CN114488498B - Off-axis multi-reflection optical system precise adjustment method based on spherical reflector - Google Patents
Off-axis multi-reflection optical system precise adjustment method based on spherical reflector Download PDFInfo
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- CN114488498B CN114488498B CN202210002756.4A CN202210002756A CN114488498B CN 114488498 B CN114488498 B CN 114488498B CN 202210002756 A CN202210002756 A CN 202210002756A CN 114488498 B CN114488498 B CN 114488498B
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B17/00—Systems with reflecting surfaces, with or without refracting elements
- G02B17/02—Catoptric systems, e.g. image erecting and reversing system
- G02B17/06—Catoptric systems, e.g. image erecting and reversing system using mirrors only, i.e. having only one curved mirror
- G02B17/0626—Catoptric systems, e.g. image erecting and reversing system using mirrors only, i.e. having only one curved mirror using three curved mirrors
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B17/00—Systems with reflecting surfaces, with or without refracting elements
- G02B17/02—Catoptric systems, e.g. image erecting and reversing system
- G02B17/06—Catoptric systems, e.g. image erecting and reversing system using mirrors only, i.e. having only one curved mirror
- G02B17/0626—Catoptric systems, e.g. image erecting and reversing system using mirrors only, i.e. having only one curved mirror using three curved mirrors
- G02B17/0642—Catoptric systems, e.g. image erecting and reversing system using mirrors only, i.e. having only one curved mirror using three curved mirrors off-axis or unobscured systems in which not all of the mirrors share a common axis of rotational symmetry, e.g. at least one of the mirrors is warped, tilted or decentered with respect to the other elements
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/0012—Optical design, e.g. procedures, algorithms, optimisation routines
Abstract
The invention provides an off-axis multi-reflecting optical system precise assembling and adjusting method based on a spherical reflector, and solves the problems that the existing off-axis multi-reflecting optical system assembling and adjusting method is inaccurate in curvature center positioning, easy to generate larger aberration and easy to generate the risk of scratching the mirror surface for the spherical reflector with large curvature. The method comprises the steps of establishing a unified space coordinate system through space coordinate measuring equipment, positioning and marking the center point of each spherical reflector by combining a measuring target ball, and performing reference transmission and space pose measurement by using a microscope and an autocollimation theodolite, so that the difficulty of assembly integration is reduced, the operability is high, and the method is non-contact measurement and avoids scratching the mirror surface of the reflector in the measuring and positioning process.
Description
Technical Field
The invention relates to the field of optical precision assembly and adjustment, in particular to a precision assembly and adjustment method of an off-axis multi-reflector optical system based on a spherical reflector.
Background
The field of spatial imaging optics is dedicated to the development of large field of view, large aperture and non-obscuration spatial optical imaging systems, and therefore, the structure of the optical system is developed from an on-axis optical system to an off-axis optical system. The off-axis multi-reflection optical system based on the spherical reflector is a non-rotational symmetrical optical system consisting of a plurality of optical spherical reflectors with eccentricity and inclination, the curvature center of each spherical reflector is no longer positioned on the optical axis of the system, and the spatial position of the curvature center seriously influences the imaging quality of the whole optical system.
At present, a common assembling and adjusting method for an off-axis multi-reflection optical system basically adopts optical element shape positioning, a three-coordinate measuring machine or space coordinate measuring equipment adopts points to measure a fitted sphere, and the coordinate position of the curvature center of a spherical reflector can be determined only by adopting point fitting for many times, for the spherical reflector with large curvature, the spherical fitting error is large, so that the positioning of the curvature center is inaccurate, large aberration is easy to generate, and the imaging quality of the optical system is improved; in addition, the method adopts contact type sampling point measurement, and is easy to generate quality risks such as mirror surface scratching and the like due to repeated measurement, disassembly and adjustment.
Disclosure of Invention
The invention provides a precision assembling and adjusting method of an off-axis multi-reflection optical system based on a spherical reflector, aiming at solving the technical problems that the curvature center of the spherical reflector with large curvature is not accurately positioned, large aberration is easy to generate and the risk of scratching the mirror surface is easy to generate in the existing assembling and adjusting method of the off-axis multi-reflection optical system.
