CN114481008A - Auxiliary equipment, treatment system and method for ionic nitrogen carbon and sulfur multicomponent co-permeation - Google Patents

Auxiliary equipment, treatment system and method for ionic nitrogen carbon and sulfur multicomponent co-permeation Download PDF

Info

Publication number
CN114481008A
CN114481008A CN202210066178.0A CN202210066178A CN114481008A CN 114481008 A CN114481008 A CN 114481008A CN 202210066178 A CN202210066178 A CN 202210066178A CN 114481008 A CN114481008 A CN 114481008A
Authority
CN
China
Prior art keywords
furnace body
carbon
sulfur
magnetic field
furnace
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CN202210066178.0A
Other languages
Chinese (zh)
Other versions
CN114481008B (en
Inventor
何永勇
张哲浩
李杨
邵明昊
王政伟
董永康
雒建斌
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tsinghua University
Yantai University
Original Assignee
Tsinghua University
Yantai University
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tsinghua University, Yantai University filed Critical Tsinghua University
Priority to CN202210066178.0A priority Critical patent/CN114481008B/en
Publication of CN114481008A publication Critical patent/CN114481008A/en
Application granted granted Critical
Publication of CN114481008B publication Critical patent/CN114481008B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C8/00Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
    • C23C8/06Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases
    • C23C8/28Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases more than one element being applied in one step
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C8/00Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
    • C23C8/06Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases
    • C23C8/36Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases using ionised gases, e.g. ionitriding

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Solid-Phase Diffusion Into Metallic Material Surfaces (AREA)

Abstract

本公开提供的离子氮碳硫多元共渗辅助设备、处理系统及方法,辅助设备包括:放置在离子扩渗炉的炉体顶部的空心阴极离子源,放置于炉体侧壁上的绝缘壳体,和多个同轴且由内至外依次间隔排布于绝缘壳体内的电磁铁,相邻两个电磁铁的绕线方式相反,多个电磁铁用于在离子扩渗炉内形成可控的磁场,以改变金属工件表面电子的运动轨迹和金属工件的磁畴。处理系统包括:离子扩渗炉、离子氮碳硫多元共渗辅助设备、变压器、真空泵、供气瓶和电气控制柜。处理方法包括向炉体内通入含有氮元素、碳元素、氢元素和硫元素的气体,并向金属工件提供可控的磁场。本公开可减少工件表面硫化物的间隙,使硬度呈现缓慢下降的趋势,提高工件表面硬度和使用寿命。

Figure 202210066178

The present disclosure provides auxiliary equipment, processing system and method for ionic nitrogen-carbon-sulfur multicomponent interpenetration. The auxiliary equipment includes: a hollow cathode ion source placed on the top of the furnace body of an ion diffusion infiltration furnace, and an insulating shell placed on the side wall of the furnace body. , and a plurality of electromagnets that are coaxial and are arranged in an insulating shell from the inside to the outside at intervals, the winding methods of two adjacent electromagnets are opposite, and the multiple electromagnets are used to form a controllable formation in the ion diffusion furnace. The magnetic field can change the trajectory of electrons on the surface of the metal workpiece and the magnetic domain of the metal workpiece. The treatment system includes: ion diffusion furnace, auxiliary equipment for ion nitrogen carbon sulfur multi-infiltration, transformer, vacuum pump, gas supply cylinder and electrical control cabinet. The treatment method includes feeding gas containing nitrogen element, carbon element, hydrogen element and sulfur element into the furnace body, and providing a controllable magnetic field to the metal workpiece. The present disclosure can reduce the gap of the sulfide on the surface of the workpiece, so that the hardness shows a trend of slow decline, and the surface hardness and service life of the workpiece are improved.

Figure 202210066178

Description

离子氮碳硫多元共渗辅助设备、处理系统及方法Auxiliary equipment, treatment system and method for ion nitrogen carbon sulfur multi-component co-permeation

技术领域technical field

本公开涉及金属材料表面离子渗氮处理技术领域,具体涉及离子氮碳硫多元共渗辅助设备、处理系统及方法。The present disclosure relates to the technical field of ion nitriding treatment on the surface of metal materials, in particular to auxiliary equipment, treatment systems and methods for ion nitrogen carbon-sulfur multicomponent co-nitridation.

背景技术Background technique

扩渗是金属表面改性的常用方式之一,其因可以大幅提高金属表面的硬度、耐磨性、耐腐蚀性而被广泛运用在工业生产中。扩渗是将原子渗入工件表面,改变工件表层化学成分和组织的热处理方式。通常有渗氮、渗碳、氮碳共渗和多元共渗等等。目前常用的扩渗方式主要有两种:气体扩渗和离子扩渗。离子扩渗是通过在炉内正负极间施加电压,对气体进行电离,使气体转变为等离子态;炉内游离的气体离子在电场的作用下,高速轰击处在阴极电位的工件表面,使工件表面吸附气体原子并向材料内部扩散形成扩渗层;同时溅射出来金属原子和游离的气体粒子结合形成化合物并沉积在工件表面。Infiltration is one of the common methods of metal surface modification. It is widely used in industrial production because it can greatly improve the hardness, wear resistance and corrosion resistance of metal surface. Diffusion is a heat treatment method that infiltrates atoms into the surface of the workpiece and changes the chemical composition and structure of the surface of the workpiece. Usually there are nitriding, carburizing, nitrocarburizing and multi-co-permeating and so on. There are two commonly used diffusion methods: gas diffusion and ion diffusion. Ion diffusion and infiltration is to ionize the gas by applying a voltage between the positive and negative electrodes in the furnace to transform the gas into a plasma state; under the action of the electric field, the free gas ions in the furnace bombard the surface of the workpiece at the cathode potential at high speed, making The surface of the workpiece adsorbs gas atoms and diffuses into the material to form a diffusion layer; at the same time, the sputtered metal atoms and free gas particles combine to form compounds and deposit on the surface of the workpiece.

随着现代工业技术的发展,工件需要满足各种复杂的工况。其中重载荷条件下如何提高工件的耐磨性和寿命的问题就可以通过氮碳硫多元共渗的方式来解决。然而在氮碳共渗中加入硫之后,工件表面的硫化物之间存在较大间隙,硬度有所下降,使得工件在重载摩擦副中的使用寿命大大降低。With the development of modern industrial technology, workpieces need to meet various complex working conditions. Among them, the problem of how to improve the wear resistance and life of the workpiece under heavy load conditions can be solved by the multi-component co-permeation of nitrogen, carbon and sulfur. However, after adding sulfur in nitrocarburizing, there is a large gap between the sulfides on the surface of the workpiece, and the hardness decreases, which greatly reduces the service life of the workpiece in the heavy-duty friction pair.

发明内容SUMMARY OF THE INVENTION

本公开旨在解决上述问题之一。The present disclosure aims to solve one of the above problems.

为此,本公开实施例提供的可减小工件表面硫化物晶格间隙,有效增加扩渗层中表层共渗层硫化物硬度,同时增加扩渗层厚度、提高深层扩渗效率和渗层质量的离子氮碳硫多元共渗辅助设备,所述离子氮碳硫多元共渗辅助设备适于放置于离子扩渗炉的炉体上,所述离子扩渗炉内具有用于放置金属工件的工件台,所述离子渗氮辅助设备包括:Therefore, the embodiments of the present disclosure can reduce the sulfide lattice gap on the surface of the workpiece, effectively increase the hardness of the sulfide layer in the diffusion layer, increase the thickness of the diffusion layer, improve the diffusion efficiency and the quality of the diffusion layer. The ionic nitrogen-carbon-sulfur multi-infiltration auxiliary equipment is suitable for being placed on the furnace body of the ion diffusion infiltration furnace, and the ion diffusion infiltration furnace has workpieces for placing metal workpieces. The ion nitriding auxiliary equipment includes:

空心阴极离子源,所述空心阴极离子源适于放置在所述炉体的顶部,用于向所述金属工件附近射出等离子体电子束;和a hollow cathode ion source adapted to be placed on top of the furnace body for emitting a plasma electron beam near the metal workpiece; and

磁场辅助单元,所述磁场辅助单元包括绝缘壳体和多个电磁铁;所述绝缘壳体适于放置于所述炉体的侧壁上;多个所述电磁铁同轴且由内至外依次间隔排布于所述绝缘壳体内,相邻两个所述电磁铁的绕线方式相反,多个所述电磁铁用于在所述离子扩渗炉内形成可控的磁场,以改变所述金属工件表面电子的运动轨迹和所述金属工件的磁畴。A magnetic field auxiliary unit, the magnetic field auxiliary unit includes an insulating casing and a plurality of electromagnets; the insulating casing is suitable for being placed on the side wall of the furnace body; a plurality of the electromagnets are coaxial and from the inside to the outside Arranged in the insulating shell in sequence, two adjacent electromagnets are wound in opposite ways, and a plurality of the electromagnets are used to form a controllable magnetic field in the ion diffusion furnace to change all the electromagnets. The motion trajectory of electrons on the surface of the metal workpiece and the magnetic domain of the metal workpiece.

本公开第一方面实施例提供的离子氮碳硫多元共渗辅助设备,具有以下特点及有益效果:The ionic nitrogen-carbon-sulfur multi-component interpenetration auxiliary equipment provided by the embodiment of the first aspect of the present disclosure has the following characteristics and beneficial effects:

离子渗氮炉抽真空后,通过空心阴极离子源电离含氮元素的气体与含氢元素的气体,电离出氮离子、氢离子、硫离子和中性氮原子等等离子体,大量等离子体直接射向金属工件,同时等离子体受电场和磁场的共同作用下,在金属工件表面大量聚集,在电场的作用下,金属工件表面的氮离子、氢离子和中性氮原子等等离子体浓度增加;扩散与沉积作用增强,最终使得扩渗层的厚度增加,扩渗效率提高。此外,正离子及电子在耦合场中受到磁场的洛伦兹力及电场的库仑力共同作用,电场和磁场相互垂直,共同作用于电子,使其在金属工件附近做摆线运动;相比于常规离子扩渗,在相同条件下提高了扩渗温度,活性氮、碳、硫原子向内部扩散加深,共渗层质量提高脆性减小,加强了扩渗效果。同时在扩渗层中硫化物的固溶体比例增高,硫化物晶格间的间隙减小。在不影响摩擦系数,具有渗硫耐磨性提高的特性的前提下提高了金属工件的表面硬度,满足重载摩擦副的使用要求。After the ion nitriding furnace is evacuated, the gas containing nitrogen elements and the gas containing hydrogen elements are ionized by the hollow cathode ion source, and plasmas such as nitrogen ions, hydrogen ions, sulfur ions and neutral nitrogen atoms are ionized, and a large amount of plasma is directly irradiated. At the same time, under the combined action of electric field and magnetic field, the plasma gathers on the surface of the metal workpiece. Under the action of the electric field, the plasma concentration of nitrogen ions, hydrogen ions and neutral nitrogen atoms on the surface of the metal workpiece increases; diffusion With the enhancement of deposition, the thickness of the diffusion layer is finally increased, and the diffusion efficiency is improved. In addition, the positive ions and electrons are subjected to the combined action of the Lorentz force of the magnetic field and the Coulomb force of the electric field in the coupled field. The electric field and the magnetic field are perpendicular to each other and act together on the electrons, making them perform cycloid motion near the metal workpiece; In conventional ion diffusion, the diffusion temperature is increased under the same conditions, and the diffusion of active nitrogen, carbon and sulfur atoms to the interior is deepened, the quality of the co-infiltration layer is improved, and the brittleness is reduced, which strengthens the diffusion effect. At the same time, the proportion of solid solution of sulfide in the diffusion layer increases, and the gap between sulfide lattices decreases. On the premise of not affecting the friction coefficient and improving the wear resistance of vulcanization, the surface hardness of the metal workpiece is improved, and the use requirements of heavy-duty friction pairs are met.

