CN114436264B - Production process and production system of silane - Google Patents
Production process and production system of silane Download PDFInfo
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- CN114436264B CN114436264B CN202111640024.XA CN202111640024A CN114436264B CN 114436264 B CN114436264 B CN 114436264B CN 202111640024 A CN202111640024 A CN 202111640024A CN 114436264 B CN114436264 B CN 114436264B
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- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B33/00—Silicon; Compounds thereof
- C01B33/04—Hydrides of silicon
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- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B33/00—Silicon; Compounds thereof
- C01B33/04—Hydrides of silicon
- C01B33/046—Purification
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P20/00—Technologies relating to chemical industry
- Y02P20/10—Process efficiency
Abstract
The invention relates to the technical field of silane production, in particular to a silane production process and a production system thereof, wherein the production process comprises the following steps of S1: preheating, S2: catalytic cracking, S3: removing solids, S4: removing hydrogen, S5: removing silane, S6: disilane is obtained, S7: step of obtaining trisilane. Through the pre-heater, reactor, filter, first rectifying column, second rectifying column, third rectifying column and the fourth rectifying column that communicate in proper order and set up, the pre-heater has intake pipe and outlet duct, the inlet end and the outlet duct of filter are connected, the feed end of first rectifying column is connected with the end of giving vent to anger of filter, the feed end of second rectifying column is connected with the discharge end of first rectifying column, and the feed end of third rectifying column is connected with the discharge end of second rectifying column, and the feed end of fourth rectifying column is connected with the discharge end of third rectifying column, wherein, the top of first rectifying column, second rectifying column, third rectifying column and fourth rectifying column all sets up vice discharge end, accomplishes the technology, provides a silane's production technology and production system thereof, and is simple reasonable, and control is convenient, and the high-order silane purity that the reaction obtained is higher.
Description
Technical Field
The invention relates to the technical field of silane production, in particular to a silane production process and a silane production system.
Background
The high-order silane such as disilane and trisilane has special chemical characteristics of easy decomposition, the film forming temperature is much lower than that of silane in PECVD and LPCVD manufacturing processes, the film forming speed is high, the film quality is smooth and uniform, the silicon content in the high-order silane molecules is much higher than that of silane, therefore, the high-order silane such as disilane in the future has wide application space, the technology for producing the high-order silane such as trisilane at home and abroad at present does not have industrialized devices, the production route of disilane mainly comprises two routes, one is a byproduct disilane of a small loose route, and the other is silane high-temperature cracking production disilane, but the defects that the disilane produced by the first and small loose routes has low purity; secondly, the silane high-temperature cracking route generates more solid powder; 3. the high temperature required for the reaction of the high temperature cleavage route of the silane.
Disclosure of Invention
Aiming at the defects existing in the prior art, the invention aims to provide a silane production process and a silane production system, so as to solve the problems in the background art.
The technical scheme of the invention is realized as follows: the production process of the silane is characterized by comprising the following steps of:
s1, preheating, namely introducing a silane raw material into a preheater for preheating;
s2, catalytic cracking, namely introducing the silane raw material preheated in the step S1 into a reactor for pressurizing, catalyzing and decomposing to generate disilane, trisilane, high-boiling substances, hydrogen, mixed gas of the silane raw material and solid silicon powder;
s3, removing solids, namely introducing the disilane, the trisilane, the hydrogen, the solid silicon powder, the silane and other mixed gas generated in the step S2 into a filter to remove the solid silicon powder therein, so as to obtain the mixed gas of disilane, trisilane, high-boiling substances, hydrogen, silane raw materials and the like;
s4, removing hydrogen, namely introducing the mixed gas of disilane, trisilane, high-boiling substances, hydrogen and silane raw materials obtained in the step S3 into a first rectifying tower for rectifying, and discharging the hydrogen from the top of the tower to obtain the mixed gas of disilane, trisilane, silane and the like at the bottom of the tower;
s5, removing silane, namely introducing the mixed gas of disilane, trisilane, high-boiling substances and silane raw materials obtained in the step S4 into a second rectifying tower for rectifying, and discharging the silane raw materials from the top of the tower to obtain the mixed gas of disilane, trisilane and high-boiling substances at the bottom of the tower;
s6, obtaining disilane, introducing the mixed gas of disilane, trisilane and high-boiling-point substances obtained in the step S5 into a third rectifying tower for rectification, obtaining disilane from the top of the tower, and obtaining trisilane and high-boiling-point substances from the bottom of the tower;
s7, obtaining trisilane, introducing the mixed gas of the trisilane and the high-boiling-point substances obtained in the step S6 into a fourth rectifying tower for rectification, obtaining the trisilane from the tower top, and obtaining the high-boiling-point substances from the tower bottom.