In order to realize the purpose, the technical scheme provided by the invention is as follows:
a precision assembling and adjusting method of an off-axis multi-reflection optical system based on a spherical reflector is characterized by comprising the following steps of:
1) First reflector with accurate positioning
1.1 According to the design requirement of the off-axis multi-reflector system, three mechanical reference surfaces of X, Y and Z are established by sampling points of space coordinate measuring equipment;
1.2 Initially installing a first reflector at a first reflector installation position planned in advance by an off-axis multi-reflector system, measuring an initial pitch angle of the first reflector by a first auto-collimation theodolite, and enabling the first reflector to meet design requirements by repairing and repairing a cutting pad;
1.3 Point fitting spherical surface is adopted on the surface of the first reflector through space coordinate measuring equipment to obtain the initial center height of a spherical center point, the trimming pad is thickened or thinned to enable the initial center height to meet the design requirement, and the first autocollimation theodolite monitors the pitching angle of the first reflector in real time;
1.4 A point fitting plane is acquired on the end plane of the first reflector through space coordinate measuring equipment to obtain a relative included angle between the end plane of the first reflector and a mechanical reference plane, the relative included angle meets the design requirement through micro-motion rotation, and the first auto-collimation theodolite monitors the pitch angle and the azimuth angle of the first reflector in real time;
1.5 Based on the first mirror center point O 1 Relative theoretical distances from the three mechanical reference surfaces of X, Y and Z enable the coordinate position of a measurement target ball of space coordinate measurement equipment to meet the requirement of the theoretical distance;
1.6 Erecting a microscope, adjusting the microscope to perform self-alignment imaging with the measuring target ball, displaying that the edge of a cross-hair image is sharp and recognizable on a CCD interface of the microscope, and marking the position of the cross-hair image at the moment;
1.7 Removing the measuring target ball, enabling an auto-collimation cross-hair image of the first reflector to appear on a CCD interface of the microscope, and finely adjusting the position of the first reflector to enable the auto-collimation cross-hair image of the first reflector to be superposed with the cross-hair image marked in the step 1.6) so as to finish the accurate positioning of the first reflector;
2) Establishing a spatial coordinate system
Using three reference surfaces of X, Y and Z and the first reflector centre point O 1 Establishing a space coordinate system for a coordinate origin, wherein the coordinate origin is O (0, 0);
3) Second reflector with accurate positioning
3.1 Optically fine auto-aligning the first auto-collimating theodolite with the adjusted first mirror;
3.2 ) rotate the first autocollimation theodolite horizontally by theta 1 Angle θ 1 The included angle of the optical axes of the first reflector and the second reflector is formed;
3.3 Mounting a second autocollimation theodolite to be mutually subjected to autocollimation with the first autocollimation theodolite, and then keeping the posture of the second autocollimation theodolite still;
3.4 A second reflector is initially installed at a second reflector installation position planned in advance by the off-axis multi-reflector optical system, the initial pitch angle of the second reflector is measured through a second auto-collimation theodolite, and the design requirements are met through repairing and grinding a trimming pad;
3.5 Point fitting spherical surface is adopted on the surface of the second reflector through space coordinate measuring equipment to obtain the initial center height of a spherical center point, the trimming pad is thickened or thinned to meet the design requirement, and the second autocollimation theodolite monitors the pitching angle of the second reflector in real time;
3.6 Monitoring the azimuth angle of the second reflector by a second auto-collimation theodolite, and micro-moving and rotating the second reflector to enable the azimuth angle to meet the design requirement;
3.7 According to the second reflector sphere center point O 2 The coordinate position of the target ball and the coordinate origin O (0, 0) is determined, so that the coordinate position of the measuring target ball of the space coordinate measuring equipment meets the requirement of the coordinate position;
3.8 Erecting a microscope, adjusting the microscope to perform self-alignment imaging with the measuring target ball, displaying that the edge of a cross-hair image is sharp and recognizable on a CCD interface of the microscope, and marking the position of the cross-hair image at the moment;
3.9 Removing the measuring target ball, enabling an auto-collimation cross hair image of the second reflector to appear on a CCD interface of the microscope, and finely adjusting the position of the second reflector to enable the auto-collimation cross hair image of the second reflector to be superposed with the cross hair image marked in the step 3.8) to finish the accurate positioning of the second reflector;
4) Accurate positioning third reflector
4.1 Horizontal rotation (theta) of the first autocollimation theodolite 1 +θ 2 ) Angle theta 2 Is the optical axis included angle of the first reflector and the third reflector;
4.2 Moving the second autocollimation theodolite to mutually autocollimate with the first autocollimation theodolite, and then keeping the posture of the second autocollimation theodolite still;
4.3 The precise positioning of the third reflector is finished by the methods of the steps 3.4) to 3.9), and the precise adjustment of the off-axis multi-reflection optical system is finished.