进一步地,磁场会对放入其中的金属工件进行磁化,在磁场作用下,金属工件表面产生了磁畴转动和磁壁位移,增加了交换能和各向异性能,同时材料表面附近磁化而导致磁致伸缩,增加了应变能,加速了渗扩物质的扩散,磁化强度大幅提高。在一些实施例中,向所述电磁铁通入的电流满足:使所述金属工件完全被所述电磁铁产生的磁场囊括且所述金属工件附近的磁场强度达到450Gs~550Gs。Further, the magnetic field will magnetize the metal workpiece placed in it. Under the action of the magnetic field, the magnetic domain rotation and magnetic wall displacement are generated on the surface of the metal workpiece, which increases the exchange energy and anisotropy energy. Strain increases the strain energy, accelerates the diffusion of infiltrating substances, and greatly increases the magnetization. In some embodiments, the current passed to the electromagnet satisfies: the metal workpiece is completely encompassed by the magnetic field generated by the electromagnet, and the magnetic field strength near the metal workpiece reaches 450 Gs˜550 Gs.

在一些实施例中,各所述电磁铁分别为环形电磁铁。In some embodiments, each of the electromagnets is a ring electromagnet, respectively.

在一些实施例中,各所述电磁铁的轴向与所述工件台的上平面平行。In some embodiments, the axial direction of each of the electromagnets is parallel to the upper plane of the workpiece table.

在一些实施例中,所述磁场辅助单元还包括位于所述炉体内且尽可能靠近所述绝缘壳体设置的金属盘,所述金属盘被所述电磁铁产生的磁感线包裹,所述金属盘的材质与所述金属工件的材质相同,所述金属盘与所述工件台共电源。In some embodiments, the magnetic field assisting unit further includes a metal disk located in the furnace body and disposed as close as possible to the insulating shell, the metal disk is wrapped by the magnetic field lines generated by the electromagnet, the The material of the metal disk is the same as that of the metal workpiece, and the metal disk and the workpiece table share a power source.

本公开第二方面实施例提供的离子氮碳硫多元共渗处理系统,包括:The ionic nitrogen-carbon-sulfur multi-permeation treatment system provided by the embodiment of the second aspect of the present disclosure includes:

离子扩渗炉,所述离子渗氮炉包括炉体、设置于所述炉体内用于放置金属工件的工件台;an ion diffusion and infiltration furnace, the ion nitriding furnace includes a furnace body and a workpiece table arranged in the furnace body for placing metal workpieces;

离子氮碳硫多元共渗辅助设备,所述离子氮碳硫多元共渗辅助设备为根据本公开第一方面实施例提供的离子氮碳硫多元共渗辅助设备;Auxiliary equipment for ionic nitrogen-carbon-sulfur multi-infiltration, the auxiliary equipment for ion-nitrogen-carbon-sulfur multi-infiltration is the auxiliary equipment for ionic nitrogen-carbon-sulfur multi-infiltration provided according to an embodiment of the first aspect of the present disclosure;

变压器,所述变压器与所述线圈、所述工件台和所述空心阴极离子源连接,用于使所述电磁铁产生磁场和向所述炉体内提供电离电压;a transformer, which is connected with the coil, the workpiece table and the hollow cathode ion source, and is used for making the electromagnet generate a magnetic field and supplying an ionization voltage to the furnace body;

真空泵,所述真空泵与所述炉体连通,用于使所述炉体内处于真空状态;a vacuum pump, which is communicated with the furnace body and is used to make the furnace body in a vacuum state;

供气瓶,与所述炉体连通,用于向所述炉体内提供惰性气体、含有氮元素的气体、含有氢元素的气体、含有碳元素的气体和含有硫元素的气体;和a gas supply cylinder, communicated with the furnace body, for supplying inert gas, nitrogen-containing gas, hydrogen-containing gas, carbon-containing gas and sulfur-containing gas into the furnace body; and

电气控制柜,用于控制所述离子氮碳硫多元共渗辅助设备备、所述离子扩渗炉、所述变压器、所述真空泵和所述供气瓶。An electrical control cabinet is used to control the auxiliary equipment for ionic nitrogen, carbon and sulfur multi-component interpenetration, the ion diffusion furnace, the transformer, the vacuum pump and the gas supply cylinder.

本公开第三方面实施例提供的离子氮碳硫多元共渗处理方法,其特征在于,包括:The ionic nitrogen-carbon-sulfur multi-infiltration treatment method provided by the embodiment of the third aspect of the present disclosure is characterized in that, comprising:

将金属工件放置在离子扩渗炉的炉体内,对所述炉体内抽真空,并向所述炉体内通入惰性气体;The metal workpiece is placed in the furnace body of the ion diffusion furnace, the furnace body is evacuated, and an inert gas is introduced into the furnace body;

对所述炉体内通入电压并升温,以保证所述炉体内进行稳定的辉光放电,开启所述空心阴极离子源;Passing a voltage into the furnace body and raising the temperature to ensure stable glow discharge in the furnace body, and turning on the hollow cathode ion source;

待所述炉体内的温度达到第一温度时,向所述炉体内通入含有氮元素的气体和含有氢元素的气体,继续对所述炉体内升温;When the temperature in the furnace body reaches the first temperature, the gas containing nitrogen element and the gas containing hydrogen element are introduced into the furnace body, and the temperature in the furnace body is continued to rise;

待所述炉体内的温度达到第二温度时,停止通入惰性气体,并向所述炉体内通入含有碳元素的气体,利用根据本公开第一方面实施例提供的离子氮碳硫多元共渗辅助设备向所述金属工件提供第一磁场强度的磁场;When the temperature in the furnace body reaches the second temperature, the inert gas is stopped, and the gas containing carbon element is passed into the furnace body, using the ionic nitrogen carbon sulfur multicomponent copolymer provided according to the embodiment of the first aspect of the present disclosure. The infiltration auxiliary device provides a magnetic field of a first magnetic field strength to the metal workpiece;

待所述炉体内的温度达到共渗温度后,利用所述离子氮碳硫多元共渗辅助设备向所述金属工件提供第二磁场强度的磁场;After the temperature in the furnace body reaches the co-infiltration temperature, use the ionic nitrogen-carbon-sulfur multi-co-infiltration auxiliary equipment to provide the metal workpiece with a magnetic field of the second magnetic field strength;

保温保压阶段,逐渐减小所述离子氮碳硫多元共渗辅助设备向所述金属工件提供的磁场的强度;In the heat preservation and pressure keeping stage, gradually reduce the intensity of the magnetic field provided by the ionic nitrogen carbon sulfur multi-component co-penetration auxiliary equipment to the metal workpiece;

向所述炉体内通入含有硫元素的气体,并降低所述炉体内的温度;Passing gas containing elemental sulfur into the furnace body, and reducing the temperature in the furnace body;

待所述炉体内的温度降低至第三温度时,利用所述离子氮碳硫多元共渗辅助设备向所述金属工件提供第三磁场强度的磁场;When the temperature in the furnace body is lowered to a third temperature, the metal workpiece is provided with a magnetic field of a third magnetic field strength by using the auxiliary equipment for ion nitrogen carbon sulfur multi-component co-penetration;

待所述炉体内的温度降低至第四温度时,关闭所述离子氮碳硫多元共渗辅助设备,停止向所述炉体内通入含有氢元素的气体、含有氮元素的气体、含有碳元素的气体和含有硫元素的气体,向所述炉体内通入惰性气体,以对金属工件表面进行清洗;When the temperature in the furnace body is lowered to the fourth temperature, the auxiliary equipment for ionic nitrogen, carbon and sulfur multi-component interpenetration is turned off, and the gas containing hydrogen, nitrogen and carbon elements are stopped to pass into the furnace body. The gas and the gas containing sulfur element are introduced into the furnace body to clean the surface of the metal workpiece;

待所述炉体内的温度降低至第五温度时,停止向所述炉体内通入惰性气体,取出所述金属工件。When the temperature in the furnace body is lowered to the fifth temperature, the inert gas is stopped flowing into the furnace body, and the metal workpiece is taken out.

在一些实施例中,所述第四磁场强度大于所述第二磁场强度。In some embodiments, the fourth magnetic field strength is greater than the second magnetic field strength.

附图说明Description of drawings

图1是本公开第一方面实施例的离子源氮碳硫多元共渗辅助设备的结构示意图。FIG. 1 is a schematic structural diagram of an ion source nitrogen-carbon-sulfur multi-component interpenetration auxiliary device according to an embodiment of the first aspect of the present disclosure.

图2是图1所示辅助设备产生的磁场的分布示意图。FIG. 2 is a schematic diagram of the distribution of the magnetic field generated by the auxiliary device shown in FIG. 1 .

图3是本公开第二方面实施例提供的离子源氮碳硫多元共渗处理系统的结构示意图。FIG. 3 is a schematic structural diagram of an ion-source nitrogen-carbon-sulfur multi-permeation treatment system provided by an embodiment of the second aspect of the present disclosure.

图4和图5分别为使用本公开实施例提供的离子氮碳硫元共渗处理方法处理后和使用常规共渗处理后的截面金相图。FIG. 4 and FIG. 5 are respectively the cross-sectional metallographic diagrams of the ionic nitrogen-carbon-sulfur co-infiltration treatment method provided by the embodiment of the present disclosure and the cross-sectional metallographic diagram of the conventional co-infiltration treatment.

图6为使用本公开实施例提供的离子氮碳硫元共渗处理方法处理后和使用常规共渗处理后金属工件的硬度梯度图。FIG. 6 is a graph showing the hardness gradient of the metal workpiece after using the ion nitrocarburizing treatment method provided by the embodiment of the present disclosure and after using the conventional co-infiltration treatment.

图7为使用本公开实施例提供的离子氮碳硫元共渗处理方法处理后和使用常规共渗处理后金属工件的UMT分析图。FIG. 7 is a UMT analysis diagram of a metal workpiece after using the ion nitrocarburizing treatment method provided by the embodiment of the present disclosure and after using the conventional co-infiltration treatment.

图中:In the picture:

100-离子氮碳硫多元共渗辅助设备,110-绝缘壳体,120-电磁铁,122-线圈,130-金属盘,140-空心阴极离子源;100- Ionic nitrogen-carbon-sulfur multi-component co-permeation auxiliary equipment, 110-insulating shell, 120-electromagnet, 122-coil, 130-metal disc, 140-hollow cathode ion source;

200-离子扩渗炉,210-炉体,220-工件台,230-金属工件;200-ion diffusion furnace, 210-furnace body, 220-workpiece table, 230-metal workpiece;

300-变压器;300-transformer;

400-真空泵;400-vacuum pump;

500-供气瓶;500 - gas supply cylinder;

600-电气控制柜。600 - Electrical control cabinet.

