CN114481008A - Ion nitrogen carbon sulfur multi-element co-permeation auxiliary equipment, treatment system and method - Google Patents
Ion nitrogen carbon sulfur multi-element co-permeation auxiliary equipment, treatment system and method Download PDFInfo
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- CN114481008A CN114481008A CN202210066178.0A CN202210066178A CN114481008A CN 114481008 A CN114481008 A CN 114481008A CN 202210066178 A CN202210066178 A CN 202210066178A CN 114481008 A CN114481008 A CN 114481008A
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
- C23C8/06—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases
- C23C8/28—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases more than one element being applied in one step
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
- C23C8/06—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases
- C23C8/36—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases using ionised gases, e.g. ionitriding
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Abstract
The utility model provides an ion nitrogen carbon sulphur multicomponent oozes auxiliary assembly, processing system and method altogether, and the auxiliary assembly includes: the ion diffusion furnace comprises a hollow cathode ion source arranged at the top of a furnace body of the ion diffusion furnace, an insulating shell arranged on the side wall of the furnace body, and a plurality of electromagnets which are coaxial and are sequentially arranged in the insulating shell at intervals from inside to outside, wherein the winding modes of two adjacent electromagnets are opposite, and the electromagnets are used for forming a controllable magnetic field in the ion diffusion furnace so as to change the motion track of electrons on the surface of a metal workpiece and the magnetic domain of the metal workpiece. The processing system comprises: the ion diffusion furnace, the ion nitrogen carbon sulfur multi-element co-permeation auxiliary equipment, the transformer, the vacuum pump, the air supply bottle and the electric control cabinet. The treatment method comprises the steps of introducing gas containing nitrogen element, carbon element, hydrogen element and sulfur element into a furnace body and providing a controllable magnetic field for the metal workpiece. The method can reduce the clearance of sulfide on the surface of the workpiece, lead the hardness to show the trend of slow decline, improve the surface hardness of the workpiece and prolong the service life.
Description
Technical Field
The disclosure relates to the technical field of metal material surface ion nitriding treatment, in particular to ion nitrogen carbon sulfur multi-element co-infiltration auxiliary equipment, a treatment system and a treatment method.
Background
Diffusion is one of the common ways of modifying metal surfaces, and is widely used in industrial production because it can greatly improve the hardness, wear resistance and corrosion resistance of metal surfaces. Diffusion is the heat treatment mode of permeating atoms into the surface of a workpiece to change the chemical composition and the structure of the surface of the workpiece. Generally, nitriding, carburizing, nitrocarburizing, multicarburizing, and the like. The currently used diffusion modes mainly include two types: gas diffusion and ion diffusion. The ion diffusion is to apply voltage between a positive electrode and a negative electrode in the furnace to ionize gas so as to convert the gas into a plasma state; bombarding the surface of the workpiece at the cathode potential at high speed by free gas ions in the furnace under the action of an electric field, so that gas atoms are adsorbed on the surface of the workpiece and diffused into the material to form a diffusion layer; while the sputtered metal atoms and free gas particles combine to form compounds and deposit on the workpiece surface.
With the development of modern industrial technology, workpieces need to meet various complex working conditions. The problem of how to improve the wear resistance and the service life of the workpiece under the heavy load condition can be solved by means of nitrocarburizing and thiocarburizing. However, after sulfur is added in nitrocarburizing, a larger gap exists between sulfides on the surface of the workpiece, and the hardness is reduced to some extent, so that the service life of the workpiece in a heavy-load friction pair is greatly reduced.
Disclosure of Invention
The present disclosure is directed to solving one of the problems set forth above.
Therefore, the ion nitrocarburizing and sulfidizing multi-element co-cementation auxiliary device provided by the embodiment of the disclosure can reduce sulfide lattice gaps on the surface of a workpiece, effectively increase sulfide hardness of a surface layer co-cementation layer in a diffusion cementation layer, increase the thickness of the diffusion cementation layer, and improve deep diffusion cementation efficiency and cementation layer quality, and is suitable for being placed on a furnace body of an ion diffusion and cementation furnace, wherein the ion diffusion and cementation furnace is internally provided with a workpiece table for placing a metal workpiece, and the ion nitriding auxiliary device comprises:
the hollow cathode ion source is suitable for being placed at the top of the furnace body and is used for emitting plasma electron beams to the vicinity of the metal workpiece; and
a magnetic field assisting unit including an insulating case and a plurality of electromagnets; the insulating shell is suitable for being placed on the side wall of the furnace body; the electromagnets are coaxial and are sequentially arranged in the insulating shell at intervals from inside to outside, the winding modes of two adjacent electromagnets are opposite, and the electromagnets are used for forming a controllable magnetic field in the ion diffusion furnace so as to change the motion track of electrons on the surface of the metal workpiece and the magnetic domain of the metal workpiece.
The ionic nitrogen, carbon and sulfur multicomponent co-permeation auxiliary equipment provided by the embodiment of the first aspect of the disclosure has the following characteristics and beneficial effects:
after the ion nitriding furnace is vacuumized, the hollow cathode ion source ionizes gas containing nitrogen and gas containing hydrogen to ionize plasmas such as nitrogen ions, hydrogen ions, sulfur ions and neutral nitrogen atoms, a large amount of plasmas directly irradiate to the metal workpiece, meanwhile, the plasmas are greatly gathered on the surface of the metal workpiece under the combined action of an electric field and a magnetic field, and the concentrations of the plasmas such as the nitrogen ions, the hydrogen ions and the neutral nitrogen atoms on the surface of the metal workpiece are increased under the action of the electric field; the diffusion and deposition effects are enhanced, the thickness of the diffusion and permeation layer is increased finally, and the diffusion and permeation efficiency is improved. In addition, positive ions and electrons are subjected to combined action of Lorentz force of a magnetic field and Coulomb force of an electric field in a coupling field, the electric field and the magnetic field are vertical to each other and act on the electrons together to enable the electrons to do cycloidal motion near a metal workpiece; compared with the conventional ion diffusion, the diffusion temperature is increased under the same condition, active nitrogen, carbon and sulfur atoms are diffused and deepened to the inside, the quality of a co-permeation layer is improved, the brittleness is reduced, and the diffusion effect is enhanced. Meanwhile, the solid solution ratio of sulfide in the diffusion layer is increased, and the gaps among sulfide crystal lattices are reduced. The surface hardness of the metal workpiece is improved on the premise of not influencing the friction coefficient and having the characteristic of improving the sulfurization wear resistance, and the use requirement of a heavy-load friction pair is met.
