CN114561619B - Power supply and arc processing method - Google Patents

Power supply and arc processing method Download PDF

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Publication number
CN114561619B
CN114561619B CN202210111300.1A CN202210111300A CN114561619B CN 114561619 B CN114561619 B CN 114561619B CN 202210111300 A CN202210111300 A CN 202210111300A CN 114561619 B CN114561619 B CN 114561619B
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circuit
power
arc detection
current
power generation
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CN114561619A (en
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陈亚梯
赵志浩
王绍煦
罗超
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SHENZHEN HANQIANG TECHNOLOGY CO LTD
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SHENZHEN HANQIANG TECHNOLOGY CO LTD
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    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
    • C23C14/325—Electric arc evaporation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02H—EMERGENCY PROTECTIVE CIRCUIT ARRANGEMENTS
    • H02H1/00—Details of emergency protective circuit arrangements
    • H02H1/0007—Details of emergency protective circuit arrangements concerning the detecting means
    • H02H1/0015—Using arc detectors
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02H—EMERGENCY PROTECTIVE CIRCUIT ARRANGEMENTS
    • H02H3/00—Emergency protective circuit arrangements for automatic disconnection directly responsive to an undesired change from normal electric working condition with or without subsequent reconnection ; integrated protection
    • H02H3/08—Emergency protective circuit arrangements for automatic disconnection directly responsive to an undesired change from normal electric working condition with or without subsequent reconnection ; integrated protection responsive to excess current
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00—Energy generation through renewable energy sources
    • Y02E10/50—Photovoltaic [PV] energy

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • General Chemical & Material Sciences (AREA)
  • Arc Welding Control (AREA)
  • Plasma Technology (AREA)

Abstract

The application provides a power supply and an arc processing method, wherein the power supply comprises a power generation circuit, an arc detection circuit and a drive control circuit; the arc detection circuit is used for obtaining an arc detection signal based on a first output signal of the power generation circuit and obtaining arc detection power based on the arc detection signal and a second output signal of the power generation circuit, wherein the change trend of the arc detection signal is opposite to that of the first output signal; the driving control circuit is used for controlling the power generation circuit to stop outputting voltage and/or current to the load when the arc detection power reaches the target power threshold value so as to perform arc extinction processing. By adopting the method and the device, whether electric arcs are generated in the system or not can be judged through the size of the detection power, and the arc is timely extinguished, so that the arc extinguishing efficiency and sensitivity are improved, the arc extinguishing cost is reduced, and the safety of the system is improved.

Description

Power supply and arc processing method
Technical Field
The present application relates to the field of electronic power technologies, and in particular, to a power supply and an arc processing method.
Background
A radio frequency power supply is a power supply that can generate a sinusoidal voltage of fixed frequency, typically in a particular radio frequency range (e.g., 300kHz to 30GHz), and with a certain output power. The radio frequency power supply is widely applied to semiconductor and photovoltaic manufacturing equipment, is the core of the semiconductor and photovoltaic manufacturing equipment, and is suitable for supplying power to plasma coating in the semiconductor and photovoltaic manufacturing equipment (such as a coating machine, a photoetching machine, a coating system and the like). However, plasma arc is easily generated in the plasma coating process, and the generation of the plasma arc can reduce the quality of the coated product, so that the reject ratio of the coated product is increased, and even the radio frequency power supply is damaged. Therefore, how to detect the electric arc generated in the working process of equipment and extinguish the arc in real time in the process of supplying power to the equipment such as a film plating machine, a photoetching machine, a film plating system and the like by a radio frequency power supply is of great importance for the protection of electric energy elements and the protection of the power supply in the equipment such as the film plating machine, the photoetching machine, the film plating system and the like.
Disclosure of Invention
The application provides a power supply and an electric arc processing method, whether an electric arc is generated in a system can be judged through detecting the power, and the electric arc is timely extinguished, so that the arc extinguishing efficiency and sensitivity are improved, the arc extinguishing cost is reduced, and the safety of the system is improved.
In a first aspect, the present application provides a power supply that may include a power generation circuit connectable to a load through a drive control circuit, an arc detection circuit connectable to the power generation circuit and the drive control circuit. The arc detection circuit herein may be configured to derive an arc detection signal based on a first output signal of the power generation circuit and to derive an arc detection power based on the arc detection signal and a second output signal of the power generation circuit. Here, the arc detection signal has a variation tendency opposite to that of the first output signal, which is the output voltage and the second output signal is the output current, or the first output signal is the output current and the second output signal is the output voltage. The drive control circuit herein may be configured to control the power generation circuit to stop outputting the voltage and/or current to the load for arc extinguishing processing when the arc detection power reaches the target power threshold.
In this application, electric arc detection circuitry can obtain electric arc detection power, and when electric arc detection power reached the target power threshold value, the steerable power generation circuit of drive control circuit stopped to load output voltage and/or electric current to carry out the arc extinguishing to electric arc and handle, thereby improved arc extinguishing efficiency and sensitivity, reduced the arc extinguishing cost, improved the security of system.
With reference to the first aspect, in a first possible implementation, the arc detection circuit may include a voltage transformation circuit and a first power detection circuit. Here, one end of the transformer circuit may be connected to the power generation circuit as one end of the arc detection circuit, the other end of the transformer circuit may be connected to one end of the first power detection circuit, and the other end of the first power detection circuit may be connected to the drive control circuit. Here, the first output signal may be an output voltage and the second output signal is an output current. The voltage transformation circuit herein may be configured to obtain an arc detection voltage as an arc detection signal based on an output voltage of the power generation circuit, where a variation tendency of the arc detection voltage is opposite to a variation tendency of the output voltage of the power generation circuit. The first power detection circuit herein may be configured to derive the arc detection power based on the arc detection voltage and the output current of the power generation circuit. The driving control circuit can also be used for obtaining that the arc detection power reaches the target power threshold when the arc detection power is larger than or equal to the first power threshold, and controlling the power generation circuit to stop outputting the voltage and/or the current to the load.
In the application, when an arc is generated, the output voltage of the power generation circuit and the output current of the power generation circuit have opposite variation trends, the arc detection circuit can obtain the arc detection voltage based on the output voltage of the power generation circuit, so that the variation trend of the arc detection voltage is the same as the variation trend of the output current of the power generation circuit, and obtain the arc detection power based on the arc detection voltage and the output current of the power generation circuit, thereby amplifying the variation of the output voltage of the power generation circuit and the output current of the power generation circuit into the variation of the arc detection power, and further improving the sensitivity of arc detection. It can be understood that when the arc detection circuit detects that the arc detection power changes (for example, reaches a target power threshold), it may be determined that the output current of the power generation circuit and/or the output voltage of the power generation circuit changes, and it is determined that an arc is generated, and then the driving control circuit may control the power generation circuit to stop outputting voltage and/or current to the load, so as to perform arc extinction processing, thereby improving arc extinction efficiency and sensitivity, reducing arc extinction cost, and improving system safety.
