CN114690822B - Dark current compensation circuit of photodiode - Google Patents
Dark current compensation circuit of photodiode Download PDFInfo
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- CN114690822B CN114690822B CN202210301344.0A CN202210301344A CN114690822B CN 114690822 B CN114690822 B CN 114690822B CN 202210301344 A CN202210301344 A CN 202210301344A CN 114690822 B CN114690822 B CN 114690822B
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- G—PHYSICS
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- H01L31/08—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof in which radiation controls flow of current through the device, e.g. photoresistors
- H01L31/10—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof in which radiation controls flow of current through the device, e.g. photoresistors characterised by potential barriers, e.g. phototransistors
- H01L31/101—Devices sensitive to infrared, visible or ultraviolet radiation
- H01L31/102—Devices sensitive to infrared, visible or ultraviolet radiation characterised by only one potential barrier
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Abstract
The invention belongs to the technical field of integrated circuit photosensitive detection, and particularly relates to a dark current compensation circuit of a photosensitive diode. The shading processing circuit of the photodiode is used for converting dark current generated by the photodiode into voltage signals and outputting the voltage signals; the superposition circuit of the dark current and the illumination current of the photosensitive diode is used for converting the dark current and the illumination current of the photosensitive diode into voltage signals to be output; the voltage follower U1 and the voltage follower U3 are respectively used for collecting the voltage output by the shading processing circuit of the photodiode and the voltage output by the superposition circuit of the dark current and the illumination current of the photodiode; the subtracter is used for subtracting the voltage output by the shading processing circuit of the photodiode from the voltage output by the superposition circuit of the dark current and the illumination current of the photodiode to obtain a pure illumination current converted voltage signal; the three operational amplifier instrument amplifier is used for amplifying the voltage signal irrelevant to dark current so as to facilitate the acquisition of the voltage value by the later-stage circuit.
Description
Technical Field
The invention belongs to the technical field of integrated circuit photosensitive detection, and particularly relates to a dark current compensation circuit of a photosensitive diode.
Background
With the development of modern science and technology, the application field of photoelectric detection is expanding, and the noise problem of the detection circuit is attracting attention, wherein the noise comprises the dark current of the photodiode. Dark current can be defined as the leakage current existing in the detector without light incidence, and the magnitude of the leakage current affects the sensitivity of the optical receiver, and is one of main indexes of the detector.
In the prior art, the problem of dark current of a photodiode is usually solved in a device, or a switching circuit is adopted, which inevitably introduces switching noise, and a method for solving the problem of dark current by adopting an actual circuit is less common.
Disclosure of Invention
The present invention provides a dark current compensation circuit for a photodiode to solve the above-mentioned problems.
The technical scheme adopted by the invention is as follows: a dark current compensation circuit of a photodiode comprises a shading processing circuit of the photodiode, a superposition circuit of dark current and illumination current of the photodiode, a voltage follower U1, a voltage follower U3, a subtracter and a three-operational amplifier instrument amplifier; the shading processing circuit of the photosensitive diode is used for converting dark current generated by the photosensitive diode into voltage signals and outputting the voltage signals; the superposition circuit of the dark current and the illumination current of the photosensitive diode is used for converting the dark current and the illumination current of the photosensitive diode into voltage signals to be output; the voltage follower U1 is used for collecting the output voltage of the shading processing circuit of the photodiode and outputting the output voltage to the subtracter; the voltage follower U3 is used for collecting the output voltage of the superposition circuit of the dark current and the illumination current of the photodiode and outputting the output voltage to the subtracter; the subtracter is used for subtracting the voltage output by the shading processing circuit of the photodiode from the voltage output by the superposition circuit of the dark current and the illumination current of the photodiode to obtain a pure illumination current converted voltage signal; the three operational amplifier instrument amplifier is used for amplifying the voltage signal irrelevant to dark current so as to facilitate the acquisition of the voltage value by the later-stage circuit.
