CN114577146A - Multi-focal-length laser collimation scanning measuring system - Google Patents
Multi-focal-length laser collimation scanning measuring system Download PDFInfo
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- CN114577146A CN114577146A CN202210089168.9A CN202210089168A CN114577146A CN 114577146 A CN114577146 A CN 114577146A CN 202210089168 A CN202210089168 A CN 202210089168A CN 114577146 A CN114577146 A CN 114577146A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/26—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes
- G01B11/27—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes for testing the alignment of axes
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Abstract
The invention discloses a multi-focal-length laser collimation scanning measurement system which is applied to a target chamber to be measured and fixed in an incident mode and comprises a beam expanding lens group, a retroreflector and a focusing lens; the beam expanding lens group comprises a concave lens, a convex lens and a collimating lens which are sequentially arranged and are provided with intervals, an external laser output light source enters the concave lens and emits first laser with a specified diameter and a specified divergence angle after passing through the convex lens and the collimating lens; the first laser is irradiated into a retroreflector, the retroreflector is provided with a plurality of reflecting mirrors, the first laser is irradiated onto the first reflecting mirror in the retroreflector, and the irradiation path of the first laser is changed through the reflection of the plurality of reflecting mirrors; the first laser emitted from the retroreflector is emitted to the focusing mirror, and the laser with the specified light spot is emitted from the focusing mirror to the target chamber to be measured; the center of the focusing mirror is positioned in the first laser irradiation direction, the center of a window of the target chamber to be measured is positioned in the first laser direction, the required laser spot and the spot density are obtained through collimation and focusing, and the scanning measurement precision is improved.
Description
Technical Field
The invention relates to the technical field of laser scanning, in particular to a multi-focal-length laser collimation scanning measurement system.
Background
Different energy lasers hit different target surfaces, which causes different phenomena. The development of physical researches such as the performance, flight path, state equation and the like of different targets is a research subject which can be developed only based on the known target-shooting energy.
For example, application No. CN201510368266.6, discloses a system device for monitoring intense laser energy in real time. The device comprises a 45-degree total reflection mirror made of six-surface fused quartz material, a focusing lens with a six-surface focal length of 1200mm, six energy acquisition probes, a six-channel waveform digital converter and a computer; six beams of strong lasers are used, each beam of laser corresponds to one 45-degree total reflection mirror of the fused quartz material, each 45-degree total reflection mirror of the fused quartz material corresponds to one focusing lens, each focusing lens corresponds to one energy acquisition probe, and data acquired by the energy acquisition probes are input into a computer through the waveform digital converter for acquisition. The establishment and calibration method of the invention provides accurate energy data for laser targeting and lays a foundation for physical research of 'Tianguan I' laser target. Meanwhile, a method for synchronously monitoring and measuring the target shooting energy in real time is provided for various large laser devices, and the accurate measurement of the target shooting energy is the basis for ensuring that each large laser device carries out target physical research.
In a laser target practice experiment or space, because the degree of freedom of a target chamber is low, the output light spot of the laser and the focusing requirement need to be changed to be matched with the target position, but the accuracy of the output light spot and the focusing requirement cannot meet the requirement, so that the required test light spot cannot be obtained.
Disclosure of Invention
The invention mainly aims to provide a multi-focal-length laser collimation scanning measurement system which can enter laser spots in a target chamber to be measured and improve measurement accuracy.
In order to achieve the purpose, the invention provides the following technical scheme:
a multi-focal-length laser collimation scanning measurement system is applied to an incident fixed target chamber to be measured and comprises a beam expander set, a retroreflector and a focusing mirror;
the beam expanding lens group comprises a concave lens, a convex lens and a collimating lens which are sequentially arranged and are provided with intervals, an external laser output light source is emitted into the concave lens, and first laser with a specified diameter and a specified divergence angle is emitted after passing through the convex lens and the collimating lens;
the first laser light is incident into the retroreflector, the retroreflector is provided with a plurality of reflecting mirrors, the first laser light is incident onto a first reflecting mirror in the retroreflector, and an irradiation path of the first laser light is changed by reflection of the plurality of reflecting mirrors;
the first laser emitted from the retroreflector is emitted to the focusing mirror, and the laser with a specified light spot is emitted from the focusing mirror to the target chamber to be measured; the center of the focusing mirror is positioned in the first laser irradiation direction, the distance between the focusing mirror and the target chamber to be detected is the focusing parameter of the focusing mirror, and the center of a window entering the target chamber to be detected is positioned in the first laser direction.
Further, the device also comprises a motor;
the focusing mirror is arranged on the motor, the motor drives the focusing mirror to move relative to the target chamber to be detected along the irradiation direction of the first laser, so that the distance between the center of the focusing mirror and the center of the target chamber to be detected is the focusing parameter of the focusing mirror.
Further, the retroreflector at least comprises the first reflector, the second reflector, the third reflector and the emergent reflector;
the first reflecting mirror is obliquely arranged with the irradiation direction of the first laser, and after the first laser is incident on the first reflecting mirror, the laser reflected from the first reflecting mirror is incident on the second reflecting mirror;
the second reflecting mirror is arranged to be inclined with respect to the direction of laser irradiation incident on the second reflecting mirror, and the laser beam emitted from the second reflecting mirror is incident on the third reflecting mirror;
the third reflector and the direction of laser irradiation entering the third reflector are obliquely arranged, and the laser emitted from the third reflector enters the emitting reflector;
the emitting reflector and the direction of laser irradiation entering the emitting reflector are arranged in an inclined mode, and first laser emitted from the emitting reflector enters the focusing mirror.
Further, the first reflecting mirror, the second reflecting mirror, the third reflecting mirror, and the emission reflecting mirror are arranged at an angle of 45 degrees with respect to the incident angle of the first laser beam.
Furthermore, the device also comprises a moving module;
the first reflector and the emergent reflector are fixedly arranged in the retroreflector;
the second reflector and the third reflector are fixedly arranged on the movable module, and the movable module is simultaneously far away from or simultaneously close to the first reflector and the emergent reflector to move.
Further, the moving module comprises a driving motor;
the driving motor drives the second reflecting mirror and the third reflecting mirror to reciprocate.
The lens holder is arranged on the driving motor;
the second mirror with the third speculum is fixed set up in on the mirror holder, just the second mirror with the third speculum contained angle is 90 degrees settings.
Furthermore, the laser beam expander further comprises a laser output light source, and the emission center of the laser output light source and the center of the beam expander group are located on the same horizontal line.
Further, the device also comprises a sealed shell;
the target chamber to be tested, the beam expander set, the retroreflector, the focusing lens and the laser output light source are arranged in the sealed shell.
Further, the light-passing tube is also included;
the light transmitting tube is used for wrapping a first laser light path which is incident into the retroreflector from the beam expander set, a first laser light path which is emitted to the focusing mirror from the retroreflector, and a first laser light path which is emitted to the target chamber to be tested from the focusing mirror;
the inner diameter of the light passing pipe is larger than the maximum outer diameter of the first laser.
The multi-focal-length laser collimation scanning measurement system provided by the invention has the beneficial effects that the laser output light source sequentially passes through the beam expanding lens group, the retroreflector and the focusing lens, the required laser spot and the spot density are obtained through collimation and focusing, and the laser spot and the spot density are shot into a target chamber to be measured, so that the scanning measurement precision is improved.
Drawings
Fig. 1 is a schematic structural diagram of a multi-focal-length laser collimation scanning measurement system according to an embodiment of the present invention.
The implementation, functional features and advantages of the objects of the present invention will be further explained with reference to the accompanying drawings.
Detailed Description
It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention.
Referring to fig. 1, the invention provides a multi-focal-length laser collimation scanning measurement system, which is applied to an incident fixed target chamber 7 to be measured, and comprises a beam expander set 2, a retroreflector 3 and a focusing lens 5; the beam expander group 2 comprises a concave lens 21, a convex lens 22 and a collimating lens 23 which are sequentially arranged and are provided with intervals, an external laser output light source 1 emits into the concave lens 21 and emits first laser 4 with a specified diameter and a specified divergence angle after passing through the convex lens 22 and the collimating lens 23; the first laser 4 is incident on the retroreflector 3, the retroreflector 3 is provided with a plurality of mirrors, the first laser 4 is incident on the first mirror 31 in the retroreflector 3, and the irradiation path of the first laser 4 is changed by reflection of the plurality of mirrors; the first laser 4 emitted from the retroreflector 3 is emitted onto the focusing mirror 5, and the laser with the specified light spot is emitted from the focusing mirror 5 to the target chamber 7 to be measured; the center of the focusing mirror 5 is located in the irradiation direction of the first laser 4, the distance between the focusing mirror 5 and the target chamber 7 to be measured is the focusing parameter of the focusing mirror, and the center of the window 71 entering the target chamber 7 to be measured is located in the direction of the first laser 4.
In the present invention, the beam expander set 2 is a lens assembly for changing the diameter and the divergence angle of a laser beam, and includes a concave lens 21, a convex lens 22 and a collimating lens 23, wherein the concave lens 21 is a lens with a negative focal length f1, and is configured to amplify the diameter of an incident laser, wherein an external laser output light source 1 is fixed at a specified position, an emission point of the laser output light source 1 and a center of the concave lens 21 and a center of the convex lens 22 are located on the same straight line along an emission direction, a distance value from the center of the concave lens 21 to the laser output light source 1 is an absolute value of the focal length of the concave lens, that is, if the focal length of the concave lens 21 is-350 mm, a distance from the center of the concave lens 21 to the laser output light source 1 is 350 mm. The convex lens 22 is a lens with a positive focal length f2, and the distance between the center of the concave lens 21 and the center of the convex lens 22 is set to be (f1+ f2), wherein the focal length of the convex lens 22 is greater than the absolute value of the focal length of the concave lens 21, for example, in a specific embodiment, the focal length of the convex lens 22 is 1000mm, and the distance between the center of the concave lens 21 and the center of the convex lens 22 is-350 mm +1000mm ═ 650mm, so that the positions of the concave lens 21 and the convex lens 22 relative to the laser output light source 1 can be obtained, and then the position of the collimating mirror can be manually adjusted according to the laser spot diameter to be expanded, so that the diameter and the divergence angle of the first laser beam 4 emitted from the beam expander set 2 are within the required ranges.
The first laser 4 is injected into the retroreflector 3 and reflected by a plurality of mirrors in the retroreflector 3 to change the optical path length of the first laser 4, the optical path length is changed in order to change the time difference of each pulse in the laser entering the target chamber 7 to be measured, that is, the time difference of the pulse entering the target chamber 7 to be measured is changed by delay control. In one embodiment, since the beam velocity is fixed at 3 × 10^8m/s, if it is determined that the range of scanning required to obtain the delay is 100ps based on the original optical path length, where 1ps is 10 times minus 12 seconds (i.e., 1ps is 10^ 12s), then 3 × 10 × 8m/s 100ps is 3cm, i.e., the required extended optical path length is 3cm, so that the laser pulse entering the target chamber 7 to be measured is adjusted to the required scanning value.
The first laser 4 emitted from the retroreflector 3 enters the focusing mirror 5, the focusing mirror 5 focuses the first laser 4, and then emits the required laser density and diameter into the target chamber 7 to be measured, wherein the focusing mirror 5 includes a plurality of focusing parameters, such as the focusing mirrors 5 with focusing parameters of 350mm, 500mm, 700mm, and 900mm, and the setting of the focusing mirror 5 with different focusing parameters needs to change the distance between the focusing mirror 5 and the center of the target chamber 7 to be measured, and the distance is the focusing parameter of the focusing mirror 5, for example, in a specific embodiment, if the focusing mirror 5 with focusing parameter of 500mm is adopted, the distance between the center of the focusing mirror 5 and the target chamber 7 to be measured is 500 mm.
In one embodiment, for example, the ratio of the diameter of the laser output light source 1 to the corrected diameter of the beam expander set 2 is 1: 2; the wavelength gamma of the laser output light source 1 is 1064nm, the focusing parameter f of the focusing mirror 5 is 500mm, the diameter of the laser output light source 1 is 9mm, the diameter of the beam expander group 2 can be corrected to be 18mm, the diameter of the first laser beam 4 entering the focusing mirror 5 is 18mm, the rayleigh length is 1mm, and the diameter D of the laser spot coming out from the focusing mirror 5 is:
namely 4 x 1064 x 500/(3.14 x 18) 37650.38mm x 37.6 μm, i.e. the diameter of the laser spot entering the target chamber 7 to be measured is 37.6 μm.
By changing the distance of the light path of the first laser 4, the pulse time of the laser can be changed, so that the pulse of the first laser 4 entering the target chamber 7 to be detected from the window 71 is consistent with the target point to be hit, the function of scanning and targeting is realized, the targeting precision is improved, and the laser coming out of the target chamber 7 to be detected enters the optical garbage can 8 for recycling.
In other specific embodiments, the ratio of the diameter of the laser output light source 1 to the corrected diameter of the beam expander set 2 may also be 1:1, 2:3, or 3:4, and no matter how many ratio values are, how many laser spot diameters d come out from the focusing lens 5 can be calculated by the above calculation method, so as to achieve the purpose of laser targeting.
In the present embodiment, a motor 6 is further included; the focusing mirror 5 is arranged on the motor 6, and the motor 6 drives the focusing mirror 5 to move along the irradiation direction of the first laser 4 relative to the target chamber 7 to be measured, so that the distance between the center of the focusing mirror 5 and the center of the target chamber 7 to be measured is the focusing parameter of the focusing mirror 5. A fixing frame for fixing the focusing lens 5 is arranged on the motor 6, the focusing lens 5 is fixed on the fixing frame, and the center of the focus of the focusing mirror 5 and the center of the window 71 of the target chamber 7 to be measured are arranged on the same straight line along the irradiation direction of the first laser 4, the distance between the center of the focusing mirror and the center of the target chamber 7 to be measured is moved according to the focusing parameters of the focusing mirror 5, more specifically, if the focusing parameters of the focusing mirror 5 are 500mm, the distance between the center of the focusing mirror 5 and the center of the target chamber 7 to be measured is 500mm, the focusing mirror 5 is adjusted to move manually or by other methods in advance, the motor 6 controls the fixed frame to move, the fixed frame moves to drive the focusing mirror 5 to move, wherein, the motor 6 adopts a stepping motor, the precision is 2 μm, and the stroke of the motor 6 can be larger than 30mm movement, so as to improve the precision of the movement position of the focusing mirror 5 in the movement process. In other embodiments, the focusing mirror 5 may also adopt a focusing mirror 5 with focusing parameters of 700mm, 350mm and 900mm, and the distance between the center of the focusing mirror 5 and the center of the target chamber 7 to be measured may be correspondingly changed.
In the present embodiment, the retroreflector 3 includes at least a first mirror 31, a second mirror 32, a third mirror 33, and an exit mirror 34; the first reflecting mirror 31 is arranged obliquely to the direction in which the first laser beam 4 is irradiated, and after the first laser beam 4 is incident on the first reflecting mirror 31, the laser beam reflected from the first reflecting mirror 31 is incident on the second reflecting mirror 32; the second reflecting mirror 32 is disposed obliquely to the direction of laser irradiation incident on the second reflecting mirror 32, and the laser light emitted from the second reflecting mirror 32 is incident on the third reflecting mirror 33; the third reflecting mirror 33 is disposed obliquely to the direction of laser irradiation entering the third reflecting mirror 33, and the laser light emitted from the third reflecting mirror 33 enters the exit reflecting mirror 34; the exit mirror 34 is provided obliquely to the direction of laser irradiation entering the exit mirror 34, and the first laser light 4 emitted from the exit mirror 34 is incident on the focusing mirror 5.
In the present embodiment, four mirrors are provided in the retroreflector 3, the first laser light 4 enters the retroreflector 3 and enters the first mirror 31 in advance, the laser light reflected by the first mirror 31 enters the second mirror 32, the laser light emitted from the second mirror 32 enters the third mirror 33, the laser light emitted from the third mirror 33 enters the emission mirror 34, and the laser light emitted from the emission mirror 34, that is, the first laser light 4 emitted from the retroreflector 3 enters the focusing mirror 5. In one embodiment, the reflector is a 1.5 inch cube reflector, and the direction of the first laser beam 4 entering the first reflector 31 is the same as the direction of the laser beam exiting the exit reflector 32. In other embodiments, after the laser light is reflected, the direction of the first laser light 4 entering the first reflecting mirror 31 and the direction of the laser light emitted from the emitting mirror 34 may be different, as long as one of the changing laser paths of the present invention can be realized.
In the present embodiment, the first mirror 31, the second mirror 32, the third mirror 33, and the exit mirror 34 are disposed at an angle of 45 degrees with respect to the incident angle of the first laser beam. A 45 degree cube mirror is used to facilitate the calculation of the laser path length, and in other embodiments, cube mirrors such as 60 degrees, 30 degrees, etc. may be used.
In this embodiment, the present invention further includes a moving module 35; the first mirror 31 and the exit mirror 34 are fixedly disposed in the retroreflector 3; the second reflector 32 and the third reflector 33 are fixedly disposed on the moving module 35, and the moving module 35 moves away from or close to the first reflector 31 and the exit reflector 34 simultaneously. The distance between the reflecting mirrors in the retroreflector 3 is changed to change the laser path length, so that the time of the pulse laser delay to enter the target chamber 7 to be measured is changed. In an embodiment, the second reflector 32 and the third reflector 33 are fixedly disposed on the moving module 35, and the moving module 35 moves to drive the second reflector 32 and the third reflector 33 to simultaneously move away from or simultaneously move toward the first reflector 31 and the emitting reflector 34, such as to increase the laser path length if the two reflectors are simultaneously away from each other, or to decrease the laser path length if the two reflectors are simultaneously close to each other.
In the present embodiment, the moving module 35 includes a driving motor; the second reflecting mirror 32 and the third reflecting mirror 33 are moved back and forth by the driving motor. In the embodiment, the device further comprises a mirror bracket, wherein the mirror bracket is arranged on the driving motor; the second reflector 32 and the third reflector 33 are fixedly arranged on the mirror frame, and the included angle between the second reflector 32 and the third reflector 33 is 90 degrees. That is, the included angle between the laser beam entering the second reflecting mirror 32 and the laser beam exiting from the third reflecting mirror 33 in the horizontal and vertical directions is 0 degree, and the direction of the first laser beam 4 entering the first reflecting mirror 31 is the same as the direction of the laser beam exiting from the exit reflecting mirror 34. The mirror frame is controlled by a motor to move, and the mirror frame moves to drive the second reflecting mirror 32 and the third reflecting mirror 33 to move simultaneously along the same direction, wherein the driving motor is a stepping motor, the precision is 2 microns, and the stroke of the motor can be larger than 30mm, so that the precision of the moving position of the reflecting mirror is improved in the moving process, and the length of an optical path is adjusted. In a specific embodiment, the driving motor and the motor 6 for controlling the movement of the focusing mirror 5 are the same motor type.
In this embodiment, the laser system further includes a laser output light source 1, and an emission center of the laser output light source 1 and a center of the beam expander set 2 are located on the same horizontal line.
In this embodiment, a sealed housing 9 is also included; the target chamber 7 to be measured, the beam expanding lens group 2, the retroreflector 3, the focusing lens 5 and the laser output light source 1 are arranged in the sealed shell 9. The air flow is sealed by the sealing shell 9, so that the influence of air flow disturbance and impurity particles in the atmosphere on the testing precision is avoided.
In the embodiment, the device also comprises a light-passing pipe; the light-transmitting tube is used for wrapping a first laser light path which is incident into the retroreflector 3 from the beam expander set 2, a first laser light path which is emitted to the focusing lens 5 from the retroreflector 3, and a first laser light path which is emitted to the target chamber 7 to be measured from the focusing lens 5; the inner diameter of the light passing tube is larger than the largest outer diameter of the first laser 4. The diameter of the first laser 4, namely the spot diameter, can be changed according to different requirements, so that when the light-passing tube is arranged, the maximum spot diameter which is allowed to change is preset, and the light-passing tube is arranged to package a laser path, so that the laser is prevented from being mistakenly touched by mistake during operation in the debugging process, stray light is eliminated, external radiation is prevented, eyes are injured, and an operator is protected.
According to the multi-focal-length laser collimation scanning measurement system, the laser output light source sequentially passes through the beam expanding lens group, the retroreflector and the focusing lens, the required laser spot and the spot density are obtained through collimation and focusing, and the laser spot and the spot density are shot into the target chamber to be measured, so that the scanning measurement precision is improved.
The above description is only a preferred embodiment of the present invention, and not intended to limit the scope of the present invention, and all modifications of equivalent structures and equivalent processes, which are made by using the contents of the present specification and the accompanying drawings, or directly or indirectly applied to other related technical fields, are included in the scope of the present invention.
Claims (10)
1. A multi-focal-length laser collimation scanning measurement system is applied to an incident fixed target chamber to be measured and is characterized by comprising a beam expander lens group, a retroreflector and a focusing lens;
the beam expanding lens group comprises a concave lens, a convex lens and a collimating lens which are sequentially arranged and are provided with intervals, an external laser output light source is emitted into the concave lens, and first laser with a specified diameter and a specified divergence angle is emitted after passing through the convex lens and the collimating lens;
the first laser light is incident into the retroreflector, the retroreflector is provided with a plurality of reflecting mirrors, the first laser light is incident onto a first reflecting mirror in the retroreflector, and an irradiation path of the first laser light is changed by reflection of the plurality of reflecting mirrors;
the first laser emitted from the retroreflector is emitted to the focusing mirror, and the laser with a specified light spot is emitted from the focusing mirror to the target chamber to be measured; the center of the focusing mirror is positioned in the first laser irradiation direction, the distance between the focusing mirror and the target chamber to be detected is the focusing parameter of the focusing mirror, and the center of a window entering the target chamber to be detected is positioned in the first laser direction.
2. The multi-focal-length laser collimation scanning measurement system of claim 1, further comprising a motor;
the focusing mirror is arranged on the motor, the motor drives the focusing mirror to move relative to the target chamber to be detected along the irradiation direction of the first laser, so that the distance between the center of the focusing mirror and the center of the target chamber to be detected is the focusing parameter of the focusing mirror.
3. The multi-focal-length laser collimation scanning measurement system as recited in claim 1, wherein at least the first mirror, the second mirror, the third mirror, and the exit mirror are included in the retroreflector;
the first reflecting mirror is obliquely arranged with the irradiation direction of the first laser, and after the first laser is incident on the first reflecting mirror, the laser reflected from the first reflecting mirror is incident on the second reflecting mirror;
the second reflecting mirror is arranged to be inclined with respect to the direction of laser irradiation incident on the second reflecting mirror, and the laser beam emitted from the second reflecting mirror is incident on the third reflecting mirror;
the third reflector and the direction of laser irradiation entering the third reflector are obliquely arranged, and the laser emitted from the third reflector enters the emitting reflector;
the emitting reflector and the direction of laser irradiation entering the emitting reflector are arranged in an inclined mode, and first laser emitted from the emitting reflector enters the focusing mirror.
4. The multi-focal-length laser collimation scanning measurement system as claimed in claim 3, wherein the first mirror, the second mirror, the third mirror and the exit mirror are arranged at an angle of 45 degrees with respect to the incident angle of the first laser.
5. The multi-focal-length laser collimation scanning measurement system as claimed in claim 3 or 4, further comprising a moving module;
the first reflector and the emergent reflector are fixedly arranged in the retroreflector;
the second reflector and the third reflector are fixedly arranged on the movable module, and the movable module is simultaneously far away from or simultaneously close to the first reflector and the emergent reflector to move.
6. The multi-focal-length laser collimation scanning measurement system of claim 5, wherein the moving module comprises a driving motor;
the driving motor drives the second reflecting mirror and the third reflecting mirror to reciprocate.
7. The multi-focal-length laser collimation scanning measurement system as claimed in claim 6, further comprising a mirror bracket, wherein the mirror bracket is arranged on the driving motor;
the second mirror with the third speculum is fixed set up in on the mirror holder, just the second mirror with the third speculum contained angle is 90 degrees settings.
8. The multi-focal-length laser collimation scanning measurement system as claimed in claim 1, further comprising a laser output light source, wherein an emission center of the laser output light source and a center of the beam expander set are located on the same horizontal line.
9. The multi-focal-length laser collimation scanning measurement system of claim 1, further comprising a sealed housing;
the target chamber to be tested, the beam expander set, the retroreflector, the focusing lens and the laser output light source are arranged in the sealed shell.
10. The multi-focal-length laser collimation scanning measurement system of claim 8, further comprising a light-passing tube;
the light transmitting tube is used for wrapping a first laser light path incident into the retroreflector from the beam expander set, a first laser light path emitted to the focusing mirror from the retroreflector and a first laser light path emitted to the target chamber to be measured from the focusing mirror;
the inner diameter of the light passing pipe is larger than the maximum outer diameter of the first laser.
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