CN116224615A - Method for adjusting full free-form surface multi-reflection off-axis optical system - Google Patents

Method for adjusting full free-form surface multi-reflection off-axis optical system Download PDF

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Publication number
CN116224615A
CN116224615A CN202310143064.6A CN202310143064A CN116224615A CN 116224615 A CN116224615 A CN 116224615A CN 202310143064 A CN202310143064 A CN 202310143064A CN 116224615 A CN116224615 A CN 116224615A
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China
Prior art keywords
reflecting mirror
mirror
axis
optical system
coordinate system
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CN202310143064.6A
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Chinese (zh)
Inventor
付西红
秦星
杨帆
曲锐
张鸿伟
沈重
康世发
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XiAn Institute of Optics and Precision Mechanics of CAS
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XiAn Institute of Optics and Precision Mechanics of CAS
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Priority to CN202310143064.6A priority Critical patent/CN116224615A/en
Publication of CN116224615A publication Critical patent/CN116224615A/en
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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/62—Optical apparatus specially adapted for adjusting optical elements during the assembly of optical systems
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/002—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates
    • G01B11/005—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates coordinate measuring machines
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
    • G01M11/02—Testing optical properties
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B17/00—Systems with reflecting surfaces, with or without refracting elements
    • G02B17/02—Catoptric systems, e.g. image erecting and reversing system
    • G02B17/06—Catoptric systems, e.g. image erecting and reversing system using mirrors only, i.e. having only one curved mirror
    • G02B17/0647—Catoptric systems, e.g. image erecting and reversing system using mirrors only, i.e. having only one curved mirror using more than three curved mirrors
    • G02B17/0663—Catoptric systems, e.g. image erecting and reversing system using mirrors only, i.e. having only one curved mirror using more than three curved mirrors off-axis or unobscured systems in which not all of the mirrors share a common axis of rotational symmetry, e.g. at least one of the mirrors is warped, tilted or decentered with respect to the other elements

Abstract

The invention relates to an adjustment method of an optical system, in particular to an adjustment method of a full-free-surface multi-reflection off-axis optical system, which is used for solving the defects that the full-free-surface multi-reflection off-axis optical system has more adjustment freedom, the relation between optical axes of optical elements is complex, the system integration difficulty is increased and the adjustment process is not easy to monitor. According to the method for installing and adjusting the full free-form surface multi-reflection off-axis optical system, a space coordinate system is established through space coordinate measuring equipment, each reflecting mirror is accurately positioned by combining an auto-collimation theodolite and a cubic mirror, and a microscope and a measuring target ball are utilized for reference transmission and space pose measurement, so that the difficulty of assembly integration is reduced; the invention has stronger operability and realizes the unification of design, processing and adjustment references of the full free-form surface multi-reflection off-axis optical system.

Description

Method for adjusting full free-form surface multi-reflection off-axis optical system
Technical Field
The invention relates to an adjusting method of an optical system, in particular to an adjusting method of a full free-form surface multi-reflection off-axis optical system.
Background
With the rapid development of large-field, large-caliber and unobstructed spatial optical imaging systems, optical imaging system structures develop off-axis from the on-axis, off-axis of the aspheric surface to the free-form surface, which is applied in multi-reflector off-axis optical systems to balance the drastically increased off-axis aberrations.
The off-axis multi-reflector off-axis optical system with the full free-form surface adopts a plurality of free-form surface reflectors, and the free-form surface can provide more design freedom degrees, so that the aberration correction capability of the optical system is improved, and the free-form surface has various superiorities in the aspects of optical performance, volume, weight limitation and the like, thereby the off-axis multi-reflector off-axis optical system with the full free-form surface meets the requirements of the space optical field on load miniaturization and light weight, and is widely applied in various fields.
