CN114689592A - AOI detection device - Google Patents
AOI detection device Download PDFInfo
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- CN114689592A CN114689592A CN202111568740.1A CN202111568740A CN114689592A CN 114689592 A CN114689592 A CN 114689592A CN 202111568740 A CN202111568740 A CN 202111568740A CN 114689592 A CN114689592 A CN 114689592A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8806—Specially adapted optical and illumination features
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/9501—Semiconductor wafers
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/956—Inspecting patterns on the surface of objects
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
- G01N2021/0106—General arrangement of respective parts
- G01N2021/0112—Apparatus in one mechanical, optical or electronic block
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8806—Specially adapted optical and illumination features
- G01N2021/8809—Adjustment for highlighting flaws
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
- G01N2021/8887—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges based on image processing techniques
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/956—Inspecting patterns on the surface of objects
- G01N2021/95638—Inspecting patterns on the surface of objects for PCB's
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- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
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- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Abstract
The invention belongs to the technical field of semiconductor production equipment, and particularly relates to an AOI detection device, which comprises a machine base and further comprises: the camera detection module is arranged on the base, comprises a positioning camera component and a detection camera component and is used for positioning the printed board and acquiring image information of the workpiece; and the printed board testing module is arranged on the base and positioned below the camera detection module and used for moving the printed board to the position of the camera detection module. By adopting the structure, the detection device adopts dual-camera identification, is provided with the positioning camera and the picture acquisition camera independently, has high alignment precision, can be suitable for smaller-gap picture identification and can finish the functions of alignment and detection respectively; compared with a mode of realizing multiple operations such as positioning, sampling and the like by adopting a single lens, the detection device greatly improves the working efficiency.
Description
Technical Field
The invention relates to the technical field of semiconductor production equipment, in particular to equipment capable of positioning and detecting a printed board workpiece.
Background
AOI (Automated Optical Inspection) is called automatic Optical Inspection in Chinese, and is a device for inspecting common defects encountered in welding production based on Optical principles. During automatic detection, the machine automatically scans the printed board through the camera, acquires images, compares the tested welding points with qualified parameters in the database, inspects defects on the printed board through image processing, and displays/marks the defects through a display or an automatic mark for finishing in the next procedure.
Disclosure of Invention
In order to complete AOI detection, the invention aims to provide an AOI detection device which adopts double-camera identification and improves the detection precision and efficiency.
In order to achieve the purpose, the invention adopts the technical scheme that: an AOI detection device, includes, the frame still includes:
the camera detection module is arranged on the base, comprises a positioning camera component and a detection camera component and is used for positioning the printed board and acquiring image information of the workpiece;
and the printed board testing module is arranged on the base, is positioned below the camera detection module and is used for moving the printed board to the position of the camera detection module.
Preferably, the machine base comprises a mounting bottom plate and a gantry support arranged on the mounting bottom plate; the camera detection module is arranged on the gantry support, and the printed board test module is arranged on the upper surface of the mounting bottom plate.
Preferably, the camera detection module comprises an X-direction moving assembly arranged on the front surface of the gantry support, a Z-direction moving assembly arranged on the X-direction moving assembly, a detection camera assembly connected with the Z-direction moving assembly, and a positioning camera assembly.
Preferably, the X-direction moving assembly comprises an X-direction base fixedly arranged on the front surface of the gantry support, a linear motor stator arranged on the X-direction base, two X-direction guide rails parallel to each other, an X-direction slider movably arranged on the two X-direction guide rails, a linear motor rotor movably connected with the linear motor stator, and a Z-direction mounting base plate, the back of which is fixedly connected with the linear motor rotor and the X-direction sliders on the two X-direction guide rails; the Z-direction moving assembly comprises a Z-direction sliding table main board fixedly connected with the front surface of the Z-direction mounting bottom board, a Z-direction sliding table auxiliary board movably arranged on the front surface of the Z-direction sliding table main board, a Z-direction screw rod with the lower end inserted into the Z-direction sliding table auxiliary board and movably connected with the Z-direction sliding table auxiliary board, a motor mounting seat arranged on the upper surface of the Z-direction sliding table main board, and a Z-direction motor arranged on the motor mounting seat and with an output shaft connected with the upper end of the Z-direction screw rod; and the Z-direction sliding table main board is movably connected with the Z-direction sliding table auxiliary board through two groups of Z-direction crossed roller sliding rails.
