CN114622171B

CN114622171B - Tube target manufacturing device and tube target manufacturing method

Info

Publication number: CN114622171B
Application number: CN202011463754.2A
Authority: CN
Inventors: 张佼; 王玉杰; 东青; 孙宝德; 姜海涛
Original assignee: Kunshan Crystalline New Materials Research Institute Co ltd; Shanghai Jiaotong University
Current assignee: Kunshan Crystalline New Materials Research Institute Co ltd; Shanghai Jiaotong University
Priority date: 2020-12-10
Filing date: 2020-12-10
Publication date: 2023-04-07
Anticipated expiration: 2040-12-10
Also published as: CN114622171A

Abstract

The present application relates to a tube target manufacturing apparatus and a tube target manufacturing method, the tube target manufacturing apparatus of the present application includes: the device comprises a traction module, a crystallization module and a spraying module, wherein the traction module comprises a mandrel, a mandrel lifting mechanism and a forming platform; the crystallization module comprises a fixed crystallization tube and a crystallization tube fixing support, and the fixed crystallization tube is sleeved outside the mandrel; the spraying module comprises a crucible and a crucible rotating mechanism, at least one nozzle is arranged on the crucible, and the crucible is of an annular structure and is sleeved outside the mandrel; wherein, the spray direction of the nozzle faces the forming platform, and the outer surface of the mandrel, the inner surface of the fixed crystallization tube and the forming platform form a forming space for forming. According to the method, the raw materials can be sprayed out from the rotating crucible in a 3D printing mode, and are cooled and solidified on the non-rotating forming platform, so that the metal casting mode and the casting equipment are changed, the quality of the manufactured tube target is improved, the manufactured tube target is uniform in component, the crystal grains are refined, and the macro segregation is eliminated.

Description

Tube target manufacturing device and tube target manufacturing method

Technical Field

The application relates to the technical field of metal processing, in particular to a tube target manufacturing device and a tube target manufacturing method.

Background

Tube targets, or cylindrical hollow bodies, are common parts on machines. The material is generally metal.

In the prior art, a solid metal rod is cast and forged into a cylindrical blank, and then the cylindrical blank is manufactured into a metal tube target through a cutting process or an undercutting process, so that the method has quite low material utilization rate and requires much cutting work; the metal tube target can also be obtained by extrusion casting and then machining the inner and outer diameters, but the metal tube is not suitable in texture because the metal tube is slowly coagulated during extrusion casting to generate coarse particles. The metal tube target can also be made by spray forming techniques, but causes overspray of the sprayed droplets, especially when the diameter of the metal tube is small, a considerable part of the spray can not contact the deposition surface at all, so that much metal spray is wasted, the yield is low, the structure is loose, and more pores exist.

Therefore, how to improve the tube target manufacturing device and the tube target manufacturing method becomes a problem to be solved urgently.

Disclosure of Invention

An object of the present application is to provide a tube target manufacturing apparatus and a tube target manufacturing method, which can improve the quality of a manufactured tube target.

In order to achieve the above-mentioned object,

in a first aspect, the present application provides a tube target manufacturing apparatus comprising: the device comprises a traction module, a crystallization module and a spraying module, wherein the traction module comprises a mandrel, a mandrel lifting mechanism and a forming platform, the mandrel lifting mechanism is in transmission connection with the mandrel and is used for driving the mandrel to lift, and the forming platform is fixedly connected with the mandrel; the crystallization module comprises a fixed crystallization tube and a crystallization tube fixing support, the crystallization tube fixing support is connected with the fixed crystallization tube and used for fixing the fixed crystallization tube, and the fixed crystallization tube is sleeved outside the mandrel; the spraying module comprises a crucible and a crucible rotating mechanism, the crucible rotating mechanism is in transmission connection with the crucible and is used for driving the crucible to rotate, at least one nozzle is arranged on the crucible, and the crucible is of an annular structure and is sleeved outside the mandrel; wherein, the spraying direction of the nozzle faces to the forming platform, and the outer surface of the mandrel, the inner surface of the fixed crystallization tube and the forming platform form a forming space for forming.

