CN114647158A - Intelligent material guide device of developing machine and working method thereof - Google Patents

Intelligent material guide device of developing machine and working method thereof Download PDF

Info

Publication number
CN114647158A
CN114647158A CN202210290280.9A CN202210290280A CN114647158A CN 114647158 A CN114647158 A CN 114647158A CN 202210290280 A CN202210290280 A CN 202210290280A CN 114647158 A CN114647158 A CN 114647158A
Authority
CN
China
Prior art keywords
plate
air
developing machine
side wall
stacking
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CN202210290280.9A
Other languages
Chinese (zh)
Other versions
CN114647158B (en
Inventor
张军区
董金良
杜国强
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Wuxi Huanya Microelectronics Co ltd
Original Assignee
Wuxi Huanya Microelectronics Co ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Wuxi Huanya Microelectronics Co ltd filed Critical Wuxi Huanya Microelectronics Co ltd
Priority to CN202210290280.9A priority Critical patent/CN114647158B/en
Publication of CN114647158A publication Critical patent/CN114647158A/en
Application granted granted Critical
Publication of CN114647158B publication Critical patent/CN114647158B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/26Processing photosensitive materials; Apparatus therefor
    • G03F7/30Imagewise removal using liquid means
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/10Greenhouse gas [GHG] capture, material saving, heat recovery or other energy efficient measures, e.g. motor control, characterised by manufacturing processes, e.g. for rolling metal or metal working

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Inking, Control Or Cleaning Of Printing Machines (AREA)

Abstract

The invention relates to the technical field of semiconductors, which is applied to the manufacturing process of semiconductors.A photoresist is sprayed on a silicon wafer through a photoresist spraying module on a photoresist homogenizer after the silicon wafer enters the photoresist homogenizer, then the silicon wafer is moved to a photoetching machine through a loading and unloading device to carry out exposure operation, and then the silicon wafer is moved to a developing machine to carry out spraying of a developing solution, so that a circuit photoetched by the photoetching machine is conveniently displayed, in particular to an intelligent material guide device of the developing machine and a working method thereof, wherein the intelligent material guide device comprises a feeding plate, a developing machine body and a discharging plate; according to the invention, through the action of the pressure sensor and the distance meter, the position of the discharge plate can be placed with other printing plates, the operation of discharging and receiving materials is not required to be carried out manually by workers, so that the situation of lower working efficiency caused by more time consumption is avoided, the position of the printing plate on the stacking plate is fixed through the negative pressure generated at the position of the support ring when the exhaust fan works, and ammonia water odor diffused into air is adsorbed into the water tank from the position of the air suction hole to be eliminated.