The utility model provides a silane production system, its characterized in that, including the pre-heater, reactor, filter, first rectifying column, second rectifying column, third rectifying column and the fourth rectifying column that communicate in proper order and set up, the pre-heater has intake pipe and outlet duct, the inlet end of reactor with the outlet duct is connected, the inlet end of filter with the outlet end of reactor is connected, the feed end of first rectifying column is connected with the outlet end of filter, the feed end of second rectifying column is connected with the discharge end of first rectifying column, the feed end of third rectifying column is connected with the discharge end of second rectifying column, the feed end of fourth rectifying column is connected with the discharge end of third rectifying column, wherein, the auxiliary discharge end is all set up at the top of first rectifying column, second rectifying column, third rectifying column and fourth rectifying column.
Preferably, the preheater comprises:
the inner cavity of the furnace body is communicated with the air inlet pipe and the air outlet pipe;
the heating unit is arranged in the furnace body and used for heating the inner cavity of the furnace body;
the gas transmission unit is arranged in the furnace body, the input end of the gas transmission unit is connected with the gas inlet pipe, and the output end of the gas transmission unit is connected with the gas outlet pipe and is used for controlling the gas flow rate in the furnace body.
Preferably, the heating unit includes:
the inner tank body is arranged in the furnace body, and a heating cavity is formed by the outer wall of the inner tank body and the inner wall of the furnace body;
the plurality of interlayer are distributed at intervals along the axis of the inner tank body, each interlayer is provided with a through hole, and the through holes on the adjacent interlayer are staggered left and right by the axis of the inner tank body;
the side walls of the upper end and the lower end of the furnace body are provided with a steam inlet and a steam outlet which are communicated with the heating cavity, and the gas transmission unit is positioned in the inner tank body.
Preferably, the gas transmission unit includes:
the top of the air inlet cover is connected with the air inlet pipe;
the ventilation disc is positioned at the bottom of the air inlet cover, the periphery of the ventilation disc is connected with the inner wall of the inner tank body in a sealing way, and the middle part of the ventilation disc is provided with an overair control valve;
the turbine bin is arranged on the steam inlet and is internally provided with a turbine;
the first rotating shaft is arranged in the turbine bin, one end of the first rotating shaft is connected with the middle part of the turbine, and the other end of the first rotating shaft penetrates through and extends into the inner tank body to be connected with a driving bevel gear;
the second rotating shaft is vertically arranged at the bottom of the ventilation disc, one end of the top of the second rotating shaft is rotationally connected with the overair control valve, and the other end of the second rotating shaft is connected with a first driven bevel gear;
the fan blades are provided with a plurality of fan blades, and are circumferentially distributed on the side wall of the second rotating shaft along the axis of the second rotating shaft;
the air outlet cover is positioned at the bottom of the inner cavity of the inner tank body, and the bottom of the air outlet cover is connected with the air outlet pipe;
the driving bevel gear is meshed with the first driven bevel gear, and the second rotating shaft is a telescopic rod.
Preferably, the overgas control valve includes:
a vent opening is formed in the middle of the vent disc;
the air control pipe is arranged at the bottom of the air vent disc, the top of the air control pipe is connected with the air vent, and a plurality of groups of through grooves which are distributed at intervals along the axis of the air control pipe are formed in the side part of the air control pipe;
the piston is arranged in the air control pipe, and the periphery of the piston is attached to the inner wall of the air control pipe;
and the output arm of the telescopic cylinder is connected with the top of the piston and is used for controlling the piston to move along the axial direction of the air control pipe.