具体实施方式Detailed ways

为了使本申请的目的、技术方案及优点更加清楚明白,以下结合附图及实施例,对本申请进行进一步详细描述。应当理解,此处所描述的具体实施例仅仅用于解释本申请,并不用于限定本申请。In order to make the objectives, technical solutions and advantages of the present application clearer, the present application will be described in further detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present application, but not to limit the present application.

相反,本申请涵盖任何由权利要定义的在本申请精髓和范围上做的替代、修改、等效方法以及方案。进一步,为了使公众对本申请有更好的了解,在下文对本发明的细节描述中,详尽描述了一些特定的细节部分。对本领域技术人员来说没有这些细节部分的描述也可以完全理解本申请。On the contrary, this application covers any alternatives, modifications, equivalents and arrangements within the spirit and scope of this application as defined by the claims. Further, in order to give the public a better understanding of the present application, some specific details are described in detail in the following detailed description of the present invention. Those skilled in the art can fully understand the present application without the description of these detailed parts.

参见图1,本公开第一方面实施例提供的离子氮碳硫多元共渗辅助设备100,适于放置于离子扩渗炉(该离子扩渗炉在图1中未示意出)200的炉体上,离子扩渗炉200内具有用于放置金属工件230的工件台220。本公开的离子氮碳硫多元共渗辅助设备100包括:Referring to FIG. 1 , the ionic nitrogen-carbon-sulfur multi-component interpenetration auxiliary equipment 100 provided by the embodiment of the first aspect of the present disclosure is suitable for being placed in the furnace body of an ion diffusion infiltration furnace (the ion diffusion infiltration furnace is not shown in FIG. 1 ) 200 Above, the ion diffusion furnace 200 has a workpiece table 220 for placing the metal workpiece 230 . The ionic nitrogen-carbon-sulfur multicomponent co-permeating auxiliary equipment 100 of the present disclosure includes:

空心阴极离子源140,该空心阴极离子源140适于放置在离子扩渗炉200的炉体顶部,用于向金属工件230附近射出等离子体电子束;和a hollow cathode ion source 140 adapted to be placed on top of the furnace body of the ion diffusion furnace 200 for emitting a plasma electron beam near the metal workpiece 230; and

磁场辅助单元,该磁场辅助单元包括绝缘壳体110和多个电磁铁120;绝缘壳体110适于放置在离子扩渗炉200的炉体侧壁上;多个电磁铁120同轴且由内至外依次间隔排布于绝缘壳体110内,相邻两个电磁铁120的绕线方式相反,多个电磁铁120用于在离子扩渗炉200内形成可控的磁场,以改变金属工件230表面电子的运动轨迹和金属工件230的磁畴。A magnetic field auxiliary unit, the magnetic field auxiliary unit includes an insulating casing 110 and a plurality of electromagnets 120; the insulating casing 110 is suitable for being placed on the side wall of the furnace body of the ion diffusion furnace 200; the plurality of electromagnets 120 are coaxial and The electromagnets 120 are arranged at intervals in the insulating housing 110 from the outside in sequence, and the two adjacent electromagnets 120 are wound in opposite ways. The multiple electromagnets 120 are used to form a controllable magnetic field in the ion diffusion furnace 200 to change the metal workpiece. The trajectory of electrons on the surface of 230 and the magnetic domain of the metal workpiece 230 .

在一些实施例中,空心阴极离子源140采用空心阴极枪,可以在其内部发生空心阴极效应,直接向炉体内的金属工件230附近射出高密度的等离子体电子束,增加炉内气体的离化率。In some embodiments, the hollow cathode ion source 140 adopts a hollow cathode gun, which can generate a hollow cathode effect inside the hollow cathode ion source 140 to directly shoot a high-density plasma electron beam near the metal workpiece 230 in the furnace body to increase the ionization of the gas in the furnace. Rate.

在一些实施例中,磁场辅助单元中绝缘壳体110的底部与离子扩渗炉200的炉体底部之间的距离在100mm~200mm之间,绝缘壳体110的一部分位于炉体侧壁内,绝缘壳体110的另一部分位于炉体侧壁外,绝缘壳体110的内侧至炉体侧壁的距离为300mm。由于磁场辅助单元位于离子扩渗炉的炉体侧壁上,使得整个工件台220都可以受到磁场作用,而又不会对扩渗产生阻碍的反作用。金属工件230置于工件台220上的位置使磁场方向与电磁场方向垂直,离子在靠近金属工件表面处做摆线运动,提高金属工件表面的离子浓度,从而提高扩渗效率。In some embodiments, the distance between the bottom of the insulating shell 110 in the magnetic field assisting unit and the bottom of the furnace body of the ion diffusion furnace 200 is between 100 mm and 200 mm, and a part of the insulating shell 110 is located in the side wall of the furnace body, Another part of the insulating shell 110 is located outside the side wall of the furnace body, and the distance from the inner side of the insulating shell 110 to the side wall of the furnace body is 300 mm. Since the magnetic field assisting unit is located on the side wall of the furnace body of the ion infiltration furnace, the entire workpiece table 220 can be subjected to the action of the magnetic field, and will not hinder the infiltration infiltration. The metal workpiece 230 is placed on the workpiece table 220 so that the direction of the magnetic field is perpendicular to the direction of the electromagnetic field, and the ions move cycloidly near the surface of the metal workpiece to increase the ion concentration on the surface of the metal workpiece, thereby improving the diffusion efficiency.

进一步地,参见图2,磁场辅助单元还包括位于离子扩渗炉200的炉体内且尽可能靠近绝缘壳体110设置的金属盘130(该金属盘可以与绝缘壳体固定连接,即图2中所示方式,或者与炉体固接连接),被电磁铁120产生的磁感线包裹,该金属盘130的材质与金属工件230的材质相同,作用与空心阴极离子源140相似,使等离子体直接轰击金属盘130,溅射出大量金属离子,与炉体内的气体离子结合形成金属化合物,提高等离子体浓度。相较于直接溅射金属工件,这种方式使金属工件表面溅射程度降低,可以大幅提高金属工件230的表面质量,避免由于离子直接轰击造成的金属工件表面粗糙增加的现象发生。另一方面,金属盘130的设置,可以将空心阴极离子源140射出的等离子体电子束限制在金属工件230与该金属盘130附近,大幅增加金属工件230附近的等离子体浓度。Further, referring to FIG. 2 , the magnetic field assisting unit further includes a metal disk 130 located in the furnace body of the ion diffusion furnace 200 and as close as possible to the insulating shell 110 (the metal disk can be fixedly connected with the insulating shell, that is, in FIG. 2 . The method shown in the figure, or fixedly connected to the furnace body), is wrapped by the magnetic field lines generated by the electromagnet 120. The material of the metal disk 130 is the same as that of the metal workpiece 230, and its function is similar to that of the hollow cathode ion source 140. The metal disk 130 is directly bombarded to sputter a large amount of metal ions, which combine with the gas ions in the furnace to form metal compounds, thereby increasing the plasma concentration. Compared with the direct sputtering of the metal workpiece, this method reduces the degree of sputtering on the surface of the metal workpiece, which can greatly improve the surface quality of the metal workpiece 230 and avoid the phenomenon of increased surface roughness of the metal workpiece caused by direct bombardment of ions. On the other hand, the installation of the metal disk 130 can confine the plasma electron beam emitted by the hollow cathode ion source 140 to the metal workpiece 230 and the metal disk 130 , thereby greatly increasing the plasma concentration near the metal workpiece 230 .

在一个实施例中,各电磁铁由内至外采用N-S-N极的布设方式,这种布设方式既可以让工件台表面的磁场强度较高,对离子产生较大的限制作用,又可以减小磁场辅助单元的占用空间,最大限度节约成本。In one embodiment, each electromagnet adopts an N-S-N pole arrangement from the inside to the outside. This arrangement can not only make the magnetic field intensity on the surface of the workpiece table higher, but also have a greater confinement effect on ions, and can reduce the magnetic field. Auxiliary unit takes up space and maximizes cost savings.

在一些实施例中,为了确定通入各电磁铁120的线圈122中的直流电流大小,在扩渗开始前,对由本公开的离子渗氮辅助设备100、工件台220和待处理的金属工件230构成的组件进行数值模拟,逐步增大模拟电磁铁120中线圈122的输入电流,使金属工件230完全被磁场囊括且金属工件230附近的磁场场强达到450Gs~550Gs(优选500Gs)左右,记录此时输入电磁铁120中线圈122的电流数值,作为最终通入电磁铁120的线圈122中的直流电流大小。当金属工件230附近的磁场场强在450Gs~550Gs时,即能提供较好的磁控效果,又不至于场强过大,避免增加本辅助设备的能耗。In some embodiments, in order to determine the magnitude of the DC current flowing into the coils 122 of each electromagnet 120, before the diffusion infiltration begins, the ion nitriding auxiliary device 100, the workpiece table 220 and the metal workpiece 230 to be treated by the present disclosure are Numerical simulation is performed on the components formed, and the input current of the coil 122 in the simulated electromagnet 120 is gradually increased, so that the metal workpiece 230 is completely covered by the magnetic field and the magnetic field strength near the metal workpiece 230 reaches about 450Gs-550Gs (preferably 500Gs), and record this. When inputting the current value of the coil 122 of the electromagnet 120 , it is used as the magnitude of the direct current finally passed into the coil 122 of the electromagnet 120 . When the magnetic field strength near the metal workpiece 230 is between 450Gs and 550Gs, a better magnetron effect can be provided, and the field strength will not be too large to avoid increasing the energy consumption of the auxiliary equipment.

在一些实施例中,各电磁铁120分别为环形电磁铁,可保证磁场的均匀性,且易于加工,各电磁铁120产生的磁场的分布参见图2。In some embodiments, each electromagnet 120 is a ring electromagnet, which can ensure the uniformity of the magnetic field and is easy to process. See FIG. 2 for the distribution of the magnetic field generated by each electromagnet 120 .

在一些实施例中,各电磁铁120的轴向与工件台220的上平面平行,以使各电磁铁120产生的磁场可以将金属工件230囊括在内。In some embodiments, the axial direction of each electromagnet 120 is parallel to the upper plane of the workpiece table 220 , so that the magnetic field generated by each electromagnet 120 can contain the metal workpiece 230 .

在一些实施例中,为了使本设备的结构更加紧凑,绝缘壳体110为与最外侧的电磁铁组120的第二端形成的外圆周相匹配的圆柱体,通过绝缘壳体110可以保护磁场辅助单元的内部结构,使磁场辅助单元随离子扩渗炉200的炉体一同冷却降温,另一方面,绝缘外壳100与离子扩渗炉200的炉体绝缘,确保炉体内的电极不影响磁场辅助单元内的电磁铁。In some embodiments, in order to make the structure of the device more compact, the insulating casing 110 is a cylinder matching the outer circumference formed by the second end of the outermost electromagnet group 120 , and the magnetic field can be protected by the insulating casing 110 The internal structure of the auxiliary unit allows the magnetic field auxiliary unit to cool down together with the furnace body of the ion diffusion furnace 200. On the other hand, the insulating shell 100 is insulated from the furnace body of the ion diffusion furnace 200 to ensure that the electrodes in the furnace body do not affect the magnetic field auxiliary. Electromagnet inside the unit.