Description

Intelligent material guide device of developing machine and working method thereof
Technical Field
The invention relates to the technical field of semiconductors, in particular to an intelligent material guide device of a developing machine and a working method thereof.
Background
The developing machine is printing processing equipment which can partially or completely complete the processes of developing, washing, gluing, drying and the like at one time by a semi-automatic and full-automatic program of a sunned printing plate, can be applied to the manufacturing process of a semiconductor, after a silicon wafer enters a spin coater, photoresist is sprayed on the silicon wafer through a photoresist spraying module on the spin coater, then the silicon wafer is moved to the photoetching machine through a loading and unloading device for exposure operation, and then is moved to the developing machine for spraying of developing solution, so that the circuit photoetched by the photoetching machine is conveniently displayed, and the developing machine is used in the process of guiding the silicon wafer to the developing machine after the laser engraving operation is completed;
in the prior art, after a developing machine completes the developing operation of a printing plate, the printing plate is conveyed out of the developing machine to a discharging plate, the printing plate needs to be manually taken away, the printing plate needs to return to a position of a feeding plate for feeding after being manually taken away and placed, so that long time is delayed, the improvement of the working efficiency is not facilitated, the printing plate which is not taken away in time easily causes obstruction to the subsequently conveyed printing plate, and the supporting developing operation of the subsequent developing machine on the printing plate is influenced because the internal printing plate is not conveyed out in time; after the ammonia water developing machine carries out developing operation on the printing plate, the odor of residual ammonia water on the printing plate is strong, the odor of ammonia water is easy to cause environmental pollution when being diffused to the surrounding environment, and adverse effects are easy to cause on the health of workers when the workers suck air containing more ammonia water components in the breathing process;
in view of the above technical problem, the present application proposes a solution.
Disclosure of Invention
The invention aims to place other printing plates at the position of a discharge plate under the action of a pressure sensor, an offset distance meter, a stretching distance meter and a height distance meter, so that the working efficiency is not reduced without manual feeding and receiving operations by workers, the positions of the printing plates on a stacking plate are fixed by negative pressure generated at the position of a support ring when an exhaust fan works, ammonia smell diffused to the air is adsorbed to the inside of a water tank from the position of an air suction hole to be eliminated, and the problems that the working efficiency of a developing machine is reduced due to the stacking of the printing plates at the discharge position of the developing machine and the environment is polluted due to the diffusion of developed ammonia components in the air are solved.
The purpose of the invention can be realized by the following technical scheme:
an intelligent material guide device of a developing machine and a working method thereof comprise a feed plate, a developing machine body and a discharge plate, wherein one side of the outer side wall of the developing machine body is connected with the feed plate, the other side of the outer side wall of the developing machine body is connected with the discharge plate, two sides of the upper surface of the discharge plate are integrally provided with a support plate, two sides of the outer side wall of the support plate, which are close to one side of the discharge plate, are connected with an adjusting plate through telescopic adjusting rods, one side of the inner side wall of the discharge plate, which is far away from the developing machine body, is connected with a pressure sensor, the middle position of the upper surface of the discharge plate is provided with a lifting groove, the inner side wall of the lifting groove is connected with a material stacking plate, and the upper surface of the discharge plate is also provided with a material stacking assembly;
the utility model discloses a development machine, including windrow board, mounting plate groove, mounting plate inslot lateral wall, bleeder hole has been seted up to windrow board upper surface intermediate position department, mounting plate inslot lateral wall is connected with the exhaust plate, the bleeder hole has been seted up to the exhaust plate upper surface, developer body lateral wall is close to the discharge plate below is connected with the air exhauster, the windrow board lateral wall corresponds air exhauster position department is provided with the subassembly of bleeding.
As a preferred embodiment of the invention, the stacking assembly comprises a transmission groove, the inner side wall of the transmission groove is rotatably connected with a transmission belt through a rotating shaft, two sides of the lower surface of the stacking plate are connected with height adjusting rods, the inner side wall of the discharging plate is connected with an offset distance meter corresponding to the middle position of the adjusting plate, the outer side wall of the adjusting plate is provided with a hole groove corresponding to the offset distance meter, and one side of the upper surface of the adjusting plate is connected with an extension distance meter.
As a preferred embodiment of the present invention, the air exhaust assembly includes a ventilation cavity, an air exhaust pipe is connected to a position of one side of the outer side wall of the material stacking plate corresponding to the ventilation cavity, a communication pipe is connected to one end of the air exhaust pipe away from the material stacking plate, support rings are connected to positions of two sides of the upper surface of the air exhaust plate corresponding to the air exhaust holes, and a support seat is connected to a position of the middle of the upper surface of the air exhaust plate corresponding to the air exhaust holes.
As a preferred embodiment of the present invention, a barometer is connected to a side of the outer sidewall of the exhaust tube close to the material stacking plate, and a switch valve is connected to a side of the outer sidewall of the exhaust tube far from the material stacking plate.
