CN114686171A - Suspensible diamond grinding fluid and preparation process thereof - Google Patents
Suspensible diamond grinding fluid and preparation process thereof Download PDFInfo
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- CN114686171A CN114686171A CN202210552281.6A CN202210552281A CN114686171A CN 114686171 A CN114686171 A CN 114686171A CN 202210552281 A CN202210552281 A CN 202210552281A CN 114686171 A CN114686171 A CN 114686171A
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- carborundum
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- 238000000227 grinding Methods 0.000 title claims abstract description 25
- 239000012530 fluid Substances 0.000 title claims abstract description 24
- 239000010432 diamond Substances 0.000 title claims abstract description 23
- 229910003460 diamond Inorganic materials 0.000 title claims abstract description 23
- 238000002360 preparation method Methods 0.000 title abstract description 8
- 229910010271 silicon carbide Inorganic materials 0.000 claims abstract description 68
- 239000002270 dispersing agent Substances 0.000 claims abstract description 62
- 239000000084 colloidal system Substances 0.000 claims abstract description 33
- 238000000498 ball milling Methods 0.000 claims abstract description 31
- 239000002131 composite material Substances 0.000 claims abstract description 25
- 238000002156 mixing Methods 0.000 claims abstract description 24
- 239000008367 deionised water Substances 0.000 claims abstract description 22
- 229910021641 deionized water Inorganic materials 0.000 claims abstract description 22
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 22
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims abstract description 20
- 238000000034 method Methods 0.000 claims abstract description 15
- 238000009736 wetting Methods 0.000 claims abstract description 13
- 238000012986 modification Methods 0.000 claims abstract description 11
- 230000004048 modification Effects 0.000 claims abstract description 11
- 229910052593 corundum Inorganic materials 0.000 claims abstract description 8
- 239000010431 corundum Substances 0.000 claims abstract description 8
- 229910001651 emery Inorganic materials 0.000 claims abstract description 8
- 239000002002 slurry Substances 0.000 claims abstract description 4
- QTBSBXVTEAMEQO-UHFFFAOYSA-N Acetic acid Chemical compound CC(O)=O QTBSBXVTEAMEQO-UHFFFAOYSA-N 0.000 claims description 18
- 238000003756 stirring Methods 0.000 claims description 10
- 229960000583 acetic acid Drugs 0.000 claims description 9
- 239000012362 glacial acetic acid Substances 0.000 claims description 9
- 238000004519 manufacturing process Methods 0.000 claims description 6
- 239000004094 surface-active agent Substances 0.000 claims description 5
- 238000001035 drying Methods 0.000 claims description 4
- 238000001914 filtration Methods 0.000 claims description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 3
- 239000007788 liquid Substances 0.000 claims description 3
- 229910052710 silicon Inorganic materials 0.000 claims description 3
- 239000010703 silicon Substances 0.000 claims description 3
- 238000007599 discharging Methods 0.000 claims description 2
- 229920001296 polysiloxane Polymers 0.000 claims 1
- 238000000746 purification Methods 0.000 claims 1
- 230000000694 effects Effects 0.000 abstract description 7
- 239000000919 ceramic Substances 0.000 abstract description 6
- 239000006185 dispersion Substances 0.000 abstract description 4
- 239000002904 solvent Substances 0.000 abstract description 4
- 239000012776 electronic material Substances 0.000 abstract description 2
- 238000005498 polishing Methods 0.000 abstract 1
- 239000000843 powder Substances 0.000 description 6
- 238000005516 engineering process Methods 0.000 description 4
- 239000000203 mixture Substances 0.000 description 4
- 239000003125 aqueous solvent Substances 0.000 description 3
- 238000012797 qualification Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 239000000725 suspension Substances 0.000 description 2
- 239000003082 abrasive agent Substances 0.000 description 1
- 239000010775 animal oil Substances 0.000 description 1
- 229910010293 ceramic material Inorganic materials 0.000 description 1
- 230000007123 defense Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000004377 microelectronic Methods 0.000 description 1
- 239000003607 modifier Substances 0.000 description 1
- 239000002113 nanodiamond Substances 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 238000004381 surface treatment Methods 0.000 description 1
- 229940099259 vaseline Drugs 0.000 description 1
Images
Classifications
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- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
- C09K3/00—Materials not provided for elsewhere
- C09K3/14—Anti-slip materials; Abrasives
- C09K3/1454—Abrasive powders, suspensions and pastes for polishing
- C09K3/1463—Aqueous liquid suspensions
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Colloid Chemistry (AREA)
- Carbon And Carbon Compounds (AREA)
- Emulsifying, Dispersing, Foam-Producing Or Wetting Agents (AREA)
Abstract
A suspensible diamond grinding fluid and a preparation method thereof belong to the field of electronic materials. The polishing slurry comprises: carborundum, deionized water, alumina balls, a dispersing agent and water-soluble colloid. The preparation method comprises the steps of mixing corundum which is wet modified corundum, deionized water with the pH value of 8-9, alumina balls which are light alumina balls, and a dispersing agent which is a composite dispersing agent and comprises a D-134 dispersing agent, a D-540 dispersing agent and a PAA dispersing agent according to a certain proportion, mixing the corundum and the composite dispersing agent according to a certain proportion, wherein the content of PVB in water-soluble colloid is 20-25%, and mixing the corundum and the water-soluble colloid according to a certain proportion. The preparation method comprises the process modules of surface wetting modification of carborundum, ball-milling mixing of carborundum, use of a composite dispersing agent, addition of water-soluble colloid and the like. The problem of the dispersion effect of emery in the solvent is poor in prior art is solved. The method is widely applied to the grinding process of microwave ceramics.
Description
Technical Field
The invention belongs to the field of electronic materials, and further relates to the field of diamond grinding fluid, in particular to suspensible diamond grinding fluid and a preparation process thereof.
Background
With the rapid development of high and new technologies such as microelectronic technology, electronic information technology, national defense industry, aerospace, mechanical manufacturing and processing and the like, more and more ceramic materials are applied to various fields. Particularly in the microwave ceramic field, since the ceramic surface is highly required, the ceramic surface is subjected to a fine grinding treatment, which uses a diamond grinding fluid.
When the surface treatment is carried out on the ceramic substrate, the existing diamond grinding fluid technology is to add nano diamond powder into molten animal oil and stir the mixture evenly to obtain diamond fluid, then add vaseline and a surface modifier into the diamond fluid, stir and mix the mixture and then cool the mixture to room temperature to obtain corresponding grinding paste/fluid. The grinding paste/liquid obtained by the method has high viscosity, is not easy to drip, has high material cost, poor dispersion effect of carborundum in a solvent, poor grinding quality consistency of products, low qualification rate and high production cost.
In view of the above, the present invention is particularly proposed.
Disclosure of Invention
The technical problem to be solved by the invention is as follows: the problems of poor dispersion effect of the emery in the solvent, poor consistency of grinding quality of products, low qualification rate and high production cost in the prior art are solved.
The technical scheme of the invention is as follows: the carborundum is modified and wetted to enable the carborundum to have hydrophilic property, the carborundum is uniformly and stably dispersed and suspended in the aqueous solvent by adopting the aqueous solvent and a ball-milling mixing process, the dispersion effect of the carborundum in the solvent is improved, and the grinding fluid with low viscosity and good suspension effect is obtained. Therefore, the consistency of the grinding quality of the product is improved, the quality of the ground product is stabilized, the yield is improved, and the production cost is reduced.
To this end, the present invention provides a suspendable diamond abrasive fluid comprising: carborundum, deionized water, alumina balls, a dispersing agent and water-soluble colloid.
The carborundum is wetting modified carborundum, and the purity is more than or equal to 99 percent.
And the pH value of the deionized water is 8-9.
The alumina balls are light alumina balls, and the purity is more than or equal to 99.4%.
The dispersant is a composite dispersant, and comprises a D-134 dispersant, a D-540 dispersant and a PAA dispersant which are mixed according to a certain proportion. The carborundum and the composite dispersant are mixed according to a certain proportion.
The content of PVB in the water-soluble colloid is 20-25%. The carborundum and the water-soluble colloid are mixed according to a certain proportion.
The preparation method of the suspensible diamond grinding fluid comprises the following process modules:
(1) surface wetting modification of carborundum
Adjusting the pH value of glacial acetic acid to 5-6 by using deionized water through a pH meter, adding a set amount of organosilicon gemini surfactant, carborundum (the purity is not less than 99%) and glacial acetic acid with pH of 5, stirring at the temperature of 70-90 ℃, carrying out hydrophilic wetting modification on the surface of the carborundum, and filtering and drying the carborundum after stirring.
(2) Ball milling and mixing of corundum
By means of a pH meter, using Na2HCO3And (2) preparing a proper amount of deionized water with the pH value of 8-9, performing ball milling and mixing on the carborundum by using light high-purity alumina balls (the purity is more than or equal to 99.4%), adding the set parts of carborundum, light alumina balls and deionized water with the pH value of 8-9, and performing ball milling and mixing.
(3) Use of composite dispersant
The composite dispersant comprises a D-134 dispersant, a D-540 dispersant and a PAA dispersant, which are mixed according to a certain proportion, and emery is dispersed during ball milling and mixing, wherein the addition amount of the composite dispersant is a certain proportion of the weight of the emery.
(4) Addition of Water-soluble colloid
After carborundum ball milling, adding water-soluble colloid, wherein the content of PVB in the colloid is 20-25%, and the addition amount of the colloid is a certain proportion of the weight of the carborundum. After the addition, ball milling is carried out, and then stable and suspendable carborundum grinding fluid can be obtained.
Compared with the prior art, the suspensible diamond grinding fluid has the advantages that the diamond grains are uniformly and stably dispersed and suspended in the aqueous solvent, the viscosity is low, and the suspension effect is good. The consistency of the grinding quality of the product can be effectively improved, the quality of the ground product is stabilized, the qualification rate is improved, and the production cost is reduced. The method is widely applied to the grinding process of microwave ceramics.
Drawings
Fig. 1 is a schematic diagram of a suspendable diamond abrasive fluid.
Detailed Description
The technical scheme of the invention has the following specific implementation modes:
the suspensible diamond grinding fluid comprises the following components in percentage by weight:
the carborundum is wetting modified carborundum, the purity is more than or equal to 99 percent, and the weight is 1 to 2 parts.
The pH value of the deionized water is 8-9, and the weight of the deionized water is 30-35 parts.
The alumina ball is light alumina ball, the purity is more than or equal to 99.4 percent, and the weight is 50 to 60 parts.
The dispersant is a composite dispersant and comprises 3 to 5 parts of D-134 dispersant, 2 to 3 parts of D-540 dispersant and 1 to 2 parts of PAA dispersant. The carborundum and the composite dispersant are mixed according to the proportion of 100-110 parts to 1-2 parts.
The content of PVB in the water-soluble colloid is 20-25%. The carborundum and the water-soluble colloid are mixed according to the proportion of 1-2 parts to 3-5 parts.
The preparation method of the suspensible diamond grinding fluid comprises the following steps:
(1) surface wetting modification of carborundum
Adjusting the pH value of glacial acetic acid to 5-6 by using deionized water through a pH meter, adding 1-2 parts of organic silicon gemini surfactant Sago-3650, 25-30 parts of carborundum (purity is more than or equal to 99 percent, Central plains abrasive material mold Limited liability company) and 125-150 parts of glacial acetic acid (analytically pure) with the pH value of 5, stirring at the temperature of 85-90 ℃ for 4-6 hours, carrying out hydrophilic wetting modification on the surface of the carborundum, and filtering and drying the carborundum after the stirring is finished.
(2) Ball milling and mixing of corundum
By means of a pH meter, using Na2HCO3(analytically pure) blending a proper amount of deionized water with the pH value of 8-9, ball-milling and mixing carborundum by using light high-purity alumina balls (the purity is more than or equal to 99.4%), adding 1-2 parts of carborundum, 50-60 parts of light alumina balls and 30-35 parts of deionized water with the pH value of 8, ball-milling and mixing for 4-6 hours, wherein the rotating speed of a ball mill is 30-35 revolutions per minute.
(3) Use of composite dispersant
Three dispersants are used for dispersing the carborundum during ball milling mixing, the composite dispersant comprises 3-5 parts of D-134 dispersant, 2-3 parts of D-540 dispersant and 1-2 parts of PAA dispersant, the addition amount of the dispersant is 100-110 parts of carborundum and 1-2 parts of composite dispersant.
(4) Addition of Water-soluble colloid
After the carborundum ball milling is carried out for 4 to 6 hours, water-soluble colloid is added, the content of PVB in the colloid is 20 to 25 percent, the addition amount of the colloid is 1 to 2 parts of carborundum and 3 to 5 parts of colloid. Ball milling is carried out for 6 to 8 hours after the addition, the ball milling rotating speed is 30 to 35 revolutions per minute, and discharging is carried out after the ball milling is finished, so that the stable and suspendable carborundum grinding fluid can be obtained.
The carborundum powder has good hydrophilic property and is not easy to settle through surface wetting modification of the carborundum powder, the carborundum powder is uniformly dispersed in deionized water through a ball milling process, the ZETA potential of the carborundum powder is stable through the use of the composite dispersing agent, the carborundum powder is not easy to settle after ball milling, and the water-soluble colloid enables slurry to be placed for a long time without settling after ball milling. The effect schematic diagram is shown in fig. 1.
Finally, it should be noted that: the above examples are merely examples for clarity of illustration, and the present invention includes but is not limited to the above examples, which are not necessarily exhaustive of all embodiments. Other variations and modifications will be apparent to persons skilled in the art in light of the above description. Embodiments that meet the requirements of the present invention are within the scope of the present invention.
Claims (7)
1. A suspendable diamond abrasive fluid comprising: carborundum, deionized water, alumina balls, a dispersing agent and a water-soluble colloid;
the carborundum is wetting modified carborundum, and the purity is more than or equal to 99 percent;
the pH value of the deionized water is 8-9;
the alumina balls are light alumina balls, and the purity is more than or equal to 99.4%;
the dispersant is a composite dispersant, comprises a D-134 dispersant, a D-540 dispersant and a PAA dispersant, and is mixed according to a certain proportion; mixing the carborundum and the composite dispersant according to a certain proportion;
the content of PVB in the water-soluble colloid is 20-25%, and the carborundum and the water-soluble colloid are mixed according to a certain proportion.
2. A suspendable diamond abrasive fluid as claimed in claim 1, wherein the weight ratio of:
the weight of the carborundum is 1 to 2;
the weight of the deionized water is 30-35 parts;
the weight of the alumina ball is 50-60;
the composite dispersant comprises 3 to 5 parts of D-134 dispersant, 2 to 3 parts of D-540 dispersant and 1 to 2 parts of PAA dispersant;
mixing the carborundum and the composite dispersing agent according to the proportion of 100-110 parts to 1-2 parts;
the carborundum and the water-soluble colloid are mixed according to the proportion of 1-2 parts to 3-5 parts.
3. The method for preparing a suspendable diamond slurry as set forth in claim 1, comprising the following process modules:
(1) surface wetting modification of carborundum
Adjusting the pH value of glacial acetic acid to 5-6 by using deionized water through a pH meter, adding a set amount of organic silicon gemini surfactant, carborundum and glacial acetic acid with pH of 5, stirring at the temperature of 70-90 ℃, carrying out hydrophilic wetting modification on the surface of the carborundum, and filtering and drying the carborundum after stirring is finished;
(2) ball milling and mixing of corundum
By means of a pH meter, using Na2HCO3Preparing a proper amount of deionized water with the pH value of 8-9, performing ball milling and mixing on the carborundum by using light alumina balls with the purity of more than or equal to 99.4%, adding set parts of carborundum, light alumina balls and deionized water with the pH value of 8-9, and performing ball milling and mixing;
(3) use of composite dispersant
The composite dispersant comprises a D-134 dispersant, a D-540 dispersant and a PAA dispersant, which are mixed according to a certain proportion, and emery is dispersed during ball milling and mixing, wherein the addition amount of the composite dispersant is a certain proportion of the weight of the emery;
(4) addition of Water-soluble colloid
After carborundum ball milling, adding water-soluble colloid, wherein the content of PVB in the colloid is 20-25%, and the addition amount of the colloid is a certain proportion of the weight of the carborundum; adding water-soluble colloid and ball milling to obtain stable and suspendable emery grinding liquid.
4. The method for preparing the suspensible diamond grinding fluid according to claim 3, wherein the specific process modules are as follows:
(1) surface wetting modification of carborundum
Adjusting the pH value of glacial acetic acid to 5-6 by using deionized water through a pH meter, adding 1-2 parts of organic silicon gemini surfactant, 25-30 parts of carborundum and 125-150 parts of glacial acetic acid with the pH of 5, stirring at the temperature of 85-90 ℃ for 4-6 hours, carrying out hydrophilic wetting modification on the surface of the carborundum, and filtering and drying the carborundum after the stirring is finished;
(2) ball milling and mixing of corundum
By means of a pH meter, using Na2HCO3Preparing a proper amount of deionized water with the pH value of 8-9, ball-milling and mixing carborundum by using light high-purity alumina balls, adding 1-2 parts of carborundum, 50-60 parts of light alumina balls and 30-35 parts of deionized water with the pH value of 8, ball-milling and mixing for 4-6 hours, wherein the rotating speed of a ball mill is 30-35 revolutions per minute;
(3) use of composite dispersant
Dispersing carborundum during ball milling and mixing by using three dispersants, wherein the composite proportion of the composite dispersant is 3-5 parts of D-134 dispersant, 2-3 parts of D-540 dispersant and 1-2 parts of PAA dispersant, the addition amount of the dispersant is 100-110 parts of carborundum and 1-2 parts of the composite dispersant;
(4) addition of Water-soluble colloid
After ball milling of carborundum for 4-6 hours, adding water-soluble colloid, wherein the addition amount of the colloid is 1-2 parts of carborundum and 3-5 parts of colloid; adding water-soluble colloid, ball milling for 6-8 hr at 30-35 rpm, and discharging to obtain stable and suspendable emery liquid.
5. A method of preparing a suspendable diamond abrasive fluid as set forth in claim 3 wherein said silicone gemini surfactant is Sago-3650.
6. A method of preparing a suspendable diamond abrasive fluid as set forth in claim 3 wherein said glacial acetic acid is analytically pure.
7. The method of making a suspendable diamond slurry as in claim 3 wherein said Na is2HCO3For analytical purification.
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| Application Number | Priority Date | Filing Date | Title |
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| CN202210552281.6A CN114686171A (en) | 2022-05-19 | 2022-05-19 | Suspensible diamond grinding fluid and preparation process thereof |
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| CN202210552281.6A CN114686171A (en) | 2022-05-19 | 2022-05-19 | Suspensible diamond grinding fluid and preparation process thereof |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116083052A (en) * | 2022-12-31 | 2023-05-09 | 北京国瑞升科技股份有限公司 | Diamond grinding paste and preparation method thereof |
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Application publication date: 20220701 |