CN114686822B - M (AlTiNbN/AlTiON) +AlTiCON multilayer composite coating for cutting and preparation method thereof - Google Patents

M (AlTiNbN/AlTiON) +AlTiCON multilayer composite coating for cutting and preparation method thereof Download PDF

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CN114686822B
CN114686822B CN202210360900.1A CN202210360900A CN114686822B CN 114686822 B CN114686822 B CN 114686822B CN 202210360900 A CN202210360900 A CN 202210360900A CN 114686822 B CN114686822 B CN 114686822B
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coating
equal
altion
alticon
less
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CN114686822A (en
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张华栋
林孝良
高江雄
俞洋
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Zhuzhou Huarui Precision Cutting Tools Co ltd
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Zhuzhou Huarui Precision Cutting Tools Co ltd
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    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
    • C23C14/325—Electric arc evaporation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0641—Nitrides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0676—Oxynitrides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/04—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material
    • C23C28/044—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material coatings specially adapted for cutting tools or wear applications
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/40—Coatings including alternating layers following a pattern, a periodic or defined repetition

Abstract

The invention discloses an m (AlTiNbN/AlTiON) +AlTiCON multilayer composite coating for cutting and a preparation method thereof, wherein the multilayer composite coating is deposited on a cutter substrate, the cutter substrate is hard alloy or metal ceramic prepared by a powder metallurgy method, and the composite coating comprises m (Al) at a bottom layer 1‑a‑ b Ti a Nb b N/Al 1‑c‑d Ti c O d N) coating and coating located at m (Al 1‑a‑ b Ti a Nb b N/Al 1‑c‑d Ti c O d N) Al on coating 1‑x‑y Ti x C y O z～ 0 N 1‑z～1 A coating; wherein said m (Al 1‑a‑b Ti a Nb b N/Al 1‑c‑ d Ti c O d N) coating with Al 1‑a‑b Ti a Nb b N coating and Al 1‑c‑ d Ti c O d The N coating is formed by multi-period alternate deposition, and m is the period number; the Al is 1‑x‑y Ti x C y O z～0 N 1‑z～1 A gradient layer with a gradient of decreasing O/N stoichiometry. The invention has the advantages of high toughness, wear resistance and high temperature resistance, excellent cutting performance in the actual service process, relatively simple process, easy operation in actual production, low production cost and the like.

Description

M (AlTiNbN/AlTiON) +AlTiCON multilayer composite coating for cutting and preparation method thereof
Technical Field
The invention relates to the technical field of cutting tool coatings, in particular to an m (AlTiNbN/AlTiON) +AlTiCON multilayer composite coating for cutting and a preparation method thereof.
Background
In the coating application, simple single-layer binary and ternary coatings are difficult to meet the severe requirements of modern high-speed processing and increasingly difficult-to-process materials on the cutter performance, and a large number of documents report that the coated cutter faces repeated cutting resistance and alternate cutting heat action in the actual service process, so that the cutting performance of the coated cutter is closely related to the toughness of the coating as well as the hardness of the coating; in addition, a large amount of cutting heat is accumulated and transferred on the front cutter surface of the coated cutter in the cutting process, the mechanical performance test of the coating material at high temperature is higher, namely the coating material with better high-temperature stability is required, and the current application situation forces the modern cutter coating to develop towards multiple, multi-layer, gradient structure and the like so as to obtain the coating with better comprehensive performance.