As a preferred embodiment of the invention, one side of the outer side wall of the exhaust fan is connected with a water tank through an air duct, one side of the upper surface of the water tank, which is far away from the air duct, is connected with an exhaust pipe, the middle position of the upper surface of the water tank is rotatably connected with a connecting shaft, the upper end of the connecting shaft is connected with a transmission runner, the outer side wall of the transmission runner is connected with a transmission belt, and one side of the upper surface of the water tank, which is close to the connecting shaft, is connected with a PH detector.
As a preferred embodiment of the invention, the two sides of the upper surface in the water tank are integrally formed with the partition plate, one end of the connecting shaft, which is positioned in the water tank, is connected with the stirring fan blades, the outer side wall of the partition plate, which is close to the two sides of the stirring fan blades, is connected with the vent pipe, and the outer side wall of the partition plate, which corresponds to the vent pipe, is provided with the hole.
As a preferred embodiment of the present invention, the working method of the intelligent material guiding device of the developing machine comprises the following steps:
the method comprises the following steps: after a printing plate is placed from the position of the feeding plate, a transmission system of the developing machine body transmits the printing plate at the position of the feeding plate into the developing machine body for developing operation, the printing plate after developing operation is transmitted to the position of the discharging plate for placing, the transmission system of the developing machine body is linked with a transmission belt on the discharging plate, so that the transmission belt rotates under the driving of the transmission belt, the printing plate placed on the discharging plate is pushed to approach to the position of a pressure sensor, three pressure sensors are respectively installed at two sides and the middle position on the inner wall of the discharging plate, the printing plate is pushed to be mutually extruded with the pressure sensors under the action of the transmission belt, the three pressure sensors respectively transmit detected pressure data to a processor inside the developing machine body for processing, and offset distance meters positioned at two sides of the inner side wall of the discharging plate transmit detected distance data between the inner wall of the discharging plate and the outer wall of the printing plate to the processor inside the developing machine body for processing;
step two: the processor analyzes and processes the transmitted data, after the deviation of the three data is within the range of the set value and the deviation of the data detected by the deviation distance meters at two sides is within the range of the set value, firstly, a signal is transmitted to start the exhaust fan, the exhaust fan starts to work, the air at one side of the stacking plate is transmitted to one side of the water tank through a pipeline, negative pressure is generated at the position of the support ring to adsorb and fix the printing plate placed on the stacking plate, then, the signal is transmitted to control the extension of the height adjusting rod connected with the uppermost stacking plate to lift the stacking plate and the printing plate placed on the stacking plate, the extension of the height adjusting rod positioned below the stacking plate is controlled, the other stacking plate positioned below the stacking plate is lifted to be in a state of keeping horizontal with the bottom surface of the discharging plate, the lifting operation of the printing plate is finished, if the deviation of the data detected by the deviation distance meters at two sides is not within the range of the set value, the length of the telescopic adjusting rod can be adjusted by transmitting signals through the processor under the monitoring of the extension range finder, so that the two adjusting plates on the side with larger detection distance value of the offset range finder synchronously move under the action of the telescopic adjusting rod to adjust the position of the printing plate, and the lifting operation of the printing plate is carried out after the adjustment;
step three: the processor analyzes the transmitted data, compares the distance data between the inner wall of the discharging plate and the outer wall of the printing plate transmitted by the four offset distance meters on the two sides of the inner side wall of the discharging plate with a set value after comparing that the deviation of the three data is not within the range of the set value, calculates the positions of the four adjusting plates corresponding to the positions of the offset distance meters, adjusts the positions of the adjusting plates through the telescopic adjusting rods under the monitoring of the extension distance meters, pushes the printing plate placed on the discharging plate to adjust the positions, adjusts the data deviation of the three pressure sensors within the range of the set value, and carries out the lifting operation of the printing plate in the second step after the data deviation detected by the offset distance meters on the two sides of the inner wall of the discharging plate is within the range of the set value;
step four: when the exhaust fan works, air in the ventilation cavity inside the stacking plate is extracted through a communicating pipe connected with the exhaust pipe, the position of the support ring is blocked by the printing plate due to the upper end of the support ring, negative pressure is formed inside the support ring to adsorb and fix the printing plate, the position of the support seat can absorb and supplement air from the outside due to larger gaps on two sides of the support seat, nearby outside air flows to the position of the support seat, ammonia odor emitted during development treatment can be absorbed along with the air, the absorbed ammonia composition is transmitted to the inside of the water tank through the air guide pipe at the position of the exhaust fan and is guided into water flow inside the water tank along with the air from the lower end of the air guide pipe, high-speed flowing air flow drives a transmission runner connected to the outer side wall of the air guide pipe to rotate through a spiral blade when the air guide pipe circulates inside, and stirring blades connected to the water flow are driven to rotate, the PH detector can detect the PH value of rivers, and the gas after with rivers intensive mixing discharges to the external environment in the blast pipe position department.
Compared with the prior art, the invention has the beneficial effects that:
1. after the printing plate is developed by the developing machine and is transmitted to the position of the discharging plate, the position of the printing plate can be regulated under the action of the adjusting plate through the action of the pressure sensor, the offset distance meter, the extension distance meter and the height distance meter, and the position of the discharging plate can be placed through upward lifting of the stacking plates after regulation, so that the discharging plate can be used for placing other printing plates without manual feeding and receiving operations, only the printing plate is placed on the lowest stacking plate, and the whole stacking plate is carried when the printing plate presses the touch sensor on the lowest stacking plate to give an alarm, so that more time is not consumed, and the working efficiency is not reduced;
