CN114523216A - Laser cutting equipment convenient to laser focus is adjusted - Google Patents
Laser cutting equipment convenient to laser focus is adjusted Download PDFInfo
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- CN114523216A CN114523216A CN202210253491.5A CN202210253491A CN114523216A CN 114523216 A CN114523216 A CN 114523216A CN 202210253491 A CN202210253491 A CN 202210253491A CN 114523216 A CN114523216 A CN 114523216A
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- 238000003698 laser cutting Methods 0.000 title claims abstract description 18
- 238000005520 cutting process Methods 0.000 claims abstract description 50
- 238000003384 imaging method Methods 0.000 claims abstract description 7
- 230000003287 optical effect Effects 0.000 claims description 44
- 238000005286 illumination Methods 0.000 claims description 15
- 238000009434 installation Methods 0.000 claims 1
- 230000010287 polarization Effects 0.000 description 9
- 230000007246 mechanism Effects 0.000 description 7
- 230000000694 effects Effects 0.000 description 5
- 230000008859 change Effects 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 239000011521 glass Substances 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 230000033228 biological regulation Effects 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 2
- 238000004364 calculation method Methods 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 230000009471 action Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
- 230000002452 interceptive effect Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000013001 point bending Methods 0.000 description 1
- 238000002310 reflectometry Methods 0.000 description 1
- 238000007493 shaping process Methods 0.000 description 1
- 230000001360 synchronised effect Effects 0.000 description 1
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
- B23K26/38—Removing material by boring or cutting
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/70—Auxiliary operations or equipment
- B23K26/702—Auxiliary equipment
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P40/00—Technologies relating to the processing of minerals
- Y02P40/50—Glass production, e.g. reusing waste heat during processing or shaping
- Y02P40/57—Improving the yield, e-g- reduction of reject rates
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Abstract
The invention discloses laser cutting equipment convenient for laser focus adjustment, which comprises a rack, wherein the rack is provided with a mounting seat, a fixed seat and a light emitting device for emitting laser, the mounting seat is provided with a bearing seat and a vertical moving assembly, and the bearing seat is provided with a focusing head and a coaxial focus light source for emitting light beams; the focusing head is used for receiving laser emitted by the light emitting device and emitting the laser to realize cutting, or receiving light beams emitted by the coaxial focus light source and emitting the light beams to perform imaging; the vertical moving assembly acts on the bearing seat and is used for driving the bearing seat to move along the vertical direction; the fixing seat and the mounting seat are relatively fixed, and a third reflector group used for refracting laser emitted by the light emitting device so that the laser can be always emitted into the focusing head is arranged on the fixing seat. The equipment does not need to drive the light emitting device to lift, and laser emitted by the light emitting device can also be emitted into the focusing head all the time.
Description
The application is "application No. CN 2022100306045; the application name is a laser cutting method for an optical filter; the application date is: 12/1/2022; the applicant is: subdivision application of the patent application of Zhejiang Shengshi laser science and technology, Inc.
Technical Field
The invention relates to the technical field of laser cutting, in particular to laser cutting equipment convenient for laser focus adjustment.
Background
The most key technology for processing the ultrathin and ultra-brittle coated glass is a laser scribing technology, and in recent years, due to the gradual hardening of industrial competition, the requirements on the efficiency and the precision of scribing equipment are higher and higher, the requirements on microcracks of the ultrathin and ultra-brittle coated glass are changed from uncontrolled mode to the mode that the current stable mass production is less than or equal to 10um, the SD layer difference is less than 30um, the stress is more than 150MPA, the strain is more than 3000u, and the strain difference is less than 30%.
When cutting the optical filter with laser, a focal point of the laser is usually focused on an upper surface (i.e., a cut surface) of the optical filter and the optical filter is cut along a predetermined cutting path. Before cutting, the focusing head used for focusing the laser needs to be adjusted in the vertical direction, so that the focus of the laser emitted by the focusing head can be gathered on the cutting surface of the optical filter, and when the focusing head is adjusted in the vertical direction, the height of the light emitting device for emitting the laser also needs to be increased or decreased in order to ensure that the laser can be always incident into the focusing head by the light emitting device for emitting the laser. However, since the power of the emitted laser light needs to be adjusted when different filters are cut, the light emitting device includes not only the light source but also the light beam adjusting assembly, which results in a relatively large volume and a relatively heavy weight of the light emitting device.