At present, doping of alloy elements is one of the effective methods for coating modification, wherein the toughness of the transition metal nitride hard coating can be well improved by introducing Nb or Ta elements, which is benefited by replacing part of AlN with covalent bonding intrinsic property by NbN with metal bonding intrinsic property. However, the introduction of Nb and Ta elements can reduce the high-temperature service process (Cr and Al) 2 O 3 The formation of the layer accelerates the generation of porous loose NbOx and TaOx substances, thereby significantly reducing the oxidation performance of the coating. In addition, a method for improving the coating performance by designing a multilayer structure is also common, and a method for alternately depositing an AlTiN layer and an AlTiSiN layer prepared by adopting chemical vapor deposition is reported in China patent application No. CN202111258303.X, and the comprehensive effect of coatings with different performances is realized by alternately depositing two coatings with different components, particularly for a coating with a nano-modulation structure, the strengthening effect of a 'coherent template' between the two coatings can greatly strengthen the mechanical performance of the whole coating. However, the nano-modulation structure coating is very sensitive to the modulation period and the modulation ratio, and the window of the exerting interval of the 'coherent template' effect is also very narrow, so that the application in the actual production process is limited, once the deposited target material is consumed with time, the modulation period also changes under the same deposition process, and the 'coherent template' effect window is jumped out, and the integral performance of the coating is deteriorated.
The modification methods of the cutter coating reported above cannot realize the integration of toughness, wear resistance and high temperature resistance of the coating, and the thermal stability, oxidation resistance, antifriction effect and the like of the cutter coating are required to be further improved.
Disclosure of Invention
In view of the defects existing at present, the invention provides an m (AlTiNbN/AlTiON) +AlTiCON multilayer composite coating for cutting and a preparation method thereof, which overcome the defects that the traditional hard coating has insufficient wear resistance and toughness and insufficient high-temperature stability, and prepare a cutting tool coating with good wear resistance, good oxidation resistance and excellent high-temperature mechanical property.
In order to achieve the above object, the present invention provides an m (altin/AlTiON) +alticon multi-layer composite coating for cutting, which is deposited on a tool substrate, the tool substrate being a cemented carbide or a cermet prepared by a powder metallurgy method, the composite coating comprising an underlying m (Al 1-a-b Ti a Nb b N/Al 1-c-d Ti c O d N) coating and coating located at m (Al 1-a-b Ti a Nb b N/Al 1-c-d Ti c O d N) Al on coating 1-x-y Ti x C y O z～0 N 1-z～1 A coating; wherein said m (Al 1-a- b Ti a Nb b N/Al 1-c-d Ti c O d N) coating with Al 1-a-b Ti a Nb b N coating and Al 1-c-d Ti c O d The N coating is formed by multi-period alternate deposition, and m is the period number; the Al is 1-x-y Ti x C y O z～0 N 1-z～1 A gradient layer with a gradient of decreasing O/N stoichiometry.
According to one aspect of the invention, the Al 1-a-b Ti a Nb b The atomic percentage of Ti in the N coating is more than or equal to 0.2 and less than or equal to 0.6, the atomic percentage of Nb is more than or equal to 0.01 and less than or equal to 0.2, and the atomic percentage of Al is more than or equal to 0.3 and less than or equal to 1-a-b and less than or equal to 0.6.
According to one aspect of the invention, the Al 1-c-d Ti c O d The atomic percentage of Ti in the N coating is more than or equal to 0.3 and less than or equal to 0.6, the atomic percentage of O is more than or equal to 0.01 and less than or equal to 0.1, and the atomic percentage of Al is more than or equal to 0.3 and less than or equal to 1-c-d and less than or equal to 0.6.
According to one aspect of the invention, the Al 1-x-y Ti x C y O z～0 N 1-z～1 The atomic percentage of Ti in the coating is 0.3-0.6, and the atomic percentage of C is 0.01-0.yAl atom percentage is not less than 0.1 and not more than 0.3-x-y is not more than 0.6, O atom stoichiometric ratio change range z-0 is 0.1-1, and N atom stoichiometric ratio 1-z-1 is 1-0.9 correspondingly.
According to one aspect of the invention, the m (Al 1-a-b Ti a Nb b N/Al 1-c-d Ti c O d N) the period number in the coating is 1-m-1000, and the Al 1-a-b Ti a Nb b N coating, al 1-c-d Ti c O d The N coating has a monolayer thickness of not less than 0.001 μm, m (Al 1-a- b Ti a Nb b N/Al 1-c-d Ti c O d N) the thickness of the coating is 0.5-3 μm.