2. the air exhauster is when carrying out the operation of bleeding, support ring position department adsorbs the printing plate because of the shutoff output negative pressure that the upper end received the printing plate, fix the printing plate and place the condition that drops and take place the damage on the stacking plate, inside the aspirating hole of supporting seat position department can disperse the aqueous ammonia smell of printing plate to external environment and get into the water tank along with the absorption of air, make the aqueous ammonia composition of very easily dissolving in water dissolve in aquatic, can not spread the pollution that causes the environment to external environment, and cause harmful effects to staff's health.
Drawings
In order to facilitate understanding for those skilled in the art, the present invention will be further described with reference to the accompanying drawings.
FIG. 1 is a main body structure view of the present invention;
FIG. 2 is a block diagram of a stacking plate of the present invention;
FIG. 3 is an enlarged structural view of the part A of FIG. 2 according to the present invention;
FIG. 4 is an enlarged structural view of the part B of FIG. 2 according to the present invention;
FIG. 5 is a view of the discharge plate of the present invention;
FIG. 6 is a water tank configuration of the present invention;
fig. 7 is a view showing an internal structure of a water tank of the present invention.
In the figure: 1. a feeding plate; 2. a developing machine body; 3. a discharge plate; 4. a stacking mechanism; 41. a material piling plate; 42. a height adjustment lever; 43. a rising tank; 44. an offset rangefinder; 45. a telescopic adjusting rod; 46. a support plate; 47. an adjusting plate; 48. a pressure sensor; 49. a conveyor belt; 410. a transfer slot; 411. a stretch rangefinder; 412. a hole groove; 5. an environmental protection mechanism; 51. installing a plate groove; 52. an air extraction plate; 53. an air exhaust hole; 54. a supporting seat; 55. a support ring; 56. an exhaust fan; 57. a water tank; 58. a communicating pipe; 59. an air exhaust pipe; 510. an air duct; 511. a pH detector; 512. an exhaust pipe; 513. a connecting shaft; 514. a transmission belt; 515. a transmission runner; 516. a stirring fan blade; 517. a breather pipe; 518. a partition plate.
Detailed Description
The technical solutions of the present invention will be described clearly and completely with reference to the following embodiments, and it should be understood that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Example 1:
referring to fig. 1-5, an intelligent material guiding device of a developing machine and a working method thereof includes a feeding plate 1, a developing machine body 2 and a discharging plate 3, wherein the feeding plate 1 is connected to one side of the outer side wall of the developing machine body 2, and the discharging plate 3 is connected to the other side of the outer side wall of the developing machine body 2;
supporting plates 46 are integrally formed on two sides of the upper surface of the discharging plate 3, two sides of the outer side wall of each supporting plate 46, which are close to one side of the discharging plate 3, are connected with adjusting plates 47 through telescopic adjusting rods 45, hole grooves 412 formed in the adjusting plates 47 can prevent the adjusting plates 47 from blocking infrared rays emitted by offset distance measuring instruments 44, one side, which is far away from the developing machine body 2, of the inner side wall of the discharging plate 3 is connected with pressure sensors 48, the number of the pressure sensors 48 is three, the three pressure sensors 48 are respectively installed on two sides and the middle position of the inner wall of the discharging plate 3 and can detect pressure data between a printing plate and the inner wall of the discharging plate 3, a lifting groove 43 is formed in the middle position of the upper surface of the discharging plate 3, stacking plates 41 are connected to the inner side wall of the lifting groove 43, the stacking plates 41 are the same in shape and size with the lifting groove 43, and the stacking plates 41 are connected through height adjusting rods 42, the upper surface of the material piling plate 41 is connected with a height distance measuring instrument near the middle position of the height adjusting rod 42, the height distance measuring instrument is convenient for detecting the extension height of the height adjusting rod 42, the upper surface of the material discharging plate 3 is provided with a transmission groove 410 corresponding to the middle position of the material piling plate 41, the inner side wall of the transmission groove 410 is rotatably connected with a transmission belt 49 through a rotating shaft, the height of the transmission belt 49 is higher than the bottom surface of the material discharging plate 3 and is equal to the height of the supporting ring 55 on the material piling plate 41, the two sides of the lower surface of the material piling plate 41 are connected with the height adjusting rod 42, the height adjusting rod 42 is controlled through the same control system and can carry out synchronous height lifting, the inner side wall of the material discharging plate 3 is connected with an offset distance measuring instrument 44 corresponding to the middle position of the adjusting plate 47, the number of the offset distance measuring instruments 44 is four, the four offset distance measuring instruments 44 are distributed in a rectangular shape on the inner side of the material discharging plate 3, so that the adjusting plate 47 can carry out position adjustment on the plate according to the offset distance of the plate, a hole groove 412 is formed in the outer side wall of the adjusting plate 47 at a position corresponding to the offset distance measuring instrument 44, one side of the upper surface of the adjusting plate 47 is connected with an extension distance measuring instrument 411, and the extension distance measuring instrument 411 can detect the distance between the adjusting plate 47 and the supporting plate 46 after moving;
in the prior art, after a developing machine completes the developing operation of a printing plate, the printing plate is conveyed out of the interior of the developing machine to a discharge plate 3, the printing plate needs to be manually taken away, and the printing plate needs to return to the position of a feed plate 1 for feeding after being manually taken away and placed, so that long time is delayed, the improvement of the working efficiency is not facilitated, the printing plate which is not taken away in time easily causes obstruction to the printing plate which is conveyed out subsequently, and the supporting and developing operation of the subsequent developing machine on the printing plate is influenced because the printing plate in the interior of the developing machine is not conveyed out in time;
