CN114622271A - Water-removing and oxygen-removing system of small-sized tube furnace - Google Patents
Water-removing and oxygen-removing system of small-sized tube furnace Download PDFInfo
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- CN114622271A CN114622271A CN202210124126.4A CN202210124126A CN114622271A CN 114622271 A CN114622271 A CN 114622271A CN 202210124126 A CN202210124126 A CN 202210124126A CN 114622271 A CN114622271 A CN 114622271A
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- tube furnace
- water
- oxygen
- crystal growth
- air inlet
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- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
- C30B15/20—Controlling or regulating
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
- F27B17/00—Furnaces of a kind not covered by any preceding group
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
The utility model discloses a water removal and oxygen removal system of a small-sized tube furnace, which comprises a water removal and oxygen removal box and a crystal growth mechanism, wherein the water removal and oxygen removal box is hollow inside, a controller is arranged at the upper part of an inner cavity of the water removal and oxygen removal box, and a purification and circulation mechanism is also arranged in the inner cavity of the water removal and oxygen removal box; purify circulation mechanism and include on the diapire of dewatering deoxidization incasement fixed mounting's circulating fan and regeneration bucket, through connection has the circulating fan intake pipe on circulating fan's the air inlet, and the circulating fan intake pipe extends to the outside and link up the lateral wall of dewatering deoxidization case and extends to dewatering deoxidization incasement exocoel, regeneration bucket is given vent to anger and is served and to link up and be connected with the regeneration bucket outlet duct. The utility model has novel design and compact structure, greatly improves the quality and speed of crystal growth, greatly ensures the good gas atmosphere of crystal growth, fills the technical blank of removing water and oxygen in a small-sized tubular furnace, and greatly improves the experimental capability of the domestic crystal growth experiment.
Description
Technical Field
The utility model relates to the technical field of crystal growth auxiliary equipment, in particular to a water removing and oxygen removing system of a small-sized tube furnace.
Background
The single crystal can be grown from solid, liquid or gas state in principle, in practice, most of the artificial crystal is obtained from melt to reach certain supercooling or solution to reach certain supersaturation, the crystal synthesis can be carried out by using a crystal pulling method, a tube furnace is mostly used for heating in the crystal synthesis process, and in order to ensure the good gas atmosphere of the crystal growth, the gas in the tube furnace needs to be removed with water and oxygen.
Through the retrieval, application number CN 201821985326.4's patent discloses a crystal growth stove gas supply system, including liquid nitrogen cylinder, liquid oxygen jar, first vaporizer, second vaporizer, first outlet valve, second outlet valve, first check valve, second check valve, first flowmeter and second flowmeter, liquid nitrogen cylinder, first outlet valve, first check valve and first vaporizer concatenate in order, the gas vent of first vaporizer communicates through the air inlet of connecting pipe and crystal growth stove, be equipped with first flowmeter on the connecting pipe between first vaporizer and the crystal growth stove, liquid oxygen cylinder, second outlet valve, second check valve and second vaporizer concatenate in order, the gas vent of second vaporizer communicates through the air inlet of connecting pipe and crystal growth stove, is equipped with the second flowmeter on the connecting pipe between second vaporizer and the crystal growth stove. The utility model can accurately control the proportion of nitrogen and oxygen, ensures that the proportion of nitrogen and oxygen fed into the crystal growth furnace meets the requirement, and is beneficial to finishing annealing in the furnace.
The device can not satisfy the dewatering and deoxidizing requirements of small-sized tube furnaces, can not effectively adjust the atmosphere of the crystal growth environment, can not monitor and control the crystal growth atmosphere, and can not ensure the growth speed and quality of the crystal.
Disclosure of Invention
The utility model aims to solve the defects that the water removal and oxygen removal requirements of a small-sized tube furnace cannot be met, the atmosphere of the crystal growth environment cannot be effectively regulated, the crystal growth atmosphere cannot be monitored and controlled, and the growth speed and quality of the crystal cannot be guaranteed in the prior art.
