CN114690822A - Dark current compensation circuit of photosensitive diode - Google Patents
Dark current compensation circuit of photosensitive diode Download PDFInfo
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- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05F—SYSTEMS FOR REGULATING ELECTRIC OR MAGNETIC VARIABLES
- G05F1/00—Automatic systems in which deviations of an electric quantity from one or more predetermined values are detected at the output of the system and fed back to a device within the system to restore the detected quantity to its predetermined value or values, i.e. retroactive systems
- G05F1/10—Regulating voltage or current
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- G—PHYSICS
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- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J1/00—Photometry, e.g. photographic exposure meter
- G01J1/42—Photometry, e.g. photographic exposure meter using electric radiation detectors
- G01J1/44—Electric circuits
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- G—PHYSICS
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- G05F—SYSTEMS FOR REGULATING ELECTRIC OR MAGNETIC VARIABLES
- G05F3/00—Non-retroactive systems for regulating electric variables by using an uncontrolled element, or an uncontrolled combination of elements, such element or such combination having self-regulating properties
- G05F3/02—Regulating voltage or current
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- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/08—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof in which radiation controls flow of current through the device, e.g. photoresistors
- H01L31/10—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof in which radiation controls flow of current through the device, e.g. photoresistors characterised by at least one potential-jump barrier or surface barrier, e.g. phototransistors
- H01L31/101—Devices sensitive to infrared, visible or ultraviolet radiation
- H01L31/102—Devices sensitive to infrared, visible or ultraviolet radiation characterised by only one potential barrier or surface barrier
- H01L31/103—Devices sensitive to infrared, visible or ultraviolet radiation characterised by only one potential barrier or surface barrier the potential barrier being of the PN homojunction type
Abstract
The invention belongs to the technical field of photosensitive detection of integrated circuits, and particularly relates to a dark current compensation circuit of a photosensitive diode. The shading processing circuit of the photosensitive diode is used for converting dark current generated by the photosensitive diode into a voltage signal and outputting the voltage signal; the superposition circuit of the photodiode dark current and the illumination current is used for converting the photodiode dark current and the illumination current into voltage signals to be output; the voltage follower U1 and the voltage follower U3 are respectively used for collecting the voltage output by the shading processing circuit of the photosensitive diode, and the voltage output by the superposition circuit of the dark current and the illumination current of the photosensitive diode; the subtracter is used for subtracting the voltage output by the shading processing circuit of the photosensitive diode from the voltage output by the superposition circuit of the dark current and the illumination current of the photosensitive diode to obtain a pure voltage signal converted by the illumination current; the three operational amplifier instrument amplifier is used for amplifying the voltage signal irrelevant to the dark current so as to be convenient for the acquisition of the voltage value by the post-stage circuit.
Description
Technical Field
The invention belongs to the technical field of photosensitive detection of integrated circuits, and particularly relates to a dark current compensation circuit of a photosensitive diode.
Background
With the development of modern science and technology, the application field of photoelectric detection is increasingly expanded, and the noise problem of the detection circuit is more and more concerned, wherein the noise includes the dark current of the photosensitive diode. Dark current can be defined as the leakage current of the detector under the condition of no light incidence, and the magnitude of the leakage current influences the sensitivity of the optical receiver, and is one of the main indexes of the detector.
In the prior art, the dark current problem of a photosensitive diode is usually solved in a device, or a switching circuit is adopted, which inevitably introduces switching noise, and a method for solving the dark current problem by adopting an actual circuit is rare.
Disclosure of Invention
The present invention provides a dark current compensation circuit for a photodiode to solve the above-mentioned problems.
The technical scheme adopted by the invention is as follows: a dark current compensation circuit of a photosensitive diode comprises a shading processing circuit of the photosensitive diode, a superposition circuit of dark current and illumination current of the photosensitive diode, a voltage follower U1, a voltage follower U3, a subtracter and a triple operational amplifier instrument amplifier; the shading processing circuit of the photosensitive diode is used for converting dark current generated by the photosensitive diode into a voltage signal and outputting the voltage signal; the superposition circuit of the photodiode dark current and the illumination current is used for converting the photodiode dark current and the illumination current into voltage signals to be output; the voltage follower U1 is used for collecting the output voltage of the shading processing circuit of the photosensitive diode and outputting the output voltage to the subtracter; the voltage follower U3 is used for collecting the output voltage of the superposition circuit of the dark current and the illumination current of the photosensitive diode and outputting the output voltage to the subtracter; the subtracter is used for subtracting the voltage output by the shading processing circuit of the photosensitive diode from the voltage output by the superposition circuit of the dark current and the illumination current of the photosensitive diode to obtain a pure voltage signal converted by the illumination current; the three operational amplifier instrument amplifier is used for amplifying the voltage signal irrelevant to the dark current so as to be convenient for the acquisition of the voltage value by the post-stage circuit.