Further, in step 1.7), the fine adjustment of the position of the first reflecting mirror specifically includes: and performing micro precise rotation, translation and height adjustment on the first reflector according to the sharpness condition and the coordinate position of the image.
Further, in step 3.9), the fine adjusting the position of the second mirror specifically includes: and carrying out micro precise rotation, translation and height adjustment on the second reflector according to the sharpness condition and the coordinate position of the image.
Further, the step 1.5) specifically comprises the following steps: mounting a measurement target ball of space coordinate measurement equipment on a three-dimensional fine adjustment platform, and performing integral fine adjustment movement to enable the coordinate position of the target ball to meet the theoretical distance requirement;
the step 3.7) is specifically as follows: according to the centre of sphere O of the second reflector 2 And (3) mounting a measurement target ball of the space coordinate measurement equipment on the three-dimensional fine adjustment platform according to the coordinate position of the coordinate origin O, and performing integral fine adjustment movement to enable the coordinate position of the target ball to meet the requirement of the coordinate position.
Further, the space coordinate measuring equipment is a laser tracker;
the microscope is a PSM-equipped microscope.
Furthermore, the space coordinate measuring device is a measuring mechanism formed by space networking of a three-coordinate measuring machine or a flexible articulated arm measuring machine, or a laser tracker, the three-coordinate measuring machine and the flexible articulated arm measuring machine.
Compared with the prior art, the invention has the advantages that:
1. according to the method, a unified space coordinate system is established through space coordinate measuring equipment, the sphere center points of the spherical reflectors are positioned and marked by combining with the measuring target spheres, and the reference transmission and the space pose measurement are performed by using the microscope and the auto-collimation theodolite, so that the difficulty of assembly integration is reduced, and the operability is high.
2. The method is non-contact measurement, and avoids scratching the mirror surface of the reflector in the measurement positioning process.
3. The invention carries out high-precision space position coordinate positioning, reference transmission and precision measurement on the spherical reflector in the off-axis multi-reflecting optical system by a laser tracker (with the precision of 0.01 mm), a PSM adjusting microscope (with the precision of 2 mu m) and an auto-collimation theodolite (0.5'), and the comprehensive measurement precision is superior to 0.02mm.
Drawings
FIG. 1 is a schematic diagram of a precision assembling and adjusting method of an off-axis multi-reflector optical system based on a spherical reflector according to the present invention;
wherein the reference numbers are as follows:
1-a first reflector, 2-a second reflector, 3-a third reflector, 4-an object plane, 5-an image plane, 6-a microscope, 7-a space coordinate measuring device, 8-a first autocollimation theodolite and 9-a second autocollimation theodolite.
Detailed Description
The invention is described in further detail below with reference to the following figures and specific examples.