As a preferable technical scheme of the invention: the shading processing circuit of the photodiode comprises a resistor R1, a photodiode D1, a constant current source I2 and a capacitor C2; one end of the resistor R1 is connected with the power supply voltage VCC, the other end of the resistor R1 is connected with the constant current source I2, the positive end and the negative end of the photodiode D1 are connected with the two ends of the constant current source I2, one end of the constant current source I2 is connected with the non-inverting input end of the voltage follower U1, the other end of the constant current source I2 is grounded, and the two ends of the capacitor C2 are connected with the two ends of the constant current source I2.
As a preferable technical scheme of the invention: the superposition circuit of the dark current and the illumination current of the photodiode comprises a resistor R3, a constant current source I3, a capacitor C1 and a constant current source I1; one end of the resistor R3 is connected with the power supply voltage VCC, the other end of the resistor R3 is connected with the constant current source I3, one end of the constant current source I3 is connected with the non-inverting input end of the voltage follower U3, the other end of the resistor C1 is connected with the two ends of the constant current source I3, and one end of the constant current source I1 is connected with the non-inverting input end of the voltage follower U3 and the other end of the constant current source I1 is grounded.
As a preferable technical scheme of the invention: the voltage follower U1 comprises a variable resistor R2 and a resistor R6; the 7 feet of the voltage follower U1 are connected with the power supply voltage VCC, one end of the variable resistor R2 is connected with the 8 feet of the voltage follower U1, the other end of the variable resistor R2 is connected with the 1 feet of the voltage follower U1, one end of the resistor R6 is connected with the inverting input end of the voltage follower U1, the other end of the resistor R6 is connected with the output end of the voltage follower U1, and the 4 feet of the voltage follower U1 are connected with the negative voltage power supply VEE.
As a preferable technical scheme of the invention: the voltage follower U3 comprises a variable resistor R4 and a resistor R5; the 7 feet of the voltage follower U3 are connected with the power supply voltage VCC, one end of the variable resistor R4 is connected with the 8 feet of the voltage follower U3, the other end of the variable resistor R4 is connected with the 1 feet of the voltage follower U3, one end of the resistor R5 is connected with the inverting input end of the voltage follower U3, the other end of the resistor R5 is connected with the output end of the voltage follower U3, and the 4 feet of the voltage follower U3 are connected with the negative voltage power supply VEE.
As a preferable technical scheme of the invention: the subtracter comprises a resistor R18, a resistor R17, a variable resistor R14, a resistor R16 and a resistor R15; the one end of the resistor R18 is connected with the output end of the voltage follower U3, the other end is connected with the in-phase input end of the subtracter U7, the 7 pin of the subtracter U7 is connected with the power supply voltage VCC, one end of the variable resistor R14 is connected with the 8 pin of the subtracter U7, the other end is connected with the 1 pin of the subtracter U7, the output end of the subtracter U7 is connected with the in-phase input end of the operational amplifier U5, one end of the resistor R15 is connected with the inverting input end of the subtracter U7, the other end is connected with the output end of the subtracter U7, and the 4 pin of the subtracter U7 is connected with the negative voltage power supply VEE.
