CN114486730A - Device and method for detecting deflection angle and internal defect of transparent body - Google Patents
Device and method for detecting deflection angle and internal defect of transparent body Download PDFInfo
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- CN114486730A CN114486730A CN202111525355.9A CN202111525355A CN114486730A CN 114486730 A CN114486730 A CN 114486730A CN 202111525355 A CN202111525355 A CN 202111525355A CN 114486730 A CN114486730 A CN 114486730A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/958—Inspecting transparent materials or objects, e.g. windscreens
Abstract
The invention provides a device and a method for detecting deflection angle and internal defect of a transparent body, wherein the device comprises a defect detection module, a deflection angle detection module, a clamping tool module and a control system; the clamping tool module comprises a six-degree-of-freedom motion platform and a clamp, and the clamp is driven by the six-degree-of-freedom motion platform to have six degrees of freedom; the transparent body is fixed on the clamp; the defect detection module is used for detecting the internal defects of the transparent body, and the deflection angle detection module is used for detecting the deflection angle of the transparent body; the clamping tool module drives the transparent body to move, so that the transparent body is detected by the two modules respectively; the control system is connected with the defect detection module and calculates the size of the internal defect, and the control system is connected with the deflection angle detection module and calculates the deflection angle. The invention improves the detection efficiency of the deflection angle and the internal defects of the optical transparent body, and covers more detectable optical transparent body types; the handling of the transparent body during inspection is avoided.
Description
Technical Field
The invention relates to the technical field of optical equipment detection, in particular to a device and a method for detecting deflection angle and internal defect of a transparent body.
Background
The optical transparent body is widely applied to various fields such as military affairs, scientific research, industry, medical treatment, protection and the like. The transparent body includes but is not limited to optical glass and optical plastic, and can also contain special liquid or gas which is easy to generate invisible or invisible defects such as bubbles, scratches, inclusions, defects and the like during production, processing or use. The tiny defects not only affect the appearance of various optical transparent bodies, but also seriously jeopardize the service performance and the light transmission performance of the optical transparent bodies.
Secondly, whether the human eyes or the detection equipment observe the object on the other side through the optical transparent body, whether the deflection angles of the light rays in different areas of the transparent body are inconsistent directly affects whether the observed object is deformed, which is also a problem that a user pays much attention to when observing the object on the other side through the optical transparent body.
The deflection angle of the light rays of the transparent body and the internal tiny defects are two indexes which need to be detected before the transparent body is put into use or under special use conditions. In the prior art, only one item can be detected, and the detection efficiency is greatly reduced.
Disclosure of Invention
In order to solve the above problems, the present invention proposes an apparatus for simultaneously detecting the deflection angle and internal minute defects of a transparent body. In order to achieve the purpose, the invention adopts the following specific technical scheme:
an apparatus for detecting deflection angles and internal defects of a transparent body, comprising: the device comprises a defect detection module, a deflection angle detection module, a clamping tool module and a control system;
the clamping tool module comprises a six-degree-of-freedom motion platform and a clamp, and the clamp is driven by the six-degree-of-freedom motion platform to have six degrees of freedom;
the transparent body is fixed on the clamp;
the defect detection module is used for detecting the internal defects of the transparent body, and the deflection angle detection module is used for detecting the deflection angle delta of the transparent body;
the clamping tool module drives the transparent body to move, so that the transparent body is detected by the defect detection module and the deflection angle detection module respectively;
the control system is connected with the defect detection module and calculates the size of the internal defect, and the control system is connected with the deflection angle detection module and calculates the deflection angle delta.
Further, the defect detection module comprises a first illumination light source, a first grating, a lens group, a second grating, a receiving objective and a first CCD detector which are sequentially arranged on the same axis;
the grating constants of the first grating and the second grating are the same;
the lens group is used for converging a view field;
the receiving objective lens is arranged at twice of the focal length of the lens group;
the first illumination light source illuminates the first grating to form a multi-slit light source, and enters the second grating after entering the lens group to generate interference fringes;
the first CCD detector obtains an image of the interference fringes through the receiving objective lens;
the transparent body is arranged on the emergent surface of the lens group to distort the interference fringes, and the control system calculates the size of the internal defect through the image change of the interference fringes.