If going up and down through two drive assembly independent drive respectively with light source subassembly and focus head, just being difficult to guarantee that light source subassembly and focus head go up and down in step, the laser of light-emitting device outgoing will probably can't be incided to in the focus head.
If the light source assembly and the focusing head are fixed on the same bearing seat and driven to lift through the driving assembly. The light source assembly and the focusing head are fixed on the same bearing seat, the weight of the light source assembly and the focusing head is too heavy, the requirement on the driving assembly is relatively high, the cost consumed by the driving assembly is relatively high, the size of the light source assembly and the focusing head fixed on the same bearing seat is relatively large, and the light source assembly and the focusing head are extremely easy to interfere with other components in the lifting process.
Disclosure of Invention
The invention overcomes the defects in the prior art and provides laser cutting equipment convenient for adjusting the laser focus, wherein a fixed seat is arranged on a frame, a third reflector group is arranged on the fixed seat, and the laser emitted by a light emitting device fixedly arranged on the frame is reflected by the third reflector group, so that the laser emitted by the light emitting device can be always incident into a focusing head which can vertically lift on the frame without driving the light emitting device head to lift.
The technical scheme of the invention is realized as follows:
a laser cutting device convenient for laser focus adjustment comprises a rack, wherein the rack is provided with a mounting seat, a fixed seat and a light emitting device for emitting laser, the mounting seat is provided with a bearing seat and a vertical moving assembly, and the bearing seat is provided with a focusing head and a coaxial focus light source for emitting light beams; the focusing head is used for receiving laser emitted by the light emitting device and emitting the laser to realize cutting, or receiving light beams emitted by the coaxial focus light source and emitting the light beams for imaging; the vertical moving assembly acts on the bearing seat and is used for driving the bearing seat to move along the vertical direction; the fixing seat and the mounting seat are relatively fixed, and a third reflector group used for refracting laser emitted by the light emitting device to enable the laser to be emitted into the focusing head all the time is arranged on the fixing seat.
In a further scheme, a coaxial illumination observation device for observing whether a light beam emitted by the coaxial focus light source forms a clear image after being received and emitted by the focusing head is arranged on the bearing seat, and the coaxial illumination observation device is positioned above the focusing head.
The imaging of the light beam emitted by the coaxial focus light source is convenient to observe, so that whether the laser emitted by the subsequent light emitting device can fall on the cutting surface of the optical filter after being focused by the focusing head is convenient to judge.
In a further scheme, the coaxial focus light source is located on one side of the coaxial illumination observation device, which is far away from the light emitting device, and the bearing seat is further provided with a fourth reflector group which is used for refracting the emergent light beam of the coaxial focus light source so that the light beam can be emitted into the focusing head all the time.
Because the coaxial illumination observation device is positioned above the focusing head, the coaxial focus light source needs to avoid the coaxial illumination observation device, and the coaxial focus light source is positioned on one side of the coaxial illumination observation device, which is far away from the light-emitting device, so that the coaxial illumination observation device can not interfere with the light-emitting device.
In a further aspect, the third mirror group is located between the coaxial illumination observation device and the focusing head in the vertical direction.
And the coaxial illumination observation device and the focusing head are prevented from interfering with the third reflector group in the lifting process.
In a further scheme, the third reflector group comprises a plurality of third reflectors, the third reflectors are arranged on the fixed seat and reflect laser emitted by the light emitting device one by one, and the last third reflector in the third reflector group is used for receiving the laser and reflecting the laser and is positioned above the focusing head, so that the reflected laser can be always incident into the focusing head along the vertical direction.
Because the last third reflector used for receiving the laser and reflecting the laser in the third reflector group is positioned above the focusing head, the reflected laser can always enter the focusing head along the vertical direction, and the focusing head moves along the vertical direction, so that the laser emitted by the light emitting device can always enter the focusing head.
In a further scheme, the vertical moving assembly comprises a vertical driving motor, a lead screw is connected to the vertical driving motor, the lead screw extends in the vertical direction, a nut is spirally matched to the lead screw, and the lead screw is fixedly connected with the bearing seat.
In a further scheme, the light-emitting device comprises a base, the base is mounted on the rack, the base is located beside the mounting seat, a laser light source, a cone lens, an iris diaphragm and a plano-convex lens are arranged on the base, and the iris diaphragm is located between the cone lens and the plano-convex lens; the laser light source is used for emitting a light beam, the cone lens is used for receiving the light beam emitted by the laser light source and adjusting the light beam into an annular light beam, the annular light beam is emitted, an optical hole in the iris diaphragm is opposite to the cone lens, and the iris diaphragm is used for receiving the annular light beam adjusted by the cone lens and changing the diameter of the annular light beam; the plano-convex lens is used for receiving the annular light beam adjusted by the iris diaphragm and enabling the light beam emitted by the plano-convex lens to pass through the focusing head for focusing.
When the optical filter is cut, the optical filter needs to be cut differently, or the user requirements are different, the light beam power needs to be adjusted to adjust the width of the modified layer of the cut optical filter, so that the optical filter is easy to understand and understand, light can be scattered, if the distance between the light emitting device and the focusing head is changed, although the light power can be changed, a group of driving components needs to be added, the cost is higher, and the light emitting device is located beside the mounting seat and is easy to interfere with the mounting seat. And because the light beam adjusting component comprises the iris diaphragm, the size of the diameter of the light beam of the annular light beam can be changed only by changing the size of the light hole on the iris diaphragm, so that the operation is convenient and quick. And the adjusting precision of the iris diaphragm aperture is relatively high. For example, although the beam diameter can be adjusted by an optical path element such as a beam expander, the adjustment can be performed only at a magnification of 1 time, 2 times, or 3 times. The iris diaphragm can be adjusted with a finer precision like 2.5 times. The obtained beam diameter is more in line with the subsequent cutting requirements, and the subsequent cutting effect is relatively better.
In a further aspect, the axicon, the iris and the plano-convex lens are all slidably disposed on the base, and each of the axicon, the iris and the plano-convex lens can move toward or away from the other two components.
Since the cone lens, the iris diaphragm and the plano-convex lens can be arranged on the base in a sliding mode, the light beam can be adjusted by moving the above elements. If the distance between the cone lens and the iris diaphragm is changed. It is easy to understand that the light is scattered, and the power of the adjusted light beam is larger if the distance between the cone lens and the iris diaphragm is closer. When the distance between the conical lens and the flat lens is changed, the width of the modified layer can be changed, and the cutting effect is improved.
The design starting point, the idea and the beneficial effects of the invention adopting the technical scheme are as follows:
1. because the light-emitting device is installed in the frame, when vertical removal subassembly drive bears the seat and removes in order to drive the focus head and go up and down, its weight is lighter, and is not high to the requirement of driving piece in the vertical removal subassembly, and the volume is also less relatively, otherwise causes the interference to other parts.
2. And because the fixing base with the mount pad keeps relatively fixed, be provided with on the fixing base and be used for refracting the laser that the light-emitting device is emergent to make laser can shoot into the third speculum group in the focus head all the time, even the light-emitting device is not following focus head synchronous motion, also can make laser shoot into in the focus head all the time.
3. Because the bearing seat is provided with the coaxial focus light source for emitting the light beam, the light beam emitted by the coaxial focus light source can be focused by the focusing head and then imaged, and whether the laser emitted by the subsequent light emitting device can fall on the cutting surface of the optical filter after being focused by the focusing head is convenient to observe. And because the coaxial focus light source and the focusing head are both positioned on the bearing seat, the light beam emitted by the coaxial focus light source can be ensured to be always incident into the focusing head. Meanwhile, the light emitting device and the third reflector group are not arranged on the bearing seat and cannot interfere with the coaxial focus light source.
Drawings
FIG. 1 is a schematic structural diagram of a light-emitting device;
FIG. 2 is a top view of a light extraction device;
FIG. 3 is a cross-sectional view A-A of FIG. 2;
FIG. 4 is a front view and a partial enlarged view of the cutting apparatus;
FIG. 5 is a schematic view of the cutting device;
FIG. 6 is a schematic view of the cutting apparatus;
fig. 7 is a partial schematic view of a cutting apparatus.
The figures are numbered: 1-a carrier, 2-a frame, 3-a base, 4-a focusing head, 5-a first reflector group, 6-a beam expander, 7-a second reflector group, 8-a power adjusting mechanism, 801-a glass slide component, 802-a polarization beam splitter prism, 9-a cone lens, 10-an iris diaphragm, 11-a plano-convex lens, 12-a loading seat, 13-a first sliding table, 14-a second sliding table, 15-a third sliding table, 16-a third reflector group, 17-a second movable seat, 18-a first movable seat, 19-a carrier, 20-a rotary driving component, 21-a mounting seat, 22-a fixed seat, 23-a loading seat, 24-a height indicator, 25-a coaxial focal light source, 26-a target lens, 27-a fourth reflector group, 28-coaxial observation device, 29-vertical driving motor, 30-guide rail, 31-diaphragm ruler.
Detailed Description
In order that the above objects, features and advantages of the present invention can be more clearly understood, a more particular description of the invention will be rendered by reference to the appended drawings. It should be noted that the embodiments and features of the embodiments of the present application may be combined with each other without conflict.
In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present invention, however, the present invention may be practiced in other ways than those specifically described herein, and therefore the scope of the present invention is not limited by the specific embodiments disclosed below.
The specific embodiment of the invention is as follows:
example (b): as shown in fig. 1 to 7, the present invention provides a laser cutting apparatus convenient for adjusting a laser focus, which includes a carrier 1, wherein a frame 2 is disposed on the carrier 1, and the frame 2 is provided with the light emitting device and a cutting device for cutting in cooperation with the light emitting device.
Referring to fig. 1 and 2, the light-emitting device includes a base 3, and the base 3 is provided with a laser source, a first reflector group 5, a beam expander 6, a second reflector group 7, a power adjusting mechanism 8, a cone lens 9, a light beam adjusting assembly, and a plano-convex lens 11.
The laser light source is used for reflecting a laser beam. The first mirror group 5 includes a plurality of first mirrors, and the light beams emitted from the laser beams are incident on the first mirrors in the first mirror group 5 and are sequentially reflected by the plurality of first mirrors, so that the light beams can be incident into the beam expander 6 in a collimated state. Since the number of the first reflectors and the positions and angles at which the first reflectors are disposed are different, the relative positional relationship among the laser source, the first reflector group 5 and the beam expander 6 changes, and the positional relationship is not the key point of the invention, so the positional relationship is not described, as long as the light beam reflected by the first reflector can be emitted into the beam expander 6 in a collimated state. The light beam incident on the beam expander 6 is collimated and expanded by the beam expander 6 to obtain parallel light. And the beam expander 6 is also used for primarily adjusting the diameter of the light beam, so that the diameter of the light beam is zoomed in and out in a multiplying power mode.
And the collimated light obtained by the beam expansion by the beam expander 6 is incident on the second mirror group 7. The second mirror group 7 includes a plurality of second mirrors that sequentially reflect the light beam so that the light beam can be incident into the power adjustment mechanism 8 in a collimated state.
The power adjusting mechanism 8 in this embodiment includes a slide assembly 801 and a polarization splitting prism 802. Slide assembly 801 includes a half-wave plate and a drive assembly. The half-wave plate is used for receiving the light beam emitted after being reflected by the second reflecting mirror group 7 and changing the polarization direction of the incident light beam. The polarization beam splitter prism 802 is located behind the half-wave plate along the exit direction of the light beam, and the polarization beam splitter prism 802 is used for receiving the light beam adjusted by the half-wave plate and filtering the light beam, thereby realizing the adjustment of the light beam power. As will be readily understood, in the power adjustment mechanism 8, the polarization direction of light is changed by the half-wave plate, and due to the characteristics of the polarization splitting prism 802, P-polarized light among light incident to the polarization splitting prism 802 is transmitted, while S-polarized light is reflected. The driving component acts on the half-wave plate and is used for driving the half-wave plate to deflect so as to change the transmission quantity of the P-polarized light, and therefore the power of the light beam is changed by matching with the polarization beam splitter prism 802. Specifically, the driving assembly is an electric module. More specifically, the electric module can be an electric rotating table, and the half-wave plate is mounted on the electric module and biases itself to change the transmission quantity of the P-polarized light through the action of the electric module, so as to adjust the power of the light beam.
The light beam adjusted by the power adjustment mechanism 8 enters the axicon lens 9. The above-mentioned axicon lens 9, the light beam adjusting assembly and the plano-convex lens 11 are arranged in order along the outgoing direction of the light beam emitted from the power adjusting mechanism 8. The light beam incident on the axicon lens 9 is adjusted into an annular light beam by the axicon lens 9 and then emitted. The annular light beam has higher focal depth and smaller divergence angle under the same light beam diameter, the three-point bending strength and stress difference after the optical filter is cut can be improved when the annular light beam is used for subsequent laser cutting, and the cross section extension lines can reach the state without microcracks.
The beam adjusting component can receive the annular beam adjusted by the cone lens 9 and change the beam diameter of the annular beam. Specifically, the light beam adjusting assembly comprises an iris diaphragm 10, and an aperture on the iris diaphragm 10 is opposite to the cone lens 9. The beam diameter of the annular beam can be changed by only changing the size of the aperture on the iris diaphragm 10, which is convenient and fast. And the aperture adjustment precision of the iris diaphragm 10 is relatively high. For example, the beam diameter can be adjusted by an optical path element such as the beam expander 6, but the adjustment can be performed only at a magnification of 1 time, 2 times, or 3 times. The iris diaphragm 10 can be adjusted with a finer precision like 2.5 times. The obtained beam diameter is more in line with the subsequent cutting requirements, and the subsequent cutting effect is relatively better. Since the depth of focus of the cutting beam is in direct proportion to the diameter of the laser beam incident on the beam shaping element. This iris diaphragm 10 cooperates above-mentioned beam expander 6 to constitute the secondary regulation of beam diameter, and in the regulation through beam expander 6, fine setting is carried out to rethread iris diaphragm 10 for beam diameter accords with the cutting demand more.
The plano-convex lens 11 receives the ring-shaped light beam adjusted by the light beam adjusting assembly and makes the light beam emitted through the plano-convex lens 11 focused. The cutting device comprises a focusing head 4, and laser emission power of the focusing head 4 is opposite to the lower carrying platform 1. The light beam emitted from the plano-convex lens 11 enters the focusing head 4 to be focused and cuts the optical filter on the stage 1. And the light beam emitted from the plano-convex lens 11 can be incident into the focusing head 4. The cutting device further comprises a third reflector group 16, the third reflector group 16 comprises a plurality of third reflectors, and the light beams emitted from the plano-convex lens 11 enter the third reflector group 16, are reflected one by the plurality of third reflectors and finally enter the focusing head 4.
In the present embodiment, the axicon lens 9, the variable diaphragm 10 and the plano-convex lens 11 can be slidably disposed on the base 3, and each of the axicon lens 9, the variable diaphragm 10 and the plano-convex lens 11 can move closer to or away from the other two components.
As a specific implementation manner, as shown in fig. 3, in this scheme, a loading seat 12 is disposed on a base 3, a first sliding table 13, a second sliding table 14, and a third sliding table 15 are sequentially disposed on the loading seat 12 along a length direction thereof, and the first sliding table 13, the second sliding table 14, and the third sliding table 15 can all slide along the length direction of the loading seat 12 and stay at a specified position. And the axicon lens 9 is mounted on a first sliding table 13, the iris 10 is mounted on a second sliding table 14, and the plano-convex lens 11 is mounted on a third sliding table 15. In order to enable the first sliding table 13, the second sliding table 14 and the third sliding table 15 to slide along the length direction of the loading base 12 and stay at a specified position, jackscrews are mounted on the first sliding table 13, the second sliding table 14 and the third sliding table 15.
In the scheme, the cone lens 9, the iris diaphragm 10 and the plano-convex lens 11 can be arranged on the base 3 in a sliding manner, so that the light beams can be adjusted by moving the elements. When the axicon lens 9 or the iris diaphragm 10 is moved, the distance between the axicon lens 9 and the iris diaphragm 10 is changed. It is easy to understand that the light is dispersed, and the closer the cone lens 9 is to the variable diaphragm 10, the less the light is dispersed, and the larger the power of the adjusted light beam. When the distance between the axicon 9 and the plano-convex lens is changed by moving the axicon 9 or the plano-convex lens 11, the width of the modified layer after cutting can be changed, so that the cutting effect is improved.
As shown in fig. 6, the cutting apparatus further comprises a second mobile station 17 and a first mobile station 18. Wherein the second movable base 17 is arranged on the carrier 1 and can move along the longitudinal direction, the first movable base 18 is arranged on the second movable base 17 and can move along the transverse direction, and the first movable base 18 is provided with a carrier 19 for fixing the optical filter. And the first movable seat 18 is further provided with a rotary driving assembly 20, and the rotary driving assembly 20 acts on the carrier 19 for driving the carrier 19 to rotate around the center thereof. Specifically, the second movable base 17 and the first movable base 18 are linear motor modules. The rotary driving assembly 20 includes a rotary driving motor and a rotary driving platform, the carrier 19 is mounted on the rotary driving platform, and the rotary driving motor is connected with the rotary driving platform to drive the carrier 19 to rotate around its center.
As shown in fig. 4 and 5, the frame 2 is further provided with a mounting seat 21, and the mounting seat 21 is provided with a fixing seat 22 and a bearing seat 23. The focusing head 4 is mounted on a carrier 23, and the third mirror group 16 is mounted on the fixed base 22. The fixed seat 22 and the mounting seat 21 are both fixed relative to the frame 2, so that the positional relationship between the third mirror group 16 on the fixed seat 22 and the mirror group on the base 3 is always fixed. And the bearing seat 23 is also provided with a height indicator 24 and a focus observation assembly. The focus observation assembly comprises a coaxial focus light source 25, the coaxial focus light source 25 and the focus observation assembly are positioned on one side of the focusing head 4, and the light emitting device is positioned on the opposite side of the focusing head 4. The focus observation assembly further includes a target lens 26 and a fourth mirror group 27, the target lens 26 is installed below the coaxial focus light source 25, and the fourth mirror group 27 is installed on the bearing seat 23 and is used for receiving the light beam emitted from the coaxial focus light source 25 and passing through the target lens 26, and refracting the light beam for multiple times, so that the light beam can be incident to the focusing head 4, and fall on the optical filter for imaging after being focused by the focusing head 4.
The cutting apparatus also includes a coaxial viewing device 28. Specifically, the coaxial observation device 28 is a coaxial illumination observation device, and the specific model adopted by the coaxial illumination observation device in the embodiment is OUCI-F100-XY. A coaxial viewing device 28 is mounted on the carrier 23 above the focusing head 4.
In addition, a vertical moving assembly is further disposed on the fixing base 22, and acts on the bearing seat 23 to drive the bearing seat 23 to move along a vertical direction (i.e., a Z-axis direction). Specifically, as shown in fig. 7, the vertical moving assembly includes a vertical driving motor 29, a lead screw is connected to the vertical driving motor 29, the lead screw extends in the vertical direction, a nut is screwed onto the lead screw, and the nut is fixedly connected to the bearing seat 23. And the side of the lead screw on the fixed seat 22 is also provided with a guide rail 30, the guide rail 30 extends along the length direction of the lead screw, and a sliding block is slidably arranged on the guide rail 30 and is fixedly connected with the bearing seat 23. Bear the seat 23 simultaneously and still be equipped with the sensor that is used for detecting focus head 4 height on the Z axle, this sensor is diaphragm chi 31 in this scheme.
When the optical filter is to be cut, the carrier 19 is first pasted with the UV film, and the optical filter to be cut is pasted on the UV film to avoid the damage of the carrier 19. The carrier 19 is then moved to the position to be cut under the focusing head 4 by the second movable base 17 and the first movable base 18. And then dividing a transverse cutting path on the filter according to the actual circle edge path. The focusing head 4 and the altimeter 24 are both located on the transverse cutting path. Then, the relative position of the focusing head 4 above the stage 1 and the optical filter is adjusted, so that the laser emitted by the focusing head 4 can be focused on the upper surface of the optical filter.
Specifically, at this time, the light beam is emitted from the coaxial focus light source 25, passes through the target lens 26, is reflected by the fourth mirror group 27, is incident on the focusing head 4, is focused by the focusing head 4, and falls on the optical filter for imaging. The on-axis viewing device 28 is then used to observe whether the image on the filter is clear. If the imaging is sharp, no adjustment is required. If the image is not clear, the vertical driving assembly drives the bearing seat 23 to move on the Z axis, so that the coaxial observation device 28 can observe the image on the filter clearly. And then, the reading of the height indicator 24 beside the focusing head 4 is cleared according to the Z-axis value of the focus position at the moment.
Then, the carrier 19 is transversely moved through the first moving seat 18, so that the focus of the light beam emitted by the focusing head 4 falls on the part, which is not covered with the optical filter, of the UV film, and the height of the height measuring instrument 24 is measured to obtain an actual sheet thickness error; and the carrier 19 is moved transversely along the transverse cutting path, the height gauge 24 continuously measures the actual sheet thickness error and obtains a transverse thickness compensation curve according to the actual sheet thickness error. It should be noted that, here, the specific way in which the altimeter 24 continuously measures the actual sheet thickness error and obtains the lateral thickness compensation curve according to the actual sheet thickness error is as follows: (a + B) ÷ 2 ÷ C = D, wherein a is a sheet thickness difference value obtained by adding an on-film focus measurement error value and a zero point error value to a value measured by the height gauge 24 when the focal point of the light beam emitted from the focusing head 4 falls on a portion of the UV film not covered with the optical filter; b is the value measured by the height gauge 24, C is the refractive index of the optical filter, and D is the actual sheet thickness error. Since the height gauge 24 continuously measures the actual sheet thickness error, which is the actual sheet thickness error at a certain point on the optical filter, a lateral thickness compensation curve can be formed because a large number of actual sheet thickness errors at a certain point are obtained by measurement.
Since the reading of the height indicator 24 beside the focusing head 4 is cleared in S2, the focus of the light beam emitted from the focusing head 4 falls on the part of the UV film not covered by the filter, and the height of the height indicator 24 is measured to obtain a value B. However, it is easy to understand that the heights of the positions of the stage 1 are different, and when the filter thickness is measured, the height difference of each position of the stage 1 is calculated by adding the height difference of each position of the stage 1, which is a fixed value, and a value can be measured before the filter thickness is calculated. Similarly, the focal positions of the UV film and the filter are different, and the difference is a fixed value, which needs to be introduced for calculation when measuring the thickness of the filter. Meanwhile, the optical filter has a certain reflectivity C, the value C is also a fixed value, and the value C needs to be added for calculation when the thickness of the optical filter is measured, so that the accuracy of the actual thickness error of the optical filter is ensured, the cutting depth on a cutting path can be ensured to be consistent with the corresponding thickness of the optical filter, and the cutting effect is improved.
And then, controlling the optical box beside the focusing head 4 to emit laser, focusing the laser through the focusing head 4 to fall on the upper surface of the optical filter or to fall to a set cutting depth, and moving the carrier 19 along a transverse cutting path to start cutting. And the vertical moving component acting on the focusing head 4 in the cutting process drives the focusing head 4 to move along the thickness direction of the optical filter according to the transverse thickness compensation curve to perform height compensation, so that the laser focus emitted by the focusing head 4 always falls on the upper surface of the optical filter or is focused to a set cutting depth until the transverse cutting on the optical filter is completed.
Since the filter needs to be cut into a cross shape. The carrier 19 is now rotated by the rotational drive assembly 20, rotating the carrier 19 by 90 °. And dividing a longitudinal cutting path on the optical filter. Since the carrier 19 is rotated by 90 °, the longitudinal cutting path at this point is in fact coincident with the longitudinal cutting path described above. And then, the steps are repeated to measure a longitudinal thickness compensation curve, and the optical box beside the focusing head 4 is controlled to emit laser, and the laser is focused by the focusing head 4 to fall on the upper surface of the optical filter or is focused to a set cutting depth, and the carrier 19 is moved along a longitudinal cutting path to start cutting. And the vertical moving component acting on the focusing head 4 in the cutting process drives the focusing head 4 to move along the thickness direction of the optical filter according to the longitudinal thickness compensation curve to perform height compensation, so that the laser focus emitted by the focusing head 4 always falls on the upper surface of the optical filter or is focused to a set cutting depth until the longitudinal cutting on the optical filter is completed. And finally, cutting the optical filter.
The present invention and its embodiments have been described above schematically, and the description is not intended to be limiting, and what is shown in the drawings is only one of the embodiments of the present invention, and the actual structure is not limited thereto. Therefore, if the person skilled in the art receives the teaching, without departing from the spirit of the invention, the person skilled in the art shall not inventively design the similar structural modes and embodiments to the technical solution, but shall fall within the scope of the invention.
Claims (8)
1. The utility model provides a laser cutting equipment convenient to laser focus is adjusted which characterized in that: the laser beam focusing device comprises a rack, wherein a mounting seat, a fixed seat and a light emitting device for emitting laser are arranged on the rack, a bearing seat and a vertical moving assembly are arranged on the mounting seat, and a focusing head and a coaxial focus light source for emitting light beams are arranged on the bearing seat; the focusing head is used for receiving laser emitted by the light emitting device and emitting the laser to realize cutting, or receiving light beams emitted by the coaxial focus light source and emitting the light beams for imaging; the vertical moving assembly acts on the bearing seat and is used for driving the bearing seat to move along the vertical direction; the fixing seat and the mounting seat are relatively fixed, and a third reflector group used for refracting laser emitted by the light emitting device to enable the laser to be emitted into the focusing head all the time is arranged on the fixing seat.
2. The laser cutting apparatus to facilitate laser focus adjustment of claim 1, wherein: the bearing seat is provided with a coaxial illumination observation device which is used for observing whether a light beam emitted by the coaxial focus light source forms clear images after being received and emitted by the focusing head, and the coaxial illumination observation device is positioned above the focusing head.
3. The laser cutting apparatus to facilitate laser focus adjustment of claim 2, wherein: the coaxial focus light source is positioned on one side of the coaxial illumination observation device, which is far away from the light emitting device, and the bearing seat is also provided with a fourth reflector group which is used for refracting the emergent light beam of the coaxial focus light source so as to enable the light beam to be emitted into the focusing head all the time.
4. The laser cutting apparatus to facilitate laser focus adjustment of claim 2, wherein: the third reflector group is positioned between the coaxial illumination observation device and the focusing head in the vertical direction.
5. The laser cutting apparatus to facilitate laser focus adjustment of claim 1, wherein: the third reflector group comprises a plurality of third reflectors, the third reflectors are arranged on the fixed seat and reflect laser emitted by the light emitting device one by one, and the last third reflector in the third reflector group is used for receiving the laser and reflecting the laser and is positioned above the focusing head, so that the reflected laser can be incident into the focusing head along the vertical direction all the time.
6. The laser cutting apparatus to facilitate laser focus adjustment of claim 1, wherein: the vertical moving assembly comprises a vertical driving motor, a lead screw is connected to the vertical driving motor, the lead screw extends in the vertical direction, a nut is spirally matched to the lead screw, and the lead screw is fixedly connected with the bearing seat.
7. The laser cutting apparatus to facilitate laser focus adjustment of claim 1, wherein: the light emitting device comprises a base, the base is installed on the rack and located beside the installation seat, a laser light source, a conical lens, an iris diaphragm and a plano-convex lens are arranged on the base, and the iris diaphragm is located between the conical lens and the plano-convex lens; the laser light source is used for emitting a light beam, the cone lens is used for receiving the light beam emitted by the laser light source and adjusting the light beam into an annular light beam, the annular light beam is emitted, an optical hole in the iris diaphragm is opposite to the cone lens, and the iris diaphragm is used for receiving the annular light beam adjusted by the cone lens and changing the diameter of the annular light beam; the plano-convex lens is used for receiving the annular light beam adjusted by the iris diaphragm and enabling the light beam emitted by the plano-convex lens to pass through the focusing head for focusing.
8. The laser cutting apparatus to facilitate laser focus adjustment of claim 7, wherein: the cone lens, the iris diaphragm and the plano-convex lens can be arranged on the base in a sliding mode, and each of the cone lens, the iris diaphragm and the plano-convex lens can move close to or away from the rest two components.
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| CN202210030604.5A CN114346473A (en) | 2022-01-12 | 2022-01-12 | Laser cutting method for optical filter |
| CN202210253491.5A CN114523216A (en) | 2022-01-12 | 2022-01-12 | Laser cutting equipment convenient to laser focus is adjusted |
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| CN113620586A (en) * | 2021-09-08 | 2021-11-09 | 苏州捷兴激光设备有限公司 | Optical filter laser cutting method |
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| KR20120008610A (en) * | 2010-07-19 | 2012-02-01 | (주)에스아이티 | Method for calibration of laser scanner working height using displacement sensor |
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| CN109702327B (en) * | 2019-02-11 | 2021-10-12 | 大族激光科技产业集团股份有限公司 | Laser processing method and apparatus |
| CN109940277B (en) * | 2019-03-12 | 2021-02-26 | 德玛克（长兴）自动化系统有限公司 | Two-sided radium-shine marking equipment of bottle lid |
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| CN215431955U (en) * | 2021-08-20 | 2022-01-07 | 安徽亘鼎智能科技有限公司 | Height compensation equipment |
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