Because the free-form surface does not have symmetry, the full-free-form surface multi-reflection off-axis optical system loses the structural rotational symmetry of the traditional optical system, so that the full-free-form surface multi-reflection off-axis optical system has more adjustment freedom, the relation between optical axes of optical elements is complex, the system integration difficulty is increased, and the adjustment process is not easy to monitor. At present, the tuning method of the full free-form surface multi-reflection off-axis optical system has become an international research hot spot.
Disclosure of Invention
The invention aims to solve the defects that the full free-form surface multi-reflection off-axis optical system has more adjustment freedom, the relation between optical axes of optical elements is complex, the system integration difficulty is increased, and the adjustment process is not easy to monitor, and provides an adjustment method of the full free-form surface multi-reflection off-axis optical system.
The invention provides the following technical solutions:
the method for installing and adjusting the full-free-surface multi-reflection off-axis optical system comprises a base, and a first reflecting mirror, a second reflecting mirror, a third reflecting mirror and a fourth reflecting mirror which are sequentially arranged on the base along an optical path from an image surface point to an object surface point, wherein working surfaces of the first reflecting mirror, the second reflecting mirror, the third reflecting mirror and the fourth reflecting mirror are off-axis free-surfaces, non-working surfaces are machining and installing reference surfaces, and the non-working surfaces are provided with a first back reference plane, a second back reference plane and a back reference cylindrical surface;
the method is characterized by comprising the following steps of:
step 1, accurately positioning a first reflecting mirror;
step 1.1, establishing an initial coordinate system O-XYZ through a space coordinate measuring device, wherein an origin O of the initial coordinate system is positioned on a base;
step 1.2, installing a first reflecting mirror at a preset installation position, and measuring the position of the first reflecting mirror in an initial coordinate system through a space coordinate measuring device; pasting a cube mirror on the first reflector, and monitoring the position of the first reflector in an initial coordinate system in real time through self-alignment of the auto-collimation theodolite and the cube mirror; the position of the first reflecting mirror in the initial coordinate system meets the preset requirement by adjusting a trimming pad of the first reflecting mirror;
step 1.3, respectively measuring a back reference cylindrical surface and a first back reference plane of a first reflector in an initial coordinate system through a space coordinate measuring device to obtain the position of a back intersection point in the initial coordinate system; the actual coordinates of the back intersection point meet the preset requirement by integrally translating the first reflecting mirror;
step 2, accurately positioning the second reflecting mirror, the third reflecting mirror and the fourth reflecting mirror in sequence by using the methods of the step 1.2 and the step 1.3;
step 3, optical fine tuning and system testing;
step 3.1, in an adjustment coordinate system, setting a measuring target ball of a space coordinate measuring device at an object plane point and an image plane point respectively, wherein the measuring target ball is used as the object plane measuring target ball and the image plane measuring target ball respectively;
step 3.2, arranging a microscope at the object plane point, and marking the object plane to measure the position of the target ball auto-collimation cross wire image; replacing the object plane measurement target sphere by an auxiliary spherical mirror, enabling the auto-collimation cross wire image of the auxiliary spherical mirror to coincide with the marked object plane measurement target sphere auto-collimation cross wire image, and removing the microscope;
step 3.3, setting a laser interferometer at an image plane point, and moving the laser interferometer and an image plane measurement target ball to perform self-alignment imaging so as to align interference fringes on a CCD interface of the laser interferometer until the interference fringes reach zero fringes;
step 3.4, taking out an image plane measurement target ball for system test, and measuring aberration of different fields of view through a laser interferometer and an auxiliary spherical mirror; and carrying out simulation by taking the aberration of the multiple fields into optical design software, analyzing the fine adjustment direction and the fine adjustment amount of the sensitive lens, and performing optical fine adjustment according to the fine adjustment direction and the fine adjustment amount of the sensitive lens until the imaging quality of different fields meets the preset requirement.