Preferably, the reactor comprises:
the inner cavity of the shell is communicated with the air outlet pipe and the air inlet end of the filter;
and a catalyst filled in the housing.
Preferably, the filter comprises:
the top of the filter box is provided with an air inlet end communicated with the inner cavity of the shell, and the side part of the filter box is provided with an air outlet end;
the filter baffle plate is arranged in the filter box in a funnel shape, is provided with a filter perforation, the top of the filter baffle plate corresponds to the air inlet end of the filter box, and the bottom of the filter baffle plate is provided with a first discharge hole;
the first collecting box is arranged at the bottom of the filtering baffle plate;
one end of the first rotating shaft is connected with a second driven conical gear meshed with the driving conical gear, and the other end of the first rotating shaft extends into the collecting box in a penetrating way and is connected with a first brush plate;
one end of the air suction pipe is connected with the air outlet end of the filter box, and the other end of the air suction pipe is connected with an air feeding pump;
the bottom of the first brush plate is attached to the upper surface of the filtering separator, and the output end of the air supply pump is connected with the feeding end of the first rectifying tower.
Preferably, the filter further comprises:
a filter tank communicated with the air suction pipe;
the filter screen is arranged in the filter tank;
the second discharging hole is formed in the bottom of the filtering tank and is positioned on the left side of the filtering screen;
the second collecting box is fixed at the bottom of the filtering tank, and the inside of the second collecting box is communicated with the second discharge hole;
the second rotating shaft is rotatably arranged on the filter screen in a penetrating way, the left end of the second rotating shaft is connected with a second brush plate, and the right end of the second rotating shaft is connected with a windmill;
wherein, the second brush board is laminated with the left side surface of filter screen and is set up.
Preferably, the top surface of the filtering baffle is provided with a first material passing groove in annular distribution and a second material passing groove which is communicated with the first material passing groove and extends towards the first discharge hole.
The beneficial effects are that: according to the invention, the silane raw material sequentially passes through the production processes of the preheater, the reactor, the filter, the first rectifying tower, the second rectifying tower, the third rectifying tower and the fourth rectifying tower, so that high-concentration disilane and trisilane products can be prepared.
Drawings
In order to more clearly illustrate the embodiments of the invention or the technical solutions of the prior art, the drawings which are required in the description of the embodiments or the prior art will be briefly described, it being obvious that the drawings in the description below are only some embodiments of the invention, and that other drawings can be obtained according to these drawings without giving inventive faculty to a person skilled in the art.
FIG. 1 is a schematic structural diagram of an embodiment of the present invention;
FIG. 2 is a schematic view showing the structure of a reactor in an embodiment of the present invention;
FIG. 3 is a schematic view of a filter according to an embodiment of the present invention;
FIG. 4 is a schematic view of a filter separator according to an embodiment of the present invention;
fig. 5 is a top view of a filter separator in an embodiment of the invention.
Detailed Description
The following description of the embodiments of the present invention will be made with reference to the accompanying drawings, in which it is evident that the embodiments described are only some embodiments of the present invention, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings are merely for convenience in describing the present invention and simplifying the description, and do not indicate or imply that the apparatus or elements referred to must have a specific orientation, be configured and operated in a specific orientation, and thus should not be construed as limiting the present invention.
In the description of the present invention, a number means one or more, a number means two or more, and greater than, less than, exceeding, etc. are understood to not include the present number, and above, below, within, etc. are understood to include the present number. The description of the first and second is for the purpose of distinguishing between technical features only and should not be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated or implicitly indicating the precedence of the technical features indicated.
In the description of the present invention, unless explicitly defined otherwise, terms such as arrangement, installation, connection, etc. should be construed broadly and the specific meaning of the terms in the present invention can be reasonably determined by a person skilled in the art in combination with the specific contents of the technical solution.
Embodiments of the present invention are described with particular reference to fig. 1-4 shown in the specification.
