CN114481044B - Multi-crucible segmented vacuum coating chamber - Google Patents
Multi-crucible segmented vacuum coating chamber Download PDFInfo
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- CN114481044B CN114481044B CN202210153513.0A CN202210153513A CN114481044B CN 114481044 B CN114481044 B CN 114481044B CN 202210153513 A CN202210153513 A CN 202210153513A CN 114481044 B CN114481044 B CN 114481044B
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- 238000001771 vacuum deposition Methods 0.000 title claims abstract description 30
- 230000005540 biological transmission Effects 0.000 claims abstract description 28
- 239000000463 material Substances 0.000 claims abstract description 27
- 230000007246 mechanism Effects 0.000 claims abstract description 6
- 238000010438 heat treatment Methods 0.000 claims abstract description 5
- 230000011218 segmentation Effects 0.000 claims description 3
- 230000000149 penetrating effect Effects 0.000 claims 2
- 238000000576 coating method Methods 0.000 abstract description 20
- 239000011248 coating agent Substances 0.000 abstract description 18
- 238000007747 plating Methods 0.000 abstract description 8
- 238000005086 pumping Methods 0.000 abstract 1
- 239000010408 film Substances 0.000 description 12
- 239000000758 substrate Substances 0.000 description 11
- 238000000034 method Methods 0.000 description 10
- 238000010586 diagram Methods 0.000 description 9
- 230000009471 action Effects 0.000 description 6
- 230000008569 process Effects 0.000 description 5
- 238000005096 rolling process Methods 0.000 description 5
- 238000005299 abrasion Methods 0.000 description 2
- 230000006978 adaptation Effects 0.000 description 2
- 238000000605 extraction Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 230000002035 prolonged effect Effects 0.000 description 2
- 238000006722 reduction reaction Methods 0.000 description 2
- 239000003638 chemical reducing agent Substances 0.000 description 1
- 238000009833 condensation Methods 0.000 description 1
- 230000005494 condensation Effects 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000007772 electroless plating Methods 0.000 description 1
- 239000003792 electrolyte Substances 0.000 description 1
- 238000009713 electroplating Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
Classifications
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/28—Vacuum evaporation by wave energy or particle radiation
- C23C14/30—Vacuum evaporation by wave energy or particle radiation by electron bombardment
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- Chemical & Material Sciences (AREA)
- Health & Medical Sciences (AREA)
- Toxicology (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Abstract
The invention belongs to the technical field of coating equipment, and particularly relates to a multi-crucible segmented vacuum coating chamber which comprises a vacuum box body, wherein a motor and an electron gun for heating a material to be coated are arranged in the vacuum box body, an observation mechanism is arranged at the front end of the vacuum box body, a rotating disc is rotatably arranged in the vacuum box body, the output end of the motor is in transmission connection with the rotating disc, and a plurality of crucibles are arranged on the rotating disc. The purpose is that: the vacuum plating device has the advantages that different materials to be plated are supported by the plurality of crucibles, the rotating disc provided with the crucibles is rotated by the motor, the problem that when the plating is carried out in a segmented mode, the plating chamber can only be opened to replace the heated materials to be plated in the crucibles, the vacuum degree of the plating chamber is damaged, and if the plating is to be continued, the vacuum pumping can only be carried out on the plating chamber again, so that the problem of inconvenient use is avoided.
Description
Technical Field
The invention belongs to the technical field of coating equipment, and particularly relates to a multi-crucible segmented vacuum coating chamber.
Background
It is known that the surface of certain materials, once coated with a thin film, can be provided with a number of new and good physical and chemical properties. In the 70 s of the 20 th century, methods for coating a film on the surface of an object have been mainly electroplating and electroless plating. The former is to electrolyze an electrolyte by energizing, and the electrolyzed ions are plated on the surface of a substrate as the other electrode, so that the condition of such plating is required that the substrate is a good conductor of electricity and the film thickness is difficult to control. The latter adopts chemical reduction method, the film material must be prepared into solution, and can be quickly involved in reduction reaction, and said film plating method not only has poor film binding strength, but also is not uniform and easy to control, at the same time can produce a large quantity of waste liquor, and can produce serious pollution. Therefore, these two coating processes, which are known as wet coating processes, are greatly limited.
