CN114544685A - High-low temperature test auxiliary tool of nanometer probe station - Google Patents
High-low temperature test auxiliary tool of nanometer probe station Download PDFInfo
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- CN114544685A CN114544685A CN202210120015.6A CN202210120015A CN114544685A CN 114544685 A CN114544685 A CN 114544685A CN 202210120015 A CN202210120015 A CN 202210120015A CN 114544685 A CN114544685 A CN 114544685A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
- G01N23/225—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion
- G01N23/2251—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion using incident electron beams, e.g. scanning electron microscopy [SEM]
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Abstract
The invention provides a high and low temperature test auxiliary tool for a nano probe station, which is used for fixing a sample fixer on the nano probe station and comprises two clamping arms, two fixed semi-rings and at least one locking ring, wherein one ends of the two clamping arms are mutually connected, the other ends of the two clamping arms are respectively connected with the two fixed semi-rings, the other ends of the two clamping arms can relatively move so as to enable the two fixed semi-rings to mutually approach and clamp the sample fixer from two sides of the sample fixer, at least one locking groove is correspondingly arranged on the two clamping arms, the locking ring is clamped into the corresponding locking grooves on the two clamping arms so as to fix the opening angle of the two clamping arms, and the sample fixer can be driven to rotate by rotating the two clamping arms. The sample fixer is clamped by operating the two clamping arms by hands, then the locking ring is fixed at an opening angle, the sample fixer is driven to rotate by rotating the clamping arms by hands, and the problem that the probe on the nano probe platform is easily touched by directly rotating the sample fixer by hands is solved.
Description
Technical Field
The invention relates to the technical field of semiconductor failure analysis, in particular to a high-low temperature test auxiliary tool for a nanometer probe station.
Background
A Nano probe station (Nano probe) is a Nano probe system integrated with a Scanning Electron Microscope (SEM), and can perform Nano failure analysis on devices in an integrated circuit chip, such as electrical characteristic parameter measurement, Nano open circuit and short circuit failure positioning, high and low temperature characteristic measurement, and the like. For the conventional test, the sample is only needed to be pasted on a common fixer, is fed into the detection chamber through the sample conveying rod, and then is tested. However, the high and low temperature test requires a special sample stage and a sample holder with threads to place the sample, and when the sample is placed, the sample stage is first lifted to a specific position, and then the sample holder is held by a hand to rotate for several circles, and then the threads are screwed to fix the sample holder on the sample stage. Referring to fig. 1, fig. 1 is a schematic structural diagram of a sample holder provided in the prior art, the sample holder includes a carrier 10 and a connecting rod 11, a sample to be measured is disposed on an upper surface of the carrier 10, one end of the connecting rod 11 is connected to a lower surface of the carrier 10, and the other end of the connecting rod is provided with an external thread and is in threaded connection with the nano probe stage through the external thread. It can be understood that a threaded hole is provided at a set position on the nano-probe stage, and the sample holder is fixed on the nano-probe stage by screwing the connection rod 11 into the threaded hole.
However, in actual operation, it is found that there is a great risk in the fixing process after the sample holder is held by hand to rotate for several circles, and hands easily touch expensive probes, so that the needle point is damaged, the working efficiency is affected, and the testing cost is increased.
Disclosure of Invention
The invention aims to provide a high-low temperature test auxiliary tool for a nano probe station, which can effectively solve the problem that a probe on the nano probe station is easily touched in the process of directly rotating a sample fixer by hands.
In order to achieve the above object, the present invention provides an auxiliary tool for high and low temperature tests of a nano probe station, which is used for fixing a sample holder on the nano probe station, and includes two holding arms, two fixed half rings and at least one locking ring, wherein one ends of the two holding arms are connected to each other, the other ends of the two holding arms are respectively connected to the two fixed half rings, the other ends of the two holding arms can move relatively to make the two fixed half rings approach each other and clamp the sample holder from two sides of the sample holder, at least one locking groove is correspondingly formed on the two holding arms, the locking ring is clamped into the corresponding locking groove on the two holding arms to fix the opening angle of the two holding arms, and the sample holder can be driven to rotate by rotating the two holding arms.