The invention discloses a production process of silane, which comprises the following steps:
s1, preheating, namely introducing a silane raw material into a preheater for preheating, pressurizing to 1.5-3.5 MPa through a compressor, and preheating to 200-400 ℃;
s2, catalytic cracking, namely introducing the silane raw material preheated in the step S1 into a reactor for pressurizing, catalyzing and decomposing to generate disilane, trisilane, high-boiling substances, hydrogen, mixed gas of the silane raw material and solid silicon powder;
s3, removing solids, namely introducing the disilane, the trisilane, the hydrogen, the solid silicon powder, the silane and other mixed gas generated in the step S2 into a filter to remove the solid silicon powder therein, so as to obtain the mixed gas of disilane, trisilane, high-boiling substances, hydrogen, silane raw materials and the like;
s4, removing hydrogen, namely introducing the mixed gas of disilane, trisilane, high-boiling substances, hydrogen and silane raw materials obtained in the step S3 into a first rectifying tower for rectifying, controlling the pressure in the tower to be 1.5-3.0 MPa, rectifying at the temperature of-30 to-130 ℃, discharging the hydrogen from the top of the tower, and obtaining the mixed gas of disilane, trisilane, silane and the like at the bottom of the tower;
s5, removing silane, namely introducing the mixed gas of disilane, trisilane, high-boiling-point substances and silane raw materials obtained in the step S4 into a second rectifying tower for rectifying, controlling the pressure in the tower to be 1.5-3.0 MPa, rectifying at the temperature of-50-100 ℃, discharging the silane raw materials from the tower top, and obtaining the mixed gas of disilane, trisilane and high-boiling-point substances from the tower bottom;
s6, obtaining disilane, introducing the mixed gas of disilane, trisilane and high-boiling-point substances obtained in the step S5 into a third rectifying tower for rectifying, controlling the pressure in the tower to be 0.5-1.5 MPa, rectifying at the temperature of 30-130 ℃, and obtaining disilane from the tower top and trisilane and high-boiling-point substances from the tower bottom;
s7, obtaining trisilane, introducing the mixed gas of the trisilane and the high-boiling-point substances obtained in the step S6 into a fourth rectifying tower for rectification, controlling the pressure in the tower to be 0.1-0.5 MPa, rectifying at the temperature of 30-200 ℃, obtaining the trisilane from the tower top, and obtaining the high-boiling-point substances from the tower bottom.
It should be noted that the catalyst in step S2 may be a combination of silica and molybdenum, and the high boiling substance may be a higher-order disilane, trisilane, or the like.
The utility model provides a silane production system, its characterized in that, including the pre-heater 1, reactor 8, filter 2, first rectifying column 3, second rectifying column 4, third rectifying column 5 and fourth rectifying column 6 that communicate in proper order and set up, pre-heater 1 has intake pipe 11 and outlet duct 12, the inlet end of reactor 8 with outlet duct 12 is connected, the inlet end of filter 2 with the outlet end of reactor 8 is connected, the feed end of first rectifying column 3 is connected with the outlet end of filter 2, the feed end of second rectifying column 4 is connected with the discharge end of first rectifying column 3, the feed end of third rectifying column 5 is connected with the discharge end of second rectifying column 4, the feed end of fourth rectifying column 6 is connected with the discharge end of third rectifying column 5, wherein, the top of first rectifying column 3, second rectifying column 4, third rectifying column 5 and fourth rectifying column 6 all sets up vice discharge end.
By adopting the technical scheme, the silane raw material is heated by the preheater and then subjected to high-temperature pyrolysis in the reactor to generate a mixture of disilane, trisilane, hydrogen, silane and solid silicon powder, the mixture is introduced into the filter to remove the solid silicon powder in the mixture, the mixture from which the solid silicon powder is removed is introduced into the first rectifying tower for rectification, the hydrogen in the mixture is discharged from the top of the first rectifying tower, the rest mixture is introduced into the second rectifying tower, the silane in the mixture is discharged from the top of the second rectifying tower, the rest mixture is introduced into the third rectifying tower, the disilane is discharged from the top of the third rectifying tower, and the trisilane is discharged from the bottom of the third rectifying tower.
In a specific embodiment of the present invention, the reactor 1 comprises:
the inner cavity of the furnace body 13 is communicated with the air inlet pipe 11 and the air outlet pipe 12;
the heating unit 14 is arranged in the furnace body 13 and is used for heating the inner cavity of the furnace body 13;
the gas transmission unit 15 is arranged in the furnace body 13, the input end of the gas transmission unit is connected with the gas inlet pipe 11, and the output end of the gas transmission unit is connected with the gas outlet pipe 12 and is used for controlling the gas flow rate in the furnace body 13.
Through adopting above-mentioned technical scheme, the reactor supplies heat to the furnace body through heating unit, controls the velocity of flow of silane gas in the furnace body through the gas-supply unit, and the gas-supply unit cooperates with heating unit for the fission reaction of silane in the furnace body is more abundant.
In a specific embodiment of the present invention, the heating unit 14 includes:
an inner tank 141 disposed in the furnace body 13, and having an outer wall forming a heating chamber 1411 with an inner wall of the furnace body 13;
the multiple separation layers 142 are distributed at intervals along the axis of the inner tank 141, each separation layer 142 is provided with a through hole 1421, and the through holes 1421 on the adjacent separation layers 142 are staggered left and right with the axis of the inner tank 141;
wherein, the upper and lower side walls of the furnace body 13 are provided with a steam inlet and a steam outlet which are communicated with the heating cavity 1411, and the gas transmission unit 15 is positioned inside the inner tank 141.
Through adopting above-mentioned technical scheme, when letting in high temperature steam to steam inlet, steam fills the heating chamber, and enters into the interlude intracavity of two interlayers through the through-hole on the interlayer, until discharging from the steam outlet of bottom, all have the through-hole on mode and every interlayer of interlayer, and the through-hole on the adjacent interlayer is with the axis left and right sides staggered arrangement of inner tank body for steam when passing through the through-hole on each interlayer, the time that remains in the heating chamber increases, has improved the heating effect to the inner tank body.
In an embodiment of the present invention, the gas delivery unit 15 includes:
an intake cover 151, the top of which is connected with the intake pipe 11;
the ventilation disc 152 is positioned at the bottom of the air inlet cover 151, the periphery of the ventilation disc is connected with the inner wall of the inner tank 141 in a sealing way, and the middle part of the ventilation disc is provided with an overair control valve 150;
a turbine bin 153 provided on the steam inlet, in which a turbine 1531 is provided;
the first rotating shaft 154 is arranged in the turbine bin 153, one end of the first rotating shaft is connected with the middle part of the turbine 1531, and the other end of the first rotating shaft extends into the inner tank 141 in a penetrating way and is connected with the driving conical gear 1541;
the second rotating shaft 155 is vertically arranged at the bottom of the ventilation disc 152, one end of the top of the second rotating shaft is rotatably connected with the overair control valve 150, and the other end of the second rotating shaft is connected with a first driven bevel gear 1551;
the fan blades 156 are multiple and circumferentially distributed on the side wall of the second rotating shaft 155 along the axis of the second rotating shaft 155;
an air outlet cover 157, which is positioned at the bottom of the inner cavity of the inner tank 141 and the bottom of which is connected with the air outlet pipe 12;
the driving bevel gear 1551 is engaged with the first driven bevel gear 1541, and the second rotating shaft 155 is a telescopic rod.
Through adopting above-mentioned technical scheme, the intake pipe lets in the mixture in to the inlet hood, the mixture discharges to the cover of giving vent to anger through the control of overgas control valve, the in-process carries out high Wen Liebian, simultaneously, turbine in the turbine storehouse rotates under the promotion effect that receives steam, driven first pivot synchronous rotation, under the meshing effect of first driven bevel gear in first pivot initiative bevel gear and the second pivot, the second pivot rotates the flabellum rotation on it of driving for move overgas control valve exhaust silane gas to diffuse to the week portion tank wall of the inner tank body, the effect of heating has been improved.
In an embodiment of the present invention, the over-air control valve 150 includes:
a vent 1501 formed in the middle of the vent plate 152;
the air control pipe 1502 is arranged at the bottom of the air vent disc 152, the top of the air control pipe is connected with the air vent 1502, and a plurality of groups of through grooves 15021 are formed at the side of the air control pipe along the axis of the air control pipe 1502 at equal intervals;
a piston 1503 disposed in the gas control tube 1502 and having a peripheral portion thereof in contact with an inner wall of the gas control tube 1502;
a telescoping cylinder 1504 with its output arm connected to the top of the piston 1503 for controlling the axial movement of the piston 1503 along the gas control tube 1502.
Through adopting above-mentioned technical scheme, the telescopic cylinder that sets up is opened, and the telescopic arm extension of telescopic cylinder drives the piston at the intraductal axial displacement of accuse to make logical groove on the accuse trachea be plugged up or open by the piston, and then when logical groove all is plugged up by the piston, the gas control valve of passing through is not too much gas, when logical groove all is the open state, and the gas volume of passing through is the biggest.
In a specific embodiment of the present invention, the reactor 8 comprises:
a housing 81, the inner cavity of which is communicated with the air outlet pipe 12 and the air inlet end of the filter 3;
the catalyst 82 is filled in the housing 81.
By adopting the technical scheme, the preheated silane raw material enters the shell, contacts with the catalyst, is cooled and catalyzed and decomposed to generate disilane, trisilane, high-boiling-point substances, hydrogen, mixed gas of the undegraded silane raw material and solid silicon powder
In a specific embodiment of the present invention, the filter 3 includes:
the top of the filter box 21 is provided with an air inlet end communicated with the inner cavity of the shell 81, and the side part of the filter box is provided with an air outlet end;
the filter baffle 22 is arranged in the filter box 21 in a funnel shape, provided with a filter perforation, the top of the filter baffle corresponds to the air inlet end of the filter box 21, and the bottom of the filter baffle is provided with a first discharge hole 221;
a first collection tank 23 provided at the bottom of the filter separator 22;
a first third rotating shaft 24, one end of which is connected with a second driven bevel gear 241 meshed with the driving bevel gear 1551, and the other end extends to the collecting box 23 in a penetrating way and is connected with a first brush plate 242;
an air suction pipe 25, one end of which is connected with the air outlet end of the filter box 21, and the other end of which is connected with an air supply pump 26;
the bottom of the first brush plate 242 is attached to the upper surface of the filter separator 22, and the output end of the air pump 26 is connected to the feed end of the first rectifying tower 3.
Through adopting above-mentioned technical scheme, the mixture of furnace body passes through the outlet duct and discharges into in the rose box, under the effect of air feed pump, the mixture is when filtering the baffle through the filtration, the gas in the mixture is discharged from filtering the perforation, the solid silica flour in it is filtered at the upper surface of filtering the baffle, simultaneously, second driven bevel gear is under driving the bevel gear's drive, drive the first pivot of third, thereby first brush board synchronous rotation, the solid silica flour on filtering the baffle surface is swept, fall to in the first collecting box along the surface of filtering the baffle, it is to be noted that, can close the air feed pump when sweeping up the solid silica flour, in order to make things convenient for the rate that the solid silica flour dropped to first collecting box.
In a specific embodiment of the present invention, the filter 2 further comprises:
a filter tank 27 connected to the suction pipe 25;
a filter screen 28 provided in the filter tank 27;
a second discharge port 29, which is arranged at the bottom of the filter tank 27 and is positioned at the left side of the filter screen 28;
a second collecting box 30 fixed at the bottom of the filter tank 27, the interior of which is communicated with a second discharge port 29;
the second rotating shaft 31 is rotatably arranged on the filter screen 28 in a penetrating way, the left end of the second rotating shaft is connected with a second brush plate 311, and the right end of the second rotating shaft is connected with a windmill 312;
wherein, the second brush plate 311 is attached to the left surface of the filter screen 28.
Through adopting above-mentioned technical scheme, the mixture that enters into the filter tank is thoroughly got rid of after the filter screen, simultaneously, when the pump work of supplying air, the interior gas runner of filter tank drives the windmill and rotates, and then second scraper blade is driven to third pivot, and the second scraper blade scrapes the solid silica flour on filter screen surface off, until falling into in the second collecting box.
In the embodiment of the present invention, the top surface of the filtering baffle 22 is provided with a first material passing groove 2211 distributed in a ring shape and a second material passing groove 2212 communicated with the first material passing groove 2211 and extending toward the first material outlet 221.
Through adopting above-mentioned technical scheme, the first silo and the second that pass that set up pass the silo and make things convenient for solid silica flour to fall into in the first collecting box.
In summary, the invention provides a production process and a production system of silane, which are simple and reasonable, convenient to control and higher in purity of the high-order silane obtained by reaction.
The foregoing description of the preferred embodiments of the invention is not intended to limit the invention to the precise form disclosed, and any such modifications, equivalents, and alternatives falling within the spirit and scope of the invention are intended to be included within the scope of the invention.
Claims (6)
1. The silane production system is characterized by comprising a preheater, a reactor, a filter, a first rectifying tower, a second rectifying tower, a third rectifying tower and a fourth rectifying tower which are sequentially communicated, wherein the preheater is provided with an air inlet pipe and an air outlet pipe, the air inlet end of the reactor is connected with the air outlet pipe, the air inlet end of the filter is connected with the air outlet end of the reactor, the feed end of the first rectifying tower is connected with the air outlet end of the filter, the feed end of the second rectifying tower is connected with the discharge end of the first rectifying tower, the feed end of the third rectifying tower is connected with the discharge end of the second rectifying tower, and the feed end of the fourth rectifying tower is connected with the discharge end of the third rectifying tower, wherein the tops of the first rectifying tower, the second rectifying tower, the third rectifying tower and the fourth rectifying tower are all provided with auxiliary discharge ends;
the preheater includes:
the inner cavity of the furnace body is communicated with the air inlet pipe and the air outlet pipe;
the heating unit is arranged in the furnace body and used for heating the inner cavity of the furnace body;
the gas transmission unit is arranged in the furnace body, the input end of the gas transmission unit is connected with the gas inlet pipe, the output end of the gas transmission unit is connected with the gas outlet pipe, and the gas transmission unit is used for controlling the flow rate of gas in the furnace body;
the heating unit includes:
the inner tank body is arranged in the furnace body, and a heating cavity is formed by the outer wall of the inner tank body and the inner wall of the furnace body;
the plurality of interlayer are distributed at intervals along the axis of the inner tank body, each interlayer is provided with a through hole, and the through holes on the adjacent interlayer are staggered left and right by the axis of the inner tank body;
the side walls of the upper end and the lower end of the furnace body are provided with a steam inlet and a steam outlet which are communicated with the heating cavity, and the gas transmission unit is positioned in the inner tank body;
the gas transmission unit comprises:
the top of the air inlet cover is connected with the air inlet pipe;
the ventilation disc is positioned at the bottom of the air inlet cover, the periphery of the ventilation disc is in sealing connection with the inner wall of the inner tank body, and the middle part of the ventilation disc is provided with an overair control valve;
the turbine bin is arranged on the steam inlet and is internally provided with a turbine;
the first rotating shaft is arranged in the turbine bin, one end of the first rotating shaft is connected with the middle part of the turbine, and the other end of the first rotating shaft penetrates through and extends into the inner tank body to be connected with a driving bevel gear;
the second rotating shaft is vertically arranged at the bottom of the ventilation disc, one end of the top of the second rotating shaft is rotationally connected with the overair control valve, and the other end of the second rotating shaft is connected with a first driven bevel gear;
the fan blades are provided with a plurality of fan blades, and are circumferentially distributed on the side wall of the second rotating shaft along the axis of the second rotating shaft;
the air outlet cover is positioned at the bottom of the inner cavity of the inner tank body, and the bottom of the air outlet cover is connected with the air outlet pipe;
the driving bevel gear is meshed with the first driven bevel gear, and the second rotating shaft is a telescopic rod;
the overgas control valve includes:
a vent opening is formed in the middle of the vent disc;
the air control pipe is arranged at the bottom of the air vent disc, the top of the air control pipe is connected with the air vent, and a plurality of groups of through grooves which are distributed at intervals along the axis of the air control pipe are formed in the side part of the air control pipe;
the piston is arranged in the air control pipe, and the periphery of the piston is attached to the inner wall of the air control pipe;
and the output arm of the telescopic cylinder is connected with the top of the piston and is used for controlling the piston to move along the axial direction of the air control pipe.
2. A silane production system according to claim 1, wherein the reactor comprises:
the inner cavity of the shell is communicated with the air outlet pipe and the air inlet end of the filter;
and a catalyst filled in the housing.
3. A silane production system according to claim 2, wherein the filter comprises:
the top of the filter box is provided with an air inlet end communicated with the inner cavity of the shell, and the side part of the filter box is provided with an air outlet end;
the filter baffle plate is arranged in the filter box in a funnel shape, is provided with a filter perforation, the top of the filter baffle plate corresponds to the air inlet end of the filter box, and the bottom of the filter baffle plate is provided with a first discharge hole;
the first collecting box is arranged at the bottom of the filtering baffle plate;
one end of the first rotating shaft is connected with a second driven bevel gear meshed with the driving bevel gear, and the other end of the first rotating shaft extends into the collecting box in a penetrating way and is connected with a first brush plate;
one end of the air suction pipe is connected with the air outlet end of the filter box, and the other end of the air suction pipe is connected with an air feeding pump;
the bottom of the first brush plate is attached to the upper surface of the filtering separator, and the output end of the air supply pump is connected with the feeding end of the first rectifying tower.
4. A silane production system according to claim 3, wherein said filter further comprises:
a filter tank communicated with the air suction pipe;
the filter screen is arranged in the filter tank;
the second discharging hole is formed in the bottom of the filtering tank and is positioned on the left side of the filtering screen;
the second collecting box is fixed at the bottom of the filtering tank, and the inside of the second collecting box is communicated with the second discharge hole;
the second rotating shaft is rotatably arranged on the filter screen in a penetrating way, the left end of the second rotating shaft is connected with a second brush plate, and the right end of the second rotating shaft is connected with a windmill;
wherein, the second brush board is laminated with the left side surface of filter screen and is set up.
5. The silane production system of claim 4, wherein the top surface of the filter separator is provided with first material passing grooves in annular distribution and second material passing grooves communicated with the first material passing grooves and extending to the first material outlet.
6. A silane production process suitable for use in a silane production system as claimed in claim 5, comprising the steps of:
s1, preheating, namely introducing a silane raw material into a preheater for preheating;
s2, catalytic pyrolysis, namely introducing the silane raw material preheated in the step S1 into a reactor for pressurized catalytic decomposition to generate disilane, trisilane, high-boiling substances, hydrogen, mixed gas of the silane raw material and solid silicon powder;
s3, removing solids, namely introducing the disilane, the trisilane, the hydrogen, the solid silicon powder, the silane and other mixed gas generated in the step S2 into a filter to remove the solid silicon powder therein, so as to obtain the mixed gas of disilane, trisilane, high-boiling substances, hydrogen, silane raw materials and the like;
s4, removing hydrogen, namely introducing the mixed gas of disilane, trisilane, high-boiling substances, hydrogen and silane raw materials obtained in the step S3 into a first rectifying tower for rectifying, and discharging the hydrogen from the top of the tower to obtain the mixed gas of disilane, trisilane, silane and the like at the bottom of the tower;
s5, removing silane, namely introducing the mixed gas of disilane, trisilane, high-boiling substances and silane raw materials obtained in the step S4 into a second rectifying tower for rectifying, and discharging the silane raw materials from the top of the tower to obtain the mixed gas of disilane, trisilane and high-boiling substances at the bottom of the tower;
s6, obtaining disilane, introducing the mixed gas of disilane, trisilane and high-boiling-point substances obtained in the step S5 into a third rectifying tower for rectification, obtaining disilane from the top of the tower, and obtaining trisilane and high-boiling-point substances from the bottom of the tower;
s7, obtaining trisilane, introducing the mixed gas of the trisilane and the high-boiling-point substances obtained in the step S6 into a fourth rectifying tower for rectification, obtaining the trisilane from the tower top, and obtaining the high-boiling-point substances from the tower bottom.
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| CN201720989U (en) * | 2010-04-14 | 2011-01-26 | 福清龙泰机械有限公司 | Steam interlayer preheating and insulating device for prefoaming machine |
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