CN114629375A - 微力施加装置 - Google Patents
微力施加装置 Download PDFInfo
- Publication number
- CN114629375A CN114629375A CN202210248822.6A CN202210248822A CN114629375A CN 114629375 A CN114629375 A CN 114629375A CN 202210248822 A CN202210248822 A CN 202210248822A CN 114629375 A CN114629375 A CN 114629375A
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- 238000006073 displacement reaction Methods 0.000 claims abstract description 57
- 230000007246 mechanism Effects 0.000 claims abstract description 25
- 239000000919 ceramic Substances 0.000 claims abstract description 22
- 238000007789 sealing Methods 0.000 claims abstract description 12
- 238000005259 measurement Methods 0.000 claims abstract description 6
- 239000000523 sample Substances 0.000 claims description 18
- 238000009434 installation Methods 0.000 claims description 14
- 238000000034 method Methods 0.000 claims description 9
- 230000008569 process Effects 0.000 claims description 9
- 230000006698 induction Effects 0.000 claims description 7
- 239000011324 bead Substances 0.000 claims description 6
- 230000003321 amplification Effects 0.000 claims description 2
- 238000003199 nucleic acid amplification method Methods 0.000 claims description 2
- 239000000463 material Substances 0.000 abstract description 13
- 238000001514 detection method Methods 0.000 abstract description 7
- 238000011160 research Methods 0.000 abstract description 5
- 230000009471 action Effects 0.000 abstract description 4
- 230000000694 effects Effects 0.000 abstract description 3
- 230000000704 physical effect Effects 0.000 abstract description 3
- 238000012876 topography Methods 0.000 abstract description 3
- 230000005684 electric field Effects 0.000 abstract 1
- 238000005516 engineering process Methods 0.000 description 7
- 238000011161 development Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 230000004044 response Effects 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 2
- 241000282414 Homo sapiens Species 0.000 description 1
- 230000004075 alteration Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000012512 characterization method Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 238000004377 microelectronic Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
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- 238000006467 substitution reaction Methods 0.000 description 1
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
- G01B21/20—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring contours or curvatures, e.g. determining profile
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N3/00—Investigating strength properties of solid materials by application of mechanical stress
- G01N3/02—Details
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
- H02N2/06—Drive circuits; Control arrangements or methods
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- Immunology (AREA)
- Pathology (AREA)
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Abstract
Description
Claims (9)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN202210248822.6A CN114629375B (zh) | 2022-03-14 | 2022-03-14 | 微力施加装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN202210248822.6A CN114629375B (zh) | 2022-03-14 | 2022-03-14 | 微力施加装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN114629375A true CN114629375A (zh) | 2022-06-14 |
CN114629375B CN114629375B (zh) | 2024-03-29 |
Family
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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CN202210248822.6A Active CN114629375B (zh) | 2022-03-14 | 2022-03-14 | 微力施加装置 |
Country Status (1)
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CN (1) | CN114629375B (zh) |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101776851A (zh) * | 2010-01-15 | 2010-07-14 | 天津大学 | 用于纳米压印光刻系统的三自由度微定位工作台 |
CN103225728A (zh) * | 2013-04-24 | 2013-07-31 | 山东大学 | 一种压电陶瓷驱动的二维并联微动平台 |
CN105006254A (zh) * | 2014-04-23 | 2015-10-28 | 东北大学 | 一种具有双位移放大的大行程快速响应x-y微动工作台 |
CN108253893A (zh) * | 2018-01-23 | 2018-07-06 | 哈尔滨工业大学 | 一种大量程高精度微接触力位移测量装置及其控制方法 |
CN110421532A (zh) * | 2019-08-15 | 2019-11-08 | 山东大学深圳研究院 | 一种压电陶瓷驱动的微纳伺服平台 |
CN113315411A (zh) * | 2021-06-01 | 2021-08-27 | 上海隐冠半导体技术有限公司 | 平台移动装置 |
-
2022
- 2022-03-14 CN CN202210248822.6A patent/CN114629375B/zh active Active
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101776851A (zh) * | 2010-01-15 | 2010-07-14 | 天津大学 | 用于纳米压印光刻系统的三自由度微定位工作台 |
CN103225728A (zh) * | 2013-04-24 | 2013-07-31 | 山东大学 | 一种压电陶瓷驱动的二维并联微动平台 |
CN105006254A (zh) * | 2014-04-23 | 2015-10-28 | 东北大学 | 一种具有双位移放大的大行程快速响应x-y微动工作台 |
CN108253893A (zh) * | 2018-01-23 | 2018-07-06 | 哈尔滨工业大学 | 一种大量程高精度微接触力位移测量装置及其控制方法 |
CN110421532A (zh) * | 2019-08-15 | 2019-11-08 | 山东大学深圳研究院 | 一种压电陶瓷驱动的微纳伺服平台 |
CN113315411A (zh) * | 2021-06-01 | 2021-08-27 | 上海隐冠半导体技术有限公司 | 平台移动装置 |
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Publication number | Publication date |
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CN114629375B (zh) | 2024-03-29 |
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CB03 | Change of inventor or designer information |
Inventor after: Xu Jinlin Inventor after: Jiang Xiaolei Inventor before: Xu Jinlin Inventor before: Xu Zhi Inventor before: Jiang Xiaolei |
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CB03 | Change of inventor or designer information | ||
TA01 | Transfer of patent application right |
Effective date of registration: 20230321 Address after: Building A1, innovation city, Songshanhu University, Dongguan, Guangdong 523000 Applicant after: Material Laboratory of Songshan Lake Applicant after: Dongguan zhuoju Technology Co.,Ltd. Address before: 523000 room 402, building 12, No. 1 Xuefu Road, Songshanhu Park, Dongguan City, Guangdong Province Applicant before: Dongguan zhuoju Technology Co.,Ltd. |
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