According to one aspect of the invention, the gradient layer with reduced O/N stoichiometry gradient is specifically a gradient layer with constant total working pressure and gradually reduced O 2 /N 2 The gas flow ratio is achieved.
In accordance with one aspect of the invention, the multilayer composite coating is prepared using physical vapor deposition.
Based on the same inventive concept, the invention also provides a preparation method of the m (AlTiNbN/AlTiON) +AlTiCON multilayer composite coating for cutting, which comprises the following steps:
preparing a hard alloy or metal ceramic cutter matrix by adopting a powder metallurgy method, and carrying out deep processing treatment on the cutter matrix to obtain a cutter matrix subjected to deep processing treatment;
cleaning and drying, argon ion bombardment etching and activating treatment are carried out on the cutter matrix subjected to the deep processing treatment, and a pretreated cutter matrix is obtained;
alternating deposition of Al on pretreated tool substrates by physical vapor deposition 1-a-b Ti a Nb b N coating and Al 1-c- d Ti c O d N coating, then controlling the total working pressure to be unchanged, gradually reducing the gas flow ratio and continuing to deposit Al 1-x-y Ti x C y O z～ 0 N 1-z～1 And (3) coating.
According to one aspect of the invention, the further processing treatment comprises grinding, sandblasting, polishing.
According to one aspect of the invention, the physical vapor deposition method is specifically an anionic arc ion plating technology, the substrate bias voltage of the anionic arc ion plating technology is 30-150V, the target source current is 100-240A, the working gas is nitrogen and oxygen, and the working gas pressure is 0.5-10 Pa.
The implementation advantages of the invention are as follows: the m (AlTiNbN/AlTiON) +AlTiCON multilayer composite coating for cutting provided by the invention endows the whole coating with good film-based binding force through the m (AlTiNbN/AlTiON) bottom layer deposited in a multi-period alternating manner, combines the toughening effect of Nb element and good oxidation resistance brought by doping O, the AlTiCON gradient surface layer presents the property gradual change characteristic of internal toughness and external hardness, the C element brings good antifriction effect, the doping of O element and the formation of N vacancy endow the coating with good high-temperature stability, so that the coating is tough, wear-resistant and high-temperature resistant integrated, and has good flexibility and suitability under the conditions of finish machining, semi-finish machining and rough machining of difficult-to-machine materials such as stainless steel, high-temperature alloy, titanium alloy and the like.
Drawings
FIG. 1 is a cross-sectional profile of a coating of example 1 of the present invention;
FIG. 2 is a graph of the hardness of the comparative example coatings of the present invention versus temperature for examples 1, 2, and 3.
Detailed Description
In order that the invention may be more readily understood, the invention will be further described with reference to the following examples. It should be understood that these examples are intended to illustrate the invention and not to limit the scope of the invention, and that the described embodiments are merely some, but not all, of the embodiments of the invention. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
The invention provides an m (AlTiNbN/AlTiON) +AlTiCON multi-layer composite coating for cutting, which is deposited on a cutter matrix, wherein the cutter matrix is hard alloy or metal ceramic prepared by a powder metallurgy method,the composite coating includes an underlying m (Al 1-a-b Ti a Nb b N/Al 1-c-d Ti c O d N) coating and coating located at m (Al 1-a-b Ti a Nb b N/Al 1-c- d Ti c O d N) Al on coating 1-x-y Ti x C y O z～0 N 1-z～1 A coating; wherein said m (Al 1-a-b Ti a Nb b N/Al 1-c-d Ti c O d N) coating with Al 1-a-b Ti a Nb b N coating and Al 1-c-d Ti c O d The N coating is formed by multi-period alternate deposition, and m is the period number; the Al is 1-x- y Ti x C y O z～0 N 1-z～1 A gradient layer with a gradient of decreasing O/N stoichiometry.