本公开第一方面实施例提供的离子氮碳硫多元共渗辅助设备的工作过程及原理如下:The working process and principle of the auxiliary equipment for ionic nitrogen-carbon-sulfur multi-component interpenetration provided by the embodiment of the first aspect of the present disclosure are as follows:

扩渗前,利用模拟软件对待处理的金属工件进行建模,逐步增大模拟电磁铁的输入电流,使金属工件完全被磁场囊括且金属工件附近场强达到500Gs左右,记录此时电磁铁的输入电流数值。Before infiltration, use simulation software to model the metal workpiece to be processed, and gradually increase the input current of the simulated electromagnet, so that the metal workpiece is completely covered by the magnetic field and the field strength near the metal workpiece reaches about 500Gs, and the input of the electromagnet at this time is recorded. current value.

离子渗氮炉抽真空后,通过空心阴极离子源向炉内通入含有氮元素、氢元素、碳元素和硫元素的介质气体并接入电离所需的电压,同时向电磁铁的线圈中输入通过数值模拟确定的电流值,介质气体在空心阴极离子源内和炉体内部被电离,电离出氮离子、氢离子、碳离子、硫离子和中性硫原子、碳原子、氮原子等等离子体,通过空心阴极离子源直接将大量等离子体离子射向金属工件,与此同时等离子体受电场和磁场的共同作用,在金属工件和金属盘表面大量聚集,在电场的作用下,金属圆盘表面聚集的等离子体会向金属工件表面运动使金属工件表面的氮离子、氢离子、碳离子、硫离子和中性硫原子、碳原子、氮原子等等离子体浓度增加;同时等离子体轰击金属工件和金属盘表面使部分金属原子溅射出来,逸出更多的金属原子,与氮结合生成金属氮化物,与碳结合生成金属碳化物,与硫结合生成金属硫化物,从而使金属化合物的结合概率增加,金属化合物的浓度增加;因凝附作用又重新沉积到金属工件表面,此时的金属化合物不稳定,一部分氮原子、硫原子、碳原子通过扩散进入金属工件表面形成共渗层,最终使得共渗层的厚度增加,扩渗效率提高。此外,正离子及电子在耦合场中受到磁场的洛伦兹力及电场的库仑力共同作用,电场和磁场相互垂直,共同作用于电子,使其在金属工件附近做摆线运动;相比于常规离子氮碳硫共渗,本公开实施例提供的辅助设备在相同条件下提高了共渗温度,活性氮、碳、硫原子向金属工件内部扩散加深,共渗层质量提高脆性减小,加强了扩渗效果。硫化物在磁场的作用下沉积作用加强,晶格间隙减小,在不影响减磨性的基础上,增加了表面硬度。对于重载摩擦副,经过本公开实施例提供的辅助设备所处理的氮碳硫三元共渗工件具有优越性。此外,本公开实施例提供的辅助设备采用磁控溅射的方式,对等离子体加以磁场限制,使用调控更加方便的电磁铁,增加共渗过程的可控性。After the ion nitriding furnace is evacuated, the medium gas containing nitrogen, hydrogen, carbon and sulfur elements is introduced into the furnace through the hollow cathode ion source, and the voltage required for ionization is connected, and the input to the coil of the electromagnet is at the same time. According to the current value determined by numerical simulation, the medium gas is ionized in the hollow cathode ion source and the furnace body, ionizing nitrogen ions, hydrogen ions, carbon ions, sulfur ions and neutral sulfur atoms, carbon atoms, nitrogen atoms and other plasmas, Through the hollow cathode ion source, a large number of plasma ions are directly directed to the metal workpiece. At the same time, the plasma is subjected to the combined action of the electric field and the magnetic field, and a large amount of plasma accumulates on the surface of the metal workpiece and the metal disk. Under the action of the electric field, the surface of the metal disk gathers. The plasma will move to the surface of the metal workpiece to increase the plasma concentration of nitrogen ions, hydrogen ions, carbon ions, sulfur ions and neutral sulfur atoms, carbon atoms, nitrogen atoms on the surface of the metal workpiece; at the same time, the plasma bombards the metal workpiece and metal disk. The surface causes some metal atoms to sputter out, escape more metal atoms, combine with nitrogen to form metal nitrides, combine with carbon to form metal carbides, and combine with sulfur to form metal sulfides, thereby increasing the binding probability of metal compounds, The concentration of the metal compound increases; it re-deposits on the surface of the metal workpiece due to condensation, and the metal compound is unstable at this time, and some nitrogen atoms, sulfur atoms, and carbon atoms diffuse into the surface of the metal workpiece to form a co-infiltration layer, which finally makes the co-infiltration layer. As the thickness of the layer increases, the diffusion efficiency increases. In addition, the positive ions and electrons are subjected to the combined action of the Lorentz force of the magnetic field and the Coulomb force of the electric field in the coupled field. The electric field and the magnetic field are perpendicular to each other and act together on the electrons, making them perform cycloid motion near the metal workpiece; In conventional ionic nitrogen-carbon-sulfur co-penetration, the auxiliary equipment provided by the embodiment of the present disclosure increases the co-infiltration temperature under the same conditions, the diffusion of active nitrogen, carbon and sulfur atoms into the metal workpiece deepens, the quality of the co-infiltration layer is improved, the brittleness is reduced, and the brittleness is reduced. Diffusion effect. The deposition of sulfide under the action of the magnetic field is strengthened, the lattice gap is reduced, and the surface hardness is increased without affecting the wear reduction. For heavy-load friction pairs, the nitrogen-carbon-sulfur ternary infiltration workpiece processed by the auxiliary equipment provided in the embodiments of the present disclosure has advantages. In addition, the auxiliary equipment provided by the embodiments of the present disclosure adopts the method of magnetron sputtering to confine the plasma with a magnetic field, and uses an electromagnet that is more convenient to control, thereby increasing the controllability of the co-infiltration process.

进一步地,磁场会对放入其中的金属工件进行磁化,主要影响表现在:当为金属工件提供外加磁场时,不同金属工件其内部材质不同,受到外加磁场影响结果不同,例如,所用金属工件的材料为低合金结构钢,属于铁磁性材料,当施加外加磁场时磁畴易磁化向着磁场强度方向移动,这一变化加速了氮、碳、硫原子的扩散,在垂直磁场方向的平面上,带电微粒作圆周运动,经实验证明磁场强度为270Gs以上时,电离产生的氮、碳、硫原子最易向金属表面做定向运动,达到强化共渗的目的;在磁场作用下,金属工件表面产生了磁畴转动和磁壁位移,增加了交换能和各向异性能,同时材料表面附近磁化而导致磁致伸缩,增加了应变能,加速了渗扩物质的扩散,磁化强度大幅提高。Further, the magnetic field will magnetize the metal workpiece placed in it. The main influence is: when an external magnetic field is provided for the metal workpiece, the internal materials of different metal workpieces are different, and the results are different when affected by the external magnetic field. The material is low-alloy structural steel, which is a ferromagnetic material. When an external magnetic field is applied, the magnetic domain is easily magnetized and moves toward the direction of the magnetic field strength. This change accelerates the diffusion of nitrogen, carbon, and sulfur atoms. On a plane perpendicular to the magnetic field direction, charged The particles move in a circular motion. It has been proved by experiments that when the magnetic field strength is above 270Gs, the nitrogen, carbon and sulfur atoms generated by ionization are most likely to move towards the metal surface in a directional motion to achieve the purpose of strengthening co-infiltration; under the action of the magnetic field, the surface of the metal workpiece produces The rotation of the magnetic domain and the displacement of the magnetic wall increase the exchange energy and anisotropy energy. At the same time, the magnetization near the surface of the material leads to magnetostriction, which increases the strain energy, accelerates the diffusion of infiltrating substances, and greatly improves the magnetization.

本公开第二方面实施例提供的离子氮碳硫多元共渗处理系统,参见图3,包括:The ionic nitrogen-carbon-sulfur multi-permeation treatment system provided by the embodiment of the second aspect of the present disclosure, referring to FIG. 3 , includes:

离子渗氮炉200,包括炉体210、设置于炉体210内用于放置金属工件230的工件台220;The ion nitriding furnace 200 includes a furnace body 210 and a workpiece table 220 disposed in the furnace body 210 for placing the metal workpiece 230;

离子氮碳硫多元共渗辅助设备100,放置于炉体210上;Auxiliary equipment 100 for ionic nitrogen, carbon and sulfur multicomponent co-infiltration is placed on the furnace body 210;

变压器300,与离子氮碳硫多元共渗辅助设备100内电磁铁120的线圈122连接,以产生磁场,并通过工件台向炉体210内提供电离所需的900V电压,金属盘140与工件台共电源,变压器300还用于为空心阴极离子源提供的800V电压;The transformer 300 is connected with the coil 122 of the electromagnet 120 in the auxiliary equipment 100 of ion nitrogen carbon sulfur multi-infiltration to generate a magnetic field, and supply the required 900V voltage for ionization into the furnace body 210 through the workpiece table, and the metal disk 140 is connected to the workpiece table. Common power supply, the transformer 300 is also used to provide the 800V voltage for the hollow cathode ion source;

真空泵400,与离子扩渗炉200的炉体210连通,用于使炉体210内处于真空状态;The vacuum pump 400 is communicated with the furnace body 210 of the ion diffusion furnace 200, and is used to make the furnace body 210 in a vacuum state;

供气瓶500,与离子扩渗炉200的炉体210连通,用于向炉体210内提供惰性气体以及含有氮元素、氢元素、碳元素和硫元素的气体;The gas supply cylinder 500 is communicated with the furnace body 210 of the ion diffusion furnace 200, and is used for supplying the inert gas and the gas containing nitrogen element, hydrogen element, carbon element and sulfur element into the furnace body 210;

电气控制柜600,用于控制离子氮碳硫多元共渗辅助设备100、离子渗氮炉200、变压器300、真空泵400和供气瓶500。The electrical control cabinet 600 is used to control the auxiliary equipment 100 of ion nitrogen carbon sulfur multi-component co-penetration, the ion nitriding furnace 200, the transformer 300, the vacuum pump 400 and the gas supply cylinder 500.