As a preferable technical scheme of the invention: the three operational amplifier instrument amplifier comprises a capacitor C3, an operational amplifier U5, a capacitor C4, a resistor R9, a resistor R8, a resistor R13, a resistor R10, a capacitor C6, an operational amplifier U4, a capacitor C5, a resistor R12, a resistor R11, a capacitor C7, an operational amplifier U6, a capacitor C8 and a resistor R20; one end of a capacitor C3 is connected with a power supply voltage VCC, the other end of the capacitor C is grounded, 7 pins of the operational amplifier U5 are connected with the power supply voltage VCC, one end of a capacitor C4 is connected with a negative voltage power supply VEE, the other end of the capacitor C4 is grounded, one end of a resistor R9 is connected with the reverse input end of the operational amplifier U5, the other end of the resistor R9 is connected with the output end of the operational amplifier U5, the other end of the resistor R8 is connected with the reverse input end of the operational amplifier U6, one end of a resistor R13 is connected with the reverse input end of the operational amplifier U5, the other end of the resistor R10 is connected with the reverse input end of the operational amplifier U4, the other end of the resistor R10 is connected with the output end of the operational amplifier U4, one end of the capacitor C6 is connected with the negative voltage power supply VEE, and the other end of the resistor is grounded, the non-inverting input end of the operational amplifier U4 is grounded, one end of the capacitor C5 is grounded, the other end of the capacitor C5 is grounded, the 7 pin of the operational amplifier U4 is grounded, one end of the resistor R12 is connected with the output end of the operational amplifier U4, the other end of the resistor R12 is connected with the non-inverting input end of the operational amplifier U6, one end of the resistor R11 is connected with the inverting input end of the operational amplifier U6, the other end of the resistor R11 is connected with the output end of the operational amplifier U6, the 4 pin of the operational amplifier U6 is grounded, one end of the capacitor C7 is connected with the negative voltage power supply VEE, the other end of the capacitor C7 is grounded, the 7 pin of the operational amplifier U6 is connected with the power supply voltage VCC, one end of the capacitor C8 is grounded, and one end of the resistor R20 is connected with the non-inverting input end of the operational amplifier U6.
Compared with the prior art, the invention has the beneficial effects that: the dark current compensation circuit of the photodiode provided by the invention has the advantages of novel design, convenience in use, high detection sensitivity, capability of amplifying extremely weak illumination signals, convenience in acquisition of voltage values by a back-stage circuit and strong practicability.
Drawings
Fig. 1: the circuit connection diagram of the invention is one;
fig. 2: the circuit connection schematic diagram II of the invention;
fig. 3: the invention is used for observing the schematic diagram of the indication of the voltage follower and the subtracter probe under the condition of illumination current of 10 nA;
fig. 4: the invention is used for observing the schematic diagram of the XMM1 reading of the subtractor voltage meter and the XMM2 reading of the three operational amplifier instrument amplifier under the condition of 10nA illumination current;
fig. 5: the present invention does not show the schematic diagram of the voltmeter of fig. 4;
fig. 6: the invention is used for observing the magnitude of the extracted voltage signal irrelevant to dark current and the schematic diagram of the magnitude of the amplified voltage signal under the condition of 1 mu A of illumination current;
fig. 7: the present invention does not show the schematic diagram of the voltmeter of fig. 6;
fig. 8: the invention is used for observing the magnitude of the extracted voltage signal irrelevant to dark current and the schematic diagram of the magnitude of the amplified voltage signal under the condition of 100pA of illumination current;
fig. 9: the present invention does not show the schematic diagram of the voltmeter of fig. 8.
Detailed Description
The present invention will be described in further detail with reference to the drawings and examples, in order to make the objects, technical solutions and advantages of the present invention more apparent. Of course, the specific embodiments described herein are for purposes of illustration only and are not intended to limit the invention.
As shown in fig. 1-2, the dark current compensation circuit of the photodiode provided by the invention comprises a shading processing circuit of the photodiode, a superposition circuit of dark current and illumination current of the photodiode, a voltage follower, a subtracter and a three-operational amplifier instrument amplifier. The shading processing circuit of the photosensitive diode is used for converting dark current generated by the photosensitive diode into voltage signals and outputting the voltage signals; the superposition circuit of the dark current and the illumination current of the photosensitive diode is used for converting the dark current and the illumination current of the photosensitive diode into voltage signals to be output; the voltage follower U1 is used for collecting the output voltage of the shading processing circuit of the photodiode and outputting the output voltage to the subtracter; the voltage follower U3 is used for collecting the output voltage of the superposition circuit of the dark current and the illumination current of the photodiode and outputting the output voltage to the subtracter; the subtracter is used for subtracting the voltage output by the shading processing circuit of the photodiode from the voltage output by the superposition circuit of the dark current and the illumination current of the photodiode to obtain a pure illumination current converted voltage signal; the three operational amplifier instrument amplifier is used for amplifying the voltage signal irrelevant to dark current so as to facilitate the acquisition of the voltage value by the later-stage circuit.