Preferably, the Al 1-a-b Ti a Nb b The atomic percentage of Ti in the N coating is more than or equal to 0.2 and less than or equal to 0.6, the atomic percentage of Nb is more than or equal to 0.01 and less than or equal to 0.2, and the atomic percentage of Al is more than or equal to 0.3 and less than or equal to 1-a-b and less than or equal to 0.6.
Preferably, the Al 1-c-d Ti c O d The atomic percentage of Ti in the N coating is more than or equal to 0.3 and less than or equal to 0.6, the atomic percentage of O is more than or equal to 0.01 and less than or equal to 0.1, and the atomic percentage of Al is more than or equal to 0.3 and less than or equal to 1-c-d and less than or equal to 0.6.
Preferably, the Al 1-x-y Ti x C y O z～0 N 1-z～1 The atomic percentage of Ti is 0.3-0.6, the atomic percentage of C is 0.01-0.1, the atomic percentage of Al is 0.3-1-x-y-0.6, the variation range of O atomic stoichiometric ratio z-0 is 0.1-1, and the corresponding N atomic stoichiometric ratio 1-z-1 is 1-0.9.
Preferably, the m (Al 1-a-b Ti a Nb b N/Al 1-c-d Ti c O d N) the period number in the coating is 1-m-1000, and the Al 1-a-b Ti a Nb b N coating, al 1-c-d Ti c O d The N coating has a monolayer thickness of not less than 0.001 μm, m (Al 1-a-b Ti a Nb b N/Al 1-c- d Ti c O d N) thickness of coating0.5-3 mu m.
Preferably, the gradient layer with the gradient reduced O/N stoichiometric ratio is specifically used for controlling the total working pressure to be unchanged and gradually reducing O 2 /N 2 The gas flow ratio is achieved.
Preferably, the multilayer composite coating is prepared by physical vapor deposition.
The invention also provides a preparation method of the m (AlTiNbN/AlTiON) +AlTiCON multilayer composite coating for cutting, which comprises the following steps:
preparing a hard alloy or metal ceramic cutter matrix by adopting a powder metallurgy method, and carrying out deep processing (grinding, sand blasting and polishing) on the cutter matrix to obtain the cutter matrix subjected to the deep processing;
pre-treating the cutter matrix subjected to deep processing treatment (comprising cleaning and drying, argon ion bombardment etching and activating treatment) to obtain a pre-treated cutter matrix;
alternately depositing Al on the pretreated tool substrate by adopting a cathodic arc ion plating technology in a physical vapor deposition method 1-a-b Ti a Nb b N coating and Al 1-c-d Ti c O d N coating, then controlling the total working pressure to be unchanged, gradually reducing the gas flow ratio and continuing to deposit Al 1-x-y Ti x C y O z～0 N 1-z～1 And (3) coating.
Preferably, the substrate bias voltage of the anion arc ion plating technology is 30-150V, the target source current is 100-240A, the working gas is nitrogen and oxygen, and the working gas pressure is 0.5-10 Pa.
Example 1
The multi-layer composite structure coating cutter shown in figure 1 comprises a cutter matrix, 100 (AlTiNbN/AlTiON) and an AlTiCON coating in sequence from inside to outside, wherein the total thickness of the coating is 3.28 mu m;
wherein, the thickness of the 100 (AlTiNbN/AlTiON) coating is 2.12 mu m, and the thickness of the AlTiCON coating is 1.16 mu m;
100 The (AlTiNbN/AlTiON) composite coating comprises AlTiNbN layers and AlTiON layers which are arranged from inside to outside and are periodically and alternately deposited, wherein the thickness of an AlTiNbN single layer is 0.012 mu m and the thickness of an AlTiON single layer is 0.01 mu m;
the AlTiCON coating is an AlTiCON layer with a single-layer gradient structure and a gradient of which the O/N stoichiometric ratio is reduced.
