TW201306994A - Glass substrate surface grinding method - Google Patents

Glass substrate surface grinding method Download PDF

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TW201306994A
TW201306994A TW100128520A TW100128520A TW201306994A TW 201306994 A TW201306994 A TW 201306994A TW 100128520 A TW100128520 A TW 100128520A TW 100128520 A TW100128520 A TW 100128520A TW 201306994 A TW201306994 A TW 201306994A
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Taiwan
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glass substrate
grinding disc
grinding
polishing
central axis
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TW100128520A
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Chinese (zh)
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Chih-Shih Chen
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Ginwin Technology Co Ltd
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Priority to TW100128520A priority Critical patent/TW201306994A/en
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Abstract

In a glass substrate surface grinding method, a glass substrate to be grinded is fixed onto a rotating base first, such that the rotating base can drive the glass substrate to rotate, and the rotating base includes a grinding device installed thereon, and the grinding device can be a grinding disc with a diameter equal to or greater than the longest side of the glass substrate, and a start point and an end point are defined at both sides of the grinding disc respectively. When the grinding disc is used for grinding the glass substrate, the grinding disc abuts a surface of the glass substrate first, and then the start point of the grinding disc is superimposed with the central axis of rotating the glass substrate, and then the grinding disc is moved transversally. When the end point of the grinding disc is superimposed with the central axis of the glass substrate, the grinding disc is lifted away from the surface of the glass substrate, and wavy lines formed on the surface of the glass substrate can be removed effectively, so as to prevent a grinding defect produced at the center of the substrate, and improve the grinding quality and the yield rate of the glass substrate.

Description

玻璃基板表面研磨方法Glass substrate surface grinding method

一種玻璃基板表面研磨方法,尤指用於去除玻璃基板表面波浪紋路之研磨方法。A method for polishing a surface of a glass substrate, especially a method for removing a wave pattern on a surface of a glass substrate.

按,薄膜電晶體顯示器(TFT-LCD)是一種顯示裝置,其影像產生的原理乃是利用一片塗佈著密集相間的紅、綠、藍三色之玻璃(Color Filter彩色濾光片),與一片鍍上電路的玻璃(TFT)接合,兩片玻璃間灌入液晶,再於鍍上電路的玻璃後面置一背光源,利用電壓變化驅動兩片玻璃間之液晶轉動,當光穿透彩色濾光片,會產生色彩變化並顯示出影像,而目前薄膜電晶體顯示器所使用之玻璃基板,大多使用薄板浮式玻璃製程來製造,主要為液態材質密度差,將液態玻璃平整懸浮於液態金屬錫槽,利用液態錫表面光滑的特性拉出玻璃基板,由於製程中玻璃會與液態錫接觸,因此玻璃表面會產生波浪紋,而必須經過研磨、拋光等後段加工,目前研磨加工其主要是將玻璃基板固定於一旋轉台上,利用研磨片完全抵壓罩覆於玻璃基板表面,讓旋轉台帶動玻璃基板旋動時,研磨玻璃基板表面,以去除玻璃基板製程中所產生的波浪紋。Press, a thin film transistor display (TFT-LCD) is a display device whose image generation principle is to use a piece of glass (Color Filter color filter) coated with dense red, green and blue colors, and A piece of circuit-coated glass (TFT) is bonded, two pieces of glass are filled with liquid crystal, and a backlight is placed behind the glass plated with the circuit, and the liquid crystal is rotated by the voltage change when the light passes through the color filter. The light film will produce color changes and display images. At present, the glass substrates used in the thin film transistor display are mostly manufactured by a thin plate floating glass process, mainly because of the poor density of the liquid material, and the liquid glass is suspended in liquid metal tin. The groove uses the smooth surface of the liquid tin to pull out the glass substrate. Since the glass in the process will be in contact with the liquid tin, the surface of the glass will be wavy, and it must be processed by grinding, polishing, etc., and the current grinding process is mainly to glass. The substrate is fixed on a rotating table, and the polishing sheet is completely pressed against the surface of the glass substrate, and the rotating table drives the glass substrate to rotate. The surface of the glass substrate is ground to remove the wavy lines generated in the glass substrate process.

然而,薄膜電晶體顯示器的尺寸越來越大,玻璃基板尺寸也相對的變大,而在玻璃基板的研磨過程中,研磨片會以移動方式來研磨玻璃基板表面,但常常會發生研磨不均勻之情形,經本發明之創作人不斷研究後發現,玻璃基板在研磨過程中,研磨片移動時往往其覆蓋玻璃基板之面積不平均,且越靠近玻璃基板的旋轉中心處,不平均的情形越研嚴重,請參閱第七圖所示,由圖中可清楚看出,玻璃基板A在研磨加工時為呈現樞轉狀態(圖中虛線箭號所示),而研磨片B之位置為由玻璃基板A一側表面抵壓後,再朝向玻璃基板A之樞轉中心移動至研磨片B’處(圖中實心箭號所示),也就是使研磨片B移動超過玻璃基板A之樞轉中心後就停止研磨,以研磨片B所產生之研磨面積而言,只有玻璃基板A外側部分才有受到研磨片B整面之研磨,而越靠近玻璃基板A之樞轉中心受到的研磨量就越少,容易產生研磨加工不良之情形。However, the size of the thin film transistor display is getting larger and larger, and the size of the glass substrate is relatively larger. In the grinding process of the glass substrate, the polishing sheet grinds the surface of the glass substrate in a moving manner, but uneven grinding often occurs. In the case of the creator of the present invention, it has been found that the glass substrate is often unevenly covered by the glass substrate during the polishing process, and the closer to the center of rotation of the glass substrate, the more uneven the situation is. Seriously, please refer to the seventh figure. As can be clearly seen from the figure, the glass substrate A is in a pivoting state during grinding (shown by a broken arrow in the figure), and the position of the polishing sheet B is a glass substrate. After the surface of one side A is pressed, it is moved toward the pivot center of the glass substrate A to the polishing sheet B' (shown by a solid arrow in the figure), that is, after the polishing sheet B is moved beyond the pivot center of the glass substrate A. When the grinding is stopped, only the outer portion of the glass substrate A is ground by the entire surface of the polishing sheet B, and the closer to the pivoting center of the glass substrate A, the polishing area generated by the polishing sheet B is received. Polishing amount less prone to failure of the grinding situation.

是以,要如何改善上述玻璃基板研磨加工之過程,以避免玻璃基板表面波浪紋無法有效去除之問題,即為從事此相關業者所亟欲研究解決之課題所在。Therefore, how to improve the process of the above-mentioned glass substrate grinding process to avoid the problem that the wave surface of the glass substrate cannot be effectively removed is the subject of research and solution by the relevant industry.

本發明之主要目的乃在於,利用研磨片以移動研磨方式於玻璃基板二側形成相等之研磨面積,進而讓玻璃基板表面之波浪紋可有效的去除,並可防止玻璃基板中心處產生研磨不良之問題,以提高玻璃基板的研磨品質以及產品良率。The main purpose of the present invention is to form an equal polishing area on both sides of the glass substrate by using a polishing sheet by moving the polishing method, thereby effectively removing the wave pattern on the surface of the glass substrate, and preventing the occurrence of poor polishing at the center of the glass substrate. The problem is to improve the polishing quality and product yield of the glass substrate.

為達上述目的,本發明之玻璃基板表面研磨方法,係先將待研磨之玻璃基板固定於旋轉座上,使旋轉座旋轉帶動玻璃基板旋動,而旋轉座上方設置有研磨裝置,研磨裝置為樞設有研磨盤,研磨盤之直徑至少等於待研磨之玻璃基板最長邊之長度,且研磨盤周緣二側分別設置有起始點與終止點,且起始點與終止點所連成之直線為通過研磨盤之軸心;當研磨盤對旋轉中的玻璃基板進行研磨時,為會先使研磨盤抵壓至玻璃基板表面,並讓研磨盤之起始點重疊於玻璃基板於旋轉時之中心軸,再使研磨盤橫向位移,位移方向為研磨盤之軸心朝向玻璃基板之中心軸直線位移,使研磨盤之軸心通過玻璃基板之中心軸後,並於研磨盤之終止點重疊玻璃基板之中心軸時,再將研磨盤抬離玻璃基板表面。In order to achieve the above object, the glass substrate surface polishing method of the present invention first fixes the glass substrate to be polished to the rotating base, and rotates the rotating base to drive the glass substrate to rotate, and the polishing device is disposed above the rotating seat, and the grinding device is The grinding disc is pivoted, the diameter of the grinding disc is at least equal to the length of the longest side of the glass substrate to be polished, and the starting point and the ending point are respectively arranged on the two sides of the grinding disc, and the starting point and the ending point are connected In order to pass through the axis of the grinding disc; when the grinding disc grinds the rotating glass substrate, the grinding disc is first pressed against the surface of the glass substrate, and the starting point of the grinding disc is overlapped with the glass substrate during rotation. The central axis, and then the grinding disc is laterally displaced, the displacement direction is that the axis of the grinding disc is linearly displaced toward the central axis of the glass substrate, so that the axis of the grinding disc passes through the central axis of the glass substrate, and the glass is overlapped at the end point of the grinding disc When the center axis of the substrate is used, the grinding disc is lifted off the surface of the glass substrate.

請參閱第一圖以及第二圖所示,由圖中可清楚看出,本發明之研磨方法係將待研磨之玻璃基板1固定於旋轉座2上,使旋轉座2於旋轉時帶動玻璃基板1旋動,而旋轉座2上方設置有研磨裝置3,研磨裝置3設置有支臂31,支臂31為樞接有研磨盤32,而研磨盤32之直徑為等於待研磨之玻璃基板1最長邊之長度,並於研磨盤32周緣二側分別設置有起始點321與終止點322,且起始點321與終止點322所連成之直線為通過研磨盤32之軸心323。Referring to the first figure and the second figure, it can be clearly seen from the figure that the polishing method of the present invention fixes the glass substrate 1 to be polished on the rotating base 2, so that the rotating base 2 drives the glass substrate when rotating. 1 is rotated, and a grinding device 3 is disposed above the rotating base 2. The grinding device 3 is provided with an arm 31. The arm 31 is pivotally connected to the grinding disc 32, and the diameter of the grinding disc 32 is equal to the longest length of the glass substrate 1 to be polished. The length of the edge and the starting point 321 and the ending point 322 are respectively disposed on two sides of the periphery of the grinding disc 32, and the straight line connecting the starting point 321 and the ending point 322 is the axis 323 passing through the grinding disc 32.

請參閱第二圖至第七圖所示,如第二圖以及第三圖所示,當研磨裝置3對玻璃基板1表面進行研磨時,旋轉座2為會旋轉帶動玻璃基板1旋動,讓玻璃基板1依中心軸11樞轉,此時,研磨裝置3之支臂31為會先帶動研磨盤32移動下降抵壓於玻璃基板1表面,且於研磨盤32抵壓至玻璃基板1表面時,請參閱第四圖所示,研磨盤32之起始點321為會重疊於玻璃基板1之中心軸11,由於玻璃基板1為呈樞轉位移,而使玻璃基板1在通過研磨盤32時,與研磨盤32產生摩擦,而可去除玻璃基板1表面之波浪紋,且由於研磨盤32為樞接於支臂31,而使研磨盤32因摩擦所產生之摩擦力樞轉,請參閱第四圖以及第五圖所示,當研磨盤32下降抵壓於玻璃基板1表面後,研磨裝置3之支臂31為會帶動研磨盤32橫向位移,而研磨盤32之位移方向為研磨盤32之軸心323朝向玻璃基板1之中心軸11直線位移,使研磨盤32在位移的過程中,研磨盤32之軸心323為會通過玻璃基板1之中心軸11,請同時參閱第五圖以及六圖所示,當研磨盤32橫向位移至其終止點322重疊玻璃基板1之中心軸11時,支臂31即會帶動研磨盤32抬離玻璃基板1表面,即完成玻璃基板1表面之研磨。Referring to the second to seventh figures, as shown in the second and third figures, when the polishing apparatus 3 grinds the surface of the glass substrate 1, the rotating base 2 rotates to drive the glass substrate 1 to rotate. The glass substrate 1 is pivoted according to the central axis 11. At this time, the arm 31 of the polishing device 3 first moves the polishing disk 32 to move down against the surface of the glass substrate 1, and when the polishing disk 32 is pressed against the surface of the glass substrate 1, As shown in the fourth figure, the starting point 321 of the grinding disc 32 is overlapped with the central axis 11 of the glass substrate 1. Since the glass substrate 1 is pivotally displaced, the glass substrate 1 is passed through the grinding disc 32. The friction with the grinding disc 32 is removed, and the wave pattern on the surface of the glass substrate 1 can be removed, and since the grinding disc 32 is pivotally connected to the arm 31, the grinding disc 32 is pivoted by friction caused by friction, please refer to 4 and 5, when the grinding disc 32 is lowered against the surface of the glass substrate 1, the arm 31 of the grinding device 3 drives the grinding disc 32 to laterally displace, and the grinding disc 32 is displaced in the direction of the grinding disc 32. The axis 323 is linearly displaced toward the central axis 11 of the glass substrate 1 to cause grinding During the displacement of the disk 32, the axis 323 of the grinding disk 32 passes through the central axis 11 of the glass substrate 1. Please refer to the fifth and sixth figures simultaneously, when the grinding disk 32 is laterally displaced to its end point 322. When the central axis 11 of the glass substrate 1 is used, the arm 31 drives the polishing disk 32 to lift off the surface of the glass substrate 1, that is, the surface of the glass substrate 1 is polished.

請參閱第七圖所示,由圖中可清楚看出,本發明之研磨盤32在對玻璃基板1進行研磨時,其研磨路徑於玻璃基板1之中心軸11之二側形成相等,且由於研磨盤32之軸心323為會通過玻璃基板1之中心軸11,因此研磨盤32會於玻璃基板1之中心軸11二側形成相等的研磨面積,且研磨盤32會完全通過玻璃基板1之中心軸11處,以讓玻璃基板1表面受到較平均之研磨,進而可降低玻璃基板1表面殘留波浪紋之發生機率,有效提高研磨加工良率。Referring to the seventh figure, it can be clearly seen from the figure that when the polishing disk 32 of the present invention is ground on the glass substrate 1, the polishing path is formed on both sides of the central axis 11 of the glass substrate 1, and The axis 323 of the grinding disc 32 passes through the central axis 11 of the glass substrate 1. Therefore, the grinding disc 32 forms an equal grinding area on both sides of the central axis 11 of the glass substrate 1, and the grinding disc 32 passes completely through the glass substrate 1. The central axis 11 is used to cause the surface of the glass substrate 1 to be polished more evenly, thereby reducing the probability of occurrence of residual wavy on the surface of the glass substrate 1, thereby effectively improving the polishing yield.

再者,該研磨盤32之直徑亦可大於玻璃基板1之最長邊,進而擴大玻璃基板1之中心軸11二側相等的研磨面積,而使研磨盤32之直徑大於玻璃基板1之最長邊,除了同樣可達到相同之玻璃基板1中央處研磨效果外,同時增加了玻璃基板1外側周緣處的研磨面積,而可提升玻璃基板1外側周緣處的研磨品質。Furthermore, the diameter of the grinding disc 32 can also be larger than the longest side of the glass substrate 1, thereby expanding the equal grinding area on both sides of the central axis 11 of the glass substrate 1, so that the diameter of the grinding disc 32 is larger than the longest side of the glass substrate 1, In addition to the same polishing effect at the center of the glass substrate 1, the polishing area at the outer periphery of the glass substrate 1 is increased, and the polishing quality at the outer periphery of the glass substrate 1 can be improved.

1...玻璃基板1. . . glass substrate

11...中心軸11. . . The central axis

2...旋轉座2. . . Rotating seat

3...研磨裝置3. . . Grinding device

31...支臂31. . . Arm

32...研磨盤32. . . Grinding disc

321...起始點321. . . Starting point

322...終止點322. . . Termination point

323...軸心323. . . Axis

A...玻璃基板A. . . glass substrate

B...研磨片B. . . Abrasive sheet

B’...研磨片B’. . . Abrasive sheet

第一圖係為玻璃基板與旋轉座之樞轉示意圖。The first figure is a schematic diagram of the pivoting of the glass substrate and the rotating base.

第二圖係為本發明研磨方法之側視動作示意圖(一)。The second figure is a schematic view of the side view of the grinding method of the present invention (1).

第三圖係為本發明研磨方法之上視動作示意圖(一)。The third figure is a schematic view of the top view of the grinding method of the present invention (1).

第四圖係為本發明研磨方法之側視動作示意圖(二)。The fourth figure is a schematic view of the side view of the grinding method of the present invention (2).

第五圖係為本發明研磨方法之側視動作示意圖(三)。The fifth figure is a schematic view of the side view of the grinding method of the present invention (3).

第六圖係為本發明研磨方法之側視動作示意圖(四)。The sixth figure is a schematic view of the side view of the grinding method of the present invention (4).

第七圖係為本發明研磨盤之研磨範圍以及路徑示意圖。The seventh figure is a schematic diagram of the grinding range and path of the grinding disc of the present invention.

第八圖係為習知研磨方法之示意圖。The eighth figure is a schematic diagram of a conventional grinding method.

1...玻璃基板1. . . glass substrate

11...中心軸11. . . The central axis

2...旋轉座2. . . Rotating seat

3...研磨裝置3. . . Grinding device

31...支臂31. . . Arm

32...研磨盤32. . . Grinding disc

321...起始點321. . . Starting point

322...終止點322. . . Termination point

323...軸心323. . . Axis

Claims (3)

一種玻璃基板表面研磨方法,尤指用於去除玻璃基板表面波浪紋路之研磨方法,該研磨方法係將待研磨之玻璃基板固定於旋轉座上,使旋轉座於旋轉時帶動玻璃基板旋動,而旋轉座上方設置有研磨裝置,研磨裝置為樞設有研磨盤,研磨盤之直徑至少等於待研磨之玻璃基板最長邊之長度,且研磨盤周緣二側分別設置有起始點與終止點,且起始點與終止點所連成之直線為通過研磨盤之軸心;藉上,當研磨盤對旋轉中的玻璃基板進行研磨時,為會先使研磨盤抵壓至玻璃基板表面,並讓研磨盤之起始點重疊於玻璃基板於旋轉時之中心軸,再使研磨盤橫向位移,位移方向為研磨盤之軸心朝向玻璃基板之中心軸直線位移,當研磨盤之軸心通過玻璃基板之中心軸後,且研磨盤之終止點重疊玻璃基板之中心軸時,再將研磨盤抬離玻璃基板表面,即完成玻璃基板表面之研磨。A method for polishing a surface of a glass substrate, in particular, a method for removing a wave pattern on a surface of a glass substrate, wherein the glass substrate to be polished is fixed on a rotating base, so that the rotating base rotates the glass substrate while rotating, and A grinding device is disposed above the rotating seat, the grinding device is pivotally provided with a grinding disc, the diameter of the grinding disc is at least equal to the length of the longest side of the glass substrate to be polished, and the starting point and the ending point are respectively disposed on two sides of the grinding disc circumference, and The straight line connecting the starting point and the ending point is the axis passing through the grinding disc; by the way, when the grinding disc grinds the rotating glass substrate, the grinding disc is first pressed against the surface of the glass substrate, and The starting point of the grinding disc is overlapped with the central axis of the glass substrate during rotation, and then the grinding disc is laterally displaced. The displacement direction is that the axis of the grinding disc is linearly displaced toward the central axis of the glass substrate, and the axis of the grinding disc passes through the glass substrate. After the central axis, and the end point of the grinding disc overlaps the central axis of the glass substrate, the polishing disc is lifted off the surface of the glass substrate, that is, the surface of the glass substrate is completed. Grinding. 如申請專利範圍第1項所述之玻璃基板表面研磨方法,其中該研磨盤之直徑為大於玻璃基板之最長邊。The method for polishing a glass substrate surface according to claim 1, wherein the diameter of the polishing disk is larger than a longest side of the glass substrate. 如申請專利範圍第1項所述之玻璃基板表面研磨方法,其中該研磨裝置設置有支臂,研磨盤為樞接於支臂,支臂為帶動研磨盤位移。The method for polishing a glass substrate surface according to claim 1, wherein the grinding device is provided with a support arm, and the grinding disc is pivotally connected to the arm, and the arm is configured to drive the grinding disc displacement.
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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114571365A (en) * 2022-01-20 2022-06-03 上海汉虹精密机械有限公司 Polishing disk surface finishing device
TWI775841B (en) * 2017-04-24 2022-09-01 日商荏原製作所股份有限公司 Grinding equipment for substrates

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI775841B (en) * 2017-04-24 2022-09-01 日商荏原製作所股份有限公司 Grinding equipment for substrates
US11607769B2 (en) 2017-04-24 2023-03-21 Ebara Corporation Polishing apparatus of substrate
CN114571365A (en) * 2022-01-20 2022-06-03 上海汉虹精密机械有限公司 Polishing disk surface finishing device

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