As a preferred technical scheme of the invention: the shading processing circuit of the photosensitive diode comprises a resistor R1, a photosensitive diode D1, a constant current source I2 and a capacitor C2; one end of the resistor R1 is connected with a power supply voltage VCC, the other end is connected with a constant current source I2, the positive end and the negative end of the photodiode D1 are connected with the two ends of the constant current source I2, one end of the constant current source I2 is connected with the non-inverting input end of the voltage follower U1, the other end is grounded, and the two ends of the capacitor C2 are connected with the two ends of the constant current source I2.
As a preferred technical scheme of the invention: the superposition circuit of the dark current and the illumination current of the photosensitive diode comprises a resistor R3, a constant current source I3, a capacitor C1 and a constant current source I1; one end of the resistor R3 is connected with a power voltage VCC, the other end is connected with a constant current source I3, one end of the constant current source I3 is connected with the non-inverting input end of the voltage follower U3, the other end of the constant current source I3 is grounded, two ends of the capacitor C1 are connected with two ends of the constant current source I3, one end of the constant current source I1 is connected with the non-inverting input end of the voltage follower U3, and the other end of the constant current source I1 is grounded.
As a preferred technical scheme of the invention: the voltage follower U1 comprises a variable resistor R2 and a resistor R6; the pin 7 of the voltage follower U1 is connected with a power supply voltage VCC, one end of a variable resistor R2 is connected with the pin 8 of the voltage follower U1, the other end of the variable resistor R2 is connected with the pin 1 of the voltage follower U1, one end of a resistor R6 is connected with the inverted input end of the voltage follower U1, the other end of the variable resistor R6 is connected with the output end of the voltage follower U1, and the pin 4 of the voltage follower U1 is connected with a negative voltage supply VEE.
As a preferred technical scheme of the invention: the voltage follower U3 comprises a variable resistor R4 and a resistor R5; the pin 7 of the voltage follower U3 is connected with a power supply voltage VCC, one end of a variable resistor R4 is connected with the pin 8 of the voltage follower U3, the other end of the variable resistor R4 is connected with the pin 1 of the voltage follower U3, one end of a resistor R5 is connected with the inverted input end of the voltage follower U3, the other end of the variable resistor R5 is connected with the output end of the voltage follower U3, and the pin 4 of the voltage follower U3 is connected with a negative voltage supply VEE.
As a preferred technical scheme of the invention: the subtracter comprises a resistor R18, a resistor R17, a variable resistor R14, a resistor R16 and a resistor R15; one end of a resistor R18 is connected with the output end of a voltage follower U3, the other end is connected with the non-inverting input end of a subtracter U7, the pin 7 of the subtracter U7 is connected with a power supply voltage VCC, one end of a variable resistor R14 is connected with the pin 8 of the subtracter U7, the other end is connected with the pin 1 of the subtracter U7, the output end of the subtracter U7 is connected with the non-inverting input end of an operational amplifier U5, one end of a resistor R15 is connected with the inverting input end of the subtracter U7, the other end is connected with the output end of a subtracter U7, one end of a resistor R16 is connected with the output end of the voltage follower U1, the other end is connected with the inverting input end of the subtracter U7, one end of the resistor R15 is connected with the inverting input end of the subtracter U7, the other end is connected with the output end of the subtracter U7, and the pin 4 of the subtracter U7 is connected with the negative voltage VEE for supplying power.