In one embodiment, the tube target manufacturing apparatus further includes: the cooling module, the cooling module includes first cooling component, second cooling component and third cooling component, the dabber is hollow structure, the third cooling component is located the internal surface of dabber just is close to the shaping platform sets up, first cooling component is located fixed crystallization pipe, the second cooling component is located the shaping platform.

In one embodiment, the tube target manufacturing apparatus further includes: the preheating module comprises a preheating mechanism and a preheating mechanism fixing support, the preheating mechanism fixing support is connected with the preheating mechanism and used for enabling the preheating mechanism to be fixed, and the preheating mechanism is arranged outside the mandrel and used for heating the mandrel.

In one embodiment, the preheating mechanism includes: the heat conduction pipe is sleeved outside the mandrel; the first heating element is arranged on the outer surface of the heat conduction pipe.

In an embodiment, the preheating mechanism further includes an electrolytic cotton cloth layer disposed on the inner surface of the heat conducting pipe.

In one embodiment, the crucible has a ring structure, and has a storage cavity for storing a material and a first through hole for the mandrel to pass through.

In one embodiment, the crucible rotating mechanism includes: the rotating platform is fixedly connected with the crucible, and at least one nozzle hole corresponding to the nozzle and a second through hole for the core shaft to pass through are formed in the rotating platform; the driving piece is in transmission connection with the rotating platform and used for driving the rotating platform to rotate.

In an embodiment, the crucible comprises a first body having a first half-port and a first cavity and a second body having a second half-port and a second cavity, wherein the first half-port and the second half-port are matched to form the first through-hole, and the first cavity and the second cavity constitute the storage cavity.

In one embodiment, the injection module further comprises: the crucible heating element is arranged on the outer surface of the crucible; the crucible temperature measuring element is arranged in the storage cavity; the crucible is arranged in the outer cavity; the vacuumizing element is connected with the outer chamber; a pressure regulating element is connected to the outer chamber.

In one embodiment, the traction module further comprises: and the guide supporting seat is provided with a fourth through hole for the core shaft to pass through.

In one embodiment, the crystallization module further includes: and the temperature measuring element of the crystallization tube is arranged in the forming space.

In a second aspect, the present application provides a method of manufacturing a tube target, comprising:

introducing a raw material into a crucible, and enabling the crucible to be in a preset environment;

rotating a crucible, and continuously spraying the raw materials into a forming space formed by a mandrel, a forming platform and a fixed crystallization tube through a nozzle on the crucible, wherein the raw materials are accumulated in the forming space to form a molten pool;

and after part or all of the molten pool is solidified on the forming platform and the forming platform to form a solid phase, moving the forming platform to a preset direction to prepare the tube target fixed on the mandrel.

In one embodiment, after the forming platform is moved in a predetermined direction to produce the tube target fixed on the mandrel after part or all of the molten pool solidifies to form a solid phase on the forming platform and the forming platform, the method includes:

separating the mandrel from the forming platform and separating the tube target from the mandrel.

separating the mandrel from the forming platform, and the tube target is not separated from the mandrel.

Compared with the prior art, the beneficial effect of this application is:

according to the method, the raw materials can be sprayed out from the rotating crucible in a 3D printing mode, and are cooled and solidified on the non-rotating forming platform, so that the metal casting mode and the casting equipment are changed, the quality of the manufactured tube target is improved, the manufactured tube target is uniform in component, grains are refined, macro segregation is eliminated, and the high-performance tube target is prepared.

Drawings

To more clearly illustrate the technical solutions of the embodiments of the present application, the drawings needed in the embodiments will be briefly described below, it should be understood that the following drawings only illustrate some embodiments of the present application and therefore should not be considered as limiting the scope, and those skilled in the art can also obtain other related drawings based on the drawings without inventive efforts.

Fig. 1 is a schematic structural view of a tube target manufacturing apparatus according to an embodiment of the present application.

Fig. 2 is a schematic structural diagram of a tube target manufacturing apparatus according to an embodiment of the present application.

Fig. 3 is a schematic partial structural view of a tube target manufacturing apparatus according to an embodiment of the present application.

Fig. 4 is a schematic structural view of a crucible according to an embodiment of the present application.

Fig. 5 is a schematic partial structural view of a tube target manufacturing apparatus according to an embodiment of the present application.

Fig. 6 is a schematic flow chart of a tube target manufacturing method according to an embodiment of the present application.