With reference to the first possible implementation manner of the first aspect, in a second possible implementation manner, the voltage transformation circuit may include a first inverting circuit, and the first power detection circuit may include a first multiplying circuit. Here, one end of the first inverter circuit may be connected to the power generation circuit as one end of the transformer circuit, the other end of the first inverter circuit may be connected to one end of the first multiplier circuit, and the other end of the first multiplier circuit may be connected to the drive control circuit as the other end of the first power detection circuit. The first inverter circuit herein may be configured to perform an inverter voltage conversion based on an output voltage of the power generation circuit to an inverter voltage as the arc detection voltage. It is understood that the first inverting circuit may be an inverter, or other circuit that can invert the amplitude of a voltage signal (such as the output voltage of the power generating circuit). The first multiplier circuit herein may be configured to derive the arc detection power based on the arc detection voltage and the output current of the power generation circuit. It will be appreciated that the first multiplying circuit herein may be a multiplier, or other circuit that may multiply the magnitude of a voltage signal (such as an inverted voltage or arc detection voltage) and the magnitude of a current signal (such as the output current of the power generation circuit), or other circuit that may derive a power signal (such as arc detection power) based on the voltage signal (such as an inverted voltage or arc detection voltage) and the current signal (such as the output current of the power generation circuit).
With reference to the second possible implementation manner of the first aspect, in a third possible implementation manner, the voltage transformation circuit may further include a first operational amplifier circuit and a first adder circuit, where the other end of the first inverter circuit may be connected to one end of the first adder circuit through the first operational amplifier circuit, and the other end of the first adder circuit may be connected to one end of the first multiplier circuit. The first operational amplifier circuit may be configured to obtain an amplified inverted voltage based on the inverted voltage and the voltage conversion parameter. It is understood that the first operational amplifier circuit may be an operational amplifier, or other circuits that can amplify the amplitude of the voltage signal (such as the inverse voltage), or other circuits that can amplify and convert the voltage signal (such as the inverse voltage). The first addition circuit herein may be configured to obtain a boost voltage based on the output voltage of the power generation circuit and the voltage conversion parameter, and obtain an arc detection voltage based on the boost voltage and the amplified reverse phase voltage. It is understood that the voltage conversion parameter may be a preset parameter, or may be a parameter obtained by the first adding circuit in real time based on the output voltage of the power generation circuit. The first adding circuit may be an adder, or other circuits that may boost the amplitude of the voltage signal (e.g., the amplified inverted voltage), or other circuits that may boost the voltage signal (e.g., the amplified inverted voltage).
In this application, the expression mode of the electric arc detection circuit in the power is various, and the composition mode of vary voltage circuit and first power detection circuit is various, and the connected mode of vary voltage circuit and first power detection circuit is various, nimble, can adapt to different arc extinguishing scenes, strengthens the adaptability of power.
With reference to the first aspect, in a fourth possible implementation manner, the arc detection circuit may include a variable current circuit and a second power detection circuit, one end of the variable current circuit may serve as one end of the arc detection circuit and be connected to the power generation circuit, the other end of the variable current circuit may be connected to one end of the second power detection circuit, and the other end of the second power detection circuit may be connected to the drive control circuit. Here, the first output signal may be an output current and the second output signal is an output voltage. The inverter circuit herein may be used to derive an arc detection current as an arc detection signal based on the output current of the power generation circuit. Here, the trend of change in the arc detection current is opposite to the trend of change in the output current of the power generation circuit. The second power detection circuit herein may be configured to derive the arc detection power based on the arc detection current and the output voltage of the power generation circuit. The driving control circuit can be further used for obtaining that the arc detection power reaches the target power threshold when the arc detection power is smaller than or equal to the second power threshold, and controlling the power generation circuit to stop outputting the voltage and/or the current to the load. Here, the second power threshold is less than the first power threshold.
The arc detection circuit may obtain the arc detection current based on the output current of the power generation circuit such that a variation tendency of the arc detection current is the same as a variation tendency of the output voltage of the power generation circuit, and obtain the arc detection power based on the arc detection current and the output voltage of the power generation circuit, thereby amplifying a variation of the output voltage of the power generation circuit and the output current of the power generation circuit to a variation of the arc detection power, and further improving a sensitivity of arc detection. It can be understood that when the arc detection circuit detects that the arc detection power changes (for example, reaches a target power threshold), it may be determined that the output current of the power generation circuit and/or the output voltage of the power generation circuit changes, and it is determined that an arc is generated, and then the driving control circuit may control the power generation circuit to stop outputting voltage and/or current to the load, so as to perform arc extinction processing, thereby improving arc extinction efficiency and sensitivity, reducing arc extinction cost, and improving system safety.
With reference to the fourth possible implementation manner of the first aspect, in a fifth possible implementation manner, the current transforming circuit may include a second inverting circuit, and the second power detecting circuit may include a second multiplying circuit. Here, one end of the second inverter circuit may be connected to the power generation circuit as one end of the inverter circuit, the other end of the second inverter circuit may be connected to one end of the second multiplier circuit, and the other end of the second multiplier circuit may be connected to the drive control circuit as the other end of the second power detection circuit. The second inverter circuit may be configured to perform an inverter current conversion based on the output current of the power generation circuit to obtain an inverter current as the arc detection current. It is understood that the second inverting circuit may be an inverter, or other circuit that can invert the amplitude of the current signal (such as the output current of the power generating circuit). The second multiplier circuit herein may be used to derive the arc detection power based on the arc detection current and the output voltage of the power generation circuit. It will be appreciated that the second multiplying circuit may be a multiplier, or other circuit that multiplies the magnitude of the current signal (e.g., the inverse current or the arc detection current) and the magnitude of the voltage signal (e.g., the output voltage of the power generation circuit), or other circuit that derives a power signal (e.g., the arc detection power) based on the current signal (e.g., the inverse current or the arc detection current) and the voltage signal (e.g., the output voltage of the power generation circuit).
With reference to the fifth possible implementation manner of the first aspect, in a sixth possible implementation manner, the current transforming circuit may further include a second operational amplifier circuit and a second adder circuit, where the other end of the second inverter circuit may be connected to one end of the second adder circuit through the second operational amplifier circuit, and the other end of the second adder circuit may be connected to one end of the second multiplier circuit. The second operational amplifier circuit may be configured to obtain an amplified inverse current based on the inverse current and the current transformation parameter. It is understood that the second operational amplifier circuit may be an operational amplifier, or other circuits that can amplify the amplitude of the current signal (such as the inverse current), or other circuits that can amplify and convert the current signal (such as the inverse current). The second adder circuit may be configured to obtain the boost current based on the output current of the power generation circuit and the current transformation parameter, and obtain the arc detection current based on the boost current and the amplified reverse current. It is understood that the current transformation parameter may be a preset parameter, or may be a parameter obtained by the second adding circuit in real time based on the output current of the power generation circuit. It is understood that the second adding circuit may be an adder, or other circuits that can boost the amplitude of the current signal (such as the amplified inverse current), or other circuits that can boost the current signal (such as the amplified inverse current).
In the application, the arc detection circuit in the power supply has various expression modes, the variable current circuit and the second power detection circuit have various composition modes, and the variable current circuit and the second power detection circuit have various and flexible connection modes, can adapt to different arc extinguishing scenes, and enhances the adaptability of the power supply.