the printing plate is put into the back from feed plate 1 position, the transmission system of developing machine body 2 transmits the printing plate of feed plate 1 position department and gets into developing machine body 2 inside and carries out the development operation, the printing plate after accomplishing the development operation is transmitted and is placed to play flitch 3 position department, the transmission system of developing machine body 2 carries out the interlock with transmission band 49 on the play flitch 3, make transmission band 49 rotate under the drive, promote the printing plate of placing on play flitch 3 and be close to pressure sensors 48 position department, three pressure sensors 48 install both sides and intermediate position department on play flitch 3 inner wall respectively, the printing plate is promoted under the effect of transmission band 49 and is extrudeed each other with pressure sensors 48, three pressure sensors 48 respectively give the treater of developing machine body 2 inside with the pressure data transmission that detects and handle, the skew distancer 44 that lies in play flitch 3 inside wall both sides transmits the distance data that detects between play flitch 3 inner wall and the printing plate outer wall for this developing machine A processor inside the body 2 performs processing;
the processor analyzes and processes the transmitted data, after the comparison result shows that the deviation of the data detected by the three pressure sensors 48 is within the set value range and the deviation of the data detected by the offset distance meters 44 on the two sides is within the set value range, firstly, a signal is transmitted to start the exhaust fan 56, the exhaust fan 56 starts to work, air on one side of the stacking plate 41 is transmitted to one side of the water tank 57 through a pipeline, negative pressure is generated at the position of the support ring 55 due to the blocking of the upper end of the support ring 55 by the printing plate to adsorb and fix the printing plate placed on the stacking plate 41, then, the signal is transmitted to control the extension of the height adjusting rod 42 connected with the uppermost stacking plate 41 to lift the printing plate placed on the stacking plate 41 and the printing plate placed on the stacking plate 41, the extension length of the height adjusting rod 42 is monitored by the height distance meters connected with the corresponding stacking plate 41, the detected data is transmitted to the processor, and the extension of the height adjusting rod 42 positioned below the stacking plate 41 is controlled, lifting the other material piling plate 41 below the material piling plate 41 to a state of keeping horizontal with the bottom surface of the material discharging plate 3, completing the lifting operation of the printing plate, if the deviation of the data detected by the offset distance measuring instruments 44 at two sides is not in the set value range, adjusting the length of the telescopic adjusting rod 45 by transmitting signals through a processor under the monitoring of the extending distance measuring instrument 411, enabling the two adjusting plates 47 at the side with larger detection distance value of the offset distance measuring instrument 44 to synchronously move under the action of the telescopic adjusting rod 45 to adjust the position of the printing plate, carrying out the lifting operation of the printing plate after the adjustment, after the deviation of the data detected by the three pressure sensors 48 is not in the set value range, comparing the distance data between the inner wall of the material discharging plate 3 and the outer wall of the printing plate transmitted by the four offset distance measuring instruments 44 at two sides of the inner wall of the material discharging plate 3 with the set value by the processor, calculating the positions of the four adjusting plates 47 at the positions corresponding to the offset distance measuring instruments 44, the position of an adjusting plate 47 is adjusted through a telescopic adjusting rod 45 according to the calculated offset distance measuring data value under the monitoring of an extension distance measuring instrument 411, the printing plate placed on the discharging plate 3 is pushed to adjust the position, when the data deviation of three pressure sensors 48 is adjusted to be within the range of the set value and the data deviation detected by offset distance measuring instruments 44 on two sides of the inner wall of the discharging plate 3 is also within the range of the set value, the lifting operation of the printing plate is carried out, so that the printing plate can be regulated under the action of the adjusting plate 47 through the functions of the pressure sensors 48, the offset distance measuring instruments 44, the extension distance measuring instruments 411 and a height distance measuring instrument when the printing plate is transmitted to the position of the discharging plate 3 after being developed by a developing machine, and other printing plates can be placed at the position of the discharging plate 3 through the upward lifting of a stacking plate 41 after being regulated, and the feeding and receiving operations do not need to and fro manually by a worker, only the printing plate needs to be placed on the lowermost stacking plate 41, and the whole stacking plate 41 is conveyed when the printing plate presses the touch sensor on the lowermost stacking plate 41 to give an alarm, so that more time is not consumed, and the working efficiency is not reduced.
Example 2:
referring to fig. 1-7, a mounting plate slot 51 is formed at the middle position of the upper surface of the stacking plate 41, an air extracting plate 52 is connected to the inner side wall of the mounting plate slot 51, an air extracting hole 53 is formed on the upper surface of the air extracting plate 52, a blocking net is connected above the inner side wall of the air extracting hole 53 to prevent impurities from entering the interior of the air extracting hole 53 to cause blocking, an exhaust fan 56 is connected to the outer side wall of the developing machine body 2 below the discharging plate 3, the exhaust fan 56 is connected to an air extracting pipe 59 through a communicating pipe 58, a vent cavity is formed at the middle position inside the stacking plate 41, the number of the vent cavities is six, the six air extracting holes 53 on the air extracting plate 52 are respectively communicated with the vent cavities at the corresponding positions, an air extracting pipe 59 is connected to the position corresponding to the vent cavity at one side of the outer side wall of the stacking plate 41, a barometer is connected to the side of the outer side wall of the air extracting pipe 59 close to the stacking plate 41, a switch valve is connected to the side of the outer side wall of the air extracting pipe 59 far from the stacking plate 41, the barometer can detect the air pressure inside the ventilation cavity when air extraction is performed, the air extraction pipe 59 is closed through a switch valve on the corresponding air extraction pipe 59 when the air pressure is reduced to a set value, damage to a printing plate caused by overlarge negative pressure generated by air extraction is prevented, one end, far away from the material stacking plate 41, of the air extraction pipe 59 is connected with the communication pipe 58, the two sides of the upper surface of the air extraction plate 52 are connected with the support rings 55 corresponding to the positions of the air extraction holes 53, the middle of the upper surface of the air extraction plate 52 is connected with the support seats 54 corresponding to the positions of the air extraction holes 53, the support rings 55 and the support seats 54 are made of rubber materials, and can be slightly deformed and are not easily damaged when pressure is applied;
one side of the outer side wall of the exhaust fan 56 is connected with a water tank 57 through an air duct 510, two sides of the inner upper surface of the water tank 57 are integrally formed with partition plates 518, the partition plates 518 are inserted below the liquid level in the water tank 57, the lower end of the partition plates 518 is lower than the air duct 510 inserted below the liquid level, so that after the gas guided out of the air duct 510 is mixed with water flow, the water-insoluble gas overflows from the water flow into a partitioned space and enters the water flow in another partitioned space along an air duct 517 under the action of air pressure generated by mutual accumulation of the subsequently-overflowed gas, one end of the connecting shaft 513 positioned in the water tank 57 is connected with a stirring fan blade 516, the middle position of the upper surface of the air duct 510 is rotatably connected with a transmission rotating wheel 515 through a rotating shaft, the lower end of the rotating shaft positioned in the air duct 510 is connected with a spiral blade, the spiral blade rotates under the action of flowing air flow and drives the connecting shaft 513 to rotate through the action of the transmission belt 514, the outer side wall of the separation plate 518 is connected with vent pipes 517 near two sides of the stirring fan blades 516, holes are formed in the outer side wall of the separation plate 518 corresponding to the vent pipes 517, one side, far away from the gas guide pipes 510, of the upper surface of the water tank 57 is connected with a gas exhaust pipe 512, the middle position of the upper surface of the water tank 57 is rotatably connected with a connecting shaft 513, the upper end of the connecting shaft 513 is connected with a transmission rotating wheel 515, the outer side wall of the transmission rotating wheel 515 is connected with a transmission belt 514, one side, near the connecting shaft 513, of the upper surface of the water tank 57 is connected with a PH detector 511, the PH detector 511 can detect the PH value inside the water tank 57, and when the PH value is detected to be large and a set value and the amount of soluble ammonia in water flow is reduced, an alarm is sent to inform a user of water flow replacement;
in the prior art, after an ammonia developing machine performs developing operation on a printing plate, the odor of ammonia water remaining on the printing plate is strong, the odor of ammonia water diffuses into the surrounding environment and easily causes environmental pollution, and when workers inhale air containing more ammonia water components in the breathing process, adverse effects on the health of the workers are easily caused, and when the printing plate is stacked by using a stacking plate 41, the printing plate is easily dropped and damaged due to unstable placement of the printing plate on the stacking plate 41;
when the exhaust fan 56 works, air in the ventilation cavity inside the stacking plate 41 is extracted through the communicating pipe 58 connected with the exhaust pipe 59, air can be sucked and supplemented from the outside at the position of the supporting seat 54 because the gap between the two sides of the supporting seat 54 is large, so that nearby outside air flows to the position of the supporting seat 54, ammonia odor emitted during development treatment can be sucked along with the air, the sucked ammonia components are transmitted to the inside of the water tank 57 through the air guide pipe 510 at the position of the exhaust fan 56, and are guided into water flow inside the water tank 57 along with the air from the lower end of the air guide pipe 510, high-speed flowing air flow drives the transmission rotating wheel 515 connected to the outer side wall of the air guide pipe 510 to rotate through the spiral blade when circulating inside the air guide pipe 510, so that the stirring fan blades 516 connected to the inside the water tank 57 are driven to rotate to stir the water flow, and the ammonia components in the sucked air are fully dissolved in the water flow, the PH detector 511 can detect the PH value of the water flow, and when the detected PH value is greater than a set value and indicates that the amount of soluble ammonia in the water flow is reduced, an alarm is given to inform a user of the replacement of the water flow, the gas fully mixed with the water flow is discharged from the exhaust pipe 512 to the external environment, the external environment cannot be polluted by ammonia water, the upper end of the support ring 55 is blocked by the printing plate at the position of the support ring 55, negative pressure is formed inside the support ring 55 to adsorb and fix the printing plate, and when the barometer detects that the negative pressure value reaches the set value, the switch valve on the corresponding exhaust pipe 59 is closed, and the air suction operation of the pipeline is stopped, so that the printing plate placed on the stacking plate 41 cannot slide off from the stacking plate 41 easily, and cannot be damaged by falling and impact with the ground.
The preferred embodiments of the invention disclosed above are intended to be illustrative only. The preferred embodiments are not intended to be exhaustive or to limit the invention to the precise forms disclosed. Obviously, many modifications and variations are possible in light of the above teaching. The embodiments were chosen and described in order to best explain the principles of the invention and the practical application, to thereby enable others skilled in the art to best understand the invention for and utilize the invention. The invention is limited only by the claims and their full scope and equivalents.

