preferred embodiments of the present invention and are not intended to limit the present invention. Any modification, equivalent replacement and improvement made within the spirit and principle of the present invention shall be included in the protection of the present invention. Within range.

Claims (11)

  1. 一种振膜，应用于声电互换，其特征在于，所述振膜包括：A diaphragm applied to acousto-electric interchange, characterized in that the diaphragm includes:
    基材层，所述基材层为石墨烯或者多层石墨烯；及A substrate layer, where the substrate layer is graphene or multilayer graphene; and
    金属镀层，所述金属镀层复合在所述基材层上。The metal plating layer is compounded on the substrate layer.
  2. 如权利要求1所述的振膜，其特征在于，所述金属镀层的材料包括至少两种金属。The diaphragm according to claim 1, wherein the material of the metal plating layer includes at least two metals.
  3. 如权利要求1所述的振膜，其特征在于，所述金属镀层的材料是一种金属。The diaphragm according to claim 1, wherein the material of the metal plating layer is a metal.
  4. 如权利要求2所述的振膜，其特征在于，所述金属镀层的材料包括钛和铍两种金属。The diaphragm of claim 2, wherein the material of the metal coating includes two metals, titanium and beryllium.
  5. 如权利要求2所述的振膜，其特征在于，所述金属镀层的材料包括镁和锂两种金属。The diaphragm of claim 2, wherein the material of the metal coating includes two metals, magnesium and lithium.
  6. 如权利要求3所述的振膜，其特征在于，所述金属镀层的材料是铍、钛、铝、铜、银、金、镁、锂中的任何一种金属。The diaphragm according to claim 3, wherein the material of the metal coating is any metal selected from the group consisting of beryllium, titanium, aluminum, copper, silver, gold, magnesium, and lithium.
  7. 如权利要求1、2、3、4、5或6中任一所述的振膜，其特征在于，通过真空蒸镀法、磁控溅射法或者气相沉积法将所述金属镀层的材料复合在所述基材层上。The diaphragm according to any one of claims 1, 2, 3, 4, 5 or 6, characterized in that the material of the metal plating layer is composited by a vacuum evaporation method, a magnetron sputtering method or a vapor deposition method On the substrate layer.
  8. 一种发声装置，包括线圈，其特征在于，包括如权利要求1至7中任一项所述的振膜，所述线圈带动所述振膜震动，产生声波。A sound generating device, comprising a coil, characterized in that it comprises the diaphragm according to any one of claims 1 to 7, and the coil drives the diaphragm to vibrate to generate sound waves.
  9. 一种麦克风，包括背极板，其特征在于，包括如权利要求1至7中任一项所述的振膜，所述背极板和所述振膜构成电容器，声波带动所述振膜震动，将声波转换为电信号。A microphone comprising a back electrode plate, characterized in that it comprises the diaphragm according to any one of claims 1 to 7, the back electrode plate and the diaphragm constitute a capacitor, and sound waves drive the diaphragm to vibrate , Convert sound waves into electrical signals.
  10. 一种振膜制作方法，其特征在于，包括如下步骤：A method for manufacturing a diaphragm is characterized in that it comprises the following steps:
    提供基材层，所述基材层为石墨烯或者多层石墨烯；Providing a substrate layer, the substrate layer being graphene or multilayer graphene;
    在所述基材层上复合金属镀层，所述金属镀层的材料包括铍、钛、铝、铜、银、金、镁、锂中的任何一种金属；Composite metal plating layer on the substrate layer, the material of the metal plating layer includes any one metal of beryllium, titanium, aluminum, copper, silver, gold, magnesium, and lithium;
    所述金属镀层通过真空蒸镀法、磁控溅射法或者气相沉积法复合在所述基材层上。The metal plating layer is compounded on the substrate layer by a vacuum evaporation method, a magnetron sputtering method or a vapor deposition method.
  11. 如权利要求10所述的振膜制作方法，其特征在于，所述磁控溅射法包括：9. The method of manufacturing a diaphragm of claim 10, wherein the magnetron sputtering method comprises:
    加热所述金属镀层材料至离子态；Heating the metal coating material to an ionic state;
    通过电场加速所述离子态的金属，使得所述离子态的金属射向所述基材层；Accelerate the metal in the ionic state by an electric field, so that the metal in the ionic state is projected toward the substrate layer;
    所述离子态的金属与所述基材层复合。The ionic metal is compounded with the substrate layer.
PCT/CN2020/130472 2020-06-08 2020-11-20 Vibrating diaphragm, sound generation device, microphone assembly, and method for making vibrating diaphragm WO2021248838A1 (en)

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