CN114411102A - High-quality alloy target material preparation device and process thereof - Google Patents

High-quality alloy target material preparation device and process thereof Download PDF

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Publication number
CN114411102A
CN114411102A CN202111541722.4A CN202111541722A CN114411102A CN 114411102 A CN114411102 A CN 114411102A CN 202111541722 A CN202111541722 A CN 202111541722A CN 114411102 A CN114411102 A CN 114411102A
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China
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sliding
rod
welded
cylinder
box body
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CN202111541722.4A
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Chinese (zh)
Inventor
吴丽君
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Zhangzhou Heqi Target Technology Co ltd
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Zhangzhou Heqi Target Technology Co ltd
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Priority to CN202111541722.4A priority Critical patent/CN114411102A/en
Publication of CN114411102A publication Critical patent/CN114411102A/en
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    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34Sputtering
    • C23C14/3407Cathode assembly for sputtering apparatus, e.g. Target
    • C23C14/3414Metallurgical or chemical aspects of target preparation, e.g. casting, powder metallurgy
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B22CASTING; POWDER METALLURGY
    • B22FWORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F9/00Making metallic powder or suspensions thereof
    • B22F9/02Making metallic powder or suspensions thereof using physical processes
    • B22F9/04Making metallic powder or suspensions thereof using physical processes starting from solid material, e.g. by crushing, grinding or milling
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B22CASTING; POWDER METALLURGY
    • B22FWORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F9/00Making metallic powder or suspensions thereof
    • B22F9/02Making metallic powder or suspensions thereof using physical processes
    • B22F9/04Making metallic powder or suspensions thereof using physical processes starting from solid material, e.g. by crushing, grinding or milling
    • B22F2009/041Making metallic powder or suspensions thereof using physical processes starting from solid material, e.g. by crushing, grinding or milling by mechanical alloying, e.g. blending, milling

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  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Manufacture Of Metal Powder And Suspensions Thereof (AREA)

Abstract

The invention discloses a high-quality alloy target material preparation device and a process thereof, and the high-quality alloy target material preparation device comprises a box body, wherein a box cover is connected to the box body through screws, a motor is fixedly mounted on the box cover, a rotating shaft of the motor is rotatably connected with the box cover, a supporting plate is welded to the rotating shaft, a self-rotating mechanism is arranged on the supporting plate, a lifting mechanism is arranged in the box body, a grinding head is contacted with the inside of the box body, a blanking mechanism is arranged in the box body, a hanging rod is welded to the grinding head, a stop ring is sleeved on the outer side of the hanging rod in a sliding mode, a spring is arranged on the outer side of the hanging rod, a shifting piece is welded to the grinding head, an elastic piece is contacted with the shifting piece, an elastic rod is welded to the box body, and a stop block is welded to the elastic rod. The invention relates to a device and a process for preparing a high-quality alloy target material, which have the characteristics of high grinding efficiency and high raw material crushing degree.

Description

High-quality alloy target material preparation device and process thereof
Technical Field
The invention belongs to the technical field of alloy target processing, and particularly relates to a device and a process for preparing a high-quality alloy target.
Background
The coating target is a sputtering source which forms various functional films on a substrate by sputtering through magnetron sputtering, multi-arc ion plating or other types of coating systems under proper process conditions. In a simple way, the target material is a target material bombarded by high-speed charged energy particles, and is used in a high-energy laser weapon, when lasers with different power densities, different output waveforms and different wavelengths interact with different target materials, different killing and destroying effects can be generated, and the high-purity molybdenum-niobium alloy target material has more excellent performance and has a larger development prospect. Before the high-purity molybdenum-niobium alloy target material is manufactured, the molybdenum-niobium alloy is usually required to be ground into extremely fine powder, so that the subsequent melting and forming work is facilitated, the grinding efficiency of the traditional grinding device is low, and meanwhile, the raw material crushing degree is low. Accordingly, there is a need for improvements in the art.
The invention content is as follows:
the present invention is directed to a high-quality alloy target material preparation apparatus and a process thereof, which solves the above-mentioned problems.
In order to solve the above problems, the present invention provides a technical solution:
the utility model provides a high-quality alloy target preparation facilities, includes the box, there is the case lid through the screw connection on the box, fixed mounting has the motor on the case lid, the pivot and the case lid of motor rotate to be connected, the welding has the supporting disk in the pivot, be provided with rotation mechanism on the supporting disk, be provided with elevating system in the box, the contact has the grinding head in the box, be provided with unloading mechanism in the box, the welding has the jib on the grinding head, the outside of jib slides and has cup jointed the fender ring, the outside of jib is provided with the spring, the welding has the plectrum on the grinding head, contact flexible plate on the plectrum, the welding has the elastic rod on the box, the welding has the dog on the elastic rod.
Preferably, one end of the spring is welded with the baffle ring, and the other end of the spring is welded with the grinding head.
Preferably, a corrugated sleeve is bonded on the grinding head, and a baffle ring is fixedly sleeved in the corrugated sleeve.
As preferred, rotation mechanism includes connecting rod, support ring, bearing, sliding cylinder, gear, ring gear, jib, sliding pin, spout and lug, connecting rod and supporting disk welding, the welding has the support ring on the connecting rod, the fixed bearing that has cup jointed in the support ring, the fixed sliding cylinder that has cup jointed in the bearing, the welding has the gear on the sliding cylinder, ring gear and the fixed cup jointing of box, ring gear and gear engagement, sliding sleeve has the jib in the sliding cylinder, the welding has the sliding pin on the jib, the welding has the lug on the sliding pin, the contact has the sliding sleeve on the lug.
Preferably, the side wall of the sliding cylinder is provided with a sliding groove, and a sliding pin is connected in the sliding groove in a sliding manner.
Preferably, the lifting mechanism comprises an installation plate, an air cylinder rod, a support rod and a sliding sleeve, the air cylinder is fixedly installed on the installation plate, the air cylinder rod of the air cylinder is in sliding connection with the installation plate, the air cylinder rod of the air cylinder is welded with the support plate, the support rod is welded on the installation plate, the sliding sleeve is welded on the support rod, and a sliding barrel is connected in the sliding sleeve in a sliding mode.
Preferably, the blanking mechanism comprises a filter cylinder, a motor, a driving shaft, a connecting sleeve, a limiting pin, a supporting shaft, a reamer and a plug, the filter cylinder is fixedly sleeved with the box body, the filter cylinder is welded with the elastic piece, the motor is fixedly mounted on the filter cylinder, the driving shaft of the motor is rotatably connected with the filter cylinder, the connecting sleeve is sleeved on the outer side of the driving shaft in a sliding mode, the supporting shaft is welded on the connecting sleeve, the reamer is welded on the outer side of the supporting shaft, the reamer is in contact with the filter cylinder, the plug is sleeved on the filter cylinder in a sliding mode, and the plug is in contact with the stop block.
Preferably, the side wall of the connecting sleeve is connected with a limiting pin in a sliding mode, and the limiting pin is connected with the driving shaft through threads.
A technology of a high-quality alloy target preparation device comprises the following specific steps:
the method comprises the following steps: the method comprises the following steps that target raw materials enter a box body through a feeding hole in a box cover, then a motor is started, the motor starts a rotating shaft to rotate, the rotating shaft drives a supporting plate to rotate, the supporting plate rotates to drive a connecting rod to rotate, a supporting ring at the tail end of the connecting rod rotates by taking the supporting plate as an axis, a sliding cylinder further rotates by taking the supporting plate as an axis, the sliding cylinder drives a hanging rod to move, the hanging rod drives a grinding head to rotate around a filter cylinder in the box body, and the raw materials are ground;
step two: the sliding cylinder rotates to drive the gear to rotate, the gear rotates to be matched with the gear ring, so that the gear rotates automatically, the gear rotates to drive the sliding cylinder to rotate, the sliding cylinder drives the suspender to rotate, and the suspender drives the grinding head to rotate to grind the target raw material;
step three: starting the air cylinder, starting the air cylinder rod to retract, enabling the mounting plate to move upwards by retracting the air cylinder rod, driving the supporting rod to move by the mounting plate, driving the sliding sleeve to move by the supporting rod, driving the sliding pin to move by the sliding sleeve, driving the hanging rod to move by the sliding pin, driving the grinding head to move and separate from the box body by the hanging rod, and then driving the air cylinder rod to reset so that the grinding head performs hammer smashing crushing on the target material in the box body under the action of gravity;
step four: in the autorotation process of the grinding head, the elastic sheet is shifted by the position change of the shifting sheet, so that the elastic sheet drives the filter cylinder to vibrate, the filter cylinder filters the raw materials in the box body, the raw materials with larger particles are blocked in the box body to be continuously ground, the crushing degree of the raw materials is higher, and the raw materials meeting the granularity requirement enter the filter cylinder;
step five: during the ejection of compact, stir the elastic rod for dog and end cap break away from, then take off the end cap, the starter motor, the motor start drive shaft rotates, and the drive shaft drives the adapter sleeve and rotates, and the adapter sleeve drives the back shaft and rotates, and the back shaft rotates and drives the reamer and carry out the defeated material, avoids straining interior raw materials of section of thick bamboo and blocks up.
The invention has the beneficial effects that: the invention relates to a device and a process for preparing a high-quality alloy target material, which have the characteristics of high grinding efficiency and high raw material crushing degree, and compared with the traditional device and the process for preparing the high-quality alloy target material, the device and the process for preparing the high-quality alloy target material have the following two beneficial effects in specific use:
at first, through setting up the motor, the supporting disk, the connecting rod, the support ring, a sliding cylinder, the gear, the ring gear, the jib, the sliding pin, the mounting panel, the cylinder, the bracing piece, the sliding sleeve, grinding head isotructure, rotate through motor drive supporting disk, and then make gear and ring gear cooperation drive sliding cylinder on the sliding cylinder rotate, make the grinding head revolute the rotation of axes when the rotation, simultaneously, the cylinder starts the sliding sleeve and goes up and down, and then make grinding head lifting hammer pound, and then make the device higher to target raw materials grinding efficiency, machining speed is bigger.
Secondly, through setting up plectrum, flexure strip, strain a section of thick bamboo, motor, back shaft, reamer isotructure, filter the raw materials in the box through straining a section of thick bamboo for the great raw materials of granule is stopped to continue to grind in the box, makes the raw materials degree of smashing higher, drives the plectrum when grinding head rotates and stirs the flexure strip, and then makes and strain a section of thick bamboo and take place vibrations, and simultaneously, motor drive reamer carries the raw materials, makes device unloading efficiency higher.
Description of the drawings:
for ease of illustration, the invention is described in detail by the following detailed description and the accompanying drawings.
FIG. 1 is a perspective view of the overall construction of the present invention;
FIG. 2 is a front cross-sectional view of FIG. 1 of the present invention;
FIG. 3 is an enlarged view taken at A of FIG. 2 in accordance with the present invention;
FIG. 4 is an enlarged view of the invention at B in FIG. 2;
FIG. 5 is an enlarged view of the invention at C of FIG. 2;
fig. 6 is a cross-sectional view of the filter cartridge of fig. 2 according to the present invention.
In the figure: 1. a box body; 2. a box cover; 3. a motor; 4. a rotating shaft; 5. a support disc; 6. a rotation mechanism; 61. a connecting rod; 62. a support ring; 63. a bearing; 64. a slide cylinder; 65. a gear; 66. a toothed ring; 67. a boom; 68. a slide pin; 69. a chute; 610. a bump; 7. a lifting mechanism; 71. mounting a plate; 72. a cylinder; 73. a cylinder rod; 74. a support bar; 75. a sliding sleeve; 8. a grinding head; 9. a blanking mechanism; 91. a filter cartridge; 92. an electric motor; 93. a drive shaft; 94. connecting sleeves; 95. a spacing pin; 96. a support shaft; 97. a reamer; 98. a plug; 10. a baffle ring; 11. a spring; 12. a corrugated sleeve; 13. a shifting sheet; 14. an elastic sheet; 15. an elastic rod; 16. and a stop block.
The specific implementation mode is as follows:
as shown in fig. 1 to 6, the following technical solutions are adopted in the present embodiment:
example (b):
a high-quality alloy target preparation device comprises a box body 1, a box cover 2 is connected to the box body 1 through screws, the box cover 2 is fixedly provided with a motor 3, a rotating shaft 4 of the motor 3 is rotatably connected with the box cover 2, a supporting plate 5 is welded on the rotating shaft 4, a self-rotating mechanism 6 is arranged on the supporting plate 5, a lifting mechanism 7 is arranged in the box body 1, a grinding head 8 is contacted in the box body 1, a blanking mechanism 9 is arranged in the box body 1, a hanging rod 67 is welded on the grinding head 8, the outer side of the suspender 67 is sleeved with a baffle ring 10 in a sliding way, the outer side of the suspender 67 is provided with a spring 11, a shifting sheet 13 is welded on the grinding head 8, an elastic sheet 14 is contacted on the shifting sheet 13, an elastic rod 15 is welded on the box body 1, and a stop block 16 is welded on the elastic rod 15.
One end of the spring 11 is welded with the baffle ring 10, and the other end of the spring 11 is welded with the grinding head 8. The retainer ring 10 is supported by the spring 11.
Wherein, the grinding head 8 is bonded with a corrugated sleeve 12, and a baffle ring 10 is fixedly sleeved in the corrugated sleeve 12. By providing the bellows 12, material accumulation on the grinding head 8 is avoided.
Wherein, rotation mechanism 6 includes connecting rod 61, support ring 62, bearing 63, sliding cylinder 64, gear 65, ring gear 66, jib 67, sliding pin 68, spout 69 and lug 610, connecting rod 61 and the welding of supporting disk 5, the welding has support ring 62 on the connecting rod 61, fixed cover has been cup jointed in the support ring 62 and has been had bearing 63, fixed cup joint has sliding cylinder 64 in the bearing 63, the welding has gear 65 on the sliding cylinder 64, ring gear 66 and the fixed cup joint of box 1, ring gear 66 and the meshing of gear 65, sliding cylinder 64 slides in and has cup jointed jib 67, the welding has sliding pin 68 on the jib 67, the welding has lug 610 on the sliding pin 68, the contact has sliding sleeve 75 on the lug 610. The rotation of the rotating shaft 4 is started by setting the motor 3, the rotating shaft 4 drives the supporting disc 5 to rotate, the supporting disc 5 rotates to drive the connecting rod 61 to rotate, the supporting ring 62 at the tail end of the connecting rod 61 rotates by taking the supporting disc 5 as an axis, the sliding cylinder 64 drives the suspender 67 to move, the suspender 67 drives the grinding head 8 to rotate around the filter cylinder 91 in the box body 1, the raw material is ground, the sliding cylinder 64 moves to drive the gear 65 to move, the gear 65 moves to be matched with the gear ring 66, the gear 65 rotates to drive the sliding cylinder 64 to rotate, the sliding cylinder 64 drives the suspender 67 to rotate, and the suspender 67 drives the grinding head 8 to rotate to grind the target raw material.
A sliding groove 69 is formed in the side wall of the sliding cylinder 64, and a sliding pin 68 is slidably connected in the sliding groove 69. The slide pin 68 is guided by providing a slide groove 69.
The lifting mechanism 7 comprises a mounting plate 71, an air cylinder 72, an air cylinder rod 73, a support rod 74 and a sliding sleeve 75, the air cylinder 72 is fixedly mounted on the mounting plate 71, the air cylinder rod 73 of the air cylinder 72 is in sliding connection with the mounting plate 71, the air cylinder rod 73 of the air cylinder 72 is welded with the support plate 5, the support rod 74 is welded on the mounting plate 71, the sliding sleeve 75 is welded on the support rod 74, and the sliding sleeve 64 is in sliding connection with the sliding sleeve 75. The cylinder rod 73 is started to retract through the air cylinder 72, the cylinder rod 73 retracts to enable the mounting plate 71 to move upwards, the mounting plate 71 drives the supporting rod 74 to move, the supporting rod 74 drives the sliding sleeve 75 to move, the sliding sleeve 75 moves to drive the sliding pin 68 to move, the sliding pin 68 drives the suspender 67 to move, the suspender 67 moves to drive the grinding head 8 to move and separate from the box body 1, and then the air cylinder 72 drives the cylinder rod 73 to reset, so that the grinding head 8 performs hammering and smashing on target raw materials in the box body 1 under the action of gravity.
The blanking mechanism 9 comprises a filter cartridge 91, a motor 92, a driving shaft 93, a connecting sleeve 94, a limiting pin 95, a supporting shaft 96, a reamer 97 and a plug 98, the filter cartridge 91 is fixedly sleeved with the box body 1, the filter cartridge 91 is welded with the elastic sheet 14, the motor 92 is fixedly installed on the filter cartridge 91, the driving shaft 93 of the motor 92 is rotatably connected with the filter cartridge 91, the connecting sleeve 94 is sleeved on the outer side of the driving shaft 93 in a sliding mode, the supporting shaft 96 is welded on the connecting sleeve 94, the reamer 97 is welded on the outer side of the supporting shaft 96, the reamer 97 is contacted with the filter cartridge 91, the plug 98 is sleeved on the filter cartridge 91 in a sliding mode, and the plug 98 is contacted with the stopper 16. Through setting up plectrum 13, flexure strip 14, strain a section of thick bamboo 91, motor 92, back shaft 96, reamer 97 isotructure, raw materials in to box 1 is filtered through straining a section of thick bamboo 91, make the great raw materials of granule stopped to continue to grind in box 1, make the raw materials degree of smashing higher, grinding head 8 drives plectrum 13 when rotating and stirs flexure strip 14, and then make and strain a section of thick bamboo 91 and take place vibrations, and simultaneously, motor 92 drive reamer 97 carries the raw materials, make device unloading efficiency higher.
The side wall of the connecting sleeve 94 is slidably connected with a limit pin 95, and the limit pin 95 is in threaded connection with the driving shaft 93. The connection sleeve 94 and the drive shaft 93 are connected by providing a stopper pin 95.
A technology of a high-quality alloy target preparation device comprises the following specific steps:
the method comprises the following steps: target raw materials enter a box body 1 through a feeding hole in a box cover 2, then a motor 3 is started, the motor 3 starts a rotating shaft 4 to rotate, the rotating shaft 4 drives a supporting plate 5 to rotate, the supporting plate 5 rotates to drive a connecting rod 61 to rotate, a supporting ring 62 at the tail end of the connecting rod 61 rotates by taking the supporting plate 5 as an axis, a sliding cylinder 64 rotates by taking the supporting plate 5 as the axis, the sliding cylinder 64 drives a suspender 67 to move, the suspender 67 drives a grinding head 8 to rotate around a filter cylinder 91 in the box body 1, and the raw materials are ground;
step two: the sliding cylinder 64 rotates to drive the gear 65 to rotate, the gear 65 rotates to be matched with the gear ring 66, so that the gear 65 rotates, the gear 65 rotates to drive the sliding cylinder 64 to rotate, the sliding cylinder 64 drives the suspender 67 to rotate, and the suspender 67 drives the grinding head 8 to rotate to grind the target raw material;
step three: starting the air cylinder 72, starting the air cylinder rod 73 by the air cylinder 72 to retract, enabling the mounting plate 71 to move upwards by retracting the air cylinder rod 73, enabling the mounting plate 71 to drive the supporting rod 74 to move, enabling the supporting rod 74 to drive the sliding sleeve 75 to move, enabling the sliding sleeve 75 to move to drive the sliding pin 68 to move, enabling the sliding pin 68 to drive the suspender 67 to move, enabling the suspender 67 to move to drive the grinding head 8 to move and separate from the box body 1, and then enabling the air cylinder 72 to drive the air cylinder rod 73 to reset, so that the grinding head 8 can hammer and crush the target raw materials in the box body 1 under the action of gravity;
step four: in the autorotation process of the grinding head 8, the elastic sheet 14 is shifted by the position change of the shifting sheet 13, so that the elastic sheet 14 drives the filter cylinder 91 to vibrate, the filter cylinder 91 filters the raw material in the box body 1, the raw material with larger particles is blocked in the box body 1 to be continuously ground, the crushing degree of the raw material is higher, and the raw material meeting the particle size requirement enters the filter cylinder 91;
step five: during discharging, the elastic rod 15 is pulled to separate the stopper 16 from the plug 98, then the plug 98 is taken down, the motor 92 is started, the motor 92 starts the driving shaft 93 to rotate, the driving shaft 93 drives the connecting sleeve 94 to rotate, the connecting sleeve 94 drives the supporting shaft 96 to rotate, the supporting shaft 96 rotates to drive the reamer 97 to convey materials, and raw material blockage in the filter cylinder 91 is avoided.
While there have been shown and described what are at present considered to be the fundamental principles of the invention and its essential features and advantages, it will be understood by those skilled in the art that the invention is not limited by the embodiments described above, which are merely illustrative of the principles of the invention, but that various changes and modifications may be made therein without departing from the spirit and scope of the invention as defined by the appended claims and their equivalents.

Claims (9)

1. The utility model provides a high-quality alloy target preparation facilities, includes box (1), its characterized in that: the grinding box is characterized in that a box cover (2) is connected onto the box body (1) through screws, a motor (3) is fixedly mounted on the box cover (2), a rotating shaft (4) of the motor (3) is rotatably connected with the box cover (2), a supporting plate (5) is welded onto the rotating shaft (4), a self-rotating mechanism (6) is arranged on the supporting plate (5), a lifting mechanism (7) is arranged in the box body (1), a grinding head (8) is contacted with the inside of the box body (1), a blanking mechanism (9) is arranged in the box body (1), a hanging rod (67) is welded onto the grinding head (8), a baffle ring (10) is sleeved on the outer side of the hanging rod (67) in a sliding manner, a spring (11) is arranged on the outer side of the hanging rod (67), a shifting sheet (13) is welded onto the grinding head (8), an elastic sheet (14) is contacted onto the shifting sheet (13), and an elastic rod (15) is welded onto the box body (1), a stop block (16) is welded on the elastic rod (15).
2. The device for preparing a high-quality alloy target according to claim 1, wherein: one end of the spring (11) is welded with the baffle ring (10), and the other end of the spring (11) is welded with the grinding head (8).
3. The device for preparing a high-quality alloy target according to claim 1, wherein: the grinding head (8) is bonded with a corrugated sleeve (12), and a baffle ring (10) is fixedly sleeved in the corrugated sleeve (12).
4. The device for preparing a high-quality alloy target according to claim 1, wherein: the self-rotation mechanism (6) comprises a connecting rod (61), a support ring (62), a bearing (63), a sliding cylinder (64), a gear (65), a toothed ring (66), a suspender (67), a sliding pin (68), a sliding groove (69) and a lug (610), the connecting rod (61) is welded with the supporting disk (5), the connecting rod (61) is welded with a supporting ring (62), a bearing (63) is fixedly sleeved in the support ring (62), a sliding cylinder (64) is fixedly sleeved in the bearing (63), a gear (65) is welded on the sliding cylinder (64), the gear ring (66) is fixedly sleeved with the box body (1), the gear ring (66) is meshed with the gear (65), the sliding cylinder (64) is sleeved with a hanging rod (67) in a sliding manner, the welding has sliding pin (68) on jib (67), the welding has lug (610) on sliding pin (68), the contact has sliding sleeve (75) on lug (610).
5. The device for preparing a high-quality alloy target according to claim 4, wherein: a sliding groove (69) is formed in the side wall of the sliding barrel (64), and a sliding pin (68) is connected in the sliding groove (69) in a sliding mode.
6. The device for preparing a high-quality alloy target according to claim 1, wherein: the lifting mechanism (7) comprises a mounting plate (71), an air cylinder (72), an air cylinder rod (73), a support rod (74) and a sliding sleeve (75), the air cylinder (72) is fixedly mounted on the mounting plate (71), the air cylinder rod (73) of the air cylinder (72) is in sliding connection with the mounting plate (71), the air cylinder rod (73) of the air cylinder (72) is welded with a support plate (5), the support rod (74) is welded on the mounting plate (71), the sliding sleeve (75) is welded on the support rod (74), and a sliding barrel (64) is connected in the sliding sleeve (75) in a sliding mode.
7. The device for preparing a high-quality alloy target according to claim 1, wherein: the blanking mechanism (9) comprises a filter cylinder (91), a motor (92), a driving shaft (93), a connecting sleeve (94), a limiting pin (95), a supporting shaft (96), a reamer (97) and a plug (98), the filter cartridge (91) is fixedly sleeved with the box body (1), the filter cartridge (91) is welded with the elastic sheet (14), the filter cylinder (91) is fixedly provided with a motor (92), a driving shaft (93) of the motor (92) is rotationally connected with the filter cylinder (91), a connecting sleeve (94) is sleeved on the outer side of the driving shaft (93) in a sliding manner, a supporting shaft (96) is welded on the connecting sleeve (94), a reamer (97) is welded on the outer side of the supporting shaft (96), the reamer (97) is contacted with the filter cylinder (91), a plug (98) is sleeved in the filter cylinder (91) in a sliding mode, and the plug (98) is in contact with the stop block (16).
8. The device for preparing a high-quality alloy target according to claim 7, wherein: the side wall of the connecting sleeve (94) is connected with a limiting pin (95) in a sliding mode, and the limiting pin (95) is connected with the driving shaft (93) through threads.
9. The process of the high-quality alloy target preparation device according to any one of claims 1 to 8, wherein the process comprises the following steps: the method comprises the following specific steps:
the method comprises the following steps: target raw materials enter a box body (1) through a feeding hole in a box cover (2), then a motor (3) is started, the motor (3) starts a rotating shaft (4) to rotate, the rotating shaft (4) drives a supporting plate (5) to rotate, the supporting plate (5) rotates to drive a connecting rod (61) to rotate, a supporting ring (62) at the tail end of the connecting rod (61) rotates by taking the supporting plate (5) as an axis, a sliding cylinder (64) further rotates by taking the supporting plate (5) as the axis, the sliding cylinder (64) drives a suspender (67) to move, the suspender (67) drives a grinding head (8) to rotate around a filter cylinder (91) in the box body (1), and the raw materials are ground;
step two: the sliding cylinder (64) rotates to drive the gear (65) to rotate, the gear (65) rotates to be matched with the gear ring (66), so that the gear (65) rotates, the gear (65) rotates to drive the sliding cylinder (64) to rotate, the sliding cylinder (64) drives the suspender (67) to rotate, and the suspender (67) drives the grinding head (8) to rotate to grind the target material;
step three: starting an air cylinder (72), starting an air cylinder rod (73) by the air cylinder (72) to retract, enabling the mounting plate (71) to move upwards by retracting the air cylinder rod (73), driving the supporting rod (74) to move by the mounting plate (71), driving the sliding sleeve (75) to move by the supporting rod (74), driving the sliding pin (68) to move by the sliding sleeve (75), driving the suspender (67) to move by the sliding pin (68), driving the grinding head (8) to move to be separated from the box body (1) by the suspender (67), and then driving the air cylinder rod (73) to reset by the air cylinder (72), so that the grinding head (8) performs hammering crushing on the target material in the box body (1) under the action of gravity;
step four: in the autorotation process of the grinding head (8), the elastic sheet (14) is stirred by the position change of the stirring sheet (13), so that the elastic sheet (14) drives the filter cylinder (91) to vibrate, the filter cylinder (91) filters the raw material in the box body (1), the raw material with larger particles is blocked in the box body (1) to be continuously ground, the crushing degree of the raw material is higher, and the raw material meeting the particle size requirement enters the filter cylinder (91);
step five: during the ejection of compact, stir elastic rod (15) for dog (16) and end cap (98) break away from, then take off end cap (98), start motor (92), motor (92) start drive axle (93) rotate, drive axle (93) drive adapter sleeve (94) rotate, adapter sleeve (94) drive back shaft (96) rotate, back shaft (96) rotate and drive reamer (97) carry out the defeated material, avoid straining raw materials jam in (91).
CN202111541722.4A 2021-12-16 2021-12-16 High-quality alloy target material preparation device and process thereof Pending CN114411102A (en)

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