An icon: 9-a tube target manufacturing apparatus; 100-a traction module; 110-a mandrel; 120-mandrel lifting mechanism; 130-mandrel temperature measuring element; 140-a forming platform; 150-guiding the supporting seat; 200-a crystallization module; 210-fixing the crystallization tube; 220-a crystallization tube fixing bracket; 230-crystallization tube temperature measurement element; 300-a spray module; 310-a crucible; 311-a first crucible body; 312-a second crucible body; 313-a first half-hole; 314-a second half-hole; 315-a first cavity; 316-a second cavity; 320-a crucible rotation mechanism; 321-a rotating platform; 322-nozzle hole; 323-a drive member; 330-a nozzle; 331-nozzle valve; 340-a gas pressure detecting element; 360-crucible heating element; 370-crucible temperature element; 380-an outer chamber; 391-evacuation elements; 392-a voltage regulating element; 400-a molding space; 500-a cooling module; 510-a first cooling element; 520-a second cooling element; 530-a third temperature reducing element; 600-a preheating module; 610-a preheating mechanism; 620-preheating mechanism fixing support; 611-heat conducting pipes; 612-a first heating element; 613-electrolytic cotton cloth layer.

Detailed Description

In order to make the objects, technical solutions and advantages of the embodiments of the present application clearer, the technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application. It is to be understood that the embodiments described are only a few embodiments of the present application and not all embodiments. The components of the embodiments of the present application, generally described and illustrated in the figures herein, can be arranged and designed in a wide variety of different configurations.

In the description of the present application, it should be noted that the terms "inside", "outside", and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings or orientations or positional relationships that the products of the application usually place when using, and are only used for convenience in describing the present application and simplifying the description, but do not indicate or imply that the devices or elements that are referred to must have a specific orientation, be constructed in a specific orientation, and operate, and thus, should not be construed as limiting the present application. Furthermore, the terms "first," "second," and the like are used solely to distinguish one from another, and are not to be construed as indicating or implying relative importance.

In the description of the present application, it should also be noted that, unless expressly stated or limited otherwise, the terms "disposed" and "connected" are to be construed broadly, and may for example be fixedly connected, detachably connected, or integrally connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in this application will be understood to be a specific case for those of ordinary skill in the art.

Fig. 1 is a schematic structural diagram of a tube target manufacturing apparatus 9 according to an embodiment of the present application. The tube target manufacturing apparatus 9 includes: a traction module 100, an injection module 300, a preheating module 600, a cooling module 500, and a crystallization module 200.

The traction module 100 includes a mandrel 110, a mandrel lifting mechanism 120 and a forming platform 140, the mandrel lifting mechanism 120 may include a guide rail, a hydraulic cylinder, an air cylinder or a motor, the mandrel lifting mechanism 120 is in transmission connection with the mandrel 110 for driving the mandrel 110 to lift, and the forming platform 140 is fixedly connected with the mandrel 110. The fixing method of the forming platform 140 and the mandrel 110 may be welding, screw connection, insertion, clamping, etc.

The spraying module 300 comprises a crucible 310 and a crucible rotating mechanism 320, the crucible rotating mechanism 320 may comprise a motor, a gear, and the like, and is in transmission connection with the crucible 310 for driving the crucible 310 to rotate, at least one nozzle 330 is arranged on the crucible 310, and the spraying direction of the nozzle 330 faces the forming platform 140. In this embodiment, the crucible 310 is disposed above the forming platform 140, and the spraying direction of the nozzle 330 is downward.

The crystallization module 200 comprises a fixed crystallization tube 210 and a crystallization tube fixing bracket 220, wherein the crystallization tube fixing bracket 220 is connected to the fixed crystallization tube 210 for fixing the fixed crystallization tube 210, and the fixed crystallization tube 210 is sleeved outside the mandrel 110. The axis of the crucible 310, the axis of the mandrel 110, and the axis of the fixed crystallization tube 210 are disposed in a manner overlapping, and the region surrounded by the outer surface of the mandrel 110, the inner surface of the fixed crystallization tube 210, and the forming platform 140 is a forming space 400 for forming.

