CN114624981B - Ultra-fast holographic microscopic imaging method and system based on time broadening - Google Patents

Ultra-fast holographic microscopic imaging method and system based on time broadening Download PDF

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CN114624981B
CN114624981B CN202210146510.4A CN202210146510A CN114624981B CN 114624981 B CN114624981 B CN 114624981B CN 202210146510 A CN202210146510 A CN 202210146510A CN 114624981 B CN114624981 B CN 114624981B
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邢芳俭
陈彦淇
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    • G03HHOLOGRAPHIC PROCESSES OR APPARATUS
    • G03H1/00Holographic processes or apparatus using light, infrared or ultraviolet waves for obtaining holograms or for obtaining an image from them; Details peculiar thereto
    • G03H1/0005Adaptation of holography to specific applications
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03HHOLOGRAPHIC PROCESSES OR APPARATUS
    • G03H1/00Holographic processes or apparatus using light, infrared or ultraviolet waves for obtaining holograms or for obtaining an image from them; Details peculiar thereto
    • G03H1/04Processes or apparatus for producing holograms
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    • G03HHOLOGRAPHIC PROCESSES OR APPARATUS
    • G03H1/00Holographic processes or apparatus using light, infrared or ultraviolet waves for obtaining holograms or for obtaining an image from them; Details peculiar thereto
    • G03H1/04Processes or apparatus for producing holograms
    • G03H1/0465Particular recording light; Beam shape or geometry
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    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03HHOLOGRAPHIC PROCESSES OR APPARATUS
    • G03H1/00Holographic processes or apparatus using light, infrared or ultraviolet waves for obtaining holograms or for obtaining an image from them; Details peculiar thereto
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    • G03H1/00Holographic processes or apparatus using light, infrared or ultraviolet waves for obtaining holograms or for obtaining an image from them; Details peculiar thereto
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    • G03H2001/0033Adaptation of holography to specific applications in hologrammetry for measuring or analysing
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    • G03HHOLOGRAPHIC PROCESSES OR APPARATUS
    • G03H1/00Holographic processes or apparatus using light, infrared or ultraviolet waves for obtaining holograms or for obtaining an image from them; Details peculiar thereto
    • G03H1/0005Adaptation of holography to specific applications
    • G03H2001/005Adaptation of holography to specific applications in microscopy, e.g. digital holographic microscope [DHM]
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    • G03HHOLOGRAPHIC PROCESSES OR APPARATUS
    • G03H1/00Holographic processes or apparatus using light, infrared or ultraviolet waves for obtaining holograms or for obtaining an image from them; Details peculiar thereto
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    • G03HHOLOGRAPHIC PROCESSES OR APPARATUS
    • G03H1/00Holographic processes or apparatus using light, infrared or ultraviolet waves for obtaining holograms or for obtaining an image from them; Details peculiar thereto
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    • G03H1/0465Particular recording light; Beam shape or geometry
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    • GPHYSICS
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    • G03HHOLOGRAPHIC PROCESSES OR APPARATUS
    • G03H1/00Holographic processes or apparatus using light, infrared or ultraviolet waves for obtaining holograms or for obtaining an image from them; Details peculiar thereto
    • G03H1/04Processes or apparatus for producing holograms
    • G03H1/08Synthesising holograms, i.e. holograms synthesized from objects or objects from holograms
    • G03H1/0866Digital holographic imaging, i.e. synthesizing holobjects from holograms
    • G03H2001/0883Reconstruction aspect, e.g. numerical focusing

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Abstract

本发明公开了一种基于时间展宽的超快全息显微成像方法及其系统,该系统包括:超短脉冲序列产生模块,用于产生照明用的多波长啁啾脉冲序列;全息成像光谱仪,用于根据多波长啁啾脉冲序列产生空间离散的多波长离轴全息图序列;全息图重建模块,用于对多波长离轴全息图序列进行重建以获得样品的定量的光学厚度序列。本发明针对全息成像光谱仪产生的多波长全息图序列进行重建获取相位序列,再以多波长啁啾脉冲序列各子脉冲波长为标准,获得定量的样品光学厚度序列,能够在单次曝光的情况下实现超短时间分辨率,超快成像速度的三维空间成像,解决了现有方法仅能获取探测目标的二维空间信息的问题,大幅提升了成像效果。

The invention discloses an ultrafast holographic microscopic imaging method and system based on time broadening. The system includes: an ultrashort pulse sequence generation module for generating multi-wavelength chirped pulse sequences for illumination; a holographic imaging spectrometer, A spatially discrete multi-wavelength off-axis hologram sequence is generated based on a multi-wavelength chirped pulse sequence; a hologram reconstruction module is used to reconstruct the multi-wavelength off-axis hologram sequence to obtain a quantitative optical thickness sequence of the sample. This invention reconstructs the multi-wavelength hologram sequence generated by the holographic imaging spectrometer to obtain the phase sequence, and then uses each sub-pulse wavelength of the multi-wavelength chirped pulse sequence as a standard to obtain a quantitative sample optical thickness sequence, which can be used in a single exposure. Realizing three-dimensional spatial imaging with ultra-short time resolution and ultra-fast imaging speed solves the problem that existing methods can only obtain two-dimensional spatial information of the detection target, and greatly improves the imaging effect.