Optionally, the clamping arm is detachably connected to the stationary half ring, the plurality of locking grooves are formed, and the plurality of locking grooves are distributed at equal intervals along the axial direction of the clamping arm.
Optionally, the locking groove is a concave groove.
Optionally, uneven lines are carved on the outer wall of one end, close to the fixed half ring, of the clamping arm.
Optionally, the inner walls of the two stationary half rings are correspondingly provided with arc-shaped grooves for clamping the sample holder.
Optionally, the stationary half ring includes a semi-annular clamping portion and a connecting portion, the radius of the clamping portion is greater than the radius of the connecting portion so that the clamping portion is recessed inwards relative to the connecting portion to form the arc-shaped groove, and the inner wall of the clamping portion contacts with the outer wall of the sample holder.
Optionally, an elastic layer is arranged on the inner wall of the arc-shaped groove.
Optionally, the elastic layer is rubber.
Optionally, the clamping arm, the fixed half ring and the locking ring are all made of metal.
Optionally, the clamping arm, the fixed half ring and the locking ring are all made of stainless steel.
The invention provides a high-temperature and low-temperature test auxiliary tool for a nano probe table, which is used for fixing a sample fixer on the nano probe table, controlling two clamping arms to move relatively by hands to clamp the sample fixer, clamping a locking ring into corresponding locking grooves on the two clamping arms to fix the opening angle of the two clamping arms, not only clamping the sample fixer, but also facilitating the hands to directly rotate the clamping arms to drive the sample fixer to rotate, and because the clamping arms have certain length, the problem that a probe on the nano probe table is easily touched in the process of directly rotating the sample fixer by hands is avoided, so that the probe is prevented from being damaged, the test cost is saved, the probe changing time caused by the damage of the probe is reduced, and the working efficiency is improved.
Drawings
It will be appreciated by those skilled in the art that the drawings are provided for a better understanding of the invention and do not constitute any limitation to the scope of the invention. Wherein:
FIG. 1 is a schematic diagram of a sample holder according to the prior art;
FIG. 2 is a schematic structural diagram of a nano probe station high/low temperature test auxiliary tool according to an embodiment of the present invention;
FIG. 3 is a schematic diagram of a stationary half ring according to an embodiment of the present invention;
FIG. 4 is a schematic structural diagram of an elastic layer according to an embodiment of the present invention;
wherein the reference numerals are:
1-a sample holder; 2-a clamping arm; 3-fixing the half ring; 4-locking ring; 5-texture; 6-arc groove; 7-an elastic layer;
10-a carrier table; 11-a connecting rod; 30-a clamping portion; 31-a connecting part.
Detailed Description
To further clarify the objects, advantages and features of the present invention, a more particular description of the invention will be rendered by reference to specific embodiments thereof which are illustrated in the appended drawings. It is to be noted that the drawings are in greatly simplified form and are not to scale, but are merely intended to facilitate and clarify the explanation of the embodiments of the present invention. Further, the structures illustrated in the drawings are often part of actual structures. In particular, the drawings may have different emphasis points and may sometimes be scaled differently.
As used in this application, the singular forms "a", "an" and "the" include plural referents unless the content clearly dictates otherwise. As used in this disclosure, the term "or" is generally employed in its sense including "and/or" unless the content clearly dictates otherwise. As used in this disclosure, the term "plurality" is generally employed in its sense including "at least one" unless the content clearly dictates otherwise. As used in this disclosure, the term "at least two" is generally employed in a sense including "two or more" unless the content clearly dictates otherwise. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or to implicitly indicate the number of technical features indicated. Thus, features defined as "first", "second", "third" may explicitly or implicitly include one or at least two of the features.
