CN114656133B - Anti-adhesion and anti-attrition ultra-precise mold, machining system and method - Google Patents
Anti-adhesion and anti-attrition ultra-precise mold, machining system and method Download PDFInfo
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- CN114656133B CN114656133B CN202210560583.8A CN202210560583A CN114656133B CN 114656133 B CN114656133 B CN 114656133B CN 202210560583 A CN202210560583 A CN 202210560583A CN 114656133 B CN114656133 B CN 114656133B
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B11/00—Pressing molten glass or performed glass reheated to equivalent low viscosity without blowing
- C03B11/06—Construction of plunger or mould
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
- B23K26/0643—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising mirrors
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/352—Working by laser beam, e.g. welding, cutting or boring for surface treatment
- B23K26/355—Texturing
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/70—Auxiliary operations or equipment
- B23K26/702—Auxiliary equipment
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P40/00—Technologies relating to the processing of minerals
- Y02P40/50—Glass production, e.g. reusing waste heat during processing or shaping
- Y02P40/57—Improving the yield, e-g- reduction of reject rates
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- Moulds For Moulding Plastics Or The Like (AREA)
Abstract
The invention belongs to the field of ultra-precision machining, and particularly provides an anti-sticking and anti-attrition ultra-precision mold, a machining system and a method.
Description
Technical Field
The invention belongs to the field of ultra-precision machining, and particularly relates to an anti-sticking and anti-attrition ultra-precision mold, a machining system and a machining method.
Background
The mould is an important basic process equipment in the manufacturing industry, is mainly used for efficiently producing related parts and parts in industrial products in a large scale, and is an important component of the equipment manufacturing industry. The products produced by the die in batch have the advantages of high efficiency, high consistency, low energy consumption, high precision, high complexity and the like, so the die is widely applied to the industries of machinery, electronics, automobiles, aviation, aerospace, war industry, medical treatment, biology, energy and the like. At present, the mold manufacturing level becomes an important mark for measuring the manufacturing level of a country, and is also one of important guarantees for the national industrial products to maintain international competitiveness.
Due to the special geometric characteristics of the micro complex structure device, such as the micro complex structure optical element, the micro complex structure device has various optical functions, can realize the functions which are difficult to be completed by the traditional optical element, and has important application value in the development of modern optical technology. At present, the manufacturing method of the micro optical element with the complex structure mainly takes single-point diamond cutting processing, a photoetching technology and a LIGA technology as main technologies. The single-point diamond cutting has higher processing precision, but the glass material belongs to a brittle material at normal temperature, so the one-time cutting feeding amount is very small, the processing consistency is difficult to ensure, and the single-point diamond cutting is not suitable for batch production, and although the photoetching technology and the LIGA technology can finish the micro-nano structure processing with small characteristic size and high surface quality, the process is limited by the production efficiency and the process stability, and the industrial requirements cannot be well met.
In recent years, attention has been paid to a press molding technique for an optical element, in which a specific structure of a mold surface is transferred to a surface of a heat-softened optical element by applying a predetermined pressure to the mold at a high temperature, and then the transferred material is annealed, cooled and solidified to obtain an ideal optical element having a micro-complex structure. This technique enables mass production of optical elements with high efficiency, and since material removal is not involved in the processing, it can significantly reduce the consumption of raw materials and reduce the production cost, and is considered to be one of the most effective methods for producing optical elements.
Wherein the molding technique is generally carried out at high temperature (500 ℃ C. and 1500 ℃ C.). At present, because the surface shape precision and the surface quality of an optical element are determined by a mould, the surface quality of the mould in the existing mould pressing forming process has high requirement, the mould surface has no defects of scratches, breakage, cracks and the like, and is a smooth or ultra-smooth surface without any structure. However, the mold surface is liable to stick to the molten optical element at high temperature, thereby reducing the quality of the mold surface and the life span, and increasing the production cost. In addition, under the action of heating-cooling temperature cycle and mold closing-demolding pressure cycle, the mold is subjected to thermal fatigue and stress fatigue, and the fatigue of the mold material easily causes the abrasion and the failure of the mold. The die wear refers to the phenomenon that the working part of the die normally becomes dull under the action of high temperature and high pressure in the forming process. The damage of the mold refers to the phenomenon that the mold cannot be normally used due to large deformation or surface falling of the mold, and generally, the damage of the mold is caused by plastic flow generated by a microstructure under the action of high temperature and high pressure to lose forming capability.