In order to achieve the purpose, the utility model adopts the following technical scheme:
the small-sized tube furnace water removal and oxygen removal system comprises a water removal and oxygen removal box and a crystal growth mechanism, wherein the water removal and oxygen removal box is hollow inside, a controller is arranged at the upper part of an inner cavity of the water removal and oxygen removal box, and a purification and circulation mechanism is also arranged in the inner cavity of the water removal and oxygen removal box; the purification and circulation mechanism comprises a circulating fan and a regeneration barrel which are fixedly installed on the inner bottom wall of the water removal and oxygen removal box, a circulating fan air inlet pipe is connected to the air inlet end of the circulating fan in a penetrating manner, the circulating fan air inlet pipe extends outwards to penetrate through the side wall of the water removal and oxygen removal box and extends to the outer cavity of the water removal and oxygen removal box, a regeneration barrel air outlet pipe is connected to the air outlet end of the regeneration barrel in a penetrating manner, the regeneration barrel air outlet pipe extends outwards to penetrate through the side wall of the water removal and oxygen removal box and extends to the outer cavity of the water removal and oxygen removal box, and a middle air pipe is connected between the air outlet end of the circulating fan and the air inlet end of the regeneration barrel in a penetrating manner; the crystal growth mechanism comprises a crystal growth furnace, a tubular furnace is fixedly mounted in a crystal growth furnace shell through a direct support, the tubular furnace is of a sealing structure capable of being opened and closed, the upper end of the tubular furnace is connected with a tubular furnace air inlet pipe in a through mode, the other end of the tubular furnace air inlet pipe is connected with a regeneration barrel air outlet pipe in a through mode through a corrugated pipe, the lower end of the tubular furnace is connected with a tubular furnace air outlet pipe in a through mode, and the other end of the tubular furnace air outlet pipe is connected with a circulating fan air inlet pipe in a through mode through a corrugated pipe.
Preferably, a pulling assembly and a rotating assembly are further arranged in the crystal growing furnace, and the pulling assembly and the rotating assembly are both in through connection with the upper end of the tube furnace.
Preferably, the joints among the middle air pipe, the air inlet pipe of the circulating fan, the air outlet pipe of the regeneration barrel, the air inlet pipe of the tube furnace, the air outlet pipe of the tube furnace and the corrugated pipe are all connected in a sealing and through manner by KF25 flanges.
Preferably, a temperature control box is arranged in the crystal growing furnace corresponding to the lower position of the tube furnace.
Preferably, a moisture analyzer is arranged on the middle air pipe.
Preferably, an oxygen analyzer is arranged on the air inlet pipe of the tube furnace.
Preferably, a pressure sensor is further arranged on the air inlet pipe of the tube furnace.
Compared with the prior art, the utility model has the beneficial effects that:
1. the utility model can meet the sintering of most metal and non-metal materials, can also be suitable for the growth experiment of metal material crystals, and fills the blank of the domestic crystal experiment field aiming at the water removal and oxygen removal technology of a small-sized tubular furnace;
2. according to the utility model, the atmosphere pressure in the tube furnace is monitored by the pressure sensor, so that various normal pressure, micro-positive pressure and micro-negative pressure environment experiments can be satisfied, and a good atmosphere for crystal growth is maintained by matching with a moisture analyzer and an oxygen analyzer;
3. according to the utility model, the atmosphere gas generated by crystal growth is purified by the regeneration barrel, and the atmosphere purification material in the regeneration barrel can be repeatedly regenerated, so that the good atmosphere purification function of the regeneration barrel is ensured.
The utility model has novel design and compact structure, greatly improves the quality and speed of crystal growth, greatly ensures the good gas atmosphere of crystal growth, fills the technical blank of removing water and oxygen in a small-sized tubular furnace, and greatly improves the experimental capability of the domestic crystal growth experiment.
Drawings
FIG. 1 is a schematic view of the appearance and structure of a small-sized tube furnace water-removing and oxygen-removing system provided by the utility model;
FIG. 2 is a schematic structural diagram of a water-removing and oxygen-removing tank of a small-sized tube furnace water-removing and oxygen-removing system provided by the utility model;
FIG. 3 is a schematic structural diagram of a crystal growing furnace of the small-sized tube furnace water-removing and oxygen-removing system provided by the utility model.