As shown in fig. 2, fig. 2 is a schematic structural diagram of an auxiliary tool for high and low temperature testing of a nano probe station according to an embodiment of the present invention, which is used to fix a sample holder 1 on a nano probe station, and includes two clamping arms 2, two fixed half rings 3, and at least one locking ring 4, wherein one ends of the two clamping arms 2 are connected to each other, the other ends of the two clamping arms 2 are respectively connected to the two fixed half rings 3, the other ends of the two clamping arms 2 can move relative to each other to enable the two fixed half rings 3 to approach each other and clamp the sample holder 1 from two sides of the sample holder 1, at least one locking groove is correspondingly disposed on the two clamping arms 2, and the locking ring 4 is snapped into the corresponding locking groove on the two clamping arms 2 to fix an opening angle of the two clamping arms 2, rotating the two gripping arms 2 can rotate the sample holder 1.
Through with two with the hand manipulation 2 relative motion of centre gripping arm is in order to press from both sides tightly sample fixer 1, then will locking ring 4 card is gone into two in the locking groove that corresponds on the centre gripping arm 2 with fixed two the angle of opening of centre gripping arm 2 not only can with sample fixer 1 presss from both sides tightly, still is convenient for the staff direct rotation the centre gripping arm 2 drives sample fixer 1 is rotatory, because centre gripping arm 2 has certain length, has avoided touching the problem of the probe on the nanometer probe bench easily with the in-process of directly rotating sample fixer 1 with the hand to avoid causing the damage to the probe, practice thrift the test cost, and reduce the needle changing time that produces because of the probe damage, improve work efficiency.
Specifically, in this embodiment, the sample to be tested is, for example, a wafer, a chip, or other devices to be tested, which is not limited in this application. The embodiment provides nanometer probe station high low temperature test appurtenance mainly used figure 1 is shown special sample holder 1's supplementary installation, sample holder 1 includes plummer 10 and connecting rod 11, the sample that awaits measuring with plummer 10's fixed mode is sticky to avoid causing the damage to the surface of the sample that awaits measuring, and sticky mode takes off the sample that awaits measuring easily. The adhesive includes, but is not limited to, silver glue.
With reference to fig. 2, at least one locking groove is correspondingly formed in the two clamping arms 2, the locking ring 4 is clamped into the corresponding locking groove in the two clamping arms 2 to fix the opening angle of the two clamping arms 2, and the locking groove is mainly used for fixing the opening angle of the two clamping arms 2, so that the clamping arms 2 can be directly rotated by hands subsequently without applying an additional clamping force to the two clamping arms 2, thereby simplifying the operation and preventing the sample holder 1 from falling down in the rotation process.
Preferably, the clamping arm 2 is detachably connected to the stationary half ring 3, the plurality of locking grooves are formed, and the plurality of locking grooves are distributed at equal intervals along the axial direction of the clamping arm 2. The clamping arms 2 are detachably connected with the fixed semi-rings 3, so that the fixed semi-rings 3 with proper sizes can be selected according to the sample holders 1 with different sizes, and the plurality of locking rings 4 can push the locking rings 4 at proper positions into the corresponding locking grooves according to the opening angles of the two clamping arms 2, so that the nano probe station is suitable for the sample holders 1 with different sizes, and the universality of the auxiliary tool for high and low temperature tests of the nano probe station is improved. Therefore, the number and the distribution mode of the locking grooves are not limited in the application and can be adjusted according to actual requirements. In this embodiment, the two clamping arms 2 are correspondingly provided with one locking groove, the position of the locking groove is set according to the size of the sample holder 1, and when the two clamping arms 2 clamp the sample holder 1, the locking ring 4 is pushed into the locking groove to just fix the opening angle of the two clamping arms 2. In this embodiment, the locking groove is a concave groove. It will be appreciated that the depth of the recess is not too great to facilitate release of the sample holder 1 after it has been mounted, nor too small, or the locking ring 4 is easily loosened by the tension of the two clamping arms 2 to provide a locking hold. The depth of the concave groove needs to be designed, so that the function of fixing the opening angles of the two clamping arms 2 can be met, and the clamping arms can slide out of the locking groove under the action of applying a certain force.
Preferably, uneven lines 5 are carved on the outer wall of one end of the clamping arm 2 close to the fixed half ring 3. Uneven lines 5 are carved on the clamping arm 2 to increase friction force when a hand grips, and the hand is prevented from slipping in the process of rotating the clamping arm 2.