The cooling module 500 (refer to fig. 2) includes a first cooling element 510, a second cooling element 520, and a third cooling element 530, the mandrel 110 is a hollow structure (tubular structure), the third cooling element 530 is disposed on the inner surface of the mandrel 110 and is close to the forming platform 140, the first cooling element 510 is disposed on the fixed crystallization tube 210, and the second cooling element 520 is disposed on the forming platform 140. The first temperature reduction element 510, the second temperature reduction element 520, and the third temperature reduction element 530 may be a circulating cooling water system or an air cooling system, and are used to cool the material in the molding space 400, so that the solidification process thereof may be accelerated.

The preheating module 600 comprises a preheating mechanism 610 and a preheating mechanism fixing support 620, the preheating mechanism fixing support 620 is connected with the preheating mechanism 610 and used for fixing the preheating mechanism 610, and the preheating mechanism 610 is arranged outside the mandrel 110 and used for heating the mandrel 110.

In an operation process, the mandrel 110 and the forming platform 140 move vertically downward under the action of the mandrel lifting mechanism 120, and when the mandrel 110 moves vertically downward to a designated position, the preheating mechanism 610 around the mandrel 110 preheats the mandrel 110. The crucible rotating mechanism 320 drives the crucible 310 to rotate, the nozzle 330 of the crucible 310 sprays molten metal to the forming space 400, and the molten metal in the forming space 400 is rapidly cooled and solidified on the outer layer of the tube target outside the mandrel 110 under the combined action of the first cooling element 510, the second cooling element 520 and the third cooling element 530.

In one embodiment, the outer layer of the tube target manufactured by the tube target manufacturing apparatus 9 is different from the core shaft 110, i.e. the thermal expansion coefficient is greatly different, so that after the outer layer of the tube target is cooled and solidified, the core shaft 110 and the outer layer of the tube target have a distinct interface, and the outer layer of the tube target can be taken out by core stripping. In another embodiment, the material of the outer layer of the tube target manufactured by the tube target manufacturing apparatus 9 is similar to that of the mandrel 110, that is, the difference of the thermal expansion coefficients is small, so that after the outer layer of the tube target is cooled and solidified, the mandrel 110 and the outer layer of the tube target do not have an obvious interface, and the core does not need to be removed, and the hollow mandrel 110 and the outer layer of the tube target can form the bimetal tube target.

According to the method, the raw materials can be sprayed out from the rotating crucible 310 in a 3D printing mode, and are cooled and solidified on the non-rotating forming platform 140, so that the metal casting mode and the casting equipment are changed, the quality of the manufactured tube target is improved, the manufactured tube target is uniform in components, the grains are refined, the macrosegregation is eliminated, and the high-performance tube target is prepared.

In order to accelerate the forming speed and improve the forming quality of the tube target, the crucible 310 is of a ring structure and is sleeved outside the mandrel 110, and the inner diameter of the crucible 310 is larger than the outer diameter of the finally formed tube target. And the nozzles 330 are provided in plurality and distributed in a circumferential array around the axis of the crucible 310. The material of the fixed crystal tube 210 and the molding plate may be a material with good thermal conductivity, such as copper.

When the tube target manufacturing apparatus 9 is automatically controlled, the tube target manufacturing apparatus 9 further includes a control host, and the control host is electrically connected to the injection module 300, the crystallization module 200, the traction module 100, the preheating module 600, and the cooling module 500 for control. The control host comprises electronic devices such as a human-computer interaction interface, a processor, a transceiver, a microcontroller and the like.

Fig. 2 is a schematic structural diagram of a tube target manufacturing apparatus 9 according to an embodiment of the present application. The preheating mechanism 610 includes: a heat conducting pipe 611 and a first heating element 612, wherein the heat conducting pipe 611 is sleeved outside the mandrel 110; the first heating element 612 is disposed on an outer surface of the heat conductive pipe 611. The heat conductive pipes 611 may be made of ceramic. First heating element 612 may be an electrical coil wrapped outside heat pipe 611. The preheating mechanism 610 is provided above the crucible 310.

The preheating mechanism 610 further includes an electrolytic cotton cloth layer 613, and the electrolytic cotton cloth layer 613 is disposed on the inner surface of the heat pipe 611 for heat preservation. The electrolytic cotton cloth layer 613 may be provided or not provided.