The vacuum coating technology is to place the material to be coated and the substrate to be coated in a vacuum chamber, heat the material to be coated by a certain method to evaporate, and spray the material to the surface of the substrate to be coated to form a film by condensation.
The existing vacuum coating machine is characterized in that a material to be coated in a crucible is heated in a vacuum chamber through an electron gun, so that the material to be coated is evaporated and flies to be sputtered on the surface of a substrate to be coated to be condensed and formed.
In the actual use process of the vacuum coating machine, when the substrate to be coated is subjected to sectional coating, the coating chamber can only be opened to replace the material to be coated which is heated in the crucible, so that the vacuum degree of the coating chamber is destroyed, and if the coating is continued, the coating chamber can only be subjected to vacuum extraction again, so that the vacuum coating machine is inconvenient to use.
Disclosure of Invention
The purpose of the invention is that: the utility model provides a multi-crucible subsection vacuum coating chamber, receives different materials that wait to plate through a plurality of crucibles to rotate the rolling disc that installs the crucible by the motor, can avoid when the segmentation coating film, can only go on through opening the coating chamber, the mode of changing to wait to plate the material that is heated in the crucible, destroyed the vacuum degree of coating chamber, if want to continue the coating film, can only carry out vacuum extraction again to the coating chamber, inconvenient problem of use.
In order to achieve the technical purpose, the invention adopts the following technical scheme:
the utility model provides a many crucibles segmentation vacuum coating room, includes the vacuum box, install the motor in the vacuum box and be used for heating the electron gun of waiting to plate the material, the vacuum box front end is equipped with viewing mechanism, still rotate in the vacuum box and install the rolling disc, the output and the rolling disc transmission of motor are connected, install a plurality of crucibles on the rolling disc.
Further defined, a baffle is rotatably mounted within the vacuum box. By means of the structural design, when the rotating disc is rotated, the baffle plate can be rotated to the position right above the rotating disc, the rotating disc is shielded, so that the problem that the quality of a plated film is affected due to the fact that the residual material to be plated in the crucible is continuously sputtered onto a substrate after the material to be plated is continuously evaporated at the residual temperature is avoided.
Further defined, a transmission structure is mounted between the baffle and the rotating disc. By means of the structural design, the baffle and the rotating disc are connected through the transmission structure, the use quantity of motors can be reduced, and cost is saved.
Further limited, the transmission structure includes gear, rack, first rotation piece and reciprocal frame, reciprocal frame slidable mounting is on the vacuum box, the motor drives reciprocal frame back and forth movement, rack fixed mounting is on reciprocal frame, gear and rack engagement, gear and first rotation piece are all rotated and are installed on the vacuum box, gear edge fixed mounting has first otic placode, fixed mounting has first pivot on the first otic placode, fixed mounting has the spliced pole on the first rotation piece, the linking arm is radially installed to the spliced pole upper end, baffle fixed mounting is at the end of linking arm, first bar groove has still radially been seted up on the first rotation piece, first pivot wears to establish in first bar inslot. By means of the structural design, the motor drives the reciprocating frame to move back and forth, the gear can be driven to rotate forward and reversely, the first rotating piece is driven to rotate forward and reversely, shielding and opening of the baffle plate to the rotating disc are achieved, in the shielding and opening process, along with rotation of the first rotating piece, after the first rotating shaft is separated from the first strip-shaped groove, the gear continues to rotate, the baffle plate is not moved, and hovering of the baffle plate is achieved.
Further limited, the first rotating piece is provided with first fan-shaped notches on two sides of the first bar-shaped groove, the gear is fixedly provided with a first limiting disc, the diameter size of the first limiting disc is the same as that of the first fan-shaped notches, and the first limiting disc is also provided with a first avoiding notch. By means of the structural design, after the first rotating shaft is separated from the first strip-shaped groove, the outer wall of the first limiting disc is in contact with the inner wall of the first fan-shaped notch, the position of the first rotating piece is limited, the first rotating piece is prevented from continuously rotating under the action of inertia, and therefore the baffle is prevented from hovering; until the first rotating shaft reenters the first strip-shaped groove, the outer wall of the first limiting disc is separated from contact with the inner wall of the first fan-shaped notch, and the first rotating member is driven to rotate again by the rotation of the first rotating shaft.
Further limited, the transmission structure still includes second rotation piece and the connecting plate of rotation installation on the vacuum box, the edge fixed mounting of connecting plate has the second otic placode, fixed mounting has the third pivot on the second otic placode, second rotation piece fixed mounting is in the below of rolling disc, evenly seted up many second bar grooves on the second rotation piece, reciprocating frame includes horizontal pole and vertical pole, horizontal pole tip and the middle part fixed connection of vertical pole, rack fixed mounting is on the horizontal pole, the sliding tray has been seted up on the vertical pole, the power output shaft fixed connection of connecting plate and motor, fixed mounting has the swing arm on the connecting plate, swing arm free end fixed mounting has the second pivot, the second pivot wears to establish in the sliding tray. The structure design realizes the transmission connection between the power output shaft of the motor and the rotating disc through the mutual matching between the third rotating shaft on the connecting plate and the second strip-shaped groove on the second rotating piece, and the second rotating piece is driven to intermittently rotate by the rotation of the connecting plate, so that the rotating disc is driven to rotate, and the position of the crucible is changed; and then the swing arm on the connecting plate drives the second rotating shaft to rotate, so as to drive the reciprocating frame to move left and right, and further drive the baffle to rotate.
Further limited, the second rotating piece is provided with a second fan-shaped notch between two adjacent second strip-shaped grooves, the connecting plate is fixedly provided with a second limiting disc, the diameter size of the second limiting disc is the same as that of the second fan-shaped notch, and the second limiting disc is provided with a second avoiding notch. In the structural design, after the third rotating shaft is separated from the second bar-shaped groove, the outer wall of the second limiting disc is contacted with the inner wall of the second fan-shaped notch to limit the position of the second rotating piece, so that the second rotating piece is prevented from continuously rotating under the action of inertia, and the rotating disc is fixed at the current position; until the third rotating shaft reenters the new second bar-shaped groove, the outer wall of the second limiting disc is separated from contact with the inner wall of the second fan-shaped notch, and the second rotating piece is driven to rotate again by the rotation of the third rotating shaft.
Further defined, a plurality of diagonal rods are also obliquely mounted between the cross bars and the longitudinal bars. The structural design strengthens the connection strength between the cross rod and the longitudinal rod through the diagonal rod, and has simple structure and strong practicability.
Further defined, shaft sleeves are sleeved on the first rotating shaft, the second rotating shaft and the third rotating shaft. By means of the structural design, the shaft sleeve is used for replacing the first rotating shaft/second rotating shaft to be in contact with the first bar-shaped groove/sliding groove, abrasion of the first rotating shaft/second rotating shaft is avoided, the service life is prolonged, and the practicability is high.
The invention adopting the technical scheme has the following advantages:
1. different materials to be plated are received through a plurality of crucibles, and a rotating disc provided with the crucibles is rotated by a motor, so that the problems that when the coating is carried out in a segmented mode, the coating chamber is opened, the heated materials to be plated in the crucibles are replaced, the vacuum degree of the coating chamber is damaged, and if the coating is continued, the coating chamber is extracted again, and the use is inconvenient are avoided;
2. the baffle plate is rotatably arranged, so that the rotating disc is shielded in the rotating process of the rotating disc, and the problems that the quality of a plated film is influenced due to the fact that the residual material to be plated in the crucible is continuously sputtered onto a substrate to be plated after the material to be plated is continuously evaporated at the residual temperature are avoided;
3. the baffle plate is connected with the rotating disc through the transmission structure, so that the use quantity of motors can be reduced, and the cost is saved;
4. through the mutual matching of the first fan-shaped notches at the two sides of the first rotating piece and the first limiting disc on the gear, after the first rotating shaft is separated from the first strip-shaped groove, the outer wall of the first limiting disc is contacted with the inner wall of the first fan-shaped notch, the position of the first rotating piece is limited, and the first rotating piece is prevented from continuously rotating under the action of inertia, namely, the baffle is enabled to hover;
5. through the mutual matching of the second fan-shaped notch on the second rotating piece and the second limiting disc on the connecting plate, when the third rotating shaft is separated from the second strip-shaped groove, the outer wall of the second limiting disc is contacted with the inner wall of the second fan-shaped notch, the position of the second rotating piece is limited, the second rotating piece is prevented from continuously rotating under the action of inertia, and the rotating disc is kept at the position.
Drawings
The invention can be further illustrated by means of non-limiting examples given in the accompanying drawings;
FIG. 1 is a schematic diagram of a multi-crucible segmented vacuum coating chamber embodiment of the present invention;
FIG. 2 is a schematic view of a multi-crucible segmented vacuum coating chamber according to an embodiment of the present invention with a vacuum box removed;
FIG. 3 is a schematic view of a gear portion of an embodiment of a multi-crucible segmented vacuum coating chamber according to the present invention;
FIG. 4 is a schematic view of the structure of the first rotating member and the baffle portion of an embodiment of a multi-crucible segmented vacuum coating chamber of the present invention;
FIG. 5 is a schematic view of the structure of a rotor and a second rotor portion of a multi-crucible segmented vacuum coating chamber embodiment of the present invention;
FIG. 6 is a schematic view of a second spacing disc portion of an embodiment of a multi-crucible segmented vacuum coating chamber according to the present invention;
FIG. 7 is a schematic diagram of a transmission structure of a multi-crucible segment vacuum coating chamber according to one embodiment of the present invention;
FIG. 8 is a second schematic diagram of the transmission structure of a multi-crucible segment vacuum coating chamber according to one embodiment of the present invention;
FIG. 9 is a schematic diagram III of the transmission structure of a multi-crucible segment vacuum coating chamber according to one embodiment of the present invention;
FIG. 10 is a schematic diagram of a transmission structure in an embodiment of a multi-crucible segmented vacuum coating chamber according to the present invention;
FIG. 11 is a schematic diagram of a transmission structure of a multi-crucible segment vacuum coating chamber according to an embodiment of the present invention;
FIG. 12 is a schematic diagram of a transmission structure of a multi-crucible segment vacuum coating chamber according to one embodiment of the present invention;
FIG. 13 is a schematic diagram of a transmission structure of a multi-crucible segment vacuum coating chamber according to one embodiment of the present invention;
FIG. 14 is a schematic view of a transmission structure of a multi-crucible segment vacuum coating chamber according to one embodiment of the present invention;
FIG. 15 is a schematic diagram of a transmission structure of a multi-crucible segment vacuum coating chamber according to one embodiment of the present invention;
the main reference numerals are as follows:
a rotating disc 1, a crucible 11,
Baffle 2, vacuum box 20, cabinet door 21, observation tube 22, shielding plate 23,
A rack 30, a gear 31, a first lug 311, a first rotating shaft 312,
A second rotating member 4, a second bar-shaped groove 401, a second fan-shaped notch 402,
Cross bar 41, longitudinal bar 42, sliding groove 420, diagonal bar 43,
A second limiting disc 5, a connecting plate 50, a second lug plate 501, a third rotating shaft 502, a second avoiding notch 503,
A swing arm 51, a second rotating shaft 52,
A first rotating member 6, a connecting post 601, a connecting arm 602,
The first bar-shaped groove 61, the first fan-shaped notch 62, the first limiting disc 63 and the first avoiding notch 630.
Detailed Description
The present invention will be described in detail below with reference to the drawings and the specific embodiments, wherein like or similar parts are designated by the same reference numerals throughout the drawings or the description, and implementations not shown or described in the drawings are in a form well known to those of ordinary skill in the art. In addition, directional terms such as "upper", "lower", "top", "bottom", "left", "right", "front", "rear", etc. in the embodiments are merely directions with reference to the drawings, and are not intended to limit the scope of the present invention.
As shown in fig. 1 to 15, the multi-crucible segmented vacuum coating chamber comprises a vacuum box 20, wherein a motor and an electron gun for heating a material to be coated are installed in the vacuum box 20, an observation mechanism is arranged at the front end of the vacuum box 20 and comprises an observation cylinder 22 and a shielding plate 23, a window is formed in the front end of the vacuum box 20, a cabinet door 21 is hinged to the window, a through hole is formed in the cabinet door 21, the observation cylinder 22 is installed in the through hole, a transparent observation window is installed at the free end of the observation cylinder 22, a shielding plate 23 is installed at the outer side of the transparent observation window at the free end of the observation cylinder 22, a steam shielding mechanism is movably installed in the observation cylinder 22, a rotating disc 1 is rotatably installed in the vacuum box 20, the output end of the motor is in transmission connection with the rotating disc 1, and a plurality of crucibles 11 are installed on the rotating disc 1.
A baffle plate 2 is also rotatably arranged in the vacuum box body 20. When the rotating disc 1 is rotated, the baffle plate 2 can be rotated to the position right above the rotating disc 1, and the rotating disc 1 is shielded, so that the problem that the quality of a plated film is affected due to the fact that the residual material to be plated in the crucible 11 is continuously sputtered onto a substrate after the material is continuously evaporated at the residual temperature is avoided.
A transmission structure is arranged between the baffle plate 2 and the rotating disc 1. The baffle 2 and the rotating disc 1 are connected through the transmission structure, so that the use quantity of motors can be reduced, and the cost is saved.
The transmission structure comprises a gear 31, a rack 30, a first rotating member 6 and a reciprocating frame, wherein the reciprocating frame is slidably arranged on the vacuum box 20, a motor drives the reciprocating frame to move back and forth, the rack 30 is fixedly arranged on the reciprocating frame, the gear 31 is meshed with the rack 30, the gear 31 and the first rotating member 6 are rotatably arranged on the vacuum box 20, a first lug plate 311 is fixedly arranged at the edge of the gear 31, a first rotating shaft 312 is fixedly arranged on the first lug plate 311, a connecting column 601 is fixedly arranged on the first rotating member 6, a connecting arm 602 is radially arranged at the upper end of the connecting column 601, a baffle 2 is fixedly arranged at the tail end of the connecting arm 602, a first strip-shaped groove 61 is radially formed in the first rotating member 6, and the first rotating shaft 312 penetrates through the first strip-shaped groove 61. The motor drives the reciprocating frame to move back and forth, so that the gear 31 can be driven to rotate forward and reversely, the first rotating piece 6 is driven to rotate forward and reversely, shielding and opening of the baffle plate 2 to the rotating disc 1 are achieved, in the shielding and opening process, along with rotation of the first rotating piece 6, after the first rotating shaft 312 is separated from the first strip-shaped groove 61, the gear 31 continues to rotate, the baffle plate 2 is not moved, and hovering of the baffle plate 2 is achieved.
The first rotating member 6 is provided with a first sector notch 62 on two sides of the first bar-shaped groove 61, a first limiting disc 63 is fixedly mounted on the gear 31, the diameter size of the first limiting disc 63 is the same as the diameter size of the first sector notch 62, and a first avoiding notch 630 is further formed on the first limiting disc 63. When the first rotating shaft 312 is separated from the first bar-shaped groove 61, the outer wall of the first limiting disc 63 contacts with the inner wall of the first fan-shaped notch 62 to limit the position of the first rotating member 6, so that the first rotating member 6 is prevented from continuously rotating under the action of inertia, namely, the baffle plate 2 is prevented from hovering; until the first rotating shaft 312 reenters the first bar-shaped groove 61, at this time, the outer wall of the first limiting disc 63 is out of contact with the inner wall of the first fan-shaped notch 62, and the first rotating member 6 is driven to rotate again by the rotation of the first rotating shaft 312.
The transmission structure further comprises a second rotating part 4 and a connecting plate 50 which are rotatably arranged on the vacuum box body 20, a second lug plate 501 is fixedly arranged at the edge of the connecting plate 50, a third rotating shaft 502 is fixedly arranged on the second lug plate 501, the second rotating part 4 is fixedly arranged below the rotating disc 1, a plurality of second bar-shaped grooves 401 are uniformly formed in the second rotating part 4, the reciprocating frame comprises a cross rod 41 and a longitudinal rod 42, the end part of the cross rod 41 is fixedly connected with the middle part of the longitudinal rod 42, the rack 30 is fixedly arranged on the cross rod 41, a sliding groove 420 is formed in the longitudinal rod 42, the connecting plate 50 is fixedly connected with a power output shaft of a motor, a swing arm 51 is fixedly arranged on the connecting plate 50, a second rotating shaft 52 is fixedly arranged at the free end of the swing arm 51, and the second rotating shaft 52 penetrates through the sliding groove 420. The third rotating shaft 502 on the connecting plate 50 is matched with the second strip-shaped groove 401 on the second rotating member 4, so that the power output shaft of the motor is in transmission connection with the rotating disc 1, and the second rotating member 4 is driven to intermittently rotate by the rotation of the connecting plate 50, so that the rotating disc 1 is driven to rotate, and the position of the crucible 11 is changed; then, the swing arm 51 on the connecting plate 50 drives the second rotating shaft 52 to rotate, so as to drive the reciprocating frame to move left and right, and further drive the baffle plate 2 to rotate.
The second rotating member 4 is provided with a second fan-shaped notch 402 between two adjacent second bar-shaped grooves 401, the connecting plate 50 is also fixedly provided with a second limiting disc 5, the diameter size of the second limiting disc 5 is the same as the diameter size of the second fan-shaped notch 402, and the second limiting disc 5 is also provided with a second avoiding notch 503. When the third rotating shaft 502 is separated from the second bar-shaped groove 401, the outer wall of the second limiting disc 5 contacts with the inner wall of the second fan-shaped notch 402, so that the position of the second rotating member 4 is limited, and the second rotating member 4 is prevented from continuously rotating under the action of inertia, namely, the rotating disc 1 is fixed at the current position; until the third rotating shaft 502 reenters the new second bar-shaped groove 401, at this time, the outer wall of the second limiting disc 5 is separated from contact with the inner wall of the second fan-shaped notch 402, and the second rotating member 4 is driven to rotate again by the rotation of the third rotating shaft 502.
A plurality of diagonal rods 43 are also obliquely arranged between the transverse rods 41 and the longitudinal rods 42. The connecting strength between the cross bar 41 and the longitudinal bar 42 is enhanced through the inclined bar 43, and the structure is simple and the practicability is strong.
The first shaft 312, the second shaft 52 and the third shaft 502 are sleeved with shaft sleeves. The shaft sleeve is used for replacing the first rotating shaft 312/the second rotating shaft 52/the third rotating shaft 502 to be in contact with the first bar-shaped groove 61/the sliding groove 420/the second bar-shaped groove 401, so that abrasion of the first rotating shaft 312/the second rotating shaft 52/the third rotating shaft 502 is avoided, the service life is prolonged, and the practicability is high.
In this embodiment, when in use, different materials to be plated are placed in the plurality of crucibles 11, then the materials to be plated in the corresponding one of the crucibles 11 are heated by an electron gun to evaporate and fly to sputter to the surface of the substrate to be plated to condense and form a film, at this time, the position of the transmission mechanism is as shown in fig. 7, the outer wall of the first limiting disc 63 contacts with the inner wall of the first sector notch 62, the baffle plate 2 is completely separated from the rotating disc 1, and the second limiting disc 5 is positioned in the second sector notch 402 of the second rotating member 4;
when the substrate to be plated needs to be coated in a segmented manner, the electron gun stops heating, then starts the motor, drives the connecting plate 50 to rotate anticlockwise, drives the reciprocating frame to move leftwards by the rotation of the connecting plate 50 until the first rotating shaft 312 is clamped into the first strip-shaped groove 61, and the outer wall of the first limiting disc 63 is out of contact with the inner wall of the first fan-shaped notch 62, so that the first rotating member 6 is driven to rotate, and further drives the baffle 2 to rotate clockwise (as shown in fig. 7-8), until the baffle 2 is positioned above the rotating disc 1, the rotating disc 1 is shielded, at this time, the first rotating shaft 312 is just separated from the first strip-shaped groove 61, and the outer wall of the first limiting disc 63 is in contact with the inner wall of the first fan-shaped notch 62 on the left side of the first rotating member 6, so that the baffle 2 hovers above the rotating disc 1, at this time, the third rotating shaft 502 on the connecting plate 50 does not enter the second strip-shaped groove 401 of the second rotating member 4, and the rotating disc 1 does not start rotating (as shown in fig. 10);
the motor drives the connecting plate 50 to continue rotating until the third rotating shaft 502 on the connecting plate 50 does not enter the second bar-shaped groove 40 (shown in fig. 11) of the second rotating member 4, and then drives the rotating disc 1 to rotate until the old crucible 11 rotates to a position corresponding to the electron gun (shown in fig. 13), at this time, the third rotating shaft 502 on the connecting plate 50 leaves the second bar-shaped groove 40 of the second rotating member 4, the rotating disc 1 stops rotating, and the outer wall of the second limiting disc 5 and the second fan-shaped notch 503 enable the rotating disc 1 to keep at the position, and in the process, the second rotating shaft 52 drives the reciprocating frame to move rightwards after passing through the leftmost position under the driving of the connecting plate 50, and then drives the gear 31 to rotate clockwise;
the motor drives the connecting plate 50 to continue rotating, and then drives the gear 31 to rotate clockwise by utilizing the reciprocating frame until the first rotating shaft 312 reenters the first strip-shaped groove 61 (as shown in fig. 14), and continues rotating, and drives the first rotating member 6 to rotate anticlockwise, so that the baffle plate 2 above the rotating disc 1 moves (as shown in fig. 15) until the baffle plate 2 is reset;
the motor drives the connecting plate 50 to continue rotating until the connecting plate 50 reaches the initial position (shown in fig. 7), and then the rotation of the motor is stopped;
finally, the electron gun heats the material to be plated in the new crucible 11.
The multi-crucible segmented vacuum coating chamber provided by the invention is described in detail above. The description of the specific embodiments is only intended to aid in understanding the method of the present invention and its core ideas. It should be noted that it will be apparent to those skilled in the art that various modifications and adaptations of the invention can be made without departing from the principles of the invention and these modifications and adaptations are intended to be within the scope of the invention as defined in the following claims.
Claims (3)
1. The utility model provides a many crucibles segmentation vacuum coating room, includes vacuum box (20), install motor and be used for heating the electron gun of waiting to plate the material in vacuum box (20), its characterized in that: an observation mechanism is arranged at the front end of the vacuum box body (20), a rotating disc (1) is also rotatably arranged in the vacuum box body (20), the output end of the motor is in transmission connection with the rotating disc (1), and a plurality of crucibles (11) are arranged on the rotating disc (1);
a baffle (2) is also rotatably arranged in the vacuum box body (20);
a transmission structure is arranged between the baffle (2) and the rotating disc (1);