Description

一种基于时间展宽的超快全息显微成像方法及其系统An ultrafast holographic microscopy imaging method and system based on time broadening

技术领域Technical field

本发明属于超快光学成像领域,具体涉及一种基于时间展宽的超快全息显微成像方法及其系统。The invention belongs to the field of ultrafast optical imaging, and specifically relates to an ultrafast holographic microscopic imaging method and system based on time broadening.

背景技术Background technique

实现超短时间分辨率与超快成像速度的光学成像一直是光学成像领域研究的重要方向。现有的探测器,例如电荷耦合元件(CCD)和互补金属氧化物半导体(CMOS)相机的时间分辨率成像速度仅能达到亚微秒量级,使用传统的光学架构和光源难以对瞬态的,非重复性的现象进行探测。Optical imaging that achieves ultra-short time resolution and ultra-fast imaging speed has always been an important research direction in the field of optical imaging. The time resolution imaging speed of existing detectors, such as charge-coupled devices (CCD) and complementary metal-oxide semiconductor (CMOS) cameras, can only reach sub-microsecond levels. It is difficult to detect transients using traditional optical architectures and light sources. , non-repetitive phenomena are detected.

基于空间展宽的频-时-空映射超快成像是一种分辨率达到皮秒/亚皮秒量级的全光超快成像技术,然而现有的频-时-空映射超快成像装置复杂,搭建成本高,且仅能获取探测目标的二维空间信息,无法探测目标的相位/深度信息。故实现更高维的超快成像技术非常紧迫。Frequency-space-time mapping ultrafast imaging based on spatial broadening is an all-optical ultrafast imaging technology with a resolution of picosecond/subpicosecond level. However, the existing frequency-space-time mapping ultrafast imaging device is complicated , the construction cost is high, and it can only obtain the two-dimensional spatial information of the detection target, but cannot detect the phase/depth information of the target. Therefore, it is very urgent to realize higher-dimensional ultrafast imaging technology.

发明内容Contents of the invention

发明目的:为了克服现有技术中存在的不足,提供一种基于时间展宽的超快全息显微成像方法及其系统,其可以在单次曝光的情况下实现超短时间分辨率,超快成像速度的三维空间成像。Purpose of the invention: In order to overcome the deficiencies in the existing technology, provide an ultrafast holographic microscopy imaging method and system based on time broadening, which can achieve ultra-short time resolution and ultra-fast imaging in a single exposure. Three-dimensional spatial imaging of velocity.

技术方案:为实现上述目的,本发明提供一种基于时间展宽的超快全息显微成像系统,包括:Technical solution: In order to achieve the above objectives, the present invention provides an ultrafast holographic microscopy imaging system based on time broadening, including:

超短脉冲序列产生模块,用于产生照明用的多波长啁啾脉冲序列;Ultrashort pulse sequence generation module, used to generate multi-wavelength chirped pulse sequences for illumination;

全息成像光谱仪,用于根据多波长啁啾脉冲序列产生空间离散的多波长离轴全息图序列;Holographic imaging spectrometer, used to generate spatially discrete multi-wavelength off-axis hologram sequences based on multi-wavelength chirped pulse sequences;

全息图重建模块,用于对多波长离轴全息图序列进行重建以获得样品的定量的光学厚度序列。The hologram reconstruction module is used to reconstruct a multi-wavelength off-axis hologram sequence to obtain a quantitative optical thickness sequence of the sample.

进一步地,所述超短脉冲序列产生模块包括超短脉冲激光器、第一衍射光栅、第二衍射光栅、第一凸透镜、第二凸透镜、数字微反射镜器件和玻璃棒;Further, the ultrashort pulse sequence generation module includes an ultrashort pulse laser, a first diffraction grating, a second diffraction grating, a first convex lens, a second convex lens, a digital micro-mirror device and a glass rod;

所述第一衍射光栅用于对超短脉冲激光器产生的脉冲进行色散;The first diffraction grating is used to disperse the pulses generated by the ultrashort pulse laser;

所述第一凸透镜用于将色散后的脉冲在数字微反射镜器件上准直成一维的谱线;The first convex lens is used to collimate the dispersed pulses into one-dimensional spectral lines on the digital micro-mirror device;

所述数字微反射镜器件用于对一维谱线进行选择滤波,并且反射给第二凸透镜;The digital micro-mirror device is used to selectively filter one-dimensional spectral lines and reflect them to the second convex lens;

所述第二凸透镜和第二衍射光栅用于对滤波后的脉冲进行合束变为平行光脉冲;The second convex lens and the second diffraction grating are used to combine the filtered pulses into parallel light pulses;

所述玻璃棒用于对平行光脉冲进行时域展宽。The glass rod is used for time domain broadening of parallel light pulses.

