CN114609500A

CN114609500A - Method and device for assisting WAT production monitoring

Info

Publication number: CN114609500A
Application number: CN202210235438.2A
Authority: CN
Inventors: 余燕萍; 刑阳阳
Original assignee: Shanghai Huali Integrated Circuit Manufacturing Co Ltd
Current assignee: Shanghai Huali Integrated Circuit Manufacturing Co Ltd
Priority date: 2022-03-11
Filing date: 2022-03-11
Publication date: 2022-06-10

Abstract

The invention provides a method for assisting WAT production monitoring, which continuously acquires test information and machine state of a plurality of WAT machines and lot information of wafers placed in the WAT machines; integrating the test information, the machine state and the lot information of a plurality of WAT machines into a display interface, wherein the display interface is used for displaying the test information, the machine state and the lot information corresponding to each WAT machine; and screening out the lot information in the WAT machine which meets the set condition according to the display interface. The method of the invention can monitor the test lot state of the WAT machine, help to judge the test sequence of the lot to be tested and improve the monitoring efficiency.

Description

Method and device for assisting in monitoring WAT production

Technical Field

The invention relates to the technical field of semiconductors, in particular to a method and a device for assisting WAT production monitoring.

Background

WAT is an abbreviation for Wafer Acceptance Test, meaning that wafers are tested, and is also referred to in the industry as Process Control Monitor (PCM). WAT is the measurement of electrical parameters of a particular test structure after the end of a wafer production run and before quality inspection. The WAT is intended to test electrical parameters of a specific test structure on a wafer, detect the process condition of each wafer product, evaluate the quality and stability of the semiconductor manufacturing process, and determine whether the wafer product meets the electrical specification requirements of the process technology platform. The WAT data can be used as a quality certificate for delivery of wafer products, in addition, the WAT data can also reflect the actual production condition of a production line, the condition of the production line can be monitored by collecting and analyzing the WAT data, the trend of the production line change can also be judged, and early warning is carried out on the possible condition.

WAT tests can be classified as inline WAT, Final WAT. The Inline WAT tests devices at the inter-metal stage, and the Final WAT tests devices after the whole wafer process is completed.

In the prior art, checking on-line lot test information (such as a probe card used for testing lot, test time, predicted end time and the like) needs to be checked one by one; the machines are increased gradually, and manpower is wasted when the machines are inquired one by one manually.

Therefore, a method for assisting WAT production monitoring is needed to quickly check all WAT machine information (such as machine condition, using a probe card, testing lot information) and information of lot to be tested.

Disclosure of Invention

In view of the above drawbacks of the prior art, the present invention provides a method for assisting WAT production monitoring, which is used to solve the problem in the prior art that the check of online lot test information needs to be performed on machine stations by machine stations; the machines are increased gradually, and the problem of manpower waste is solved by manually inquiring the machines one by one.

To achieve the above and other related objects, the present invention provides a method for assisting WAT production monitoring, comprising:

continuously acquiring test information, machine states and lot information of a plurality of WAT machines;

integrating the test information, the machine state and the lot information of the plurality of WAT machines into a display interface, wherein the display interface is used for displaying the test information, the machine state and the lot information corresponding to each WAT machine;

and step three, screening out the lot information in the WAT machine which meets the set condition according to the display interface.

Preferably, the test information in the first step includes a number of each WAT machine, a number of each lot, a probe card, test conditions, a start test time and an expected test time of each lot, a number of wafers to be tested of each lot, and a number of tested wafers.

Preferably, the step two and the step three are arranged and displayed on the display interface in sequence according to the number of each WAT machine.

Preferably, in the first step, the test information is obtained from an EST _ info.txt file of the WAT machine.

Preferably, in the step one, the machine state and the lot information are both acquired by a manufacturing execution system.

Preferably, the machine status in the first step includes idle, normal operation, maintenance, waiting and detection.

Preferably, in the third step, the lot that is not required to be tested in the WAT machine is not displayed with the number of the lot.

Preferably, the WAT tool in steps one to three includes an online test and a final test.

Preferably, the setting conditions in step three are: waiting for less than 2 hours for the WAT machine platform required for the online test and the final test.

As mentioned above, the method for assisting WAT production monitoring of the present invention has the following beneficial effects:

the method of the invention can monitor the test lot state of the WAT machine, help to judge the test sequence of the lot to be tested and improve the monitoring efficiency.

Drawings

FIG. 1 is a schematic process flow diagram of the present invention;

FIG. 2 is a schematic diagram of a display interface according to the present invention.

Detailed Description

The embodiments of the present invention are described below with reference to specific embodiments, and other advantages and effects of the present invention will be easily understood by those skilled in the art from the disclosure of the present specification. The invention is capable of other and different embodiments and of being practiced or of being carried out in various ways, and its several details are capable of modification in various respects, all without departing from the spirit and scope of the present invention.

Referring to fig. 1, the present invention provides a method for assisting WAT production monitoring, comprising:

the WAT machine is a used test machine required by the WAT automatic test, and can be a Keysight and Agilent test machine, and the test machine is divided into a test cabinet and a test head.