Further, the step 1.2 specifically includes:
step 1.2.1, installing a first reflecting mirror at a preset installation position, and respectively measuring an included angle between a first back reference plane of the first reflecting mirror and an XOY plane of an initial coordinate system by using a space coordinate measuring device to serve as a first pitching angle, and an included angle between a second back reference plane of the first reflecting mirror and the XOY plane of the initial coordinate system to serve as a first rotating angle;
step 1.2.2, sticking a cube mirror on a second back reference plane; the first autocollimation theodolite is adopted to be autocollimated with the cube mirror, and is used for monitoring the first pitching angle variation in real time; the second autocollimation theodolite is adopted to be autocollimated with the cube mirror, and is used for monitoring the variation of the first rotation angle in real time;
step 1.2.3, enabling the first pitching angle and the first rotating angle to meet preset requirements by adjusting the trimming pad.
Further, in step 1.3, the step of enabling the position of the back intersection point to meet the preset requirement by integrally translating the first reflecting mirror specifically includes: in an initial coordinate system, according to the difference value between the actual coordinate and the theoretical coordinate of the back intersection point, the actual coordinate of the back intersection point meets the preset requirement by integrally translating the first reflecting mirror; further comprises: when the first reflecting mirror is translated, the first autocollimation theodolite and the second autocollimation theodolite monitor the angle change condition of the cube mirror in real time, and the first pitching angle and the first rotating angle still meet preset requirements after the translation is completed.
Further, the step 2 specifically includes: with back intersection point as origin of coordinates O 1 Establishing an installation and adjustment coordinate system O 1 -X 1 Y 1 Z 1 The method comprises the steps of carrying out a first treatment on the surface of the The X axis, the Y axis and the Z axis of the adjustment coordinate system are respectively parallel to the X axis, the Y axis and the Z axis of the initial coordinate system; and (3) accurately positioning the second reflecting mirror, the third reflecting mirror and the fourth reflecting mirror by using the methods in the step 1.2 and the step 1.3.
Further, the step 3.2 specifically includes:
step 3.2.1, arranging a microscope at an object plane point, moving the microscope and performing object plane measurement target ball self-alignment imaging, and marking the position of the object plane measurement target ball self-alignment cross wire image at the moment if a CCD interface of the microscope displays that the object plane measurement target ball self-alignment cross wire image meets the sharp and virtual-free edge;
and 3.2.2, removing the object plane measurement target ball, installing an auxiliary spherical mirror at the object plane point, and adjusting the position of the auxiliary spherical mirror to enable the auto-collimation cross wire image of the auxiliary spherical mirror to coincide with the auto-collimation cross wire image of the object plane measurement target ball marked in the step 3.2.1, thereby finishing the accurate positioning of the auxiliary spherical mirror and removing the microscope.
Further, the space coordinate measuring device is a measuring mechanism formed by space networking of a three-coordinate measuring machine, a flexible joint arm measuring machine, a laser tracker, the three-coordinate measuring machine and the flexible joint arm measuring machine.
Further, the microscope is a PSM-mount microscope.
Compared with the prior art, the invention has the beneficial effects that:
(1) According to the method for adjusting the full free-form surface multi-reflection off-axis optical system, a space coordinate system is established through space coordinate measuring equipment, each reflecting mirror is accurately positioned by combining an auto-collimation theodolite and a cubic mirror, and a microscope and a measuring target ball are used for reference transmission and space pose measurement, so that the difficulty of assembly integration is reduced; the invention has stronger operability and realizes the unification of design, processing and adjustment references of the full free-form surface multi-reflection off-axis optical system.
(2) The invention relates to an adjusting method of a full free-form surface multi-reflection off-axis optical system, which is used for non-contact measurement of a working surface of a reflector and avoiding scratch of the reflector in the measuring and positioning process.
(3) The invention relates to a method for installing and adjusting a full free-form surface multi-reflection off-axis optical system, which is used for carrying out high-precision space pose coordinate positioning, reference transmission and precision measurement on each reflecting mirror through a three-coordinate measuring machine (with the precision of 2 mu m), a PSM (with the precision of 2 mu m) and an auto-collimation theodolite (0.5'), wherein the comprehensive measurement precision is better than 0.01mm.