Further, the magnetic field can magnetize the metal workpiece placed in the magnetic field, magnetic domain rotation and magnetic wall displacement are generated on the surface of the metal workpiece under the action of the magnetic field, exchange energy and anisotropy are increased, meanwhile, the magnetization near the surface of the material causes magnetostriction, strain energy is increased, diffusion of permeation and expansion substances is accelerated, and the magnetization intensity is greatly improved. In some embodiments, the current to the electromagnet is such that: the metal workpiece is completely contained by the magnetic field generated by the electromagnet, and the magnetic field intensity near the metal workpiece reaches 450 Gs-550 Gs.
In some embodiments, each of the electromagnets is a ring electromagnet.
In some embodiments, an axial direction of each electromagnet is parallel to an upper plane of the workpiece table.
In some embodiments, the magnetic field assisting unit further includes a metal disc located in the furnace body and disposed as close to the insulating housing as possible, the metal disc is wrapped by magnetic induction lines generated by the electromagnet, the material of the metal disc is the same as that of the metal workpiece, and the metal disc and the workpiece stage share a power supply.
The multi-component ion nitrocarburizing treatment system provided by the embodiment of the second aspect of the present disclosure includes:
the ion nitriding furnace comprises a furnace body and a workpiece table arranged in the furnace body and used for placing metal workpieces;
the ionic nitrogen carbon sulfur multi-element co-cementation auxiliary equipment is provided according to the embodiment of the first aspect of the disclosure;
the transformer is connected with the coil, the workpiece table and the hollow cathode ion source and is used for enabling the electromagnet to generate a magnetic field and providing ionization voltage into the furnace body;
the vacuum pump is communicated with the furnace body and is used for enabling the inside of the furnace body to be in a vacuum state;
a gas supply bottle which is communicated with the furnace body and is used for supplying inert gas, gas containing nitrogen element, gas containing hydrogen element, gas containing carbon element and gas containing sulfur element into the furnace body; and
and the electrical control cabinet is used for controlling the ion nitrogen carbon sulfur multi-element co-permeation auxiliary equipment, the ion diffusion furnace, the transformer, the vacuum pump and the air supply bottle.
The ionic nitrogen, carbon and sulfur multicomponent co-cementation treatment method provided by the embodiment of the third aspect of the disclosure is characterized by comprising the following steps:
placing a metal workpiece in a furnace body of an ion diffusion furnace, vacuumizing the furnace body, and introducing inert gas into the furnace body;
introducing voltage into the furnace body and heating up the furnace body to ensure that the furnace body carries out stable glow discharge and open the hollow cathode ion source;
when the temperature in the furnace body reaches a first temperature, introducing gas containing nitrogen and gas containing hydrogen into the furnace body, and continuing to heat the furnace body;
stopping introducing inert gas when the temperature in the furnace body reaches a second temperature, introducing gas containing carbon into the furnace body, and providing a magnetic field with a first magnetic field intensity to the metal workpiece by using the ionic nitrogen carbon sulfur multi-element co-cementation auxiliary equipment provided according to the embodiment of the first aspect of the disclosure;
after the temperature in the furnace body reaches the co-cementation temperature, providing a magnetic field with a second magnetic field intensity for the metal workpiece by using the ionic nitrocarburizing and sulfur multicomponent co-cementation auxiliary equipment;
in the heat preservation and pressure maintaining stage, the strength of a magnetic field provided by the ionic nitrogen, carbon and sulfur multicomponent co-permeation auxiliary equipment to the metal workpiece is gradually reduced;
introducing gas containing sulfur into the furnace body, and reducing the temperature in the furnace body;
when the temperature in the furnace body is reduced to a third temperature, a magnetic field with a third magnetic field intensity is provided for the metal workpiece by using the ionic nitrogen, carbon and sulfur multi-element co-permeation auxiliary equipment;
when the temperature in the furnace body is reduced to a fourth temperature, closing the ionic nitrogen-carbon-sulfur multi-element co-permeation auxiliary equipment, stopping introducing the gas containing the hydrogen element, the gas containing the nitrogen element, the gas containing the carbon element and the gas containing the sulfur element into the furnace body, and introducing inert gas into the furnace body to clean the surface of the metal workpiece;
and when the temperature in the furnace body is reduced to a fifth temperature, stopping introducing the inert gas into the furnace body, and taking out the metal workpiece.
In some embodiments, the fourth magnetic field strength is greater than the second magnetic field strength.
Drawings
Fig. 1 is a schematic structural diagram of an ion source nitrogen-carbon-sulfur multicomponent co-cementation auxiliary device according to an embodiment of the first aspect of the disclosure.
Fig. 2 is a schematic diagram of the distribution of the magnetic field generated by the auxiliary device shown in fig. 1.
FIG. 3 is a schematic structural diagram of an ion source nitrocarb-sulfur multi-cementation processing system according to an embodiment of the second aspect of the present disclosure.
Fig. 4 and 5 are cross-sectional gold phase diagrams after treatment by the ionic nitrocarburizing and sulfido-carburizing treatment method provided in the embodiment of the present disclosure and after conventional carburizing treatment, respectively.
FIG. 6 is a graph of hardness gradients of a metal workpiece after treatment using an ionic nitrocarburizing treatment method provided by an embodiment of the present disclosure and after treatment using a conventional co-cementation treatment.
FIG. 7 is a UMT analysis of a metal workpiece after treatment using an ionic nitrocarburizing treatment method provided by an embodiment of the present disclosure and after treatment using a conventional cementation process.
In the figure:
100-ion nitrogen, carbon and sulfur multicomponent co-permeation auxiliary equipment, 110-an insulating shell, 120-an electromagnet, 122-a coil, 130-a metal disc and 140-a hollow cathode ion source;
200-ion diffusion furnace, 210-furnace body, 220-workpiece table and 230-metal workpiece;
300-a transformer;
400-vacuum pump;
500-air supply bottle;
600-electric control cabinet.