The traction module 100 further comprises: the guide support seat 150 is provided with a fourth through hole for the core shaft 110 to pass through on the guide support seat 150. The guiding support 150 is disposed above the preheating mechanism 610.

The injection module 300 further includes: the crucible heating element 360, the crucible temperature measuring element 370, the outer chamber 380, the vacuumizing element 391 and the pressure regulating element 392, wherein the crucible heating element 360 is arranged on the outer surface of the crucible 310; the crucible temperature measuring element 370 is arranged in the storage cavity of the crucible 310; the crucible 310 is disposed within the outer chamber 380; the vacuumizing element 391 is connected with the outer chamber 380, and the vacuumizing element 391 may include a vacuum pump and other components for vacuumizing the outer chamber 380; the pressure regulating element 392 is connected to the outer chamber 380, and the pressure regulating element 392 may include a gas pipe, a gas cylinder, etc. for regulating the pressure by supplying an inert gas to the outer chamber 380. The outer chamber 380 is shaped to correspond to the crucible 310, and has a cavity for storing the crucible 310 and gas, a nozzle hole through which the nozzle 330 passes, and a through hole through which the mandrel 110 passes.

In this embodiment, the outer chamber 380 is provided with an air pressure detecting element 340 such as an air pressure gauge or an air pressure sensor for detecting the air pressure of the outer chamber 380.

In this embodiment, a mandrel temperature measuring element 130 is disposed below the preheating module 600 and is used for detecting the temperature of the mandrel 110 preheated by the preheating module 600. The mandrel temperature sensing element 130 may be an infrared thermometer.

In this embodiment, a temperature measuring element 230 for a crystal tube is provided in the molding space 400 to detect the temperature of the cast slab or molten metal in the molding space 400. The crystallization tube temperature measuring element 230 may be a temperature sensor or a thermocouple.

Please refer to fig. 3, which is a schematic partial structural diagram of a tube target manufacturing apparatus 9 according to an embodiment of the present application. The crucible rotating mechanism 320 includes: the rotary platform 321 is fixedly connected with the crucible 310, and the rotary platform 321 is provided with at least one nozzle hole 322 corresponding to the nozzle 330 and a second through hole for the mandrel 110 to pass through; the driving member 323 is in transmission connection with the rotating platform 321, and is used for driving the rotating platform 321 to rotate. In one embodiment, nozzle 330 and nozzle hole 322 are tapered holes, the diameter of the inner bore decreasing from top to bottom.

In this embodiment, the outer chamber 380 is an outer housing fixed to the rotary platen 321 and is rotatable with the rotation of the rotary platen 321, and the vacuum pumping member 391 and the pressure regulating member 392 are also directly fixed to the outer surface of the outer chamber 380 and are rotatable with the rotation of the rotary platen 321. In another embodiment, the outer chamber 380 is held in place by a fixed bracket.

Please refer to fig. 4, which is a schematic structural diagram of a crucible 310 according to an embodiment of the present application. The crucible 310 has a ring structure, and has a storage cavity for storing a material and a first through hole for the mandrel 110 to pass through.

The crucible 310 includes a semicircular ring-shaped first crucible body 311 and a semicircular ring-shaped second crucible body 312, and the nozzle 330 is provided in plurality, evenly distributed on the first crucible body 311 and the second crucible body 312. One nozzle valve 331 is provided on one nozzle 330, and all the nozzle valves 331 are a linkage mechanism for controlling all the nozzles 330 to be opened and closed simultaneously.

The first body 311 has a first half-bore 313 and a first cavity 315, and the second body 312 has a second half-bore 314 and a second cavity 316, wherein the first half-bore 313 and the second half-bore 314 are fitted to form a first through-hole, and the first cavity 315 and the second cavity 316 constitute a storage cavity.

Correspondingly, the outer chamber 380 may also have two semicircular annular cavities that store the semicircular annular first body 311 and the semicircular annular second body 312, respectively.

In another embodiment, the forming platform 140 is provided with a leak-proof surrounding edge, which is disposed around the forming platform 140, such that the inner diameter of the leak-proof surrounding edge is equal to the outer diameter of the fixed crystallization tube 210.

