CN114520171A - 一种基于槽式清洗机的气流增强装置及方法 - Google Patents
一种基于槽式清洗机的气流增强装置及方法 Download PDFInfo
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- CN114520171A CN114520171A CN202210135952.9A CN202210135952A CN114520171A CN 114520171 A CN114520171 A CN 114520171A CN 202210135952 A CN202210135952 A CN 202210135952A CN 114520171 A CN114520171 A CN 114520171A
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
- H01L21/6704—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing
- H01L21/67057—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing with the semiconductor substrates being dipped in baths or vessels
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Cleaning Or Drying Semiconductors (AREA)
Abstract
Description
Claims (5)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CN202210135952.9A CN114520171B (zh) | 2022-02-15 | 2022-02-15 | 一种基于槽式清洗机的气流增强装置及方法 |
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CN202210135952.9A CN114520171B (zh) | 2022-02-15 | 2022-02-15 | 一种基于槽式清洗机的气流增强装置及方法 |
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CN114520171A true CN114520171A (zh) | 2022-05-20 |
CN114520171B CN114520171B (zh) | 2023-03-21 |
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CN202210135952.9A Active CN114520171B (zh) | 2022-02-15 | 2022-02-15 | 一种基于槽式清洗机的气流增强装置及方法 |
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Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN115429186A (zh) * | 2022-11-10 | 2022-12-06 | 杭州老板电器股份有限公司 | 一种气路总成以及洗碗机 |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2015177324A1 (en) * | 2014-05-21 | 2015-11-26 | Spx Flow Technology Danmark A/S | Gas distributer for a convective dryer having improved radial gas velocity control |
CN208437358U (zh) * | 2018-06-25 | 2019-01-29 | 世巨科技(合肥)有限公司 | 一种半导体制造用湿法清洗装置 |
CN112090843A (zh) * | 2020-09-07 | 2020-12-18 | 西安奕斯伟硅片技术有限公司 | 一种用于清洗硅片的装置 |
CN212967768U (zh) * | 2020-10-13 | 2021-04-13 | 风氢扬氢能科技(上海)有限公司 | 燃料电池箱体的吹扫结构 |
CN214719232U (zh) * | 2021-02-08 | 2021-11-16 | 常州捷佳创精密机械有限公司 | 导风组件和硅片清洗装置 |
-
2022
- 2022-02-15 CN CN202210135952.9A patent/CN114520171B/zh active Active
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2015177324A1 (en) * | 2014-05-21 | 2015-11-26 | Spx Flow Technology Danmark A/S | Gas distributer for a convective dryer having improved radial gas velocity control |
CN208437358U (zh) * | 2018-06-25 | 2019-01-29 | 世巨科技(合肥)有限公司 | 一种半导体制造用湿法清洗装置 |
CN112090843A (zh) * | 2020-09-07 | 2020-12-18 | 西安奕斯伟硅片技术有限公司 | 一种用于清洗硅片的装置 |
CN212967768U (zh) * | 2020-10-13 | 2021-04-13 | 风氢扬氢能科技(上海)有限公司 | 燃料电池箱体的吹扫结构 |
CN214719232U (zh) * | 2021-02-08 | 2021-11-16 | 常州捷佳创精密机械有限公司 | 导风组件和硅片清洗装置 |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN115429186A (zh) * | 2022-11-10 | 2022-12-06 | 杭州老板电器股份有限公司 | 一种气路总成以及洗碗机 |
CN115429186B (zh) * | 2022-11-10 | 2023-04-21 | 杭州老板电器股份有限公司 | 一种气路总成以及洗碗机 |
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Address after: Room 3, no.299, Yuyang Road, Yushan Town, Kunshan City, Suzhou City, Jiangsu Province Patentee after: Suzhou Zhicheng Semiconductor Technology Co.,Ltd. Address before: Room 3, no.299, Yuyang Road, Yushan Town, Kunshan City, Suzhou City, Jiangsu Province Patentee before: Zhicheng semiconductor equipment technology (Kunshan) Co.,Ltd. |
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Address after: No. 889 Zhonghua Road, Bacheng Town, Kunshan City, Suzhou City, Jiangsu Province, 215300 Patentee after: Suzhou Zhicheng Semiconductor Technology Co.,Ltd. Country or region after: China Address before: Room 3, no.299, Yuyang Road, Yushan Town, Kunshan City, Suzhou City, Jiangsu Province Patentee before: Suzhou Zhicheng Semiconductor Technology Co.,Ltd. Country or region before: China |