As a preferred technical scheme of the invention: the three-operational amplifier instrument amplifier comprises a capacitor C3, an operational amplifier U5, a capacitor C4, a resistor R9, a resistor R8, a resistor R13, a resistor R10, a capacitor C6, an operational amplifier U4, a capacitor C5, a resistor R12, a resistor R11, a capacitor C7, an operational amplifier U6, a capacitor C8 and a resistor R20; one end of a capacitor C3 is connected with a power supply voltage VCC, the other end is grounded, a pin 7 of an operational amplifier U5 is connected with the power supply voltage VCC, one end of a capacitor C4 is connected with a negative voltage supply VEE, the other end is grounded, a pin 4 of an operational amplifier U5 is connected with the negative voltage supply VEE, one end of a resistor R9 is connected with the reverse input end of the operational amplifier U5, the other end is connected with the output end of the operational amplifier U5, one end of a resistor R8 is connected with the output end of the operational amplifier U5, the other end is connected with the reverse input end of the operational amplifier U6, one end of a resistor R13 is connected with the reverse input end of the operational amplifier U5, the other end is connected with the reverse input end of the operational amplifier U4, one end of a resistor R10 is connected with the reverse input end of the operational amplifier U4, the other end is connected with the output end of the operational amplifier U4, one end of a negative voltage supply VEE of a capacitor C6 is connected with the negative voltage supply VEE, the other end is grounded, a pin 4 of the operational amplifier U4 is connected with the negative voltage supply VEE, the non-inverting input end of the operational amplifier U4 is connected with the power supply voltage, one end of the operational amplifier U5 is connected with the output end of the resistor 3646, the other end of the resistor R11 is connected with the non-inverting input end of the operational amplifier U6, one end of the resistor R11 is connected with the inverting input end of the operational amplifier U6, the other end of the resistor R11 is connected with the output end of the operational amplifier U6, a 4 pin of the operational amplifier U6 is connected with the negative voltage power supply VEE, one end of the capacitor C7 is connected with the negative voltage power supply VEE, the other end of the capacitor C7 is grounded, a 7 pin of the operational amplifier U6 is connected with the power supply voltage VCC, one end of the capacitor C8 is connected with the power supply voltage VCC, the other end of the capacitor C8 is grounded, one end of the resistor R20 is connected with the non-inverting input end of the operational amplifier U6, and the other end of the resistor R20 is grounded.
Compared with the prior art, the invention has the beneficial effects that: the dark current compensation circuit of the photosensitive diode is novel in design, convenient to use, high in detection sensitivity, capable of amplifying extremely weak illumination signals so as to facilitate the acquisition of a voltage value by a post-stage circuit, and high in practicability.
Drawings
FIG. 1: the circuit connection diagram of the invention is I;
FIG. 2: the circuit connection diagram of the invention is II;
FIG. 3: the invention is used for observing the schematic diagram of the readings of the voltage follower and the subtracter probe under the condition of illumination current of 10 nA;
FIG. 4 is a schematic view of: the invention is used for observing the illumination current of 10nA, the schematic diagram of the number of the voltmeter XMM1 of the subtracter and the number of the voltmeter XMM2 of the three-operational amplifier instrument at the moment;
FIG. 5: the invention does not show the schematic diagram of the voltmeter of fig. 4;
FIG. 6: the invention is used for observing the magnitude of the extracted voltage signal irrelevant to the dark current and the magnitude of the amplified voltage signal under the condition of illumination current of 1 muA;
FIG. 7: the invention does not show the schematic diagram of the voltmeter of fig. 6;
FIG. 8: the invention is used for observing the magnitude of the voltage signal which is irrelevant to the dark current and is extracted under the condition of illumination current 100pA and the magnitude of the amplified voltage signal;
FIG. 9: the present invention does not show the schematic diagram of the voltmeter of fig. 8.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention is described in further detail below with reference to the accompanying drawings and embodiments. Of course, the specific embodiments described herein are merely illustrative of the invention and are not intended to be limiting.