Drawings
FIG. 1 is a schematic diagram of a full-free-form surface multi-reflector off-axis optical system according to an embodiment of a method for adjusting the full-free-form surface multi-reflector off-axis optical system of the present invention;
FIG. 2 is a schematic view of the first mirror in FIG. 1;
FIG. 3 is a schematic view of a neutral square mirror according to an embodiment of the present invention;
FIG. 4 is a schematic diagram of the accurate positioning of an auxiliary spherical mirror in an embodiment of the present invention.
The reference numerals are explained as follows: 1-a first mirror, 11-a first back reference plane, 12-a second back reference plane, 13-a back reference cylindrical surface, 14-a back intersection point; 2-a second mirror; 3-a third mirror; 4-a fourth mirror; 5-object plane point; 6-an auxiliary spherical mirror; 7-image surface points; 8-a laser interferometer; 9-cube mirrors; 10-trimming the pad; 110-a spatial coordinate measurement device; 120-autocollimation theodolite, 121-first autocollimation theodolite; 122-a second autocollimation theodolite; 130-microscope.
Detailed Description
The invention is further described below with reference to the drawings and exemplary embodiments.
Referring to fig. 1, a method for adjusting a full-free-surface multi-reflection off-axis optical system includes a base, a first reflector 1, a second reflector 2, a third reflector 3 and a fourth reflector 4 sequentially arranged on the base along an optical path from an image plane point 7 to an object plane point 5, working surfaces of the first reflector 1, the second reflector 2, the third reflector 3 and the fourth reflector 4 are off-axis free-surfaces, non-working surfaces are machining adjustment reference surfaces, and a first back reference plane 11, a second back reference plane 12 and a back reference cylinder 13 are arranged on the non-working surfaces.
The method for adjusting the full free-form surface multi-reflection off-axis optical system comprises the following steps:
step 1, referring to fig. 2 and 3, precisely positioning the first reflecting mirror 1;
step 1.1, establishing X, Y, Z three reference planes by adopting points of a space coordinate measuring device 110 according to design requirements, and forming an initial coordinate system O-XYZ by taking intersection points of the three reference planes as coordinate origins O, wherein the origin O of the initial coordinate system is positioned on a base;
step 1.2, installing a first reflecting mirror 1 at a preset installation position, and measuring the position of the first reflecting mirror 1 in an initial coordinate system through a space coordinate measuring device 110; pasting a cube mirror 9 on the first reflecting mirror 1, and aligning the cube mirror 9 with the two autocollimation theodolites 120 to monitor the position of the first reflecting mirror 1 in an initial coordinate system in real time; the position of the first reflecting mirror 1 in the initial coordinate system meets the preset requirement by adjusting the trimming pad 10;
the method comprises the following steps:
step 1.2.1, installing a first reflecting mirror 1 at a preset installation position, and respectively measuring an included angle between a first back reference plane 11 and an XOY plane of an initial coordinate system as a first pitching angle and an included angle between a second back reference plane 12 and the XOY plane of the initial coordinate system as a first rotation angle through a space coordinate measuring device 110;
step 1.2.2, sticking a cube mirror 9 on a second back reference plane 12; the first autocollimation theodolite 121 is adopted to be self-aligned with the cubic mirror 9 and used for monitoring the first pitching angle variation in real time; a second autocollimator 122 is employed to self-align with the cube mirror 9 for real-time monitoring of the first rotation angle variation.