Meanwhile, in recent years, high-temperature resistant superhard materials such as tungsten carbide and silicon carbide have become main materials of dies used in the press forming technology, but the processing of the superhard material dies still faces a plurality of difficulties. Firstly, the efficiency of processing the structure array on the surface of the hard materials by using a mechanical removal method is very low, and some structures can not be processed; secondly, due to the characteristic of minimized size of the microstructure array, defects can not be repaired once occurring in the processing process, thereby indirectly increasing the manufacturing cost of the micro optical element with a complex structure.
Disclosure of Invention
Aiming at the defects in the prior art, the invention aims to provide an anti-adhesion and anti-attrition ultra-precision die, a processing system and a processing method.
In order to achieve the purpose, the technical scheme adopted by the invention is as follows:
in a first aspect, the invention provides an anti-sticking and anti-attrition ultra-precise die, wherein a working surface of the die is an ultra-smooth surface, and the ultra-smooth surface has a nano texture.
Compared with the conventional smooth or super-smooth sliding mould without defects or any texture on the surface, the nano-texture with periodic or regular arrangement is processed on the surface of the super-smooth sliding mould, and the nano-texture provided by the invention can improve the surface hardness of the mould and reduce the surface pressure of the mould, thereby improving the anti-sticking and anti-wear properties of the mould. The size of the texture provided by the invention is in nanometer level, and the optical element melted at high temperature cannot flow into the nanometer texture due to the size effect, so that the nanometer texture on the surface of the ultra-smooth die cannot be transferred to the surface of the optical element, and the surface quality and the surface type precision of the optical element cannot be influenced by the nanometer texture.
As a further technical scheme, when the working surface of the die is a plane, the distances between the nano textures on the same surface are equal.
As a further technical scheme, when the working surface of the die is arc-shaped, the radian of the nano-textures on the same working surface is equal.
As a further technical scheme, the anti-sticking and anti-attrition ultra-precise die comprises an upper die and a lower die, wherein the distance between the nano texture on the working surface of the upper die and the nano texture on the working surface of the lower die is equal.
As a further technical scheme, the surface of the working surface of the anti-adhesion and anti-attrition ultra-precise die is further plated with a layer of film.
In a second aspect, the invention also provides a processing method of the anti-adhesion and anti-attrition ultra-precise mold, which comprises the following steps:
step 1, obtaining a mold with an ultra-smooth surface;
and 2, preparing the nano texture on the surface of the die.
In a third aspect, the present invention further provides an ultra-precision mold for processing an optical element, including an upper mold and a lower mold; the working surfaces of the upper die and the lower die are ultra-smooth surfaces, and the ultra-smooth surfaces are provided with nano textures; the lower die is fixed on the heating cavity or in the heating cavity; the melting point of the mould is greater than that of the optical element; the temperature in the heating cavity is greater than the melting point of the optical element and less than the melting point of the mold.
In a fourth aspect, the invention also provides a method for processing an optical element by using the anti-adhesion and anti-attrition ultra-precision die, which comprises the following steps:
fixing a lower die of the anti-adhesion and anti-attrition ultra-precise die in a heating cavity;
placing an optical element to be processed above the lower die;
fixing an upper die of the anti-adhesion and anti-attrition ultra-precision die above the optical element;
and heating, preserving heat and cooling the heating cavity to obtain the optical element.
In a fifth aspect, the invention also provides a processing system of the anti-adhesion and anti-attrition ultra-precise mold, which comprises a femtosecond laser, a spatial light modulator, a reflecting mirror, a dichroic mirror and an objective lens; the femtosecond laser generates laser for processing; the spatial light modulator adjusts the light field, and the adjusted laser sequentially passes through the reflecting mirror, the dichroic mirror and the objective lens and then acts on the surface of the processed die to form a nano-texture on the surface of the processed die.
As a further technical scheme, the processing system of the anti-adhesion and anti-attrition ultra-precise die further comprises a camera which is arranged on one side of the dichroic mirror and used for observing the surface appearance of the workpiece.