In this embodiment, the other ends of the two clamping arms 2 can move relatively to make the two stationary half rings 3 approach each other and form a whole ring, the inner wall of the whole ring contacts with the sample holder 1 and clamps the sample holder 1, and the two clamping arms 2 are rotated to drive the sample holder 1 to rotate. Because the centre gripping arm 2 has certain length, through with two with the hand manipulation centre gripping arm 2 not only can with sample fixer 1 presss from both sides tightly, can also be through rotatory centre gripping arm 2 drives sample fixer 1 is rotatory, has avoided touching the problem of the probe on the nanometer probe bench easily with the in-process of directly rotating sample fixer 1 with the hand to avoid causing the damage to the probe.
During specific operation, a sample can be fixed on the sample fixer 1, then the other ends of the two clamping arms 2 move relatively by hands of a detector to clamp the sample fixer 1, then the locking ring 4 is pushed into the locking groove, and then the clamping arms 2 are rotated by hands to drive the sample fixer 1 to rotate, so that the sample fixer 1 is fixed on the nano probe table.
In this embodiment, the clamping arm 2 and the stationary half ring 3 may be integrally formed, or may be formed by welding, screwing, or other connection methods, which is not limited in this application.
Referring to fig. 3, fig. 3 is a schematic structural diagram of the stationary half rings according to an embodiment of the present invention, wherein the inner walls of the two stationary half rings 3 are correspondingly provided with arc-shaped grooves 6 for clamping the sample holder 1, when the two stationary half rings 3 form a whole ring, the arc-shaped grooves 6 on the two stationary half rings 3 form an annular groove, and the bearing platform 10 is just inserted into the annular groove. By providing an arc-shaped groove 6 to facilitate better fixation of the sample holder 1, the sample holder 1 is prevented from falling off or falling off during rotation.
Preferably, the stationary half ring 3 includes a semi-annular clamping portion 30 and a connecting portion 31, the radius of the clamping portion 30 is greater than the radius of the connecting portion 31 so that the clamping portion 30 is recessed inwards relative to the connecting portion 31 to form the arc-shaped groove 6, and the inner wall of the clamping portion 30 contacts with the outer wall of the sample holder 1. That is to say, the clamping portion 30 and the connecting portion 31 form a stepped limiting structure, which not only can axially limit the sample holder 1, prevent the sample holder 1 from being installed and dislocated, and ensure that the sample holder 1 does not move during the screwing process, but also can prevent the lower half portion of the stationary half ring 3 from being too long and affecting the screwing of the sample holder 1. Of course, the inner wall of the stationary half rings 3 may not be provided with the arc-shaped groove 6, as long as the size of the whole ring enclosed by the two stationary half rings 3 matches with the size of the plummer 10.
Referring to fig. 4, fig. 4 is a schematic structural view of an elastic layer according to an embodiment of the present invention, and an elastic layer 7 is disposed on inner walls of the two arc-shaped grooves 6. Because the elastic layer 7 has the characteristic of reversible deformation, the elastic layer can generate larger deformation under the action of small external force, and can recover the original shape after the external force is removed. When two the other end relative motion of centre gripping arm 2, arc recess 6 passes through elastic layer 7 with the lateral wall contact of plummer 10 makes plummer 10 with elastic layer 7 extrudees each other under the effect of external force, can not only fix better sample fixer 1, can also play certain cushioning effect simultaneously, avoids causing the damage to the contact surface of sample fixer 1.
In this embodiment, the elastic layer 7 is rubber. The rubber has good wear resistance and high elasticity, can be recycled and has long service life.
Optionally, the clamping arm 2, the fixed half ring 3, and the locking ring 4 are made of metal. The clamping arm 2, the fixed semi-ring 3 and the locking ring 4 which are made of metal materials have higher strength and hardness, and can be used for a long time.
In this embodiment, the clamping arm 2, the stationary half ring 3, and the locking ring 4 are all made of austenitic stainless steel. The austenitic stainless steel has no magnetism, good oxidation resistance and strong corrosion resistance, can avoid influencing the nano probe in the using process, has longer service life and is a better choice. Of course, other metal materials, such as aluminum, can be used for the clamping arm 2 and the stationary half ring 3, which is not limited in this application.