The shading processing circuit of the photodiode comprises a resistor R1, a photodiode D1, a constant current source I2 and a capacitor C2; one end of the resistor R1 is connected with the power supply voltage VCC, the other end of the resistor R1 is connected with the constant current source I2, the positive end and the negative end of the photodiode D1 are connected with the two ends of the constant current source I2, one end of the constant current source I2 is connected with the non-inverting input end of the voltage follower U1, the other end of the constant current source I2 is grounded, and the two ends of the capacitor C2 are connected with the two ends of the constant current source I2.
The superposition circuit of the dark current and the illumination current of the photodiode comprises a resistor R3, a constant current source I3, a capacitor C1 and a constant current source I1; one end of the resistor R3 is connected with the power supply voltage VCC, the other end of the resistor R3 is connected with the constant current source I3, one end of the constant current source I3 is connected with the non-inverting input end of the voltage follower U3, the other end of the resistor C1 is connected with the two ends of the constant current source I3, and one end of the constant current source I1 is connected with the non-inverting input end of the voltage follower U3 and the other end of the constant current source I1 is grounded.
The voltage follower U1 comprises a variable resistor R2 and a resistor R6; the 7 feet of the voltage follower U1 are connected with the power supply voltage VCC, one end of the variable resistor R2 is connected with the 8 feet of the voltage follower U1, the other end of the variable resistor R2 is connected with the 1 feet of the voltage follower U1, one end of the resistor R6 is connected with the inverting input end of the voltage follower U1, the other end of the resistor R6 is connected with the output end of the voltage follower U1, and the 4 feet of the voltage follower U1 are connected with the negative voltage power supply VEE.
The voltage follower U3 comprises a variable resistor R4 and a resistor R5; the 7 feet of the voltage follower U3 are connected with the power supply voltage VCC, one end of the variable resistor R4 is connected with the 8 feet of the voltage follower U3, the other end of the variable resistor R4 is connected with the 1 feet of the voltage follower U3, one end of the resistor R5 is connected with the inverting input end of the voltage follower U3, the other end of the resistor R5 is connected with the output end of the voltage follower U3, and the 4 feet of the voltage follower U3 are connected with the negative voltage power supply VEE.
The subtracter comprises a resistor R18, a resistor R17, a variable resistor R14, a resistor R16 and a resistor R15; the one end of the resistor R18 is connected with the output end of the voltage follower U3, the other end is connected with the in-phase input end of the subtracter U7, the 7 pin of the subtracter U7 is connected with the power supply voltage VCC, one end of the variable resistor R14 is connected with the 8 pin of the subtracter U7, the other end is connected with the 1 pin of the subtracter U7, the output end of the subtracter U7 is connected with the in-phase input end of the operational amplifier U5, one end of the resistor R15 is connected with the inverting input end of the subtracter U7, the other end is connected with the output end of the subtracter U7, and the 4 pin of the subtracter U7 is connected with the negative voltage power supply VEE.