In a sixth aspect, the processing system for the anti-sticking and anti-attrition ultra-precise die is used for processing the periodic equiarc-length nano-texture die, and is characterized in that; establishing a parameter equation and a corresponding coordinate system of the complex curved surface; determining the number of the textures processed by single laser and the arc length among the nano textures; calculating the horizontal projection length of the arc length between every two textures, substituting the projection length into a spatial light modulator, and adjusting a femtosecond laser field; and processing the curved surface die by using the adjusted laser to obtain the periodic equal-arc-length nano texture.
The embodiment of the invention has the following beneficial effects:
1. the invention breaks through the conventional design thought of the die, the nano texture is processed on the ultra-smooth surface of the die, and the dimension of the nano texture is extremely small, so that the processed element melted at high temperature cannot flow into the nano texture with smaller dimension, and the nano texture on the surface of the ultra-precise die cannot be transferred to the surface of the element, so that the die-pressed element has higher surface quality and surface type precision.
2. The hardness of the mold texture area is increased, so that the hardness of the mold is improved by processing the nano texture, and the wear resistance of the mold is improved; meanwhile, the nano-texture increases the stress area of the die, reduces the surface pressure of the die, can improve the anti-adhesion capability of the die, and further improves the wear resistance of the die.
3. According to the method for processing the optical die with the ultra-smooth surface and the nano-texture combined, after the die with the ultra-smooth surface is obtained through an ultra-precise grinding and polishing technology, the nano-texture is prepared on the surface of the die by adopting a femtosecond laser processing method or a focused ion beam or an electron beam, and the nano-texture is utilized to reduce the bonding between the die and an optical element and the abrasion of the die at high temperature on the premise of not influencing the performance of the die and the surface quality and surface type precision of the optical element after die pressing.
4. The equal arc length processing method provided by the invention can realize the processing of a plurality of structures with uniform spacing arrays on the surface of the curved surface die at one time, greatly improve the processing efficiency of the texture, further improve the anti-sticking and anti-abrasion performance of the surface of the die and prolong the service life of the die.
5. The invention provides a processing system of nano-texture on the surface of a die, which can obtain nano-structures with various shapes and structures on the surface of the die by directionally modulating femtosecond laser spots through a spatial light modulator, thereby realizing the efficient processing of minimized structures on the surface of the die and reducing the production cost.
Drawings
The accompanying drawings, which form a part of the present disclosure, are included to provide a further understanding of the present disclosure, wherein the dimensions of the mold are on the millimeter scale or more, the nanotexture of the mold surface is only on the nanometer scale, and the nanotexture is enlarged to show the shape and structural features of the nanotexture, so that the ratio of the actual area (dimension) of the nanostructure to the mold surface is very small. The exemplary embodiments and descriptions of the present invention are provided to explain the present invention and not to limit the present invention.
FIG. 1 is a schematic view of an anti-stiction and anti-attrition ultra-precision mold of trapezoidal cross section as disclosed in example 1;
FIG. 2 is a schematic view of an anti-galling and anti-friction ultra-precision mold with triangular saw tooth cross section disclosed in example 1;
FIG. 3 is a schematic view of the anti-stiction and anti-attrition ultra-precision curved mold disclosed in example 1;
FIG. 4 is the anti-stiction and anti-attrition ultra-precision mold disclosed in example 1 after coating;
FIG. 5 is a schematic view of the processing of the anti-stiction and anti-attrition ultra-precision mold disclosed in example 2;
FIG. 6 is a schematic view of a nano-textured curved mold molding process disclosed in example 3;
FIG. 7 is a schematic view of the nano-textured trapezoidal cross-section mold molding process disclosed in example 3;
FIG. 8 is a schematic drawing of a nanotextured triangular cross section die pressing process disclosed in example 3;
fig. 9 is a schematic view of a nanotextured mold surface coating disclosed in example 3;
in the figure: the device comprises a CCD camera 1, a reflector 2, a femtosecond laser 3, a spatial light modulator 4, a reflector 5, a dichroic mirror 6, an objective lens 7, a nano-texture 8, a mold 9, an upper mold 10, an optical element 11, a lower mold 12 and a film coating 13.