Preferably, the detection camera assembly comprises a detection camera base arranged on the front surface of the Z sliding table auxiliary plate, a detection camera clamp connected with the detection camera base and used for fixing the detection lens, a detection camera arranged on the detection camera base, and a detection lens arranged on the detection camera and positioned below the detection camera; the positioning camera assembly comprises a positioning camera base arranged on the front surface of the Z sliding table auxiliary plate, a positioning camera clamp connected with the positioning camera base and used for fixing a positioning camera lens, a positioning camera arranged on the positioning camera base, a positioning camera lens arranged on the positioning camera and positioned below the positioning camera base, a light source support arranged on the surface of one side of the positioning camera base, a first light source and a second light source which are arranged on the light source support and are arranged up and down, and the first light source and the second light source are positioned below the positioning camera lens.
Preferably, the printed board test module comprises an X-direction transfer assembly, a Z-direction lifting assembly arranged on the X-direction transfer assembly, and a pressure assembly arranged above the Z-direction lifting assembly.
Preferably, the X-direction transfer assembly includes an X-direction main sliding table, two parallel X-direction transfer guide rails and linear motor stators which are arranged on the upper surface of the X-direction main sliding table, X-direction transfer sliders which are arranged on the two X-direction transfer guide rails, a linear motor rotor which is movably connected with the linear motor stators, a rotor fixing block which is fixedly connected with the linear motor rotor, and a Z-direction bottom plate whose back surface is fixedly connected with the rotor fixing block and the X-direction transfer sliders on the two X-direction transfer guide rails; the Z-direction lifting assembly comprises a lower platform plate arranged on a Z-direction bottom plate, a Z-direction base arranged on the upper surface of the lower platform plate, two groups of horizontal cross roller slide rails arranged on the upper surface of the Z-direction base in the horizontal direction, horizontal sliding tables arranged on the two groups of horizontal cross roller slide rails and provided with supporting inclined planes, and Z-direction sliding tables movably arranged on the horizontal sliding tables and provided with Z-direction inclined planes attached to the supporting inclined planes; the horizontal power assembly is arranged on the Z-direction base and connected with the horizontal sliding table and used for driving the horizontal sliding table to do reciprocating linear motion on the Z-direction base; the Z-direction auxiliary sliding table is arranged on the upper surface of one end part of the Z-direction base; the jig base plate is arranged on the upper surface of the Z-direction sliding table, and the wire needle jig is arranged on the upper surface of the jig base plate and used for placing a printed board workpiece; one end of the Z-direction sliding table is movably connected with a Z-direction guide rail in one side surface of the Z-direction auxiliary sliding table through two groups of Z-direction crossed roller slide rails; when the horizontal sliding table moves linearly in a reciprocating manner on the Z-direction base, the Z-direction sliding table is lifted relative to the Z-direction auxiliary sliding table; and two sides of the supporting inclined plane are respectively provided with a group of oblique crossed roller slide rails, and the Z-direction inclined plane is connected with the oblique crossed roller slide rails.
Preferably, the horizontal power assembly comprises a horizontal motor arranged on the outer side surface of the Z-direction auxiliary sliding table, a horizontal coupling arranged in the Z-direction auxiliary sliding table and connected with an output shaft of the horizontal motor, a horizontal bearing seat arranged on the Z-direction auxiliary sliding table, and a horizontal screw rod, wherein one end of the horizontal screw rod penetrates through the horizontal bearing seat and is connected with the horizontal coupling; the other end of the horizontal screw rod is movably connected with the horizontal sliding table.
Preferably, the pressure assembly comprises two support plates which are parallel to each other and vertically arranged on the upper surface of the lower platform plate, an upper platform plate connected with the upper surfaces of the two support plates, a through hole which is arranged in the upper platform plate and used for exposing a wire needle jig and a printed board workpiece, a frame pressing sliding table movably arranged on the upper surface of the upper platform plate, and a frame pressing plate arranged in the frame pressing sliding table; and square through holes are formed in the pressing frame sliding table and the pressing frame plate.