As shown in fig. 1-2, the dark current compensation circuit for a photodiode provided by the present invention comprises a shading processing circuit for the photodiode, a superposition circuit for the dark current and the illumination current of the photodiode, a voltage follower, a subtractor, and three operational amplifier instrumentation amplifiers. The shading processing circuit of the photosensitive diode is used for converting dark current generated by the photosensitive diode into a voltage signal and outputting the voltage signal; the superposition circuit of the photodiode dark current and the illumination current is used for converting the photodiode dark current and the illumination current into voltage signals to be output; the voltage follower U1 is used for collecting the output voltage of the shading processing circuit of the photosensitive diode and outputting the output voltage to the subtracter; the voltage follower U3 is used for collecting the output voltage of the superposition circuit of the dark current and the illumination current of the photosensitive diode and outputting the output voltage to the subtracter; the subtracter is used for subtracting the voltage output by the shading processing circuit of the photosensitive diode from the voltage output by the superposition circuit of the dark current and the illumination current of the photosensitive diode to obtain a pure voltage signal converted by the illumination current; the three operational amplifier instrument amplifier is used for amplifying the voltage signal irrelevant to the dark current so as to be convenient for the acquisition of the voltage value by the post-stage circuit.
The shading processing circuit of the photosensitive diode comprises a resistor R1, a photosensitive diode D1, a constant current source I2 and a capacitor C2; one end of the resistor R1 is connected with a power supply voltage VCC, the other end is connected with a constant current source I2, the positive end and the negative end of the photodiode D1 are connected with the two ends of the constant current source I2, one end of the constant current source I2 is connected with the non-inverting input end of the voltage follower U1, the other end is grounded, and the two ends of the capacitor C2 are connected with the two ends of the constant current source I2.
The superposition circuit of the dark current and the illumination current of the photosensitive diode comprises a resistor R3, a constant current source I3, a capacitor C1 and a constant current source I1; one end of the resistor R3 is connected with a power supply voltage VCC, the other end is connected with a constant current source I3, one end of the constant current source I3 is connected with the non-inverting input end of the voltage follower U3, the other end is grounded, two ends of the capacitor C1 are connected with two ends of the constant current source I3, one end of the constant current source I1 is connected with the non-inverting input end of the voltage follower U3, and the other end is grounded.
The voltage follower U1 comprises a variable resistor R2 and a resistor R6; the pin 7 of the voltage follower U1 is connected with a power supply voltage VCC, one end of a variable resistor R2 is connected with the pin 8 of the voltage follower U1, the other end of the variable resistor R2 is connected with the pin 1 of the voltage follower U1, one end of a resistor R6 is connected with the inverted input end of the voltage follower U1, the other end of the variable resistor R6 is connected with the output end of the voltage follower U1, and the pin 4 of the voltage follower U1 is connected with a negative voltage supply VEE.
The voltage follower U3 comprises a variable resistor R4 and a resistor R5; the pin 7 of the voltage follower U3 is connected with a power supply voltage VCC, one end of a variable resistor R4 is connected with the pin 8 of the voltage follower U3, the other end of the variable resistor R4 is connected with the pin 1 of the voltage follower U3, one end of a resistor R5 is connected with the inverted input end of the voltage follower U3, the other end of the variable resistor R5 is connected with the output end of the voltage follower U3, and the pin 4 of the voltage follower U3 is connected with a negative voltage supply VEE.
The subtracter comprises a resistor R18, a resistor R17, a variable resistor R14, a resistor R16 and a resistor R15; one end of a resistor R18 is connected with the output end of a voltage follower U3, the other end is connected with the non-inverting input end of a subtracter U7, the pin 7 of the subtracter U7 is connected with a power supply voltage VCC, one end of a variable resistor R14 is connected with the pin 8 of the subtracter U7, the other end is connected with the pin 1 of the subtracter U7, the output end of the subtracter U7 is connected with the non-inverting input end of an operational amplifier U5, one end of a resistor R15 is connected with the inverting input end of the subtracter U7, the other end is connected with the output end of a subtracter U7, one end of a resistor R16 is connected with the output end of the voltage follower U1, the other end is connected with the inverting input end of the subtracter U7, one end of the resistor R15 is connected with the inverting input end of the subtracter U7, the other end is connected with the output end of the subtracter U7, and the pin 4 of the subtracter U7 is connected with the negative voltage VEE for supplying power.
The three-operational amplifier instrument amplifier comprises a capacitor C3, an operational amplifier U5, a capacitor C4, a resistor R9, a resistor R8, a resistor R13, a resistor R10, a capacitor C6, an operational amplifier U4, a capacitor C5, a resistor R12, a resistor R11, a capacitor C7, an operational amplifier U6, a capacitor C8 and a resistor R20; one end of a capacitor C3 is connected with a power supply voltage VCC, the other end is grounded, a pin 7 of an operational amplifier U5 is connected with the power supply voltage VCC, one end of a capacitor C4 is connected with a negative voltage supply VEE, the other end is grounded, a pin 4 of an operational amplifier U5 is connected with the negative voltage supply VEE, one end of a resistor R9 is connected with the reverse input end of the operational amplifier U5, the other end is connected with the output end of the operational amplifier U5, one end of a resistor R8 is connected with the output end of the operational amplifier U5, the other end is connected with the reverse input end of the operational amplifier U6, one end of a resistor R13 is connected with the reverse input end of the operational amplifier U5, the other end is connected with the reverse input end of the operational amplifier U4, one end of a resistor R10 is connected with the reverse input end of the operational amplifier U4, the other end is connected with the output end of the operational amplifier U4, one end of a negative voltage supply VEE of a capacitor C6 is connected with the negative voltage supply VEE, the other end is grounded, a pin 4 of the operational amplifier U4 is connected with the negative voltage supply VEE, the non-inverting input end of the operational amplifier U4 is connected with the power supply voltage, one end of the operational amplifier U5 is connected with the output end of the resistor 3646, the other end of the resistor R11 is connected with the non-inverting input end of the operational amplifier U6, one end of the resistor R11 is connected with the inverting input end of the operational amplifier U6, the other end of the resistor R11 is connected with the output end of the operational amplifier U6, a 4 pin of the operational amplifier U6 is connected with the negative voltage power supply VEE, one end of the capacitor C7 is connected with the negative voltage power supply VEE, the other end of the capacitor C7 is grounded, a 7 pin of the operational amplifier U6 is connected with the power supply voltage VCC, one end of the capacitor C8 is connected with the power supply voltage VCC, the other end of the capacitor C8 is grounded, one end of the resistor R20 is connected with the non-inverting input end of the operational amplifier U6, and the other end of the resistor R20 is grounded.
In specific implementation, as shown in fig. 3, the present invention is used to observe the illumination current of 10nA, and the indications of the voltage follower and the subtractor probe are shown at this time. When the dark current is replaced by the constant current source I2, a voltage drop is generated across the resistor R1 so that the non-inverting input of the voltage follower U1 is 4.8V, which is consistent with the probe reading of the voltage follower U1. The voltage follower U1 is powered by positive and negative 15V power supply voltage, and the resistor R2 plays a role in zero setting, so that errors in a circuit are avoided. Similarly, the illumination current I3 and the dark current I1 generate a voltage drop across the resistor R3, so that the non-inverting input of the voltage follower U3 is 4.79V, which is consistent with the probe indication of the voltage follower U3. The voltage follower U1 and the voltage follower U3 should be the same. The subtracter is used for subtracting the voltage output by the shading processing circuit of the photosensitive diode from the voltage output by the superposition circuit of the dark current and the illumination current of the photosensitive diode so as to obtain a pure voltage signal converted by the illumination current, and therefore the output voltage of the subtracter is 4.79V-4.8V-10 mV, which is consistent with the probe indication of the subtracter U7. All simulation results are consistent with theoretical values.
As shown in fig. 4-5, the present invention is used to observe the indication of the illumination current of 10nA, when the subtracter and the voltmeter of the three op-amp meter are used. The output voltage of the subtractor U7 was measured by a voltmeter to be-9.997 mV, which is very similar to the probe indication of the subtractor U7 in FIG. 2. The three operational amplifier instrument amplifiers, the resistor R9 and the resistor R10 have the same resistance, and the resistor R8, the resistor R11, the resistor R12 and the resistor R20 have the same resistance. The three operational amplifier instrument amplifier is divided into two stages of amplification, the first stage amplification factor calculation formula is 1+2R9/R13, the first stage amplification factor is 10, the second stage amplification factor calculation formula is-R11/R8, the second stage amplification factor is-1, namely, the voltage signal is inverted and not amplified, so that the total amplification factor of the three operational amplifier instrument amplifier is-10, the output theoretical value of the amplified voltage signal irrelevant to dark current is 100mV, and the number is very similar to that of a voltmeter XMM 2.
As shown in fig. 6-7, the magnitude of the voltage signal independent of the dark current and the magnitude of the amplified voltage signal are extracted when the present invention is used to observe the illumination current of 1 μ a. 3-5, the theoretical value of the output voltage of the subtracter U7 can reach-1V, which is very similar to the indication of XMM1 in the voltmeter, when the illumination current is calculated to be 1 μ A; the amplified output theoretical value of the voltage signal independent of the dark current can reach 10V, which is consistent with the XMM2 display of the voltmeter.
As shown in fig. 8 to 9, the magnitude of the voltage signal independent of the dark current and the magnitude of the amplified voltage signal are extracted when the present invention is used to observe the illumination current 100 pA. 3-5, the theoretical value of the output voltage of the subtractor U7 is only-96.9 μ V, which is very similar to the indication of XMM1 in the voltmeter, when the illumination current is 100 pA; the theoretical value of the amplified output of the voltage signal independent of the dark current is only 1.1mV, which is very similar to the number of XMM2 in the voltmeter.
The above-mentioned embodiments, objects, technical solutions and advantages of the present invention are further described in detail, it should be understood that the above-mentioned embodiments are only illustrative of the present invention, and are not intended to limit the scope of the present invention, and any person skilled in the art should understand that equivalent changes and modifications made without departing from the concept and principle of the present invention should fall within the protection scope of the present invention.
Claims (7)
1. A dark current compensation circuit of a photosensitive diode is characterized by comprising a shading processing circuit of the photosensitive diode, a superposition circuit of dark current and illumination current of the photosensitive diode, a voltage follower U1, a voltage follower U3, a subtracter and a triple operational amplifier instrumentation amplifier; the shading processing circuit of the photosensitive diode is used for converting dark current generated by the photosensitive diode into a voltage signal and outputting the voltage signal; the superposition circuit of the photodiode dark current and the illumination current is used for converting the photodiode dark current and the illumination current into voltage signals to be output; the voltage follower U1 is used for collecting the output voltage of the shading processing circuit of the photosensitive diode and outputting the output voltage to the subtracter; the voltage follower U3 is used for collecting the output voltage of the superposition circuit of the dark current and the illumination current of the photosensitive diode and outputting the output voltage to the subtracter; the subtracter is used for subtracting the voltage output by the shading processing circuit of the photosensitive diode from the voltage output by the superposition circuit of the dark current and the illumination current of the photosensitive diode to obtain a pure voltage signal converted by the illumination current; the three operational amplifier instrument amplifier is used for amplifying the voltage signal irrelevant to the dark current so as to be convenient for the acquisition of the voltage value by the post-stage circuit.
2. The dark current compensation circuit of a photodiode according to claim 1, wherein the shading processing circuit of the photodiode comprises a resistor R1, a photodiode D1, a constant current source I2, a capacitor C2; one end of the resistor R1 is connected with a power supply voltage VCC, the other end is connected with a constant current source I2, the positive end and the negative end of the photosensitive diode D1 are connected with two ends of a constant current source I2, one end of the constant current source I2 is connected with the non-inverting input end of a voltage follower U1, the other end is grounded, and two ends of the capacitor C2 are connected with two ends of the constant current source I2.
3. The dark current compensation circuit of a photodiode according to claim 1, wherein the superposition circuit of the photodiode dark current and the illumination current comprises a resistor R3, a constant current source I3, a capacitor C1, a constant current source I1; one end of the resistor R3 is connected with a power supply voltage VCC, the other end is connected with a constant current source I3, one end of the constant current source I3 is connected with the non-inverting input end of the voltage follower U3, the other end is grounded, two ends of the capacitor C1 are connected with two ends of the constant current source I3, one end of the constant current source I1 is connected with the non-inverting input end of the voltage follower U3, and the other end is grounded.
4. The dark current compensation circuit of a photodiode of claim 1, wherein the voltage follower U1 comprises a variable resistor R2, a resistor R6; the pin 7 of the voltage follower U1 is connected with a power supply voltage VCC, one end of a variable resistor R2 is connected with the pin 8 of the voltage follower U1, the other end of the variable resistor R2 is connected with the pin 1 of the voltage follower U1, one end of a resistor R6 is connected with the inverted input end of the voltage follower U1, the other end of the variable resistor R6 is connected with the output end of the voltage follower U1, and the pin 4 of the voltage follower U1 is connected with a negative voltage supply VEE.
5. The dark current compensation circuit of a photodiode of claim 1, wherein the voltage follower U3 comprises a variable resistor R4, a resistor R5; the pin 7 of the voltage follower U3 is connected with a power supply voltage VCC, one end of a variable resistor R4 is connected with the pin 8 of the voltage follower U3, the other end of the variable resistor R4 is connected with the pin 1 of the voltage follower U3, one end of a resistor R5 is connected with the inverted input end of the voltage follower U3, the other end of the variable resistor R5 is connected with the output end of the voltage follower U3, and the pin 4 of the voltage follower U3 is connected with a negative voltage supply VEE.
6. The dark current compensation circuit of a photodiode of claim 1, wherein the subtractor comprises a resistor R18, a resistor R17, a variable resistor R14, a resistor R16, a resistor R15; one end of a resistor R18 is connected with the output end of a voltage follower U3, the other end is connected with the non-inverting input end of a subtracter U7, the pin 7 of the subtracter U7 is connected with a power supply voltage VCC, one end of a variable resistor R14 is connected with the pin 8 of the subtracter U7, the other end is connected with the pin 1 of the subtracter U7, the output end of the subtracter U7 is connected with the non-inverting input end of an operational amplifier U5, one end of a resistor R15 is connected with the inverting input end of the subtracter U7, the other end is connected with the output end of a subtracter U7, one end of a resistor R16 is connected with the output end of the voltage follower U1, the other end is connected with the inverting input end of the subtracter U7, one end of the resistor R15 is connected with the inverting input end of the subtracter U7, the other end is connected with the output end of the subtracter U7, and the pin 4 of the subtracter U7 is connected with the negative voltage VEE for supplying power.
7. The dark current compensation circuit of a photodiode of claim 1, wherein the triple op-amp instrumentation amplifier comprises a capacitor C3, an op-amp U5, a capacitor C4, a resistor R9, a resistor R8, a resistor R13, a resistor R10, a capacitor C6, an op-amp U4, a capacitor C5, a resistor R12, a resistor R11, a capacitor C7, an op-amp U6, a capacitor C8, a resistor R20; one end of a capacitor C3 is connected with the power supply voltage VCC, the other end is grounded, a pin 7 of an operational amplifier U5 is connected with the power supply voltage VCC, one end of a capacitor C4 is connected with a negative voltage power supply VEE, the other end is grounded, a pin 4 of the operational amplifier U5 is connected with the negative voltage power supply VEE, one end of a resistor R9 is connected with the inverted input end of the operational amplifier U5, the other end is connected with the output end of the operational amplifier U5, one end of a resistor R8 is connected with the output end of the operational amplifier U5, the other end is connected with the inverted input end of the operational amplifier U6, one end of a resistor R13 is connected with the inverted input end of the operational amplifier U5, the other end is connected with the inverted input end of the operational amplifier U4, one end of a resistor R10 is connected with the inverted input end of the operational amplifier U4, the other end is connected with the output end of the operational amplifier U53, one end of the capacitor C6 is connected with the negative voltage power supply VEE, the other end is grounded, a pin 4 of the operational amplifier U4 is connected with the power supply VEE, the non-inverting input end of the operational amplifier U4 is grounded, one end of the capacitor C5 is connected with the negative voltage power supply voltage VCC, one end of the operational amplifier U4, the other end of the resistor R11 is connected with the non-inverting input end of the operational amplifier U6, one end of the resistor R11 is connected with the inverting input end of the operational amplifier U6, the other end of the resistor R11 is connected with the output end of the operational amplifier U6, a 4 pin of the operational amplifier U6 is connected with the negative voltage power supply VEE, one end of the capacitor C7 is connected with the negative voltage power supply VEE, the other end of the capacitor C7 is grounded, a 7 pin of the operational amplifier U6 is connected with the power supply voltage VCC, one end of the capacitor C8 is connected with the power supply voltage VCC, the other end of the capacitor C8 is grounded, one end of the resistor R20 is connected with the non-inverting input end of the operational amplifier U6, and the other end of the resistor R20 is grounded.
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