In the figure: the device comprises a water removing and oxygen removing box 1, a control machine 2, a purification circulating mechanism 3, a circulating fan 31, a regeneration barrel 32, an intermediate air pipe 33, a moisture analyzer 331, a circulating fan air inlet pipe 34, a regeneration barrel air outlet pipe 35, a crystal growth mechanism 4, a crystal growth furnace 41, a tube furnace 42, a lifting component 43, a rotating component 44, a tube furnace air inlet pipe 45, an oxygen analyzer 451, a pressure sensor 452, a tube furnace air outlet pipe 46 and a temperature control box 5.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments.
In the description of the present invention, it is to be understood that the terms "upper", "lower", "front", "rear", "left", "right", "top", "bottom", "inner", "outer", and the like, are used in the orientations and positional relationships indicated in the drawings, which are based on the orientations and positional relationships indicated in the drawings, and are used for convenience of description and simplicity of description, but do not indicate or imply that the devices or elements referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus, are not to be construed as limiting the present invention.
Example one
Referring to fig. 1-3, the small tube furnace water and oxygen removal system comprises a water and oxygen removal box 1 and a crystal growth mechanism 4, wherein the crystal growth mechanism 4 is used for crystal growth, the water and oxygen removal box 1 is hollow inside, a controller 2 is arranged at the upper part of an inner cavity of the water and oxygen removal box 1 and used for adjusting the system, and a purification and circulation mechanism 3 is also arranged in the inner cavity of the water and oxygen removal box 1 and used for purifying the atmosphere in the crystal growth; purifying cycle mechanism 3 includes that the diapire goes up fixed mounting's circulating fan 31 and regeneration bucket 32 in the dewatering deoxidization case 1, regeneration bucket 32 intussuseption is filled with gaseous purifying material to can relapse gaseous purifying material to in the regeneration bucket 32 and do regeneration treatment many times, guarantee the good atmosphere purification performance of regeneration bucket, through connection has circulating fan intake pipe 34 on circulating fan 31's the inlet end, and circulating fan intake pipe 34 extends to the outside and link up the lateral wall of dewatering deoxidization case 1 and extends to dewatering deoxidization case 1 exocoel, through connection has regeneration bucket outlet duct 35 on regeneration bucket 32's the outlet end, and regeneration bucket outlet duct 35 extends to the outside and link up the lateral wall of dewatering deoxidization case 1 and extends to dewatering deoxidization case 1 exocoel, and through connection has middle 33 between circulating fan 31's the tuber pipe of giving vent to anger and regeneration bucket 32's the inlet end, takes out the atmosphere gas of crystal growth through circulating fan 31 and gets into the circulation, and purifying the atmosphere gas of crystal growth by matching with a regeneration barrel 32; the crystal growth mechanism 4 comprises a crystal growth furnace 41, a tubular furnace 42 is fixedly mounted in the crystal growth furnace shell 41 through a direct support, the tubular furnace 42 is of a sealing structure capable of being opened and closed, a tubular furnace air inlet pipe 45 is connected to the upper end of the tubular furnace 42 in a penetrating manner, the other end of the tubular furnace air inlet pipe 45 is connected with a regeneration barrel air outlet pipe 35 in a penetrating manner through a corrugated pipe, a tubular furnace air outlet pipe 46 is connected to the lower end of the tubular furnace 42 in a penetrating manner, the other end of the tubular furnace air outlet pipe 46 is connected with a circulating fan air inlet pipe 34 in a penetrating manner through a corrugated pipe, a material is heated through the tubular furnace 42, and the circulating fan 31 and the regeneration barrel 32 are matched to purify gas in the tubular furnace 42, so that a good environment for crystal growth is guaranteed.
In this embodiment, as shown in fig. 1 to 3, a pulling assembly 43 and a rotating assembly 44 are further disposed in the crystal growth furnace 41, and both the pulling assembly 43 and the rotating assembly 44 are connected to the upper end of the tube furnace 42 in a penetrating manner, so that the crystal is pulled by the pulling assembly 43 and the rotating assembly 44, and the crystal pulling method is used to ensure the speed and quality of crystal growth.
In this embodiment, as shown in fig. 1 to 3, the joints between the intermediate air pipe 33, the air inlet pipe 34 of the circulating fan, the air outlet pipe 35 of the regeneration barrel, the air inlet pipe 45 of the tube furnace, the air outlet pipe 46 of the tube furnace and the bellows are all connected by a KF25 flange seal through connection, so as to seal the connecting pipeline and ensure the use effect of the water and oxygen removal system.
In this embodiment, when crystal growth is performed, the tube furnace 32 is vacuumized, high-purity argon is used for supplying gas, and gas washing is performed for multiple times, the circulating fan 31 and the regeneration barrel 32 are controlled by the cooperation control machine 2, the circulating fan 31 is used for extracting and circulating the atmosphere gas in the tube furnace 32, the regeneration barrel 32 is used for purifying moisture and oxygen in the atmosphere gas so as to ensure a good gas atmosphere for crystal growth, the crystal growth material is heated by the tube furnace 32, and the pulling component 43 and the rotating component 44 are used for assisting the growth of the crystal, so that the growth effect of the crystal is ensured.
Example two
Referring to fig. 1 and 3, in this embodiment, basically the same as the first embodiment, it is more preferable that a temperature control box 5 is disposed in the crystal growth furnace 41 at a position below the tube furnace 42, and the temperature control box 5 is electrically connected to a temperature sensor disposed in the tube furnace 42 to monitor the temperature of the tube furnace 42 in real time, so as to maintain the temperature of the tube furnace 42 in a state suitable for crystal growth.
EXAMPLE III
Referring to fig. 1 and 2, in this embodiment, basically the same as the first embodiment, it is more preferable that a moisture analyzer 331 is disposed on the intermediate air duct 33, and is used for monitoring and analyzing the crystal growth atmosphere gas pumped by the circulating fan 31, so as to conveniently adjust the crystal growth atmosphere.
In this embodiment, as shown in fig. 1 and 3, an oxygen analyzer 451 is disposed on the inlet pipe 45 of the tube furnace to monitor the oxygen content in the gas fed into the tube furnace 42 and adjust the regeneration tank 32 at any time.
In this embodiment, as shown in fig. 1 and 3, a pressure sensor 452 is further disposed on the air inlet pipe 45 of the tube furnace, and is used for monitoring the atmospheric pressure of crystal growth and adjusting the air pressure in the tube furnace 42 at any time.
The above description is only for the preferred embodiment of the present invention, but the scope of the present invention is not limited thereto, and any person skilled in the art should be considered to be within the technical scope of the present invention, and the technical solutions and the inventive concepts thereof according to the present invention should be equivalent or changed within the scope of the present invention.
Claims (7)
1. The small-sized tube furnace water and oxygen removal system comprises a water and oxygen removal box (1) and a crystal growth mechanism (4), and is characterized in that the water and oxygen removal box (1) is hollow, a controller (2) is arranged at the upper part of an inner cavity of the water and oxygen removal box (1), and a purification and circulation mechanism (3) is also arranged in the inner cavity of the water and oxygen removal box (1);
the purification and circulation mechanism (3) comprises a circulating fan (31) and a regeneration barrel (32) which are fixedly installed on the inner bottom wall of the water removal and oxygen removal box (1), the air inlet end of the circulating fan (31) is connected with a circulating fan air inlet pipe (34) in a through mode, the circulating fan air inlet pipe (34) extends outwards to penetrate through the side wall of the water removal and oxygen removal box (1) and extend to the outer cavity of the water removal and oxygen removal box (1), the air outlet end of the regeneration barrel (32) is connected with a regeneration barrel air outlet pipe (35) in a through mode, the regeneration air outlet pipe barrel (35) extends outwards to penetrate through the side wall of the water removal and oxygen removal box (1) and extend to the outer cavity of the water removal and oxygen removal box (1), and a middle air pipe (33) is connected between the air outlet end of the circulating fan (31) and the air inlet end of the regeneration barrel (32) in a through mode;
the crystal growth mechanism (4) comprises a crystal growth furnace (41), a tube furnace (42) is fixedly installed in a crystal growth furnace shell (41) through a direct support, the tube furnace (42) is of a sealing structure capable of being opened and closed, a tube furnace air inlet pipe (45) is connected to the upper end of the tube furnace (42) in a penetrating mode, the other end of the tube furnace air inlet pipe (45) is connected with a regeneration barrel air outlet pipe (35) in a penetrating mode through a corrugated pipe, a tube furnace air outlet pipe (46) is connected to the lower end of the tube furnace (42) in a penetrating mode, and the other end of the tube furnace air outlet pipe (46) is connected with a circulating fan air inlet pipe (34) in a penetrating mode through the corrugated pipe.
