CN114415482A - A writing method and device for a super-resolution laser direct writing system based on a galvanometer - Google Patents

Abstract

The invention discloses a writing method and a device of a super-resolution laser direct writing system based on a galvanometer, wherein the method comprises the following steps: acquiring data to be inscribed and a single scanning range of a super-resolution laser direct writing system based on a galvanometer; dividing the data to be inscribed into a plurality of sub-data according to the single scanning range; rotating the subdata according to a global coordinate system to obtain rotating data; acquiring the X polarity and the Y polarity of the galvanometer; according to the X polarity and the Y polarity, the rotation data are overturned to obtain overturning data; fitting the splicing coincidence region between the turning data to obtain the writing data; and according to the writing data, writing by using a super-resolution laser direct writing system based on a galvanometer. The method solves the problems of angular deviation between the galvanometer and a global coordinate system, inconsistency between the X/Y axial direction of the galvanometer and the global coordinate axial direction and inconsistency between splicing and inscribing uniformity.

Description

A writing method and device for a super-resolution laser direct writing system based on a galvanometer

technical field

The present application relates to the technical field of laser direct writing lithography, and in particular, to a writing method and device for a super-resolution laser direct writing system based on a galvanometer.

Background technique

Laser direct writing technology is an ultra-precision processing technology that has been widely used in recent years. It is a maskless lithography technology that realizes direct writing by means of lasers. By scanning a laser beam on a substrate with a photosensitive coating, the information of the pattern is directly generated, without the preparation of a mask plate, and the process of pattern transfer and overlay is omitted, which improves the production efficiency and accuracy. During scanning, the lithographic substrate moves with the stage.

In the process of realizing the present invention, the inventor found that there are at least the following problems in the prior art:

At present, the processing requirements of nano-scale structures in the sensing field are gradually changing from two-dimensional structures to three-dimensional structures, from simple materials to complex materials, and from simple structures to complex large-area structures. Among them, the commonly used technical solution for large-area structure writing is to use a galvanometer or a multi-faceted rotating prism to drive the beam to perform raster scanning step-by-step movement to achieve single-frame or small-scale writing, and then use a linear motor to achieve large-area splicing. However, due to factors such as angular deviation between the galvanometer and the global coordinate system, direction reversal, and frame-to-frame splicing, it is often difficult for this method to maintain accuracy when writing large areas, which reduces the accuracy of the method for preparing devices and researching materials. , uniformity and success rate.

SUMMARY OF THE INVENTION

The purpose of the embodiments of the present application is to provide a writing method and device for a super-resolution laser direct writing system based on a galvanometer, so as to solve the technical problems of low accuracy, uniformity and low success rate of large-area writing in the related art.

According to a first aspect of the embodiments of the present application, there is provided a method for writing a super-resolution laser direct writing system based on a galvanometer, comprising:

Obtain the data to be written and the single scan range of the galvanometer-based super-resolution laser direct writing system;

According to the single scan range, the data to be written is divided into several sub-data;

According to the global coordinate system, the sub-data is rotated to obtain rotation data;

Get the X polarity and Y polarity of the galvanometer;

According to the X polarity and the Y polarity, the rotation data is flipped to obtain flipped data;

Fitting the splicing overlapped regions between the flipping data to obtain writing data;

According to the writing data, writing is performed using a galvanometer-based super-resolution laser direct writing system.

Further, the size of the sub-data is smaller than the single scan range.

Further, according to the global coordinate system, the sub-data is rotated to obtain rotation data, including:

Calculate the angle between the scanning direction of the galvanometer and the global coordinate system;

According to the included angle, the sub-data is rotated to obtain rotation data.

Further, the absolute value of the included angle is less than 90°.

Further, according to the X polarity and the Y polarity, the rotation data is flipped, including:

If the X polarity is 1, the rotation data is flipped left and right;

If the Y polarity is 1, the rotation data is flipped up and down.