Claims (7)

1. An intelligent material guide device of a developing machine comprises a feeding plate (1), a developing machine body (2) and a discharging plate (3), one side of the outer side wall of the developing machine body (2) is connected with a feeding plate (1), the other side of the outer side wall of the developing machine body (2) is connected with a discharging plate (3), it is characterized in that supporting plates (46) are integrally formed on two sides of the upper surface of the discharging plate (3), the two sides of the outer side wall of the supporting plate (46) close to one side of the discharging plate (3) are connected with an adjusting plate (47) through a telescopic adjusting rod (45), one side of the inner side wall of the discharging plate (3) far away from the developing machine body (2) is connected with a pressure sensor (48), a lifting groove (43) is arranged in the middle of the upper surface of the discharging plate (3), the inner side wall of the ascending groove (43) is connected with a stacking plate (41), and the upper surface of the discharging plate (3) is also provided with a stacking assembly;
mounting plate groove (51) have been seted up to flitch (41) upper surface intermediate position department, mounting plate groove (51) inside wall is connected with air extraction plate (52), aspirating hole (53) have been seted up to air extraction plate (52) upper surface, developing machine body (2) lateral wall is close to it is connected with air exhauster (56) to go out flitch (3) below, flitch (41) lateral wall corresponds air exhauster (56) position department is provided with air exhaust subassembly.
2. The intelligent material guiding device of the developing machine as claimed in claim 1, wherein the stacking assembly comprises a conveying trough (410), the inner side wall of the conveying trough (410) is rotatably connected with a conveying belt (49) through a rotating shaft, two sides of the lower surface of the stacking plate (41) are connected with height adjusting rods (42), the inner side wall of the discharging plate (3) is connected with an offset distance meter (44) corresponding to the middle position of the adjusting plate (47), a hole groove (412) is formed in the outer side wall of the adjusting plate (47) corresponding to the offset distance meter (44), and one side of the upper surface of the adjusting plate (47) is connected with a stretching distance meter (411).
3. The intelligent material guide device of a developing machine according to claim 1, wherein the air exhaust assembly comprises an air vent cavity, an air exhaust pipe (59) is connected to one side of the outer side wall of the material stacking plate (41) corresponding to the air vent cavity, a communication pipe (58) is connected to one end of the air exhaust pipe (59) far away from the material stacking plate (41), support rings (55) are connected to two sides of the upper surface of the air exhaust plate (52) corresponding to the positions of the air exhaust holes (53), and a support seat (54) is connected to the middle of the upper surface of the air exhaust plate (52) corresponding to the positions of the air exhaust holes (53).
4. The intelligent material guiding device of developing machine as claimed in claim 3, wherein a barometer is connected to a side of the outer side wall of the air exhaust pipe (59) close to the stacking plate (41), and a switch valve is connected to a side of the outer side wall of the air exhaust pipe (59) far away from the stacking plate (41).
5. The intelligent material guide device of the developing machine is characterized in that one side of the outer side wall of the exhaust fan (56) is connected with a water tank (57) through a gas guide tube (510), one side, far away from the gas guide tube (510), of the upper surface of the water tank (57) is connected with a gas exhaust tube (512), a connecting shaft (513) is rotatably connected to the middle position of the upper surface of the water tank (57), the upper end of the connecting shaft (513) is connected with a transmission rotating wheel (515), the outer side wall of the transmission rotating wheel (515) is connected with a transmission belt (514), and one side, close to the connecting shaft (513), of the upper surface of the water tank (57) is connected with a PH detector (511).
6. The intelligent material guide device of the developing machine as claimed in claim 5, wherein separation plates (518) are integrally formed on two sides of the upper surface inside the water tank (57), one end of the connecting shaft (513) inside the water tank (57) is connected with stirring blades (516), ventilation pipes (517) are connected to two sides of the outer side wall of the separation plate (518) close to the stirring blades (516), and holes are formed in the outer side wall of the separation plate (518) corresponding to the ventilation pipes (517).
7. The method as claimed in claim 1, wherein the method comprises the steps of:
the method comprises the following steps: after a printing plate is placed into the developing machine body (2) from the position of the feeding plate (1), a transmission system of the developing machine body (2) transmits the printing plate at the position of the feeding plate (1) to enter the developing machine body (2) for developing operation, the printing plate after the developing operation is transmitted to the position of the discharging plate (3) for placing, the transmission system of the developing machine body (2) is linked with a transmission belt (49) on the discharging plate (3), the transmission belt (49) rotates under the driving of the transmission belt to push the printing plate placed on the discharging plate (3) to approach to the position of a pressure sensor (48), three pressure sensors (48) are respectively installed at two sides and the middle position on the inner wall of the discharging plate (3), the printing plate is pushed to be mutually extruded with the pressure sensors (48) under the action of the transmission belt (49), and the three pressure sensors (48) respectively transmit detected pressure data to a processor inside the developing machine body (2) for processing, the offset distance measuring instruments (44) positioned on two sides of the inner side wall of the discharging plate (3) transmit the detected distance data between the inner wall of the discharging plate (3) and the outer wall of the printing plate to a processor in the developing machine body (2) for processing;
step two: the processor analyzes and processes the transmitted data, after the comparison result shows that the deviation of the three data is within a set value range and the deviation of the data detected by the offset distance measuring instruments (44) at two sides is within the set value range, a signal is transmitted to start the exhaust fan (56) to enable the exhaust fan (56) to work, air at one side of the stacking plate (41) is transmitted to one side of the water tank (57) through a pipeline, negative pressure is generated at the position of the support ring (55) to adsorb and fix printing plates placed on the stacking plate (41), then the signal is transmitted to control the height adjusting rod (42) connected with the uppermost stacking plate (41) to extend to lift the stacking plate (41) and the printing plates placed on the stacking plate (41), the height adjusting rod (42) positioned below the stacking plate (41) is controlled to extend, and the other stacking plate (41) positioned below the stacking plate (41) is lifted to be kept horizontal to the bottom surface of the discharging plate (3), finishing the lifting operation of the printing plate, if the data deviation detected by the offset distance meters (44) at the two sides is not within the range of a set value, transmitting a signal through a processor under the monitoring of the extension distance meter (411) to adjust the length of the telescopic adjusting rod (45), so that the two adjusting plates (47) at the side with larger detection distance value of the offset distance meters (44) synchronously move under the action of the telescopic adjusting rod (45) to adjust the position of the printing plate, and carrying out the lifting operation of the printing plate after adjustment;
step three: the processor analyzes the transmitted data, and after the deviation of the three data is not within the range of the set value, the processor compares the distance data between the inner wall of the discharging plate (3) and the outer wall of the printing plate transmitted by the four offset distance measuring instruments (44) on the two sides of the inner side wall of the discharging plate (3) with a set value to calculate the positions of the adjusting plates (47) at the positions corresponding to the offset distance measuring instruments (44), the position of an adjusting plate (47) is adjusted by a telescopic adjusting rod (45) under the monitoring of an extension range finder (411) to push a printing plate placed on the discharging plate (3) to adjust the position, after the data deviation of the three pressure sensors (48) is adjusted to be within the range of the set value and the data deviation detected by the offset distance measuring instruments (44) on the two sides of the inner wall of the discharging plate (3) is also within the range of the set value, carrying out the printing plate lifting operation in the second step;
step four: in the working process of the exhaust fan (56), air in an internal ventilation cavity of the stacking plate (41) is extracted through a communicating pipe (58) connected with an exhaust pipe (59), so that the position of the support ring (55) is blocked by the printing plate due to the upper end of the support ring (55), negative pressure is formed inside the support ring to adsorb and fix the printing plate, the position of the support seat (54) is large in gaps at two sides of the support seat (54), air can be absorbed and supplemented from the outside, nearby outside air flows to the position of the support seat (54), ammonia odor emitted during development treatment can be absorbed along with the air, the absorbed ammonia component is transmitted to the inside of the water tank (57) through the air guide pipe (510) at the position of the exhaust fan (56), and is guided into water flow in the water tank (57) along with the air from the lower end of the air guide pipe (510), and high-speed flowing air flow drives the transmission rotating wheel (515) connected to the outer side wall of the air guide pipe (510) to rotate through the spiral blade when the inside of the air guide pipe (510) circulates in the air guide pipe (510) The stirring fan blades (516) connected inside the water tank (57) are driven to rotate to stir water flow, the PH value of the water flow can be detected by the PH detector (511), and gas fully mixed with the water flow is discharged to the external environment from the exhaust pipe (512).
CN202210290280.9A 2022-03-23 2022-03-23 Intelligent material guiding device of developing machine and working method thereof Active CN114647158B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202210290280.9A CN114647158B (en) 2022-03-23 2022-03-23 Intelligent material guiding device of developing machine and working method thereof