After the wafer is produced, it is subjected to an electrical test, called Wafer Acceptance Test (WAT), before it is shipped to the wafer fab. This test is to test the electrical properties of test keys (testkeys) on dicing lanes (Scribe lines). Test keys are typically designed with various component elements, such as different sizes of NMOS, PMOS, resistors, capacitors, and other process-related characteristics. This track may be considered as a primary selection. Wafers that have serious production problems that cause the electrical performance of the test keys to be out of specification are screened in this pass and discarded. After the WAT test is finished, the wafer process is finished.

In an alternative embodiment, the test information in the first step includes the number (ID) of each WAT tool, the number (ID) of each lot, the probe card, the test conditions, the start test time and the expected test time of each lot, the number of wafers to be tested and the number of wafers tested.

In an optional implementation manner, in the step one, the test information is obtained from an EST _ info.txt file of the WAT machine, where the EST _ info.txt file is used to record test information, including test time, machine number, and test parameters of lot.

In an alternative embodiment, in step one, the machine state and the lot information are both obtained by a Manufacturing Execution System (MES), and the Manufacturing execution system is used for a system of product management, equipment management, process management, rights management and alarm management.

In an alternative embodiment, the machine status in step one includes IDLE, normal running, maintenance, WAIT and detect intermediate status (IDLE/DOWN/PM/WAIT/MON).

and thirdly, referring to fig. 2, screening out the lot information in the WAT machine which meets the setting condition according to the display interface.

In an alternative embodiment, the lot that does not need to be tested in the WAT machine in step three is not displayed, that is, the column of the lot number is displayed as empty in the display interface.

In an optional implementation manner, in the second step and the third step, the WAT machines are sequentially arranged according to the number of each WAT machine and displayed on the display interface.

For example, there are WAT machines numbered 01 to 20, and the order of the WAT machines is arranged according to the size of the number, so that the WAT machines can be easily viewed.

In an alternative embodiment, the WAT tool in steps one through three includes an in-line test and a final test.

In an alternative embodiment, the conditions set in step three are: the WAT machines needing online test and final test with the waiting time less than 2 hours can quickly check all WAT machine information (such as machine condition, probe card usage and test lot information) and the information of lot to be tested, thereby being beneficial to WAT production monitoring and increasing the utilization rate of the WAT machines. .

It should be understood that less than 2 hours is the preferred time for wafer inspection at the station in a normal WAT test, and that the time or test type may be adjusted according to different inspection requirements.

It should be noted that the drawings provided in the present embodiment are only for illustrating the basic idea of the present invention, and the components related to the present invention are only shown in the drawings rather than drawn according to the number, shape and size of the components in actual implementation, and the type, quantity and proportion of the components in actual implementation may be changed freely, and the layout of the components may be more complicated.

In conclusion, the method of the invention can monitor the test lot state of the WAT machine, help to judge the test sequence of the lot to be tested and improve the monitoring efficiency. Therefore, the invention effectively overcomes various defects in the prior art and has high industrial utilization value.

The foregoing embodiments are merely illustrative of the principles and utilities of the present invention and are not intended to limit the invention. Any person skilled in the art can modify or change the above-mentioned embodiments without departing from the spirit and scope of the present invention. Accordingly, it is intended that all equivalent modifications or changes which can be made by those skilled in the art without departing from the spirit and technical spirit of the present invention be covered by the claims of the present invention.

Claims

1. A method of assisted WAT production monitoring, comprising at least:

continuously acquiring test information, machine states and lot information of wafers placed in a plurality of WAT machines;

2. The method of assisting WAT production monitoring of claim 1, wherein: the test information in the first step includes the number of each WAT machine, the number of each lot, a probe card, test conditions, the start test time and the expected test time of each lot, the number of wafers to be tested of each lot, and the number of tested wafers.

3. The method of assisted WAT production monitoring as claimed in claim 2, wherein: and step two and step three, the WAT machines are sequentially arranged and displayed on the display interface according to the serial number of each WAT machine.

4. The method of assisted WAT production monitoring as claimed in claim 1, wherein: in the first step, the test information is obtained from an EST _ info.txt file of the WAT machine.

5. The method of assisted WAT production monitoring as claimed in claim 1, wherein: in the first step, the machine state and the lot information are both acquired by a manufacturing execution system.

6. The method of assisted WAT production monitoring as claimed in claim 1, wherein: the machine state in the first step comprises idle state, normal operation, maintenance, waiting and detection.

7. The method of assisting WAT production monitoring of claim 1, wherein: and in the third step, the lot which does not need to be tested in the WAT machine table does not display the serial number of the lot.

8. The method of assisted WAT production monitoring as claimed in claim 1, wherein: and the WAT machine in the first step to the third step comprises an online test and a final test.

9. The method of assisted WAT production monitoring as claimed in claim 8, wherein: the setting conditions in the third step are as follows: waiting for less than 2 hours for the WAT machine needed for the online test and the final test.