The three operational amplifier instrument amplifier comprises a capacitor C3, an operational amplifier U5, a capacitor C4, a resistor R9, a resistor R8, a resistor R13, a resistor R10, a capacitor C6, an operational amplifier U4, a capacitor C5, a resistor R12, a resistor R11, a capacitor C7, an operational amplifier U6, a capacitor C8 and a resistor R20; one end of a capacitor C3 is connected with a power supply voltage VCC, the other end of the capacitor C is grounded, 7 pins of the operational amplifier U5 are connected with the power supply voltage VCC, one end of a capacitor C4 is connected with a negative voltage power supply VEE, the other end of the capacitor C4 is grounded, one end of a resistor R9 is connected with the reverse input end of the operational amplifier U5, the other end of the resistor R9 is connected with the output end of the operational amplifier U5, the other end of the resistor R8 is connected with the reverse input end of the operational amplifier U6, one end of a resistor R13 is connected with the reverse input end of the operational amplifier U5, the other end of the resistor R10 is connected with the reverse input end of the operational amplifier U4, the other end of the resistor R10 is connected with the output end of the operational amplifier U4, one end of the capacitor C6 is connected with the negative voltage power supply VEE, and the other end of the resistor is grounded, the non-inverting input end of the operational amplifier U4 is grounded, one end of the capacitor C5 is grounded, the other end of the capacitor C5 is grounded, the 7 pin of the operational amplifier U4 is grounded, one end of the resistor R12 is connected with the output end of the operational amplifier U4, the other end of the resistor R12 is connected with the non-inverting input end of the operational amplifier U6, one end of the resistor R11 is connected with the inverting input end of the operational amplifier U6, the other end of the resistor R11 is connected with the output end of the operational amplifier U6, the 4 pin of the operational amplifier U6 is grounded, one end of the capacitor C7 is connected with the negative voltage power supply VEE, the other end of the capacitor C7 is grounded, the 7 pin of the operational amplifier U6 is connected with the power supply voltage VCC, one end of the capacitor C8 is grounded, and one end of the resistor R20 is connected with the non-inverting input end of the operational amplifier U6.
In the embodiment, as shown in fig. 3, the present invention is used for observing the illumination current of 10nA, and the voltage follower and the subtractor probe are shown in the present invention. When the dark current is replaced by a constant current source I2, a voltage drop is generated across resistor R1, so that the non-inverting input of voltage follower U1 is 4.8V, consistent with the probe count of voltage follower U1. The voltage follower U1 is powered by positive and negative 15V power supply voltage, and the resistor R2 plays a role in zeroing, so that errors on the circuit are avoided. Similarly, the illumination current I3 and the dark current I1 generate a voltage drop across the resistor R3, so that the noninverting input terminal of the voltage follower U3 is 4.79V, consistent with the probe count of the voltage follower U3. The devices selected for the voltage follower U1 and the voltage follower U3 should be the same. The subtracter is used for subtracting the voltage output by the shading processing circuit of the photodiode from the voltage output by the superposition circuit of the dark current and the illumination current of the photodiode so as to obtain a pure illumination current converted voltage signal, so that the output voltage of the subtracter is 4.79V-4.8 V= -10mV, and is consistent with the probe indication of the subtracter U7. All simulation results are consistent with the theoretical values.
As shown in fig. 4-5, the present invention is used to observe the illumination current of 10nA, at which time the subtracter and the three op amp meter amplifier voltage meter represent numbers. The output voltage of the subtracter U7 is-9.997 mV measured by a voltmeter, which is very similar to the probe indication of the subtracter U7 in FIG. 2. The three operational amplifier instrument amplifier has the same resistance of the resistor R9 and the resistor R10, and the same resistance of the resistor R8, the resistor R11, the resistor R12 and the resistor R20. The three operational amplifier instrument amplifier is divided into two stages of amplification, the first stage amplification factor calculation formula is 1+2R9/R13, the first stage amplification factor is 10, the second stage amplification factor calculation formula is-R11/R8, the second stage amplification factor is-1, which is equivalent to inverting the voltage signal and does not amplify the voltage signal, so that the total amplification factor of the three operational amplifier instrument amplifier is-10, the theoretical value of the output of the amplified voltage signal which is irrelevant to dark current is 100mV, and the theoretical value of the amplified voltage signal is very similar to the indication number of the voltmeter XMM 2.