The invention relates to a precise adjusting method of an off-axis multi-reflecting optical system based on a spherical reflector, which is used for precisely adjusting and measuring the off-axis multi-reflecting optical system based on the spherical reflector through space coordinate measuring equipment 7, a microscope 6 and an auto-collimation theodolite. The off-axis multi-reflection optical system comprises a third reflector 3, a first reflector 1 and a second reflector 2 which are sequentially arranged from an object plane 4 to an image plane 5, and the assembling and adjusting method comprises the following specific steps:
1) Accurate positioning of the first mirror 1
1.1 As shown in fig. 1, three mechanical reference planes of X, Y and Z are established by sampling points by a space coordinate measuring device 7 according to the design drawing requirements of an off-axis multi-reflector system; in other embodiments, the space coordinate measuring device 7 may also adopt a three-coordinate measuring machine, or a flexible articulated arm measuring machine, or a measuring mechanism formed by space networking of the laser tracker, the three-coordinate measuring machine and the flexible articulated arm measuring machine, to perform cooperative measurement;
1.2 Initially installing a first reflector 1 at a first reflector 1 installation position planned in advance by an off-axis multi-reflector system, measuring an initial pitch angle of the first reflector 1 through a first autocollimation theodolite 8, and enabling the initial pitch angle of the first reflector 1 to meet design requirements through repairing and grinding a trimming pad;
1.3 Point fitting sphere is adopted on the surface of the first reflector 1 through a space coordinate measuring device 7 to obtain the initial central height of a sphere center point, and the trimming pad is thickened or thinned to meet the design requirement;
in the process of thickening or thinning the trimming pad (finely adjusting the position of the first reflector 1), the first autocollimation theodolite 8 monitors the change condition of the pitch angle of the first reflector 1 in real time, and ensures that the pitch angle of the first reflector 1 meets the design requirement after micro-movement;
1.4 Point fitting planes are acquired on the end plane of the first reflector 1 through a space coordinate measuring device 7, so that the relative included angle between the end face of the first reflector 1 and the mechanical reference plane is obtained, and the design requirements are met through micro-motion rotation;
in the process of micro-motion rotation of the first reflector 1, the first autocollimation theodolite 8 monitors the pitch angle and the azimuth angle of the first reflector 1 in real time, and ensures that the pitch angle and the azimuth angle of the first reflector 1 meet the design requirements after the first reflector 1 is micro-motion rotated;
1.5 Based on the center point O of the first reflector 1 1 Relative theoretical distances from three mechanical reference surfaces of X, Y and Z, mounting a measuring target ball of a space coordinate measuring device 7 on a three-dimensional fine adjustment platform, and performing integral fine adjustment movement to enable the coordinate position of the target ball to meet the theoretical distance requirement;
1.6 Erecting a microscope 6, carrying out self-alignment imaging on the micro-displacement adjusting microscope 6 and the measuring target ball, displaying that the edge of a cross hair image is sharp and recognizable on a CCD interface of the microscope 6, and marking the position of the cross hair image at the moment; the microscope 6 of the embodiment adopts a PSM adjusting microscope (auto-collimation microscope);
1.7 Get off the measurement target ball, the auto-collimation cross-hair image of the first reflector 1 appears on the CCD interface of the microscope 6, the micro-precision rotation, translation and height adjustment are carried out on the first reflector 1 according to the sharp condition and the coordinate position of the image, so that the auto-collimation cross-hair image of the first reflector 1 is superposed with the auto-collimation cross-hair image of the target ball marked in the step 1.6), at the moment, the first reflector 1 finishes the precision positioning, and the sphere center point O of the first reflector 1 1 (X 1 ，Y 1 ，Z 1 ) Determining that the mobile terminal can not move any more;
in the process of fine adjustment of the first reflector 1, the first autocollimation theodolite 8 monitors the change conditions of the pitch angle and the azimuth angle of the first reflector 1 in real time, and ensures that the pitch angle and the azimuth angle of the first reflector 1 meet the design requirements after fine adjustment;
