CN114428056A - Automatic optical detection equipment and detection method thereof - Google Patents
Automatic optical detection equipment and detection method thereof Download PDFInfo
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- CN114428056A CN114428056A CN202111677696.8A CN202111677696A CN114428056A CN 114428056 A CN114428056 A CN 114428056A CN 202111677696 A CN202111677696 A CN 202111677696A CN 114428056 A CN114428056 A CN 114428056A
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- G—PHYSICS
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- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
Abstract
The invention discloses automatic optical detection equipment which is mainly used in the field of semiconductors. The device comprises a rack, wherein a first detection module, a second detection module and a carrying mechanism are arranged on the rack; the first detection module is a single detection module, and a set of first alignment modules are adopted to detect an optical detection item; the second detection module is a composite detection module, and a set of second alignment modules are adopted to detect various optical detection items; the number ratio of the first detection module to the second detection module is positively correlated with the detection time ratio; the rack is also provided with a loading position and a unloading position, the conveying mechanism conveys the product to be detected to the first detection module or the second detection module from the loading position, and conveys the product to be detected to the unloading position from the first detection module or the second detection module. The automatic optical detection equipment and the detection method can finish the detection of various optical detection items on the same detection equipment, can finish the classification at one time, and can also greatly shorten the beat time of the whole detection process.
Description
Technical Field
The invention belongs to the technical field of optical detection equipment, and particularly relates to automatic optical detection equipment and a detection method using the same.
Background
The optical detection items for Micro LED detection are various, and mainly comprise Gamma detection, Demura detection, AOI detection and the like. The detection mode of the existing Micro LED detection equipment is generally single-machine detection, namely, one Micro LED detection equipment corresponds to one optical detection item, and one Micro LED detection equipment can only meet one optical detection requirement. When the product needs to be detected in various items, namely, when various detection requirements exist, detection of different detection items requires personnel to transfer the product completing the previous detection item to the next detection item. The detection efficiency is low, and the cleanliness in the carrying process is not easy to meet the requirement.
Disclosure of Invention
In view of all or some of the deficiencies of the prior art as set forth above, the present invention is directed to: the automatic optical detection equipment and the detection method provided by the invention can finish the detection of various optical detection items on the same detection equipment, can finish the classification at one time, and can also greatly shorten the beat time of the whole detection process.
In order to achieve the purpose, the invention provides the following technical scheme:
the invention provides automatic optical detection equipment which comprises a rack, wherein a first detection module, a second detection module and a carrying mechanism are arranged on the rack; the first detection module is a single detection module, and a set of first alignment modules are adopted to detect an optical detection item; the second detection module is a composite detection module, and a set of second alignment modules are adopted to detect various optical detection items; the number ratio of the first detection module to the second detection module is positively correlated with the detection time ratio; the rack is further provided with a feeding position and a discharging position, the conveying mechanism conveys a product to be detected to the first detection module or the second detection module from the feeding position, and conveys the product to the discharging position from the first detection module or the second detection module.
The quantity of the first detection module and the second detection module can be set according to the detection time required by the first detection module and the second detection module respectively, and the quantity ratio of the first detection module to the second detection module is positively correlated with the detection time ratio. The positive correlation means that the quantity ratio is increased along with the increase of the detection time ratio and is reduced along with the reduction of the detection time ratio, and the beat time can be correspondingly reduced under the condition of positive correlation, so that the detection efficiency is improved. In some specific cases, for example, the detection time ratio is exactly 1: 2, the number ratio of the first detection module to the second detection module can be set to be 1 according to the detection time ratio: 2, when the detection time ratio is equal to the number ratio. Of course if the detection time ratio is not exactly 1: 2, but close to 1: 2, the number ratio of the first detection module to the second detection module may be set to 1: 2.
according to the invention, a plurality of detection modules are arranged on one automatic optical detection device, so that detection of various optical detection items can be completed on the same detection device, and grading can be completed at one time. And personnel are not needed to carry and transfer products among different detection items, so that the detection efficiency is improved, and whether the cleanliness in the carrying process meets the requirements or not is not needed to be considered.