In a second aspect, the present application provides a method of arc handling for a power supply, the power supply may include a power generation circuit, an arc detection circuit, and a drive control circuit, the power generation circuit may be connected to a load through the drive control circuit, and the arc detection circuit may be connected to the power generation circuit and the drive control circuit, the method comprising: the arc detection circuit may determine an arc detection signal based on a first output signal of the power generation circuit and determine an arc detection power based on the arc detection signal and a second output signal of the power generation circuit. Here, the arc detection signal has a variation tendency opposite to that of the first output signal, which is the output voltage and the second output signal is the output current, or the first output signal is the output current and the second output signal is the output voltage. When the arc detection power is detected to reach the target power threshold, the drive control circuit can control the power generation circuit to stop outputting voltage and/or current to the load so as to perform arc extinction processing.
In this application, electric arc detection power can be confirmed to the electric arc detection circuit, and when electric arc detection power reached the target power threshold value, the steerable power generation circuit of drive control circuit stopped to load output voltage and/or electric current to carry out the arc extinguishing to electric arc and handle, thereby improved arc extinguishing efficiency and sensitivity, reduced the arc extinguishing cost, improved the security of system.
With reference to the second aspect, in a first possible implementation, the arc detection circuit may include a voltage transformation circuit and a first power detection circuit. Here, one end of the transformer circuit may be connected to the power generation circuit as one end of the arc detection circuit, the other end of the transformer circuit may be connected to one end of the first power detection circuit, and the other end of the first power detection circuit may be connected to the drive control circuit. Here, the first output signal may be an output voltage and the second output signal is an output current. The arc detection circuit determining an arc detection signal based on the first output signal of the power generation circuit and determining arc detection power based on the arc detection signal and the second output signal of the power generation circuit includes: the arc detection voltage is determined as an arc detection signal by the voltage transformation circuit based on the output voltage of the power generation circuit, and the variation tendency of the arc detection voltage is opposite to that of the output voltage of the power generation circuit. The arc detection power is obtained by the first power detection circuit based on the arc detection voltage and the output current of the power generation circuit. When detecting that the arc detection power reaches the target power threshold, the drive control circuit controls the power generation circuit to stop outputting the voltage and/or the current to the load, and the method comprises the following steps: when the arc detection power is larger than or equal to the first power threshold, the arc detection power is determined to reach the target power threshold, and the power generation circuit is controlled to stop outputting the voltage and/or the current to the load through the driving control circuit.
In the application, when an arc is generated, the output voltage of the power generation circuit and the output current of the power generation circuit have opposite variation trends, the arc detection circuit can obtain the arc detection voltage based on the output voltage of the power generation circuit, so that the variation trend of the arc detection voltage is the same as the variation trend of the output current of the power generation circuit, and obtain the arc detection power based on the arc detection voltage and the output current of the power generation circuit, thereby amplifying the variation of the output voltage of the power generation circuit and the output current of the power generation circuit into the variation of the arc detection power, and further improving the sensitivity of arc detection. It can be understood that when the arc detection circuit detects that the arc detection power changes (for example, reaches a target power threshold), it may be determined that the output current of the power generation circuit and/or the output voltage of the power generation circuit changes, and it is determined that an arc is generated, and then the driving control circuit may control the power generation circuit to stop outputting voltage and/or current to the load, so as to perform arc extinction processing, thereby improving arc extinction efficiency and sensitivity, reducing arc extinction cost, and improving system safety.
With reference to the second aspect, in a second possible implementation, the arc detection circuit may include a current transformer circuit and a second power detection circuit. Here, one end of the inverter circuit may be connected to the power generation circuit as one end of the arc detection circuit, the other end of the inverter circuit may be connected to one end of the second power detection circuit, and the other end of the second power detection circuit may be connected to the drive control circuit. Here, the first output signal is an output current and the second output signal is an output voltage. The arc detection circuit determining an arc detection signal based on the first output signal of the power generation circuit and determining arc detection power based on the arc detection signal and the second output signal of the power generation circuit includes: the arc detection current is determined as an arc detection signal by the inverter circuit based on the output current of the power generation circuit, and the variation tendency of the arc detection current is opposite to that of the output current of the power generation circuit. The arc detection power is determined by the second power detection circuit based on the arc detection current and the output voltage of the power generation circuit. When detecting that the arc detection power reaches the target power threshold, the driving control circuit controls the power generation circuit to stop outputting voltage and/or current to the load, and the driving control circuit comprises: and when the arc detection power is smaller than or equal to the second power threshold, determining that the arc detection power reaches the target power threshold, and controlling the power generation circuit to stop outputting the voltage and/or the current to the load through the driving control circuit. Here, the second power threshold is smaller than the first power threshold.
In the application, when an arc is generated, the output current of the power generation circuit and the output voltage of the power generation circuit have opposite variation trends, the arc detection circuit can obtain the arc detection current based on the output current of the power generation circuit, so that the variation trend of the arc detection current is the same as the variation trend of the output voltage of the power generation circuit, and obtain the arc detection power based on the arc detection current and the output voltage of the power generation circuit, thereby amplifying the variation of the output voltage of the power generation circuit and the output current of the power generation circuit into the variation of the arc detection power, and further improving the sensitivity of arc detection. It can be understood that when the arc detection circuit detects that the arc detection power changes (for example, reaches a target power threshold), it may be determined that the output current of the power generation circuit and/or the output voltage of the power generation circuit changes, and it is determined that an arc is generated, and then the driving control circuit may control the power generation circuit to stop outputting voltage and/or current to the load, so as to perform arc extinction processing, thereby improving arc extinction efficiency and sensitivity, reducing arc extinction cost, and improving system safety.
Drawings
FIG. 1 is a schematic diagram of an application scenario of a power supply provided herein;
FIG. 2 is a schematic diagram of an architecture of a power supply provided herein;
FIG. 3 is a waveform schematic of an arc detection voltage as provided herein;
FIG. 4 is a schematic diagram of another architecture of a power supply provided herein;
FIG. 5 is a schematic diagram of another architecture of a power supply provided herein;
FIG. 6 is a schematic waveform of an arc detection current as provided herein;
FIG. 7 is a schematic diagram of another architecture for a power supply provided herein;
FIG. 8 is a schematic flow chart of a method of arc treatment of a power supply provided herein;
FIG. 9 is another schematic flow diagram of a method of arc handling of a power supply provided herein;
fig. 10 is another schematic flow chart diagram of a method for arc treatment of a power supply provided herein.
Detailed Description
The power supply provided by the application can be suitable for various application fields such as the field of semiconductors or the field of photovoltaic manufacturing equipment, can be determined according to actual application scenes, and is not limited herein. The power supply provided by the application can be adapted to different application scenes, such as application scenes of supplying power to plasma coating in semiconductors and photovoltaic manufacturing equipment (such as coating machines, photoetching machines, coating systems and the like) by utilizing the power supply. Here, the power supply may be a radio frequency power supply or other power supply that can generate a sine wave (or other waveform such as a square wave) voltage of a fixed frequency (typically a frequency in a specific radio frequency range (such as 300kHz to 30GHz)) and has a certain output power. For convenience of description, an application scenario in which a power supply supplies power for plasma coating in a coating machine will be described as an example, and details are not described below.
Referring to fig. 1, fig. 1 is a schematic view of an application scenario of a power supply provided in the present application. In an application scenario where a power supply supplies power for plasma coating in a coating machine, as shown in fig. 1, the application scenario includes a power supply 1 and a load 1003 (e.g., a coating circuit in the coating machine), and the power supply 1 includes a power generation circuit 1000, an arc detection circuit 1001, and a drive control circuit 1002. The power generation circuit 1000 may be connected to a load 1003 through a drive control circuit 1002, and the arc detection circuit 1001 may be connected to the power generation circuit 1000 and the drive control circuit 1002. When an arc occurs during the process of supplying power to the load 1003 by the power source 1, the output voltage of the power generation circuit 1000 and the output current of the power generation circuit 1000 have opposite variation trends, and the variation of the output voltage of the power generation circuit 1000 and the variation of the output current of the power generation circuit 1000 cannot be directly detected simultaneously by using the prior art. In the embodiment provided in the present application, the arc detection circuit 1001 may obtain an arc detection signal (e.g., an arc detection voltage or an arc detection current) based on a first output signal (e.g., an output voltage or an output current) of the power generation circuit 1000 such that a trend of the arc detection signal is the same as a trend of a second output signal (e.g., an output current or an output voltage) of the power generation circuit 1000, obtain an arc detection power based on the arc detection signal and the second output signal of the power generation circuit 1000, detect the arc detection power, amplify a change in the output voltage of the power generation circuit 1000 and a change in the output current of the power generation circuit 1000 to a change in the arc detection power, determine in time that the output voltage of the power generation circuit 1000 or the output current of the power generation circuit 1000 has changed, and improve the sensitivity. In other words, when the arc detection circuit 1001 detects that the arc detection power changes (for example, reaches the target power threshold), it may determine that the output current of the power generation circuit 1000 and/or the output voltage of the power generation circuit 1000 changes, and determine that an arc is generated, and the driving control circuit 1002 may control the power generation circuit 1000 to stop outputting the voltage and/or the current to the load 1003 for arc extinction processing, so as to improve the arc extinction efficiency and sensitivity, reduce the arc extinction cost, and improve the safety of the system.
The structure of the power supply and the arc processing method provided by the present application will be explained below with reference to fig. 2 to 10.
Referring to fig. 2, fig. 2 is a schematic diagram of an architecture of a power supply provided by the present application. As shown in fig. 2, the power supply 10 may include a power generation circuit 100, an arc detection circuit 101, and a drive control circuit 102, and the arc detection circuit 101 may include a transformation circuit 1010 and a first power detection circuit 1011. Here, the power generation circuit 100 may be connected to the load 103 through the drive control circuit 102, one end of the transformer circuit 1010 may be connected to the power generation circuit 100 as one end of the arc detection circuit 101, the other end of the transformer circuit 1010 may be connected to one end of the first power detection circuit 1011, and the other end of the first power detection circuit 1011 may be connected to the drive control circuit 102. Here, the first output signal may be an output voltage and the second output signal is an output current. The voltage transformation circuit 1010 here may obtain an arc detection voltage as an arc detection signal based on the output voltage of the power generation circuit 100. Here, the trend of change of the arc detection voltage is opposite to the trend of change of the output voltage of the power generation circuit 100. Specifically, referring to fig. 3, fig. 3 is a schematic waveform diagram of the arc detection voltage provided in the present application. As shown in fig. 3, the first output signal is an output voltage and the second output signal is an output current, and the arc detection voltage is an arc detection signal obtained by the transformer circuit 1010 based on the output voltage of the power generation circuit 100, and an arc is generated at time t1, the output voltage (first output signal) starts to fall, the output current (second output signal) starts to rise, the arc detection voltage (arc detection signal) also starts to rise, and the output current and the arc detection voltage have the same trend of change. The first power detection circuit 1011 herein may derive the arc detection power based on the arc detection voltage and the output current of the power generation circuit 100. It is understood that when an arc is generated, the arc detection power increases due to the increase of the output current of the power generation circuit 100 and/or the arc detection voltage, and the change of the arc detection power amplifies the change of the output current of the power generation circuit 100 and the arc detection voltage (which can also be understood as the output voltage of the power generation circuit 100). Here, the driving control circuit 102 may further obtain that the arc detection power reaches the target power threshold when the arc detection power is greater than or equal to the first power threshold, and control the power generation circuit 100 to stop outputting the voltage and/or the current to the load 103. In some possible embodiments, as shown in fig. 3, at time t2, when the arc detection power is greater than or equal to the first power threshold, the driving control circuit 102 obtains that the arc detection power reaches the target power threshold, and controls the power generation circuit 100 to stop outputting the voltage and/or the current to the load 103, until time t3, the voltage and the current output by the power generation circuit 100 to the load 103 become 0, so as to perform arc extinction. Here, the first power threshold may be a fixed value set in advance, or may be a value obtained by the drive control circuit 102 in real time or calculated based on the magnitude of the arc detection power. For example, the first power threshold may be obtained by multiplying the arc detection power by an arc detection coefficient (for example, a constant greater than 1 and smaller than 2), where the arc detection coefficient may be a fixed value set in advance, or may be a value obtained or calculated by the drive control circuit 102 in real time based on the magnitude of the arc detection power, and may be determined according to an actual application scenario, which is not limited herein.
In the present application, when an arc is generated, the output voltage of the power generation circuit 100 and the output current of the power generation circuit 100 have a trend of change opposite to each other, the arc detection circuit 101 may obtain an arc detection voltage based on the output voltage of the power generation circuit 100 such that the trend of change of the arc detection voltage is the same as the trend of change of the output current of the power generation circuit 100, and obtain an arc detection power based on the arc detection voltage and the output current of the power generation circuit 100, thereby amplifying the change of the output voltage of the power generation circuit 100 and the output current of the power generation circuit 100 into a change of the arc detection power, and further improving the sensitivity of arc detection. It can be understood that when the arc detection circuit 101 detects that the arc detection power changes (for example, reaches the target power threshold), it may determine that the output current of the power generation circuit 100 and/or the output voltage of the power generation circuit 100 changes, and determine that an arc is generated, and then the driving control circuit 102 may control the power generation circuit 100 to stop outputting voltage and/or current to the load 103 for arc extinguishing, so as to improve the arc extinguishing efficiency and sensitivity, reduce the arc extinguishing cost, and improve the safety of the system.
In some possible embodiments, the transformer circuit may include a first inverter circuit, and the first power detection circuit may include a first multiplier circuit, as shown in fig. 4, where fig. 4 is another schematic diagram of the power supply provided by the present application. As shown in fig. 4, one end of the first inverter circuit 2010 may be connected to the power generation circuit 200 as one end of the transformer circuit, the other end of the first inverter circuit 2010 may be connected to one end of a first multiplier circuit 2011, and the other end of the first multiplier circuit 2011 may be connected to the drive control circuit 202 as the other end of the first power detection circuit. The first inverter circuit 2010 herein may perform an inverter voltage conversion based on the output voltage of the power generation circuit 200 to an inverter voltage as an arc detection voltage. It is understood that the first inverting circuit 2010 may be an inverter, or other circuit that can invert the amplitude of a voltage signal (such as the output voltage of the power generation circuit 200). The first multiplication circuit 2011 herein may derive the arc detection power based on the arc detection voltage and the output current of the power generation circuit 200. It is understood that the first multiplying circuit 2011 may be a multiplier, or other circuit that multiplies the magnitude of the voltage signal (such as the inverted voltage or the arc detection voltage) and the magnitude of the current signal (such as the output current of the power generation circuit 200), or other circuit that may derive the power signal (such as the arc detection power) based on the voltage signal (such as the inverted voltage or the arc detection voltage) and the current signal (such as the output current of the power generation circuit 200).
In some possible embodiments, the transformer circuit may further include a first operational amplifier circuit 2012 and a first adder circuit 2013. Referring to fig. 4 again, as shown in fig. 4, the other end of the first inverting circuit 2010 may be connected to one end of the first adding circuit 2013 through the first operational amplifier circuit 2012, and the other end of the first adding circuit 2013 may be connected to one end of the first multiplying circuit 2011. The first operational amplifier circuit 2012 may obtain an amplified inverted voltage based on the inverted voltage and the voltage conversion parameter. It is understood that the first operational amplifier circuit 2012 herein may be an operational amplifier, or other circuits capable of amplifying a voltage signal (e.g., an inverted voltage), or other circuits capable of amplifying and converting a voltage signal (e.g., an inverted voltage). The first addition circuit 2013 here may obtain a boost voltage based on the output voltage of the power generation circuit 200 and the voltage conversion parameter, and obtain an arc detection voltage based on the boost voltage and the amplified reverse phase voltage. The first adding circuit 2013 may be an adder, or another circuit that may boost the amplitude of the voltage signal (e.g., the amplified inverted voltage), or another circuit that may boost the voltage signal (e.g., the amplified inverted voltage). It is to be understood that the voltage conversion parameter may be a preset parameter, or may be a parameter obtained by the first operational amplifier circuit 2012 or the first adder circuit 2013 in real time based on the output voltage of the power generation circuit 200. For example, when the voltage transformation parameter is 1, the boost voltage may be 2 × Uo (here, Uo is the amplitude of the output voltage of the power generation circuit 200), and may be determined according to the actual application scenario, and is not limited herein.
In some possible embodiments, the functional modules of the arc detection circuit 201 and the first power detection circuit (e.g., the first multiplication circuit 2011) may also have various connection relationships, for example, one end of the first operational amplifier circuit 2012 may be connected to the power generation circuit 200 as one end of the arc detection circuit 201, the other end of the first operational amplifier circuit 2012 may be connected to the first inversion circuit 2010, and the first inversion circuit 2010 may be connected to the first multiplication circuit 2011 through the first addition circuit 2013. At this time, the first operational amplifier circuit 2012 may obtain an amplified output voltage based on the output voltage of the power generation circuit 200 and the voltage conversion parameter, the first inverter circuit 2010 may perform an inverted voltage conversion based on the amplified output voltage to obtain an inverted amplified output voltage, and the first adder circuit 2013 may obtain a boost voltage based on the output voltage of the power generation circuit 200 and the voltage conversion parameter, and obtain an arc detection voltage based on the boost voltage and the inverted amplified output voltage.
In this application, the expression mode of the electric arc detection circuit in the power is various, and the composition mode of vary voltage circuit is various, and the connected mode of vary voltage circuit and first power detection circuit is various, nimble, can adapt different arc extinguishing scenes, strengthens the adaptability of power.
In some possible embodiments, the first output signal of the power generation circuit may be an output current and the second output signal is an output voltage, please refer to fig. 5, and fig. 5 is another schematic diagram of the power supply provided in the present application. As shown in fig. 5, the arc detection circuit 301 may include a variable current circuit 3010 and a second power detection circuit 3011, one end of the variable current circuit 3010 may be connected to the power generation circuit 300 as one end of the arc detection circuit 301, the other end of the variable current circuit 3010 may be connected to one end of the second power detection circuit 3011, and the other end of the second power detection circuit 3011 may be connected to the driving control circuit 302. The inverter circuit 3010 may obtain an arc detection current as an arc detection signal based on the output current of the power generation circuit 300. Here, the trend of change of the arc detection current is opposite to the trend of change of the output current of the power generation circuit 300. Specifically, referring to fig. 6, fig. 6 is a schematic waveform diagram of the arc detection current provided in the present application. As shown in fig. 6, the first output signal is an output current and the second output signal is an output voltage, and the arc detection current is an arc detection signal obtained by the inverter circuit 3010 based on the output current of the power generation circuit 300, and an arc is generated at time t1, and the output current (first output signal) starts to rise, the output voltage (second output signal) starts to fall, the arc detection current (arc detection signal) also starts to fall, and the output voltage and the arc detection current have the same trend of change. Here, the second power detection circuit 3011 may derive the arc detection power based on the arc detection current and the output voltage of the power generation circuit 300. It is understood that when an arc is generated, the arc detection power may be decreased due to a decrease in the output voltage of the power generation circuit 300 and/or the arc detection current, and a change in the arc detection power amplifies a change in the output voltage of the power generation circuit 300 and the arc detection current (which may also be understood as the output current of the power generation circuit 300). Here, the driving control circuit 302 may further obtain that the arc detection power reaches the target power threshold when the arc detection power is less than or equal to the second power threshold, and control the power generation circuit 300 to stop outputting the voltage and/or the current to the load 303. In some possible embodiments, as shown in fig. 6, at time t2, when the arc detection power is less than or equal to the second power threshold, the driving control circuit 302 obtains that the arc detection power reaches the target power threshold, and controls the power generation circuit 300 to stop outputting the voltage and/or the current to the load 303, until time t3, the voltage and the current output by the power generation circuit 300 to the load 303 become 0, so as to perform arc extinction. Here, the second power threshold is smaller than the first power threshold. Here, the second power threshold may be a fixed value set in advance, or may be a value obtained or calculated by the drive control circuit 302 in real time based on the magnitude of the arc detection power. For example, the second power threshold may be obtained by multiplying the arc detection power by an arc detection coefficient (for example, a constant greater than 1 and smaller than 2), where the arc detection coefficient may be a fixed value set in advance, or may be a value obtained or calculated by the drive control circuit 302 in real time based on the magnitude of the arc detection power, and may be determined according to an actual application scenario, which is not limited herein.
In the present application, when an arc is generated, the output current of the power generation circuit 300 and the output voltage of the power generation circuit 300 have a trend of change opposite to each other, and the arc detection circuit 301 may obtain an arc detection current based on the output current of the power generation circuit 300 such that the trend of change of the arc detection current is the same as the trend of change of the output voltage of the power generation circuit 300, and obtain an arc detection power based on the arc detection current and the output voltage of the power generation circuit 300, thereby amplifying the change of the output voltage of the power generation circuit 300 and the output current of the power generation circuit 300 to a change of the arc detection power, and further improving the sensitivity of arc detection. It can be understood that when the arc detection circuit 301 detects that the arc detection power changes (for example, reaches the target power threshold), it may determine that the output current of the power generation circuit 300 and/or the output voltage of the power generation circuit 300 changes, and determine that an arc is generated, and then the driving control circuit 302 may control the power generation circuit 300 to stop outputting voltage and/or current to the load 303, so as to perform arc extinction processing, thereby improving arc extinction efficiency and sensitivity, reducing arc extinction cost, and improving system safety.
In some possible embodiments, the current transforming circuit may include a second inverting circuit, and the second power detecting circuit may include a second multiplying circuit, please refer to fig. 7, where fig. 7 is another schematic diagram of the power supply provided in the present application. As shown in fig. 7, one end of the second inverter circuit 4010 may be connected to the power generation circuit 400 as one end of the converter circuit, the other end of the second inverter circuit 4010 may be connected to one end of the second multiplier circuit 4011, and the other end of the second multiplier circuit 4011 may be connected to the drive control circuit 402 as the other end of the second power detection circuit. Here, the second inverter circuit 4010 may perform an inverter current conversion based on the output current of the power generation circuit 400 to obtain an inverter current as the arc detection current. It is understood that the second inverting circuit 4010 may be an inverter, or other circuits that can invert the amplitude of the current signal (such as the output current of the power generation circuit 400), or other circuits that can invert the current signal (such as the output current of the power generation circuit 400). Here, the second multiplying circuit 4011 may derive the arc detection power based on the arc detection current and the output voltage of the power generation circuit 400. It is understood that the second multiplying circuit 4011 herein can be a multiplier, or other circuit that can multiply the amplitude of a current signal (such as an inverse current or an arc detection current) and the amplitude of a voltage signal (such as an output voltage of the power generation circuit 400), or other circuit that can derive a power signal (such as an arc detection power) based on the current signal (such as an inverse current or an arc detection current) and the voltage signal (such as an output voltage of the power generation circuit 400).
In some possible embodiments, the current transforming circuit may further include a second operational amplifier circuit 4012 and a second adder circuit 4013. Referring to fig. 7 again, as shown in fig. 7, the other end of the second inverting circuit 4010 may be connected to one end of a second adding circuit 4013 through a second operational amplifier circuit 4012, and the other end of the second adding circuit 4013 may be connected to one end of a second multiplying circuit 4011. The second operational amplifier circuit 4012 here can obtain an amplified reverse current based on the reverse current and the current conversion parameter. It is understood that the second operational amplifier 4012 may be an operational amplifier, or other circuits that can amplify the amplitude of the current signal (e.g. reverse current), or other circuits that can amplify and transform the current signal (e.g. reverse current). Here, the second addition circuit 4013 may obtain the boost current based on the output current of the power generation circuit 400 and the current conversion parameter, and obtain the arc detection current based on the boost current and the amplified reverse current. The second adding circuit 4013 may be an adder, or other circuit that can increase the amplitude of the current signal (e.g., the amplified inverse current), or other circuit that can boost the current signal (e.g., the amplified inverse current). It is to be understood that the current conversion parameter may be a preset parameter, or may be a parameter obtained by the second operational amplifier 4012 or the second adder 4013 in real time based on the output current of the power generation circuit 400. For example, when the current transformation parameter is 1, the boost current may be 2 × Io (where Io is the amplitude of the output current of the power generation circuit 400), which may be determined according to the actual application scenario, and is not limited herein.
In some possible embodiments, the internal module of the arc detection circuit 401 and the second power detection circuit (e.g., the second multiplier 4011) may also have various connection relationships, for example, one end of the second operational amplifier 4012 may be connected to the power generation circuit 400 as one end of the arc detection circuit 401, the other end of the second operational amplifier 4012 may be connected to the second inverter 4010, and the second inverter 4010 may be connected to the second multiplier 4011 through the second adder 4013. At this time, the second operational amplifier 4012 may obtain an amplified output current based on the output current of the power generation circuit 400 and the current conversion parameter, the second inverter 4010 may perform an inverted current conversion based on the amplified output current to obtain an inverted amplified output current, and the second adder 4013 may obtain a boost current based on the output current of the power generation circuit 400 and the current conversion parameter, and obtain an arc detection current based on the boost current and the inverted amplified output current.
In the application, the arc detection circuit in the power supply has various expression modes, the variable current circuit has various composition modes, and the variable current circuit and the second power detection circuit have various and flexible connection modes, can adapt to different arc extinguishing scenes, and enhances the adaptability of the power supply.
In the present application, when an arc is generated during a process in which a power supply supplies power to a load, an output voltage of the power generation circuit and an output current of the power generation circuit have a trend of change opposite to each other, the arc detection circuit may obtain an arc detection signal (e.g., an arc detection voltage or an arc detection current) based on a first output signal (e.g., an output voltage or an output current) of the power generation circuit such that the trend of change of the arc detection signal is the same as the trend of change of a second output signal (e.g., an output current or an output voltage) of the power generation circuit, and obtain an arc detection power based on the arc detection signal and the second output signal of the power generation circuit, thereby amplifying a change of the first output signal of the power generation circuit and the second output signal of the power generation circuit into a change of the arc detection power, and further improving a sensitivity of arc detection. It can be understood that when the arc detection circuit detects that the arc detection power changes (for example, reaches a target power threshold), it may be determined that the output current of the power generation circuit and/or the output voltage of the power generation circuit changes, and it is determined that an arc is generated, and then the driving control circuit may control the power generation circuit to stop outputting voltage and/or current to the load, so as to perform arc extinction processing, thereby improving arc extinction efficiency and sensitivity, reducing arc extinction cost, and improving system safety. Meanwhile, in any of the power supplies shown in fig. 1 to 7, the power supply may detect an arc in time when the arc is generated and perform arc extinction processing, so as to reduce arc extinction cost and improve system safety.
Referring to fig. 8, fig. 8 is a schematic flow chart of an arc processing method of the power supply provided in the present application. The arc treatment method of the power supply provided by the application is suitable for any power supply shown in the figures 1 to 7. For convenience of description, the following will illustrate the arc processing method of the power supply provided in the embodiment of the present application with reference to the structure of the power supply shown in fig. 1, and as shown in fig. 8, the arc processing method of the power supply provided in the present application includes the following steps:
s501: the arc detection circuit determines an arc detection signal based on a first output signal of the power generation circuit and determines an arc detection power based on the arc detection signal and a second output signal of the power generation circuit.
S502: and judging whether the arc detection power reaches a target power threshold value, if so, executing step S503, and if not, executing step S501.
S503: the drive control circuit controls the power generation circuit to stop outputting the voltage and/or current to the load.
In some possible embodiments, when an arc is generated, the output voltage of the power generation circuit and the output current of the power generation circuit have opposite variation tendencies, the arc detection circuit may derive the arc detection signal (e.g., the arc detection voltage or the arc detection current) based on a first output signal (e.g., the output voltage or the output current) of the power generation circuit such that the variation tendency of the arc detection signal is the same as the variation tendency of a second output signal (e.g., the output current or the output voltage) of the power generation circuit, and derive the arc detection power based on the arc detection signal and the second output signal of the power generation circuit, thereby amplifying the variation of the first output signal of the power generation circuit and the second output signal of the power generation circuit into the variation of the arc detection power, and further improving the sensitivity of arc detection. It can be understood that when the arc detection circuit detects that the arc detection power changes (for example, reaches a target power threshold), it may be determined that the output current of the power generation circuit and/or the output voltage of the power generation circuit changes, and it is determined that an arc is generated, and then the driving control circuit may control the power generation circuit to stop outputting voltage and/or current to the load, so as to perform arc extinction processing, thereby improving arc extinction efficiency and sensitivity, reducing arc extinction cost, and improving system safety.
In this application, electric arc detection circuit can obtain electric arc detection power, and when electric arc detection power reached the target power threshold value, the steerable power generation circuit of drive control circuit stopped to load output voltage and/or electric current to carry out the arc extinguishing to electric arc and handle, thereby improved arc extinguishing efficiency and sensitivity, reduced the arc extinguishing cost, improved the security of system.
In some possible embodiments, the first output signal of the power generation circuit may be an output voltage and the second output signal is an output current. Referring to fig. 9, fig. 9 is another schematic flow chart of the arc processing method of the power supply provided in the present application. For convenience of description, the following will illustrate the arc processing method of the power supply provided in the embodiment of the present application with reference to the structure of the power supply shown in fig. 2, and as shown in fig. 9, the arc processing method of the power supply provided in the present application includes the following steps:
s601: an arc detection voltage is determined as an arc detection signal based on an output voltage of the power generation circuit by the voltage transformation circuit.
S602: the arc detection power is obtained by the first power detection circuit based on the arc detection voltage and the output current of the power generation circuit.
S603: and judging whether the arc detection power is greater than or equal to a first power threshold value, if so, executing step S604, and if not, executing step S602.
S604: and determining that the arc detection power reaches a target power threshold value, and controlling the power generation circuit to stop outputting voltage and/or current to the load through the driving control circuit.
In the application, when an arc is generated, the output voltage of the power generation circuit and the output current of the power generation circuit have opposite variation trends, the arc detection circuit can obtain the arc detection voltage based on the output voltage of the power generation circuit, so that the variation trend of the arc detection voltage is the same as the variation trend of the output current of the power generation circuit, and obtain the arc detection power based on the arc detection voltage and the output current of the power generation circuit, thereby amplifying the variation of the output voltage of the power generation circuit and the output current of the power generation circuit into the variation of the arc detection power, and further improving the sensitivity of arc detection. It can be understood that when the arc detection circuit detects that the arc detection power changes (for example, reaches a target power threshold), it may be determined that the output current of the power generation circuit and/or the output voltage of the power generation circuit changes, and it is determined that an arc is generated, and then the driving control circuit may control the power generation circuit to stop outputting voltage and/or current to the load, so as to perform arc extinction processing, thereby improving arc extinction efficiency and sensitivity, reducing arc extinction cost, and improving system safety.
In some possible embodiments, the first output signal of the power generation circuit may be an output current and the second output signal is an output voltage. Referring to fig. 10, fig. 10 is another schematic flow chart of an arc processing method of the power supply provided in the present application. For convenience of description, the following will illustrate the arc processing method of the power supply provided in the embodiment of the present application with reference to the structure of the power supply shown in fig. 5, and as shown in fig. 10, the arc processing method of the power supply provided in the present application includes the following steps:
s701: an arc detection current is determined as an arc detection signal based on the output current of the power generation circuit by the inverter circuit.
S702: the arc detection power is determined by the second power detection circuit based on the arc detection current and the output voltage of the power generation circuit.
S703: and judging whether the arc detection power is less than or equal to a second power threshold value, if so, executing step S704, and if not, executing step S702.
S704: and determining that the arc detection power reaches a target power threshold value, and controlling the power generation circuit to stop outputting voltage and/or current to the load through the driving control circuit.
In the application, when an arc is generated, the output current of the power generation circuit and the output voltage of the power generation circuit have opposite variation trends, the arc detection circuit can obtain the arc detection current based on the output current of the power generation circuit, so that the variation trend of the arc detection current is the same as the variation trend of the output voltage of the power generation circuit, and obtain the arc detection power based on the arc detection current and the output voltage of the power generation circuit, thereby amplifying the variation of the output voltage of the power generation circuit and the output current of the power generation circuit into the variation of the arc detection power, and further improving the sensitivity of arc detection. It can be understood that when the arc detection circuit detects that the arc detection power changes (for example, reaches a target power threshold), it may be determined that the output current of the power generation circuit and/or the output voltage of the power generation circuit changes, and it is determined that an arc is generated, and then the driving control circuit may control the power generation circuit to stop outputting voltage and/or current to the load, so as to perform arc extinction processing, thereby improving arc extinction efficiency and sensitivity, reducing arc extinction cost, and improving system safety.
In summary, in this application, the arc detection circuit can obtain the arc detection power, and when the arc detection power reached the target power threshold, the drive control circuit can control the generating circuit to stop outputting voltage and/or current to the load to carry out the arc extinguishing processing to the electric arc, thereby improved arc extinguishing efficiency and sensitivity, reduced the arc extinguishing cost, improved the security of system.
The above description is only for the specific embodiments of the present invention, but the scope of the present invention is not limited thereto, and any person skilled in the art can easily conceive of the changes or substitutions within the technical scope of the present invention, and all the changes or substitutions should be covered within the scope of the present invention. Therefore, the protection scope of the present invention shall be subject to the protection scope of the appended claims.

Claims (10)

1. A power supply is characterized by comprising a power generation circuit, an arc detection circuit and a drive control circuit, wherein the power generation circuit is connected with a load through the drive control circuit, and the arc detection circuit is connected with the power generation circuit and the drive control circuit;
the arc detection circuit is used for obtaining an arc detection signal based on a first output signal of the power generation circuit after being subjected to phase inversion or phase inversion amplification, and obtaining arc detection power based on the arc detection signal and a second output signal of the power generation circuit, wherein the change trend of the arc detection signal is opposite to the change trend of the first output signal, the first output signal is output voltage and the second output signal is output current, or the first output signal is output current and the second output signal is output voltage;
the driving control circuit is used for controlling the power generation circuit to stop outputting voltage and/or current to the load when the arc detection power reaches a target power threshold value so as to perform arc extinction processing.
2. The power supply according to claim 1, wherein the arc detection circuit comprises a transformer circuit and a first power detection circuit, one end of the transformer circuit is connected to the power generation circuit as one end of the arc detection circuit, the other end of the transformer circuit is connected to one end of the first power detection circuit, the other end of the first power detection circuit is connected to the driving control circuit, the first output signal is an output voltage and the second output signal is an output current;
the voltage transformation circuit is used for obtaining an arc detection voltage based on the output voltage of the power generation circuit to serve as the arc detection signal, and the change trend of the arc detection voltage is opposite to that of the output voltage of the power generation circuit;
the first power detection circuit is used for obtaining the arc detection power based on the arc detection voltage and the output current of the power generation circuit;
the driving control circuit is further used for obtaining that the arc detection power reaches a target power threshold when the arc detection power is larger than or equal to a first power threshold, and controlling the power generation circuit to stop outputting voltage and/or current to the load.
3. The power supply of claim 2, wherein the transformation circuit comprises a first inverting circuit, and the first power detection circuit comprises a first multiplying circuit;
one end of the first inverter circuit is used as one end of the transformation circuit and is connected with the power generation circuit, the other end of the first inverter circuit is connected with one end of the first multiplication circuit, and the other end of the first multiplication circuit is used as the other end of the first power detection circuit and is connected with the drive control circuit;
the first inverter circuit is used for performing inverter voltage conversion based on the output voltage of the power generation circuit to obtain an inverter voltage serving as the arc detection voltage;
the first multiplying circuit is used for obtaining the arc detection power based on the arc detection voltage and the output current of the power generation circuit.
4. The power supply according to claim 3, wherein the voltage transformation circuit further comprises a first operational amplifier circuit and a first adder circuit, the other end of the first inverter circuit is connected to one end of the first adder circuit through the first operational amplifier circuit, and the other end of the first adder circuit is connected to one end of the first multiplier circuit;
the first operational amplifier circuit is used for obtaining an amplified reversed-phase voltage based on the reversed-phase voltage and the voltage conversion parameter;
the first addition circuit is used for obtaining a boost voltage based on the output voltage of the power generation circuit and the voltage conversion parameter, and obtaining the arc detection voltage based on the boost voltage and the amplified reverse-phase voltage.
5. The power supply according to claim 1, wherein the arc detection circuit comprises a current transformation circuit and a second power detection circuit, one end of the current transformation circuit is connected to the power generation circuit as one end of the arc detection circuit, the other end of the current transformation circuit is connected to one end of the second power detection circuit, the other end of the second power detection circuit is connected to the driving control circuit, the first output signal is an output current, and the second output signal is an output voltage;
the current transformation circuit is used for obtaining an arc detection current based on the output current of the power generation circuit to serve as the arc detection signal, and the variation trend of the arc detection current is opposite to that of the output current of the power generation circuit;
the second power detection circuit is used for obtaining the arc detection power based on the arc detection current and the output voltage of the power generation circuit;
the driving control circuit is further configured to obtain that the arc detection power reaches a target power threshold when the arc detection power is less than or equal to a second power threshold, and control the power generation circuit to stop outputting voltage and/or current to the load, where the second power threshold is less than the first power threshold.
6. The power supply of claim 5, wherein the current transformation circuit comprises a second inverting circuit, and the second power detection circuit comprises a second multiplying circuit;
one end of the second inverter circuit is used as one end of the converter circuit and connected with the power generation circuit, the other end of the second inverter circuit is connected with one end of the second multiplication circuit, and the other end of the second multiplication circuit is used as the other end of the second power detection circuit and connected with the drive control circuit;
the second inverter circuit is used for performing inverter current conversion based on the output current of the power generation circuit to obtain an inverter current as the arc detection current;
the second multiplying circuit is used for obtaining the arc detection power based on the arc detection current and the output voltage of the generating circuit.
7. The power supply according to claim 6, wherein the current transforming circuit further comprises a second operational amplifier circuit and a second adder circuit, the other end of the second inverter circuit is connected to one end of the second adder circuit through the second operational amplifier circuit, and the other end of the second adder circuit is connected to one end of the second multiplier circuit;
the second operational amplifier circuit is used for obtaining amplified reversed-phase current based on the reversed-phase current and the current transformation parameter;
the second addition circuit is used for obtaining a boost current based on the output current of the power generation circuit and the current transformation parameter, and obtaining the arc detection current based on the boost current and the amplified reverse phase current.
8. An arc processing method of a power supply, the power supply including a power generation circuit, an arc detection circuit, and a drive control circuit, the power generation circuit being connected to a load through the drive control circuit, the arc detection circuit connecting the power generation circuit and the drive control circuit, the method comprising:
the arc detection circuit determines an arc detection signal based on a first output signal of the power generation circuit after being subjected to phase inversion or phase inversion amplification, and determines arc detection power based on the arc detection signal and a second output signal of the power generation circuit, wherein the change trend of the arc detection signal is opposite to that of the first output signal, the first output signal is output voltage and the second output signal is output current, or the first output signal is output current and the second output signal is output voltage;
when the arc detection power is detected to reach a target power threshold value, the driving control circuit controls the power generation circuit to stop outputting voltage and/or current to the load so as to perform arc extinguishing processing.
9. The arc processing method according to claim 8, wherein the arc detection circuit includes a transformer circuit and a first power detection circuit, one end of the transformer circuit is connected to the power generation circuit as one end of the arc detection circuit, the other end of the transformer circuit is connected to one end of the first power detection circuit, the other end of the first power detection circuit is connected to the drive control circuit, the first output signal is an output voltage and the second output signal is an output current;
the arc detection circuit determining an arc detection signal based on a first output signal of the power generation circuit and determining an arc detection power based on the arc detection signal and a second output signal of the power generation circuit comprises:
determining, by the voltage transformation circuit, an arc detection voltage as the arc detection signal based on an output voltage of the power generation circuit, a variation tendency of the arc detection voltage being opposite to a variation tendency of the output voltage of the power generation circuit;
obtaining the arc detection power based on the arc detection voltage and the output current of the power generation circuit through a first power detection circuit;
when it is detected that the arc detection power reaches a target power threshold, the driving control circuit controls the power generation circuit to stop outputting the voltage and/or the current to the load, including:
when the arc detection power is larger than or equal to a first power threshold, determining that the arc detection power reaches a target power threshold, and controlling the power generation circuit to stop outputting voltage and/or current to the load through the drive control circuit.
10. The arc processing method according to claim 8, wherein the arc detection circuit comprises a current transformer circuit and a second power detection circuit, one end of the current transformer circuit is connected to the power generation circuit as one end of the arc detection circuit, the other end of the current transformer circuit is connected to one end of the second power detection circuit, the other end of the second power detection circuit is connected to the driving control circuit, the first output signal is an output current and the second output signal is an output voltage;
the arc detection circuit determining an arc detection signal based on a first output signal of the power generation circuit and determining an arc detection power based on the arc detection signal and a second output signal of the power generation circuit comprises:
determining, by the inverter circuit, an arc detection current as the arc detection signal based on the output current of the power generation circuit, the trend of change of the arc detection current being opposite to the trend of change of the output current of the power generation circuit;
determining, by a second power detection circuit, the arc detection power based on the arc detection current and an output voltage of the power generation circuit;
when it is detected that the arc detection power reaches a target power threshold, the driving control circuit controls the power generation circuit to stop outputting the voltage and/or the current to the load, including:
when the arc detection power is smaller than or equal to a second power threshold value, determining that the arc detection power reaches a target power threshold value, and controlling the power generation circuit to stop outputting voltage and/or current to the load through the drive control circuit, wherein the second power threshold value is smaller than the first power threshold value.
CN202210111300.1A 2022-01-29 2022-01-29 Power supply and arc processing method Active CN114561619B (en)

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