2) Establishing a spatial coordinate system
Using three reference surfaces of X, Y and Z and the spherical center point O of the first reflector 1 1 Establishing a space coordinate system for the coordinate origin, namely the coordinate origin is O (0, 0);
3) Accurately positioning the second reflector 2
3.1 The first autocollimation theodolite 8 is optically precisely autocollimated with the adjusted first mirror 1;
3.2 To horizontally rotate the first autocollimation theodolite 8 by theta 1 Angle theta 1 Is the optical axis included angle of the first reflector 1 and the second reflector 2;
3.3 Erecting a second autocollimation theodolite 9 to be mutually autocollimation through the first autocollimation theodolite 8, and then keeping the posture of the second autocollimation theodolite 9 still;
3.4 A second reflector 2 is initially installed at the installation position of the second reflector 2 planned in advance by the off-axis multi-reflector system, the initial pitching angle of the second reflector 2 is measured through a second autocollimation theodolite 9, and the design requirements are met through repairing, grinding and trimming pads;
3.5 Point fitting spherical surface is adopted on the surface of the second reflector 2 by the space coordinate measuring equipment 7 to obtain the initial central height of the spherical center point, and the trimming pad is thickened or thinned to meet the design requirement;
in the process of thickening or thinning the trimming pad (finely adjusting the position of the second reflector 2), the second autocollimation theodolite 9 monitors the pitch angle of the second reflector 2 in real time to ensure that the pitch angle of the second reflector 2 after micromotion meets the design requirements;
3.6 Monitoring the azimuth angle of the second reflecting mirror 2 through a second autocollimation theodolite 9, and rotating the second reflecting mirror 2 slightly to enable the azimuth angle to meet the design requirement;
3.7 According to the centre of sphere O of the second reflector 2 2 The coordinate position of the coordinate origin O (0, 0) is matched with that of the space coordinate measuring device 7, so that the measuring target ball of the space coordinate measuring device is arranged on the three-dimensional fine adjustment platform, and the whole fine adjustment platform movesEnabling the coordinate position of the measurement target ball to meet the requirement of the coordinate position;
3.8 Erecting a microscope 6, carrying out self-alignment imaging on the micro-displacement adjusting microscope 6 and the measuring target ball, displaying that the edge of a cross hair image is sharp and recognizable on a CCD interface of the microscope 6, and marking the position of the cross hair image at the moment;
3.9 Removing the measuring target ball, allowing the second reflector 2 to have the auto-collimation cross hair image of the second reflector 2 on the CCD interface of the microscope 6, performing micro-precision rotation, translation and height adjustment on the second reflector 2 according to the sharpness and coordinate position of the image, so that the auto-collimation cross hair image of the second reflector 2 is superposed with the target ball auto-collimation cross hair image marked in the step 3.8), and at the moment, accurately positioning the second reflector 2, wherein the spherical center point O of the second reflector 2 is 2 (X 2 ，Y 2 ，Z 2 ) Determining that the mobile terminal can not move any more;
in the process of finely adjusting the second reflecting mirror 2, the second autocollimation theodolite 9 monitors the change conditions of the pitch angle and the azimuth angle in real time, and ensures that the pitch angle and the azimuth angle of the second reflecting mirror 2 meet the design requirements after micro-movement;
4) Accurate positioning of the third mirror 3
4.1 ) horizontal rotation (θ) of the first autocollimation theodolite 8 on the basis of step 3.9) 1 +θ 2 ) Angle θ 2 Is the optical axis included angle of the first reflector 1 and the third reflector 3;
4.2 Moving the second autocollimation theodolite 9 to mutually autocollimate with the first autocollimation theodolite 8, and then keeping the posture of the second autocollimation theodolite 9 still;
4.3 Utilizing the methods of the step 3.4) to the step 3.9) to finish the accurate positioning of the third reflector 3 and determine the spherical center point O of the third reflector 3 3 (X 3 ，Y 3 ，Z 3 ) And therefore, the first reflector 1, the second reflector 2 and the third reflector 3 complete accurate positioning of the spatial pose, namely, the off-axis multi-reflector system completes accurate adjustment.
The method is used for accurately and precisely positioning the spatial pose of the spherical reflector in the off-axis multi-reflection optical system, is non-contact measurement, has high positioning precision and strong operability, and provides a new assembly and adjustment integration and measurement means for precisely positioning the spatial pose of each optical element of the off-axis multi-reflection optical system. In other embodiments, if there are multiple spherical mirrors in the off-axis multiple-reflection optical path, the spatial pose may also be precisely positioned in sequence according to the above-mentioned process. In the embodiment, the working surface of the first reflector 1 is a convex spherical surface, a reflecting film system is coated, the non-working surface is a concave spherical surface, and no film is coated by optical polishing; the center of the convex spherical surface of the first reflector 1 is refracted and then coincides with the center of the concave spherical surface, so that the center point of the convex spherical surface can be accurately positioned conveniently. The working surfaces of the second reflector 2 and the third reflector 3 are concave spherical surfaces, the reflecting film system is coated, the non-working surfaces are planes, and the optical polishing is not coated with films and is mainly optically autocollimation theodolite.
The method of the invention has the following characteristics:
1. through reference precision measurement and optical reference conversion, the positioning precision is high;
the invention carries out high-precision space position and attitude coordinate positioning, reference transmission and precision measurement on the spherical reflector in the off-axis multi-reflecting optical system by a laser tracker (with the precision of 0.01 mm), a PSM adjusting microscope (with the precision of 2 mu m) and an auto-collimation theodolite (0.5'), and the comprehensive measurement precision is superior to 0.02mm.
2. The operability is strong;
according to the invention, a unified space coordinate system is established through the laser tracker, the sphere center points of the spherical reflectors are positioned and marked by combining the measurement target spheres, and the PSM adjusting microscope and the auto-collimation theodolite are utilized for reference transmission and space pose measurement, so that the difficulty of assembly and integration is further reduced.
The above description is only for the preferred embodiment of the present invention and does not limit the technical solution of the present invention, and any modifications made by those skilled in the art based on the main technical idea of the present invention belong to the technical scope of the present invention.
Claims (6)
1. An off-axis multi-reflector optical system precise adjustment method based on a spherical reflector is characterized by comprising a second reflector (2), a first reflector (1) and a third reflector (3) which are sequentially arranged along a light path, and comprises the following steps:
1) Accurate positioning first reflector (1)
1.1 According to the design requirement of an off-axis multi-reflector system, three mechanical reference surfaces of X, Y and Z are established by sampling points through a space coordinate measuring device (7);
1.2 A first reflector (1) is initially installed at a first reflector installation position planned in advance in an off-axis multi-reflector optical system, an initial pitching angle of the first reflector (1) is measured through a first autocollimation theodolite (8), and the design requirements are met through repairing, grinding and trimming a pad;
1.3 Point-sampling and fitting a spherical surface on the surface of the first reflector (1) through a space coordinate measuring device (7) to obtain the initial center height of a spherical center point, thickening or thinning a trimming pad to enable the initial center height to meet the design requirement, and monitoring the pitch angle of the first reflector (1) in real time by a first autocollimation theodolite (8);
1.4 A point fitting plane is acquired on the end plane of the first reflector (1) through a space coordinate measuring device (7), a relative included angle between the end face of the first reflector (1) and a mechanical reference plane is obtained, the relative included angle meets the design requirement through micro-motion rotation, and a first auto-collimation theodolite (8) monitors the pitch angle and the azimuth angle of the first reflector (1) in real time;
1.5 Based on the center point O of the first reflector (1) 1 Relative theoretical distances from the three mechanical reference surfaces of X, Y and Z enable the coordinate position of a measurement target ball of the space coordinate measurement equipment (7) to meet the requirement of the theoretical distance;