在一些实施例中,电气控制柜600作为整个离子氮碳硫多元共渗处理系统的控制端口,集成离子扩渗炉电源、电磁铁电源、气体流量计、冷却水流量计、电流表和冷却水控制阀等开关于一体。离子扩渗炉200的炉体210是对金属工件230进行扩渗处理的腔体,具有良好的密封性,炉体210外侧壁上放置磁场辅助单元,炉体210顶部放置空心阴极离子源140,其中,电磁铁用于在金属工件周围产生磁场,离子扩渗炉200的冷却组件为炉体210、空心阴极离子源140和离子氮碳硫多元共渗辅助设备100的电磁铁120及空心阴极离子源140冷却降温。变压器200用于将380V的工业用电转变为实际使用的实验用电(包括为电磁铁的线圈提供的220V电压、为空心阴极离子源提供的800V高压和为炉体内阴阳极间提供的900V高压)。真空泵400用于为炉内210抽真空提供动力来源。In some embodiments, the electrical control cabinet 600 is used as the control port of the entire ion nitrogen carbon sulfur multi-permeation treatment system, integrating the ion diffusion furnace power supply, electromagnet power supply, gas flow meter, cooling water flow meter, ammeter and cooling water control Valve and other switches in one. The furnace body 210 of the ion diffusion furnace 200 is a cavity for infiltrating the metal workpiece 230, and has good sealing performance. A magnetic field auxiliary unit is placed on the outer wall of the furnace body 210, and a hollow cathode ion source 140 is placed on the top of the furnace body 210. The electromagnet is used to generate a magnetic field around the metal workpiece, and the cooling components of the ion diffusion furnace 200 are the furnace body 210 , the hollow cathode ion source 140 , and the electromagnet 120 and the hollow cathode ion of the auxiliary equipment 100 The source 140 cools down. The transformer 200 is used to convert 380V industrial power into practical experimental power (including 220V for the coil of the electromagnet, 800V for the hollow cathode ion source, and 900V for the cathode and anode in the furnace. ). The vacuum pump 400 is used to provide a power source for vacuuming the furnace 210 .

本公开第二方面实施例提供的的离子氮碳硫多元共渗处理系统的工作过程为:The working process of the ionic nitrogen-carbon-sulfur multi-infiltration treatment system provided by the embodiment of the second aspect of the present disclosure is as follows:

扩渗前,将待加工的金属工件置于设有有离子氮碳硫多元共渗辅助设备的离子渗扩渗中,置于工件台上,金属工件和工件台作为阴极连同金属盘均与离子扩渗炉电源的负极相连。随后关闭炉盖及放气阀,打开真空泵抽真空,打开电气控制柜,调节电流使得磁场强度维持在500Gs附近。调节变压器的占空比和输出电压,打开进气阀向炉内通入所需气体,并在此状态下升温,同时开启空心阴极离子源。待炉内温度达到设定温度后,保温到所需时长。达到扩渗时间后,关闭离子扩渗炉电源、电磁铁电源和空心阴极离子源电源,持续通入惰性气体使金属工件随离子扩渗炉冷却。Before the infiltration, the metal workpiece to be processed is placed in the ion infiltration infiltration with auxiliary equipment of ionic nitrogen, carbon and sulfur, and placed on the workpiece table. The negative pole of the power supply of the infiltration furnace is connected. Then close the furnace cover and the air release valve, open the vacuum pump to evacuate, open the electrical control cabinet, and adjust the current to maintain the magnetic field strength around 500Gs. Adjust the duty cycle and output voltage of the transformer, open the intake valve to introduce the required gas into the furnace, and heat up in this state, and open the hollow cathode ion source at the same time. After the temperature in the furnace reaches the set temperature, keep it warm for the required time. After reaching the diffusion time, turn off the power of the ion diffusion furnace, the electromagnet and the hollow cathode ion source, and continue to inject inert gas to cool the metal workpiece with the ion diffusion furnace.

本公开第二方面实施例提供的离子氮碳硫多元共渗处理系统的工作原理为:The working principle of the ionic nitrogen-carbon-sulfur multi-permeation treatment system provided by the embodiment of the second aspect of the present disclosure is as follows:

利用空心阴极离子源和炉体间的辉光放电效应将通入的气体电离成离子态,对工件台、金属盘和金属工件进行轰击溅射,利用电磁铁的磁场加速离子的轰击作用,同时改变金属工件的磁畴,提高工件表面各项异能,加速氮原子向工件的扩渗,增大扩渗层厚度。Using the glow discharge effect between the hollow cathode ion source and the furnace body, the incoming gas is ionized into an ion state, and the workpiece table, metal disk and metal workpiece are bombarded and sputtered, and the magnetic field of the electromagnet is used to accelerate the bombardment of the ions, and at the same time Change the magnetic domain of the metal workpiece, improve the various properties of the workpiece surface, accelerate the diffusion of nitrogen atoms to the workpiece, and increase the thickness of the diffusion layer.

本公开第三方面实施例提出的一种离子氮碳硫多元共渗处理方法,利用本公开提出的离子氮碳硫多元共渗处理系统完成。本公开的处理方法包括以下步骤:The ionic nitrogen-carbon-sulfur multi-permeation treatment method proposed by the embodiment of the third aspect of the present disclosure is completed by using the ionic nitrogen-carbon-sulfur multi-permeation treatment system proposed in the present disclosure. The processing method of the present disclosure includes the following steps:

1)将金属工件置于装有离子氮碳硫多元共渗辅助设备的离子扩渗炉的工件台之上,关闭炉盖及放气阀,打开真空泵抽走炉内空气,至真空度10~30Pa,维持10~20min;1) Place the metal workpiece on the workpiece table of the ion diffusion furnace equipped with the auxiliary equipment of ion nitrogen carbon sulfur multi-infiltration, close the furnace cover and the air release valve, and open the vacuum pump to remove the air in the furnace until the vacuum degree is 10~ 30Pa for 10-20min;

2)维持炉内的真空度,向炉内通入惰性气体(如氩气、氦气和/或氖气等),电气控制柜通过流量计控制炉内的气压维持在30~50Pa;2) Maintain the vacuum degree in the furnace, pass inert gas (such as argon, helium and/or neon, etc.) into the furnace, and the electrical control cabinet controls the air pressure in the furnace to maintain 30-50Pa through the flow meter;

3)通过电气控制柜调节变压器的电压(800V-900V)及占空比(70%-80%),使得炉内在惰性气体气氛下升温,以保证炉内进行稳定的辉光放电,同时开启空心阴极离子源;保持炉内气压稳定在30-50Pa,通过电离惰性气体对工件表面进行清洗;3) Adjust the voltage (800V-900V) and duty ratio (70%-80%) of the transformer through the electrical control cabinet, so that the furnace is heated up in an inert gas atmosphere, so as to ensure stable glow discharge in the furnace and open the hollow core at the same time. Cathode ion source; keep the gas pressure in the furnace stable at 30-50Pa, and clean the workpiece surface by ionizing inert gas;

4)当炉内升温到300℃~350℃时,打开炉体的进气阀通入含有氮元素的气体(如氮气N2)和含有氢元素的气体(如氢气H2),其中含有氮元素的气体与含有氢元素的气体的体积流量比例为1:4~1:5,调节流量计进气,使炉体内的气压维持在200Pa-500Pa,通过电气控制柜使炉内继续升温;4) When the temperature in the furnace reaches 300°C to 350°C, open the inlet valve of the furnace body and pass in a gas containing nitrogen (such as nitrogen N 2 ) and a gas containing hydrogen (such as hydrogen H 2 ), which contains nitrogen The volume flow ratio of element gas to hydrogen-containing gas is 1:4 to 1:5, adjust the flow meter to intake air, keep the air pressure in the furnace at 200Pa-500Pa, and continue to heat up the furnace through the electrical control cabinet;

5)当炉体内的温度达到400℃~450℃后,停止通入惰性气体,向炉内通入含有碳元素的气体(如乙炔C2H2,由于低温时碳元素不会渗入金属工件,所以在温度升高后再通入乙炔,可防止气体浪费),保持含有氢元素的气体、含有氮元素的气体和含有碳元素的气体的体积流量比例为75~83:20~15:5~2,保持总进气气压为300Pa~350Pa不变,降低电压到600~700V,当炉内温度达到400~450℃时向电磁铁的线圈内通入电压,使得金属工件处的磁场强度保持在50Gs~80Gs;5) When the temperature in the furnace body reaches 400℃~450℃, stop feeding the inert gas, and feed the gas containing carbon element (such as acetylene C 2 H 2 ) into the furnace, because the carbon element will not penetrate into the metal workpiece at low temperature, Therefore, after the temperature is raised, acetylene is introduced to prevent gas waste), and the volume flow ratio of hydrogen-containing gas, nitrogen-containing gas and carbon-containing gas is kept at 75-83: 20-15: 5- 2. Keep the total intake air pressure unchanged at 300Pa~350Pa, reduce the voltage to 600~700V, and when the temperature in the furnace reaches 400~450℃, apply a voltage to the coil of the electromagnet, so that the magnetic field strength at the metal workpiece is maintained at 50Gs~80Gs;

6)到达所需共渗温度(500~550℃)后,保持离子氮碳硫多元共渗辅助装置的线圈中的电流稳定在5-15A之间,提高磁场强度在100~120Gs;6) After reaching the required co-infiltration temperature (500-550 °C), keep the current in the coil of the ionic nitrogen-carbon-sulfur multi-co-infiltration auxiliary device stable between 5-15A, and increase the magnetic field strength to 100-120Gs;

7)保压250-300Pa、保温3h-7h,每隔1h通过降低通入电磁铁的电流使电磁场的磁场强度减少10Gs;7) The pressure is maintained at 250-300Pa, and the temperature is maintained for 3h-7h, and the magnetic field strength of the electromagnetic field is reduced by 10Gs by reducing the current passing through the electromagnet every 1h;

8)保温保压结束后,向炉内通入含有硫元素的气体(如硫化氢H2S),再次调节含有氢元素的气体、含有氮元素的气体、含有碳元素的气体与含有硫元素的气体的流量体积比例为60~65:15~2:5~10:10~15,提高炉内总气压到350Pa~400Pa;8) After the heat preservation and pressure keeping, the gas containing sulfur element (such as hydrogen sulfide H 2 S) is introduced into the furnace, and the gas containing hydrogen element, the gas containing nitrogen element, the gas containing carbon element and the gas containing sulfur element are adjusted again. The flow volume ratio of the gas is 60~65:15~2:5~10:10~15, and the total pressure in the furnace is increased to 350Pa~400Pa;

9)降低炉内温度至450~500℃后,保温0.5h~1h,保持炉内金属工件附件磁场强度至100Gs~150Gs左右。9) After reducing the temperature in the furnace to 450-500℃, keep the temperature for 0.5h-1h, and keep the magnetic field strength of the metal workpiece accessories in the furnace to about 100Gs-150Gs.

10)到达保温时间后,缓慢降低电压,同时缓慢减少含有氢元素的气体、含有氮元素的气体、含有碳元素的气体与含有硫元素的气体的流量,降低炉内气压,最终保持炉内气压在50Pa左右,电磁场磁场强度保持不变;10) After reaching the holding time, slowly reduce the voltage, and at the same time slowly reduce the flow rate of hydrogen-containing gas, nitrogen-containing gas, carbon-containing gas and sulfur-containing gas, reduce the pressure in the furnace, and finally maintain the pressure in the furnace At about 50Pa, the magnetic field strength of the electromagnetic field remains unchanged;

11)气温降到400℃以下后,关闭电磁场,停止通入含有氢元素的气体、含有氮元素的气体、含有碳元素的气体与含有硫元素的气体,随即通入少量惰性气体,保持气压在30Pa-50Pa,对扩渗后的金属工件表面进行清洗20min;11) After the temperature drops below 400°C, turn off the electromagnetic field, stop feeding hydrogen-containing gas, nitrogen-containing gas, carbon-containing gas and sulfur-containing gas, and then pass in a small amount of inert gas to keep the air pressure at 30Pa-50Pa, clean the surface of the metal workpiece after infiltration for 20min;

12)清洗过后缓慢降低、关闭离子扩渗炉电源和空心阴极离子源电源。12) After cleaning, slowly lower and turn off the power of the ion diffusion furnace and the hollow cathode ion source.

13)待炉内冷却至150℃以下后,关闭惰性气体通入取出金属工件。13) After the furnace is cooled to below 150°C, turn off the inert gas and take out the metal workpiece.

总体来说,为防止磁场中的大量离子运动碰撞阻碍氮碳硫化合物的沉积,而磁场又会对硫离子加以限制,减小工件表面硫化物的晶格间隙,因此碳氮共渗时磁场要随时间适当降低,而三元共渗时磁场又要适当提高。In general, in order to prevent a large number of ion motion collisions in the magnetic field from hindering the deposition of nitrogen-carbon-sulfur compounds, and the magnetic field will limit the sulfur ions and reduce the lattice gap of the sulfide on the surface of the workpiece, so the magnetic field during carbonitriding is required. Appropriately decreased with time, and the magnetic field should be appropriately increased during ternary co-osmosis.

在一些实施例中,通入线圈内的直流电流,是对离子扩渗炉、离子氮碳硫多元共渗辅助设备、金属工件和工件台构建1:1的仿真模型,逐步增大模拟电磁铁的输入电流,使金属工件完全被磁场囊括且金属工件附近场强达到500Gs左右时对应的电磁铁的输入电流数值。In some embodiments, the direct current flowing into the coil is to build a 1:1 simulation model for the ion diffusion furnace, the auxiliary equipment for ion nitrogen-carbon-sulfur multi-infiltration, the metal workpiece and the workpiece table, and the simulated electromagnet is gradually increased. The input current value of the electromagnet corresponds to when the metal workpiece is completely encompassed by the magnetic field and the field strength near the metal workpiece reaches about 500Gs.

在一些实施例中,金属工件放入炉内前,将依次将待处理工件用标号为240#、400#、800#、1000#、1500#、2000#的砂纸打磨光滑,在抛光机上抛光至无划痕,随后用丙酮和酒精超声清洗并吹干,以保证金属工件表面的清洁。In some embodiments, before the metal workpieces are put into the furnace, the workpieces to be processed are sequentially polished with sandpapers labeled 240#, 400#, 800#, 1000#, 1500#, and 2000#, and polished on a polishing machine to Scratch-free, then ultrasonically cleaned with acetone and alcohol and blow-dried to keep metal workpiece surfaces clean.

在实际使用时,本公开实施例提供的离子氮碳硫多元共渗处理系统可以通过调节离子氮碳硫多元共渗辅助设备中线圈的电流,改变磁场强度,从而改变扩渗层厚度。同时扩渗层增加,硫化物在扩渗层中具有更高的比例。硫化物在磁场的作用下沉积作用加强,晶格间隙减小,在不影响减磨性的基础上,增加了表面硬度。对于重载摩擦副,经本公开实施例提供的处理方法处理后的氮碳硫三元共渗工件具有优越性。采用磁控溅射的方式,对等离子体加以磁场限制,使用调控更加方便的电磁铁,增加扩渗过程的可控性,且共渗效率提高,扩渗层增厚,所需时间短,节约能源。In actual use, the ionic nitrogen-carbon-sulfur multi-permeation treatment system provided by the embodiment of the present disclosure can change the magnetic field intensity by adjusting the current of the coil in the ion-nitrogen carbon-sulfur multi-permeation auxiliary equipment, thereby changing the thickness of the diffusion layer. At the same time, the diffusion layer increases, and the sulfide has a higher proportion in the diffusion layer. The deposition of sulfide under the action of the magnetic field is strengthened, the lattice gap is reduced, and the surface hardness is increased without affecting the wear reduction. For heavy-load friction pairs, the nitrogen-carbon-sulfur ternary co-infiltration workpiece treated by the treatment method provided by the embodiment of the present disclosure has advantages. The method of magnetron sputtering is used to limit the magnetic field of the plasma, use electromagnets that are more convenient to control, increase the controllability of the diffusion process, improve the co-infiltration efficiency, and increase the thickness of the diffusion layer. energy.

下面描述本公开提供的离子氮碳硫多元共渗处理方法的具体示例一,具体包括以下步骤:The specific example 1 of the ionic nitrogen-carbon-sulfur multi-component co-permeation treatment method provided by the present disclosure is described below, which specifically includes the following steps:

扩渗前,首先用模拟软件1:1建立离子扩渗炉和电磁场模型,并建立直径25mm、厚8mm的圆柱形金属工件模型,模型材料选择为铁磁性材料,逐步增大模拟电磁铁的输入电流,使工件完全被磁场囊括且工件附近场强达到500Gs,记录此时电磁铁的输入电流数值;然后将直径25mm、厚8mm的圆柱形38CrMoAl试样块作为金属工件依次用标号为240#、400#、800#、1000#、1500#、2000#的砂纸打磨光滑,在抛光机上抛光至无划痕,用丙酮和酒精超声清洗并吹干。Before infiltration, first use the simulation software to establish a 1:1 model of the ion infiltration furnace and electromagnetic field, and establish a cylindrical metal workpiece model with a diameter of 25mm and a thickness of 8mm. The model material is selected as a ferromagnetic material, and the input of the simulated electromagnet is gradually increased. current, so that the workpiece is completely surrounded by the magnetic field and the field strength near the workpiece reaches 500Gs, and the input current value of the electromagnet at this time is recorded; then the cylindrical 38CrMoAl sample block with diameter 25mm and thickness 8mm is used as a metal workpiece. 400#, 800#, 1000#, 1500#, 2000# sandpaper is smooth, polished on a polishing machine to no scratches, ultrasonically cleaned with acetone and alcohol and dried.

1)将金属工件试样置于装有离子氮碳硫多元共渗辅助设备的离子扩渗炉的工件台之上,与电源阴极相连,关闭炉盖及放气阀,打开真空泵抽走炉内空气,至真空度30Pa,维持10min;1) Place the metal workpiece sample on the workpiece table of the ion diffusion furnace equipped with the auxiliary equipment of ion nitrogen carbon sulfur multi-infiltration, connect it with the cathode of the power supply, close the furnace cover and the air release valve, and turn on the vacuum pump to remove the furnace. Air, to a vacuum of 30Pa, maintained for 10min;

2)维持炉内的真空度,向炉内通入氩气,电气控制柜通过流量计控制炉内的气压维持在50Pa;随后降下炉壳及关闭放气阀,打开真空泵抽走炉内空气至炉内气压低于50Pa,打开扩渗炉供电系统调节电压(800V)及缓慢提升占空比至70%。2) Maintain the vacuum degree in the furnace, pass argon gas into the furnace, and the electrical control cabinet controls the air pressure in the furnace to maintain 50Pa through the flow meter; then lower the furnace shell and close the air release valve, and open the vacuum pump to remove the air in the furnace to 50Pa. When the pressure in the furnace is lower than 50Pa, turn on the power supply system of the infiltration furnace to adjust the voltage (800V) and slowly increase the duty ratio to 70%.

3)通过电气控制柜调节变压器的电压(800V)及占空比(70%),使得炉内在氩气气体气氛下升温,以保证炉内进行稳定的辉光放电;打开进气阀通入氩气,保持炉内气压稳定在50Pa对工件表面进行清洗。3) Adjust the voltage (800V) and duty ratio (70%) of the transformer through the electrical control cabinet, so that the furnace is heated up in an argon gas atmosphere to ensure stable glow discharge in the furnace; open the air inlet valve and let in argon Keep the air pressure in the furnace stable at 50Pa to clean the surface of the workpiece.

4)当炉内升温到300℃时,打开炉体的进气阀通入氮气和氢气,其中氮气和氢气的体积流量比例为1:4,调节流量计进气,使炉体内的气压维持在200Pa,通过电气控制柜降低变压器的电压至700V;4) When the temperature in the furnace reaches 300°C, open the inlet valve of the furnace body and introduce nitrogen and hydrogen, wherein the volume flow ratio of nitrogen and hydrogen is 1:4. 200Pa, reduce the voltage of the transformer to 700V through the electrical control cabinet;

5)当炉体内的温度达到400℃后,通入乙炔,停止通入氩气,保持气体的体积流量比例H2:N2:C2H2=75:20:5,保持总进气气压为300Pa不变,再次降低电压到600V,此时开启离子氮碳硫多元共渗辅助装置电磁铁控制器,保持金属工件处的磁场强度在50Gs;5) When the temperature in the furnace body reaches 400°C, feed acetylene, stop feeding argon, keep the volume flow ratio of the gas H 2 : N 2 : C 2 H 2 =75:20:5, and keep the total intake air pressure When the voltage remains unchanged at 300Pa, the voltage is reduced to 600V again. At this time, the electromagnet controller of the ionic nitrogen-carbon-sulfur multi-infiltration auxiliary device is turned on to keep the magnetic field strength at the metal workpiece at 50Gs;

6)到达所需共渗温度(500℃)后,如果电流过大,则再次降低电压,保持离子氮碳硫多元共渗辅助装置的线圈中的电流稳定在10A,提高磁场强度在120Gs;6) After reaching the required co-infiltration temperature (500°C), if the current is too large, reduce the voltage again, keep the current in the coil of the ionic nitrogen-carbon-sulfur multi-co-infiltration auxiliary device stable at 10A, and increase the magnetic field strength to 120Gs;

7)保温一段时间,保温时长7h,每隔1h电磁场的磁场强度减少10Gs;7) Hold for a period of time, the holding time is 7h, and the magnetic field strength of the electromagnetic field is reduced by 10Gs every 1h;

8)保温结束时间到达后,向炉内通入H2S,再次调节气体的体积流量比例H2:N2:C2H2:H2S=65:20:5:10,提高炉内总气压到400Pa;8) After the end time of the heat preservation, pass H 2 S into the furnace, adjust the gas volume flow ratio H 2 : N 2 : C 2 H 2 : H 2 S = 65:20: 5:10 again, and increase the furnace Total air pressure to 400Pa;

9)降低炉内温度至到450℃后,继续保温1h,保持炉内金属工件附件提高电磁铁的磁场强度至150Gs左右;9) After reducing the temperature in the furnace to 450 °C, continue to keep the temperature for 1 hour, keep the metal workpiece accessories in the furnace and increase the magnetic field strength of the electromagnet to about 150Gs;

10)到达保温时间后,缓慢降低电压,同时缓慢减少H2、N2、C2H2、H2S流量,降低炉内气压,最终保持炉内气压在50Pa左右,电磁场磁场强度保持不变;10) After reaching the holding time, slowly reduce the voltage, and at the same time slowly reduce the flow of H 2 , N 2 , C 2 H 2 , H 2 S, reduce the air pressure in the furnace, and finally keep the air pressure in the furnace at about 50Pa, and the magnetic field strength of the electromagnetic field remains unchanged ;

11)气温降到400℃以下后,关闭电磁场,停止通入H2、N2、C2H2、H2S,随即通入少量惰性气体氩气,保持气压在50Pa左右,对扩渗渗氮后的金属工件表面进行清洗20min;11) After the temperature drops below 400°C, turn off the electromagnetic field, stop feeding H 2 , N 2 , C 2 H 2 , and H 2 S, and then feed a small amount of inert gas argon to keep the air pressure at about 50Pa, to prevent the diffusion and permeation. The surface of the metal workpiece after nitrogen is cleaned for 20min;

12)清洗过后缓慢降低、关闭离子扩渗炉电源。12) Slowly lower and turn off the power of the ion diffusion furnace after cleaning.

13)待炉内冷却至150℃以下后,关闭氩气通入取出金属工件试样块。13) After the furnace is cooled to below 150°C, turn off the argon gas and take out the metal workpiece sample block.

将处理后的金属工件切割,对切断面打磨抛光,用4%硝酸酒精腐蚀以观测扩渗层形貌,结果如图5所示。对比未使用离子氮碳硫多元共渗辅助装置制得的样品截面图(如图4所示)可以看出,离子氮碳硫多元共渗辅助装置的使用提高了扩渗层厚度,经过常规共渗处理和使用本公开实施例提供的离子氮碳硫元共渗处理系统及方法处理后的截面金相图如图4和图5所示、硬度梯度图如图6所示、UMT分析图如图7所示。结果表明经过案例一处理后,共渗层厚度达到483μm,相比较于常规共渗处理的173μm,使用本公开装置及方法共渗深度提升了近2倍。图6显示金属工件表面硬度由常规共渗处理的450HV0.05提升到600HV0.05。摩擦系数(COF)相比较常规共渗处理,本公开的摩擦系数要明显降低。此案例的氮碳硫共渗层厚度有明显提升,表面硬度更高,适用于低频重载的摩擦条件下。The treated metal workpiece was cut, the cut surface was polished and etched with 4% nitric acid to observe the morphology of the diffusion layer. The results are shown in Figure 5. Comparing the cross-sectional view of the sample without the use of the ionic nitrogen-carbon-sulfur multi-infiltration auxiliary device (as shown in Figure 4), it can be seen that the use of the ionic nitrogen-carbon-sulfur multi-infiltration auxiliary device increases the thickness of the infiltration layer. Figure 4 and Figure 5 show the cross-sectional metallographic diagram of the infiltration treatment and the use of the ionic nitrogen-carbon-sulfur co-infiltration treatment system and method provided by the embodiment of the present disclosure, the hardness gradient diagram is shown in Figure 6, and the UMT analysis diagram is shown in Figure 5. shown in Figure 7. The results show that after the treatment of Case 1, the thickness of the co-infiltration layer reaches 483 μm. Compared with 173 μm in the conventional co-infiltration treatment, the co-infiltration depth is increased by nearly 2 times using the device and method of the present disclosure. Figure 6 shows that the surface hardness of the metal workpiece is increased from 450HV 0.05 treated by conventional co-infiltration to 600HV 0.05 . Coefficient of Friction (COF) Compared with the conventional co-infiltration treatment, the coefficient of friction of the present disclosure is significantly lower. In this case, the thickness of the nitrogen-carbon-sulfur co-infiltration layer is significantly improved, and the surface hardness is higher, which is suitable for low-frequency and heavy-load friction conditions.

综上所述,本公开实施例提供的离子氮碳硫多元共渗处理方法相比较于现有的离子扩渗具有如下优势:To sum up, the ionic nitrogen-carbon-sulfur multi-component interpenetration treatment method provided by the embodiment of the present disclosure has the following advantages compared with the existing ion diffusion infiltration:

1、相比于常规离子扩渗,在相同条件下提高了炉内温度,活性氮碳硫原子向内部扩散加深,化合层质量提高,脆性减小,加强了扩渗效果。同时在扩渗层中硫化物的固溶体比例增高,硫化物晶格间的间隙减小。在不影响摩擦系数,具有渗硫耐磨性提高的特性的前提下提高了表面硬度。对于重载摩擦副,经本公开处理方法处理后的氮碳硫三元共渗工件具有优越性。1. Compared with conventional ion diffusion infiltration, the temperature in the furnace is increased under the same conditions, the diffusion of activated nitrogen carbon and sulfur atoms to the interior is deepened, the quality of the compound layer is improved, the brittleness is reduced, and the diffusion infiltration effect is strengthened. At the same time, the proportion of solid solution of sulfide in the diffusion layer increases, and the gap between sulfide lattices decreases. The surface hardness is improved on the premise of not affecting the friction coefficient and improving the wear resistance of vulcanization. For heavy-duty friction pairs, the nitrogen-carbon-sulfur ternary co-infiltration workpiece treated by the treatment method of the present disclosure has advantages.

2、对于不同工件需要不同的限制磁场,永磁铁的磁控溅射方式无法适用于所有工件。而本公开所设计的电磁场具有可控性强的优越性。2. Different limited magnetic fields are required for different workpieces, and the magnetron sputtering method of permanent magnets cannot be applied to all workpieces. The electromagnetic field designed by the present disclosure has the advantage of strong controllability.

3、辅助设备的调控和扩渗过程相配合,使辅助设备产生最大的效益,在所述辅助设备的辅助下相比于常规离子氮碳硫共渗可以使化合物层和渗扩层深度增加,渗扩层峰值硬度增加、耐磨性增加、渗氮的质量更高,表层的硫化物更致密,表面硬度更高。而且节约能源。3. The adjustment of auxiliary equipment and the diffusion process are coordinated to maximize the benefits of the auxiliary equipment. Compared with the conventional ion-nitrogen-carbon-sulfur co-seepage, the depth of the compound layer and the infiltration-diffusion layer can be increased with the assistance of the auxiliary equipment. The peak hardness of the infiltrated layer increases, the wear resistance increases, the quality of nitriding is higher, the sulfide on the surface layer is denser, and the surface hardness is higher. And save energy.

在本说明书的描述中,参考术语“一个实施例”、“一些实施例”、“示意性实施例”、“示例”、“具体示例”、或“一些示例”等的描述意指结合该实施例或示例描述的具体特征、结构、材料或者特点包含于本公开的至少一个实施例或示例中。在本说明书中,对上述术语的示意性表述不一定指的是相同的实施例或示例。而且,描述的具体特征、结构、材料或者特点可以在任何的一个或多个实施例或示例中以合适的方式结合。In the description of this specification, reference to the terms "one embodiment," "some embodiments," "exemplary embodiment," "example," "specific example," or "some examples", etc., is meant to incorporate the embodiments A particular feature, structure, material, or characteristic described by an example or example is included in at least one embodiment or example of the present disclosure. In this specification, schematic representations of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the particular features, structures, materials or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.

尽管已经示出和描述了本公开的实施例,本领域的普通技术人员可以理解:在不脱离本公开的原理和宗旨的情况下可以对这些实施例进行多种变化、修改、替换和变型,本公开的范围由权利要求及其等同物限定。Although embodiments of the present disclosure have been shown and described, it will be understood by those of ordinary skill in the art that various changes, modifications, substitutions, and alterations can be made in these embodiments without departing from the principles and spirit of the present disclosure, The scope of the present disclosure is defined by the claims and their equivalents.

Claims (8)