The AlTiNbN layer in the multilayer composite structure coating comprises Al according to the atomic ratio 0.6 Ti 0.35 Nb 0.05 The N, alTiON layer is composed of Al according to the atomic ratio 0.6 Ti 0.35 O 0.05 The N, alTiCON layer is composed of Al according to the atomic ratio 0.6 Ti 0.35 C 0.05 (O 0.08～0 N 0.92～1 ) 1 。
The tool matrix is a W slice and a hard alloy stainless steel turning blade with the model of WNMG 080408-BM.
The preparation method of the multilayer gradient structure coating cutter in the embodiment comprises the following specific steps:
1) Performing wet grinding, spray drying, pressing and sintering on W, co, ti, ta, cr, V, C, N, O and other elements and compounds thereof by using a powder metallurgy method, and performing mechanical subsequent processing and subsequent process treatment of a series of procedures to obtain a cutter matrix grinding product; and (3) coating treatment and ultrasonic cleaning are carried out on the grinding product of the cutter matrix so as to achieve decontamination requirements and good surface quality, and then the grinding product is sent into coating equipment for coating deposition of corresponding coating. Background vacuum in the coating furnace is 5x10 -2 Pa, heating the cutter product to 300 ℃ by adopting an infrared heating pipe mode. Then continuously heating with infrared heating tube and plasma (Ar is introduced with flow of 50 sccm), and H is added 2 Reduction treatment (H is introduced) 2 The flow rate was 300 sccm), the heating control temperature was set to 480℃and the treatment time was 48 minutes.
2) Before coating, adopting argon ions to bombard and etch the surface of the cutter matrix, further removing dirty matters on the surface of the cutter matrix, activating the surface of the cutter matrix, and improving the combination of the cutter matrix and the coating: introducing working gas Ar, and keeping the pressure in the furnace at 2.2x10 < -1 > Pa; turning on a bias power supply with the voltage of 180V; the ion source was turned on and the current was 140A. The etching time was 30min.
3) 100 (AlTiNbN/AlTiON) composite alternating coatings are deposited on the tool substrate using cathodic arc ion plating techniques: introducing working gas N2, keeping the pressure at 4.0Pa, setting the bias voltage at 50V, setting the rotating speed of a workpiece frame at 40% (about 1.58 r/min), setting the arc source current of the AlNb at 200A, and setting the deposition time at 1min; then closing the AlNb arc source, starting the AlTi arc source, controlling the current to be 200A, the bias voltage to be 40V, introducing 50sccm of O2, keeping the working pressure to be 4.0Pa, and depositing for 1min. The above deposition steps were then repeated with a deposition cycle of 100 and a total deposition time of 200 minutes.
4) AlTiCON gradient coating with reduced O/N stoichiometric ratio gradient is deposited on 100 (AlTiNbN/AlTiON) coating by using cathode arc ion plating technology: starting AlTiC arc source, current is 200A, bias voltage is 50V, working pressure is kept to be 4.0Pa, and initial O 2 The flow rate is 100sccm, and the initial N 2 The flow rate is 1200sccm, and O is sequentially reduced and increased 2 、N 2 Is introduced into the reactor to finish O 2 The amount of the mixture was 0sccm and N 2 The throughput was 1300sccm and the total deposition time was 100min.
5) And (3) turning off all arc sources, turning off a bias power supply, turning off a heating power supply, turning off gas, and naturally cooling to a product temperature of less than 200 ℃ in a vacuum state, thereby ending the coating.
6) The method mainly uses AlNb targets, alTi targets and AlTiC targets with different components according to the requirements of various cutters, and controls the working gas O 2 /N 2 And depositing a multi-layer composite coating with different target collocations on the surface of the cutter matrix according to the flow ratio, wherein the total thickness of the coating is 3.28 mu m.
Example 2
The multilayer composite structure coating cutter of the invention as in example 1 is composed of a cutter matrix, 50 (AlTiNbN/AlTiON) and AlTiCON coating layers from inside to outside in sequence, wherein the total thickness of the coating layers is 3.16 mu m;
wherein, the thickness of the 50 (AlTiNbN/AlTiON) coating is 2.08 mu m, and the thickness of the AlTiCON coating is 1.08 mu m;
50 The (AlTiNbN/AlTiON) composite coating comprises an AlTiNbN layer and an AlTiON layer which are periodically and alternately deposited from inside to outside, wherein the AlTiNbN layer has the thickness of 0.021 mu m and the AlTiON layer has the thickness of 0.019 mu m and comprises 50 periods;
the AlTiCON coating is an AlTiCON layer with a single-layer gradient structure and a gradient of which the O/N stoichiometric ratio is reduced.
The AlTiNbN layer in the multilayer composite structure coating comprises Al according to the atomic ratio 0.6 Ti 0.35 Nb 0.05 The N, alTiON layer is composed of Al according to the atomic ratio 0.55 Ti 0.45 O 0.1 The N, alTiCON layer is composed of Al according to the atomic ratio 0.6 Ti 0.35 C 0.05 (O 0.1～0 N 0.9～1 ) 1 。
The tool matrix is a W slice and a hard alloy stainless steel turning blade with the model of WNMG 080408-BM.
The preparation method of the multilayer gradient structure coated cutting tool of the present embodiment is as in example 1.
Example 3
The multilayer composite structure coating cutter of the invention as in the embodiment 1 is composed of a cutter matrix, 20 (AlTiNbN/AlTiON) and an AlTiCON coating in sequence from inside to outside, wherein the total thickness of the coating is 3.22 mu m;
wherein, the thickness of the 20 (AlTiNbN/AlTiON) coating is 2.02 mu m, and the thickness of the AlTiCON coating is 1.2 mu m.
20 The (AlTiNbN/AlTiON) composite coating comprises AlTiNbN layers and AlTiON layers which are periodically and alternately deposited from inside to outside, wherein the thickness of an AlTiNbN single layer is 0.051 mu m and the thickness of an AlTiON single layer is 0.049 mu m.
The AlTiCON coating is an AlTiCON layer with a single-layer gradient structure and a gradient of which the O/N stoichiometric ratio is reduced.
The AlTiNbN layer in the multilayer composite structure coating comprises Al according to the atomic ratio 0.6 Ti 0.35 Nb 0.05 The N, alTiON layer is composed of Al according to the atomic ratio 0.6 Ti 0.35 O 0.05 The N, alTiCON layer is composed of Al according to the atomic ratio 0.6 Ti 0.35 C 0.05 (O 0.1～0 N 0.9～1 ) 1 。
The substrate is a W slice and the model is WNMG 080408-BM.
The preparation method of the multilayer gradient structure coated cutting tool of the present embodiment is as in example 1.
Comparative example 1
Comparative tool 1 was a WNMG080408-BM cemented carbide stainless steel turning insert and W chip having the same tool base composition and the same mechanical design profile as the multilayer composite coated tools of examples 1, 2, 3, and was deposited using the same cathodic arc ion plating technique to produce Ti 0.33 Al 0.67 N single-layer uniform coating, the thickness of the coating is 3.12 mu m.
And (3) performance detection:
the nano hardness and elastic modulus of the coatings of examples 1, 2, 3 and comparative example 1 after various high temperature anneals (ta=800, 900, 1000, 1100, 1200 ℃) were measured using a Micro-Combi Tester nano indentation module from CSM company, and the results are shown in fig. 2. It can be seen that the coatings of examples 1, 2, and 3 still maintain high hardness mechanical properties at 900-1000 ℃ after high temperature annealing, while the coating of comparative example 1 has a sharp drop in hardness at 900 ℃, indicating that the high temperature stability of the coatings of examples 1, 2, and 3 is better than the coating of comparative example 1.
The multilayer composite coated tools of examples 1, 2, and 3 and the tool of comparative example 1 were processed under the same cutting conditions, and specific cutting parameters were as follows:
parameter 1:
SUS316 stainless steel as working material
Cutting speed vc=240/min
Feed per tooth fz=0.15 mm/r
Depth of cut ap=0.8 mm
Dry cooling mode
Parameter 2:
SUS316 stainless steel as working material
Cutting speed vc=200/min
Feed per tooth fz=0.3 mm/r
Depth of cut ap=1.5 mm
Dry cooling mode
The product performance evaluation adopts two standards of the same service life and the full service life, wherein the same service life is the same time of cutting, and the abrasion failure conditions of the front cutter surface and the rear cutter surface of the cutter are compared; the service life reaches 0.25mm after uniform abrasion VB or the cutter coating is peeled off, the tipping is obvious, and the vibration of the machine tool is larger.
Under parameter 1, the test tool results show that the wear amounts VB of the rear tool surfaces of the coated tools in examples 1, 2 and 3 are respectively 0.107, 0.114 and 0.135mm after 20 minutes of continuous turning under the same service life, as shown in Table 2. The flank wear VB of the tool of comparative example 1 was 0.237mm and had failed completely. At full life, the cutting times for the coated tools of examples 1, 2, 3 and comparative example 1 were 38 minutes, 36 minutes, 33 minutes, and 20 minutes, respectively, with the coated tools of this example 1, 2, 3 having 90%, 80%, 65% improved, respectively, over the tool of comparative example 1.
Table 1 tool life for examples 1, 2, 3 and comparative example 1
The test results under parameter 2 show that the wear amounts VB of the rear tool surfaces of the coated tools in examples 1, 2 and 3 are respectively 0.097, 0.116 and 0.125mm after continuous turning for 15 minutes under the same service life, as shown in Table 2. The flank wear VB of the comparative cutter 1 was 0.221mm and had failed completely. Under the full life, the cutting time of the coated cutters of the examples 1, 2 and 3 and the comparative cutter 1 are 29 minutes, 27 minutes, 26 minutes and 15 minutes respectively when the coated cutters are completely failed, and the cutter life of the coated cutters of the examples 1, 2 and 3 is improved by 93%, 80% and 73% respectively compared with the comparative cutter 1.
Table 2 tool life for examples 1, 2, 3 and comparative example 1
While the invention has been described with respect to specific embodiments thereof, it will be understood by those skilled in the art and those skilled in the art that various modifications and adaptations may be made thereto without departing from the principles of the invention, such as the use of magnetron sputtering techniques or other physical vapor deposition techniques to deposit the coating concepts described above, the addition of primer finishing layers, the simple replacement of other multicomponent coating layers, etc., and such modifications and adaptations are intended to be within the scope of the invention. Therefore, the protection scope of the present invention shall be subject to the protection scope of the claims.

Claims (6)

1. An m (altin/AlTiON) +alticon multi-layer composite coating for cutting, which is deposited on a tool substrate, characterized in that the tool substrate is hard alloy or cermet prepared by a powder metallurgy method, and the composite coating comprises m (Al 1-a-b Ti a Nb b N/Al 1-c-d Ti c O d N) coating and coating located at m (Al 1-a-b Ti a Nb b N/Al 1-c- d Ti c O d N) Al on coating 1-x-y Ti x C y O z～0 N 1-z～1 A coating; wherein said m (Al 1-a-b Ti a Nb b N/Al 1-c-d Ti c O d N) coating with Al 1-a-b Ti a Nb b N coating and Al 1-c-d Ti c O d The N coating is formed by multi-period alternate deposition, and m is the period number; the Al is 1-x- y Ti x C y O z～0 N 1-z～1 A gradient layer having a gradient of decreasing O/N stoichiometry;