Detailed Description
In order to make the objects, technical solutions and advantages of the present application more apparent, the present application is described in further detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the present application and are not intended to limit the present application.
On the contrary, this application is intended to cover any alternatives, modifications, equivalents, and alternatives that may be included within the spirit and scope of the application as defined by the appended claims. Furthermore, in the following detailed description of the present invention, certain specific details are set forth in order to provide a better understanding of the present application. It will be apparent to one skilled in the art that the present application may be practiced without these specific details.
Referring to fig. 1, an ion nitrogen, carbon and sulfur multicomponent co-cementation auxiliary device 100 provided in an embodiment of the first aspect of the present disclosure is adapted to be placed on a furnace body of an ion diffusion furnace (the ion diffusion furnace is not shown in fig. 1) 200, and a workpiece stage 220 for placing a metal workpiece 230 is provided in the ion diffusion furnace 200. The disclosed ionic nitrogen carbon sulfur multicomponent co-cementation auxiliary equipment 100 comprises:
a hollow cathode ion source 140, the hollow cathode ion source 140 being adapted to be placed at the top of the body of the ion diffusion furnace 200 for emitting a plasma electron beam to the vicinity of the metal workpiece 230; and
a magnetic field assisting unit including an insulating case 110 and a plurality of electromagnets 120; the insulating shell 110 is suitable for being placed on the side wall of the ion diffusion furnace 200; the electromagnets 120 are coaxially and sequentially arranged in the insulating shell 110 at intervals from inside to outside, the winding manner of two adjacent electromagnets 120 is opposite, and the electromagnets 120 are used for forming a controllable magnetic field in the ion diffusion furnace 200 so as to change the motion track of electrons on the surface of the metal workpiece 230 and the magnetic domain of the metal workpiece 230.
In some embodiments, the hollow cathode ion source 140 employs a hollow cathode gun, which can generate a hollow cathode effect inside, and directly emit a high-density plasma electron beam near the metal workpiece 230 in the furnace body, thereby increasing the ionization rate of the gas in the furnace.
In some embodiments, the distance between the bottom of the insulating shell 110 and the bottom of the furnace body of the ion diffusion furnace 200 in the magnetic field auxiliary unit is between 100mm and 200mm, one part of the insulating shell 110 is located inside the side wall of the furnace body, the other part of the insulating shell 110 is located outside the side wall of the furnace body, and the distance from the inner side of the insulating shell 110 to the side wall of the furnace body is 300 mm. Because the magnetic field auxiliary unit is positioned on the side wall of the furnace body of the ion diffusion furnace, the whole workpiece table 220 can be influenced by the magnetic field without generating the reaction of blocking on diffusion. The metal workpiece 230 is placed on the workpiece table 220 so that the direction of the magnetic field is perpendicular to the direction of the electromagnetic field, ions perform cycloidal motion at the position close to the surface of the metal workpiece, and the ion concentration of the surface of the metal workpiece is improved, so that the diffusion efficiency is improved.
Further, referring to fig. 2, the magnetic field assisting unit further includes a metal disk 130 (the metal disk may be fixedly connected to the insulating housing, i.e. in the manner shown in fig. 2, or fixedly connected to the furnace body) located in the furnace body of the ion diffusion furnace 200 and disposed as close to the insulating housing 110 as possible, and wrapped by the magnetic induction lines generated by the electromagnet 120, wherein the metal disk 130 is made of the same material as the metal workpiece 230, and functions similar to the hollow cathode ion source 140, so that the plasma directly bombards the metal disk 130, and a large amount of metal ions are sputtered to combine with gas ions in the furnace body to form a metal compound, thereby increasing the plasma concentration. Compared with the method of directly sputtering the metal workpiece, the method reduces the sputtering degree of the surface of the metal workpiece, can greatly improve the surface quality of the metal workpiece 230, and avoids the phenomenon of increasing the surface roughness of the metal workpiece caused by direct ion bombardment. On the other hand, the metal disk 130 is provided to confine the plasma electron beam emitted from the hollow cathode ion source 140 to the vicinity of the metal workpiece 230 and the metal disk 130, thereby greatly increasing the plasma concentration in the vicinity of the metal workpiece 230.
In one embodiment, each electromagnet adopts an N-S-N pole arrangement mode from inside to outside, and the arrangement mode can not only enable the magnetic field intensity on the surface of the workpiece table to be higher and generate a larger limiting effect on ions, but also reduce the occupied space of the magnetic field auxiliary unit and save the cost to the maximum extent.
In some embodiments, in order to determine the magnitude of the dc current flowing into the coil 122 of each electromagnet 120, before the beginning of diffusion, a numerical simulation is performed on the assembly consisting of the ion nitriding auxiliary apparatus 100, the workpiece stage 220 and the metal workpiece 230 to be processed according to the present disclosure, the input current of the coil 122 in the simulated electromagnet 120 is gradually increased, so that the metal workpiece 230 is completely enclosed by the magnetic field and the magnetic field strength near the metal workpiece 230 reaches about 450Gs to 550Gs (preferably 500Gs), and the current value of the coil 122 in the electromagnet 120 at this time is recorded as the magnitude of the dc current finally flowing into the coil 122 of the electromagnet 120. When the field intensity of the magnetic field near the metal workpiece 230 is 450 Gs-550 Gs, a good magnetic control effect can be provided, the field intensity is not too large, and the energy consumption of the auxiliary equipment is prevented from being increased.
In some embodiments, each electromagnet 120 is a ring-shaped electromagnet, which can ensure uniformity of the magnetic field and is easy to process, and the distribution of the magnetic field generated by each electromagnet 120 is shown in fig. 2.
In some embodiments, the axial direction of each electromagnet 120 is parallel to the upper plane of the workpiece table 220 so that the magnetic field generated by each electromagnet 120 can envelop the metal workpiece 230.
In some embodiments, in order to make the structure of the present apparatus more compact, the insulation casing 110 is a cylinder matching with the outer circumference formed by the second end of the outermost electromagnet group 120, the insulation casing 110 can protect the internal structure of the magnetic field auxiliary unit, so that the magnetic field auxiliary unit cools and cools along with the furnace body of the ion diffusion furnace 200, and on the other hand, the insulation casing 100 is insulated from the furnace body of the ion diffusion furnace 200, so as to ensure that the electrodes in the furnace body do not affect the electromagnets in the magnetic field auxiliary unit.