1.6 Erecting a microscope (6), adjusting the microscope (6) to perform self-alignment imaging with a measuring target ball, displaying that the edge of a cross-hair image is sharp and distinguishable on a CCD interface of the microscope (6), and marking the position of the cross-hair image at the moment;
1.7 Removing the measurement target ball, allowing an auto-collimation cross hair image of the first reflector (1) to appear on a CCD interface of the microscope (6), and finely adjusting the position of the first reflector (1) to ensure that the auto-collimation cross hair image of the first reflector (1) is superposed with the cross hair image marked in the step 1.6) to finish the accurate positioning of the first reflector (1);
2) Establishing a spatial coordinate system
Is defined by X,Three reference surfaces of Y and Z, and a sphere center point O of the first reflector (1) 1 Establishing a space coordinate system for a coordinate origin, wherein the coordinate origin is O (0, 0);
3) Second reflector with accurate positioning (2)
3.1 Optically fine self-aligning the first autocollimation theodolite (8) with the adjusted first mirror (1);
3.2 By rotating the first autocollimation theodolite (8) horizontally by theta 1 Angle θ 1 Is the optical axis included angle of the first reflector (1) and the second reflector (2);
3.3 Erecting a second autocollimation theodolite (9) to mutually perform autocollimation and center penetration with the first autocollimation theodolite (8), and then keeping the posture of the second autocollimation theodolite (9) still;
3.4 A second reflector (2) is initially installed at the installation position of the second reflector (2) planned in advance in the off-axis multi-reflector optical system, the initial pitching angle of the second reflector (2) is measured through a second auto-collimation theodolite (9), and the design requirements are met through repairing and grinding a trimming pad;
3.5 Point-sampling and fitting a spherical surface on the surface of the second reflector (2) through a space coordinate measuring device (7) to obtain the initial center height of a spherical center point, thickening or thinning a trimming pad to enable the initial center height to meet the design requirement, and monitoring the pitch angle of the second reflector (2) in real time through a second autocollimation theodolite (9);
3.6 Monitoring the azimuth angle of the second reflector (2) through a second autocollimation theodolite (9), and rotating the second reflector (2) in a micro-motion mode to enable the azimuth angle to meet the design requirement;
3.7 According to the spherical center point O of the second reflector (2) 2 The coordinate position of the space coordinate measuring device (7) and the coordinate position of the coordinate origin O (0, 0) meets the coordinate position requirement;
3.8 Erecting a microscope (6), adjusting the microscope (6) to perform self-alignment imaging with a measuring target ball, displaying that the edge of a cross-hair image is sharp and distinguishable on a CCD interface of the microscope (6), and marking the position of the cross-hair image at the moment;
3.9 The measurement target ball is taken off, the auto-collimation cross hair image of the second reflector (2) appears on the CCD interface of the microscope (6), and the position of the second reflector (2) is finely adjusted, so that the auto-collimation cross hair image of the second reflector (2) is superposed with the cross hair image marked in the step 3.8), and the accurate positioning of the second reflector (2) is completed;
4) Accurate positioning third reflector (3)
4.1 By rotating the first autocollimation theodolite (8) horizontally (theta) 1 +θ 2 ) Angle θ 2 Is the optical axis included angle of the first reflector (1) and the third reflector (3);
4.2 Moving the second autocollimation theodolite (9) so that it is mutually autocollimation through the first autocollimation theodolite (8), and then the attitude of the second autocollimation theodolite (9) is kept still;
4.3 The method of the step 3.4) to the step 3.9) is utilized to finish the accurate positioning of the third reflector (3) and finish the accurate adjustment of the off-axis multi-reflection optical system.
2. The precise adjustment method for the off-axis multi-mirror optical system based on spherical reflector as claimed in claim 1, wherein: in step 1.7), the fine adjustment of the position of the first reflector (1) is specifically as follows: and carrying out micro precise rotation, translation and height adjustment on the first reflector (1) according to the sharpness condition and the coordinate position of the image.
3. The precise assembling and adjusting method of the off-axis multi-reflector system based on the spherical reflector as claimed in claim 2, wherein: in the step 3.9), the fine adjustment of the position of the second reflector (2) specifically comprises: and (3) carrying out micro precise rotation, translation and height adjustment on the second reflecting mirror (2) according to the sharpness condition and the coordinate position of the image.