wherein, the atomic percentage of Ti in the Al 1-a-bTiaNbN coating is more than or equal to 0.2 and less than or equal to 0.6, the atomic percentage of Nb is more than or equal to 0.01 and less than or equal to 0.2, and the atomic percentage of Al is more than or equal to 0.3 and less than or equal to 1-a-b and less than or equal to 0.6; the atomic percentage of Ti in the Al 1-c-dTicOdN coating is more than or equal to 0.3 and less than or equal to 0.6, the atomic percentage of O is more than or equal to 0.01 and less than or equal to 0.1, and the atomic percentage of Al is more than or equal to 0.3 and less than or equal to 1-c-d and less than or equal to 0.6; the Al is 1-x-y Ti x C y O z～0 N 1-z～1 The atomic percentage of Ti in the coating is 0.3-0.6, the atomic percentage of C is 0.01-0.1, and the atomic percentage of Al0.3-x-y is less than or equal to 0.6, the variation range z-0 of the stoichiometric ratio of O atoms is 0.1-1, and correspondingly, the stoichiometric ratio 1-z-1 of N atoms is 1-0.9; said m (Al) 1-a-b Ti a Nb b N/Al 1-c-d Ti c O d N) the period number in the coating is 1-m-1000, and the Al 1-a-b Ti a Nb b N coating, al 1-c-d Ti c O d The N coating has a monolayer thickness of not less than 0.001 μm, m (Al 1-a- b Ti a Nb b N/Al 1-c-d Ti c O d N) the thickness of the coating is 0.5-3 μm.
2. The cutting m (altin/AlTiON) +alticon multilayer composite coating according to claim 1, characterized in that the gradient layer with reduced O/N stoichiometric ratio gradient is in particular a gradient layer with constant total operating pressure, gradually reducing O 2 /N 2 The gas flow ratio is achieved.
3. The m (altin/AlTiON) +alticon multilayer composite coating for cutting according to claim 1, wherein the multilayer composite coating is prepared by physical vapor deposition.
4. A method for producing the m (altin/AlTiON) +alticon multilayer composite coating for cutting according to any one of claims 1 to 3, characterized by comprising the steps of:
preparing a hard alloy or metal ceramic cutter matrix by adopting a powder metallurgy method, and carrying out deep processing treatment on the cutter matrix to obtain a cutter matrix subjected to deep processing treatment;
cleaning and drying, argon ion bombardment etching and activating treatment are carried out on the cutter matrix subjected to the deep processing treatment, and a pretreated cutter matrix is obtained;
alternating deposition of Al on pretreated tool substrates by physical vapor deposition 1-a-b Ti a Nb b N coating and Al 1-c- d Ti c O d N coating, then controlling the total working pressure to be unchanged, gradually reducing O 2 /N 2 The gas flow ratio continuesDeposition of Al 1-x- y Ti x C y O z～0 N 1-z～1 And (3) coating.
5. The method for producing an m (altin/AlTiON) +alticon multilayer composite coating for cutting according to claim 4, wherein the further processing treatment includes grinding, blasting, polishing.
6. The method for producing a cutting m (altin/AlTiON) +alticon multilayer composite coating according to claim 4, wherein the physical vapor deposition method is specifically an anionic arc ion plating technique, the substrate bias voltage is 30-150V, the target source current is 100-240A, the working gas used is nitrogen and oxygen, and the working gas pressure is 0.5-10 Pa.
CN202210360900.1A 2022-04-07 2022-04-07 M (AlTiNbN/AlTiON) +AlTiCON multilayer composite coating for cutting and preparation method thereof Active CN114686822B (en)

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Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000326106A (en) * 1999-05-19 2000-11-28 Hitachi Tool Engineering Ltd Hard coating covered tool
WO2009128782A1 (en) * 2008-04-18 2009-10-22 Sandvik Intellectual Property Ab A coated cutting tool and a method of making thereof

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2636764B1 (en) * 2012-03-07 2014-07-09 Seco Tools Ab Nanolaminated coated cutting tool

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000326106A (en) * 1999-05-19 2000-11-28 Hitachi Tool Engineering Ltd Hard coating covered tool
WO2009128782A1 (en) * 2008-04-18 2009-10-22 Sandvik Intellectual Property Ab A coated cutting tool and a method of making thereof

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