The composite detection module is integrated by multiple detection modules, specifically, can share one second alignment module, and after alignment is completed, detection of two optical detection items is completed on the same detection position, so that the carrying time can be saved, the repeated time spent on twice alignment can be saved, and the detection time can be greatly shortened. And need carry out the detection of two kinds of optical detection items in the compound module that detects, the required check-up time of compound module that detects is longer than the required check-up time of single module that detects under the ordinary condition, consequently needs the quantity of the compound module that detects of adjustment and the quantity and the ratio of single module that detects to reduce the beat time, further improve detection efficiency. In some special cases, if the detection time of the composite detection module is the same as or similar to the detection time of the single detection module, the composite detection module may not be provided with a plurality of second detection modules.
The second detection module is a composite detection module integrated by two detection modules, and a set of second alignment module is shared to detect two optical detection items; the quantity ratio of the first detection module to the second detection module is 1: 2. when the second detection module is used for detection, the detection of two optical detection items can be finished. The detection time ratio of the first detection module to the second detection module is close to 1: 2, correspondingly setting the number ratio of the first detection module to the second detection module to be 1: and 2, the beat time can be reduced, and the detection efficiency can be improved. Specifically, when the number of the first detection modules is 1, the number of the corresponding second detection modules is 2; when the number of the first detection modules is 2, the number of the corresponding second detection modules is 4, and so on.
The first detection module is Gamma detection module, the second detection module is AOI & Demura detection module, AOI & Demura detection module is AOI detection module and integrated compound detection module of Demura detection module. In the prior art, the AOI detection module and the Demura detection module are separately arranged and independently aligned and detected, the second detection module adopted by the invention is a composite detection module integrated by two detection modules, AOI detection can be directly carried out after Demura detection, on one hand, the carrying step of a carrying mechanism and the alignment process of repeating two times of alignment can be saved (the second detection module of the invention can realize the detection of two detection items only by one time of alignment), thereby saving time and achieving the effect of improving the detection efficiency, and on the other hand, the integration of the detection modules can greatly reduce the occupied space of detection equipment.
The Gamma detection module comprises a first alignment module and a first detection mechanism, the first alignment module comprises an XY theta three-axis moving platform, a crimping terminal and a CCD alignment module, the first detection structure comprises a Gamma camera and a Z-direction cylinder, and the Z-direction cylinder is used for driving the Gamma camera to move; the first aligning module aligns the product and detects the product through a Gamma camera.
The AOI & Demura detection module comprises a second alignment module and a second detection mechanism, the second alignment module comprises an XY theta three-axis moving platform, a crimping terminal, a CCD alignment module and a laser ranging module, and the second detection mechanism comprises an AOI camera, a Z-axis linear rail and a filter wheel; the AOI camera moves on the Z-axis rail, and the filter wheel is positioned below the AOI camera; and the second alignment module aligns the product and performs laser ranging, and Demura detection and AOI detection are performed through an AOI camera. Typically, Demura repair is performed before AOI inspection, and the filter wheel is used for AOI inspection and not for Demura repair. The detection device is particularly suitable for detecting VR (virtual reality) glasses lenses or AR (augmented reality) glasses lenses, and the sizes of the lenses are very small, so that the precision required by detection is higher than that required by a conventional mobile phone screen or a conventional computer screen. The conventional Demura detection and AOI detection usually do not carry out laser ranging, and the precision required by the lens cannot be achieved.
The carrying mechanism comprises a first picking and placing mechanism and a second picking and placing mechanism, the first picking and placing mechanism is arranged corresponding to the first detection module, and the second picking and placing mechanism is arranged corresponding to the second detection module; the first pick-and-place mechanism conveys the product from the loading position to the first detection module for detection, and the product is taken down from the first detection module after detection is finished; and the second pick-and-place mechanism conveys the product to the second detection module for detection, and conveys the product to the discharging position from the second detection module after detection is finished. Set up different pick and place mechanisms and carry, can effectively improve the efficiency of transport, especially work as first detection module and second detect the quantity of module more, need shorten the beat under the condition of takt time again, only set up a transport mechanism and probably influence the beat that detects.
The carrying mechanism is a six-axis manipulator or a four-axis linear module. When the required precision of product detection is higher, the preferred lapped four-axis straight line module of transport mechanism, the required precision is guaranteed more easily to the four-axis straight line module. Four-axis straight line module is formed by four axle overlap joints of XYZ theta, can realize the removal of four degrees of freedom to replace conventional six-axis manipulator to carry, have better detection effect when the required precision is higher.
The rack is also provided with a transfer platform, and the transfer platform is arranged between the first pick-and-place mechanism and the second pick-and-place mechanism; the first pick-and-place mechanism takes down the products from the first detection module and then carries the products to the transfer platform, and then the second pick-and-place mechanism carries the products from the transfer platform to the second detection module. The transfer platform is the transfer buffer platform can be regarded as the transfer platform between first detection module and the second detection module, and the transport mechanism of being convenient for snatchs the product and gets into next detection item.
The invention also provides an optical detection method, which adopts the automatic optical detection equipment in any scheme, wherein the number ratio of the first detection module to the second detection module is 1: 2, the second detection module comprises a detection module A and a detection module B; the method comprises the following steps:
s1: the product to be detected is conveyed to the first detection module from the loading position by the conveying mechanism for alignment and detection; after the detection is finished, the product is conveyed to the detection module A by the conveying mechanism to be aligned and detected; after the detection is finished, the product is conveyed to the discharging position from the detection module A by the conveying mechanism;
s2: the product to be detected is conveyed to the first detection module from the loading position by the conveying mechanism for alignment and detection; after the detection is finished, the product is conveyed to the detection module B by the conveying mechanism to be aligned and detected; after the detection is finished, the product is conveyed to the discharging position from the detection module B by the conveying mechanism;
after the product is conveyed to the second detection module by the conveying mechanism, the product is conveyed to the first detection module from the loading position by the conveying mechanism in another step directly, namely partial intersection of S1 and S2 is performed; s1 and S2 are repeated.
When first product is detected through first detection module after being carried to first detection module and is detected module A promptly, can carry out the detection of second product on the first detection module this moment, detect module B promptly by carrying to the second detection module after the second product detects through first detection module. The detection of the third product can be carried out on the first detection module, and the third product is carried to detection module A to detect after being detected by the first detection module (at this moment, the first product detected on the detection module A has been carried to the blanking position to carry out the blanking), and so on. Particularly, when the detection time ratio of the first detection module to the second detection module is 1: 2 or close to 1: 2 hours, the beat time can be greatly shortened, and the detection efficiency is improved.
The adopted optical detection equipment further comprises a transfer platform, when the products to be detected are detected on the first detection module, the products are conveyed to the transfer platform from the first detection module by the conveying mechanism, and then the products are conveyed to the second detection module from the transfer platform by the conveying mechanism for alignment and detection. The transfer platform is arranged to facilitate the transfer, especially if the transfer mechanism is provided with a first pick-and-place mechanism and a second pick-and-place mechanism and the transfer platform is arranged between the two pick-and-place mechanisms.
Compared with the prior art, the invention has at least the following beneficial effects:
1. the automatic optical detection equipment provided by the invention is mainly applied to Micro LED automatic detection, can realize detection of various optical detection items on the same detection equipment, for example, Gamma detection, Demura detection and AOI detection can be carried out on the same equipment, grading can be finished on the same equipment at one time, and the automatic optical detection equipment has the advantages of high detection efficiency, small occupied space and good reliability.
2. The invention adopts the composite detection module, improves the integration level and the utilization rate of the equipment, can reduce the carrying steps and the repeated alignment steps, further improves the detection efficiency, and can further reduce the occupied space of the equipment.
3. The invention also sets the quantity ratio of the single detection module and the composite detection module according to the detection time, the detection time ratio and the quantity ratio are in positive correlation, and the corresponding detection method flow can be matched, thereby further improving the detection efficiency and shortening the beat time.
4. The automatic optical detection equipment provided by the invention is convenient to use, operate and maintain, attractive in appearance, stable and reliable in operation of the whole machine, capable of classifying multi-level products, simple in structure, low in cost, wide in application range and excellent in after-sale service, and meets the requirements of most customers.
Drawings
In order to more clearly illustrate the technical solutions in the specific embodiments of the present invention, the drawings needed to be used in the description of the embodiments will be briefly introduced below, and it is obvious that the drawings described below are only some embodiments of the present invention, and it is obvious for those skilled in the art that other drawings can be obtained according to these drawings without inventive efforts.
FIG. 1 is a schematic structural view of an automatic optical inspection apparatus in embodiment 1 of the present invention.
Fig. 2 is a schematic view of the layout structure of the automatic optical inspection apparatus in embodiment 1 of the present invention.
Fig. 3 is a schematic flow chart of an optical detection method in embodiment 2 of the present invention.
Fig. 4 is a schematic view of the layout structure of the automatic optical inspection apparatus in embodiment 3 of the present invention.
Fig. 5 is a schematic view of the layout structure of the automatic optical inspection apparatus in embodiment 4 of the present invention.
Reference numerals: 1-a frame; 10-loading level; 11-a discharge position; 12-a transfer platform; 2-a first detection module; 3-a second detection module; 31-detection module A; 32-detection module B; 41-a feeding manipulator; 42-a blanking manipulator; 41' -a feeding linear module; 42' -blanking straight line module.
Detailed Description
The technical solutions in the specific embodiments of the present invention will be clearly and completely described below, and it should be understood that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
It should be noted that, in order to describe the technical solution more specifically, the steps described in this embodiment do not strictly correspond to the steps described in the summary of the invention.
Example 1
The embodiment provides an automatic optical detection device, as shown in fig. 1 and 2, which includes a rack 1, wherein the rack 1 is provided with a first detection module 2, two second detection modules 3 and a carrying mechanism. In other embodiments, the ratio of the number of the first detecting module 2 to the number of the second detecting module 3 is determined by the ratio of the detecting time of the first detecting module 2 to the detecting time of the second detecting module 3, and may also be 1: 3, etc. And even if the number ratio is 1: 2, the specific number of the first detecting module 2 and the second detecting module 3 can also be adjusted, which is not described herein.
The first detection module 2 is a single detection module, and a set of first alignment modules is used to perform a detection of an optical detection item. In this embodiment, the Gamma detection module is used for Gamma detection. In other embodiments, other detection modules are also possible. The Gamma detection module comprises a first alignment module and a first detection mechanism, the first alignment module comprises an XY theta three-axis moving platform, a crimping terminal and a CCD alignment module, the first detection structure comprises a Gamma camera and a Z-direction cylinder, and the Z-direction cylinder is used for driving the Gamma camera to move; the first aligning module aligns the product and detects the product through a Gamma camera.
The second detection module 3 is a composite detection module, and a set of second positioning modules is adopted to detect two optical detection items. In other embodiments, the composite detection module can also perform detection of three or more optical detection items. In this embodiment, compound detection module is AOI & Demura detection module, for AOI detection module and the integrated compound detection module of Demura detection module, the sharing is one set the second counterpoint module carries out AOI detection and Demura detection. The ratio of the detection time of the first detection module 2 to the detection time of the second detection module 3 is equal to 1: 2. the second alignment module comprises an XY theta three-axis moving platform, a crimping terminal, a CCD alignment module and a laser ranging module, and the second detection mechanism comprises an AOI camera, a Z-axis linear rail and a filter wheel; the AOI camera moves on the Z-axis rail, and the filter wheel is positioned below the AOI camera; and the second alignment module aligns the product and performs laser ranging, and Demura detection and AOI detection are performed through an AOI camera. Typically, Demura repair is performed before AOI inspection, and the filter wheel is used for AOI inspection and not for Demura repair.
The first detection module 2 and the two second detection modules 3 are arranged side by side. The rack 1 is also provided with a loading position 10 and a unloading position 11, the conveying mechanism conveys a product to be detected to the first detection module 2 or the second detection module 3 from the loading position 10, and conveys the product to be detected to the unloading position 11 from the first detection module 2 or the second detection module 3. In this embodiment, the detection of the first detection module 2 and the detection of the second detection module 3 are optionally performed first, so that the conveying mechanism conveys the product to be monitored from the loading position 10 to the first detection module 2 and then from the second detection module 3 to the unloading position 11. A feeding tray disc is arranged on the feeding position 10, and a discharging tray disc is arranged on the discharging position 11.
The carrying mechanism comprises a first picking and placing mechanism and a second picking and placing mechanism, the first picking and placing mechanism is a feeding manipulator 41 arranged corresponding to the first detection module 2, and the second picking and placing mechanism is a discharging manipulator 42 arranged corresponding to the second detection module 3. Specifically, the feeding manipulator 41 and the discharging manipulator 42 in this embodiment are both six-axis manipulators, and mainly use four degrees of freedom to carry products. The feeding manipulator 41 conveys the product from the feeding position 10 to the first detection module 2 for detection, and the product is taken down from the first detection module 2 after detection is finished; the feeding manipulator 42 conveys the product to the second detection module 3 for detection, and conveys the product from the second detection module 3 to the feeding position 11 after detection.
The rack 1 is further provided with a transfer platform 12, namely a transfer buffer platform, wherein the transfer platform 12 is arranged between the feeding manipulator 41 and the discharging manipulator 42. The feeding manipulator 41 takes the product off the first detection module 2 and then transports the product to the transfer platform 12, and the discharging manipulator 42 transports the product from the transfer platform 12 to the second detection module 3.
Example 2
The present embodiment provides an optical detection method, as shown in fig. 3 (fig. 3 is only a simple example of a detection process), which uses the automatic optical detection apparatus in embodiment 1 to perform detection, and the second detection module 3 including the detection module a 31 and the detection module B32 includes the following steps:
step 1: the feeding manipulator 41 conveys a first product to be detected in the feeding tray to a first station corresponding to the Gamma detection module to complete feeding; product alignment CCD correction is carried out on the product, the product is put into a compression joint jig to be lighted up, and then screen alignment CCD correction is carried out; the product enters a Gamma detection position to carry out Gamma detection; after the detection is completed, the product is transported to the relay platform 12 by the loading robot 41. The product is conveyed to a second station corresponding to the detection module A31 from the transfer platform 12 by the blanking manipulator 42, and the feeding is finished; product alignment CCD correction is carried out on the product, the product is put into a compression joint jig to be lighted up, then screen alignment CCD correction is carried out, and then laser ranging is carried out; the product enters an AOI and Demura detection position and is subjected to Demura detection and AOI detection through an AOI camera; after the detection is finished, the product is conveyed to a discharging tray by the discharging manipulator 42.
Step 2: the feeding manipulator 41 conveys a second product to be detected in the feeding tray to a first station corresponding to the Gamma detection module, so that feeding is completed; correcting the product alignment CCD, lighting up the pressing jig, and correcting the screen alignment CCD; the product enters a Gamma detection position to carry out Gamma detection; after the detection is completed, the product is transported to the relay platform 12 by the loading robot 41. The product is conveyed from the transfer platform 12 to a third station corresponding to the detection module B32 by the blanking manipulator 42, and feeding is completed; product alignment CCD correction is carried out on the product, the product is put into a compression joint jig to be lighted up, then screen alignment CCD correction is carried out, and then laser ranging is carried out; the product enters an AOI & Demura detection position and is subjected to Demura detection and AOI detection through an AOI camera; after the detection is finished, the product is conveyed to a discharging tray by the discharging manipulator 42.
After the first product is conveyed to the detection module A31 by the blanking manipulator 42, the second product is directly conveyed to the Gamma detection module from the feeding tray by the feeding manipulator 41, namely, the steps 1 and 2 are partially crossed; and (3) repeating the step 1 and the step 2. The product to be detected in the embodiment is a VR (virtual reality) spectacle lens or an AR (augmented reality) spectacle lens, and the lens screen can emit light and also has images similar to a mobile phone screen.
After the Gamma detection is completed on the first product, such as the VR spectacle lens or the AR spectacle lens, the first product can enter a second station corresponding to the detection module A31 to continue the Demura detection and the AOI detection. At this time, the Gamma detection module continues to perform Gamma detection on the second product, and after detection, because the detection time required by the AOI & Demura detection is about twice of the time required by the Gamma detection, the detection module A31 still performs detection on the first product, so that the second product which completes the Gamma detection enters a third station corresponding to the detection module B32 to continue to perform the Demura detection and the AOI detection. The layout of the detection module is utilized, so that the beat time can be reduced, and the detection efficiency can be improved.
Similarly, after the third product finishes Gamma detection, the first product finishes AOI & Demura detection, and the third product can enter the second station to continue AOI & Demura detection. At a certain moment, three stations can be in the state of simultaneous operation, detect the proportion of module and AOI & Demura through design Gamma, improve detection efficiency. Through detecting AOI and Demura and detecting integrated as a compound detection module and AOI & Demura detect, can share counterpoint module to reduce equipment occupation space, reduce handling, improve detection efficiency.
Example 3
The optical detection method applicable to the automatic optical detection device in embodiment 3 is similar to that in embodiment 2, the two first detection modules 2 perform Gamma detection on the product, and after the detection is completed, the product enters the four second detection modules 3 to perform AOI & Demura detection on the product, so that compared with embodiment 1, the detection efficiency in embodiment 2 is further improved. Gamma detection can be simultaneously carried out on two products by utilizing the two first detection modules 2, and AOI & Demura detection can be simultaneously carried out on four products by utilizing the four second detection modules 3.
Example 4
Embodiment 4 provides an automatic optical inspection apparatus, as shown in fig. 5, which is different from embodiment 1 in that: the feeding manipulator 41 and the discharging manipulator 42 adopted by the conveying mechanism are changed into linear modules from six-axis manipulators, namely a feeding linear module 41 'and a discharging linear module 42'. Specifically, four-axis linear modules are spliced to form a conveying mechanism with four degrees of freedom, and XYZ theta movement can be achieved. The scheme of four-axis straight line module is applicable to the detection that detection precision requires higher products such as VR glasses lens or AR glasses lens specially.
The above description of the embodiments is only intended to facilitate the understanding of the method and the core idea of the present invention. It should be noted that, for those skilled in the art, it is possible to make various improvements and modifications to the present invention without departing from the principle of the present invention, and those improvements and modifications also fall within the scope of the claims of the present invention.
Claims (10)
1. The automatic optical detection equipment is characterized by comprising a rack (1), wherein a first detection module (2), a second detection module (3) and a carrying mechanism are arranged on the rack (1); the first detection module (2) is a single detection module, and a set of first alignment modules are adopted to detect an optical detection item; the second detection module (3) is a composite detection module, and a set of second alignment modules are adopted to detect various optical detection items; the number ratio of the first detection module (2) to the second detection module (3) is positively correlated with the detection time ratio; still be equipped with material loading position (10) and unloading position (11) on frame (1), transport mechanism will wait to detect the product and follow material loading position (10) transport extremely first detection module (2) or second detect module (3), follow first detection module (2) or second detect module (3) transport extremely unloading position (11).
2. The automatic optical inspection device of claim 1, wherein the second inspection module (3) is a composite inspection module integrated with two inspection modules, and a set of the second alignment module is used for inspecting two optical inspection items; the number ratio of the first detection module (2) to the second detection module (3) is 1: 2.
3. the automated optical inspection apparatus of claim 2, wherein the first inspection module (2) is a Gamma inspection module, the second inspection module (3) is an AOI & Demura inspection module, and the AOI & Demura inspection module is a composite inspection module integrating the AOI inspection module and the Demura inspection module.
4. The automatic optical inspection apparatus of claim 3, wherein the Gamma inspection module comprises the first alignment module and a first inspection mechanism, the first alignment module comprises an XY θ three-axis moving platform, a press-contact terminal and a CCD alignment module, the first inspection mechanism comprises a Gamma camera and a Z-direction cylinder, and the Z-direction cylinder is used for driving the Gamma camera to move; the first aligning module aligns the product and detects the product through a Gamma camera.
5. The automatic optical inspection device of claim 3, wherein the AOI & Demura inspection module comprises a second alignment module and a second inspection mechanism, the second alignment module comprises an XY θ three-axis moving platform, a crimping terminal, a CCD alignment module and a laser ranging module, and the second inspection mechanism comprises an AOI camera, a Z-axis linear rail and a filter wheel; the AOI camera moves on the Z-axis rail, and the filter wheel is positioned below the AOI camera; and the second alignment module aligns the product and measures distance by laser, and performs Demura detection and AOI detection by an AOI camera.
6. An automatic optical inspection apparatus according to claim 1, characterized in that said handling means comprise a first pick and place mechanism and a second pick and place mechanism, said first pick and place mechanism being arranged in correspondence with said first inspection module (2) and said second pick and place mechanism being arranged in correspondence with said second inspection module (3); the first pick-and-place mechanism conveys the product from the loading position (10) to the first detection module (2) for detection, and the product is taken down from the first detection module (2) after detection is finished; and the second pick-and-place mechanism conveys the product to the second detection module (3) for detection, and conveys the product from the second detection module (3) to the blanking position (11) after detection.
7. The automated optical inspection apparatus of claim 1 or 6, wherein the handling mechanism is a six-axis robot or a four-axis linear module.
8. An automatic optical inspection device according to claim 6, characterized in that a transfer platform (12) is further disposed on the machine frame (1), the transfer platform (12) is disposed between the first pick-and-place mechanism and the second pick-and-place mechanism; the first picking and placing mechanism takes the products off the first detection module (2) and then carries the products to the transfer platform (12), and then the second picking and placing mechanism carries the products from the transfer platform (12) to the second detection module (3).
9. An optical inspection method, characterized in that the automatic optical inspection apparatus of any one of the preceding claims 1 to 8 is used, wherein the number ratio of the first inspection module (2) and the second inspection module (3) is 1: 2, the second detection module (3) comprises a detection module A (31) and a detection module B (32); the method comprises the following steps:
s1: the product to be detected is conveyed to the first detection module (2) from the material loading position (10) by the conveying mechanism for alignment and detection; after the detection is finished, the product is conveyed to the detection module A (31) by the conveying mechanism to be aligned and detected; after the detection is finished, the product is conveyed to the blanking position (11) from the detection module A (31) by the conveying mechanism;
s2: the product to be detected is conveyed to the first detection module (2) from the material loading position (10) by the conveying mechanism for alignment and detection; after the detection is finished, the product is conveyed to the detection module B (32) by the conveying mechanism to be aligned and detected; after the detection is finished, the product is conveyed to the blanking position (11) from the detection module B (32) by the conveying mechanism;
after the product is conveyed to the second detection module (3) by the conveying mechanism, another step of conveying the product from the loading position (10) to the first detection module (2) by the conveying mechanism is directly carried out, namely S1 and S2 are partially crossed; s1 and S2 are repeated.
10. The optical inspection method according to claim 9, wherein the employed optical inspection apparatus further comprises a transfer platform (12), and when the product to be inspected is inspected on the first inspection module (2), the conveying mechanism conveys the product from the first inspection module (2) to the transfer platform (12), and then the conveying mechanism conveys the product from the transfer platform (12) to the second inspection module (3) for alignment and inspection.
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