Preferably, the upper surface of the upper platform plate is further provided with two mutually parallel Y-direction sliding guide rails and an air cylinder, each Y-direction sliding guide rail is provided with two Y-direction sliding sliders connected with the bottom surface of the frame pressing sliding table, and the lower surface of one end of the frame pressing sliding table is provided with a slider fixing plate connected with an output shaft of the air cylinder; when the output shaft of the cylinder stretches, the pressing frame sliding table is driven to reciprocate along the Y-direction sliding guide rail in the Y direction.
The beneficial technical effects are as follows: by adopting the detection device, when a printed board to be detected is fed, the frame pressing sliding table and the frame pressing plate in the frame pressing sliding table are moved away, after the printed board is fed onto the wire needle jig, the frame pressing plate moves back and presses on a printed board workpiece and the wire needle jig, the printed board is moved to the position below the positioning camera component by the X-direction transfer component, the positioning camera is driven by the Z-direction motor and moves and focuses in the Z direction, after focusing, the alignment points (the alignment points reserved by a printed board supplier during the production of the printed board are generally selected to position) on the printed board are identified, the Z-direction lifting component pushes the wire needle jig to ascend and contact with the frame pressing plate, because the wire needle jig is internally provided with a spring and can be compressed, the wire needle of the wire needle jig effectively contacts with the electrode of the printed board by means of the elasticity of the spring, smooth electrification is ensured, the LED chip on the printed board is lightened, the image is collected by the detection camera, the brightness of the tested chip is compared with qualified parameters in the database, after image processing, detecting defects on the printed board, automatically marking the defects to display/mark the defects for finishing in a subsequent process, lowering the wire needle jig to a height separated from the frame pressing plate by the Z-direction lifting assembly, moving the printed board to a feeding position by the X-direction transfer assembly, moving the frame pressing sliding table and the frame pressing plate in the frame pressing sliding table away, and finishing the AOI detection process; therefore, the detection device uses double-camera identification, is provided with the positioning camera and the picture collecting camera independently, has high alignment precision, can be suitable for smaller-gap picture identification and can respectively complete the functions of alignment and detection; compared with a mode of realizing multiple operations such as positioning, sampling and the like by adopting a single lens, the detection device greatly improves the working efficiency.
Drawings
FIG. 1 is a perspective view of an embodiment of the present invention;
FIG. 2 is a perspective view from another perspective of an embodiment of the present invention;
FIG. 3 is an exploded view of an embodiment of the present invention;
FIG. 4 is a perspective view of the camera detection module and the gantry support assembly according to the embodiment of the present invention;
FIG. 5 is a perspective view of another view angle of the camera inspection module and the gantry support according to the embodiment of the present invention;
FIG. 6 is an exploded view of the camera inspection module and the gantry support according to the embodiment of the present invention;
FIG. 7 is a perspective view of the test module and the mounting plate according to the embodiment of the present invention;
FIG. 8 is a perspective view of another perspective of the test module and the mounting base plate according to the embodiment of the invention;
FIG. 9 is an exploded view of a test module and a mounting base plate according to an embodiment of the present invention;
fig. 9a is a partial enlarged view of fig. 9.
Detailed Description
In order that those skilled in the art will better understand the technical solution of the present invention, the following detailed description of the present invention is provided in conjunction with the accompanying drawings and embodiments.
As shown in fig. 1 to 3, an AOI detection apparatus according to an embodiment of the present invention includes a machine base 100, and further includes: the camera detection module 200 is arranged on the base 100 and used for positioning the printed board and acquiring image information of the workpiece; and a printed board testing module 300 disposed on the base 100 and below the camera inspection module 200, for moving the printed board to the position of the camera inspection module 200.
Here, the camera inspection module 200 includes a positioning camera module and an inspection camera module, which are respectively used for completing the functions of positioning, image capturing and inspection.
In this embodiment, specifically, the machine base 100 includes a mounting base plate 101, a gantry support 102 disposed on the mounting base plate 101; the camera detection module 200 is arranged on the gantry support 102, and the printed board test module 300 is arranged on the upper surface of the installation bottom plate 101.