Detailed Description
It is to be understood that the following detailed description is exemplary and is intended to provide further explanation of the invention as claimed. Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs.
It is noted that the terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of exemplary embodiments according to the invention. As used herein, the singular forms "a", "an", and "the" are intended to include the plural forms as well, and it should be understood that when the terms "comprises" and/or "comprising" are used in this specification, they specify the presence of stated features, steps, operations, devices, components, and/or combinations thereof;
the noun explains: the shape precision of the ultra-precise mould is submicron grade, and the surface roughness is less than or equal to 10 nm; the surface roughness of the ultra-smooth surface is less than or equal to 1 nm; by "nanotextured" is meant that the dimensions of the texture are on the order of nanometers.
The nanotexture in the present invention may also be referred to as a periodic nanostructure.
Example 1
In a typical embodiment of the present invention, as shown in fig. 1 to 3, this embodiment provides a plurality of anti-adhesion and anti-wear ultra-precise molds, a working surface of the mold is an ultra-smooth surface, and the ultra-smooth surface has a nano texture, wherein the shape of the working surface may be a plane or a curved surface, as shown in fig. 1, the anti-adhesion and anti-wear ultra-precise mold is a schematic view of a trapezoidal cross-section, and a plurality of round-pit type nano textures are processed on the working surface of the anti-adhesion and anti-wear ultra-precise mold with a trapezoidal cross-section; FIG. 2 is a schematic view of an anti-sticking and anti-friction ultra-precision mold with a triangular saw-tooth section; a plurality of water drop-shaped nano textures are processed on the working surface of the anti-adhesion and anti-attrition ultra-precise die with the triangular section; as shown in fig. 3, fig. 3 is a schematic view of the anti-adhesion and anti-friction ultra-precise curved surface mold; a plurality of round pit type nanometer textures are processed on the working surface of the anti-sticking antifriction ultra-precise mould of the curved surface.
The anti-adhesion and anti-attrition ultra-precise mold provided by the embodiment breaks through the conventional mold design thought, in the field of ultra-precise machining, in order to ensure the precision of a machined part, the smoother the surface of the mold is generally required to be better, while the conventional thought is broken through by the present invention, and the nano texture is machined on the ultra-smooth surface of the mold.
In the embodiment, the nano-texture area of the die has the phenomenon of hardness increase, so that the hardness of the die is improved by processing the nano-texture, and the wear resistance of the die is improved; meanwhile, the nano-texture increases the stress area of the die, reduces the surface pressure of the die, can improve the anti-adhesion capability of the die, and further improves the wear resistance of the die.
In order to further exert the viscosity reducing and wear resisting performance of the nano-texture, the nano-texture on the surface of the workpiece needs to keep a uniform interval; that is, when the working surface of the mold is a plane, the distances between the nano-textures located on the same surface are equal, as shown in fig. 1, the working surface is a plurality of planes with different heights, the distances between the nano-textures located on the same plane are equal, and the distances between the nano-textures located on different planes may be equal or unequal, and are specifically set according to the actual processing requirements. As shown in fig. 2, the working surface is a plurality of inclined surfaces, the distances between the nano-textures on the same inclined surface are equal, and the distances between the nano-textures on different inclined surfaces may be equal or unequal; when the working surface of the mold is a curved surface, the radians of the nano-textures on the whole working surface are equal, specifically, as shown in fig. 3, the working surface of the mold is a continuous curved surface, and the radians of the nano-textures on the whole working surface are equal.
More specifically, the anti-sticking and anti-attrition ultra-precise die comprises an upper die and a lower die, wherein the distance between the nano texture of the working surface of the upper die and the nano texture on the working surface of the lower die is equal or unequal, and the nano texture can be set according to actual needs.
Furthermore, the anti-sticking and anti-attrition ultra-precise mould mainly comprises nickel-phosphorus alloy, glassy carbon, silicon carbide, tungsten carbide, monocrystalline silicon, mould steel, quartz glass, copper-nickel alloy, polymethyl methacrylate and the like, wherein the surface roughness of the mould after ultra-precise grinding and polishing is less than or equal to 1 nm.
Furthermore, the nano-texture of the mold surface in this embodiment may be linear grooves, crossed grooves, periodic round pits, etc.; in the mold shown in fig. 6, the processed surface of the mold is a linear groove, the intersecting groove is formed by intersecting two linear grooves in different directions, the periodic circular pits are formed on the surface of the mold and are semicircular, or hemispherical, arc-shaped and the like; as to the specific dimensions of the various trenches, the following are generally required:
the width of the groove is less than or equal to 100nm, and the depth of the groove is less than or equal to 50 nm; the periodic round pit-shaped nano texture has the diameter of less than or equal to 100nm and the depth of less than or equal to 50 nm; meanwhile, in the linear groove and periodic round pit nano texture, the distance between the groove and the round pit can be 100-500 nm.
Further, the working surface of the mold with the nano texture can be coated, as shown in fig. 4, the anti-sticking and anti-wear performance of the mold can be further improved through coating, and meanwhile, the textured surface can improve the bonding strength between the surface of the mold and a coating material and improve the coating effect. Specifically, the thickness of the coating film can be 10-20 nm; the coating material generally comprises three materials, and any one of the three materials can be selected, and the coating material specifically comprises: (1) metal or noble metal alloy films such as Pt-Ir, Ir-Re alloys; (2) ceramic membranes such as TaN, TiAIN and CrWN; (3) carbon-based films, such as diamond-like carbon (DLC).
Example 2
The embodiment also provides a processing method of the anti-adhesion and anti-attrition ultra-precision mold, and the mold with the ultra-smooth surface is obtained in the step 1; step 2, preparing a nano texture on the surface of the die; specifically, after a mold with an ultra-smooth surface is obtained by an ultra-precise grinding and polishing method, a femtosecond laser processing method or a focused ion beam or an electron beam is adopted to prepare the nano-texture on the surface of the mold.
Further, since the ultra-precision grinding and polishing method is performed by using an existing machining method, it is not described herein in detail.
Furthermore, the femtosecond laser technology can process plane and curved surface molds; focused ion beams or electron beams mainly process planar molds.
In this embodiment, a femtosecond laser processing method is described in detail, wherein a processing system adopted in the femtosecond laser processing method is shown in fig. 5, and the processing system includes a femtosecond laser 3, a spatial light modulator 4, a reflecting mirror 2, a reflecting mirror 5, a dichroic mirror 6, an objective lens 7, and a CCD camera 1. The femtosecond laser 3 generates laser for processing, the laser enters the spatial light modulator 4, the laser field can be adjusted, and then the laser passes through the reflector 2, the reflector 5, the dichroic mirror 6 and the objective lens 7 and acts on the surface of an object, so that the processing of a workpiece is realized. By modulating the amplitude, phase, polarization state, coherence, and the like of the laser light by the spatial light modulator 4, light field distributions of various shapes such as a parallel linear array, a cross linear array, and a circular array can be obtained. When the modulated laser is adopted to process the curved surface die, compared with the processing of single points or linear grooves one by one in the traditional laser processing, the system can process nano textures with different shapes such as a plurality of circular pits, linear grooves or crossed grooves at one time, thereby greatly increasing the processing area and improving the laser processing efficiency.
The dichroic mirror 6 is used for spectral splitting, and can selectively transmit or reflect laser light of a certain wavelength. The femtosecond laser wavelength used in the system is 800nm, and in order to realize the functions of laser transmission and visible light reflection, a dichroic mirror 6 which can transmit the laser with the wavelength of 800nm or more and can not transmit the laser with the wavelength of 800nm or less is selected.
The CCD camera 1 is used for observing the surface topography of the workpiece. Visible light on the surface of the object is reflected to the CCD camera 1 after passing through the dichroic mirror 6, so that the surface appearance of the workpiece can be observed before and after processing and in the processing process, and laser focusing and surface appearance analysis of the workpiece are facilitated.
The nano texture is processed on the surface of the die by femtosecond laser, so that the anti-adhesion and abrasion resistance of the die are improved. The spatial light modulator can change the distribution of a laser light field, so that nano textures with different shapes such as a plurality of circular pits, linear grooves or crossed grooves and the like can be processed at one time.
In order to further exert the viscosity reducing and wear resisting performance of the nano-texture, the texture on the surface of the workpiece needs to keep uniform spacing. The periodic laser light field is generated through the spatial light modulator, and the processing of the uniform-pitch nano texture can be carried out on the surfaces of the trapezoidal section die and the triangular section die. Because the circular arc section die has a certain curvature, the periodic optical field generated by the spatial light modulator cannot process nano-textures with uniform intervals on the surface of the periodic optical field.
The following describes in detail a processing method of a curved surface mold surface equal arc length periodic nano-texture, including the following steps:
firstly, a parameter equation of a complex curved surface is established, a corresponding coordinate system is established, and an equation of a complex curved surface section is generally as follows:
in the formula (1), R represents a vertex radius, K represents a cone coefficient, and the R and the K are intrinsic parameters of the curved surface die.
Next, the number of single laser machined textures and the distance between the textures (i.e., the arc length) are determined, as shown in FIG. 4, such that the arc length l 1 =l 2 . In a known manner 1 In the case of (2), the length l of the chord ab is obtained ab As follows:
in the formulae (2) and (3), θ 3 The radius is the central angle corresponding to the arc ab, r is the radius corresponding to the points a and b, and the radius corresponding to the two points is approximately equal in the calculation process because the distance of the arc length is in the nanometer level. The straight line ef is the tangent of the curved surface at the point b, the slope of the point b is derived from the equation (1), theta 2 The angle between the straight line bd and the straight line be is determined by the following equation:
the length of the straight line bd, i.e. the projection of the arc ab in the y-direction, can thus be found as follows:
similarly, the projection length d of the arc bc in the y direction can be obtained 2 。
After the design of the type, the number and the interval of the nano textures on the surface of the curved surface die is finished, the projection length of the arc length between every two textures in the y direction is calculated by adopting the method, the length is substituted into the spatial light modulator, and the femtosecond laser light field is adjusted. And processing the curved surface die by using the adjusted laser to obtain the periodic equal-arc-length nano texture.
Example 3
The embodiment provides a processing system and a method for processing optical elements, which adopt a high-temperature die forming system and a method for batch manufacturing of optical elements, wherein the system comprises the anti-adhesion and anti-attrition ultra-precise die disclosed in the embodiment 1; more specifically, the processing system for processing the optical element comprises an upper die and a lower die; the working surfaces of the upper die and the lower die are ultra-smooth surfaces, and the ultra-smooth surfaces are provided with nano textures; the lower die is fixed on the heating cavity or in the heating cavity; the melting point of the mold is greater than the melting point of the optical element; the temperature in the heating cavity is greater than the melting point of the optical element and less than the melting point of the mold. The specific structures of the upper die and the lower die are basically the same as those of embodiment 1, and are not described herein again.
The specific processing method comprises the following steps:
firstly, fixing a lower die 12 of a die with nano texture in a high-temperature heating cavity or on the heating cavity, then placing an optical element 11 to be processed above the lower die, finally fixing an upper die 10 of the die with nano texture above the optical element, and carrying out a series of operations such as heating, heat preservation, cooling and the like on the heating cavity to obtain the optical element with a certain shape and size.
The melting point of the optical element 11 is different from that of the mold, and during the molding process, the temperature in the heating cavity needs to be higher than the melting point of the optical element and lower than the melting point of the mold. During the molding process, the optical element is heated and softened, and the material flows to fill the specific structure of the mold. During filling, the material contacts with the surface of the mold, and under the conditions of high temperature, reciprocation and surface interaction, the mold surface is damaged by adhesion and abraded by friction, so that the surface shape accuracy of the mold and the formed optical element is further influenced. By processing nano textures on the surface of the die, including linear grooves, crossed grooves, periodic round pits and the like, the contact area between the material and the die can be effectively increased, so that the pressure on a contact surface is reduced, and the bonding effect in the die pressing process and the die abrasion are reduced. Meanwhile, the hardness of the area of the mold surface processed with the nano-texture is increased, so that the hardness of the mold surface is improved, the abrasion of the mold can be further reduced, the service life of the mold is prolonged, and the production efficiency is improved.
In this embodiment, since the optical element melted at high temperature cannot be filled (flowed) into the nano-texture with a smaller size, the optical element can only obtain a structure with a specific cross section (a trapezoidal, triangular or other complex cross section) by using a die forming technique, and the nano-texture on the surface of the ultra-smooth sliding mold cannot be transferred to the surface of the optical element, so that the nano-texture does not affect the surface quality and the surface type precision of the molded optical element.
In this embodiment, the materials of the upper mold 10 and the lower mold 12 mainly include nickel-phosphorus alloy, glassy carbon, silicon carbide, tungsten carbide, monocrystalline silicon, mold steel, quartz glass, copper-nickel alloy, polymethyl methacrylate, etc., wherein the surface roughness of the mold after ultra-precision grinding and polishing is less than or equal to 1 nm.
In this embodiment, the nano-textures on the surfaces of the upper mold 10 and the lower mold 12 mainly include linear grooves, crossed grooves, periodic circular pits, and the like. For the groove nano texture, the width of the groove is less than or equal to 100nm, and the depth is less than or equal to 50 nm; for the round pit nano texture, the diameter of the round pit is less than or equal to 100nm, and the depth is less than or equal to 50 nm. Meanwhile, in the linear groove and periodic pit nanotexture, the distance between the groove and the pit can be 100-500 nm.
In this embodiment, an ion sputtering method is used to perform a plating 13 on the surface of the mold with the nano-texture, as shown in fig. 9; the anti-sticking and anti-abrasion performance of the die can be further improved through film coating, and meanwhile, the bonding strength of the surface of the die and a film coating material can be improved through the textured surface, so that the film coating effect is improved. Wherein the thickness of the coating film is 10-20 nm; the coating material mainly comprises three materials: (1) metal or noble metal alloy films such as Pt-Ir, Ir-Re alloys; (2) ceramic membranes such as TaN, TiAIN and CrWN; (3) carbon-based films, such as diamond-like carbon (DLC), can be formed using one of the three materials.
According to the processing method, on the premise of not influencing the performance of the die and the surface quality and surface type precision of the optical element after die pressing, the nano texture is utilized to reduce the bonding between the die and the optical element at high temperature and the abrasion of the die.
The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention, and various modifications and changes may be made by those skilled in the art. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (7)
1. The anti-adhesion and anti-attrition ultra-precise mold is characterized in that the working surface of the mold is an ultra-smooth surface, and the ultra-smooth surface is provided with nano textures which are periodically or regularly arranged; the shape precision of the ultra-precise mould is submicron grade, and the surface roughness is less than or equal to 10 nm; the surface roughness of the ultra-smooth surface is less than or equal to 1 nm; the nano texture means that the size of the texture is in the nanometer level; the nano texture can not be transferred to the surface of the element to be molded; the nano texture on the surface of the die is a linear groove, a crossed groove or a periodic round pit; the crossed grooves are formed by crossing two linear grooves in different directions, the periodic round pits are formed on the surface of the mold and are semicircular or hemispherical or arc-shaped; the width of the groove is less than or equal to 100nm, and the depth of the groove is less than or equal to 50 nm; the periodic round pit-shaped nano texture has the diameter of less than or equal to 100nm and the depth of less than or equal to 50 nm; meanwhile, in the linear groove and periodic round pit nano texture, the distance between the groove and the round pit is 100-500 nm; when the working surface of the die is a plane, the distances between the nano textures on the same surface are equal; when the working surface of the die is a curved surface, the arc lengths of the nano textures on the whole working surface are equal; the mold comprises an upper mold and a lower mold, and the distance between the nano texture of the working surface of the upper mold and the nano texture on the working surface of the lower mold is equal.
2. The anti-adhesion anti-attrition ultra-precision mold of claim 1, wherein the working surface of the mold is further coated with a film.
3. The method for processing the anti-adhesion and anti-attrition ultra-precision mold according to claim 1,
step 1, obtaining a mold with an ultra-smooth surface;
and 2, preparing the nano texture on the surface of the die.
4. An ultra-precision mold for processing an optical element, wherein the anti-galling and anti-friction ultra-precision mold according to any one of claims 1 to 2 is used, and comprises an upper mold and a lower mold; the working surfaces of the upper die and the lower die are ultra-smooth surfaces, and the ultra-smooth surfaces have nano textures; the lower die is fixed on the heating cavity or in the heating cavity; the melting point of the mold is greater than the melting point of the optical element; the temperature in the heating cavity is greater than the melting point of the optical element and less than the melting point of the mold.
5. A method of processing an optical element using the ultra-precision mold according to claim 4,
fixing a lower die of the anti-sticking and anti-attrition ultra-precise die on the heating cavity or in the heating cavity;
placing an optical element to be processed above a lower die of the anti-adhesion and anti-attrition ultra-precision die;
fixing an upper die of the anti-adhesion and anti-attrition ultra-precise die above the optical element;
and heating, preserving heat and cooling the heating cavity to obtain the optical element.
6. The processing system of the anti-adhesion and anti-attrition ultra-precision mold according to any one of claims 1 to 2, wherein: the device comprises a femtosecond laser, a spatial light modulator, a reflecting mirror, a dichroic mirror, an objective lens and a camera; the femtosecond laser generates laser for processing; the spatial light modulator adjusts the light field, and the adjusted laser sequentially passes through the reflecting mirror, the dichroic mirror and the objective lens and then acts on the surface of the processed die to form a nano-texture on the surface of the processed die; the camera is arranged on one side of the dichroic mirror and used for observing the surface appearance of the workpiece.
7. The method for processing the periodic equal-arc-length nano-textured mold by using the processing system of the anti-adhesion and anti-attrition ultra-precise mold, which is characterized in that; establishing a parameter equation and a corresponding coordinate system of the complex curved surface; determining the number of the textures processed by single laser and the arc length among the nano textures; calculating the horizontal projection length of the arc length between every two textures, substituting the projection length into a spatial light modulator, and adjusting a femtosecond laser field; and processing the curved surface die by using the adjusted laser to obtain the periodic equal-arc-length nano texture.
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| CN2749881Y (en) * | 2004-04-08 | 2006-01-04 | 鸿富锦精密工业（深圳）有限公司 | Module with superhard coating |
| CN100395121C (en) * | 2004-11-19 | 2008-06-18 | 鸿富锦精密工业（深圳）有限公司 | Hot-press printing method |
| CN1776023A (en) * | 2005-11-23 | 2006-05-24 | 邹志尚 | Hard composite nano ceramic film cladding for use in carity of precision pressure mould |
| CN100436054C (en) * | 2006-12-15 | 2008-11-26 | 华南理工大学 | Grinding method for superhard silicon carbide ceramic nano mirror |
| CN102418082B (en) * | 2011-11-21 | 2013-10-30 | 中国矿业大学 | Method and device for preparing film coating micronano texture |
| CN102566262B (en) * | 2012-02-29 | 2013-06-19 | 青岛理工大学 | Device suitable for wafer-level nanoimprint lithography of non-flat substrate |
| CN104014828A (en) * | 2014-06-13 | 2014-09-03 | 山东大学 | WS2/Zr soft coating micro-nano composite texture ceramic cutting tool and preparing method thereof |
| CN104441370A (en) * | 2014-11-11 | 2015-03-25 | 上海理工大学 | Mould for wafer lens array with moth-eye-imitation nano-structure, and processing method of mould |
| CN107144912A (en) * | 2016-03-01 | 2017-09-08 | 鸿富锦精密工业（深圳）有限公司 | Mould, glass light guide plate and its manufacture method |
| CN107310092B (en) * | 2017-05-26 | 2020-05-08 | 天津大学 | Precision injection molding method and device for optical device with polymer complex surface |
| CN111825311A (en) * | 2019-04-17 | 2020-10-27 | 中国兵器工业第五九研究所 | Micro-nano hot-press molding process for optical glass array lens |
| CN110482852A (en) * | 2019-08-29 | 2019-11-22 | 中国兵器工业第五九研究所 | Glass die coating and preparation method thereof, application, mold |
| CN112062450B (en) * | 2020-08-31 | 2022-05-27 | 深圳大学 | Preparation method of amorphous glass hot-pressing mold and hot-pressing mold |
| CN113770668B (en) * | 2021-10-13 | 2022-10-14 | 湖南大学 | Method for preparing optical glass super-hydrophobic functional surface by utilizing hot press molding |
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