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202210290280.9A CN114647158B (en) 2022-03-23 2022-03-23 Intelligent material guiding device of developing machine and working method thereof

Publications (2)

Publication Number Publication Date
CN114647158A true CN114647158A (en) 2022-06-21
CN114647158B CN114647158B (en) 2023-07-21

Family

ID=81994830

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202210290280.9A Active CN114647158B (en) 2022-03-23 2022-03-23 Intelligent material guiding device of developing machine and working method thereof

Country Status (1)

Country Link
CN (1) CN114647158B (en)

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105905605A (en) * 2016-06-18 2016-08-31 吴姣 Automatic transportation production line for electronic product materials
CN107215135A (en) * 2017-07-25 2017-09-29 合肥四维数控设备有限责任公司 A kind of feeding drawing mechanism for sheet material Carving Machining
JP2019034515A (en) * 2017-08-21 2019-03-07 株式会社K2スタイル Plate transfer device corresponding to processing type and non-processing type, system and plate transferring method
CN209728417U (en) * 2019-06-13 2019-12-03 杭州捷派印务有限公司 A kind of automatic plate developing machine improving PS editions quality
CN210954618U (en) * 2019-12-26 2020-07-07 北京天宇星印刷厂 Developing machine convenient for material collection
CN212197511U (en) * 2020-05-14 2020-12-22 杭州宝临印刷电路有限公司 Automatic feeding testing device
US11175405B2 (en) * 2017-05-15 2021-11-16 Ouster, Inc. Spinning lidar unit with micro-optics aligned behind stationary window
CN113911727A (en) * 2021-09-27 2022-01-11 东莞思沃智能装备有限公司 PCB developing processing system

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105905605A (en) * 2016-06-18 2016-08-31 吴姣 Automatic transportation production line for electronic product materials
US11175405B2 (en) * 2017-05-15 2021-11-16 Ouster, Inc. Spinning lidar unit with micro-optics aligned behind stationary window
CN107215135A (en) * 2017-07-25 2017-09-29 合肥四维数控设备有限责任公司 A kind of feeding drawing mechanism for sheet material Carving Machining
JP2019034515A (en) * 2017-08-21 2019-03-07 株式会社K2スタイル Plate transfer device corresponding to processing type and non-processing type, system and plate transferring method
CN209728417U (en) * 2019-06-13 2019-12-03 杭州捷派印务有限公司 A kind of automatic plate developing machine improving PS editions quality
CN210954618U (en) * 2019-12-26 2020-07-07 北京天宇星印刷厂 Developing machine convenient for material collection
CN212197511U (en) * 2020-05-14 2020-12-22 杭州宝临印刷电路有限公司 Automatic feeding testing device
CN113911727A (en) * 2021-09-27 2022-01-11 东莞思沃智能装备有限公司 PCB developing processing system

Also Published As

Publication number Publication date
CN114647158B (en) 2023-07-21

Similar Documents

Publication Publication Date Title
TWI405620B (en) Nozzle cleaning for liquid process, method for preventing dryout of processing liquid and the apparatus thereof
CN209946631U (en) Gluing unit and gluing developing system
CN109444329A (en) A kind of pH value detection device and method
CN114647158A (en) Intelligent material guide device of developing machine and working method thereof
CN105417658A (en) Dosing device and dosing method thereof
JP4812897B1 (en) Substrate processing apparatus and substrate processing method
US20030017665A1 (en) Substrate treating method and apparatus
CN109655326A (en) A kind of soil extract method
CN217855967U (en) Automatic material loading type mixing and stirring equipment
JP3704054B2 (en) Method for changing treatment liquid concentration and treatment liquid supply apparatus
CN116429996A (en) Buoy type water quality monitoring device and monitoring method for sewage treatment
CN2904614Y (en) Multifunction integrated seed coater
CN109900721A (en) A kind of printed circuit board (PCB) detecting floating roof equipment
CN108246151A (en) A kind of indigo automatic delivery method
JP3865669B2 (en) Liquid processing apparatus and liquid processing method
CN208537106U (en) A kind of casing leak detector
JP5375793B2 (en) Liquid processing equipment
CN221034602U (en) Photoresist bubble removing device
JP2003043439A (en) Device and method for washing substrate of liquid crystal display device
CN221011515U (en) Floating platform and ecological vat
CN112890243B (en) Conveying and separating device for cleaning wet longan pulp and using method thereof
KR102633301B1 (en) Moving type submersible aerator
CN218249997U (en) Equipment is used in production of composite mineral admixture
CN216669932U (en) House air detection device
CN218872076U (en) Sewage treatment dosing equipment

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant