CN114606472A

CN114606472A - Coated workpiece bearing device and drum-type coating machine

Info

Publication number: CN114606472A
Application number: CN202210047648.9A
Authority: CN
Inventors: 杨鹏
Original assignee: Wanjin Industrial Chibi Co Ltd
Current assignee: Wanjin Industrial Chibi Co Ltd
Priority date: 2022-01-17
Filing date: 2022-01-17
Publication date: 2022-06-10
Anticipated expiration: 2042-01-17
Also published as: CN114606472B

Abstract

The invention provides a coated workpiece bearing device and a drum-type coating machine. The coated workpiece bearing device comprises a hanging plate and an electromagnetic induction part, wherein a conductive area is arranged on the hanging plate, the electromagnetic induction part comprises a conductor for generating induced electromotive force, and the conductive area is electrically connected with the conductor; the hanging plate is provided with a middle shaft part and edge parts positioned on two sides of the middle shaft part in the transverse direction, and the length of the conductive area in the longitudinal direction is gradually reduced from the middle shaft part to the edge parts. This coating film work piece load-bearing device can form the gradual change electric field that the area reduces gradually from the middle shaft part to the edge part of link plate, and the gradual change electric field can play the effect of compensation to the thickness of rete, and the more the deposit that obtains of the position of being close to the link plate centre more and then makes the deposited rete more even.

Description

Coated workpiece bearing device and drum-type coating machine

Technical Field

The invention relates to the technical field of coating, in particular to a coated workpiece bearing device and a drum-type coating machine.

Background

Magnetron sputtering is one of the physical vapor deposition methods. The magnetron sputtering bombards the target to make target atoms separate from the target substrate, and the target atoms are finally deposited on the material to be coated and form a film on the surface of the material to be coated. Compared with electroplating, spraying and other processes, the magnetron sputtering vacuum coating has the advantages of good film binding force, smooth and compact film layer, high deposition rate and the like. Among magnetron sputtering coating machines, drum coating machines are widely used because of their reliable coating performance. The drum-type coating machine generally comprises a coating machine cavity and a drum located in the coating machine cavity, wherein a workpiece to be coated is fixed on the outer wall of the drum, and a target material is fixed on the wall of the coating machine cavity and has one side surface facing the drum. When the ion source is used, the ion source bombards the target and generates atoms or molecules of the target, and the atoms or molecules of the target are finally deposited on a workpiece to be coated to form a required film.

When a drum-type film coating machine is used for coating the surface of a plate workpiece similar to plate glass and the like, the plate glass is usually fixed on a flat hanging plate, and then the hanging plate is hung on the outer wall of a roller. Because the hanging plate is a plane and the outer wall of the roller is a cylindrical curved surface, compared with the middle of the hanging plate, the two sides of the hanging plate are closer to the target on the wall of the cavity of the film coating machine. Therefore, in the deposition process, the deposition rate of the film layers on the two sides of the hanging plate is higher than that of the film layer in the middle of the hanging plate. This situation leads to the situation that the film thickness is not uniform when a drum coater is used for coating on a flat workpiece. In particular, the wider the hanging plate, the worse the uniformity of the film deposited on the flat workpiece. At present, no method for overcoming the poor transverse uniformity exists in the industry, so that large-size flat workpieces are difficult to coat by using a roller type coating machine.

Disclosure of Invention

Therefore, in order to improve the uniformity of the coating layer of the drum coater and widen the application range of the drum coater, it is necessary to provide a drum coater.

According to one embodiment of the invention, the coated workpiece bearing device comprises a hanging plate and an electromagnetic induction part, wherein a conductive area is arranged on the hanging plate, the electromagnetic induction part comprises a conductor for generating induced electromotive force, and the conductive area is electrically connected with the conductor; the link plate has the middle shaft portion in horizontal and is located the edge part of middle shaft portion both sides, from the middle shaft portion to the edge part, the length in longitudinal direction of conduction region reduces gradually.

In actual use, the electromagnetic induction part generates an induced electromotive force, which makes the potential at one end of the conductor higher than the potential at the other end. An electric field is then generated across the conductive area of the plate electrically connected to the conductor. And because the length of the conductive region in the longitudinal direction is gradually reduced, a gradually-changed electric field with gradually-reduced area is formed from the middle shaft part to the edge part of the hanging plate, the electric field with larger area is generated in the region positioned in the middle of the hanging plate, and the electric field with smaller area is generated in the regions positioned at two sides of the hanging plate. Correspondingly, about 5% of the atoms sputtered from the target material during the coating process are ionized to form charged ions, and more positive ions are deposited near the middle under the action of the gradient electric field. Therefore, the gradual electric field can compensate the thickness of the film layer, and the deposition compensation of the part closer to the middle of the hanging plate is more, so that the deposited film layer is more uniform.

In one embodiment, the conductive area comprises a plurality of conductive subareas which are sequentially arranged along the longitudinal direction, and the plurality of conductive subareas are electrically connected with each other; the length of each of the conductive segments in the longitudinal direction gradually decreases from the middle shaft portion to the edge portion.

In one embodiment, the length of the conductive partition in the longitudinal direction decreases linearly away from the central axis portion along the central axis portion to the edge portion.

In one embodiment, the length of the conductive section in the longitudinal direction of the middle shaft portion is 150mm to 400 mm.

In one embodiment, the conductive partition is a quadrilateral, and two opposite vertices of the quadrilateral are located on the middle shaft portion, and the other two opposite vertices are located on the edge portions on two sides respectively.

In one embodiment, the conductive regions on both sides of the central shaft portion are symmetrically disposed.

Further, another embodiment of the present invention further provides a drum coater, which includes a coater chamber, a drum, a magnetic field generating component, and the coated workpiece carrying device according to any of the above embodiments, wherein the drum is disposed in the coater chamber, the hanging plate is fixed on an outer surface of the drum, the conductor is connected to the hanging plate, the conductor can cut a magnetic induction line of the magnetic field generating component when the drum rotates, the magnetic field generating component includes a first magnetic block, the first magnetic block is disposed on an end surface of the coater chamber, and the conductor is disposed on an end surface of the drum close to the first magnetic block.

The hanging plate is fixed on the roller by the roller type film coating machine, and the conductor in the electromagnetic induction component is connected to the hanging plate, so that the conductor can rotate along with the roller. When the roller rotates, the conductor and the magnetic field of the magnetic field generating component act to generate induced electromotive force, and the conductive area conducted with the conductor also generates a gradient electric field. The drum-type film plating machine skillfully utilizes the rotation action of the drum, only a few components are added on the film plating machine, so that the conductor can generate an electric field in situ in the rotation process of the drum, and the uniformity of the film layer can be improved under the condition that the structure of the film plating machine is not required to be greatly changed.

In one embodiment, the target of the film plating machine is arranged on the wall of the cavity of the film plating machine, the first magnetic block is arranged between the target and the rotating shaft of the roller, the conductor is arranged between the hanging plate and the rotating shaft of the roller, the electromagnetic induction component further comprises a second magnetic block which is fixed relative to the hanging plate, the second magnetic block is arranged relative to the first magnetic block, the magnetic pole of the second magnetic block close to the first magnetic block is opposite to the magnetic pole of the first magnetic block close to the second magnetic block in polarity, and at least part of the conductor is arranged between the first magnetic block and the second magnetic block.

In one embodiment, the conductor is wound on the second magnetic block forming a multi-turn coil passing between the first and second magnetic blocks.

In one embodiment, the number of the first magnetic blocks is two, the two first magnetic blocks are respectively arranged on two opposite end surfaces of the coating machine cavity, the number of the conductors is also two, and the two conductors are respectively arranged on two opposite end surfaces of the roller.

In one embodiment, the coating workpiece bearing device is provided with a plurality of coating workpiece bearing devices, and the hanging plate in each coating workpiece bearing device is fixed on the outer surface of the roller.

Drawings

FIG. 1 is a schematic structural diagram of a coated workpiece carrying device;

FIG. 2 is a top view of the drum coater;

FIG. 3 is a front sectional view of the drum coater;

FIG. 4 is a front view of a coated workpiece carrier in a drum coater;

FIG. 5 is a top view of a coated workpiece carrier in a drum coater;

wherein the reference symbols and their meanings are as follows:

100. a coated workpiece carrying device; 110. hanging the plate; 111. a conductive region; 1110. a conductive partition; 120. a conductor; 130. a second magnetic block; 200. a drum-type film coating machine; 210. a coating machine cavity; 220. a drum; 221. a rotating electric machine; 230. a first magnetic block; 240. a target material; 250. a molecular pump; 260. an ion source.

Detailed Description

In order that the invention may be more fully understood, reference will now be made to the following description. Preferred embodiments of the present invention are presented herein. This invention may, however, be embodied in many different forms and should not be construed as limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete.

Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs. The terminology used in the description of the invention herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. As used herein, the term "and/or" includes any and all combinations of one or more of the associated listed items. As used herein, "plurality" includes two and more than two items. As used herein, "above a certain number" should be understood to mean a certain number and a range greater than a certain number.

Although the drum-type coating machine has reliable coating performance, when a workpiece to be coated is planar, the workpiece and the outer wall of the drum are not matched in shape, so that the two sides and the middle of a deposited film layer are not uniform. In the traditional technology, the length of the hanging plate in the transverse direction is required to be reduced as much as possible, and the distance difference between the edge and the middle of the hanging plate and a target when the roller rotates is reduced, so that the thicknesses of the two sides and the middle of the film layer are close to each other as much as possible. The treatment mode not only fails to solve the problem of uneven coating, but also greatly limits the preparation of the film on the large-size workpiece.

In order to overcome the problem of uneven coating as much as possible, the invention provides a coated workpiece bearing device which comprises a hanging plate and an electromagnetic induction part, wherein the hanging plate is provided with a conductive area, the electromagnetic induction part comprises a conductor for generating induced electromotive force, and the conductive area is electrically connected with the conductor; the hanging plate is provided with a middle shaft part and edge parts positioned on two sides of the middle shaft part in the transverse direction, and the length of the conductive area in the longitudinal direction is gradually reduced from the middle shaft part to the edge parts.

In actual use, the electromagnetic induction part generates an induced electromotive force, which makes the potential at one end of the conductor higher than the potential at the other end. An electric field is then generated across the conductive area of the plate electrically connected to the conductor. And because the length of the conductive region in the longitudinal direction is gradually reduced, a gradually-changed electric field with gradually-reduced area is formed from the middle shaft part to the edge part of the hanging plate, the electric field with larger area is generated in the region positioned in the middle of the hanging plate, and the electric field with smaller area is generated in the regions positioned at two sides of the hanging plate. Correspondingly, about 5% of atoms sputtered from the target material during the coating process are ionized into ions with charges, and more positive ions are deposited near the middle under the action of the gradually changing electric field. Therefore, the gradual electric field can compensate the thickness of the film layer, and the deposition compensation of the part closer to the middle of the hanging plate is more, so that the deposited film layer is more uniform.

When the coating machine cavity is used, the hanging plate can be hung on the outer wall of the roller and faces the inner wall of the coating machine cavity, and when a target on the inner wall of the coating machine cavity faces the hanging plate, the part, closest to the inner wall of the coating machine cavity, of the hanging plate is the middle shaft part. For example, for a rectangular peg board, the mid-axis portion is generally located at its transverse midline. It will be appreciated that although the mid-axis portion is now located on the mid-line, for more complex graphical configurations, the mid-axis portion need not be located exactly on the mid-line. The middle shaft portion may be a boundary line or a narrow strip-like region for defining both sides thereof.

The conductive area can be arranged on the board surface of the hanging board and can also be arranged in the hanging board. The conductive region may be a sheet-like conductive material, a mesh-like conductive material, or a layered conductive material formed by coating a conductive material, which may be a metal. The present invention is not particularly required for this purpose.

To facilitate understanding of the specific structure of the coated workpiece carrier device 100, reference is made to fig. 1, which is a side view of the structure of the coated workpiece carrier device 100. The coated workpiece carrying device 100 comprises a hanging plate 110 and an electromagnetic induction part. The hanging plate 110 has a conductive region 111 thereon, and the hanging plate 110 has a central axis portion in the transverse direction and edge portions on both sides of the central axis portion, and the length of the conductive region 111 in the longitudinal direction is gradually reduced from the central axis portion to the edge portions. The electromagnetic induction part includes a conductor 120 for generating an induced electromotive force, and the conductor 120 is electrically connected to the conductive region 111. In one specific example, one end of the conductor 120 is electrically connected to the conductive region 111, and the other end is used for grounding.

It is understood that when an induced electromotive force is generated on the conductor 120, a potential difference is generated between two ends of the conductor 120, and when one end with a high potential is grounded and the other end is electrically connected to the conductive region 111, the conductive region 111 collects charges to generate an electric field. Since the length of the conductive region 111 gradually decreases from the central axis portion to the edge portion, the corresponding electric field area also gradually decreases, thereby attracting more ions to deposit in the area near the central axis portion and less ions to deposit in the area near the edge portion.

The conductive area 111 can compensate the middle of the workpiece with the coated film, but there may still be a problem of uneven deposition of the film layer in the longitudinal direction, for example, more material may be deposited on the conductive area 111 than on the conductive area 111. Fig. 1 illustrates a more preferable embodiment, and referring to fig. 1, in one specific example, the conductive area 111 includes a plurality of conductive sections 1110 sequentially arranged along a longitudinal direction, and the plurality of conductive sections 1110 are electrically connected to each other; each of the conductive partitions 1110 gradually decreases in length in the longitudinal direction from the middle shaft portion to the edge portion. The separation of the conductive region 111 into a plurality of conductive segments 1110 helps to provide a more uniform deposition of the film layer in the longitudinal direction during coating.

The specific form of the decrease in length of conductive region 1110 away from the central axis portion may be intermittent, such as a stepwise decrease, or may be continuous. Further, the continuous reduction mode may be a non-linear reduction, such as a curve like a parabola, or a linear reduction. Preferably, to deposit the film more uniformly, the length of conductive partition 1110 decreases linearly away from the central axis, where a linear decrease refers to: the ratio of the change in length of the conductive section 1110 to the change in distance from the shaft portion is constant.

In order to further improve the uniformity of film deposition, the length of the single conductive partition 1110 in the longitudinal direction is not too large or too small, for example, the length of the conductive partition 1110 located on the central axis portion in the longitudinal direction is 150mm to 400 mm. Alternatively, the conductive partition 1110 located at the middle shaft portion may have a length of 200mm to 350mm in the longitudinal direction. Further, the length of the conductive partition 1110 located at the middle shaft portion in the longitudinal direction is 250mm to 300 mm.

In one specific example, referring to fig. 1, each of the conductive partitions 1110 has a quadrilateral shape, and the conductive partitions 1110 are electrically connected to each other, and two opposite vertices of the quadrilateral shape are located on the middle shaft portion, and the other two opposite vertices are located on the edge portions on both sides. Optionally, each conductive partition 1110 is kite-shaped. Further optionally, each conductive partition 1110 is diamond-shaped.

In one specific example, the two-part conductive regions 111 on both sides of the central axis portion are symmetrically disposed. Specifically, the two-part conductive region 111 is mirror-symmetric along the central axis.

In one specific example, adjacent conductive partitions 1110 are abutted. More specifically, when the conductive partitions 1110 have a quadrangular shape, adjacent conductive partitions 1110 are abutted by a vertex.

Furthermore, the invention also provides a drum-type film coating machine adopting the film coating workpiece bearing device. The drum-type film plating machine comprises a film plating machine cavity, a drum, a magnetic field generating component and a film plating workpiece bearing device in any embodiment. The cylinder sets up in the coating machine cavity, and the link plate is fixed in on the surface of cylinder, and the conductor is connected in the link plate, and the conductor is used for producing induced electromotive force with the magnetic field effect of magnetic field generation part when the cylinder is rotatory.

To facilitate understanding of the specific structure of the drum coater 200, fig. 2 and 3 show a top view and a front cross-sectional view of the drum coater 200. Referring to fig. 2, the drum coater 200 includes a coater chamber 210, a drum 220, a magnetic field generating member, and the coated workpiece support 100 shown in fig. 1. Specifically, the roller 220 is disposed in the coater chamber 210, and the roller 220 is connected to a rotating motor 221 located on a top end surface of the coater chamber 210, where the rotating motor 221 is used to drive the roller 220 to rotate in the coater chamber 210. The conductor 120 of the coated workpiece carrying device 100 is connected to the hanging plate 110, and the hanging plate 110 is fixed on the outer surface of the roller 220. The conductor 120 serves to generate an induced electromotive force by interaction with a magnetic field when the drum 220 rotates. In addition, the drum coater 200 may further include a target 240, a molecular pump 250, and an ion source 260. The target 240 is used to provide a material to be deposited or a precursor thereof, and argon gas may be introduced into the target 240 to sputter a simple substance from the target 240. The ion source 260 may be supplied with a reactive gas, and the ion source 260 may be used to ionize the reactive gas and react with the elemental species to form a compound. The molecular pumps 250 are provided in more than two groups, and are mainly used to prevent the target 240 from being deteriorated due to the reaction gas volatilizing to the surface of the target 240. Wherein the ion source 260 may be selected from the group consisting of rf ion sources 260.