进一步地,所述全息成像光谱仪包括第三凸透镜、成像透镜、分光镜、第一显微物镜、第二显微物镜、第一反射镜、第二反射镜、第三反射镜、第三衍射光栅、CCD相机;Further, the holographic imaging spectrometer includes a third convex lens, an imaging lens, a beam splitter, a first microscopic objective lens, a second microscopic objective lens, a first reflective mirror, a second reflective mirror, a third reflective mirror, and a third diffraction grating. , CCD camera;

所述第三凸透镜用于汇聚超短脉冲序列产生模块产生的脉冲序列;The third convex lens is used to converge the pulse sequence generated by the ultrashort pulse sequence generation module;

所述分光镜用于将汇聚后的脉冲序列分成物光与参考光;The spectroscope is used to separate the converged pulse sequence into object light and reference light;

所述第一显微物镜用于将物光投射在样品上,并且收集样品的散射光返回至分光镜;The first microscope objective is used to project object light onto the sample and collect scattered light from the sample and return it to the spectroscope;

所述第二显微物镜用于将参考光投射至第一反射镜,并且收集经过第一反射镜反射后的参考光至分光镜;The second microscope objective is used to project the reference light to the first reflector, and collect the reference light reflected by the first reflector to the spectroscope;

所述第一反射镜用于反射参考光至第二显微物镜;The first reflector is used to reflect the reference light to the second microscope objective;

所述第二反射镜和第三反射镜用于将平行传播的物光和参考光反射后入射至第三衍射光栅;The second reflector and the third reflector are used to reflect the parallel propagating object light and reference light before incident on the third diffraction grating;

所述成像透镜用于将第三衍射光栅发出的子脉冲物、参考光投射到CCD相机上的不同位置;The imaging lens is used to project the sub-pulse objects and reference light emitted by the third diffraction grating to different positions on the CCD camera;

所述CCD相机用于捕获离散的多波长离轴全息图序列。The CCD camera is used to capture discrete multi-wavelength off-axis hologram sequences.

进一步地,所述第一反射镜倾斜放置,且倾斜方向与第三衍射光栅色散方向正交,以使成像面上的参考光能够倾斜入射与物光干涉,形成离轴全息图,且减少色散对全息图干涉条纹能见度的影响。Further, the first reflector is placed obliquely, and the inclination direction is orthogonal to the dispersion direction of the third diffraction grating, so that the reference light on the imaging surface can be obliquely incident and interfere with the object light to form an off-axis hologram and reduce dispersion. Effect on visibility of hologram interference fringes.

一种基于时间展宽的超快全息显微成像方法,包括如下步骤:An ultrafast holographic microscopy imaging method based on time broadening, including the following steps:

S1:通过超短脉冲序列产生模块产生多波长啁啾脉冲序列;S1: Generate multi-wavelength chirped pulse sequences through the ultrashort pulse sequence generation module;

S2:全息成像光谱仪使用多波长啁啾脉冲序列进行照明,产生空间离散的多波长离轴全息图序列;S2: The holographic imaging spectrometer uses a multi-wavelength chirped pulse sequence for illumination to produce a spatially discrete multi-wavelength off-axis hologram sequence;

S3:通过全息图重建模块对多波长离轴全息图序列进行重建,获取定量光学厚度序列,实现三维全息显微成像。S3: Use the hologram reconstruction module to reconstruct the multi-wavelength off-axis hologram sequence to obtain a quantitative optical thickness sequence to achieve three-dimensional holographic microscopic imaging.

进一步地,所述步骤S1中多波长啁啾脉冲序列的产生过程为:Further, the generation process of the multi-wavelength chirped pulse sequence in step S1 is:

超短脉冲激光器发出平行光脉冲,该脉冲经过第一衍射光栅色散,经过第一凸透镜在其后焦面的数字微反射镜器件上准直成一维的谱线,通过对数字微反射镜器件加载二值图像,对一维谱线进行选择滤波,滤波后的脉冲经过第二凸透镜和第二衍射光栅后合束,重新变为平行光脉冲,玻璃棒对平行光脉冲进行时域展宽,形成多波长啁啾脉冲序列。The ultrashort pulse laser emits a parallel light pulse, which is dispersed by the first diffraction grating and collimated into a one-dimensional spectral line by the first convex lens on the digital micro-mirror device on its back focal plane. The digital micro-mirror device is loaded with In the binary image, the one-dimensional spectral lines are selectively filtered. The filtered pulses pass through the second convex lens and the second diffraction grating and then are combined into parallel light pulses. The glass rod broadens the parallel light pulses in the time domain to form multiple Wavelength chirped pulse sequence.

进一步地,所述步骤S2中多波长离轴全息图序列的产生过程为:Further, the generation process of the multi-wavelength off-axis hologram sequence in step S2 is:

脉冲序列经过第三凸透镜汇聚后被分光镜分成物光与参考光,物光经过第一显微物镜后投射在其前焦面的样品上,样品的散射光重新被第一显微物镜收集,返回至分光镜;The pulse sequence is condensed by the third convex lens and then divided into object light and reference light by the spectroscope. The object light passes through the first microscope objective lens and is projected on the sample on its front focal plane. The scattered light of the sample is re-collected by the first microscope objective lens. Return to spectroscope;

参考光经过第二显微物镜投射在其后焦面上的倾斜的第一反射镜上,参考光被第一反射镜反射后,被第二显微物镜收集再返回至分光镜;The reference light passes through the second microscopic objective lens and is projected on the inclined first reflecting mirror on its back focal plane. After the reference light is reflected by the first reflecting mirror, it is collected by the second microscopic objective lens and then returns to the spectroscope;

由于分光镜的作用,返回的物光与参考光平行的传播,依次经过第二反射镜和第三反射镜的反射后射入到第三衍射光栅,经过第三衍射光栅后,具有不同波长-时间映射的子脉冲物、参考光在x方向上分开,经过成像透镜被投射汇聚在其后焦面的CCD相机上的不同位置,具有相同波长-时间映射的子脉冲物、参考光以一定的夹角投射在CCD相机上的同一位置发生干涉,形成离轴全息图,CCD相机在一次曝光时间内捕获一系列离散的离轴全息图,获取到多波长离轴全息图序列。Due to the action of the spectroscope, the returned object light propagates in parallel with the reference light, is reflected by the second mirror and the third mirror in turn, and then enters the third diffraction grating. After passing through the third diffraction grating, it has different wavelengths - The time-mapped sub-pulse objects and reference light are separated in the x-direction, and are projected and converged at different positions on the CCD camera on its back focal plane through the imaging lens. The sub-pulse objects and reference light with the same wavelength-time mapping are separated at a certain The angle projection interferes at the same position on the CCD camera to form an off-axis hologram. The CCD camera captures a series of discrete off-axis holograms within one exposure time, and obtains a multi-wavelength off-axis hologram sequence.

进一步地,所述步骤S3中使用全息图重建算法对离轴全息图进行重建:Further, in step S3, a hologram reconstruction algorithm is used to reconstruct the off-axis hologram:

其对应的子脉冲波长为λi,全息图表示为g(x,y)=a(x,y)+c(x,y)exp(j2πfyx)+c*(x,y)exp(-j2πfyx),式中a为直流分量,b为调制度,/>为相位,*表示复共轭,fy为全息图条纹空间频率;The corresponding sub-pulse wavelength is λ i , and the hologram is expressed as g(x,y)=a(x,y)+c(x,y)exp(j2πf y x)+c * (x,y)exp( -j2πf y x), where a is the DC component, b is the degree of modulation,/> is the phase, * represents complex conjugation, f y is the hologram fringe spatial frequency;

对g进行傅里叶变换得到G(u,v)=A(u,v)+C(u-fx,v)+C*(u+fx,v),式中A,C,C*分别为a,c,c*的傅里叶变换,使用低通滤波器将C(u-fx,v)滤出并移至频域原点得到C,对其作反傅里叶变换得到c,相位计算为imag表示虚部,real表示实部,对该相位进行二维解包裹后计算到样品的光学厚度为:/> Perform Fourier transform on g to get G(u,v)=A(u,v)+C(uf x ,v)+C * (u+f x ,v), where A, C, C * are respectively For the Fourier transform of a, c, c * , use a low-pass filter to filter out C(uf x , v) and move it to the origin of the frequency domain to get C, perform an inverse Fourier transform on it to get c, and calculate the phase for imag represents the imaginary part, and real represents the real part. After two-dimensional unwrapping of the phase, the optical thickness of the sample is calculated as:/>

有益效果:本发明与现有技术相比,针对全息成像光谱仪产生的多波长全息图序列进行重建获取相位序列,再以多波长啁啾脉冲序列各子脉冲波长为标准,获得定量的样品光学厚度序列,能够在单次曝光的情况下实现超短时间分辨率,超快成像速度的三维空间成像,解决了现有方法仅能获取探测目标的二维空间信息的问题,大幅提升了成像效果。Beneficial effects: Compared with the existing technology, the present invention reconstructs the multi-wavelength hologram sequence generated by the holographic imaging spectrometer to obtain the phase sequence, and then uses the wavelength of each sub-pulse of the multi-wavelength chirped pulse sequence as the standard to obtain the quantitative optical thickness of the sample. The sequence can achieve three-dimensional spatial imaging with ultra-short time resolution and ultra-fast imaging speed in a single exposure. It solves the problem that existing methods can only obtain two-dimensional spatial information of the detection target, and greatly improves the imaging effect.

附图说明Description of the drawings

图1为本发明提供的基于时间展宽的超快全息显微成像系统示意图;Figure 1 is a schematic diagram of the ultrafast holographic microscopy imaging system based on time broadening provided by the present invention;

图2为本实施例中超短脉冲序列产生模块产生的多波长啁啾脉冲虚列的频域特征图;Figure 2 is a frequency domain characteristic diagram of the multi-wavelength chirped pulse virtual sequence generated by the ultrashort pulse sequence generation module in this embodiment;

图3为本实施例中超短脉冲序列产生模块产生的多波长啁啾脉冲虚列时序特征图;Figure 3 is a timing characteristic diagram of the multi-wavelength chirped pulse virtual sequence generated by the ultra-short pulse sequence generation module in this embodiment;

图4为本实施例中相机在一次曝光下采集的10幅空间离散的离轴全息图;Figure 4 shows 10 spatially discrete off-axis holograms collected by the camera under one exposure in this embodiment;

图5为本实施例中使用全息图重建算法重建的三维图像序列图。Figure 5 is a three-dimensional image sequence diagram reconstructed using the hologram reconstruction algorithm in this embodiment.

附图1中,1为超短脉冲序列产生模块,2为全息成像光谱仪,101为超短脉冲激光器,102为第一衍射光栅,106为第二衍射光栅,209为第三衍射光栅,103为第一凸透镜,105为第二凸透镜,107为玻璃棒,104为数字微反射镜器件,201为第三凸透镜,210为成像透镜,202为分光镜,203为第一显微物镜,205为第二显微物镜,204为样品,206为第一反射镜,207为第二反射镜,208为第三反射镜,211为CCD相机,212为电脑。In Figure 1, 1 is an ultrashort pulse sequence generation module, 2 is a holographic imaging spectrometer, 101 is an ultrashort pulse laser, 102 is a first diffraction grating, 106 is a second diffraction grating, 209 is a third diffraction grating, 103 is The first convex lens, 105 is the second convex lens, 107 is the glass rod, 104 is the digital micro-mirror device, 201 is the third convex lens, 210 is the imaging lens, 202 is the beam splitter, 203 is the first microscopic objective lens, and 205 is the third convex lens. Two microscope objectives, 204 is the sample, 206 is the first reflector, 207 is the second reflector, 208 is the third reflector, 211 is the CCD camera, and 212 is the computer.

具体实施方式Detailed ways

下面结合附图和具体实施例,进一步阐明本发明,应理解这些实施例仅用于说明本发明而不用于限制本发明的范围,在阅读了本发明之后,本领域技术人员对本发明的各种等价形式的修改均落于本申请所附权利要求所限定的范围。The present invention will be further clarified below in conjunction with the accompanying drawings and specific examples. It should be understood that these examples are only used to illustrate the present invention and are not intended to limit the scope of the present invention. After reading the present invention, those skilled in the art will be familiar with various aspects of the present invention. Modifications in the form of equivalents fall within the scope defined by the appended claims of this application.

本发明提供一种基于时间展宽的超快全息显微成像系统,如图1所示,其包括:超短脉冲序列产生模块1、全息成像光谱仪2和全息图重建模块。The invention provides an ultrafast holographic microscopy imaging system based on time broadening, as shown in Figure 1, which includes: an ultrashort pulse sequence generation module 1, a holographic imaging spectrometer 2 and a hologram reconstruction module.

超短脉冲序列产生模块1包括超短脉冲激光器101、第一衍射光栅102、第二衍射光栅106、第一凸透镜103、第二凸透镜105、数字微反射镜器件104和玻璃棒107。The ultrashort pulse sequence generation module 1 includes an ultrashort pulse laser 101, a first diffraction grating 102, a second diffraction grating 106, a first convex lens 103, a second convex lens 105, a digital micromirror device 104 and a glass rod 107.

全息成像光谱仪2包括第三凸透镜201、成像透镜210、分光镜202、第一显微物镜203、第二显微物镜205、第一反射镜206、第二反射镜207、第三反射镜208、第三衍射光栅209、CCD相机211。其中,第一反射镜206绕x轴倾斜放置,且倾斜方向与第三衍射光栅209的色散方向正交。The holographic imaging spectrometer 2 includes a third convex lens 201, an imaging lens 210, a beam splitter 202, a first microscopic objective lens 203, a second microscopic objective lens 205, a first reflective mirror 206, a second reflective mirror 207, a third reflective mirror 208, Third diffraction grating 209 and CCD camera 211. The first reflecting mirror 206 is placed tilted around the x-axis, and the tilting direction is orthogonal to the dispersion direction of the third diffraction grating 209 .

全息图重建模块设置于电脑212内,具体为一种全息图重建系统。The hologram reconstruction module is installed in the computer 212 and is specifically a hologram reconstruction system.

本实施例中将上述全息显微成像系统对样品204进行三维全息显微成像,提供一种基于时间展宽的超快全息显微成像方法,样品204具体为镀有NJNU字样浮雕的反射镜,对照图1,具体的成像方法为:In this embodiment, the above-mentioned holographic microscopy imaging system is used to perform three-dimensional holographic microscopy imaging on sample 204 to provide an ultra-fast holographic microscopy imaging method based on time broadening. Sample 204 is specifically a reflector coated with NJNU relief. Figure 1, the specific imaging method is:

S1:通过超短脉冲序列产生模块1产生多波长啁啾脉冲序列:S1: Generate multi-wavelength chirped pulse sequence through ultrashort pulse sequence generation module 1:

超短脉冲激光器101发出中心波长800nm,3dB带宽为100nm,脉宽为5.5ps的平行光脉冲,该脉冲经过第一衍射光栅102色散,经过第一凸透镜103在其后焦面的数字微反射镜器件104上准直成一维的谱线,通过对数字微反射镜器件104加载二值图像,对一维谱线进行选择滤波,滤波后的脉冲经过第二凸透镜105和第二衍射光栅106后合束,重新变为平行光脉冲,玻璃棒107对平行光脉冲进行时域展宽,形成多波长啁啾脉冲序列。The ultrashort pulse laser 101 emits a parallel light pulse with a center wavelength of 800nm, a 3dB bandwidth of 100nm, and a pulse width of 5.5ps. The pulse is dispersed by the first diffraction grating 102 and passes through the digital micro-reflector of the first convex lens 103 on its back focal plane. The one-dimensional spectral lines are collimated on the device 104. By loading a binary image on the digital micro-mirror device 104, the one-dimensional spectral lines are selectively filtered. The filtered pulses pass through the second convex lens 105 and the second diffraction grating 106 and then are combined. The beam becomes a parallel light pulse again, and the glass rod 107 broadens the parallel light pulse in the time domain to form a multi-wavelength chirped pulse sequence.

本实施例中第一衍射光栅102和第二衍射光栅106为600刻线/mm,第一凸透镜103和第二凸透镜105的焦距为100mm,玻璃棒107为3m长的N-SF10材质。In this embodiment, the first diffraction grating 102 and the second diffraction grating 106 have 600 lines/mm, the focal length of the first convex lens 103 and the second convex lens 105 is 100 mm, and the glass rod 107 is made of N-SF10 material with a length of 3 m.

如图2所示,经过滤波后的一维谱线共有10根谱线,分别为750nm,760nm,770nm,780nm,790nm,800nm,810nm,820nm,830nm,840nm,每根谱线的宽度为0.25nm;如图3所示,时域展宽后形成的多波长啁啾脉冲序列,共有10个子脉冲,每个子脉冲脉宽为5.3ps,相邻脉冲间隔10ps。As shown in Figure 2, there are 10 one-dimensional spectral lines after filtering, which are 750nm, 760nm, 770nm, 780nm, 790nm, 800nm, 810nm, 820nm, 830nm, 840nm. The width of each spectral line is 0.25 nm; as shown in Figure 3, the multi-wavelength chirped pulse sequence formed after time domain broadening has a total of 10 sub-pulses, each sub-pulse has a pulse width of 5.3ps, and the interval between adjacent pulses is 10ps.

S2:全息成像光谱仪2使用多波长啁啾脉冲序列进行照明,产生空间离散的多波长离轴全息图序列:S2: Holographic imaging spectrometer 2 uses a multi-wavelength chirped pulse sequence for illumination to produce a spatially discrete multi-wavelength off-axis hologram sequence:

多波长啁啾脉冲序列经过第三凸透镜201汇聚后被分光镜202分成物光与参考光,物光经过第一显微物镜203后投射在其前焦面的样品204上,样品204的散射光重新被第一显微物镜203收集,返回至分光镜202;The multi-wavelength chirped pulse sequence is condensed by the third convex lens 201 and then divided into object light and reference light by the spectroscope 202. The object light passes through the first microscope objective lens 203 and is projected on the sample 204 on its front focal plane. The scattered light of the sample 204 It is collected again by the first microscope objective lens 203 and returned to the spectroscope 202;

参考光经过第二显微物镜205投射在其后焦面上的倾斜的第一反射镜206上,参考光被第一反射镜206反射后,被第二显微物镜205收集再返回至分光镜202;The reference light passes through the second microscopic objective lens 205 and is projected on the inclined first reflecting mirror 206 on its back focal plane. After the reference light is reflected by the first reflecting mirror 206, it is collected by the second microscopic objective lens 205 and then returns to the spectroscope. 202;

由于分光镜202的作用,返回的物光与参考光平行的传播,依次经过第二反射镜207和第三反射镜208的反射后射入到第三衍射光栅209,经过第三衍射光栅209后,具有不同波长-时间映射的子脉冲物、参考光在x方向上分开,经过成像透镜210被投射汇聚在其后焦面的CCD相机211上的不同位置,具有相同波长-时间映射的子脉冲物、参考光以一定的夹角投射在CCD相机211上的同一位置发生干涉,形成离轴全息图,CCD相机211在一次曝光时间内捕获一系列离散的离轴全息图,获取到多波长离轴全息图序列。Due to the action of the spectroscope 202, the returned object light propagates in parallel with the reference light, is reflected by the second reflecting mirror 207 and the third reflecting mirror 208 in turn, and then enters the third diffraction grating 209. After passing through the third diffraction grating 209 , the sub-pulse object and reference light with different wavelength-time mapping are separated in the x direction, and are projected and converged on the CCD camera 211 on its rear focal plane through the imaging lens 210. The sub-pulses with the same wavelength-time mapping are The object and reference light are projected at the same position on the CCD camera 211 at a certain angle and interfere to form an off-axis hologram. The CCD camera 211 captures a series of discrete off-axis holograms within one exposure time, and obtains multi-wavelength holograms. Axis hologram sequence.

本实施例中第三凸透镜201的焦距为200mm,成像透镜210的焦距为150mm;第一显微物镜203,第一反射镜206的规格为焦距40mm,NA=0.26;第三衍射光栅209为600刻线/mm;CCD相机211规格为像素大小3um,像素数5000×1500;每一幅全息图成像视场为200um×200um。第一反射镜206放置在第二显微物镜205的前焦面,CCD相机211放置在成像透镜210的后焦面。In this embodiment, the focal length of the third convex lens 201 is 200mm, and the focal length of the imaging lens 210 is 150mm; the specifications of the first microscopic objective lens 203 and the first reflector 206 are a focal length of 40mm, NA=0.26; the third diffraction grating 209 is 600 Graduation line/mm; CCD camera 211 specifications are pixel size 3um, pixel number 5000×1500; each hologram imaging field of view is 200um×200um. The first reflecting mirror 206 is placed on the front focal plane of the second microscopic objective lens 205 , and the CCD camera 211 is placed on the rear focal plane of the imaging lens 210 .

本实施例中捕获到10幅离轴全息图序列,具体如图4所示。In this embodiment, 10 off-axis hologram sequences are captured, as shown in Figure 4.

S3:通过全息图重建模块对多波长离轴全息图序列进行重建,获取定量光学厚度序列,实现三维全息显微成像:S3: Reconstruct the multi-wavelength off-axis hologram sequence through the hologram reconstruction module to obtain a quantitative optical thickness sequence to achieve three-dimensional holographic microscopy imaging:

使用全息图重建算法对10幅离轴全息图进行重建:Use the hologram reconstruction algorithm to reconstruct 10 off-axis holograms:

以10幅全息图中一幅为例,其对应的子脉冲波长为λi,全息图表示为g(x,y)=a(x,y)+c(x,y)exp(j2πfyx)+c*(x,y)exp(-j2πfyx),式中a为直流分量,b为调制度,/>为相位,*表示复共轭,fy为全息图条纹空间频率;Taking one of the 10 holograms as an example, the corresponding sub-pulse wavelength is λ i , and the hologram is expressed as g(x,y)=a(x,y)+c(x,y)exp(j2πf y x )+c * (x,y)exp(-j2πf y x), where a is the DC component, b is the degree of modulation,/> is the phase, * represents complex conjugation, f y is the hologram fringe spatial frequency;

对g进行傅里叶变换得到G(u,v)=A(u,v)+C(u-fx,v)+C*(u+fx,v),式中A,C,C*分别为a,c,c*的傅里叶变换,使用低通滤波器将C(u-fx,v)滤出并移至频域原点得到C,对其作反傅里叶变换得到c,相位计算为imag表示虚部,real表示实部,对该相位进行二维解包裹后计算到样品的光学厚度为:/> Perform Fourier transform on g to get G(u,v)=A(u,v)+C(uf x ,v)+C * (u+f x ,v), where A, C, C * are respectively For the Fourier transform of a, c, c * , use a low-pass filter to filter out C(uf x , v) and move it to the origin of the frequency domain to get C, perform an inverse Fourier transform on it to get c, and calculate the phase for imag represents the imaginary part, and real represents the real part. After two-dimensional unwrapping of the phase, the optical thickness of the sample is calculated as:/>

最终获取到如图5所示的三维图像序列图。Finally, the three-dimensional image sequence diagram shown in Figure 5 is obtained.

本实施例中本发明提供的成像系统采用的方案最终的成像速度为6.8×1010帧/秒,时间分辨率为5.4ps,每幅视场为200微米×200微米,空间分辨率为4.38微米。各方面都要优于现有的成像系统。In this embodiment, the solution adopted by the imaging system provided by the present invention has a final imaging speed of 6.8×1010 frames/second, a temporal resolution of 5.4ps, a field of view of each frame of 200 microns×200 microns, and a spatial resolution of 4.38 microns. It is superior to existing imaging systems in every aspect.

Claims (3)

1. An ultrafast holographic microscopy imaging system based on temporal broadening, comprising:
the ultra-short pulse sequence generating module is used for generating a multi-wavelength chirped pulse sequence for illumination;
the holographic imaging spectrometer is used for generating a spatially discrete multi-wavelength off-axis hologram sequence according to the multi-wavelength chirped pulse sequence;
a hologram reconstruction module for reconstructing the multi-wavelength off-axis hologram sequence to obtain a quantitative optical thickness sequence of the sample;
the ultra-short pulse sequence generating module comprises an ultra-short pulse laser, a first diffraction grating, a second diffraction grating, a first convex lens, a second convex lens, a digital micro-mirror device and a glass rod;
the first diffraction grating is used for dispersing pulses generated by the ultra-short pulse laser;
the first convex lens is used for collimating the dispersed pulse into a one-dimensional spectral line on the digital micro-mirror device;
the digital micro-mirror device is used for carrying out selective filtering on the one-dimensional spectral line and reflecting the one-dimensional spectral line to the second convex lens;
the second convex lens and the second diffraction grating are used for combining the filtered pulse into a parallel light pulse;
the glass rod is used for carrying out time domain broadening on the parallel light pulses;
the holographic imaging spectrometer comprises a third convex lens, an imaging lens, a spectroscope, a first micro objective, a second micro objective, a first reflecting mirror, a second reflecting mirror, a third diffraction grating and a CCD camera;
the third convex lens is used for converging the pulse sequences generated by the ultra-short pulse sequence generating module;
the spectroscope is used for dividing the converged pulse sequence into object light and reference light;
the first microscope objective is used for projecting object light on the sample, and collecting scattered light of the sample and returning the scattered light to the spectroscope;
the second microscope objective is used for projecting the reference light to the first reflecting mirror and collecting the reference light reflected by the first reflecting mirror to the spectroscope;
the first reflecting mirror is used for reflecting the reference light to the second micro objective lens;
the second reflector and the third reflector are used for reflecting the object light and the reference light which are transmitted in parallel and then making the object light and the reference light incident to the third diffraction grating;
the imaging lens is used for projecting the sub-pulse objects and the reference light emitted by the third diffraction grating to different positions on the CCD camera;
the CCD camera is used to capture discrete multi-wavelength off-axis hologram sequences.
2. The time-broadening-based ultrafast holographic microscopic imaging system of claim 1, wherein the first mirror is tilted and the tilt direction is orthogonal to the third diffraction grating dispersion direction.
3. An ultrafast holographic microscopic imaging method based on time broadening is characterized by comprising the following steps:
s1: generating a multi-wavelength chirped pulse sequence through an ultrashort pulse sequence generating module;
s2: the holographic imaging spectrometer uses the multi-wavelength chirped pulse sequence to illuminate, and generates a spatially discrete multi-wavelength off-axis hologram sequence;
s3: reconstructing the multi-wavelength off-axis hologram sequence through a hologram reconstruction module to obtain a quantitative optical thickness sequence, and realizing three-dimensional holographic microscopic imaging;
the generating process of the multi-wavelength chirped pulse sequence in the step S1 is as follows:
the ultra-short pulse laser emits parallel light pulses, the pulses are dispersed through a first diffraction grating, collimated into one-dimensional spectral lines on a digital micro-mirror device of a back focal plane through a first convex lens, the digital micro-mirror device is loaded with a binary image to selectively filter the one-dimensional spectral lines, the filtered pulses are combined through a second convex lens and a second diffraction grating and then become parallel light pulses again, and a glass rod expands the time domain of the parallel light pulses to form a multi-wavelength chirped pulse sequence;
the generating process of the multi-wavelength off-axis hologram sequence in the step S2 is as follows:
the pulse sequence is converged by the third convex lens and then is separated into object light and reference light by the spectroscope, the object light is projected on a sample on the front focal plane of the object light after passing through the first microscope objective, and scattered light of the sample is collected again by the first microscope objective and returns to the spectroscope;
the reference light is projected on the inclined first reflecting mirror on the rear focal surface of the second microscope objective lens, and the reference light is reflected by the first reflecting mirror, collected by the second microscope objective lens and returned to the spectroscope;
due to the effect of the spectroscope, returned object light and reference light are transmitted in parallel, reflected by the second reflector and the third reflector and then are injected into the third diffraction grating, sub-pulse objects with different wavelength-time mapping and reference light are separated in the x direction and projected on different positions of a CCD camera on the rear focal plane of the CCD camera through the imaging lens, the sub-pulse objects with the same wavelength-time mapping and the reference light are projected on the same position of the CCD camera at a certain included angle to interfere to form off-axis holograms, and the CCD camera captures a series of discrete off-axis holograms in one exposure time to obtain a multi-wavelength off-axis hologram sequence;
reconstructing an off-axis hologram using a hologram reconstruction algorithm in the step S3:
the corresponding sub-pulse wavelength is lambda i The hologram is expressed as g (x, y) =a (x, y) +c (x, y) exp (j 2 pi f) y x)+c * (x,y)exp(-j2πf y x), wherein a is a direct current component,b is modulation degree, & gt>In order to be a phase of the light, * representing complex conjugate, f y Spatial frequencies for hologram fringes;
fourier transforming G to obtain G (u, v) =a (u, v) +c (u-f) x ,v)+C * (u+f x V) wherein A, C * A, c respectively * Is a fourier transform of (C) using a low pass filter x V) filtering and moving to the origin of frequency domain to obtain C, performing inverse Fourier transform to obtain C, and calculating the phase asimag represents the imaginary part, real represents the real part, and the optical thickness of the sample is calculated after two-dimensional unwrapping the phase: />
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