In summary, the embodiment of the invention provides an auxiliary tool for high and low temperature tests of a nano probe station, which is used for fixing a sample holder on the nano probe station, clamping the sample holder through the relative motion of two clamping arms, and clamping the sample holder into corresponding locking grooves on the two clamping arms through locking rings to fix the opening angle of the two clamping arms, so that the sample holder can be clamped and fixed, and meanwhile, the clamping arms can be directly rotated by hands to drive the sample holder to rotate.
The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention in any way. It will be understood by those skilled in the art that various changes, substitutions and alterations can be made herein without departing from the spirit and scope of the invention as defined by the appended claims.
Claims (10)
1. The utility model provides a nanometer probe station high low temperature test appurtenance for fix a sample fixer on nanometer probe station, its characterized in that, includes two centre gripping arms, two fixed semi-rings and at least one locking ring, two the one end interconnect of centre gripping arm, two the other end of centre gripping arm respectively with two the fixed semi-ring is connected, two the other end of centre gripping arm can relative motion so that two fixed semi-rings are close to each other and follow the both sides of sample fixer are pressed from both sides tightly sample fixer, two correspond on the centre gripping arm and be provided with at least one locking groove, the locking ring card is gone into two in the locking groove that corresponds on the centre gripping arm with fixed two the angle that opens of centre gripping arm, rotatory two the centre gripping arm can drive the sample fixer is rotatory.
2. The tool as claimed in claim 1, wherein the clamping arm is detachably connected to the stationary half ring, and the plurality of locking grooves are equally spaced along an axial direction of the clamping arm.
3. The nano-probe station high-low temperature test auxiliary tool according to claim 1 or 2, wherein the locking groove is a concave groove.
4. The tool as claimed in claim 1, wherein the clamping arm has an uneven pattern formed on an outer wall thereof near one end of the stationary half ring.
5. The tool as claimed in claim 1, wherein the two half stationary rings have arc grooves on their inner walls for clamping the sample holder.
6. The tool of claim 5, wherein the half stationary ring comprises a semi-annular clamping portion and a connecting portion, the radius of the clamping portion is greater than that of the connecting portion so that the clamping portion is recessed inwards relative to the connecting portion to form the arc-shaped groove, and the inner wall of the clamping portion contacts with the outer wall of the sample holder.
7. The tool as claimed in claim 5 or 6, wherein an elastic layer is disposed on an inner wall of the arc groove.
8. The tool of claim 7, wherein the elastic layer is rubber.
9. The tool of claim 1, wherein the clamping arm, the half stationary ring and the locking ring are made of metal.
10. The tool of claim 9, wherein the clamping arm, the semi-fixed ring and the locking ring are made of stainless steel.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210120015.6A CN114544685A (en) | 2022-01-27 | 2022-01-27 | High-low temperature test auxiliary tool of nanometer probe station |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210120015.6A CN114544685A (en) | 2022-01-27 | 2022-01-27 | High-low temperature test auxiliary tool of nanometer probe station |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN114544685A true CN114544685A (en) | 2022-05-27 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202210120015.6A Pending CN114544685A (en) | 2022-01-27 | 2022-01-27 | High-low temperature test auxiliary tool of nanometer probe station |
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| CN (1) | CN114544685A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP4318543A1 (en) * | 2022-08-02 | 2024-02-07 | Leica Mikrosysteme GmbH | Sample holder for holding a sample carrier, handling tool and corresponding methods |
-
2022
- 2022-01-27 CN CN202210120015.6A patent/CN114544685A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP4318543A1 (en) * | 2022-08-02 | 2024-02-07 | Leica Mikrosysteme GmbH | Sample holder for holding a sample carrier, handling tool and corresponding methods |
| WO2024028223A1 (en) * | 2022-08-02 | 2024-02-08 | Leica Mikrosysteme Gmbh | Sample holder for holding a sample carrier, handling tool and corresponding methods |
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