The working process and principle of the ionic nitrogen, carbon and sulfur multicomponent co-cementation auxiliary equipment provided by the embodiment of the first aspect of the disclosure are as follows:
before diffusion, modeling is carried out on a metal workpiece to be processed by using simulation software, the input current of a simulation electromagnet is gradually increased, so that the metal workpiece is completely encapsulated by a magnetic field, the field intensity near the metal workpiece reaches about 500Gs, and the input current value of the electromagnet at the moment is recorded.
After the ion nitriding furnace is vacuumized, a medium gas containing nitrogen, hydrogen, carbon and sulfur is introduced into the furnace through a hollow cathode ion source, and a voltage required by electric ionization is connected, a current value determined through numerical simulation is input into a coil of an electromagnet, the medium gas is ionized in the hollow cathode ion source and the interior of a furnace body to ionize nitrogen ions, hydrogen ions, carbon ions, sulfur ions, neutral sulfur atoms, carbon atoms, nitrogen atoms and other plasmas, a large number of plasma ions are directly shot to a metal workpiece through the hollow cathode ion source, and simultaneously the plasmas are subjected to the combined action of an electric field and a magnetic field to be greatly gathered on the surfaces of the metal workpiece and a metal disc, and the plasmas gathered on the surface of the metal disc move towards the surface of the metal workpiece under the action of the electric field to enable the nitrogen ions, the hydrogen ions, the carbon ions, the sulfur ions and the neutral sulfur atoms on the surface of the metal workpiece, Plasma concentration of carbon atoms, nitrogen atoms, etc. increases; meanwhile, the plasma bombards the surfaces of the metal workpiece and the metal disc to enable part of metal atoms to be sputtered out, more metal atoms are escaped, the metal atoms are combined with nitrogen to generate metal nitride, the metal atoms are combined with carbon to generate metal carbide, and the metal atoms are combined with sulfur to generate metal sulfide, so that the combination probability of the metal compound is increased, and the concentration of the metal compound is increased; the metal compound is unstable, and a part of nitrogen atoms, sulfur atoms and carbon atoms enter the surface of the metal workpiece through diffusion to form a co-permeation layer, so that the thickness of the co-permeation layer is increased, and the diffusion efficiency is improved. In addition, positive ions and electrons are subjected to combined action of Lorentz force of a magnetic field and Coulomb force of an electric field in a coupling field, the electric field and the magnetic field are vertical to each other and act on the electrons together to enable the electrons to do cycloidal motion near a metal workpiece; compare in conventional ion nitrogen carbon sulphur and ooze altogether, the auxiliary assembly that this disclosed embodiment provided has improved under the same condition and has oozed the temperature altogether, and active nitrogen, carbon, sulphur atom deepen to metal workpiece internal diffusion, and the co-permeation layer quality improves the fragility and reduces, has strengthened the diffusion effect. The deposition of sulfide under the action of magnetic field is strengthened, the lattice gap is reduced, and the surface hardness is increased on the basis of not influencing the antifriction property. For heavy-duty friction pairs, the nitrogen-carbon-sulfur ternary co-permeation workpiece treated by the auxiliary equipment provided by the embodiment of the disclosure has superiority. In addition, the auxiliary equipment provided by the embodiment of the disclosure adopts a magnetron sputtering mode, performs magnetic field limitation on the plasma, uses an electromagnet which is more convenient to regulate and control, and increases the controllability of the co-permeation process.
Further, the magnetic field magnetizes the metal workpiece placed therein, and the main influence is shown as follows: when an external magnetic field is provided for a metal workpiece, the internal materials of different metal workpieces are different, and the influence results of the external magnetic field are different, for example, the used metal workpiece is made of low-alloy structural steel and belongs to a ferromagnetic material, when the external magnetic field is applied, a magnetic domain is easy to magnetize and move towards the direction of the magnetic field intensity, the diffusion of nitrogen, carbon and sulfur atoms is accelerated by the change, charged particles do circular motion on a plane vertical to the direction of the magnetic field, experiments prove that when the magnetic field intensity is more than 270Gs, nitrogen, carbon and sulfur atoms generated by ionization are most easy to do directional motion towards the metal surface, and the purpose of strengthening the co-permeation is achieved; under the action of a magnetic field, magnetic domain rotation and magnetic wall displacement are generated on the surface of a metal workpiece, exchange energy and anisotropy are increased, meanwhile, the nearby surface of the material is magnetized to cause magnetostriction, strain energy is increased, diffusion of permeation and expansion substances is accelerated, and the magnetization intensity is greatly improved.
An embodiment of a second aspect of the present disclosure provides an ionic nitrocarburizing treatment system, see fig. 3, including:
the ion nitriding furnace 200 comprises a furnace body 210 and a workpiece table 220 arranged in the furnace body 210 and used for placing a metal workpiece 230;
the ionic nitrogen, carbon and sulfur multi-element co-permeation auxiliary equipment 100 is placed on the furnace body 210;
the transformer 300 is connected with the coil 122 of the electromagnet 120 in the ion nitrocarburizing and sulfur multicomponent co-penetrating auxiliary device 100 to generate a magnetic field, 900V voltage required by ionization is provided for the furnace body 210 through the workpiece table, the metal disc 140 shares a power supply with the workpiece table, and the transformer 300 is also used for providing 800V voltage for the hollow cathode ion source;
the vacuum pump 400 is communicated with the furnace body 210 of the ion diffusion furnace 200 and is used for enabling the interior of the furnace body 210 to be in a vacuum state;
a gas supply bottle 500 which is communicated with the furnace body 210 of the ion diffusion furnace 200 and is used for supplying inert gas and gas containing nitrogen, hydrogen, carbon and sulfur into the furnace body 210;
and an electrical control cabinet 600 for controlling the ion nitrocarburizing auxiliary device 100, the ion nitriding furnace 200, the transformer 300, the vacuum pump 400 and the air supply bottle 500.
In some embodiments, the electrical control cabinet 600 is used as a control port of the whole ion nitrocarburizing treatment system, and integrates switches such as an ion diffusion furnace power supply, an electromagnet power supply, a gas flow meter, a cooling water flow meter, a current meter and a cooling water control valve. The furnace body 210 of the ion diffusion furnace 200 is a cavity for performing diffusion treatment on a metal workpiece 230, and has good sealing performance, a magnetic field auxiliary unit is arranged on the outer side wall of the furnace body 210, a hollow cathode ion source 140 is arranged at the top of the furnace body 210, wherein an electromagnet is used for generating a magnetic field around the metal workpiece, and the cooling components of the ion diffusion furnace 200 are the furnace body 210, the hollow cathode ion source 140, the electromagnet 120 of the ion nitrocarburizing and sulfur multicomponent co-infiltrating auxiliary device 100 and the hollow cathode ion source 140 for cooling. The transformer 200 is used to transform the industrial electricity of 380V into practically used experimental electricity (including 220V voltage supplied to the coil of the electromagnet, 800V high voltage supplied to the hollow cathode ion source, and 900V high voltage supplied between the cathode and the anode in the furnace body). The vacuum pump 400 is used to provide a power source for evacuating the furnace interior 210.
The working process of the ionic nitrocarburizing and sulfur multicomponent cementation treatment system provided by the embodiment of the second aspect of the disclosure is as follows:
before diffusion, a metal workpiece to be processed is placed in ion diffusion with an ion nitrogen carbon sulfur multi-element co-diffusion auxiliary device and placed on a workpiece table, and the metal workpiece and the workpiece table are used as cathodes and are connected with a negative electrode of a power supply of an ion diffusion furnace together with a metal disc. And then closing the furnace cover and the air release valve, opening a vacuum pump to pump vacuum, opening the electric control cabinet, and adjusting the current to maintain the magnetic field intensity to be near 500 Gs. And adjusting the duty ratio and the output voltage of the transformer, opening an air inlet valve to introduce required gas into the furnace, raising the temperature in the state, and simultaneously starting the hollow cathode ion source. And after the temperature in the furnace reaches the set temperature, preserving the heat for the required time. And after reaching the diffusion time, closing the power supply of the ion diffusion furnace, the power supply of the electromagnet and the power supply of the hollow cathode ion source, and continuously introducing inert gas to cool the metal workpiece along with the ion diffusion furnace.
The working principle of the ionic nitrocarburizing and sulfur multicomponent cementation treatment system provided by the embodiment of the second aspect of the disclosure is as follows:
the method is characterized in that the introduced gas is ionized into an ionic state by utilizing the glow discharge effect between the hollow cathode ion source and the furnace body, the workpiece table, the metal disc and the metal workpiece are bombarded and sputtered, the magnetic field of the electromagnet is utilized to accelerate the bombardment effect of ions, simultaneously the magnetic domain of the metal workpiece is changed, various kinds of heteroenergy on the surface of the workpiece are improved, the diffusion of nitrogen atoms to the workpiece is accelerated, and the thickness of the diffusion layer is increased.
The ion nitrogen carbon sulfur multi-element co-permeation treatment method provided by the embodiment of the third aspect of the disclosure is completed by using the ion nitrogen carbon sulfur multi-element co-permeation treatment system provided by the disclosure. The processing method of the present disclosure includes the steps of:
1) placing a metal workpiece on a workpiece table of an ion diffusion furnace provided with an ion nitrogen carbon sulfur multicomponent co-permeation auxiliary device, closing a furnace cover and an air release valve, opening a vacuum pump to pump away air in the furnace until the vacuum degree is 10-30 Pa, and maintaining for 10-20 min;
2) maintaining the vacuum degree in the furnace, introducing inert gas (such as argon, helium and/or neon) into the furnace, and controlling the air pressure in the furnace to be maintained at 30-50Pa by an electric control cabinet through a flowmeter;
3) the voltage (800V-900V) and the duty ratio (70% -80%) of a transformer are adjusted through an electric control cabinet, so that the temperature in the furnace is raised in an inert gas atmosphere to ensure that stable glow discharge is carried out in the furnace, and meanwhile, a hollow cathode ion source is started; keeping the pressure in the furnace to be 30-50Pa stably, and cleaning the surface of the workpiece by ionizing inert gas;
4) when the temperature in the furnace rises to 300-350 ℃, the gas inlet valve of the furnace body is opened to introduce gas (such as nitrogen N) containing nitrogen element2) And a gas containing hydrogen (e.g., hydrogen H)2) Wherein the volume flow ratio of the gas containing nitrogen element to the gas containing hydrogen element is 1: 4-1: 5, adjusting the air intake of the flowmeter to maintain the air pressure in the furnace body at 200-500 Pa, and continuously heating the furnace through an electric control cabinet;
5) stopping introducing the inert gas when the temperature in the furnace body reaches 400-450 ℃, and introducing gas containing carbon element (such as acetylene C)2H2And because carbon element can not permeate into the metal workpiece at low temperature, acetylene is introduced after the temperature is raised, so that gas waste can be prevented), and the volume flow ratio of gas containing hydrogen element, gas containing nitrogen element and gas containing carbon element is kept to be 75-83: 20-15: 5-2, keeping the total air inlet pressure to be 300-350 Pa, reducing the voltage to 600-700V, and introducing the voltage into a coil of the electromagnet when the temperature in the furnace reaches 400-450 ℃ so as to keep the magnetic field intensity at the metal workpiece at 50-80 Gs;
6) after the required co-permeation temperature (500-550 ℃) is reached, keeping the current in a coil of the ionic nitrocarburizing and sulfur multicomponent co-permeation auxiliary device stable between 5-15A, and improving the magnetic field intensity to be 100-120 Gs;
7) keeping the pressure at 250 ℃ and 300Pa, keeping the temperature for 3-7 h, and reducing the magnetic field intensity of the electromagnetic field by 10Gs every 1h by reducing the current introduced into the electromagnet;
8) after the heat preservation and pressure maintenance are finished, gas (such as hydrogen sulfide H) containing sulfur element is introduced into the furnace2S), regulating the flow volume ratio of the gas containing the hydrogen element, the gas containing the nitrogen element, the gas containing the carbon element and the gas containing the sulfur element to be 60-65: 15-2: 5-10: 10-15, and increasing the total air pressure in the furnace to 350-400 Pa;
9) and (3) reducing the temperature in the furnace to 450-500 ℃, preserving the heat for 0.5-1 h, and keeping the magnetic field intensity of the metal workpiece accessory in the furnace to be about 100-150 Gs.
10) After the heat preservation time is reached, slowly reducing the voltage, simultaneously slowly reducing the flow rates of the gas containing the hydrogen element, the gas containing the nitrogen element, the gas containing the carbon element and the gas containing the sulfur element, reducing the gas pressure in the furnace, and finally keeping the gas pressure in the furnace at about 50Pa and the magnetic field intensity of the electromagnetic field unchanged;
11) after the temperature is reduced to below 400 ℃, closing the electromagnetic field, stopping introducing the gas containing the hydrogen element, the gas containing the nitrogen element, the gas containing the carbon element and the gas containing the sulfur element, immediately introducing a small amount of inert gas, keeping the gas pressure at 30-50Pa, and cleaning the surface of the diffused metal workpiece for 20 min;
12) and slowly reducing and closing the power supply of the ion diffusion furnace and the power supply of the hollow cathode ion source after cleaning.
13) And after the temperature in the furnace is cooled to be below 150 ℃, closing the inert gas and introducing and taking out the metal workpiece.
Generally speaking, in order to prevent a large amount of ion movement collision in the magnetic field from hindering the deposition of nitrogen, carbon and sulfur compounds, the magnetic field limits sulfur ions and reduces the lattice gaps of sulfides on the surface of a workpiece, so that the magnetic field is properly reduced along with time during carbonitriding, and the magnetic field is properly increased during ternary carbonitriding.
In some embodiments, the direct current introduced into the coil is a simulation model of 1:1 constructed for the ion diffusion furnace, the ion nitrogen carbon sulfur multicomponent co-permeation auxiliary equipment, the metal workpiece and the workpiece table, and the input current of the simulation electromagnet is gradually increased, so that the input current value of the electromagnet corresponds to the value when the metal workpiece is completely contained by the magnetic field and the field intensity near the metal workpiece reaches about 500 Gs.
In some embodiments, before the metal workpiece is placed into the furnace, the workpiece to be processed is polished smooth by sand paper with the numbers of 240#, 400#, 800#, 1000#, 1500#, and 2000# in sequence, polished on a polishing machine until no scratch is formed, and then ultrasonically cleaned by acetone and alcohol and dried by blowing so as to ensure the cleanness of the surface of the metal workpiece.
In practical use, the ion nitrocarburizing and sulfur multicomponent co-permeation treatment system provided by the embodiment of the disclosure can change the magnetic field intensity by adjusting the current of the coil in the ion nitrocarburizing and sulfur multicomponent co-permeation auxiliary device, thereby changing the thickness of the diffusion layer. Meanwhile, the diffusion layer is increased, and sulfide has a higher proportion in the diffusion layer. The deposition of sulfide under the action of magnetic field is strengthened, the lattice gap is reduced, and the surface hardness is increased on the basis of not influencing the antifriction property. For a heavy-load friction pair, the nitrogen-carbon-sulfur ternary co-permeation workpiece treated by the treatment method provided by the embodiment of the disclosure has superiority. The magnetron sputtering mode is adopted, magnetic field limitation is applied to the plasma, an electromagnet which is more convenient to regulate and control is used, controllability of the diffusion process is improved, co-permeation efficiency is improved, a diffusion layer is thickened, required time is short, and energy is saved.
The following describes a specific example one of the ionic nitrogen-carbon-sulfur multicomponent co-cementation treatment methods provided by the present disclosure, specifically including the following steps:
before diffusion, firstly establishing an ion diffusion furnace and an electromagnetic field model by using simulation software 1:1, establishing a cylindrical metal workpiece model with the diameter of 25mm and the thickness of 8mm, selecting a ferromagnetic material as a model material, gradually increasing the input current of a simulation electromagnet to ensure that the workpiece is completely contained by the magnetic field and the field intensity near the workpiece reaches 500Gs, and recording the input current value of the electromagnet at the moment; then, a cylindrical 38CrMoAl sample block with the diameter of 25mm and the thickness of 8mm is used as a metal workpiece, and sand paper with the numbers of 240#, 400#, 800#, 1000#, 1500#, and 2000# is used for polishing and smoothing in sequence, and the metal workpiece is polished on a polishing machine until no scratch is formed, ultrasonically cleaned by acetone and alcohol and dried.
1) Placing a metal workpiece sample on a workpiece table of an ion diffusion furnace provided with an ion nitrogen carbon sulfur multicomponent co-permeation auxiliary device, connecting the metal workpiece sample with a power supply cathode, closing a furnace cover and an air release valve, opening a vacuum pump to pump away air in the furnace until the vacuum degree is 30Pa, and maintaining for 10 min;
2) maintaining the vacuum degree in the furnace, introducing argon into the furnace, and controlling the air pressure in the furnace to be maintained at 50Pa by an electrical control cabinet through a flowmeter; then lowering the furnace shell, closing the air release valve, opening the vacuum pump to pump air in the furnace until the air pressure in the furnace is lower than 50Pa, opening the power supply system of the diffusion furnace to adjust the voltage (800V) and slowly increasing the duty ratio to 70%.
3) The voltage (800V) and the duty ratio (70%) of the transformer are adjusted through the electric control cabinet, so that the temperature in the furnace is raised in an argon gas atmosphere to ensure that stable glow discharge is carried out in the furnace; and opening an air inlet valve and introducing argon, and keeping the air pressure in the furnace to be stable at 50Pa to clean the surface of the workpiece.
4) When the temperature in the furnace rises to 300 ℃, opening an air inlet valve of the furnace body and introducing nitrogen and hydrogen, wherein the volume flow ratio of the nitrogen to the hydrogen is 1: 4, adjusting the air inlet of the flow meter to maintain the air pressure in the furnace body at 200Pa, and reducing the voltage of the transformer to 700V through the electric control cabinet;
5) when the temperature in the furnace body reaches 400 ℃, introducing acetylene, stopping introducing argon, and keeping the volume flow ratio H of the gas2：N2：C2H275: 20: 5, keeping the total air inlet pressure to be 300Pa unchanged, reducing the voltage to 600V again, starting an electromagnet controller of the ion nitrogen carbon sulfur multicomponent co-penetration auxiliary device at the moment, and keeping the magnetic field intensity at the metal workpiece to be 50 Gs;
6) after the required co-permeation temperature (500 ℃) is reached, if the current is too large, the voltage is reduced again, the current in the coil of the ionic nitrogen carbon sulfur multi-element co-permeation auxiliary device is kept stable at 10A, and the magnetic field intensity is improved to 120 Gs;
7) keeping the temperature for a period of time, wherein the heat preservation time is 7 hours, and the magnetic field intensity of the electromagnetic field is reduced by 10Gs every 1 hour;
8) after the heat preservation end time is up, H is introduced into the furnace2S, regulating the volume flow ratio H of the gas again2：N2：C2H2：H2S65: 20: 5: 10, increasing the total air pressure in the furnace to 400 Pa;
9) after the temperature in the furnace is reduced to 450 ℃, the heat preservation is continued for 1h, and the magnetic field intensity of the electromagnet is improved to about 150Gs by the metal workpiece accessory in the furnace;
10) after reaching the holding time, the voltage is slowly reduced, and H is slowly reduced2、N2、C2H2、H2S, reducing the air pressure in the furnace, and finally keeping the air pressure in the furnace at about 50Pa and keeping the magnetic field intensity of the electromagnetic field unchanged;
11) after the air temperature is reduced to below 400 ℃, the valve is closedElectromagnetic field, stopping the introduction of H2、N2、C2H2、H2S, immediately introducing a small amount of inert gas argon, keeping the air pressure at about 50Pa, and cleaning the surface of the metal workpiece subjected to diffusion nitriding for 20 min;
12) and after cleaning, slowly reducing and closing the power supply of the ion diffusion furnace.
13) And after the furnace is cooled to below 150 ℃, closing argon and introducing and taking out the metal workpiece sample block.
The treated metal workpiece was cut, the cut surface was polished and polished, and the morphology of the diffusion layer was observed by etching with 4% nitric acid alcohol, and the result is shown in fig. 5. Comparing the cross-sectional view (as shown in fig. 4) of the sample without using the ionic nitrocarburizing and sulfur multicomponent co-cementation auxiliary device, it can be seen that the use of the ionic nitrocarburizing and sulfur multicomponent co-cementation auxiliary device increases the thickness of the diffusion layer, the cross-sectional metallographic views after the conventional co-cementation treatment and the treatment by using the ionic nitrocarburizing and sulfur multicomponent co-cementation treatment system and method provided by the embodiment of the present disclosure are shown in fig. 4 and 5, the hardness gradient diagram is shown in fig. 6, and the UMT analysis diagram is shown in fig. 7. The results show that after case one treatment, the thickness of the co-permeation layer reaches 483 μm, and compared with 173 μm of conventional co-permeation treatment, the co-permeation depth is improved by nearly 2 times by using the device and the method disclosed by the invention. FIG. 6 shows that the surface hardness of a metal workpiece is 450HV treated by conventional co-infiltration0.05Up to 600HV0.05. The coefficient of friction (COF) of the present disclosure is significantly reduced compared to conventional co-cementation processes. The thickness of the nitrocarburizing layer is obviously improved, the surface hardness is higher, and the nitrocarburizing layer is suitable for the friction condition with low frequency and heavy load.
In summary, the ion nitrogen, carbon and sulfur multicomponent co-diffusion treatment method provided by the embodiment of the present disclosure has the following advantages compared with the existing ion diffusion:
1. compared with the conventional ion diffusion, the method has the advantages that the temperature in the furnace is increased under the same condition, the diffusion of active nitrogen, carbon and sulfur atoms to the inside is deepened, the quality of a chemical combination layer is improved, the brittleness is reduced, and the diffusion effect is enhanced. Meanwhile, the solid solution ratio of sulfide in the diffusion layer is increased, and the gaps among sulfide crystal lattices are reduced. The surface hardness is improved on the premise of not influencing the friction coefficient and having the characteristic of improving the sulfurization wear resistance. For heavy-load friction pairs, the nitrogen-carbon-sulfur ternary co-permeation workpiece treated by the treatment method has superiority.
2. Different limiting magnetic fields are needed for different workpieces, and the magnetron sputtering mode of the permanent magnet cannot be applied to all workpieces. The electromagnetic field designed by the present disclosure has the advantage of strong controllability.
3. The regulation and control of auxiliary equipment are matched with the diffusion and permeation process, so that the auxiliary equipment generates the maximum benefit, and compared with the conventional ion nitrogen carbon sulfur co-permeation, the compound layer and the diffusion layer depth can be increased under the assistance of the auxiliary equipment, the peak hardness of the diffusion layer is increased, the wear resistance is increased, the nitriding quality is higher, the sulfide on the surface layer is more compact, and the surface hardness is higher. But also saves energy.
In the description herein, reference to the description of the terms "one embodiment," "some embodiments," "an illustrative embodiment," "an example," "a specific example," or "some examples" or the like means that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the present disclosure. In this specification, the schematic representations of the terms used above do not necessarily refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.
While embodiments of the present disclosure have been shown and described, it will be understood by those of ordinary skill in the art that: various changes, modifications, substitutions and alterations can be made to the embodiments without departing from the principles and spirit of the disclosure, the scope of which is defined by the claims and their equivalents.
Claims (8)
1. An ion nitrogen carbon sulfur multi-element co-cementation auxiliary device is suitable for being placed on a furnace body of an ion diffusion furnace, a workpiece table for placing metal workpieces is arranged in the ion diffusion furnace, and the ion nitriding auxiliary device comprises:
the hollow cathode ion source is suitable for being placed at the top of the furnace body and is used for emitting plasma electron beams to the vicinity of the metal workpiece; and
a magnetic field assisting unit including an insulating case and a plurality of electromagnets; the insulating shell is suitable for being placed on the side wall of the furnace body; the electromagnets are coaxial and are sequentially arranged in the insulating shell at intervals from inside to outside, the winding modes of two adjacent electromagnets are opposite, and the electromagnets are used for forming a controllable magnetic field in the ion diffusion furnace so as to change the motion track of electrons on the surface of the metal workpiece and the magnetic domain of the metal workpiece.