Further, fitting the splicing and overlapping areas between the flipping data to obtain the writing data, including:

Calculate the position information of the overlapping area between any two adjacent flipped data, and obtain all the coordinate information of the overlapping area;

According to the global coordinate system, coordinate transformation is performed on the coordinate information to obtain writing data.

Further, the writing sequence when writing using the galvanometer-based super-resolution laser direct writing system includes X bidirectional, Y bidirectional, X serpentine, Y serpentine, X circle and Y circle.

According to a second aspect of the embodiments of the present application, a writing device of a galvanometer-based super-resolution laser direct writing system is provided, including:

The first acquisition module is used to acquire the data to be written and the single scanning range of the galvanometer-based super-resolution laser direct writing system;

a segmentation module, for dividing the data to be written into several sub-data according to the single scan range;

a rotation module for rotating the sub-data according to the global coordinate system to obtain rotation data;

The second acquisition module is used to acquire the X polarity and Y polarity of the galvanometer;

a flipping module for flipping the rotation data according to the X polarity and the Y polarity to obtain flipped data;

a fitting module, used for fitting the splicing overlapped regions between the flipping data to obtain writing data;

The writing module is used for writing using the super-resolution laser direct writing system based on the galvanometer according to the writing data.

According to a third aspect of the embodiments of the present application, an electronic device is provided, including:

one or more processors;

memory for storing one or more programs;

The one or more programs, when executed by the one or more processors, cause the one or more processors to implement the method as described in the first aspect.

According to a fourth aspect of the embodiments of the present application, there is provided a computer-readable storage medium storing computer instructions thereon, and when the instructions are executed by a processor, the steps of the method described in the first aspect are implemented.

The technical solutions provided by the embodiments of the present application may include the following beneficial effects:

It can be seen from the above embodiment that the application integrates the angular deviation between the galvanometer and the global coordinate system by rotating the sub-data; The problem of inconsistency between the /Y axis and the global coordinate axis makes the axis of the galvanometer not need to follow a certain direction during the installation of the system. The X/Y direction has good uniformity, which effectively improves the writing quality and writing success rate of the large-area splicing and writing of the sample.

It is to be understood that both the foregoing general description and the following detailed description are exemplary and explanatory only and are not limiting of the present application.

Description of drawings

The accompanying drawings, which are incorporated in and constitute a part of this specification, illustrate embodiments consistent with the application and together with the description serve to explain the principles of the application.

FIG. 1 is a flow chart of a writing method of a galvanometer-based super-resolution laser direct writing system according to an exemplary embodiment.

FIG. 2 is a flowchart of step S13 according to an exemplary embodiment.

FIG. 3 is a schematic diagram of step S13 according to an exemplary embodiment.

FIG. 4 is a flowchart of step S15 according to an exemplary embodiment.

FIG. 5 is a schematic diagram of step S15 according to an exemplary embodiment.

FIG. 6 is a flowchart of step S16 according to an exemplary embodiment.

FIG. 7 is a schematic diagram illustrating a writing sequence according to an exemplary embodiment.

FIG. 8 is a comparison diagram of writing sample a and writing sample b according to an exemplary embodiment.

Fig. 9 is a block diagram of a writing device of a galvanometer-based super-resolution laser direct writing system according to an exemplary embodiment.

Fig. 10 is a schematic diagram of an electronic device according to an exemplary embodiment.

Detailed ways

Exemplary embodiments will be described in detail herein, examples of which are illustrated in the accompanying drawings. Where the following description refers to the drawings, the same numerals in different drawings refer to the same or similar elements unless otherwise indicated. The implementations described in the illustrative examples below are not intended to represent all implementations consistent with this application. Rather, they are merely examples of apparatus and methods consistent with some aspects of the present application as recited in the appended claims.

The terminology used in this application is for the purpose of describing particular embodiments only and is not intended to limit the application. As used in this application and the appended claims, the singular forms "a," "the," and "the" are intended to include the plural forms as well, unless the context clearly dictates otherwise. It will also be understood that the term "and/or" as used herein refers to and includes any and all possible combinations of one or more of the associated listed items.

It should be understood that although the terms first, second, third, etc. may be used in this application to describe various information, such information should not be limited by these terms. These terms are only used to distinguish the same type of information from each other. For example, the first information may also be referred to as the second information, and similarly, the second information may also be referred to as the first information without departing from the scope of the present application. Depending on the context, the word "if" as used herein can be interpreted as "at the time of" or "when" or "in response to determining."

Glossary:

X polarity of the galvanometer: Whether the X direction of the galvanometer scan is opposite to the X direction of the global coordinate system, if it is opposite, the X polarity is 1, otherwise the X polarity is 0.

Y polarity of the galvanometer: Whether the Y direction of the galvanometer scan is opposite to the Y direction of the global coordinate system, if it is the opposite, the Y polarity is 1, otherwise the Y polarity is 0.

FIG. 1 is a flowchart of a writing method of a galvanometer-based super-resolution laser direct writing system according to an exemplary embodiment. As shown in FIG. 1 , the method is applied to a galvanometer-based super-resolution laser direct writing system , can include the following steps:

Step S11: obtaining the data to be written and the single scanning range of the galvanometer-based super-resolution laser direct writing system;

Step S12: according to the single scanning range, the data to be written is divided into several sub-data;

Step S13: according to the global coordinate system, rotate the sub-data to obtain rotation data;

Step S14: obtaining the X polarity and Y polarity of the galvanometer;

Step S15: according to the X polarity and the Y polarity, flip the rotation data to obtain flip data;

Step S16: Fitting the splicing overlapped regions between the flipping data to obtain writing data;

Step S17: According to the writing data, use a galvanometer-based super-resolution laser direct writing system to perform writing.

It can be seen from the above embodiment that the application integrates the angular deviation between the galvanometer and the global coordinate system by rotating the sub-data; The problem of inconsistency between the /Y axis and the global coordinate axis makes the axis of the galvanometer not need to follow a certain direction during the installation of the system. The X/Y direction has good uniformity, which effectively improves the writing quality and writing success rate of the large-area splicing and writing of the sample.

Specifically, the galvanometer-based super-resolution laser direct writing system may be an existing system or a system obtained by transforming an existing system. In one embodiment, the galvanometer-based super-resolution laser direct writing system The resolution laser direct writing system includes femtosecond laser, scanning galvanometer, high-precision piezoelectric stage, microscope, acousto-optic modulator, and NI board and other devices.

In the specific implementation of step S11, the data to be written and the single scanning range of the galvanometer-based super-resolution laser direct writing system are obtained;

Specifically, the file format of the data to be written may be STL, PNG, GDSII, JPEG and other types, grayscale or color images.

In an embodiment, the single scanning range is 60 um*60 um. It should be noted that the scanning range here depends on the scanning range of the actual system, and the above is only an example, not limited to this range.

In the specific implementation of step S12, according to the single scanning range, the data to be written is divided into several sub-data;

Specifically, the size of the sub-data is smaller than the single scan range.

In one embodiment, the data to be written can be a common image file, such as JPEG format or PNG format, the image pixel size is 1000*1000, and the writing graphic is a two-dimensional raster, which is divided into two sub-data of 50um*50um. . It should be noted that the above only gives an example of the file to be written, and the specific format and size of the file to be written can be set according to the actual situation, and the setting is a conventional means in the field.

In the specific implementation of step S13, according to the global coordinate system, the sub-data is rotated to obtain rotation data;

Specifically, as shown in Figure 2, this step may include the following sub-steps:

Step S21: calculating the angle between the scanning direction of the galvanometer and the global coordinate system;

Specifically, the galvanometer scans a straight line along the X or Y direction, and measures the angle between the straight line and the X direction or the Y direction of the global coordinate system.

Step S22: according to the included angle, rotate the sub-data to obtain rotation data;

Specifically, the sub-data is rotated by the following formula:

Wherein, x and y are the two-dimensional coordinates of the coordinate point of the sub-data in the global coordinate system, x', y' are the two-dimensional coordinates of the sub-data in the global coordinate system after rotation, and θ is the angle.

Specifically, the absolute value of the included angle | θ |<90°. Because the motion devices used in this system not only include galvanometers, but also other motion stages. The purpose of unifying these motion devices in a reference coordinate system is to reduce the design difficulty of the algorithm during writing. At the same time, this design does not need to strictly correct the consistency of the axial direction of each device during the installation of the system, but only needs to ensure that these devices follow the same reference coordinate system.

In one embodiment, as shown in FIG. 3 , the angle θ between the X direction scanned by the galvanometer and the X direction of the global coordinate system is calculated, and the two sub-data are rotated clockwise by θ to obtain two rotation data.

In the specific implementation of step S14, the X polarity and the Y polarity of the galvanometer are obtained;

Specifically, on the right side of the specified position, use the galvanometer to scan a straight line along the X positive direction of the global coordinate system, and observe whether the straight line is actually on the right side of the position. The X polarity is 0 if the actual result matches the expected result, and 1 otherwise. Below the specified position, use the galvanometer to scan a straight line along the Y positive direction of the global coordinate system, and observe whether the straight line is actually below the position. The Y polarity is 0 if the actual result matches the expected result, and 1 otherwise. After obtaining the polarities of the X-axis and Y-axis of the galvanometer, in the process of writing the structure, the structure can be written in the specified position according to the actual needs.

In the specific implementation of step S15, according to the X polarity and the Y polarity, the rotation data is flipped to obtain flipped data;

Specifically, as shown in Figure 4, this step may include the following sub-steps:

Step S31: if the X polarity is 1, then flip the rotation data left and right;

Specifically, if the X polarity of the galvanometer is 1, that is, the X direction scanned by the galvanometer is opposite to the X direction of the global coordinate system, the matrix of the rotation data is flipped left and right.

Step S32: If the Y polarity is 1, the rotation data is flipped up and down.

Specifically, if the Y polarity of the galvanometer is 1, that is, the Y direction scanned by the galvanometer is opposite to the Y direction of the global coordinate system, the matrix of the rotation data is flipped up and down.

In one embodiment, as shown in Figure 5, the X direction of the galvanometer scan is opposite to the X direction of the global coordinate system, and the Y direction of the galvanometer scan is not opposite to the Y direction of the global coordinate system, then the data matrix of the rotation data will be rotated. Flip left and right to get the correct engraving result.

In the specific implementation of step S16, fitting the splicing overlapping area between the flipping data to obtain writing data;

Specifically, as shown in Figure 6, this step may include the following sub-steps:

Step S41: Calculate the position information of the overlapping area between any two adjacent flipping data, and obtain all the coordinate information of the overlapping area;

Specifically, the overlapping area is an area where any two adjacent areas overlap at the splicing point, and all coordinate information of the overlapping area can be obtained according to the coordinate calculation method in the preceding steps. Because of the overlapping area, the laser will scan multiple times, and reducing the laser energy in the overlapping area can make the energy of the overlapping area and the energy of the non-overlapping area uniform.

Step S42: According to the global coordinate system, coordinate transformation is performed on the coordinate information to obtain inscribed data;

Specifically, according to the coordinate conversion formula in step S22, the coordinate information of the overlapping area is converted into coordinate data in the global coordinate system.

In the specific implementation of step S17, according to the writing data, use a galvanometer-based super-resolution laser direct writing system to write;

Specifically, as shown in FIG. 7 , the writing sequence during writing may include X bidirectional in FIG. 7( a ), Y bidirectional in FIG. 7( b ), and X in FIG. 7( c ) The serpentine shape, the Y serpentine shape in the figure (d) of FIG. 7 , the X circle in the figure (e) of FIG. 7 , and the Y circle in the figure (f) of FIG. 7 . It should be noted that only six examples of writing sequences are given above, and the specifically used writing sequences can be set by themselves according to the actual situation, and the setting is a conventional means in the field.

In this embodiment, the laser light source of the laser direct writing system is a light source with a wavelength of 780 nm; the parameters for writing the sample are the pulse width of 140 fs, the repetition frequency of 80 MHz, and the writing speed of 200 um/s; the sample carrying substrate is a glass substrate; the photoresist is liquid photoresist.

In the present embodiment, the unprocessed to-be-written file is imported into a galvanometer-based super-resolution laser direct writing system, the galvanometer is used to drive the raster scanning step-by-step writing mode, the writing parameters are selected, the writing is started, and the writing sample a is obtained; Then import the writing data processed by this method into the dual-channel laser direct writing system, use the galvanometer to drive the raster scanning step-by-step writing mode, select the writing parameters, start writing, and obtain sample b; Figure 8 (a) It is a schematic diagram of writing sample a. Figure (b) in Figure 8 is a schematic diagram of writing sample b. The boxed areas in the figure are the splices of writing. It can be seen from Figure 8 that this method can solve the problem of the scanning direction of the galvanometer and the overall situation. The difference in writing effect between the scanning direction and the stepping direction caused by the angular deviation of the coordinate system, the reversal of the direction, and the splicing between frames, etc., can improve the overall uniformity of the laser direct writing system galvanometer scanning step-by-step large-area writing sex. Through the invention, the writing quality and the writing success rate of the large-area splicing and writing of the sample are effectively improved.

Corresponding to the foregoing embodiments of the writing method of the galvanometer-based super-resolution laser direct writing system, the present application also provides an embodiment of the writing device of the galvanometer-based super-resolution laser direct writing system.

Fig. 9 is a block diagram of a writing device of a galvanometer-based super-resolution laser direct writing system according to an exemplary embodiment. 9, the apparatus may include:

The first acquisition module 21 is used to acquire the data to be written and the single scanning range of the galvanometer-based super-resolution laser direct writing system;

A dividing module 22, for dividing the data to be written into several sub-data according to the single scanning range;

The rotation module 23 is used to rotate the sub-data according to the global coordinate system to obtain rotation data;

The second acquisition module 24 is used to acquire the X polarity and the Y polarity of the galvanometer;

a flipping module 25 for flipping the converted data according to the X polarity and the Y polarity to obtain flipped data;

The fitting module 26 is used for fitting the splicing overlapping area between the flipping data to obtain the writing data;

The writing module 27 is used for writing according to the writing data using a galvanometer-based super-resolution laser direct writing system.

Regarding the apparatus in the above-mentioned embodiment, the specific manner in which each module performs the operation has been described in detail in the embodiment of the method, and will not be described in detail here.

For the apparatus embodiments, since they basically correspond to the method embodiments, reference may be made to the partial descriptions of the method embodiments for related parts. The device embodiments described above are only illustrative, wherein the units described as separate components may or may not be physically separated, and the components displayed as units may or may not be physical units, that is, they may be located in One place, or it can be distributed over multiple network elements. Some or all of the modules can be selected according to actual needs to achieve the purpose of the solution of the present application. Those of ordinary skill in the art can understand and implement it without creative effort.

Correspondingly, the present application also provides an electronic device, comprising: one or more processors; a memory for storing one or more programs; when the one or more programs are executed by the one or more processors , so that the one or more processors implement the above-mentioned writing method of the galvanometer-based super-resolution laser direct writing system. As shown in FIG. 10 , it is a hardware structure diagram of any device with data processing capability where the writing method of a galvanometer-based super-resolution laser direct writing system provided by an embodiment of the present invention is located, except for the processing shown in FIG. 10 . In addition to the device, memory, and network interface, any device with data processing capability where the apparatus in the embodiment is located may also include other hardware according to the actual function of any device with data processing capability, which will not be repeated here.

Correspondingly, the present application also provides a computer-readable storage medium on which computer instructions are stored, characterized in that, when the instructions are executed by the processor, the writing method of the above-mentioned galvanometer-based super-resolution laser direct writing system is realized. . The computer-readable storage medium may be an internal storage unit of any device with data processing capability described in any of the foregoing embodiments, such as a hard disk or a memory. The computer-readable storage medium may also be an external storage device of the wind turbine, such as a plug-in hard disk, a smart memory card (Smart Media Card, SMC), an SD card, and a flash memory card (Flash Card) equipped on the device. Wait. Further, the computer-readable storage medium may also include both an internal storage unit of any device with data processing capability and an external storage device. The computer-readable storage medium is used to store the computer program and other programs and data required by the device with data processing capability, and can also be used to temporarily store data that has been output or will be output.

Other embodiments of the present application will readily occur to those skilled in the art upon consideration of the specification and practice of what is disclosed herein. This application is intended to cover any variations, uses or adaptations of this application that follow the general principles of this application and include common knowledge or conventional techniques in the technical field not disclosed in this application . The specification and examples are to be regarded as exemplary only, with the true scope and spirit of the application being indicated by the claims.

It is to be understood that the present application is not limited to the precise structures described above and shown in the accompanying drawings and that various modifications and changes may be made without departing from the scope thereof. The scope of the application is limited only by the appended claims.

Claims (10)

1. A writing method of a super-resolution laser direct writing system based on a galvanometer is characterized by comprising the following steps:

acquiring data to be inscribed and a single scanning range of a super-resolution laser direct writing system based on a galvanometer;

dividing the data to be inscribed into a plurality of sub-data according to the single scanning range;

rotating the subdata according to a global coordinate system to obtain rotating data;

acquiring the X polarity and the Y polarity of the galvanometer;

according to the X polarity and the Y polarity, the rotation data are overturned to obtain overturning data;

fitting the splicing coincidence region between the turning data to obtain the writing data;

and according to the writing data, writing by using a super-resolution laser direct writing system based on a galvanometer.

2. The method of claim 1, wherein the sub-data is each smaller in size than the single scan range.

3. The method of claim 1, wherein rotating the sub-data according to a global coordinate system to obtain rotated data comprises:

calculating an included angle between the scanning direction of the galvanometer and the global coordinate system;

and rotating the subdata according to the included angle to obtain rotating data.

4. A method according to claim 3, wherein the absolute value of the included angle is less than 90 °.

5. The method of claim 1, wherein flipping the rotation data according to the X-polarity and Y-polarity comprises:

if the X polarity is 1, turning the rotation data left and right;

and if the Y polarity is 1, turning the rotation data up and down.

6. The method of claim 1, wherein fitting the splice overlap region between the flipped data to obtain writing data comprises:

calculating the position information of a coincidence region between any two adjacent turning data to obtain all coordinate information of the coincidence region;

and according to the global coordinate system, carrying out coordinate conversion on the coordinate information to obtain the writing data.

7. The method of claim 1, wherein the writing sequence for writing with the galvanometer-based super-resolution laser direct writing system comprises X bi-directional, Y bi-directional, X serpentine, Y serpentine, X circumference and Y circumference.

8. The utility model provides a super-resolution laser direct writing system's device of carving write which is characterized in that based on galvanometer includes:

the first acquisition module is used for acquiring data to be inscribed and a single scanning range of the super-resolution laser direct writing system based on the galvanometer;

the dividing module is used for dividing the data to be inscribed into a plurality of sub-data according to the single scanning range;

the rotation module is used for rotating the subdata according to a global coordinate system to obtain rotation data;

the second acquisition module is used for acquiring the X polarity and the Y polarity of the galvanometer;

the overturning module is used for overturning the rotating data according to the X polarity and the Y polarity to obtain overturning data;

the fitting module is used for fitting the splicing superposition area between the turning data to obtain inscribing data;

and the writing module is used for writing by utilizing a super-resolution laser direct writing system based on a galvanometer according to the writing data.

9. An electronic device, comprising:

one or more processors;

a memory for storing one or more programs;

when executed by the one or more processors, cause the one or more processors to implement the method of any one of claims 1-7.

10. A computer-readable storage medium having stored thereon computer instructions, which when executed by a processor, perform the steps of the method according to any one of claims 1-7.

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