the transmission structure comprises a gear (31), a rack (30), a first rotating member (6) and a reciprocating frame, wherein the reciprocating frame is slidably arranged on a vacuum box body (20), a motor drives the reciprocating frame to move back and forth, the rack (30) is fixedly arranged on the reciprocating frame, the gear (31) is meshed with the rack (30), the gear (31) and the first rotating member (6) are both rotatably arranged on the vacuum box body (20), a first lug plate (311) is fixedly arranged at the edge of the gear (31), a first rotating shaft (312) is fixedly arranged on the first lug plate (311), a connecting column (601) is fixedly arranged on the first rotating member (6), a connecting arm (602) is radially arranged at the upper end of the connecting column (601), a first strip-shaped groove (61) is further radially formed in the first rotating member (6), and the first rotating shaft (312) is arranged in the first strip-shaped groove (61) in a penetrating manner;
the first rotating piece (6) is provided with first sector gaps (62) on two sides of the first strip-shaped groove (61), a first limiting disc (63) is fixedly arranged on the gear (31), the diameter size of the first limiting disc (63) is the same as that of the first sector gaps (62), and a first avoiding gap (630) is further formed in the first limiting disc (63);
the transmission structure further comprises a second rotating part (4) and a connecting plate (50) which are rotatably arranged on the vacuum box body (20), a second lug plate (501) is fixedly arranged at the edge of the connecting plate (50), a third rotating shaft (502) is fixedly arranged on the second lug plate (501), a plurality of second strip-shaped grooves (401) are uniformly formed in the second rotating part (4), the reciprocating frame comprises a cross rod (41) and a longitudinal rod (42), the end part of the cross rod (41) is fixedly connected with the middle part of the longitudinal rod (42), a rack (30) is fixedly arranged on the cross rod (41), a sliding groove (420) is formed in the longitudinal rod (42), the connecting plate (50) is fixedly connected with a power output shaft of a motor, a swing arm (51) is fixedly arranged on the connecting plate (50), a second rotating shaft (52) is fixedly arranged at the free end of the swing arm (51), and the second rotating shaft (52) is arranged in the sliding groove (420) in a penetrating mode;
second rotating piece (4) has seted up second fan-shaped breach (402) between two adjacent second bar grooves (401), still fixed mounting has second spacing disc (5) on connecting plate (50), the diameter size of second spacing disc (5) is the same with the diameter size of second fan-shaped breach (402), still set up second on the spacing disc of second (5) and dodge breach (503).
2. A multi-crucible segmented vacuum coating chamber as recited in claim 1, wherein: a plurality of diagonal rods (43) are obliquely arranged between the transverse rods (41) and the longitudinal rods (42).
3. A multi-crucible segmented vacuum coating chamber as recited in claim 1, wherein: shaft sleeves are sleeved on the first rotating shaft (312), the second rotating shaft (52) and the third rotating shaft (502).
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| Application Number | Priority Date | Filing Date | Title |
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| CN202210153513.0A CN114481044B (en) | 2022-02-18 | 2022-02-18 | Multi-crucible segmented vacuum coating chamber |
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| Application Number | Priority Date | Filing Date | Title |
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| CN202210153513.0A CN114481044B (en) | 2022-02-18 | 2022-02-18 | Multi-crucible segmented vacuum coating chamber |
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| CN114481044B true CN114481044B (en) | 2024-01-30 |
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Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002212723A (en) * | 2001-01-23 | 2002-07-31 | Shin Meiwa Ind Co Ltd | Vacuum film deposition apparatus |
| CN102787299A (en) * | 2012-05-21 | 2012-11-21 | 杭州大和热磁电子有限公司 | Vacuum coating device, vacuum coating control system and control method |
| CN206408286U (en) * | 2017-01-06 | 2017-08-15 | 中山市优度光学科技有限公司 | A kind of crucible device of eyeglass vacuum coating |
| CN215799856U (en) * | 2021-08-24 | 2022-02-11 | 佛山市博顿光电科技有限公司 | Crucible structure, vacuum cavity and vacuum coating machine |
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2022
- 2022-02-18 CN CN202210153513.0A patent/CN114481044B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002212723A (en) * | 2001-01-23 | 2002-07-31 | Shin Meiwa Ind Co Ltd | Vacuum film deposition apparatus |
| CN102787299A (en) * | 2012-05-21 | 2012-11-21 | 杭州大和热磁电子有限公司 | Vacuum coating device, vacuum coating control system and control method |
| CN206408286U (en) * | 2017-01-06 | 2017-08-15 | 中山市优度光学科技有限公司 | A kind of crucible device of eyeglass vacuum coating |
| CN215799856U (en) * | 2021-08-24 | 2022-02-11 | 佛山市博顿光电科技有限公司 | Crucible structure, vacuum cavity and vacuum coating machine |
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| CN114481044A (en) | 2022-05-13 |
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