2. The ionic nitrogen carbon sulfur multicomponent co-cementation auxiliary equipment as claimed in claim 1, wherein the current applied to the electromagnet satisfies the following conditions: the metal workpiece is completely contained by the magnetic field generated by the electromagnet, and the magnetic field intensity near the metal workpiece reaches 450 Gs-550 Gs.
3. The ionic nitrogen carbon sulfur multicomponent cementation auxiliary equipment as claimed in claim 1, wherein each electromagnet is an annular electromagnet.
4. The ionic nitrogen carbon sulfur multicomponent co-cementation auxiliary equipment as claimed in claim 1, wherein the axial direction of each electromagnet is parallel to the upper plane of the workpiece table.
5. The ionic nitrogen carbon sulfur multicomponent co-cementation auxiliary equipment as claimed in claim 1, wherein the magnetic field auxiliary unit further comprises a metal disc located in the furnace body and disposed as close to the insulating shell as possible, the metal disc is wrapped by magnetic induction lines generated by the electromagnet, the material of the metal disc is the same as that of the metal workpiece, and the metal disc and the workpiece stage share a power supply.
6. An ionic nitrocarburizing treatment system, characterized by comprising:
the ion nitriding furnace comprises a furnace body and a workpiece table arranged in the furnace body and used for placing metal workpieces;
the ionic nitrogen carbon sulfur multi-element co-permeation auxiliary equipment is the ionic nitrogen carbon sulfur multi-element co-permeation auxiliary equipment according to any one of claims 1 to 5;
the transformer is connected with the electromagnet, the workpiece table and the hollow cathode ion source and is used for enabling the electromagnet to generate a magnetic field and providing ionization voltage into the furnace body;
the vacuum pump is communicated with the furnace body and is used for enabling the inside of the furnace body to be in a vacuum state;
a gas supply bottle which is communicated with the furnace body and is used for supplying inert gas, gas containing nitrogen element, gas containing hydrogen element, gas containing carbon element and gas containing sulfur element into the furnace body; and
and the electrical control cabinet is used for controlling the ion nitrogen carbon sulfur multi-element co-permeation auxiliary equipment, the ion diffusion furnace, the transformer, the vacuum pump and the air supply bottle.
7. The ionic nitrocarburizing and sulfur multicomponent co-cementation treatment method is characterized by comprising the following steps:
placing a metal workpiece in a furnace body of an ion diffusion furnace, vacuumizing the furnace body, and introducing inert gas into the furnace body;
introducing voltage into the furnace body and heating up the furnace body to ensure that stable glow discharge is carried out in the furnace body, and starting the hollow cathode ion source;
when the temperature in the furnace body reaches a first temperature, introducing gas containing nitrogen elements and gas containing hydrogen elements into the furnace body, and continuously heating the furnace body;
stopping introducing inert gas when the temperature in the furnace body reaches a second temperature, introducing gas containing carbon into the furnace body, and providing a magnetic field with a first magnetic field intensity to the metal workpiece by using the ionic nitrogen carbon sulfur multi-element co-infiltration auxiliary equipment according to any one of claims 1-5;
after the temperature in the furnace body reaches the co-cementation temperature, providing a magnetic field with a second magnetic field intensity for the metal workpiece by using the ionic nitrocarburizing auxiliary equipment;
in the heat preservation and pressure maintaining stage, the intensity of a magnetic field provided by the ionic nitrogen, carbon and sulfur multi-element co-permeation auxiliary equipment to the metal workpiece is gradually reduced to a third magnetic field intensity;
introducing gas containing sulfur into the furnace body, and reducing the temperature in the furnace body;
when the temperature in the furnace body is reduced to a third temperature, a magnetic field with a fourth magnetic field intensity is provided for the metal workpiece by using the ionic nitrogen, carbon and sulfur multi-element common field auxiliary equipment;
when the temperature in the furnace body is reduced to a fourth temperature, closing the ionic nitrogen-carbon-sulfur multi-element co-permeation auxiliary equipment, stopping introducing the gas containing the hydrogen element, the gas containing the nitrogen element, the gas containing the carbon element and the gas containing the sulfur element into the furnace body, and introducing inert gas into the furnace body to clean the surface of the metal workpiece;
and when the temperature in the furnace body is reduced to a fifth temperature, stopping introducing the inert gas into the furnace body, and taking out the metal workpiece.
8. The ionic nitrocarb-sulfur multicompartment processing method of claim 7 wherein the fourth magnetic field strength is greater than the second magnetic field strength.
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| JPS5547378A (en) * | 1978-09-29 | 1980-04-03 | Hitachi Ltd | Ion sulfurizing, carbonitriding method |
| JP2004300536A (en) * | 2003-03-31 | 2004-10-28 | Shinko Seiki Co Ltd | Surface treatment apparatus and surface treatment method |
| CN105839046A (en) * | 2016-05-06 | 2016-08-10 | 华南理工大学 | Method for conducting low-temperature efficient rapid ion nitriding on surface of steel workpiece |
| CN109852931A (en) * | 2019-01-07 | 2019-06-07 | 纳狮新材料(浙江)有限公司 | The film plating process of vacuum coating equipment and composite coating |
| CN113604774A (en) * | 2021-07-30 | 2021-11-05 | 清华大学 | Ion nitrocarburizing magnetic field auxiliary equipment, processing system and method |
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2022
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Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5547378A (en) * | 1978-09-29 | 1980-04-03 | Hitachi Ltd | Ion sulfurizing, carbonitriding method |
| JP2004300536A (en) * | 2003-03-31 | 2004-10-28 | Shinko Seiki Co Ltd | Surface treatment apparatus and surface treatment method |
| CN105839046A (en) * | 2016-05-06 | 2016-08-10 | 华南理工大学 | Method for conducting low-temperature efficient rapid ion nitriding on surface of steel workpiece |
| CN109852931A (en) * | 2019-01-07 | 2019-06-07 | 纳狮新材料(浙江)有限公司 | The film plating process of vacuum coating equipment and composite coating |
| CN113604774A (en) * | 2021-07-30 | 2021-11-05 | 清华大学 | Ion nitrocarburizing magnetic field auxiliary equipment, processing system and method |
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