2. The small-sized tube furnace water and oxygen removing system as recited in claim 1, characterized in that a pulling assembly (43) and a rotating assembly (44) are further arranged in the crystal growth furnace (41), and the pulling assembly (43) and the rotating assembly (44) are both communicated with the upper end of the tube furnace (42).
3. The small-sized tube furnace water and oxygen removing system according to claim 1, wherein the joints of the intermediate air pipe (33), the circulating fan air inlet pipe (34), the regeneration barrel air outlet pipe (35), the tube furnace air inlet pipe (45), the tube furnace air outlet pipe (46) and the corrugated pipe are all connected in a sealing and penetrating manner by using KF25 flanges.
4. The small-sized tube furnace water and oxygen removing system as claimed in claim 1, wherein a temperature control box (5) is arranged in the crystal growth furnace (41) corresponding to the lower position of the tube furnace (42).
5. The small tube furnace water and oxygen removing system according to claim 1, wherein a moisture analyzer (331) is provided on the intermediate air duct (33).
6. The small tube furnace water and oxygen removal system according to claim 1, wherein an oxygen analyzer (451) is arranged on the tube furnace air inlet pipe (45).
7. The small tube furnace water and oxygen removal system according to claim 1, wherein a pressure sensor (452) is further arranged on the tube furnace air inlet pipe (45).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210124126.4A CN114622271A (en) | 2022-02-10 | 2022-02-10 | Water-removing and oxygen-removing system of small-sized tube furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210124126.4A CN114622271A (en) | 2022-02-10 | 2022-02-10 | Water-removing and oxygen-removing system of small-sized tube furnace |
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| Publication Number | Publication Date |
|---|---|
| CN114622271A true CN114622271A (en) | 2022-06-14 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202210124126.4A Pending CN114622271A (en) | 2022-02-10 | 2022-02-10 | Water-removing and oxygen-removing system of small-sized tube furnace |
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| CN (1) | CN114622271A (en) |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH1046236A (en) * | 1996-07-29 | 1998-02-17 | Nichia Chem Ind Ltd | Reducing gas circulating type reducing atmospheric furnace |
| CN103147123A (en) * | 2011-12-07 | 2013-06-12 | 国家纳米科学中心 | Micron-sized organic micromolecule single-crystal material and preparation method thereof |
| CN105014691A (en) * | 2015-07-08 | 2015-11-04 | 威格气体纯化科技（苏州）股份有限公司 | Integrated glove box |
| CN113550009A (en) * | 2021-07-27 | 2021-10-26 | 河北天达晶阳半导体技术股份有限公司 | Method and device for growing high-purity silicon carbide single crystal |
-
2022
- 2022-02-10 CN CN202210124126.4A patent/CN114622271A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH1046236A (en) * | 1996-07-29 | 1998-02-17 | Nichia Chem Ind Ltd | Reducing gas circulating type reducing atmospheric furnace |
| CN103147123A (en) * | 2011-12-07 | 2013-06-12 | 国家纳米科学中心 | Micron-sized organic micromolecule single-crystal material and preparation method thereof |
| CN105014691A (en) * | 2015-07-08 | 2015-11-04 | 威格气体纯化科技（苏州）股份有限公司 | Integrated glove box |
| CN113550009A (en) * | 2021-07-27 | 2021-10-26 | 河北天达晶阳半导体技术股份有限公司 | Method and device for growing high-purity silicon carbide single crystal |
Non-Patent Citations (1)
| Title |
|---|
| 孟广耀等编著: "《新型材料大观》", 安徽教育出版社, pages: 73 * |
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