As shown in fig. 6-7, the present invention is used to observe the magnitude of the extracted voltage signal independent of the dark current and the magnitude of the amplified voltage signal in the case of 1 μa of the illumination current. According to the figures 3-5, under the condition that the illumination current is 1 mu A, the theoretical value of the output voltage of the subtracter U7 can reach-1V, and the theoretical value is very similar to the indication number of the voltmeter XMM 1; the theoretical output value of the amplified voltage signal which is irrelevant to dark current can reach 10V, which is consistent with the indication of the voltmeter XMM 2.
As shown in fig. 8-9, the present invention is used for observing the magnitude of the extracted voltage signal irrelevant to the dark current and the magnitude of the amplified voltage signal in the case of the illumination current 100 pA. According to the figures 3-5, under the condition that the illumination current is 100pA, the theoretical value of the output voltage of the subtracter U7 is only 96.9 mu V, which is very similar to the indication of the voltmeter XMM 1; the theoretical value of the amplified output of the voltage signal which is irrelevant to dark current is only 1.1mV, which is very similar to the indication of voltmeter XMM 2.
While the foregoing is directed to embodiments of the present invention, other and further details of the invention may be devised without departing from the basic scope thereof, and the scope thereof is determined by the claims that follow.
Claims (6)
1. The dark current compensation circuit of the photodiode is characterized by comprising a shading processing circuit of the photodiode, a superposition circuit of dark current and illumination current of the photodiode, a voltage follower U1, a voltage follower U3, a subtracter and a three-operational-amplifier instrument amplifier; the shading processing circuit of the photosensitive diode is used for converting dark current generated by the photosensitive diode into voltage signals and outputting the voltage signals; the superposition circuit of the dark current and the illumination current of the photosensitive diode is used for converting the dark current and the illumination current of the photosensitive diode into voltage signals to be output; the voltage follower U1 is used for collecting the output voltage of the shading processing circuit of the photodiode and outputting the output voltage to the subtracter; the voltage follower U3 is used for collecting the output voltage of the superposition circuit of the dark current and the illumination current of the photodiode and outputting the output voltage to the subtracter; the subtracter is used for subtracting the voltage output by the shading processing circuit of the photodiode from the voltage output by the superposition circuit of the dark current and the illumination current of the photodiode to obtain a pure illumination current converted voltage signal; the three operational amplifier instrument amplifier is used for amplifying the voltage signal irrelevant to dark current so as to facilitate the acquisition of the voltage value by the later-stage circuit; the three operational amplifier instrument amplifier comprises a capacitor C3, an operational amplifier U5, a capacitor C4, a resistor R9, a resistor R8, a resistor R13, a resistor R10, a capacitor C6, an operational amplifier U4, a capacitor C5, a resistor R12, a resistor R11, a capacitor C7, an operational amplifier U6, a capacitor C8 and a resistor R20; one end of a capacitor C3 is connected with a power supply voltage VCC, the other end of the capacitor C is grounded, 7 pins of the operational amplifier U5 are connected with the power supply voltage VCC, one end of a capacitor C4 is connected with a negative voltage power supply VEE, the other end of the capacitor C4 is grounded, one end of a resistor R9 is connected with the reverse input end of the operational amplifier U5, the other end of the resistor R9 is connected with the output end of the operational amplifier U5, the other end of the resistor R8 is connected with the reverse input end of the operational amplifier U6, one end of a resistor R13 is connected with the reverse input end of the operational amplifier U5, the other end of the resistor R10 is connected with the reverse input end of the operational amplifier U4, the other end of the resistor R10 is connected with the output end of the operational amplifier U4, one end of the capacitor C6 is connected with the negative voltage power supply VEE, and the other end of the resistor is grounded, the non-inverting input end of the operational amplifier U4 is grounded, one end of the capacitor C5 is grounded, the other end of the capacitor C5 is grounded, the 7 pin of the operational amplifier U4 is grounded, one end of the resistor R12 is connected with the output end of the operational amplifier U4, the other end of the resistor R12 is connected with the non-inverting input end of the operational amplifier U6, one end of the resistor R11 is connected with the inverting input end of the operational amplifier U6, the other end of the resistor R11 is connected with the output end of the operational amplifier U6, the 4 pin of the operational amplifier U6 is grounded, one end of the capacitor C7 is connected with the negative voltage power supply VEE, the other end of the capacitor C7 is grounded, the 7 pin of the operational amplifier U6 is connected with the power supply voltage VCC, one end of the capacitor C8 is grounded, and one end of the resistor R20 is connected with the non-inverting input end of the operational amplifier U6.
2. The dark current compensation circuit of a photodiode according to claim 1, wherein the shading processing circuit of the photodiode comprises a resistor R1, a photodiode D1, a constant current source I2, and a capacitor C2; one end of the resistor R1 is connected with the power supply voltage VCC, the other end of the resistor R1 is connected with the constant current source I2, the positive end and the negative end of the photodiode D1 are connected with the two ends of the constant current source I2, one end of the constant current source I2 is connected with the non-inverting input end of the voltage follower U1, the other end of the constant current source I2 is grounded, and the two ends of the capacitor C2 are connected with the two ends of the constant current source I2.
3. The dark current compensation circuit of a photodiode according to claim 1, wherein the superposition circuit of the dark current and the illumination current of the photodiode comprises a resistor R3, a constant current source I3, a capacitor C1, and a constant current source I1; one end of the resistor R3 is connected with the power supply voltage VCC, the other end of the resistor R3 is connected with the constant current source I3, one end of the constant current source I3 is connected with the non-inverting input end of the voltage follower U3, the other end of the resistor C1 is connected with the two ends of the constant current source I3, and one end of the constant current source I1 is connected with the non-inverting input end of the voltage follower U3 and the other end of the constant current source I1 is grounded.
4. The dark current compensation circuit of a photodiode according to claim 1, wherein the voltage follower U1 comprises a variable resistor R2, a resistor R6; the 7 feet of the voltage follower U1 are connected with the power supply voltage VCC, one end of the variable resistor R2 is connected with the 8 feet of the voltage follower U1, the other end of the variable resistor R2 is connected with the 1 feet of the voltage follower U1, one end of the resistor R6 is connected with the inverting input end of the voltage follower U1, the other end of the resistor R6 is connected with the output end of the voltage follower U1, and the 4 feet of the voltage follower U1 are connected with the negative voltage power supply VEE.
5. A dark current compensation circuit for a photodiode according to claim 1, wherein the voltage follower U3 comprises a variable resistor R4, a resistor R5; the 7 feet of the voltage follower U3 are connected with the power supply voltage VCC, one end of the variable resistor R4 is connected with the 8 feet of the voltage follower U3, the other end of the variable resistor R4 is connected with the 1 feet of the voltage follower U3, one end of the resistor R5 is connected with the inverting input end of the voltage follower U3, the other end of the resistor R5 is connected with the output end of the voltage follower U3, and the 4 feet of the voltage follower U3 are connected with the negative voltage power supply VEE.
6. The dark current compensation circuit of a photodiode according to claim 1, wherein the subtractor comprises a resistor R18, a resistor R17, a variable resistor R14, a resistor R16, and a resistor R15; the one end of the resistor R18 is connected with the output end of the voltage follower U3, the other end is connected with the in-phase input end of the subtracter U7, the 7 pin of the subtracter U7 is connected with the power supply voltage VCC, one end of the variable resistor R14 is connected with the 8 pin of the subtracter U7, the other end is connected with the 1 pin of the subtracter U7, the output end of the subtracter U7 is connected with the in-phase input end of the operational amplifier U5, one end of the resistor R15 is connected with the inverting input end of the subtracter U7, the other end is connected with the output end of the subtracter U7, and the 4 pin of the subtracter U7 is connected with the negative voltage power supply VEE.
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