Fig. 5 is a schematic partial structural view of a tube target manufacturing apparatus 9 according to an embodiment of the present application. The mandrel 110 is in a circular ring shape, and the third cooling element 530 is a circular tube fixed on the inner surface of the mandrel 110 and surrounding the mandrel 110 for a circle. In another embodiment, the third cooling element 530 is a spiral-shaped tube fixed on the inner surface of the mandrel 110 and surrounding the mandrel 110.

Fig. 6 is a schematic flow chart of a tube target manufacturing method according to an embodiment of the present application. The method can be used in the tube target manufacturing apparatus 9 shown in fig. 1 to 5. Wherein, the method can be used for preparing the tubular core shaft 110 with the thickness of 1-10mm and the length of 1-4 m.

The tube target manufacturing method may include the steps of:

step S101: the raw material is introduced into the crucible 310, and the crucible 310 is placed in a predetermined environment.

The raw materials of this step may be molten metal or non-metal.

The preset environment in this step may be a preset temperature T1 and a preset pressure P1, and the preset pressure P1 may be controlled by the vacuumizing element 391, the pressure regulating element 392 and the pressure detecting element 340, for example, first vacuuming and then filling inert gas. The preset temperature T1 can be controlled by the second heating member and the crucible temperature measuring element 370.

Wherein T1 is 150-250 ℃ higher than the melting point of the raw material, P1 is 0.5-2MPa higher than 1 atmosphere (normal pressure), namely T1= Tm + (150-250) DEG C, and P1=1atm + (0.5-2) MPa. So set up, can realize good metallurgical bonding, the tissue is even tiny, and too high low can influence metallurgical quality.

For example: if T1 is less than Tm + (150-250) DEG C, the liquid metal has high viscosity and poor fluidity and is not easy to print in a liquid state. If P1 is less than 1atm + (0.5-2) MPa, the impact force is insufficient, and the eutectic phase can not be broken, and if P1 is more than 1atm + (0.5-2) MPa, the control of the pressure bearing capacity and the deposition speed of the whole equipment is not facilitated.

And because the temperature difference between the crucible 310 and the mandrel 110 and the pressure difference between the crucible 310 and the forming space 400 can control the deposition forming speed of the composite roll, the pressure of the forming space 400 is 1 atmosphere, and the temperature of the mandrel 110 is related to the preheating module 600, the deposition forming speed of the composite roll can be regulated and controlled by accurately adjusting the temperature of the crucible 310, the temperature of the mandrel 110 and the pressure of the crucible 310.

Step S102: the crucible 310 is rotated while continuously injecting the raw material into the molding space 400 formed by the mandrel 110, the molding platform 140 and the fixed crystallization tube 210 through the nozzle 330 of the crucible 310, and the raw material accumulates in the molding space 400 to form a molten pool.

The rotation speed of the crucible 310 in this step is 50-200r/min.

Step S103: after a part or all of the molten pool is solidified on the forming platform 140 and the forming platform 140 to form a solid phase, the forming platform 140 is moved to a preset direction to manufacture the tube target fixed on the mandrel 110.

In this step, the predetermined direction is downward, and the descending speed of the forming platform 140 is 10-50cm/min. During the movement of the forming table 140, the nozzle 330 is kept in a distance of 5-20cm from the molten surface layer of the bath. The distance is controlled by the speed of the forming platform 140 and the surface temperature of the molten pool molten layer, and too small distance easily causes insufficient cooling of the molten pool molten surface layer temperature and insufficient impact on the melt dendritic crystals. Too large a distance results in a lower temperature of the molten surface layer of the molten pool, which is not favorable for metallurgical bonding.

The surface temperature of the molten layer of the molten pool can be 0.5-0.7 times of the melting point of the raw materials.

In this step, the nozzle 330 may be kept in an open state all the time to perform continuous liquid supply, or the nozzle valve 331 may control the opening or closing of the nozzle 330 to perform intermittent liquid supply.

After step S103, a mold release step may be included.

In one embodiment, the step of demolding comprises: the mandrel 110 is separated from the forming table 140 and the tube target is separated from the mandrel 110. The separation of this step can result in a tube target that does not contain hollow mandrel 110 and a hollow mandrel 110 that does not contain a tube target.