It can be understood that, since the conductor 120 is connected to the peg board 110 and the peg board 110 is fixed on the outer surface of the drum 220, the conductor 120 rotates along with the drum 220 when the drum 220 rotates, and the conductor 120 cuts magnetic induction lines of a magnetic field during the rotation to generate an induced electromotive force. This process mainly utilizes the rotation of the roller 220 to make the conductor 120 rotate together and generate an induced electromotive force, so as to generate an electric field on the conductive region 111.

In order to generate the induced electromotive force, the conductor 120 should cut the magnetic induction line during at least part of the rotation, especially when the hanging plate 110 is closest to the target 240, and the conductor 120 needs to cut the magnetic induction line and generate sufficient bias voltage. It will be appreciated that the lines of magnetic induction of the magnetic field generated by the magnetic field generating means should be capable of being cut by the moving conductor 120. For example, the lines of magnetic induction of the magnetic field generated by the magnetic field generating component may be directed from the top of the coater chamber 210 to the bottom thereof.

In the drum coater 200, the hanging plate 110 is fixed to the drum 220, and the conductor 120 of the electromagnetic induction part is connected to the hanging plate 110, so that the conductor 120 rotates along with the drum 220. When the roller 220 rotates, the conductor 120 reacts with the magnetic field of the magnetic field generating member to generate an induced electromotive force, and the conductive region 111 in conduction with the conductor 120 also generates a gradient electric field. The drum-type coating machine 200 skillfully utilizes the rotation action of the drum 220, and only a few components are added on the coating machine, so that the conductor 120 can generate an electric field in situ in the rotation process of the drum 220, and the uniformity of a film layer can be improved without greatly changing the structure of the coating machine.

Referring to fig. 2 and 3, in consideration of the overall operation of the drum coater 200, in one specific example, the magnetic field generating component includes a first magnetic block 230, the first magnetic block 230 is disposed on an end surface of the coater chamber 210, and the conductor 120 is disposed on an end surface of the drum 220 close to the first magnetic block 230. It will be appreciated that coater chamber 210 has two end surfaces including a top surface and a bottom surface, and likewise, roll 220 has two end surfaces including a top surface and a bottom surface. Although the first magnetic block 230 is disposed on the top surface of the coater chamber 210 and the conductor 120 is disposed on the top surface of the roller 220 in fig. 2 and 3, in another embodiment, the first magnetic block 230 may be disposed on the bottom surface of the coater chamber 210 and the conductor 120 may be disposed on the bottom surface of the roller 220. Since the hanging plate 110 is fixed on the outer wall of the drum 220, not only the design of the magnetic field generating part can be simplified, but also the conductor 120 and the first magnetic block 230 can be made to be as close as possible under the condition that the conductor 120 is ensured to rotate along with the drum 220. It can be understood that the magnetic induction intensity of the magnetic blocks gradually decreases from near to far, so that the conductor 120 is as close to the first magnetic block 230 as possible, and the conductor 120 can generate higher induced electromotive force. The first magnetic block 230 may be disposed on an inner wall of the coater chamber 210 or an outer wall of the coater chamber 210.

In a further preferred embodiment, there may be two first magnetic blocks 230, the two first magnetic blocks 230 may be respectively disposed on the top surface and the bottom surface of the coater chamber 210, and correspondingly there may be two conductors 120, and the two conductors 120 are respectively disposed on the top surface and the bottom surface of the roller 220. The simultaneous provision of two first magnetic blocks 230 and two conductors 120 may further enhance the induced electromotive force on the conductive region 111.

In one specific example, the target 240 of the coater is disposed on the wall of the coater chamber 210, the first magnetic blocks 230 are disposed between the target 240 and the rotating shaft of the roller 220, and the conductor 120 is disposed between the hanging plate 110 and the rotating shaft of the roller 220. Referring to fig. 3, in a front cross-sectional view of the over-rotation axis of the coater, the first magnetic block 230 and the target 240 are on the same cross-section and the first magnetic block 230 is located above the side of the target 240. The magnetic field generated by the first magnetic block 230 is mainly concentrated in the area where the target 240 faces, and the magnetic field is very small at the position far away from the first magnetic block 230. Therefore, in the rotation process of the conductor 120, when the conductor 120 passes through the position right below the first magnetic block 230, the induced electromotive force generated is the largest, and at the moment, the plate also rotates to the position right opposite to the target 240 for deposition; and substantially no induced electromotive force is generated when the conductor 120 rotates through other positions. More preferably, the two magnetic poles of the first magnetic block 230 are respectively located on a side surface close to the drum 220 and a side surface of the drum 220.

Since the roller 220 is usually grounded, the end of the conductor 120 away from the peg board 110 can be directly electrically connected to the roller 220 to ground the end of the conductor 120 away from the peg board 110 without changing the main structure of the apparatus itself.

In one specific example, the electromagnetic induction component further includes a second magnetic block 130 fixed in position opposite to the hanging plate 110, a magnetic pole of the side of the second magnetic block 130 facing the first magnetic block 230 is opposite to a magnetic pole of the first magnetic block 230 facing the second magnetic block 130, and at least part of the conductor 120 is disposed between the first magnetic block 230 and the second magnetic block 130. It can be understood that the second magnetic block 130 and the hanging plate 110 are relatively fixed, and the second magnetic block 130 rotates along with the roller 220. The second magnetic block 130 is disposed opposite to the first magnetic block 230, meaning that there is a position opposite to the front of the first magnetic block 230 during the rotation of the second magnetic block 130, and opposite to the side of the first magnetic block 230 during other processes. The conductor 120 disposed between the first and second

magnetic blocks

230 and 130 is used to cut the magnetic induction lines during rotation, and thus generate induced electromotive force. The second magnetic block 130 is mainly used for enhancing the magnetic induction intensity when the conductor 120 cuts the magnetic induction lines under the condition that the structure of the main body of the film plating machine is not changed so as to increase the induced electromotive force of the conductor 120.

Further, referring to FIG. 4, in one specific example, the conductor 120 is wound on the second magnetic block 130 to form a multi-turn coil passing between the first magnetic block 230 and the second magnetic block 130. The way that the second magnetic block 130 faces the first magnetic block 230 is upward, the direction that the second magnetic block 130 is far away from the first magnetic block 230 is downward, and the conductor 120 is wound on the second magnetic block 130 is as follows: the conductor 120 is wound from the top of the second magnetic block 130 to the bottom of the second magnetic block 130 and then wound back to the top of the second magnetic block 130 to form a coil of one turn, and the coil is wound repeatedly to form a coil of multiple turns. During the rotation of the drum 220, the magnetic induction intensity above the second magnetic block 130 is larger, so the conductor 120 above the second magnetic block 130 is mainly used for cutting magnetic induction lines and can generate larger induced electromotive force, and the conductor 120 below the second magnetic block 130 is mainly used for connecting the conductors 120 above the second magnetic block 130 in series. Compared with the case that the conductor 120 is not wound to form a coil, the multi-turn coil is more beneficial to further fully utilize the magnetic field between the first magnetic block 230 and the second magnetic block 130, so that the effect of increasing the induced electromotive force can be achieved.

In the above embodiments, various specific ways of increasing the induced electromotive force are described, which is mainly convenient to regulate the magnitude of the electric field generated on the hanging plate 110, so as to regulate and control the thickness of the film layer for compensating deposition. Specifically, the magnetic field strength of the first magnetic block 230 and/or the second magnetic block 130 and/or the number of turns of the conductor 120 on the second magnetic block 130 may be adjusted in combination with the actual rotation speed of the drum 220, thereby adjusting the electric field strength generated by the conductive region 111 on the hanging plate 110.

Further, in a specific coating process, since the target 240 mostly uses the intermediate frequency twinning power source, about 5% of the sputtered elementary substance particles are ionized into positive ions, and thus the potential on the conductive region 111 can be correspondingly controlled to be negative. For example, when the end of the conductor 120 away from the conductive region 111 is grounded (the end has a potential of 0), the potential on the conductive region 111 may be controlled to be negative by controlling the direction of the magnetic field intensity generated by the magnetic field generating means in conjunction with the rotation direction of the drum 220.

In one specific example, there are a plurality of the coated workpiece supporting devices 100, and the hanging plate 110 in each coated workpiece supporting device 100 is fixed on the outer surface of the roller 220. Correspondingly, the conductor 120 and the second magnetic block 130 in each coated workpiece carrier device 100 are also correspondingly arranged on the end surface of the roller 220 close to the first magnetic block 230.

The technical features of the above embodiments can be arbitrarily combined, and for the sake of brevity, all possible combinations of the technical features in the above embodiments are not described, but should be considered as the scope of the present specification as long as there is no contradiction between the combinations of the technical features.

The above examples only show some embodiments of the present invention, and the description thereof is more specific and detailed, but not construed as limiting the scope of the invention. It should be noted that, for a person skilled in the art, several variations and modifications can be made without departing from the inventive concept, which falls within the scope of the present invention. Therefore, the protection scope of the present patent shall be subject to the appended claims.

Claims

1. A coated workpiece bearing device is characterized by comprising a hanging plate and an electromagnetic induction part, wherein a conductive area is arranged on the hanging plate, the electromagnetic induction part comprises a conductor for generating induced electromotive force, and the conductive area is electrically connected with the conductor; the link plate has the middle shaft portion in horizontal and is located the edge part of middle shaft portion both sides, from the middle shaft portion to the edge part, the length in longitudinal direction of conduction region reduces gradually.

2. The coated workpiece carrier device of claim 1, wherein the conductive region comprises a plurality of conductive sections sequentially arranged along the longitudinal direction, and the plurality of conductive sections are electrically connected to each other; the length of each of the conductive segments in the longitudinal direction gradually decreases from the middle shaft portion to the edge portion.

3. The coated workpiece carrier device of claim 2, wherein the length of the conductive segments in the longitudinal direction decreases linearly away from the central axis portion along the central axis portion to the rim portion.

4. The coated workpiece carrier device according to claim 2 or 3, wherein the length of the conductive section in the longitudinal direction of the middle shaft portion is 150mm to 400 mm.

5. The coated workpiece carrier device according to claim 4, wherein the conductive partition is a quadrilateral, and two opposite vertices of the quadrilateral are located on the middle shaft portion, and the other two opposite vertices are located on the edge portions at two sides, respectively.

6. The device as claimed in any one of claims 1 to 3 and 5, wherein the two conductive regions on both sides of the central axis are symmetrically disposed.

7. A roller-type film plating machine is characterized by comprising a film plating machine cavity, a roller, a magnetic field generation component and a film plating workpiece bearing device according to any one of claims 1 to 6, wherein the roller is arranged in the film plating machine cavity, the hanging plate is fixed on the outer surface of the roller, a conductor is connected to the hanging plate, the conductor can cut a magnetic induction line of the magnetic field generation component when the roller rotates, the magnetic field generation component comprises a first magnetic block, the first magnetic block is arranged on the end face of the film plating machine cavity, and the conductor is arranged on the end face of the roller, close to the first magnetic block.

8. The drum coater of claim 7, wherein the target of the coater is disposed on a wall of the coater chamber, the first magnetic block is disposed between the target and the rotating shaft of the drum, the conductor is disposed between the hanging plate and the rotating shaft of the drum, the electromagnetic induction component further comprises a second magnetic block fixed relative to the hanging plate, the second magnetic block is disposed opposite to the first magnetic block, a magnetic pole of the second magnetic block close to the first magnetic block is opposite to a magnetic pole of the first magnetic block close to the second magnetic block, and at least a portion of the conductor is disposed between the first magnetic block and the second magnetic block.

9. The drum coater of claim 8, wherein said conductor is wound around said second magnet to form a multi-turn coil passing between said first magnet and said second magnet.

10. The drum-type coating machine as claimed in any one of claims 7 to 9, wherein there are two first magnetic blocks, two first magnetic blocks are respectively disposed on two opposite end surfaces of the coating machine chamber, and there are two conductors, two conductors are respectively disposed on two opposite end surfaces of the drum.