4. The precision assembling and adjusting method of the off-axis multi-reflector system based on the spherical reflector as claimed in claim 3, wherein the step 1.5) is specifically as follows: mounting a measuring target ball of a space coordinate measuring device (7) on a three-dimensional fine adjustment platform, and performing integral fine adjustment movement to enable the coordinate position of the target ball to meet the theoretical distance requirement;
the step 3.7) is specifically as follows: according to the spherical center point O of the second reflector (2) 2 The coordinate position of the coordinate origin O is used for mounting a measuring target ball of a space coordinate measuring device (7)On the three-dimensional fine adjustment platform, the whole fine adjustment movement enables the coordinate position of the target ball to meet the requirement of the coordinate position.
5. The precise adjustment method for the off-axis multi-mirror optical system based on spherical mirrors according to any one of claims 1 to 4, comprising the steps of: the space coordinate measuring equipment (7) is a laser tracker;
the microscope (6) is a PSM adjusting microscope.
6. The precise adjustment method for the off-axis multi-mirror optical system based on spherical mirrors according to any one of claims 1 to 4, comprising the steps of: the space coordinate measuring device (7) is a measuring mechanism formed by space networking of a three-coordinate measuring machine or a flexible articulated arm measuring machine or a laser tracker, the three-coordinate measuring machine and the flexible articulated arm measuring machine.
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| CN202210002756.4A CN114488498B (en) | 2022-01-04 | 2022-01-04 | Off-axis multi-reflection optical system precise adjustment method based on spherical reflector |
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| CN202210002756.4A CN114488498B (en) | 2022-01-04 | 2022-01-04 | Off-axis multi-reflection optical system precise adjustment method based on spherical reflector |
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Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1445636A1 (en) * | 2003-02-07 | 2004-08-11 | Alcatel | Wide-field optical telescope, in particular for space-borne astronomy |
| CN102937738A (en) * | 2012-11-20 | 2013-02-20 | 中国科学院西安光学精密机械研究所 | System and method for achieving accurate positioning of off-axis aspheric surface reflector |
| CN102944923A (en) * | 2012-11-20 | 2013-02-27 | 中国科学院西安光学精密机械研究所 | System and method for accurately positioning center of curvature radius of off-axis spherical reflector |
| CN208736353U (en) * | 2018-09-11 | 2019-04-12 | 苏州如期光电科技有限公司 | A kind of detection focal length measures greatly the optical system of off axis paraboloidal mirror off axis |
| CN110989128A (en) * | 2019-11-26 | 2020-04-10 | 天津津航技术物理研究所 | Reflector assembling and adjusting tool and method based on optical self-centering technology |
| CN113588082A (en) * | 2021-07-09 | 2021-11-02 | 中国科学院西安光学精密机械研究所 | High-precision quick assembling and adjusting method for off-axis prism dispersion type hyperspectral imager |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003043360A (en) * | 2001-08-03 | 2003-02-13 | Canon Inc | Imaging optical system, projection type image display device and imaging device |
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Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1445636A1 (en) * | 2003-02-07 | 2004-08-11 | Alcatel | Wide-field optical telescope, in particular for space-borne astronomy |
| CN102937738A (en) * | 2012-11-20 | 2013-02-20 | 中国科学院西安光学精密机械研究所 | System and method for achieving accurate positioning of off-axis aspheric surface reflector |
| CN102944923A (en) * | 2012-11-20 | 2013-02-27 | 中国科学院西安光学精密机械研究所 | System and method for accurately positioning center of curvature radius of off-axis spherical reflector |
| CN208736353U (en) * | 2018-09-11 | 2019-04-12 | 苏州如期光电科技有限公司 | A kind of detection focal length measures greatly the optical system of off axis paraboloidal mirror off axis |
| CN110989128A (en) * | 2019-11-26 | 2020-04-10 | 天津津航技术物理研究所 | Reflector assembling and adjusting tool and method based on optical self-centering technology |
| CN113588082A (en) * | 2021-07-09 | 2021-11-02 | 中国科学院西安光学精密机械研究所 | High-precision quick assembling and adjusting method for off-axis prism dispersion type hyperspectral imager |
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