1.一种离子氮碳硫多元共渗辅助设备,所述离子氮碳硫多元共渗辅助设备适于放置于离子扩渗炉的炉体上,所述离子扩渗炉内具有用于放置金属工件的工件台,其特征在于,所述离子渗氮辅助设备包括:1. An ionic nitrogen-carbon-sulfur multi-component co-infiltration auxiliary device, the ionic nitrogen-carbon-sulfur multi-component co-infiltration auxiliary device is suitable for being placed on the furnace body of an ion diffusion infiltration furnace, and the ion diffusion infiltration furnace has a structure for placing metal The workpiece table of the workpiece is characterized in that, the ion nitriding auxiliary equipment comprises: 空心阴极离子源,所述空心阴极离子源适于放置在所述炉体的顶部,用于向所述金属工件附近射出等离子体电子束;和a hollow cathode ion source adapted to be placed on top of the furnace body for emitting a plasma electron beam near the metal workpiece; and 磁场辅助单元,所述磁场辅助单元包括绝缘壳体和多个电磁铁;所述绝缘壳体适于放置于所述炉体的侧壁上;多个所述电磁铁同轴且由内至外依次间隔排布于所述绝缘壳体内,相邻两个所述电磁铁的绕线方式相反,多个所述电磁铁用于在所述离子扩渗炉内形成可控的磁场,以改变所述金属工件表面电子的运动轨迹和所述金属工件的磁畴。A magnetic field auxiliary unit, the magnetic field auxiliary unit includes an insulating casing and a plurality of electromagnets; the insulating casing is suitable for being placed on the side wall of the furnace body; a plurality of the electromagnets are coaxial and from the inside to the outside Arranged in the insulating shell in sequence, two adjacent electromagnets are wound in opposite ways, and a plurality of the electromagnets are used to form a controllable magnetic field in the ion diffusion furnace to change all the electromagnets. The motion trajectory of electrons on the surface of the metal workpiece and the magnetic domain of the metal workpiece. 2.根据权利要求1所述的离子氮碳硫多元共渗辅助设备,其特征在于,向所述电磁铁通入的电流满足:使所述金属工件完全被所述电磁铁产生的磁场囊括且所述金属工件附近的磁场强度达到450Gs~550Gs。2. The ionic nitrogen-carbon-sulfur multi-component interpenetration auxiliary equipment according to claim 1, wherein the current passed to the electromagnet satisfies: the metal workpiece is completely encompassed by the magnetic field generated by the electromagnet and all The magnetic field strength near the metal workpiece reaches 450Gs~550Gs. 3.根据权利要求1所述的离子氮碳硫多元共渗辅助设备,其特征在于,各所述电磁铁分别为环形电磁铁。3 . The ionic nitrogen-carbon-sulfur multicomponent interpenetration auxiliary equipment according to claim 1 , wherein each of the electromagnets is a ring electromagnet, respectively. 4 . 4.根据权利要求1所述的离子氮碳硫多元共渗辅助设备,其特征在于,各所述电磁铁的轴向与所述工件台的上平面平行。4. The ionic nitrogen-carbon-sulfur multicomponent interpenetration auxiliary equipment according to claim 1, wherein the axial direction of each electromagnet is parallel to the upper plane of the workpiece table. 5.根据权利要求1所述的离子氮碳硫多元共渗辅助设备,其特征在于,所述磁场辅助单元还包括位于所述炉体内且尽可能靠近所述绝缘壳体设置的金属盘,所述金属盘被所述电磁铁产生的磁感线包裹,所述金属盘的材质与所述金属工件的材质相同,所述金属盘与所述工件台共电源。5. The ionic nitrogen-carbon-sulfur multi-component interpenetration auxiliary equipment according to claim 1, wherein the magnetic field auxiliary unit further comprises a metal plate located in the furnace body and arranged as close as possible to the insulating shell, so The metal disk is wrapped by the magnetic field lines generated by the electromagnet, the material of the metal disk is the same as the material of the metal workpiece, and the metal disk and the workpiece table share a power source. 6.一种离子氮碳硫多元共渗处理系统,其特征在于,包括:6. an ionic nitrogen carbon sulfur multicomponent co-permeation treatment system, is characterized in that, comprises: 离子扩渗炉,所述离子渗氮炉包括炉体、设置于所述炉体内用于放置金属工件的工件台;an ion diffusion and infiltration furnace, the ion nitriding furnace includes a furnace body and a workpiece table arranged in the furnace body for placing metal workpieces; 离子氮碳硫多元共渗辅助设备,所述离子氮碳硫多元共渗磁场辅助设备为根据权利要求1~5中任一项所述的离子氮碳硫多元共渗辅助设备;Auxiliary equipment for ionic nitrogen-carbon-sulfur multi-infiltration, wherein the magnetic auxiliary equipment for ionic nitrogen-carbon-sulfur multi-infiltration is the auxiliary equipment for ionic nitrogen-carbon-sulfur multi-infiltration according to any one of claims 1 to 5; 变压器,所述变压器与所述电磁铁、所述工件台和所述空心阴极离子源连接,用于使所述电磁铁产生磁场和向所述炉体内提供电离电压;a transformer, which is connected with the electromagnet, the workpiece table and the hollow cathode ion source, and is used for making the electromagnet generate a magnetic field and supplying an ionization voltage to the furnace body; 真空泵,所述真空泵与所述炉体连通,用于使所述炉体内处于真空状态;a vacuum pump, which is communicated with the furnace body and is used to make the furnace body in a vacuum state; 供气瓶,与所述炉体连通,用于向所述炉体内提供惰性气体、含有氮元素的气体、含有氢元素的气体、含有碳元素的气体和含有硫元素的气体;和a gas supply cylinder, communicated with the furnace body, for supplying inert gas, nitrogen-containing gas, hydrogen-containing gas, carbon-containing gas and sulfur-containing gas into the furnace body; and 电气控制柜,用于控制所述离子氮碳硫多元共渗辅助设备备、所述离子扩渗炉、所述变压器、所述真空泵和所述供气瓶。An electrical control cabinet is used to control the auxiliary equipment for ionic nitrogen, carbon and sulfur multi-component interpenetration, the ion diffusion furnace, the transformer, the vacuum pump and the gas supply cylinder. 7.一种离子氮碳硫多元共渗处理方法,其特征在于,包括:7. an ion nitrogen carbon sulfur multicomponent co-permeation treatment method, is characterized in that, comprises: 将金属工件放置在离子扩渗炉的炉体内,对所述炉体内抽真空,并向所述炉体内通入惰性气体;The metal workpiece is placed in the furnace body of the ion diffusion furnace, the furnace body is evacuated, and an inert gas is introduced into the furnace body; 对所述炉体内通入电压并升温,以保证所述炉体内进行稳定的辉光放电,开启所述空心阴极离子源;Passing a voltage into the furnace body and raising the temperature to ensure stable glow discharge in the furnace body, and turning on the hollow cathode ion source; 待所述炉体内的温度达到第一温度时,向所述炉体内通入含有氮元素的气体和含有氢元素的气体,继续对所述炉体内升温;When the temperature in the furnace body reaches the first temperature, the gas containing nitrogen element and the gas containing hydrogen element are introduced into the furnace body, and the temperature in the furnace body is continued to rise; 待所述炉体内的温度达到第二温度时,停止通入惰性气体,并向所述炉体内通入含有碳元素的气体,利用根据权利要求1~5中任一项所述的离子氮碳硫多元共渗辅助设备向所述金属工件提供第一磁场强度的磁场;When the temperature in the furnace body reaches the second temperature, the feeding of the inert gas is stopped, and the gas containing carbon element is fed into the furnace body, and the ionized nitrogen carbon according to any one of claims 1 to 5 is used. The sulfur multicomponent interpenetration auxiliary equipment provides a magnetic field with a first magnetic field strength to the metal workpiece; 待所述炉体内的温度达到共渗温度后,利用所述离子氮碳硫多元共渗辅助设备向所述金属工件提供第二磁场强度的磁场;After the temperature in the furnace body reaches the co-infiltration temperature, use the ionic nitrogen-carbon-sulfur multi-component co-infiltration auxiliary equipment to provide a magnetic field with a second magnetic field strength to the metal workpiece; 保温保压阶段,逐渐减小所述离子氮碳硫多元共渗辅助设备向所述金属工件提供的磁场的强度至第三磁场强度;In the heat preservation and pressure keeping stage, gradually reduce the intensity of the magnetic field provided by the ionic nitrogen-carbon-sulfur multi-infiltration auxiliary equipment to the metal workpiece to a third magnetic field intensity; 向所述炉体内通入含有硫元素的气体,并降低所述炉体内的温度;Passing gas containing sulfur into the furnace body, and reducing the temperature in the furnace body; 待所述炉体内的温度降低至第三温度时,利用所述离子氮碳硫多元共场辅助设备向所述金属工件提供第四磁场强度的磁场;When the temperature in the furnace body is lowered to a third temperature, use the ion nitrogen carbon sulfur multi-component common field auxiliary equipment to provide a magnetic field with a fourth magnetic field strength to the metal workpiece; 待所述炉体内的温度降低至第四温度时,关闭所述离子氮碳硫多元共渗辅助设备,停止向所述炉体内通入含有氢元素的气体、含有氮元素的气体、含有碳元素的气体和含有硫元素的气体,向所述炉体内通入惰性气体,以对金属工件表面进行清洗;When the temperature in the furnace body is lowered to the fourth temperature, the auxiliary equipment for ion nitrogen carbon sulfur multi-component co-permeation is turned off, and the gas containing hydrogen, nitrogen and carbon elements are stopped to pass into the furnace body. The gas and the gas containing sulfur element are introduced into the furnace body to clean the surface of the metal workpiece; 待所述炉体内的温度降低至第五温度时,停止向所述炉体内通入惰性气体,取出所述金属工件。When the temperature in the furnace body is lowered to the fifth temperature, the inert gas is stopped flowing into the furnace body, and the metal workpiece is taken out. 8.根据权利要求7所述的离子氮碳硫多元共渗处理方法,其特征在于,所述第四磁场强度大于所述第二磁场强度。8 . The ionic nitrogen-carbon-sulfur multi-infiltration treatment method according to claim 7 , wherein the fourth magnetic field strength is greater than the second magnetic field strength. 9 .
CN202210066178.0A 2022-01-20 2022-01-20 Auxiliary equipment, treatment system and method for ion nitrogen carbon sulfur multi-component co-permeation Active CN114481008B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202210066178.0A CN114481008B (en) 2022-01-20 2022-01-20 Auxiliary equipment, treatment system and method for ion nitrogen carbon sulfur multi-component co-permeation

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202210066178.0A CN114481008B (en) 2022-01-20 2022-01-20 Auxiliary equipment, treatment system and method for ion nitrogen carbon sulfur multi-component co-permeation

Publications (2)

Publication Number Publication Date
CN114481008A true CN114481008A (en) 2022-05-13
CN114481008B CN114481008B (en) 2022-10-11

Family

ID=81472259

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202210066178.0A Active CN114481008B (en) 2022-01-20 2022-01-20 Auxiliary equipment, treatment system and method for ion nitrogen carbon sulfur multi-component co-permeation

Country Status (1)

Country Link
CN (1) CN114481008B (en)

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5547378A (en) * 1978-09-29 1980-04-03 Hitachi Ltd Ion sulfurizing, carbonitriding method
JP2004300536A (en) * 2003-03-31 2004-10-28 Shinko Seiki Co Ltd Surface treatment apparatus and surface treatment method
CN105839046A (en) * 2016-05-06 2016-08-10 华南理工大学 Method for conducting low-temperature efficient rapid ion nitriding on surface of steel workpiece
CN109852931A (en) * 2019-01-07 2019-06-07 纳狮新材料(浙江)有限公司 The film plating process of vacuum coating equipment and composite coating
CN113604774A (en) * 2021-07-30 2021-11-05 清华大学 Ion nitrocarburizing magnetic field auxiliary equipment, processing system and method

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5547378A (en) * 1978-09-29 1980-04-03 Hitachi Ltd Ion sulfurizing, carbonitriding method
JP2004300536A (en) * 2003-03-31 2004-10-28 Shinko Seiki Co Ltd Surface treatment apparatus and surface treatment method
CN105839046A (en) * 2016-05-06 2016-08-10 华南理工大学 Method for conducting low-temperature efficient rapid ion nitriding on surface of steel workpiece
CN109852931A (en) * 2019-01-07 2019-06-07 纳狮新材料(浙江)有限公司 The film plating process of vacuum coating equipment and composite coating
CN113604774A (en) * 2021-07-30 2021-11-05 清华大学 Ion nitrocarburizing magnetic field auxiliary equipment, processing system and method

Also Published As

Publication number Publication date
CN114481008B (en) 2022-10-11

Similar Documents

Publication Publication Date Title
US5000834A (en) Facing targets sputtering device
CN110098044B (en) Composite modification method for surface protection of neodymium iron boron magnet
CN104131258B (en) Ion film-plating device and ion film-plating method
CN105177493A (en) Electric arc plasma auxiliary low-voltage nitriding method for surface of hot-working die
CN101158022A (en) Austenitic stainless steel electron beam assisted plasma surface modification method and equipment
CN101122004A (en) A New Vacuum Surface Strengthening Technology and Equipment
CN114481008B (en) Auxiliary equipment, treatment system and method for ion nitrogen carbon sulfur multi-component co-permeation
ITPN990060A1 (en) IONIC PULVERIZATION CATHODE FOR MAGNETRON UNBALANCED PLATFORM AND COATING SYSTEM WITH THE SAME
CN113604774B (en) Ion nitrocarburizing magnetic field auxiliary equipment, treatment system and method
CN1245534C (en) Non-magnetic shield type ferromagnetic target sputtering cathode and sputtering method thereof
US20120048724A1 (en) Cylindrical Magnetron Sputter Source Utilizing Halbach Magnet Array
CN111394707B (en) Plasma source and device, system and method for coating film by using same
CN114164395B (en) Ionic nitrogen carbon sulfur multi-element co-cementation equipment, processing system and method
CN203007391U (en) Compound target material for depositing magnetic material coating through arc ion plating
JPH1171667A (en) Target structure of sputtering device
CN113584425B (en) Ion nitriding magnetic field auxiliary equipment, processing system and method
CN205741199U (en) A kind of plasma enhancing magnetron sputtering apparatus preventing target poison ing
CN111411337B (en) An excitation modulation anode-assisted magnetron sputtering ion coating system
CN201106063Y (en) A device for electron beam-assisted plasma surface modification of austenitic stainless steel
WO2013042355A1 (en) Thin-film formation method, thin-film formation device, object to be treated having coating film formed thereon, die and tool
KR100860274B1 (en) Compact, lightweight ultra-high vacuum sputter ion pump capable of low temperature heating and degassing and its manufacturing method
JP2000282235A (en) Method and device for magnetron sputtering
JP4713853B2 (en) Magnetron cathode electrode and sputtering method using magnetron cathode electrode
CN115440494B (en) A method for improving the grain boundary diffusion efficiency of heavy rare earth in sintered NdFeB magnets
CN111378946A (en) Sputtering cathode for improving sputtering ionization rate, vacuum coating system and coating method

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant