CN114545103A - Wireless transmission electrostatic field detection device and wireless power supply system - Google Patents
Wireless transmission electrostatic field detection device and wireless power supply system Download PDFInfo
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- CN114545103A CN114545103A CN202210041359.8A CN202210041359A CN114545103A CN 114545103 A CN114545103 A CN 114545103A CN 202210041359 A CN202210041359 A CN 202210041359A CN 114545103 A CN114545103 A CN 114545103A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R29/00—Arrangements for measuring or indicating electric quantities not covered by groups G01R19/00 - G01R27/00
- G01R29/12—Measuring electrostatic fields or voltage-potential
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02J—CIRCUIT ARRANGEMENTS OR SYSTEMS FOR SUPPLYING OR DISTRIBUTING ELECTRIC POWER; SYSTEMS FOR STORING ELECTRIC ENERGY
- H02J50/00—Circuit arrangements or systems for wireless supply or distribution of electric power
- H02J50/10—Circuit arrangements or systems for wireless supply or distribution of electric power using inductive coupling
Abstract
The embodiment of the invention discloses a wireless transmission electrostatic field detection device and a wireless power supply system, which comprise an electrostatic field detection sensor, a signal processing module, a wireless data transmitter and a wireless power supply module; an electrostatic field detection window of the electrostatic field detection sensor performs electrostatic detection on an electrostatic field detection source to obtain an electrostatic alternating current signal, and the electrostatic alternating current signal is output to the signal processing module; the signal processing module obtains the electrostatic field intensity value and transmits the electrostatic field intensity value to the wireless data transmitter; the wireless data transmitter is used for transmitting an electrostatic field intensity value in a wireless transmission mode, the wireless power supply module is used for supplying power to the electrostatic field detection sensor in a wireless power supply mode to operate, and according to the field layout requirement of the environment, because the wireless power supply device is wirelessly connected with the wireless transmission electrostatic detection device, compared with the wired power supply device, the wireless transmission electrostatic field detection device is free of limitation of a power supply power line, can be randomly moved to any position, and is higher in flexibility.
Description
Technical Field
The invention relates to the technical field of detection, in particular to a wireless transmission electrostatic field detection device and a wireless power supply system.
Background
With the continuous development of semiconductor chip manufacturing processes and the increasing demand of people for intelligent devices, the demand of highly integrated semiconductor chips is increasing. In a semiconductor chip production workshop, the grade of dust-free cleanness requirements far exceed that of a medical operating room in the processes from the processing of wafers to the manufacturing of semiconductor chip finished products. However, the requirement of cleanliness is extremely high not only for the density of air impurities, but also for the size of a trace electrostatic field. Due to the existence of a trace amount of electrostatic field, not only can dust be brought into the field of semiconductor chip manufacturing, but also the trace amount of electrostatic discharge phenomenon can cause damage to integrated circuits in the semiconductor chips, thereby greatly reducing the yield.
At present, most semiconductor chip manufacturers use an electrostatic field measurer to detect semiconductor production equipment in real time; however, the conventional wired transmission type electrostatic field measuring instrument generally has the problems of high wiring and maintenance costs, high construction and moving costs of factories, poor expansibility and the like.
Disclosure of Invention
In view of the above technical problems, embodiments of the present invention provide a wireless transmission electrostatic field detection apparatus and a wireless power supply system.
The first aspect of the embodiments of the present invention provides an electrostatic field detection apparatus for wireless transmission, including: the device comprises an electrostatic field detection sensor, a signal processing module, a wireless data transmitter and a wireless power supply module;
the electrostatic field detection sensor comprises a shielding shell, an electrostatic field detection window is arranged on the shielding shell, when the electrostatic field detection window carries out electrostatic detection against an electrostatic field detection source, an electrostatic alternating current signal is obtained, and the electrostatic alternating current signal is output to the signal processing module;
the signal processing module is used for converting the electrostatic alternating current signal into a digital electric signal, detecting the digital electric signal to obtain an electrostatic field intensity value and transmitting the electrostatic field intensity value to the wireless data transmitter;
the wireless data transmitter is used for transmitting the electrostatic field intensity numerical value in a wireless transmission mode;
the wireless power supply module is used for supplying power to the electrostatic field detection sensor in a wireless power supply mode to operate.
Optionally, the electrostatic field detection sensor further comprises an electrostatic field electrical signal receiving probe, a first vibration unit, a second vibration unit and a driving unit, wherein the first vibration unit and the second vibration unit are respectively connected with the vibration unit;
an electrostatic field electric signal receiving probe is arranged in the shielding shell and provided with an electrostatic field detection window and used for receiving an electrostatic field electric signal;
the electrostatic field electric signal receiving probe is fixed in a cantilever beam arm and is connected with an electric signal transmission line; the suspension beam arm is fixed between the first vibration unit and the second vibration unit;
the driving unit is used for generating vibration frequency signals according to the first vibration unit and the second vibration unit, and the vibration frequency signals are used for driving the resonant mechanical mechanism to vibrate in the same frequency and direction so as to enable the cantilever beam to vibrate vertically; the vibration of the cantilever beam arm brings the static and static electric field electric signal receiving probe to vertically vibrate, so that the static direct current electric signal received by the static electric field electric signal receiving probe positioned at the static electric field detection window is converted into a static alternating electric signal.
Alternatively, the first vibration unit includes at least a positive electrode layer, an insulating layer, and a negative electrode layer, and the positive electrode layer, the insulating layer, and the negative electrode layer are arranged in this order;
the second vibration unit at least comprises a positive electrode layer, an insulating layer and a negative electrode layer, and the positive electrode layer, the insulating layer and the negative electrode layer are arranged in sequence.
Alternatively, the positive electrode layer of the first vibration unit is connected to the positive electrode layer of the second vibration unit, the positive electrode layer of the second vibration unit is connected to a reverse voltage signal having the same absolute value, and the negative electrode layer of the first vibration unit is connected to the negative electrode layer of the second vibration unit.
Optionally, the first vibration unit and the second vibration unit are respectively fixed on the insulating support.
Optionally, the signal processing module includes a transformer, a valid value chip and a processor;
the mutual inductor is used for receiving the high-voltage electric signals output by the first vibration unit and the second vibration unit and carrying out voltage reduction processing on the high-voltage electric signals to obtain voltage-reduced electric signals;
the effective value chip is used for converting the voltage reduction electric signal into a digital control signal and sending the digital control signal to the processor.
Optionally, the signal processing module further comprises an amplifier and a low-pass filter;
the amplifier is used for amplifying the received electrostatic alternating current signal to obtain an amplified alternating current signal;
the low-pass filter is used for filtering the amplified alternating current signal to obtain a filtered alternating current signal and sending the filtered alternating current signal to the processor.
Optionally, the processor comprises an analog-to-digital converter, a digital filter and a detector;
the analog/digital converter is used for converting the filtered alternating current signal into a digital electric signal;
the digital filter is used for filtering the digital electric signal to obtain a filtered digital signal;
the detector is used for carrying out detection operation on the digital control signal and the filtering digital signal, and when the digital control signal and the filtering digital signal are judged to be the same frequency, the detector determines an electrostatic field intensity value according to the filtering digital signal and transmits the electrostatic field intensity value to the wireless data transmitter.
A second aspect of an embodiment of the present invention provides a wireless power supply system, including: the wireless power supply device comprises a wireless power supply module and wireless sending equipment, wherein the wireless power supply module is connected with the wireless sending equipment, and the wireless power supply module is located in the wireless transmission electrostatic field detection device of the first aspect.
Optionally, the wireless transmitting device supplies power to the wireless power supply module in an electromagnetic wave induction type wireless manner.
The wireless transmission electrostatic field detection device and the wireless power supply system provided by the embodiment of the invention comprise an electrostatic field detection sensor, a signal processing module, a wireless data transmitter and a wireless power supply module; the electrostatic field detection sensor comprises a shielding shell, an electrostatic field detection window is arranged on the shielding shell, when the electrostatic field detection window carries out electrostatic detection against an electrostatic field detection source, an electrostatic alternating current signal is obtained, and the electrostatic alternating current signal is output to the signal processing module; the signal processing module is used for converting the electrostatic alternating current signal into a digital electric signal, detecting the digital electric signal, obtaining an electrostatic field intensity value and transmitting the electrostatic field intensity value to the wireless data transmitter; the wireless data transmitter is used for transmitting the electrostatic field strength value in a wireless transmission mode, and the wireless power supply module is used for supplying power to the electrostatic field detection sensor in a wireless power supply mode to operate.
Drawings
Fig. 1 is a schematic structural diagram of a wireless transmission electrostatic field detection device provided in an embodiment of the present invention;
fig. 2 is a schematic diagram of a detection process of the wireless transmission electrostatic field detection apparatus provided in the embodiment of the present invention;
fig. 3 is a schematic structural diagram of a wireless power supply system provided in an embodiment of the present invention.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Referring to fig. 1, a block diagram of a wireless electrostatic field detection device according to an embodiment of the present invention is shown, where the wireless electrostatic field detection device at least includes: comprises an electrostatic field detection sensor 101, a signal processing module 102, a wireless data transmitter 103 and a wireless power supply module 104;
the electrostatic field detection sensor 101 comprises a shielding shell, an electrostatic field detection window is arranged on the shielding shell, and when the electrostatic field detection window carries out electrostatic detection against an electrostatic field detection source, an electrostatic alternating current signal is obtained and is output to the signal processing module;
the signal processing module 102 is configured to convert the electrostatic alternating current signal into a digital electrical signal, detect the digital electrical signal, obtain an electrostatic field intensity value, and transmit the electrostatic field intensity value to the wireless data transmitter;
the wireless data transmitter 103 is used for transmitting the electrostatic field intensity value in a wireless transmission mode;
the wireless power supply module 104 is used for supplying power to the electrostatic field detection sensor in a wireless power supply mode.
The wireless transmission mode comprises transmission modes such as Bluetooth and wifi.
Optionally, the electrostatic field detection sensor further comprises an electrostatic field electrical signal receiving probe, a first vibration unit, a second vibration unit and a driving unit, wherein the first vibration unit and the second vibration unit are respectively connected with the vibration unit;
wherein, the electrostatic field electric signal receiving probe is a metal probe.
An electrostatic field electric signal receiving probe is arranged in the shielding shell and provided with an electrostatic field detection window and used for receiving an electrostatic field electric signal;
the electrostatic field electric signal receiving probe is fixed in a cantilever beam arm and is connected with an electric signal transmission line; the suspension beam arm is fixed between the first vibration unit and the second vibration unit;
the driving unit is used for generating vibration frequency signals according to the first vibration unit and the second vibration unit, and the vibration frequency signals are used for driving the resonant mechanical mechanism to vibrate in the same frequency and direction so as to enable the cantilever beam to vibrate vertically; the vibration belt of the cantilever beam arm vertically vibrates the static electric field electric signal receiving probe, so that the static direct current electric signal received by the static electric field electric signal receiving probe positioned at the static electric field detection window is converted into a static alternating electric signal.
Optionally, the first vibration unit at least comprises a positive electrode layer, an insulating layer and a negative electrode layer, wherein the piezoelectric ceramic is embedded in the insulating layer, and the positive electrode layer, the insulating layer and the negative electrode layer are arranged in sequence;
the second vibration unit at least comprises a positive electrode layer, an insulating layer and a negative electrode layer, wherein the piezoelectric ceramic is embedded in the insulating layer, and the positive electrode layer, the insulating layer and the negative electrode layer are sequentially arranged.
Alternatively, the positive electrode layer of the first vibration unit is connected to the positive electrode layer of the second vibration unit, the positive electrode layer of the second vibration unit is connected to a reverse voltage signal having the same absolute value, and the negative electrode layer of the first vibration unit is connected to the negative electrode layer of the second vibration unit.
Optionally, the first vibration unit and the second vibration unit are respectively fixed on the insulating support.
Optionally, the signal processing module includes a transformer, an effective value chip and a processor;
the mutual inductor is used for receiving the high-voltage electric signals output by the first vibration unit and the second vibration unit and carrying out voltage reduction processing on the high-voltage electric signals to obtain voltage-reduced electric signals; wherein, the mutual inductor is a transformer;
the effective value chip is used for converting the voltage reduction electric signal into a digital control signal and sending the digital control signal to the processor.
Optionally, the signal processing module further comprises an amplifier and a low-pass filter;
the amplifier is used for amplifying the received electrostatic alternating current signal to obtain an amplified alternating current signal;
the low-pass filter is used for filtering the amplified alternating current signal to obtain a filtered alternating current signal and sending the filtered alternating current signal to the processor.
The electrostatic alternating electric signal is amplified by an amplifier to obtain an electrostatic electric signal, the electrostatic electric signal is output to a low-pass filter, the amplified electrostatic electric signal is filtered by the low-pass filter and is transmitted to an analog/digital converter in the controller, and the analog electric signal is converted into a digital electric signal (a filtered alternating current electric signal).
Optionally, the processor comprises an analog-to-digital converter, a digital filter and a detector;
the analog/digital converter is used for converting the filtered alternating current signal into a digital electric signal;
the digital filter is used for filtering the digital electric signal to obtain a filtered digital signal;
the detector is used for carrying out detection operation on the digital control signal and the filtering digital signal, and when the digital control signal and the filtering digital signal are judged to be the same frequency, the detector determines an electrostatic field intensity value according to the filtering digital signal and transmits the electrostatic field intensity value to the wireless data transmitter.
The digital electric signal is output to a digital filter arranged in the processor for digital filtering and then is subjected to detection operation with the digital electric signal obtained by the effective value chip after voltage reduction, and after detecting whether the two signals have the same frequency or not, the digital signal passing through the digital filter is calculated to obtain an electrostatic field intensity value and is transmitted to a data transmitter.
Fig. 2 is a schematic diagram of a detection flow of the wireless transmission electrostatic field detection apparatus provided in the embodiment of the present invention, as shown in fig. 2:
a vibration driving circuit (driving unit) outputs a specified frequency pulse signal or voltage;
the driving unit drives the first vibration unit and the second vibration unit to generate a specified longitudinal vibration frequency;
the first vibration unit and the second vibration unit drive a charge collection probe (an electrostatic field electric signal receiving probe) positioned at an electrostatic field detection window and passing through a numerical electrostatic field to vertically vibrate;
the electrostatic field electric signal receiving probe has regular distance change with the detection surface due to vertical vibration, so that the received electrostatic direct current electric signal is converted into an electrostatic alternating current electric signal;
the static alternating current signal is amplified, low-pass filtered to filter noise points on the signal and then transmitted to a processor for analog-to-digital conversion;
the digital signal after analog-digital change processing passes through a digital filter in the processor;
the digital signal output by the digital filter is transmitted to a data transmitting module (a wireless data transmitter) after being subjected to detection operation;
and after receiving the data, the data sending module sends the data to the terminal equipment, and the terminal equipment calculates, records, stores and displays the electric field intensity of the data. The terminal equipment can be a PC, a mobile terminal and the like.
Fig. 3 is a schematic structural diagram of a wireless power supply system provided in an embodiment of the present invention, and as shown in fig. 3, an embodiment of the present invention further provides a wireless power supply system, including: the wireless power supply device is connected with the wireless receiving device, and the wireless receiving device is positioned in the electrostatic field detection device for wireless transmission.
The electrostatic field detection device comprises an electrostatic field detection sensor, a signal processing module and a wireless data transmitter; the electrostatic field detection sensor also comprises an electrostatic field electric signal receiving probe, a first vibration unit, a second vibration unit and a driving unit; the signal processing module comprises a mutual inductor, an effective value chip, an amplifier, a low-pass filter and a processor; the processor comprises an analog-to-digital converter, a digital filter and a detector; the specific functions are described in detail in the above embodiments, and are not described herein again.
Optionally, the wireless power supply device supplies power to the wireless receiving device in an electromagnetic wave induction type wireless manner.
Because wireless connection is adopted between the wireless power supply device and the electrostatic field detection device as well as between the electrostatic field detection device and the monitoring end, compared with wired connection, the wireless power supply device has no limitation of wiring, the electrostatic field on-line monitoring device can be randomly moved to any required position, the movement is convenient, and the flexibility is stronger.
The wireless transmission electrostatic field detection device and the wireless power supply system provided by the embodiment of the invention comprise an electrostatic field detection sensor, a signal processing module, a wireless data transmitter and a wireless power supply module; the electrostatic field detection sensor comprises a shielding shell, an electrostatic field detection window is arranged on the shielding shell, when the electrostatic field detection window carries out electrostatic detection against an electrostatic field detection source, an electrostatic alternating current signal is obtained, and the electrostatic alternating current signal is output to the signal processing module; the signal processing module is used for converting the electrostatic alternating current signal into a digital electric signal, detecting the digital electric signal to obtain an electrostatic field intensity value and transmitting the electrostatic field intensity value to the wireless data transmitter; the wireless data transmitter is used for transmitting the electrostatic field strength value in a wireless transmission mode, and the wireless power supply module is used for supplying power to the electrostatic field detection sensor in a wireless power supply mode to operate.
The above examples are only intended to illustrate the technical solution of the present invention, and not to limit it; although the present invention has been described in detail with reference to the foregoing embodiments, it will be understood by those of ordinary skill in the art that: the technical solutions described in the foregoing embodiments may still be modified, or some technical features may be equivalently replaced; and such modifications or substitutions do not depart from the spirit and scope of the corresponding technical solutions of the embodiments of the present invention.
Claims (10)
1. The wireless transmission electrostatic field detection device is characterized by comprising an electrostatic field detection sensor, a signal processing module, a wireless data transmitter and a wireless power supply module;
the electrostatic field detection sensor comprises a shielding shell, an electrostatic field detection window is arranged on the shielding shell, when the electrostatic field detection window carries out electrostatic detection against an electrostatic field detection source, an electrostatic alternating current signal is obtained, and the electrostatic alternating current signal is output to the signal processing module;
the signal processing module is used for converting the electrostatic alternating current signal into a digital electric signal, detecting the digital electric signal to obtain an electrostatic field intensity value and transmitting the electrostatic field intensity value to the wireless data transmitter;
the wireless data transmitter is used for transmitting the electrostatic field intensity numerical value in a wireless transmission mode;
and the wireless power supply module is used for supplying power to the electrostatic field detection sensor in a wireless power supply mode for operation.
2. The electrostatic field detecting device according to claim 1, characterized in that: the electrostatic field detection sensor also comprises an electrostatic field electric signal receiving probe, a first vibration unit, a second vibration unit and a driving unit, wherein the first vibration unit and the second vibration unit are respectively connected with the vibration unit;
an electrostatic field electric signal receiving probe is arranged in the shielding shell and provided with an electrostatic field detection window and used for receiving an electrostatic field electric signal;
the electrostatic field electric signal receiving probe is fixed in a cantilever beam arm and is connected with an electric signal transmission line; the suspension beam arm is fixed between the first vibration unit and the second vibration unit;
the driving unit is used for generating vibration frequency signals according to the first vibration unit and the second vibration unit, and the vibration frequency signals are used for driving the resonant mechanical mechanism to vibrate in the same frequency and direction so as to enable the cantilever beam to vibrate vertically; the vibration of the cantilever beam arm brings the static and static electric field electric signal receiving probe to vertically vibrate, so that the static direct current electric signal received by the static electric field electric signal receiving probe positioned at the static electric field detection window is converted into a static alternating electric signal.
3. The electrostatic field detecting device according to claim 2, characterized in that: the first vibration unit at least comprises a positive electrode layer, an insulating layer and a negative electrode layer, and the positive electrode layer, the insulating layer and the negative electrode layer are arranged in sequence;
the second vibration unit at least comprises a positive electrode layer, an insulating layer and a negative electrode layer, and the positive electrode layer, the insulating layer and the negative electrode layer are arranged in sequence.
4. The electrostatic field detecting device according to claim 3, characterized in that: the positive electrode layer of the first vibration unit is connected with the positive electrode layer of the second vibration unit, the positive electrode layer of the second vibration unit is connected with reverse voltage signals with the same absolute value, and the negative electrode layer of the first vibration unit is connected with the negative electrode layer of the second vibration unit.
5. The electrostatic field detecting device according to claim 4, characterized in that: the first vibration unit and the second vibration unit are respectively fixed on the insulating support.
6. The electrostatic field detecting device according to claim 1, characterized in that: the signal processing module comprises a mutual inductor, an effective value chip and a processor;
the mutual inductor is used for receiving the high-voltage electric signals output by the first vibration unit and the second vibration unit and carrying out voltage reduction processing on the high-voltage electric signals to obtain voltage reduction electric signals;
the effective value chip is used for converting the voltage reduction electric signal into a digital control signal and sending the digital control signal to the processor.
7. The electrostatic field detecting device according to claim 6, characterized in that: the signal processing module further comprises an amplifier and a low-pass filter;
the amplifier is used for amplifying the received electrostatic alternating current signal to obtain an amplified alternating current signal;
the low-pass filter is used for filtering the amplified alternating current signal to obtain a filtered alternating current signal and sending the filtered alternating current signal to the processor.
8. The electrostatic field detecting device according to claim 7, characterized in that: the processor comprises an analog-to-digital converter, a digital filter and a detector;
the analog/digital converter is used for converting the filtered alternating current signal into a digital electric signal;
the digital filter is used for filtering the digital electric signal to obtain a filtered digital signal;
the detector is used for carrying out detection operation on the digital control signal and the filtering digital signal, and when the digital control signal and the filtering digital signal are judged to be the same frequency, the detector determines an electrostatic field intensity value according to the filtering digital signal and transmits the electrostatic field intensity value to the wireless data transmitter.
9. A wireless power supply system, characterized by: the device comprises a wireless power supply module and a wireless transmitting device, wherein the wireless power supply module is connected with the wireless transmitting device, and the wireless power supply module is positioned in the electrostatic field detection device for wireless transmission according to any one of claims 1-8.
10. The wireless power supply system according to claim 9, wherein: the wireless sending equipment supplies power to the wireless power supply module in an electromagnetic wave induction type wireless mode.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210041359.8A CN114545103A (en) | 2022-01-14 | 2022-01-14 | Wireless transmission electrostatic field detection device and wireless power supply system |
| PCT/CN2023/070843 WO2023134555A1 (en) | 2022-01-14 | 2023-01-06 | Electrostatic field detection apparatus based on wireless transmission, and wireless power supply system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
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| CN202210041359.8A CN114545103A (en) | 2022-01-14 | 2022-01-14 | Wireless transmission electrostatic field detection device and wireless power supply system |
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| CN114545103A true CN114545103A (en) | 2022-05-27 |
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| CN202210041359.8A Pending CN114545103A (en) | 2022-01-14 | 2022-01-14 | Wireless transmission electrostatic field detection device and wireless power supply system |
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| WO (1) | WO2023134555A1 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2023134555A1 (en) * | 2022-01-14 | 2023-07-20 | 深圳市中明科技股份有限公司 | Electrostatic field detection apparatus based on wireless transmission, and wireless power supply system |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102353855A (en) * | 2011-09-28 | 2012-02-15 | 上海安平静电科技有限公司 | Portable electrostatic detection device and electrostatic detection method thereof |
| CN107329004A (en) * | 2016-12-02 | 2017-11-07 | 北京理工大学 | A kind of contactless MEMS autoexcitations stilling the theatre electrical resistivity survey examining system and its detection method based on electrostatic induction principle |
| CN113640591A (en) * | 2021-09-07 | 2021-11-12 | 清华大学 | Differential type micro electric field sensing device based on piezoelectric film deformation |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| ZA200710464B (en) * | 2005-06-08 | 2009-07-29 | Powercast Corp | Powering devices using RF energy harvesting |
| CN107015072B (en) * | 2017-05-25 | 2024-02-13 | 北京中科飞龙传感技术有限责任公司 | Sealed non-contact handheld electrostatic instrument based on electric field sensor |
| CN207895003U (en) * | 2017-12-05 | 2018-09-21 | 广东电网有限责任公司江门供电局 | A kind of MEMS electric-field sensors and its wireless energy supply system |
| CN109521258A (en) * | 2019-01-30 | 2019-03-26 | 云南电网有限责任公司电力科学研究院 | A kind of direct current electrical verification system and method based on MEMS electric-field sensor |
| CN112505436A (en) * | 2020-11-20 | 2021-03-16 | 石家庄铁道大学 | Non-contact electrostatic field testing device and testing method |
| CN114384334B (en) * | 2021-12-03 | 2023-06-02 | 深圳市中明科技股份有限公司 | Wireless transmission electrostatic field on-line monitoring device and wireless monitoring system |
| CN114527336A (en) * | 2022-01-14 | 2022-05-24 | 深圳市中明科技股份有限公司 | Non-contact electrostatic field detection sensing probe device |
| CN114545103A (en) * | 2022-01-14 | 2022-05-27 | 深圳市中明科技股份有限公司 | Wireless transmission electrostatic field detection device and wireless power supply system |
-
2022
- 2022-01-14 CN CN202210041359.8A patent/CN114545103A/en active Pending
-
2023
- 2023-01-06 WO PCT/CN2023/070843 patent/WO2023134555A1/en unknown
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102353855A (en) * | 2011-09-28 | 2012-02-15 | 上海安平静电科技有限公司 | Portable electrostatic detection device and electrostatic detection method thereof |
| CN107329004A (en) * | 2016-12-02 | 2017-11-07 | 北京理工大学 | A kind of contactless MEMS autoexcitations stilling the theatre electrical resistivity survey examining system and its detection method based on electrostatic induction principle |
| CN113640591A (en) * | 2021-09-07 | 2021-11-12 | 清华大学 | Differential type micro electric field sensing device based on piezoelectric film deformation |
Non-Patent Citations (1)
| Title |
|---|
| 雷虎成 等: "一种压电驱动互屏蔽电极MEMS电场传感器", 《微纳电子与智能制造》 * |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2023134555A1 (en) * | 2022-01-14 | 2023-07-20 | 深圳市中明科技股份有限公司 | Electrostatic field detection apparatus based on wireless transmission, and wireless power supply system |
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