In another embodiment, the step of demolding comprises: the mandrel 110 is separated from the forming table 140 and the tube target is not separated from the mandrel 110. The non-separation of this step is equivalent to plating a layer of dissimilar metal on the hollow mandrel 110 to form a composite tube target comprising the tube target and the mandrel 110, which may have increased wear or corrosion resistance.

It should be noted that the features of the embodiments in the present application may be combined with each other without conflict.

The above description is only a preferred embodiment of the present application and is not intended to limit the present application, and various modifications and changes may be made to the present application by those skilled in the art. Any modification, equivalent replacement, improvement and the like made within the spirit and principle of the present application shall be included in the protection scope of the present application.

Claims

1. A tube target manufacturing apparatus, comprising:

the traction module comprises a mandrel, a mandrel lifting mechanism and a forming platform, the mandrel lifting mechanism is in transmission connection with the mandrel and is used for driving the mandrel to lift, and the forming platform is fixedly connected with the mandrel;

the crystallization module comprises a fixed crystallization tube and a crystallization tube fixing support, the crystallization tube fixing support is connected with the fixed crystallization tube and used for fixing the fixed crystallization tube, and the fixed crystallization tube is sleeved outside the mandrel; and

the spraying module comprises a crucible and a crucible rotating mechanism, the crucible rotating mechanism is in transmission connection with the crucible and is used for driving the crucible to rotate, at least one nozzle is arranged on the crucible, the crucible is in an annular structure and is sleeved outside the mandrel;

wherein the spraying direction of the nozzle faces to the forming platform, and the outer surface of the mandrel, the inner surface of the fixed crystallization tube and the forming platform form a forming space for forming;

the cooling module comprises a first cooling element, a second cooling element and a third cooling element, the mandrel is of a hollow structure, the third cooling element is arranged on the inner surface of the mandrel and close to the forming platform, the first cooling element is arranged on the fixed crystallization tube, and the second cooling element is arranged on the forming platform.

2. The tube target manufacturing apparatus according to claim 1, further comprising:

the preheating module comprises a preheating mechanism and a preheating mechanism fixing support, the preheating mechanism fixing support is connected with the preheating mechanism and used for enabling the preheating mechanism to be fixed, and the preheating mechanism is arranged outside the mandrel and used for heating the mandrel.

3. The tube target manufacturing apparatus according to claim 2, wherein the preheating mechanism comprises:

the heat conduction pipe is sleeved outside the mandrel;

the first heating element is arranged on the outer surface of the heat conduction pipe; and

and the electrolytic cotton cloth layer is arranged on the inner surface of the heat conduction pipe.

4. The tube target manufacturing apparatus according to claim 1, wherein the crucible is a ring-shaped structure having a storage chamber for storing a material and a first through hole through which the spindle passes;

the crucible rotating mechanism includes:

the rotating platform is fixedly connected with the crucible and is provided with at least one nozzle hole corresponding to the nozzle and a second through hole for the core shaft to pass through;

the driving piece is in transmission connection with the rotating platform and used for driving the rotating platform to rotate.

5. The pipe target manufacturing apparatus according to claim 4, characterized in that the crucible comprises a first crucible body having a first half-hole and a first cavity and a second crucible body having a second half-hole and a second cavity,

the first half hole and the second half hole are matched to form the first through hole, and the first cavity and the second cavity form the storage cavity.

6. The tube target manufacturing apparatus according to claim 5, wherein the spray module further comprises:

the crucible heating element is arranged on the outer surface of the crucible;

the crucible temperature measuring element is arranged in the storage cavity;

the crucible is arranged in the outer cavity;

a vacuum pumping element connected to the outer chamber; and

and the pressure regulating element is connected with the outer chamber.

7. The tube target manufacturing apparatus according to any one of claims 1 to 6, wherein the drawing module further comprises:

and the guide supporting seat is provided with a fourth through hole for the core shaft to pass through.

8. The tube target manufacturing apparatus according to claim 1, wherein the crystallization module further comprises:

and the crystallizing tube temperature measuring element is arranged in the forming space.

9. A method for producing a tube target by using the device for producing a tube target according to any one of claims 1 to 8, comprising:

after part or all of the molten pool is solidified on the forming platform and the forming platform to form a solid phase, the forming platform is moved to a preset direction to prepare a tube target fixed on the mandrel;

and separating the mandrel from the forming platform, separating the tube target from the mandrel, and demolding.