The precision of the first autocollimation theodolite 121 and the second autocollimation theodolite 122 is 0.5';
step 1.2.3, enabling the first pitching angle and the first rotating angle to meet preset requirements by adjusting the trimming pad 10 of the first reflecting mirror 1;
step 1.3, in an initial coordinate system, measuring a back reference cylindrical surface 13 and a first back reference plane 11 respectively through a space coordinate measuring device 110 to obtain the actual coordinates of a back intersection point 14 in the initial coordinate system; according to the difference value between the actual coordinates and the theoretical coordinates of the back intersection point 14, the actual coordinates of the back intersection point 14 meet the preset requirement by integrally translating the first reflecting mirror 1;
when the first reflecting mirror 1 is translated, the first autocollimation theodolite 121 and the second autocollimation theodolite 122 monitor the angle change condition of the cubic mirror 9 in real time, so that the first pitching angle and the first rotating angle still meet the preset requirements after the translation is completed;
step 2, accurately positioning the second reflecting mirror 2, the third reflecting mirror 3 and the fourth reflecting mirror 4 in sequence;
with the back intersection point 14 as the origin of coordinates O 1 Establishing an installation and adjustment coordinate system O 1 -X 1 Y 1 Z 1 The method comprises the steps of carrying out a first treatment on the surface of the The X axis, the Y axis and the Z axis of the adjustment coordinate system are respectively parallel to the X axis, the Y axis and the Z axis of the initial coordinate system; accurately positioning the second reflecting mirror 2, the third reflecting mirror 3 and the fourth reflecting mirror 4 in sequence by using the methods of the step 1.2 and the step 1.3;
step 3, optical fine tuning and system testing;
step 3.1, in the adjustment coordinate system, setting a measuring target ball of the space coordinate measuring device 110 at the object plane point 5 and the image plane point 7 respectively, wherein the measuring target ball is used as the object plane measuring target ball and the image plane measuring target ball respectively;
step 3.2, referring to fig. 4, a microscope 130 is arranged at the object plane point 5, and the object plane is marked to measure the position of the target ball auto-collimation cross wire image; replacing the object plane measurement target sphere by the auxiliary spherical mirror 6, and taking out the microscope 130 after the auto-collimation cross wire image of the auxiliary spherical mirror 6 is overlapped with the marked object plane measurement target sphere auto-collimation cross wire image;
the method comprises the following steps:
step 3.2.1, arranging a microscope 130 at an object plane point 5, moving the microscope 130 to perform self-alignment imaging with the object plane measurement target sphere, and marking the position of the self-alignment cross wire image of the object plane measurement target sphere at the moment if a CCD interface of the microscope 130 displays that the self-alignment cross wire image of the object plane measurement target sphere meets the sharp and virtual-free edge;
step 3.2.2, removing the object plane measurement target ball, installing an auxiliary spherical mirror 6 at the object plane point 5, adjusting the position of the auxiliary spherical mirror 6 to enable the auto-collimation cross wire image of the auxiliary spherical mirror 6 to coincide with the object plane measurement target ball auto-collimation cross wire image marked in step 3.2.1, completing accurate positioning of the auxiliary spherical mirror 6 at the moment, and removing the microscope 130;
step 3.3, setting a laser interferometer 8 at an image plane point 7, and moving the laser interferometer 8 to perform self-alignment imaging with an image plane measurement target sphere to enable interference fringes on a CCD interface of the laser interferometer 8 to be collimated until the interference fringes are zero;
step 3.4, taking out an image plane measurement target ball for system test, and measuring aberration of different fields of view through a laser interferometer 8 and an auxiliary spherical mirror 6; and carrying out simulation by taking the aberration of the multiple fields into optical design software, analyzing the fine adjustment direction and the fine adjustment amount of the sensitive lens, and performing optical fine adjustment according to the fine adjustment direction and the fine adjustment amount of the sensitive lens until the imaging quality of different fields meets the preset requirement.
In this embodiment, the spatial coordinate measuring apparatus 110 is a three-coordinate measuring machine, and the precision is 2 μm; the microscope 130 is a PSM tuned microscope with an accuracy of 2 μm.
In other embodiments, the spatial coordinate measuring device 110 may also be a measuring mechanism formed by spatial networking of a flexible articulated arm measuring machine, or a laser tracker, a three-coordinate measuring machine, and a flexible articulated arm measuring machine.
The foregoing embodiments are merely for illustrating the technical solutions of the present invention, and not for limiting the same, and it will be apparent to those skilled in the art that modifications may be made to the specific technical solutions described in the foregoing embodiments, or equivalents may be substituted for some of the technical features thereof, without departing from the spirit of the technical solutions protected by the present invention.

Claims (7)

1. The utility model provides a method for adjusting a full free-form surface multi-reflection off-axis optical system, the full free-form surface multi-reflection off-axis optical system includes base, first speculum (1), second speculum (2), third speculum (3) and fourth speculum (4) that set gradually on the base along the light path from image surface point (7) to object surface point (5), the working face of first speculum (1), second speculum (2), third speculum (3) and fourth speculum (4) is off-axis free-form surface, and the non-working face is processing adjustment reference surface, all is provided with first back reference plane (11), second back reference plane (12) and back reference cylinder (13) on the non-working face;
the method is characterized by comprising the following steps of:
step 1, precisely positioning a first reflecting mirror (1);
step 1.1, establishing an initial coordinate system O-XYZ through a space coordinate measuring device (110), wherein an origin O of the initial coordinate system is positioned on a base;
step 1.2, installing a first reflecting mirror (1) at a preset installation position, and measuring the position of the first reflecting mirror (1) in an initial coordinate system through a space coordinate measuring device (110); pasting a cube mirror (9) on the first reflecting mirror (1), and monitoring the position of the first reflecting mirror (1) in an initial coordinate system in real time through self-alignment of the auto-collimation theodolite (120) and the cube mirror (9); the position of the first reflecting mirror (1) in an initial coordinate system meets the preset requirement by adjusting a trimming pad (10) of the first reflecting mirror (1);
step 1.3, respectively measuring a back reference cylindrical surface (13) and a first back reference plane (11) of the first reflector (1) through a space coordinate measuring device (110) to obtain the position of a back intersection point (14) in an initial coordinate system; the position of the back intersection point (14) meets the preset requirement by integrally translating the first reflecting mirror (1);
step 2, accurately positioning a second reflecting mirror (2), a third reflecting mirror (3) and a fourth reflecting mirror (4) in sequence according to the steps 1.2 and 1.3;
step 3, optical fine tuning and system testing;
step 3.1, in an adjustment coordinate system, setting a measuring target ball of a space coordinate measuring device (110) at an object plane point (5) and an image plane point (7) respectively, wherein the measuring target ball is used as an object plane measuring target ball and an image plane measuring target ball respectively;
step 3.2, arranging a microscope (130) at an object plane point (5), and marking the object plane to measure the position of the target ball auto-collimation cross wire image; replacing the object plane measurement target sphere by an auxiliary spherical mirror (6), enabling the auto-collimation cross wire image of the auxiliary spherical mirror (6) to coincide with the marked object plane measurement target sphere auto-collimation cross wire image, and removing the microscope (130);
step 3.3, setting a laser interferometer (8) at an image plane point (7), and moving the laser interferometer (8) to perform self-alignment imaging with an image plane measurement target ball to enable interference fringes on a CCD interface of the laser interferometer (8) to be collimated until the interference fringes are zero;
step 3.4, taking out an image plane measurement target ball to carry out system test, and measuring aberration of different fields of view through a laser interferometer (8) and an auxiliary spherical mirror (6); and carrying out simulation by taking the aberration of the multiple fields into optical design software, analyzing the fine adjustment direction and the fine adjustment amount of the sensitive lens, and performing optical fine adjustment according to the fine adjustment direction and the fine adjustment amount of the sensitive lens until the imaging quality of different fields meets the preset requirement.
2. The method for adjusting the full freeform surface multi-reflection off-axis optical system according to claim 1, wherein the step 1.2 is specifically:
step 1.2.1, installing a first reflecting mirror (1) at a preset installation position, and respectively measuring an included angle between a first back reference plane (11) of the first reflecting mirror (1) and an XOY plane of an initial coordinate system by using a space coordinate measuring device (110) to serve as a first pitching angle, and an included angle between a second back reference plane (12) of the first reflecting mirror (1) and the XOY plane of the initial coordinate system to serve as a first rotating angle;
step 1.2.2, sticking a cube mirror (9) on a second back reference plane (12); adopting a first auto-collimation theodolite (121) to be self-aligned with the cubic mirror (9) for monitoring the first pitching angle variation in real time; adopting a second auto-collimation theodolite (122) to be self-aligned with the cubic mirror (9) for monitoring the first rotation angle variation in real time;
step 1.2.3, enabling the first pitching angle and the first rotating angle to meet preset requirements by adjusting the trimming pad (10).
3. The method for adjusting the full freeform surface multi-reflector off-axis optical system according to claim 2, wherein in step 1.3, the step of enabling the position of the back intersection point (14) to meet the preset requirement by integrally translating the first reflector (1) is specifically as follows: in an initial coordinate system, according to the difference value between the actual coordinate and the theoretical coordinate of the back intersection point (14), the actual coordinate of the back intersection point (14) meets the preset requirement by integrally translating the first reflecting mirror (1); when the first reflecting mirror (1) is translated, the first autocollimation theodolite (121) and the second autocollimation theodolite (122) monitor the angle change condition of the cubic mirror (9) in real time, and the first pitching angle and the first rotating angle still meet preset requirements after the translation is completed.
4. The method for adjusting a full freeform surface multi-reflector off-axis optical system according to claim 3, wherein the step 2 specifically comprises:
with back intersection point (14) as origin of coordinates O 1 Establishing an installation and adjustment coordinate system O 1 -X 1 Y 1 Z 1 The method comprises the steps of carrying out a first treatment on the surface of the The X axis, the Y axis and the Z axis of the adjustment coordinate system are respectively parallel to the X axis, the Y axis and the Z axis of the initial coordinate system; and (3) accurately positioning the second reflecting mirror (2), the third reflecting mirror (3) and the fourth reflecting mirror (4) by using the methods of the step 1.2 and the step 1.3.
5. The method for adjusting the full freeform surface multi-reflection off-axis optical system according to claim 4, wherein the step 3.2 is specifically:
step 3.2.1, arranging a microscope (130) at an object plane point (5), moving the microscope (130) to perform self-alignment imaging with the object plane measurement target sphere, and marking the position of the self-alignment cross wire image of the object plane measurement target sphere at the moment if a CCD interface of the microscope (130) displays that the self-alignment cross wire image of the object plane measurement target sphere meets the requirement of sharp and no ghost;
and 3.2.2, removing the object plane measurement target ball, installing an auxiliary spherical mirror (6) at the object plane point (5), adjusting the position of the auxiliary spherical mirror (6) to enable the auto-collimation cross wire image of the auxiliary spherical mirror (6) to coincide with the object plane measurement target ball auto-collimation cross wire image marked in the step 3.2.1, finishing accurate positioning of the auxiliary spherical mirror (6) at the moment, and removing the microscope (130).
6. The method for adjusting a full freeform surface multi-reflector off-axis optical system according to any one of claims 1 to 5, wherein: the space coordinate measuring device (110) is a measuring mechanism formed by space networking of a three-coordinate measuring machine, a flexible joint arm measuring machine, a laser tracker, the three-coordinate measuring machine and the flexible joint arm measuring machine.
7. The method for adjusting a full freeform surface multi-reflector off-axis optical system according to claim 6, wherein the method comprises the steps of: the microscope (130) is a PSM tunable microscope.
CN202310143064.6A 2023-02-21 2023-02-21 Method for adjusting full free-form surface multi-reflection off-axis optical system Pending CN116224615A (en)

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