As shown in fig. 4-6, the camera inspection module 200 includes an X-direction moving component disposed on the front surface of the gantry 102, a Z-direction moving component disposed on the X-direction moving component, an inspection camera component connected to the Z-direction moving component, and a positioning camera component.
Specifically, the X-direction moving assembly comprises an X-direction base 201 fixedly arranged on the front surface of the gantry support 102, a linear motor stator 202 arranged on the X-direction base 201, two X-direction guide rails 203 parallel to each other, and X-direction sliders 204 movably arranged on the two X-direction guide rails 203, wherein each X-direction guide rail 203 is provided with two X-direction sliders 204; a linear motor mover 205 movably connected to the linear motor stator 202, and a Z-direction mounting base plate 206 having a back surface fixedly connected to the linear motor mover 205 and the X-direction slider 204 on the two X-direction rails.
The Z-direction moving assembly comprises a Z-direction sliding table main plate 207 fixedly connected with the front surface of the Z-direction mounting base plate 206, a Z-direction sliding table auxiliary plate 208 movably arranged on the front surface of the Z-direction sliding table main plate, a Z-direction screw rod 209 with the lower end inserted into the Z-direction sliding table auxiliary plate 208 and movably connected with the Z-direction sliding table auxiliary plate, namely when the Z-direction screw rod 209 rotates, the Z-direction sliding table auxiliary plate 208 is lifted in the Z direction, a motor mounting seat 210 arranged on the upper surface of the Z-direction sliding table main plate 207, and a Z-direction motor 211 arranged on the motor mounting seat and with an output shaft connected with the upper end of the Z-direction screw rod 209; the Z-direction sliding table main plate 207 and the Z-direction sliding table sub-plate 208 are movably connected through two groups of Z-direction cross roller slide rails 212, that is, the Z-direction sliding table sub-plate 208 moves up and down in the Z-direction relative to the Z-direction sliding table main plate 207 through two groups of Z-direction cross roller slide rails 212.
A Z-direction coupling 224 which is respectively connected with the output shaft of the Z-direction motor 211 and the upper end of the Z-direction screw rod 209 is also arranged in the motor mounting seat 210.
The detection camera assembly comprises a detection camera seat 213 arranged on the front surface of the Z sliding table auxiliary plate 208, a detection camera clamp 214 connected with the detection camera seat 213 and used for fixing a detection lens, a detection camera 215 arranged on the detection camera seat, and a detection lens 216 arranged on the detection camera 215 and positioned below the detection camera 215; the positioning camera component comprises a positioning camera seat 217 arranged on the front surface of the Z sliding table subplate 208, a positioning camera clamp 218 connected with the positioning camera seat 217 and used for fixing a positioning lens, a positioning camera 219 arranged on the positioning camera seat 217, a positioning lens 220 arranged on the positioning camera 219 and positioned below the positioning camera 219, a light source support 221 arranged on one side surface of the positioning camera seat 217, a first light source 222 and a second light source 223 arranged on the light source support and arranged from top to bottom, and the first light source is positioned above the second light source and positioned below the positioning lens 220.
The upper surface of the X-direction base 201 is provided with a first grating scale 225, and the upper surface of the Z-direction mounting base plate 206 is provided with a grating scale head 226.
A fine adjustment block 227 is provided on the positioning camera mount 217 for fine adjustment of the distance between the positioning camera 219 and the detection camera 215.
In the module, in the X-direction moving assembly, the Z-direction mounting base plate 206 is driven to move in the X-direction by the linear motor formed by the linear motor stator 202 and the linear motor mover 205, so that the positions of the Z-direction mounting base plate 206 and the components mounted thereon in the X-direction can be adjusted; z through Z in the Z to the removal subassembly to motor 211 drive Z to the lead screw 209 rotatory, drive with Z to lead screw 209 swing joint's Z slip table subplate 208 in Z to go up and down to, through X to the removal subassembly, Z to the drive of removal subassembly detect camera subassembly, location camera subassembly at XZ to removing, thereby be convenient for location camera 219, detect camera 215 and remove the position that needs, be convenient for the two focus regulation.
Note that, a dashed box 228 in the figure is a detection range of the detection camera 215.
As shown in fig. 7 to 9, the printed board test module 300 includes an X-direction transfer assembly, a Z-direction lifting assembly disposed thereon, and a pressure assembly disposed above the Z-direction lifting assembly.
Specifically, the X-direction transfer assembly includes an X-direction main slide 301, two parallel X-direction transfer guide rails 302 and linear motor stators 303 disposed on the upper surface of the X-direction main slide, and X-direction transfer sliders 304 disposed on the two X-direction transfer guide rails, where there are two X-direction transfer sliders 304 on each X-direction transfer guide rail, a linear motor mover 305 movably connected to the linear motor stators 303, a mover fixing block 306 fixedly connected to the linear motor mover, and a Z-direction base plate 307 fixedly connected to the mover fixing block 306 and the two X-direction transfer sliders 304 on the X-direction transfer guide rails on the back side. Here, the linear motor stators 303 are two and arranged in a line.
The Z-direction lifting assembly comprises a lower platform plate 308 arranged on a Z-direction bottom plate 307, a Z-direction base 309 arranged on the upper surface of the lower platform plate, two groups of horizontal crossed roller slide rails 310 arranged on the upper surface of the Z-direction base in the horizontal direction, horizontal sliding tables 311 arranged on the two groups of horizontal crossed roller slide rails, a supporting inclined surface 311a arranged on each horizontal sliding table 311, a Z-direction sliding table 312 movably arranged on each horizontal sliding table 311, and Z-direction inclined surfaces 312a attached to the supporting inclined surfaces 311a arranged on the Z-direction sliding tables 312; the horizontal power assembly is arranged on the Z-direction base 309 and connected with the horizontal sliding table 311 and used for driving the horizontal sliding table to do reciprocating linear motion on the Z-direction base 309; a Z-direction sub sliding table 313 provided on an upper surface of an upper end portion of the Z-direction base 309; a jig bottom plate 314 arranged on the upper surface of the Z-direction sliding table 312, and a wire needle jig 316 arranged on the upper surface of the jig bottom plate 314 and used for placing a printed board workpiece 315; one end of the Z-direction sliding table 312 is movably connected with a Z-direction guide rail 313a in one side surface of the Z-direction auxiliary sliding table 313 through two groups of Z-direction crossed roller slide rails 317; when the horizontal sliding table 311 moves linearly in a reciprocating manner on the Z-direction base 309, the Z-direction sliding table 312 is lifted relative to the Z-direction auxiliary sliding table 313; a group of oblique cross roller sliding rails 318 is respectively disposed on two sides of the supporting inclined plane 311a, and the Z-direction inclined plane 312a is connected to the oblique cross roller sliding rails 318, as shown in fig. 9 a.
Here, the needle jig 316 is a standard component available in the market, and a spring is provided therein.
Specifically, the horizontal power assembly comprises a horizontal motor 319, a horizontal coupling 320, a horizontal bearing seat 321 and a horizontal lead screw 322, wherein the horizontal motor 319 is installed on the outer side surface of the Z-direction auxiliary sliding table 313, the horizontal coupling 320 is arranged in the Z-direction auxiliary sliding table 313 and is connected with an output shaft of the horizontal motor 319, the horizontal bearing seat 321 is installed on the Z-direction auxiliary sliding table 313, and one end of the horizontal lead screw 322 penetrates through the horizontal bearing seat 321 and is connected with the horizontal coupling 320; the other end of the horizontal screw rod 322 is movably connected with the horizontal sliding table 311, that is, when the horizontal screw rod 322 rotates, the horizontal sliding table 311 moves linearly along the axial direction.
The pressure assembly comprises two parallel supporting plates 323 vertically arranged on the upper surface of the lower platform plate 308, an upper platform plate 324 connected with the upper surfaces of the two supporting plates, a through hole 324a arranged in the upper platform plate 324 and used for exposing a wire needle jig 316 and a printed board workpiece 315, a frame pressing sliding table 325 movably arranged on the upper surface of the upper platform plate, and a frame pressing plate 326 arranged in the frame pressing sliding table; and square through holes 3a are formed in the frame pressing sliding table and the frame pressing plate.
Here, two support plates 323 that are parallel to each other and vertically placed on the upper surface of the lower platen 308 constitute a support for supporting the upper platen 324, and in order to make the support more stable, two reinforcing plates 327 having both ends respectively vertically connected to the two support plates 323 are further provided between the two support plates 323.
The upper surface of the upper platform plate 324 is also provided with two Y-direction sliding guide rails 328 and an air cylinder 329 which are parallel to each other, each Y-direction sliding guide rail 328 is provided with two Y-direction sliding sliders 330 connected with the bottom surface of the frame pressing sliding table 325, and the lower surface of one end of the frame pressing sliding table 325 is provided with a slider fixing plate 331 connected with an output shaft of the air cylinder; when the output shaft of the cylinder stretches, the frame pressing sliding table 325 is driven to reciprocate in the Y direction along the Y-direction sliding guide rail 328; so that the frame pressing sliding table and the frame pressing plate 326 therein leave the needle jig 316 or move to above and contact the needle jig 316.
An optical scale 332 is provided on the X-direction main slide table 301, and an optical scale reading head 333 is provided on one side surface of the Z-direction base plate 307 on the side of the optical scale 332.
In the module, a linear motor consisting of a linear motor stator 303 and a linear motor mover 305 in the X-direction transfer assembly drives a Z-direction base plate 307 and parts thereon to move in the X direction; a horizontal motor 319 of the Z-direction lifting assembly drives a horizontal screw rod 322 to rotate, so as to drive a horizontal sliding table 311 to do reciprocating linear motion on a Z-direction base 309, and then drive a Z-direction sliding table 312 to lift relative to a Z-direction auxiliary sliding table 313, so as to drive a jig bottom plate 314, a printed board workpiece 315 and a wire needle jig 316 to lift in the Z direction; when the output shaft of the cylinder in the pressure assembly stretches, the pressure frame sliding table 325 is driven to reciprocate along the Y-direction sliding guide rail 328 in the Y direction; so that the frame pressing sliding table and the frame pressing plate 326 therein leave the needle jig 316 or move to above and contact the needle jig 316.
To sum up, when the printed circuit board to be tested is loaded, the frame pressing sliding table 325 and the frame pressing plate 326 therein are moved away, after the printed circuit board is loaded onto the wire needle jig 316, the frame pressing plate 326 moves back and presses on the printed circuit board workpiece 315 and the wire needle jig 316, the X-direction transfer assembly moves the printed circuit board to the lower part of the positioning camera assembly, the positioning camera 219 is driven by the Z-direction motor 211 and moves and focuses in the Z-direction, and after focusing, the alignment points on the printed circuit board are identified, where the alignment points reserved by the printed circuit board supplier during printed circuit board production are generally selected to be positioned by selecting the alignment points at four corners, the Z-direction lifting assembly pushes the wire needle jig 316 to ascend and contact with the frame pressing plate 326, because the wire needle jig is internally provided with a spring and is compressible, the wire needle of the wire needle jig 316 effectively contacts with the electrode of the printed circuit board by the elasticity of the spring, so as to ensure smooth electrification, light the LED chip on the printed circuit board, and the detection camera 215 collects images, comparing the tested chip brightness with qualified parameters in a database, checking out defects on a printed board through image processing, and displaying/marking out the defects through automatic marking for finishing in a subsequent process; then, the Z-direction lifting assembly lowers the wire needle jig 316 to a height separated from the frame pressing plate 326, the X-direction transfer assembly moves the printed board to the feeding position, the frame pressing sliding table 325 and the frame pressing plate 326 therein move away, and the AOI inspection process is completed; therefore, the detection device uses double-camera identification, is provided with the positioning camera and the picture collecting camera independently, has high alignment precision, can be suitable for smaller-gap picture identification and can respectively complete the functions of alignment and detection; compared with a mode of realizing multiple operations such as positioning, sampling and the like by adopting a single lens, the detection device greatly improves the working efficiency.
In the above description, it should be noted that the terms "mounted," "connected," and the like are used in a broad sense, and for example, they may be fixedly connected, detachably connected, or integrally connected; the connection may be direct or indirect via an intermediate medium, and the connection may be internal to the two components.
It is to be understood that the above-described embodiments are merely illustrative of some, but not restrictive, of the broad invention, and that the appended drawings illustrate preferred embodiments of the invention without limiting its scope. This invention may be embodied in many different forms and, on the contrary, these embodiments are provided so that this disclosure will be thorough and complete. All equivalent structures made by using the contents of the specification and the attached drawings of the invention can be directly or indirectly applied to other related technical fields, and are also within the protection scope of the patent of the invention.
Claims (10)
1. The utility model provides an AOI detection device which characterized in that includes, the frame still includes:
the camera detection module is arranged on the base, comprises a positioning camera component and a detection camera component and is used for positioning the printed board and acquiring image information of the workpiece;
and the printed board testing module is arranged on the base and positioned below the camera detection module and used for moving the printed board to the position of the camera detection module.
2. The AOI detecting device of claim 1, wherein the machine base comprises a mounting base plate, a gantry bracket disposed on the mounting base plate; the camera detection module is arranged on the gantry support, and the printed board test module is arranged on the upper surface of the mounting bottom plate.
3. The AOI inspection apparatus of claim 2, wherein the camera inspection module comprises an X-direction moving module disposed on the front surface of the gantry, a Z-direction moving module disposed thereon, an inspection camera module connected to the Z-direction moving module, and a positioning camera module.
4. The AOI detecting device according to claim 3, wherein the X-direction moving assembly comprises an X-direction base fixed on the front surface of the gantry support, a linear motor stator and two parallel X-direction guide rails arranged on the X-direction base, X-direction sliders movably arranged on the two X-direction guide rails, a linear motor mover movably connected with the linear motor stator, and a Z-direction mounting base plate fixedly connected with the linear motor mover and the X-direction sliders on the two X-direction guide rails on the back surface; the Z-direction moving assembly comprises a Z-direction sliding table main board fixedly connected with the front surface of the Z-direction mounting bottom board, a Z-direction sliding table auxiliary board movably arranged on the front surface of the Z-direction sliding table main board, a Z-direction screw rod with the lower end inserted into the Z-direction sliding table auxiliary board and movably connected with the Z-direction sliding table auxiliary board, a motor mounting seat arranged on the upper surface of the Z-direction sliding table main board, and a Z-direction motor arranged on the motor mounting seat and with an output shaft connected with the upper end of the Z-direction screw rod; and the Z-direction sliding table main board is movably connected with the Z-direction sliding table auxiliary board through two groups of Z-direction crossed roller sliding rails.
5. The AOI inspection device according to claim 4, wherein the inspection camera assembly comprises an inspection camera base provided on the front surface of the Z-stage carriage sub-plate, an inspection camera clip connected to the inspection camera base for fixing the inspection lens, an inspection camera provided on the inspection camera base, an inspection lens provided on and below the inspection camera; the positioning camera assembly comprises a positioning camera base arranged on the front surface of the Z sliding table auxiliary plate, a positioning camera clamp connected with the positioning camera base and used for fixing a positioning camera lens, a positioning camera arranged on the positioning camera base, a positioning camera lens arranged on the positioning camera and positioned below the positioning camera base, a light source support arranged on the surface of one side of the positioning camera base, a first light source and a second light source which are arranged on the light source support and are arranged up and down, and the first light source and the second light source are positioned below the positioning camera lens.
6. The AO I testing apparatus of claim 2, wherein said printed board testing module comprises an X-direction transfer unit, a Z-direction lifting unit disposed thereon, and a pressure unit disposed above the Z-direction lifting unit.
7. The AO I detector of claim 6, wherein the X-direction transfer assembly comprises an X-direction main slide table, two X-direction transfer guide rails and a linear motor stator which are arranged on the upper surface of the X-direction main slide table and are parallel to each other, X-direction transfer sliders arranged on the two X-direction transfer guide rails, a linear motor rotor movably connected with the linear motor stator, a rotor fixing block fixedly connected with the linear motor rotor, and a Z-direction base plate fixedly connected with the rotor fixing block and the X-direction transfer sliders on the two X-direction transfer guide rails on the back surface; the Z-direction lifting assembly comprises a lower platform plate arranged on a Z-direction bottom plate, a Z-direction base arranged on the upper surface of the lower platform plate, two groups of horizontal cross roller slide rails arranged on the upper surface of the Z-direction base in the horizontal direction, horizontal sliding tables arranged on the two groups of horizontal cross roller slide rails and provided with supporting inclined planes, and Z-direction sliding tables movably arranged on the horizontal sliding tables and provided with Z-direction inclined planes attached to the supporting inclined planes; the horizontal power assembly is arranged on the Z-direction base and connected with the horizontal sliding table and used for driving the horizontal sliding table to do reciprocating linear motion on the Z-direction base; the Z-direction auxiliary sliding table is arranged on the upper surface of one end part of the Z-direction base; the jig base plate is arranged on the upper surface of the Z-direction sliding table, and the wire needle jig is arranged on the upper surface of the jig base plate and used for placing a printed board workpiece; one end of the Z-direction sliding table is movably connected with a Z-direction guide rail in one side surface of the Z-direction auxiliary sliding table through two groups of Z-direction crossed roller slide rails; when the horizontal sliding table moves linearly in a reciprocating manner on the Z-direction base, the Z-direction sliding table is lifted relative to the Z-direction auxiliary sliding table; and two sides of the supporting inclined plane are respectively provided with a group of oblique crossed roller slide rails, and the Z-direction inclined plane is connected with the oblique crossed roller slide rails.
8. The AOI detecting device of claim 7, wherein the horizontal power assembly comprises a horizontal motor mounted on an outer side surface of the Z-direction auxiliary sliding table, a horizontal coupling arranged in the Z-direction auxiliary sliding table and connected with an output shaft of the horizontal motor, a horizontal bearing seat mounted on the Z-direction auxiliary sliding table, and a horizontal screw rod, one end of which passes through the horizontal bearing seat and is connected with the horizontal coupling; the other end of the horizontal screw rod is movably connected with the horizontal sliding table.
9. The AOI detecting device according to claim 7, wherein the pressure assembly comprises two support plates parallel to each other and vertically placed on the upper surface of the lower platform plate, an upper platform plate connected with the upper surfaces of the two support plates, a through hole arranged in the upper platform plate for exposing a wire needle jig and a printed board workpiece, a frame pressing sliding table movably arranged on the upper surface of the upper platform plate, and a frame pressing plate arranged in the frame pressing sliding table; and square through holes are formed in the pressing frame sliding table and the pressing frame plate.
10. The AOI detection device according to claim 9, wherein the upper surface of the upper platen is further provided with two mutually parallel Y-direction sliding rails and an air cylinder, each Y-direction sliding rail is provided with two Y-direction sliding blocks connected to the bottom surface of the frame pressing sliding table, and a lower surface of one end of the frame pressing sliding table is provided with a block fixing plate connected to an output shaft of the air cylinder; when the output shaft of the cylinder stretches, the pressing frame sliding table is driven to reciprocate along the Y-direction sliding guide rail in the Y direction.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111568740.1A CN114689592A (en) | 2021-12-21 | 2021-12-21 | AOI detection device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111568740.1A CN114689592A (en) | 2021-12-21 | 2021-12-21 | AOI detection device |
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| Publication Number | Publication Date |
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| CN114689592A true CN114689592A (en) | 2022-07-01 |
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| CN202111568740.1A Pending CN114689592A (en) | 2021-12-21 | 2021-12-21 | AOI detection device |
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| CN (1) | CN114689592A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117949814A (en) * | 2024-03-26 | 2024-04-30 | 晋江市小芯电子科技有限公司 | PCBA integrated circuit board continuous detection device |
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2021
- 2021-12-21 CN CN202111568740.1A patent/CN114689592A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117949814A (en) * | 2024-03-26 | 2024-04-30 | 晋江市小芯电子科技有限公司 | PCBA integrated circuit board continuous detection device |
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