Furthermore, the lens group is a double-cemented lens group.
Furthermore, the deflection angle detection module comprises a second illumination light source, a reticle dividing plate, an object space collimator, an iris, an image space collimator and a second CCD detector which are sequentially arranged along the propagation direction of the second illumination light source;
the reticle dividing plate is positioned on the focal plane of the object space parallel light pipe;
the focal plane of the second CCD detector is positioned on the focal plane of the image space collimator;
the transparent body is arranged between the object space collimator and the variable diaphragm; when the transparent body is not arranged in the deflection angle detection module, the second CCD detector collects the image of the reticle dividing plate as a reference image, and after the transparent body is arranged in the deflection angle detection module, the second CCD detector collects the image of the reticle dividing plate as a contrast image; the control system calculates the deflection angle δ by comparing the reference image and the comparison image.
Further, the six-degree-of-freedom motion platform comprises a rotary translation platform, a left translation platform, a right translation platform, a front translation platform, a rear translation platform and an upper translation platform and a lower translation platform;
the upper and lower translation tables are used for driving the transparent body to move up and down;
the left and right translation tables are used for driving the transparent body to move left and right;
the front and back translation tables are used for driving the transparent body to move back and forth;
the rotary translation table is used for driving the transparent body to rotate, so that the transparent body is detected by incident light rays with different incident angles.
Further, the clamp is a sealed cuboid cavity and is made of transparent materials.
Further, the clamp is a cuboid cavity with an opening at the top, and the clamp is made of transparent materials.
Furthermore, the deflection angle detection module comprises a second illumination light source, a reticle dividing plate, an object space collimator, an iris, an image space collimator and a second CCD detector which are sequentially arranged along the propagation direction of the second illumination light source;
the reticle dividing plate is positioned on the focal plane of the object space parallel light pipe;
the focal plane of the second CCD detector is positioned on the focal plane of the image space collimator;
the transparent body is arranged between the object space collimator and the variable diaphragm; the transparent body is arranged in front of and behind the deflection angle detection module, the second CCD detector respectively acquires images of the reticle, and the control system calculates the deflection angle delta by comparing the image change of the reticle;
the clamp is a cavity made of transparent materials.
A method of detecting deflection angles and internal defects of a transparent body, comprising the steps of:
s1, moving the six-degree-of-freedom motion platform to enable the transparent body to be arranged in the defect detection module or the deflection angle detection module;
s2, when the transparent body is arranged in the defect detection module:
s21, moving the six-degree-of-freedom motion platform to move a defect region to be measured of the transparent body to a preset measurement region of the defect detection module for measurement;
the defect detection module detects that the interference fringes are distorted, and the control system calculates the size of the internal defect through the image change of the interference fringes;
s22, after the measurement of the defect region to be measured is finished, the control system controls the six-degree-of-freedom motion platform to move, so that other unmeasured defect regions to be measured of the transparent body move to the preset measurement region, and the step S21 is repeated until the measurement of all the defect regions to be measured is finished;
s3, when the transparent body is arranged in the deflection angle detection module:
s31, auto-collimation zero calibration of a deflection angle detection module; a second CCD detector collects an image of the reticle as a reference image;
s32, moving the six-degree-of-freedom motion platform to move the region to be detected of the segregation angle of the transparent body to a preset measurement region of the deflection angle detection module; adjusting the incident angle of the second illumination light source through the movement of the rotary translation table;
the light emitted by the second illumination light source (21) uniformly illuminates the reticle and forms an image at infinite distance through the object space collimator, the image space collimator receives the image, and the second CCD detector collects the image of the reticle as a contrast image;
and S33, comparing the reference image with the comparison image by the control system and calculating the deflection angle delta.
The invention can obtain the following technical effects:
the invention relates to a device for simultaneously detecting the deflection angle and the internal micro defects of a transparent body. The transparent body comprises but not limited to optical glass and optical plastic, and can be gas or liquid, and the optical transparent body is not limited to a transparent body in a visible light wave band, but also comprises an optical transparent body in a non-visible light wave band. The optical transparent body is placed on the clamp, switching of the optical transparent body between the defect detection module and the deflection angle detection module is completed through up-and-down reciprocating motion of the six-degree-of-freedom motion platform, images collected by corresponding detectors in the two modules are processed and calculated through the control system, and finally calculation results of the two modules are obtained and displayed.
The invention can realize the detection of the deflection angle and the internal tiny defect of the optical transparent body at different positions and different incident angles. The automatic detection device is provided with a manual detection function and a full-automatic detection function, and can output a detection image and a detection result in real time in the detection process.
The invention greatly improves the deflection angle of the optical transparent body and the efficiency of detecting the internal tiny defects, and covers more detectable optical transparent body types; the handling of the optically transparent body in the detection is avoided. The invention can be used in normal indoor lighting environment without additional darkroom or darkbox, thereby greatly reducing the use cost and the time and space cost for carrying and detecting the optical transparent body.
Drawings
FIG. 1 is a schematic diagram of the structure of the device disclosed in the present invention;
FIG. 2 is a schematic structural diagram of a defect detection module according to the present disclosure;
FIG. 3 is a schematic structural diagram of a deflection angle detection module according to the present disclosure;
FIG. 4 is a schematic view of a reticle structure disclosed herein;
FIG. 5 is a schematic structural view of a clamping tool module disclosed in the present invention;
FIG. 6 is a schematic cross-sectional view of a fluid-carrying clamp according to the present disclosure;
FIG. 7 is a side view of the gas-filled clamp of the present disclosure;
FIG. 8 is a schematic cross-sectional view of a fluid-carrying clamp according to the present disclosure;
FIG. 9 is a schematic side view of the disclosed gas-filled clamp;
fig. 10 is a schematic structural diagram of functional modules of the control system disclosed in the present invention.
Reference numerals:
the device comprises a defect detection module 1, a first illumination light source 11, a first grating 12, a lens group 13, a second grating 14, a receiving objective 15, a first CCD detector 16, a deflection angle detection module 2, a second illumination light source 21, a reticle 22, an object space collimator 23, an iris diaphragm 24, an image space collimator 25, a second CCD detector 26, a clamping tool module 3, a clamp 30, a rotary translation table 31, a left translation table 32, a right translation table 32, a front translation table 33, a back translation table 34, a solid object to be measured 4, a liquid object to be measured 5 and a gas object to be measured 6.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention will be described in further detail with reference to the accompanying drawings and specific embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not to be construed as limiting the invention.
The invention aims to provide a device for simultaneously detecting the deflection angle and the internal defect of a transparent body. The borrowing and returning system provided by the invention is explained in detail through specific embodiments.
Fig. 1 shows the main structure of the apparatus for detecting a deflection angle and an internal defect of a transparent body of the present invention, as shown in fig. 1, comprising: the device comprises a defect detection module 1, a deflection angle detection module 2, a clamping tool module 3 and a control system. The clamping tool module 3 comprises a six-degree-of-freedom motion platform and a clamp 30, and the clamp 30 has six degrees of freedom under the driving of the six-degree-of-freedom motion platform. The whole device is placed on a six-degree-of-freedom motion platform to stabilize the working environment of the equipment. The whole device does not need to be placed in a darkroom or a darkbox, and the detection result of the equipment is not influenced by the common indoor lighting environment.
Fig. 2 shows the structure of the defect detection module of the present invention, and as shown in fig. 2, the defect detection module 1 includes a first illumination light source 11, a first grating 12, a lens group 13, a second grating 14, a receiving objective 15 and a first CCD detector 16, which are sequentially arranged on the same axis. The module observes the defect of the transparent body by means of interference fringes.
The first illumination light source 11 includes, but is not limited to, a visible light band, and the light source may include a single band or a composite band;
the first grating 12 and the second grating 14 are two gratings with completely consistent grating constants;
the lens group 13 is a double-cemented lens group and is used for converging a view field so as to facilitate observation of the first CCD detector 16; the change in the number of interference fringes can be observed by slightly displacing the lens group 13 back and forth in the optical axis direction;
wherein, the focusing plane of the receiving objective 15 needs to be adjusted to the rear surface of the lens set and placed at the position of twice the focal length of the lens set 13; reflecting the accurate position of the micro defect in the object to be measured based on the interference fringe, wherein the object to be measured needs to be close to the lens group as much as possible;
wherein the first CCD detector 16 is used to receive the interference fringes produced by the second grating 14.
Specifically, a single-waveband LED light source with a waveband of 495nm is selected; the specification of the two gratings is 60 lines/inch; a lens group with a focal length of 100mm is selected. The first illumination light source 11 illuminates the first grating 12 so that light passing through the first grating 12 becomes a multi-slit light source state, and light passing through each slit on the second grating 14 interferes with light passing through other slits, thereby generating interference fringes with sharp alternate light and dark outlines. When the device is used, an object to be detected, namely the optical transparent body is arranged on the clamp 30, and the object to be detected can be pushed into the defect detection module 1 through the movement of the six-degree-of-freedom motion platform; the interference fringe variation observed by the first CCD detector 16 is the variation caused by the minute defect of the transparent body.
Fig. 3 shows the structure of the segregation angle detection module of the present invention, and as shown in fig. 3, the deflection angle detection module 2 includes a second illumination light source 21, a reticle 22, an object-side collimator 23, an iris 24, an image-side collimator 25, and a second CCD detector 26, which are arranged in sequence along the propagation direction of the light source of the deflection angle detection module 2, and these elements are distributed on the same axis. The solid object 4 to be measured is placed between the object side collimator 23 and the variable diaphragm 24.
The reticle dividing plate 22 is placed between the second illumination light source 21 and the object side collimator 23, and is located on the focal plane of the object side collimator 23;
the size of the iris diaphragm 24 is adjustable, and the iris diaphragm is used for simulating the size of the pupil of an observer or the size of the entrance pupil of the second CCD detector 26 behind the optical transparent body;
wherein, the distance between the variable diaphragm 24 and the optical transparent body is adjustable, and the variable diaphragm is used for simulating the distance between the pupil of an observer or an observation device and the optical lens body when in use;
wherein, the focal plane of the second CCD detector 26 is placed on the focal plane of the image side collimator 25;
specifically, a collimator lighting source and a white light LED light source are selected; the object space collimator 23 is a collimator with a focal length of 80 mm; selecting an iris diaphragm 24 with phi 2 to simulate the pupil diameter of a normal human eye, and simulating the eye point distance of the human eye, wherein the interval between the iris diaphragm and an object to be tested is 12 mm; the image space collimator 25 is a collimator with a focal length of 120 mm; the reticle 22 is a grid reticle diagram as shown in fig. 4. In other embodiments, the reticle can be redesigned according to different requirements and usage conditions and calculation methods. The reticle dividing plates have various forms and different sizes, and are not limited to a single grid form. The deflection angle testing module adopts a relative measurement method, the second CCD detector 26 collects front and back images of the reticle 22 in a light path of the object to be tested, the front and back images are pushed to the deflection angle testing module, and software of the control system compares the front and back images and calculates the deflection angle of light passing through the object to be tested. That is, when the transparent body is not placed in the deflection angle detection module 2, the second CCD detector 26 collects the image of the reticle 22 as a reference image; after the transparent body is placed in the deflection angle detection module 2, the second CCD detector 26 collects the image of the reticle 22 as a comparison image, and the control system compares the change of the reference image and the comparison image.
Fig. 5 shows the structure of the clamping tool module of the present invention, and the clamping tool module 3 shown in fig. 5 includes a rotation translation stage 31, a left-right translation stage 32, a front-back translation stage 33, an upper-lower translation stage 34 and a clamp 30.
The up-down translation table 34 can drive the optical transparent body to move up and down, and the defect detection module and the deflection angle detection module are switched; and the optical transparent body can be driven to move up and down within the detection range of each module to detect different regions of the optical transparent body.
The left and right translation stages 32 can drive the optical transparent body to move left and right, and different regions of the optical transparent body are detected.
The front and back translation stage 33 can drive the optical transparent body to move back and forth, and the distance between human eyes or observation equipment and the optical transparent body in actual use is simulated by adjusting the front and back positions of the optical transparent body.
The rotation translation stage 31 can drive the optical transparent body to rotate around the center of the rotation translation stage, and the optical transparent body is detected under the simulation of incident light rays at different angles.
Wherein the jig 30 is located at the uppermost of the up-down translation stages 34. The fixture 30 includes various forms of clamping methods and tooling. For example, the solid optical transparent body is clamped by one or two freely rotatable wide-mouth u-shaped clamps, and the clamps are provided with silica gel pads which can protect an object to be detected; or a square container made of specific materials is loaded with transparent, semitransparent liquid or opaque liquid which can transmit light rays with special wave bands; or transparent, semitransparent gas or opaque gas which can transmit light of special wave bands can be loaded in the square sealed container made of special materials. The specific material is a material matching the transmittance of the object to be measured. If the object to be measured passes through the wavelength band of 1000-1500nm, the clamp material correspondingly passes through the wavelength band.
Preferably, fig. 6 to 7 show the structure of the liquid-loading jig, and as shown in fig. 6 to 7, the jig 30 is a rectangular parallelepiped cavity with an opening at the top, which can be directly placed on the rotating platform; the front panel and the rear panel of the clamp 30 are made of transparent materials with the thickness of 1mm and JGS 1; the distance between the front and rear panels of the jig 30 is 1mm, that is, the thickness of the liquid analyte 5 is 1 mm.
Preferably, fig. 8-9 show the structure of the gas-filled clamp, as shown in fig. 8-9, the clamp 30 is a sealed cuboid cavity, a round hole for filling gas is reserved at the upper part, and a sealing plug is used for sealing the round hole; the front panel and the rear panel of the clamp 30 are made of transparent materials with the thickness of 1mm and JGS 1; the distance between the front panel and the rear panel of the clamp 30 is 1mm, namely the thickness of the gas object to be measured 6 is 1 mm; the fixture 30 may be placed directly on the rotating platform.
Fig. 10 is a schematic structural diagram of functional modules of the control system disclosed in the present invention, and as shown in fig. 10, the control system includes an image acquisition module for controlling image acquisition of the first CCD detector 16 and the second CCD detector 16; the motor control module is used for controlling the motion of the six-freedom-degree motion platform through the motor control module when the rotary translation platform 31, the left and right translation platforms 32, the front and back translation platforms 33 and the upper and lower translation platforms 34 move under the control of the motors respectively; the calculation result module is used for calculating and displaying the measurement result; the interface display module is used for displaying the measurement result on the display; the resource information module is used for recording the basic information. In other embodiments, modifications may be made to adapt to different usage requirements.
A method of detecting deflection angles and internal defects of a transparent body, comprising the steps of:
s1, the six-degree-of-freedom motion platform moves to enable the transparent body to be arranged in the defect detection module 1 or the deflection angle detection module 2.
S2, when the transparent body is arranged in the defect detection module 1:
s21, powering on the light source and the CCD detector in the module;
and the six-degree-of-freedom motion platform moves to enable a defect region to be measured of the transparent body to move to a preset measurement region of the defect detection module 1 for measurement. Specifically, the transparent body has a plurality of defect regions to be measured, and one of the defect regions to be measured is measured first. The control system controls the up-down translation table to push the object to be detected into the light path of the micro defect detection module; the control system controls the front and rear translation stages to enable the object to be detected to be close to the lens group as much as possible; the control system controls the left and right translation tables to move a defect to-be-measured area of the to-be-measured object into the measurement area. The transparent body only has a defect region to be measured, and the measurement of the module is finished.
When the internal defect exists in the first defect region to be detected, the interference fringe is distorted; and the control system calculates the size of the internal defect through the image change of the interference fringe. Specifically, light emitted by the first illumination light source passes through the first grating to form a multi-slit light source, and when the light passes through the second grating, light of each slit on the second grating interferes with light passing through other slits, so that interference fringes with clear light and dark alternate outlines are generated; when a micro defect exists in the object to be detected, the interference fringe is distorted, and the defect detection module 1 detects the distortion of the interference fringe; the control system calculates the size of the defect.
S22, after the measurement of the first defect region to be measured is finished, the control system controls the left and right translation table 32 to move, so that other defect regions to be measured of the transparent body move to the preset measurement region, and the step S21 is repeated until the measurement of all the defect regions to be measured is finished.
S3, when the transparent body is arranged in the deflection angle detection module 2:
s31, powering on the illumination light source and the CCD detector in the module; the deflection angle detection module 2 performs auto-collimation zero calibration; the second CCD detector 26 collects the image of the reticle 22 as a reference image;
s32, moving the six-degree-of-freedom motion platform to move the region to be measured of the segregation angle of the transparent body to a preset measurement region of the deflection angle detection module 2; the incident angle is adjusted by moving the rotary translation stage 31. Specifically, the control system controls the upper and lower translation tables to push the object to be detected to the optical path of the deflection angle detection module; the control system controls the front and rear translation stages, adjusts the distance between the object to be detected and the iris diaphragm, and simulates the distance between a detector and the object to be detected under the condition of human eyes or actual use; adjusting the size of the iris diaphragm to simulate the size of the pupil of the human eye or the size of the entrance pupil of the actually used detector; the control system controls the left and right translation tables to move the region to be measured of the object to be measured into the measurement region; the control system controls the rotary translation table, adjusts the incident light angle and simulates the incident angle under the actual use condition;
the reticle 22 is uniformly illuminated by light emitted by the second illumination light source 21, an image of the infinite reticle is formed by the object side collimator 23, the image side collimator 25 receives the image of the infinite reticle, and the second CCD detector 26 collects the image of the reticle 22 as a contrast image;
and S33, comparing the reference image with the comparison image by the control system and calculating the deflection angle delta. The deflection angle testing module adopts a relative measurement method, a CCD detector collects front and back images of the reticle in a light path of the object to be tested, the front and back images are compared by the control system, and the numerical value of the deflection angle of the light after passing through the object to be tested is calculated.
When the transparent body is gas or liquid, the calculation step of the deflection angle delta comprises the following steps:
s331, coordinates of a measuring point on the reticle 22 are x and y, and coordinates of the measuring point on the reference image are x1,y1The deflection angle delta of the clamp 30JGS1Represented by the formula:
wherein f is the focal length of the image side collimator 25;
s332, the coordinate of the measuring point on the comparison image is x2,y2Total deflection angle delta0Represented by the formula:
s333, the deflection angle delta of the transparent body is expressed by the following formula:
δ＝δ0-δJGS1 (3)
in particular, when testing gas or liquid optical transparencies, the deflection angle effect introduced by the fixture needs to be removed during the calculation process. Specifically, under the condition of not loading a gas or liquid optical transparent body, the deflection angle delta of the tool is measuredJGS1(ii) a The deflection angle δ is calculated by formula (3).
In the description herein, references to the description of the term "one embodiment," "some embodiments," "an example," "a specific example," or "some examples," etc., mean that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the invention. In this specification, the schematic representations of the terms used above are not necessarily intended to refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples. Furthermore, various embodiments or examples and features of different embodiments or examples described in this specification can be combined and combined by one skilled in the art without contradiction.
Although embodiments of the present invention have been shown and described above, it is understood that the above embodiments are exemplary and should not be construed as limiting the present invention, and that variations, modifications, substitutions and alterations can be made to the above embodiments by those of ordinary skill in the art within the scope of the present invention.
The above embodiments of the present invention should not be construed as limiting the scope of the present invention. Any other corresponding changes and modifications made according to the technical idea of the present invention should be included in the protection scope of the claims of the present invention.
Claims (10)
1. An apparatus for detecting deflection angles and internal defects of a transparent body, comprising: the device comprises a defect detection module (1), a deflection angle detection module (2), a clamping tool module (3) and a control system;
the clamping tool module (3) comprises a six-degree-of-freedom motion platform and a clamp (30), and the clamp (30) has six degrees of freedom under the driving of the six-degree-of-freedom motion platform;
the transparent body is fixed on the clamp (30);
the defect detection module (1) is used for detecting internal defects of the transparent body, and the deflection angle detection module (2) is used for detecting a deflection angle delta of the transparent body;
the clamping tool module (3) drives the transparent body to move, so that the transparent body is detected by the defect detection module (1) and the deflection angle detection module (2) respectively;
the control system is connected with the defect detection module (1) and calculates the size of the internal defect, and the control system is connected with the deflection angle detection module (2) and calculates the deflection angle delta.
2. The device for detecting the deflection angle and the internal defect of a transparent body according to claim 1, wherein the defect detection module (1) comprises a first illumination light source (11), a first grating (12), a lens group (13), a second grating (14), a receiving objective (15) and a first CCD detector (16) which are sequentially arranged on the same axis;
the grating constants of the first grating (12) and the second grating (14) are the same;
the lens group (13) is used for converging a field of view;
the receiving objective (15) is placed at twice the focal length of the lens group (13);
the first illumination light source (11) illuminates the first grating (12) to form a multi-slit light source, and enters the second grating (14) after being incident on the lens group (13) to generate interference fringes;
the first CCD detector (16) acquires an image of the interference fringes through the receiving objective lens (15);
the transparent body is arranged on the emergent surface of the lens group (13) to distort the interference fringes, and the control system calculates the size of the internal defect through the image change of the interference fringes.
3. The device for detecting the deflection angle and the internal defects of a transparent body according to claim 2, characterized in that the lens group (13) is a double cemented lens group.
4. The device for detecting the deflection angle and internal defects of a transparent body according to claim 1, wherein the deflection angle detection module (2) comprises a second illumination light source (21), a reticle (22), an object-side collimator (23), an iris (24), an image-side collimator (25) and a second CCD detector (26) which are arranged in sequence along the propagation direction of the second illumination light source (21);
the reticle dividing plate (22) is positioned on the focal plane of the object space collimator (23);
the focal plane of the second CCD detector (26) is positioned on the focal plane of the image side collimator (25);
the transparent body is arranged between the object side collimator (23) and the variable diaphragm (24); when the transparent body is not arranged in the deflection angle detection module (2), the second CCD detector (26) collects the image of the reticle (22) as a reference image, and after the transparent body is arranged in the deflection angle detection module (2), the second CCD detector (26) collects the image of the reticle (22) as a comparison image; the control system calculates the deflection angle δ by comparing the reference image and the comparison image.
5. The apparatus for detecting the deflection angle and internal defects of a transparent body according to claim 1, wherein the six-degree-of-freedom motion platform comprises a rotation translation stage (31), a left-right translation stage (32), a front-back translation stage (33) and an up-down translation stage (34);
the up-down translation table (34) is used for driving the transparent body to move up and down;
the left and right translation tables (32) are used for driving the transparent body to move left and right;
the front and back translation table (33) is used for driving the transparent body to move back and forth;
the rotary translation table (31) is used for driving the transparent body to rotate, so that the transparent body is detected by incident light rays with different incident angles.
6. The apparatus for detecting the deflection angle and internal defects of a transparent body according to claim 1, wherein the clamp (30) is a sealed rectangular parallelepiped cavity, and the clamp (30) is made of a transparent material.
7. The apparatus for detecting the deflection angle and internal defects of a transparent body according to claim 1, wherein the clamp (30) is a rectangular parallelepiped cavity with an opening at the top, and the clamp (30) is made of a transparent material.
8. The device for detecting the deflection angle and internal defects of a transparent body according to claim 2, wherein the deflection angle detection module (2) comprises a second illumination light source (21), a reticle (22), an object-side collimator (23), an iris (24), an image-side collimator (25) and a second CCD detector (26) which are arranged in sequence along the propagation direction of the second illumination light source (21);
the reticle dividing plate (22) is positioned on the focal plane of the object space collimator (23);
the focal plane of the second CCD detector (26) is positioned on the focal plane of the image side collimator (25);
the transparent body is arranged between the object side collimator (23) and the variable diaphragm (24); the transparent body is arranged in front of and behind the deflection angle detection module (2), the second CCD detector (26) respectively acquires images of the reticle (22), and the control system calculates the deflection angle delta by comparing the image change of the reticle (22);
the clamp (30) is a cavity made of transparent materials.
9. A method of detecting deflection angles and internal defects in a transparent body using the apparatus of claim 8, comprising the steps of:
s1, moving the six-degree-of-freedom motion platform to enable the transparent body to be arranged in the defect detection module (1) or the deflection angle detection module (2);
s2, when the transparent body is arranged in the defect detection module (1):
s21, moving the six-degree-of-freedom motion platform to move a defect region to be measured of the transparent body to a preset measurement region of the defect detection module (1) for measurement;
the defect detection module (1) detects that the interference fringes are distorted, and the control system calculates the size of the internal defect through the image change of the interference fringes;
s22, after the measurement of the defect region to be measured is completed, the control system controls the six-degree-of-freedom motion platform to move, so that other unmeasured defect regions to be measured of the transparent body are moved to the preset measurement region, and the step S21 is repeated until the measurement of all the defect regions to be measured is completed;
s3, when the transparent body is arranged in the deflection angle detection module (2):
s31, the deflection angle detection module (2) performs auto-collimation and zero calibration; the second CCD detector (26) collects the image of the reticle (22) as a reference image;
s32, moving the six-degree-of-freedom motion platform to move the region to be measured of the segregation angle of the transparent body to a preset measurement region of the deflection angle detection module (2); adjusting the incidence angle of the second illumination light source (21) through the movement of the rotary translation stage (41);
the reticle (22) is uniformly illuminated by light emitted by the second illumination light source (21), an infinite image is formed by the object side collimator (23), the image side collimator (25) receives the image, and the second CCD detector (26) collects the image of the reticle (22) as a contrast image;
and S33, comparing the reference image with the comparison image by the control system and calculating the deflection angle delta.
10. The method of claim 9, wherein when the transparent body is a gas or a liquid, the step of calculating the deflection angle δ in step S33 comprises:
s331, coordinates of a measuring point on the reticle (22) are (x, y), and coordinates of the measuring point on the reference image are (x, y)1,y1) The deflection angle delta of the clamp (30)JGS1Represented by the formula:
wherein f is the focal length of the image side collimator (25);
s332, the coordinate of the measuring point on the comparison image is (x)2,y2) Total deflection angle delta0Represented by the formula:
s333, the deflection angle delta of the transparent body is expressed by the following formula:
δ＝δ0-δJGS1 (3)。
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| CN202111525355.9A CN114486730A (en) | 2021-12-14 | 2021-12-14 | Device and method for detecting deflection angle and internal defect of transparent body |
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| Application Number | Priority Date | Filing Date | Title |
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| CN202111525355.9A CN114486730A (en) | 2021-12-14 | 2021-12-14 | Device and method for detecting deflection angle and internal defect of transparent body |
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