CN114571365A - Polishing disk surface finishing device - Google Patents
Polishing disk surface finishing device Download PDFInfo
- Publication number
- CN114571365A CN114571365A CN202210067701.1A CN202210067701A CN114571365A CN 114571365 A CN114571365 A CN 114571365A CN 202210067701 A CN202210067701 A CN 202210067701A CN 114571365 A CN114571365 A CN 114571365A
- Authority
- CN
- China
- Prior art keywords
- polishing
- cross beam
- guide
- positioning rod
- disc
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005498 polishing Methods 0.000 title claims abstract description 73
- 238000000227 grinding Methods 0.000 claims description 44
- 239000000498 cooling water Substances 0.000 claims description 6
- 229920003023 plastic Polymers 0.000 claims description 5
- 239000004033 plastic Substances 0.000 claims description 5
- 230000003014 reinforcing effect Effects 0.000 claims description 3
- 230000003750 conditioning effect Effects 0.000 claims 7
- 238000009434 installation Methods 0.000 abstract description 4
- 238000000034 method Methods 0.000 description 6
- 230000008569 process Effects 0.000 description 6
- 230000008859 change Effects 0.000 description 4
- 239000002002 slurry Substances 0.000 description 4
- 229910000831 Steel Inorganic materials 0.000 description 3
- 230000008439 repair process Effects 0.000 description 3
- 239000010959 steel Substances 0.000 description 3
- 238000005034 decoration Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 2
- 229910010271 silicon carbide Inorganic materials 0.000 description 2
- 230000003746 surface roughness Effects 0.000 description 2
- 238000003466 welding Methods 0.000 description 2
- 229910001018 Cast iron Inorganic materials 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 238000000498 ball milling Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 1
- 229910052594 sapphire Inorganic materials 0.000 description 1
- 239000010980 sapphire Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 238000005728 strengthening Methods 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B53/00—Devices or means for dressing or conditioning abrasive surfaces
- B24B53/12—Dressing tools; Holders therefor
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/11—Lapping tools
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/27—Work carriers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/34—Accessories
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B41/00—Component parts such as frames, beds, carriages, headstocks
- B24B41/02—Frames; Beds; Carriages
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B53/00—Devices or means for dressing or conditioning abrasive surfaces
- B24B53/095—Cooling or lubricating during dressing operation
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B57/00—Devices for feeding, applying, grading or recovering grinding, polishing or lapping agents
- B24B57/02—Devices for feeding, applying, grading or recovering grinding, polishing or lapping agents for feeding of fluid, sprayed, pulverised, or liquefied grinding, polishing or lapping agents
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Polishing Bodies And Polishing Tools (AREA)
Abstract
The invention discloses a polishing disk surface finishing device.A polishing disk capable of rotating automatically can be placed on a platform; the first end of the beam is connected with the top end of the upright post, and the beam can rotate to any angle by taking the upright post as a center and then is fixedly connected; a first end of the positioning rod is fixedly connected with a second end of the cross beam, the second end of the positioning rod is uniformly provided with a plurality of guide rod mounting holes along the length direction of the positioning rod, and each guide rod mounting hole penetrates through the positioning rod from top to bottom; the top end of the guide rod can penetrate into any guide rod mounting hole and is locked and fixed, and the bottom end of the guide rod is provided with a guide wheel through a bearing; the locating hole has been seted up at the abrasive disc center, and the diameter of locating hole is greater than the external diameter of guide pulley, and after the abrasive disc was placed in polishing dish surface and is waited to grind the position, the guide pulley was inserted in the locating hole at abrasive disc center, and after polishing dish rotation, the abrasive disc used polishing dish central point as the rotation of center. The installed polishing disk can be integrally processed, and the deformation of the polishing disk during carrying and installation can be repaired.
Description
Technical Field
The invention relates to a single-sided/double-sided polishing machine for high-precision SIC, monocrystalline silicon, sapphire and the like in the semiconductor industry, in particular to a polishing disc surface finishing device.
Background
The polishing disk of the single-sided/double-sided polishing machine is independently machined on a grinding machine in the past, and then is installed on a water-cooling disk through bolt connection. The polishing disk is easy to deform during transportation and installation, so that the surface of the polishing disk is uneven after installation, the geometric parameters of polishing are influenced, and even a wafer with high TTV (silicon wafer flatness) requirements cannot be processed.
Disclosure of Invention
Aiming at the problems in the prior art, the invention provides a polishing disk surface finishing device which can integrally process an installed polishing disk and repair the deformation of the polishing disk during transportation and installation. The constant temperature cooling water is introduced in the process of grinding the polishing disc to simulate the conditions in actual processing, and the optimal disc-shaped appearance (convex or concave) and the roughness below 0.4um in actual polishing processing can be trimmed.
The technical scheme of the invention is as follows: a polishing disk surface finishing device comprises a platform, a stand column, a cross beam, a positioning rod, a guide wheel and a grinding disk;
the polishing disk capable of rotating automatically can be placed on the platform;
the bottom end of the upright post is fixed on the platform;
the first end of the cross beam is connected with the top end of the upright post, and the cross beam can rotate to any angle by taking the upright post as a center and then is fixedly connected;
the positioning rod is horizontally arranged, a first end of the positioning rod is fixedly connected with a second end of the cross beam, a plurality of guide rod mounting holes are uniformly formed in the second end of the positioning rod along the length direction of the positioning rod, and each guide rod mounting hole penetrates through the positioning rod from top to bottom;
the top end of the guide rod can penetrate into any guide rod mounting hole and is locked and fixed, and the bottom end of the guide rod is provided with a guide wheel through a bearing;
the center of the grinding disc is provided with a positioning hole, the diameter of the positioning hole is larger than the outer diameter of the guide wheel, after the grinding disc is placed on the surface of the polishing disc to be ground, the guide wheel is inserted into the positioning hole in the center of the grinding disc, and the bottom surface of the guide wheel is not in contact with the surface of the polishing disc; when the polishing disc rotates, the grinding disc rotates by taking the central point of the polishing disc as a center.
Furthermore, a flange plate is sleeved at the top end of the upright post, a plurality of triangular reinforcing ribs are arranged between the bottom surface of the flange plate and the outer surface of the upright post, and a plurality of first threaded holes are uniformly formed in the disk surface of the flange plate;
a cylinder is welded at the first end of the cross beam, and a plurality of arc grooves are uniformly formed in the cross beam on the outer side of the cylinder;
after the column is inserted into the top end of the upright column, the bottom surface of the cross beam is supported by the upper surface of the flange plate, and after the cross beam rotates to a required angle by taking the upright column as a center, the cross beam penetrates through the arc groove and the first threaded hole through the screw, and the first end of the cross beam is fixedly connected with the top end of the upright column.
Furthermore, a plurality of second threaded holes which are equally spaced are formed in the second end of the cross beam along the length direction of the cross beam; a plurality of bolt countersunk holes with equal intervals are formed in the first end of the positioning rod along the length direction of the positioning rod; and a plurality of screws penetrate through the screw countersunk holes and the second threaded holes in a one-to-one correspondence manner, so that the first end of the positioning rod is fixedly connected with the second end of the cross beam.
Furthermore, third threaded holes are formed in two side faces of each guide rod mounting hole, and the top ends of the guide rods are locked and fixed in the guide rod mounting holes after the two locking screws penetrate through the third threaded holes in a one-to-one correspondence mode.
Furthermore, the guide wheel is made of plastic. Even if the polishing disc is abraded, the abraded foreign matters of the plastic cannot damage the polishing disc.
Further, the grinding surface of the grinding disc is provided with a # -shaped groove. The well-shaped grooves facilitate storage of the grinding slurry.
Furthermore, a through hole convenient for introducing constant-temperature cooling water is reserved in the middle of the platform.
Furthermore, a plurality of fourth threaded holes for fixing are distributed on the cylinder at the first end of the cross beam. When the cross beam is adjusted to a certain angle, the fixing function can be achieved.
The invention has the beneficial effects that:
the polishing disc surface finishing device can integrally process the mounted polishing disc and can repair the deformation of the polishing disc during carrying and mounting. The constant temperature cooling water is introduced in the process of grinding the polishing disc to simulate the conditions in actual processing, and at the moment, the optimal disc-shaped shape convex or concave and the roughness below 0.4um in actual polishing processing can be trimmed.
The grinding disc of the device adopts a driven form, and the revolution rotating speed of the grinding disc and the rotation rotating speed of the polishing disc can be ensured to be 1: 1, the movement track height at this moment is concentrated and repeatability is high, and the regulation of polishing quotation presents the controllability, and along with the change of the rotation central point of abrasive disc position, the regulation position of polishing quotation also follows the change. The appearance of the surface of the polishing disc can be controlled by adjusting the rotation center position and the grinding time of the grinding disc. Silicon carbide grinding slurry is introduced into one side of the grinding disc, so that the removal amount of grinding can be ensured, and the surface roughness of the polishing disc is less than or equal to 0.4 um.
Drawings
FIG. 1 is a view showing a state of use of a polishing pad surface conditioner;
FIG. 2 is a top view of the polishing pad resurfacing device;
FIG. 3 is a schematic structural view of a platen;
FIG. 4 is a schematic structural view of a column;
FIG. 5 is a schematic structural view of a cross beam;
FIG. 6 is a schematic view of a positioning rod;
FIG. 7 is a schematic view of the guide bar wheel assembly;
FIG. 8 is a schematic view of the structure of the polishing disk.
In the figure: 1 is the platform, 2 is the stand, 3 is the crossbeam, 4 is the locating lever, 5 is the guide arm, 6 is the guide pulley, 7 is the abrasive disc, 11 is the through-hole, 21 is the ring flange, 22 is the triangle strengthening rib, 23 is first screw hole, 31 is the cylinder, 32 is the circular arc groove, 33 is the second screw hole, 34 is the fourth screw hole, 41 is the guide arm mounting hole, 42 is the screw counter bore, 43 is the third screw hole, 71 is the locating hole.
Detailed Description
The invention is further described below with reference to the accompanying drawings.
As shown in fig. 1 and 2, a polishing pad surface dressing apparatus comprises a platform 1 shown in fig. 3, a column 2 shown in fig. 4, a cross beam 3 shown in fig. 5, a positioning rod 4 shown in fig. 6, a guide rod 5 shown in fig. 7, a guide wheel 6, and a grinding pad 7 shown in fig. 8.
The polishing disk capable of rotating can be placed on the platform 1. The platform is formed by welding a medium-thickness steel plate and channel steel. Platform intermediate reservation
The through hole 11 is convenient for introducing constant-temperature cooling water when the polishing disc is ground.
The bottom end of the upright post 2 is fixed on the platform 1 through a screw. The top of the upright post 2 is sleeved with a flange 21, a plurality of triangular reinforcing ribs 22 are arranged between the bottom surface of the flange 21 and the outer surface of the upright post 2, and 20 first threaded holes 23 are uniformly formed in the disc surface of the flange 21, so that the cross beam can be fastened by screws when rotating conveniently. The top end of the upright post is processed to ensure the cylindricity and the size of the cylinder to become the rotation center of the cross beam.
Crossbeam 3 adopts 25# c channel-section steel, the welding of 3 first ends of crossbeam has cylinder 31, 2 arc grooves 32 have evenly been seted up on the crossbeam 3 in the cylinder 31 outside, be convenient for can match with the first screw hole of stand under the angle of difference. After the cylinder 31 is inserted to the stand 2 top, crossbeam 3 bottom surface passes through flange 21 upper surface and supports, and after crossbeam 3 used stand 2 as the center and rotated to needs angle, passes arc groove 32 and first screw hole 23 through the screw, with crossbeam 3 first end and stand 2 top fixed connection. Still distributing 3 screw holes on the cylinder of crossbeam first end, can playing the fixed action when certain angle of crossbeam adjustment. The second end of the cross beam 3 is provided with 12 equidistant second threaded holes 33 along the length direction of the cross beam, so that the positioning rod can be conveniently installed and adjusted.
The locating lever 4 is placed horizontally, and 5 equidistant screw counter bores 42 are seted up along locating lever length direction to the first end of locating lever 4. The first end of the positioning rod 4 is fixedly connected with the second end of the cross beam 3 by passing 5 screws through the screw countersunk holes 42 and the second threaded holes 33 in a one-to-one correspondence manner. The second end of the positioning rod 4 is evenly provided with 4 guide rod mounting holes 41 along the length direction of the positioning rod, and each guide rod mounting hole 41 penetrates through the positioning rod from top to bottom. The precision of 4 guide rod mounting holes is guaranteed through machining, the autorotation position of the grinding disc can be adjusted through mounting in different holes, and the guide rods are conveniently locked due to the fact that the second threaded holes 33 are formed in the two sides of the guide rod mounting holes respectively.
The guide rod wheel combination is formed by combining a guide rod 5, a guide wheel 6, a bearing and a check ring for a shaft hole. The guide rod requires certain precision and is convenient to be matched with the positioning rod. The guide wheel is arranged on the guide rod through a bearing and a retainer ring for a shaft hole, and the bearing is fixed in a retainer ring mode mainly for facilitating better connection of the guide wheel and the bearing. The guide pulley adopts plastics material, and abrasive disc and guide pulley contact and round the guide pulley rotation, even the guide pulley has wearing and tearing with the abrasive disc, the foreign matter of plastics wearing and tearing also can not have the risk of damage to the polishing dish.
The grinding disc 7 is cast by ball-milling cast iron to form an annular grinding disc. The center of the grinding disc is provided with a positioning hole 71, the diameter of the positioning hole 71 is larger than the outer diameter of the guide wheel 6, when the grinding disc 7 is placed on the surface of the polishing disc to be ground, the guide wheel 6 is inserted into the positioning hole 71 in the center of the grinding disc 7, and the distance between the bottom surface of the guide wheel 6 and the surface of the polishing disc is not contacted. When the polishing disc rotates, the grinding disc rotates by taking the central point of the polishing disc as a center. The grinding surface is provided with a # -shaped groove which is convenient for storing grinding slurry.
The polishing disc surface finishing device can integrally process the mounted polishing disc and can repair the deformation of the polishing disc during carrying and mounting. The constant temperature cooling water is introduced in the process of grinding the polishing disc to simulate the conditions in actual processing, and at the moment, the optimal disc-shaped shape convex or concave and the roughness below 0.4um in actual polishing processing can be trimmed.
The grinding disc of the device adopts a driven form, the weight of the grinding disc is about 100 kilograms, and the revolution rotating speed of the grinding disc and the rotation rotating speed of the polishing disc can be ensured to be 1: 1, the movement track height at this moment is concentrated and repeatability is high, and the regulation of polishing quotation presents the controllability, and along with the change of the rotation central point of abrasive disc position, the regulation position of polishing quotation also follows the change. The appearance of the surface of the polishing disc can be controlled by adjusting the rotation center position and the grinding time of the grinding disc. Silicon carbide grinding slurry is introduced into one side of the grinding disc, so that the removal amount of grinding can be ensured, and the surface roughness of the polishing disc is less than or equal to 0.4 um.
The foregoing is only a preferred embodiment of the present invention, and it should be noted that, for those skilled in the art, various modifications and decorations can be made without departing from the principle of the present invention, and these modifications and decorations should also be regarded as the protection scope of the present invention.
Claims (8)
1. A polishing disk surface dressing device characterized in that: comprises a platform (1), a column (2), a beam (3), a positioning rod (4), a guide rod (5), a guide wheel (6) and a grinding disc (7);
a polishing disk capable of rotating automatically can be placed on the platform (1);
the bottom end of the upright post (2) is fixed on the platform (1);
the first end of the cross beam (3) is connected with the top end of the upright post (2), and the cross beam (3) can rotate to any angle by taking the upright post (2) as a center and then is fixedly connected;
the positioning rod (4) is horizontally arranged, a first end of the positioning rod (4) is fixedly connected with a second end of the cross beam (3), a plurality of guide rod mounting holes (41) are uniformly formed in the second end of the positioning rod (4) along the length direction of the positioning rod, and each guide rod mounting hole (41) penetrates through the positioning rod from top to bottom;
the top end of the guide rod (5) can penetrate into any guide rod mounting hole (41) and is locked and fixed, and the bottom end of the guide rod (5) is provided with a guide wheel (6) through a bearing;
a positioning hole (71) is formed in the center of the grinding disc (7), the diameter of the positioning hole (71) is larger than the outer diameter of the guide wheel (6), after the grinding disc (7) is placed on the surface of the polishing disc to be ground, the guide wheel (6) is inserted into the positioning hole (71) in the center of the grinding disc (7), and the distance between the bottom surface of the guide wheel (6) and the surface of the polishing disc is not contacted; when the polishing disc rotates, the grinding disc rotates by taking the central point of the polishing disc as a center.
2. The polishing pad surface conditioning apparatus of claim 1, wherein: the top end of the upright post (2) is sleeved with a flange plate (21), a plurality of triangular reinforcing ribs (22) are arranged between the bottom surface of the flange plate (21) and the outer surface of the upright post (2), and a plurality of first threaded holes (23) are uniformly formed in the disc surface of the flange plate (21);
a cylinder (31) is welded at the first end of the cross beam (3), and a plurality of arc grooves (32) are uniformly formed in the cross beam (3) on the outer side of the cylinder (31);
after post (2) top inserted cylinder (31), crossbeam (3) bottom surface passes through ring flange (21) upper surface and supports, and after crossbeam (3) used stand (2) to rotate to needs angle as the center, passed arc groove (32) and first screw hole (23) through the screw, with crossbeam (3) first end and stand (2) top fixed connection.
3. The polishing pad surface conditioning apparatus of claim 1, wherein: a second end of the cross beam (3) is provided with a plurality of second threaded holes (33) at equal intervals along the length direction of the cross beam; a plurality of screw countersunk holes (42) with equal intervals are formed in the first end of the positioning rod (4) along the length direction of the positioning rod; the screws penetrate through the screw countersunk holes (42) and the second threaded holes (33) in a one-to-one correspondence mode, and the first end of the positioning rod (4) is fixedly connected with the second end of the cross beam (3).
4. The polishing pad surface conditioning apparatus of claim 1, wherein: third threaded holes (43) are formed in two side faces of each guide rod mounting hole (41), and the top ends of the guide rods (5) are locked and fixed in the guide rod mounting holes (41) after the two locking screws penetrate through the third threaded holes (43) in a one-to-one correspondence mode.
5. The polishing pad surface conditioning apparatus of claim 1, wherein: the guide wheel (6) is made of plastic.
6. The polishing pad surface conditioning apparatus of claim 1, wherein: the grinding surface of the grinding disc (7) is processed with a # -shaped groove.
7. The polishing pad surface conditioning apparatus of claim 1, wherein: a through hole (11) convenient for introducing constant-temperature cooling water is reserved in the middle of the platform (1).
8. The polishing pad surface conditioning apparatus of claim 1, wherein: and a plurality of fourth threaded holes (34) for fixing are distributed on the cylinder at the first end of the cross beam.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210067701.1A CN114571365A (en) | 2022-01-20 | 2022-01-20 | Polishing disk surface finishing device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210067701.1A CN114571365A (en) | 2022-01-20 | 2022-01-20 | Polishing disk surface finishing device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN114571365A true CN114571365A (en) | 2022-06-03 |
Family
ID=81771446
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202210067701.1A Pending CN114571365A (en) | 2022-01-20 | 2022-01-20 | Polishing disk surface finishing device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN114571365A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115194649A (en) * | 2022-09-08 | 2022-10-18 | 成都中科卓尔智能科技集团有限公司 | Multi-degree-of-freedom high-stability photoetching mask substrate polishing turnover arm |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008087081A (en) * | 2006-09-29 | 2008-04-17 | Oki Electric Ind Co Ltd | Grinder, and grinding adjusting method of grinding pad |
| US20120270477A1 (en) * | 2011-04-22 | 2012-10-25 | Nangoy Roy C | Measurement of pad thickness and control of conditioning |
| TW201306994A (en) * | 2011-08-10 | 2013-02-16 | Ginwin Technology Co Ltd | Glass substrate surface grinding method |
| CN202922386U (en) * | 2012-11-22 | 2013-05-08 | 浦江鑫远喷丝板有限公司 | Dedicated grinding machine for spinneret plate processing |
| US20140179204A1 (en) * | 2012-10-01 | 2014-06-26 | Ebara Corporation | Dresser |
-
2022
- 2022-01-20 CN CN202210067701.1A patent/CN114571365A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008087081A (en) * | 2006-09-29 | 2008-04-17 | Oki Electric Ind Co Ltd | Grinder, and grinding adjusting method of grinding pad |
| US20120270477A1 (en) * | 2011-04-22 | 2012-10-25 | Nangoy Roy C | Measurement of pad thickness and control of conditioning |
| TW201306994A (en) * | 2011-08-10 | 2013-02-16 | Ginwin Technology Co Ltd | Glass substrate surface grinding method |
| US20140179204A1 (en) * | 2012-10-01 | 2014-06-26 | Ebara Corporation | Dresser |
| CN202922386U (en) * | 2012-11-22 | 2013-05-08 | 浦江鑫远喷丝板有限公司 | Dedicated grinding machine for spinneret plate processing |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115194649A (en) * | 2022-09-08 | 2022-10-18 | 成都中科卓尔智能科技集团有限公司 | Multi-degree-of-freedom high-stability photoetching mask substrate polishing turnover arm |
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