CN114409401A - Potassium-sodium niobate piezoelectric ceramic, preparation method thereof and electronic equipment - Google Patents
Potassium-sodium niobate piezoelectric ceramic, preparation method thereof and electronic equipment Download PDFInfo
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- CN114409401A CN114409401A CN202210070183.9A CN202210070183A CN114409401A CN 114409401 A CN114409401 A CN 114409401A CN 202210070183 A CN202210070183 A CN 202210070183A CN 114409401 A CN114409401 A CN 114409401A
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- 239000000919 ceramic Substances 0.000 title claims abstract description 132
- BITYAPCSNKJESK-UHFFFAOYSA-N potassiosodium Chemical compound [Na].[K] BITYAPCSNKJESK-UHFFFAOYSA-N 0.000 title claims abstract description 59
- 238000002360 preparation method Methods 0.000 title claims abstract description 14
- 239000002994 raw material Substances 0.000 claims abstract description 23
- 239000011734 sodium Substances 0.000 claims abstract description 18
- 239000000843 powder Substances 0.000 claims description 31
- 238000000498 ball milling Methods 0.000 claims description 29
- 239000002002 slurry Substances 0.000 claims description 24
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 claims description 23
- 238000000034 method Methods 0.000 claims description 23
- 238000001035 drying Methods 0.000 claims description 17
- 239000000203 mixture Substances 0.000 claims description 14
- 230000010287 polarization Effects 0.000 claims description 13
- 238000005245 sintering Methods 0.000 claims description 12
- 239000004372 Polyvinyl alcohol Substances 0.000 claims description 11
- 229920002451 polyvinyl alcohol Polymers 0.000 claims description 11
- 230000008878 coupling Effects 0.000 claims description 8
- 238000010168 coupling process Methods 0.000 claims description 8
- 238000005859 coupling reaction Methods 0.000 claims description 8
- 239000000463 material Substances 0.000 claims description 8
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims description 7
- 229910052709 silver Inorganic materials 0.000 claims description 7
- 239000004332 silver Substances 0.000 claims description 7
- 238000010532 solid phase synthesis reaction Methods 0.000 claims description 6
- 230000002194 synthesizing effect Effects 0.000 claims description 6
- 229920002545 silicone oil Polymers 0.000 claims description 5
- 238000000227 grinding Methods 0.000 claims description 3
- 239000003446 ligand Substances 0.000 claims description 3
- 238000002156 mixing Methods 0.000 claims description 3
- 229910002976 CaZrO3 Inorganic materials 0.000 claims 4
- CDBYLPFSWZWCQE-UHFFFAOYSA-L Sodium Carbonate Chemical compound [Na+].[Na+].[O-]C([O-])=O CDBYLPFSWZWCQE-UHFFFAOYSA-L 0.000 claims 2
- WMWLMWRWZQELOS-UHFFFAOYSA-N bismuth(iii) oxide Chemical compound O=[Bi]O[Bi]=O WMWLMWRWZQELOS-UHFFFAOYSA-N 0.000 claims 2
- JEIPFZHSYJVQDO-UHFFFAOYSA-N iron(III) oxide Inorganic materials O=[Fe]O[Fe]=O JEIPFZHSYJVQDO-UHFFFAOYSA-N 0.000 claims 2
- ZKATWMILCYLAPD-UHFFFAOYSA-N niobium pentoxide Chemical compound O=[Nb](=O)O[Nb](=O)=O ZKATWMILCYLAPD-UHFFFAOYSA-N 0.000 claims 2
- BWHMMNNQKKPAPP-UHFFFAOYSA-L potassium carbonate Chemical compound [K+].[K+].[O-]C([O-])=O BWHMMNNQKKPAPP-UHFFFAOYSA-L 0.000 claims 2
- GHPGOEFPKIHBNM-UHFFFAOYSA-N antimony(3+);oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[Sb+3].[Sb+3] GHPGOEFPKIHBNM-UHFFFAOYSA-N 0.000 claims 1
- VTYYLEPIZMXCLO-UHFFFAOYSA-L calcium carbonate Substances [Ca+2].[O-]C([O-])=O VTYYLEPIZMXCLO-UHFFFAOYSA-L 0.000 claims 1
- 229910000019 calcium carbonate Inorganic materials 0.000 claims 1
- 229910000027 potassium carbonate Inorganic materials 0.000 claims 1
- 238000003825 pressing Methods 0.000 claims 1
- 238000002791 soaking Methods 0.000 claims 1
- 229910000029 sodium carbonate Inorganic materials 0.000 claims 1
- 230000007704 transition Effects 0.000 abstract description 17
- RKTYLMNFRDHKIL-UHFFFAOYSA-N copper;5,10,15,20-tetraphenylporphyrin-22,24-diide Chemical compound [Cu+2].C1=CC(C(=C2C=CC([N-]2)=C(C=2C=CC=CC=2)C=2C=CC(N=2)=C(C=2C=CC=CC=2)C2=CC=C3[N-]2)C=2C=CC=CC=2)=NC1=C3C1=CC=CC=C1 RKTYLMNFRDHKIL-UHFFFAOYSA-N 0.000 abstract description 4
- 229910052742 iron Inorganic materials 0.000 abstract description 4
- 238000011031 large-scale manufacturing process Methods 0.000 abstract description 4
- 231100000252 nontoxic Toxicity 0.000 abstract description 4
- 230000003000 nontoxic effect Effects 0.000 abstract description 4
- 239000012071 phase Substances 0.000 description 18
- 239000011324 bead Substances 0.000 description 12
- 235000012431 wafers Nutrition 0.000 description 10
- 229910010293 ceramic material Inorganic materials 0.000 description 9
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 8
- 229910052451 lead zirconate titanate Inorganic materials 0.000 description 7
- 239000000126 substance Substances 0.000 description 5
- ZLMJMSJWJFRBEC-UHFFFAOYSA-N Potassium Chemical compound [K] ZLMJMSJWJFRBEC-UHFFFAOYSA-N 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 230000005684 electric field Effects 0.000 description 4
- 210000001161 mammalian embryo Anatomy 0.000 description 4
- 229910052700 potassium Inorganic materials 0.000 description 4
- 239000011591 potassium Substances 0.000 description 4
- 230000008569 process Effects 0.000 description 4
- 238000007873 sieving Methods 0.000 description 4
- UYLYBEXRJGPQSH-UHFFFAOYSA-N sodium;oxido(dioxo)niobium Chemical compound [Na+].[O-][Nb](=O)=O UYLYBEXRJGPQSH-UHFFFAOYSA-N 0.000 description 4
- 229910015902 Bi 2 O 3 Inorganic materials 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000011160 research Methods 0.000 description 3
- DJOYTAUERRJRAT-UHFFFAOYSA-N 2-(n-methyl-4-nitroanilino)acetonitrile Chemical compound N#CCN(C)C1=CC=C([N+]([O-])=O)C=C1 DJOYTAUERRJRAT-UHFFFAOYSA-N 0.000 description 2
- 238000002441 X-ray diffraction Methods 0.000 description 2
- 239000002253 acid Substances 0.000 description 2
- 229910002056 binary alloy Inorganic materials 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 150000001875 compounds Chemical class 0.000 description 2
- 210000002257 embryonic structure Anatomy 0.000 description 2
- 238000002474 experimental method Methods 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 238000001757 thermogravimetry curve Methods 0.000 description 2
- BVKZGUZCCUSVTD-UHFFFAOYSA-L Carbonate Chemical compound [O-]C([O-])=O BVKZGUZCCUSVTD-UHFFFAOYSA-L 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 229910002113 barium titanate Inorganic materials 0.000 description 1
- JRPBQTZRNDNNOP-UHFFFAOYSA-N barium titanate Chemical compound [Ba+2].[Ba+2].[O-][Ti]([O-])([O-])[O-] JRPBQTZRNDNNOP-UHFFFAOYSA-N 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 229910002115 bismuth titanate Inorganic materials 0.000 description 1
- 238000004364 calculation method Methods 0.000 description 1
- 239000003153 chemical reaction reagent Substances 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 230000001808 coupling effect Effects 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000005474 detonation Methods 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- 239000010419 fine particle Substances 0.000 description 1
- 238000005469 granulation Methods 0.000 description 1
- 230000003179 granulation Effects 0.000 description 1
- 229910001385 heavy metal Inorganic materials 0.000 description 1
- 238000007654 immersion Methods 0.000 description 1
- 238000009776 industrial production Methods 0.000 description 1
- 239000004615 ingredient Substances 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 229910052573 porcelain Inorganic materials 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 229920006395 saturated elastomer Polymers 0.000 description 1
- -1 sodium bismuth titanate series Chemical class 0.000 description 1
- 239000007790 solid phase Substances 0.000 description 1
- 238000010897 surface acoustic wave method Methods 0.000 description 1
- 238000003786 synthesis reaction Methods 0.000 description 1
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- 238000012546 transfer Methods 0.000 description 1
- 230000009466 transformation Effects 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- 239000012856 weighed raw material Substances 0.000 description 1
- 238000005303 weighing Methods 0.000 description 1
- 239000002759 woven fabric Substances 0.000 description 1
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Abstract
本发明涉及一种铌酸钾钠系压电陶瓷,该铌酸钾钠系压电陶瓷具有如下通式:(0.96‑x)(K0.48Na0.52)Nb0.96Sb0.04O3‑0.04(Bi0.5Na0.5)ZrO3‑xCaZrO3‑0.4%Fe2O3,其中,x为CaZrO3的摩尔分数,0<x≤0.02。上述铌酸钾钠系压电陶瓷,在离子掺杂的三元系组分铌酸钾钠系无铅压电陶瓷引入了CaZrO3为新体系源,在能够保持良好的压电性能的同时,可以使T0‑T相变点稳定降到室温,减少正交、四方两相的差异,实现多晶型相变的平稳过渡,使其具有优异的温度稳定性。此外,该铌酸钾钠系压电陶瓷的制备工艺简单,原料无毒无害,适用于工业化大规模生产。
The invention relates to a potassium-sodium niobate-based piezoelectric ceramic. The potassium-sodium niobate-based piezoelectric ceramic has the following general formula: (0.96‑x)(K 0.48 Na 0.52 )Nb 0.96 Sb 0.04 O 3‑0.04 (Bi 0.5 Na 0.5 ) ZrO 3 ‑xCaZrO 3 ‑0.4%Fe 2 O 3 , wherein x is the mole fraction of CaZrO 3 , 0<x≤0.02. The above-mentioned potassium-sodium niobate-based piezoelectric ceramics introduced CaZrO 3 as a new system source in the ion-doped ternary component potassium-sodium niobate-based lead-free piezoelectric ceramics, which can maintain good piezoelectric properties while maintaining good piezoelectric properties. The T 0-T phase transition point can be stably lowered to room temperature, the difference between the orthorhombic and tetragonal phases can be reduced, the smooth transition of the polymorphic phase transition can be realized, and it has excellent temperature stability. In addition, the preparation process of the potassium sodium niobate series piezoelectric ceramics is simple, the raw materials are non-toxic and harmless, and it is suitable for industrialized large-scale production.
Description
技术领域technical field
本发明涉及功能性陶瓷材料领域,特别是涉及一种铌酸钾钠系压电陶瓷及其制备方法、电子设备。The invention relates to the field of functional ceramic materials, in particular to a potassium-sodium niobate series piezoelectric ceramic, a preparation method and electronic equipment thereof.
背景技术Background technique
压电陶瓷是一种可以实现机械能和电能相互转化的功能性陶瓷,具有便于制造各种损耗低、可靠性高且小型化的功能性元器件的优点,在日常生产和生活的各个领域中有着非常广泛的应用,如换能器、传感器、驱动器等。目前市场上的压电陶瓷器件主流材料是铅基锆钛酸铅(PZT)材料,这种铅基材料所含的重金属元素铅对生物和环境都有着极大的危害。因此,开发一种可以取代锆钛酸铅(PZT)的无铅压电陶瓷材料成为研究者们极其重要的任务。Piezoelectric ceramics are functional ceramics that can realize the mutual conversion of mechanical energy and electrical energy. They have the advantages of facilitating the manufacture of various functional components with low loss, high reliability and miniaturization. They are widely used in various fields of daily production and life. Very wide range of applications such as transducers, sensors, drives, etc. At present, the mainstream material of piezoelectric ceramic devices on the market is lead-based lead zirconate titanate (PZT) material. The heavy metal element lead contained in this lead-based material is extremely harmful to organisms and the environment. Therefore, developing a lead-free piezoelectric ceramic material that can replace lead zirconate titanate (PZT) has become an extremely important task for researchers.
钙钛矿型的三种无铅压电陶瓷材料(包括铌酸钾钠系、钛酸铋钠系和钛酸钡系)因为不含铅等有害元素成为目前有望取代铅基压电陶瓷的替代材料,而铌酸钾钠系陶瓷更是由于其良好的压电性能和较高的居里温度成为研究者们的热点研究材料。研究结果表明纯铌酸钾钠陶瓷的压电性能与实用化的PZT陶瓷相比仍有很大差距,而借鉴PZT陶瓷的研究思路,通过离子掺杂和二元系、三元系体系的构建则可以将铌酸钾钠系压电陶瓷的压电性能显著提高,可以与实用性PZT陶瓷的压电性能相媲美。一般来说,二元体系的本质是将铌酸钾钠体系的菱形-正交相变点上移至室温或正交-四方相变点下移至室温;而三元系体系的设计可以将高温的正交-四方相变点和低温的菱形-正交相变点同时移到室温构建菱形-四方相变,在室温共存两相区域KNN系压电陶瓷的压电常数显著提高。目前,三元体系主要为:K1-XNaXNb1-YSbYO3-zBiFeO3-wBi0.5Na0.5ZrO3(KNNS-zBF-wBNZ)和K1-XNaXNb1-YSbYO3-zBaZrO3-wBi0.5K0.5HfO3(KNNS-zBZ-wBKH)等,从报道的结果来看,其压电性能较单元及二元体系具有大幅度的提升,但是我们不难发现伴随复合铌酸钾钠系材料的压电常数提高,其居里温度会变低,应用温区会变窄,大大限制了应用范围。Three lead-free piezoelectric ceramic materials of perovskite type (including potassium sodium niobate series, sodium bismuth titanate series and barium titanate series) are currently expected to replace lead-based piezoelectric ceramics because they do not contain harmful elements such as lead. The potassium and sodium niobate ceramics have become the hot research materials of researchers because of their good piezoelectric properties and high Curie temperature. The research results show that the piezoelectric properties of pure potassium and sodium niobate ceramics are still far behind that of practical PZT ceramics. Drawing on the research ideas of PZT ceramics, through ion doping and the construction of binary and ternary systems The piezoelectric properties of potassium sodium niobate piezoelectric ceramics can be significantly improved, which can be comparable to the piezoelectric properties of practical PZT ceramics. Generally speaking, the essence of the binary system is to move the rhombic-orthogonal phase transition point of the potassium sodium niobate system up to room temperature or the orthogonal-tetragonal phase transition point down to room temperature; while the design of the ternary system can The high-temperature orthorhombic-tetragonal phase transition point and the low-temperature rhombic-orthogonal phase transition point are simultaneously moved to room temperature to construct a rhombic-tetragonal phase transition. At present, the ternary systems are mainly: K 1-X Na X Nb 1-Y Sb Y O 3 -zBiFeO 3 -wBi 0.5 Na 0.5 ZrO 3 (KNNS-zBF-wBNZ) and K 1-X Na X Nb 1-Y Sb Y O 3 -zBaZrO 3 -wBi 0.5 K 0.5 HfO 3 (KNNS-zBZ-wBKH), etc., according to the reported results, its piezoelectric performance is greatly improved compared with the unit and binary systems, but it is not difficult for us It was found that with the increase of the piezoelectric constant of the composite potassium sodium niobate material, its Curie temperature will become lower, and the application temperature range will become narrower, which greatly limits the application range.
为提高铌酸钾钠基陶瓷压电性能的温度稳定性,研究人员已做了很多尝试。一是通过掺杂将多晶型相转变温度调控至室温以下,因为导致铌酸钾钠基陶瓷具有较差温度稳定性的根本原因是室温附近多晶型相转变的存在;另外一个是制备织构陶瓷。但是,前者由于避开了多晶型相转变效应不可避免地降低了陶瓷的压电性能;后者则需要很复杂的制备工艺,不利用大规模工业化生产。In order to improve the temperature stability of the piezoelectric properties of potassium sodium niobate-based ceramics, researchers have made many attempts. One is to adjust the polymorphic phase transition temperature below room temperature by doping, because the fundamental reason for the poor temperature stability of potassium sodium niobate-based ceramics is the existence of polymorphic phase transitions near room temperature; the other is to prepare woven fabrics. Structured ceramics. However, the former inevitably reduces the piezoelectric properties of ceramics due to avoiding the polymorphic phase transition effect; the latter requires a very complicated preparation process and does not utilize large-scale industrial production.
发明内容SUMMARY OF THE INVENTION
基于此,有必要提供一种具有良好的压电性能和较好的温度稳定性且制备工艺简单的铌酸钾钠系压电陶瓷。Based on this, it is necessary to provide a potassium-sodium niobate-based piezoelectric ceramic with good piezoelectric performance, good temperature stability and simple preparation process.
此外,还提供一种铌酸钾钠系压电陶瓷的制备方法。In addition, a preparation method of potassium sodium niobate series piezoelectric ceramics is also provided.
一种铌酸钾钠系压电陶瓷,该铌酸钾钠系压电陶瓷具有如下通式:(0.96-x)(K0.48Na0.52)Nb0.96Sb0.04O3-0.04(Bi0.5Na0.5)ZrO3-xCaZrO3-0.4%Fe2O3,其中,x为CaZrO3的摩尔分数,0<x≤0.02。A potassium-sodium niobate-based piezoelectric ceramic, the potassium-sodium niobate-based piezoelectric ceramic has the following general formula: (0.96-x)(K 0.48 Na 0.52 )Nb 0.96 Sb 0.04 O 3 -0.04(Bi 0.5 Na 0.5 ) ZrO 3 -xCaZrO 3 -0.4%Fe 2 O 3 , wherein x is the mole fraction of CaZrO 3 , 0<x≦0.02.
上述铌酸钾钠系压电陶瓷,在离子掺杂的三元系组分铌酸钾钠系无铅压电陶瓷引入了CaZrO3为新体系源,提高了压电陶瓷的致密度,在能够保持良好的压电性能的同时,可以使T0-T相变点稳定降到室温,减少正交、四方两相的差异,实现多晶型相变的平稳过渡,使其具有优异的温度稳定性。此外,该铌酸钾钠系压电陶瓷的制备工艺简单,原料无毒无害,适用于工业化大规模生产。The above potassium-sodium niobate series piezoelectric ceramics, CaZrO 3 is introduced as a new system source in the ion-doped ternary component potassium-sodium niobate series lead-free piezoelectric ceramics, which improves the density of the piezoelectric ceramics, and can While maintaining good piezoelectric properties, the T 0-T phase transition point can be stably lowered to room temperature, reducing the difference between the orthogonal and tetragonal phases, and realizing the smooth transition of the polymorphic phase transition, making it excellent temperature stability. sex. In addition, the preparation process of the potassium sodium niobate series piezoelectric ceramics is simple, the raw materials are non-toxic and harmless, and it is suitable for industrialized large-scale production.
在其中一个实施例中,0<x≤0.016。In one of the embodiments, 0<x≤0.016.
在其中一个实施例中,x的值为0.004、0.008或0.012。In one of the embodiments, the value of x is 0.004, 0.008 or 0.012.
在其中一个实施例中,上述铌酸钾钠系压电陶瓷的压电常数d33的数值范围在400pC/N~450pC/N。In one of the embodiments, the piezoelectric constant d 33 of the potassium-sodium niobate-based piezoelectric ceramic ranges from 400pC/N to 450pC/N.
在其中一个实施例中,上述铌酸钾钠系压电陶瓷的机电耦合系数Kp的数值范围在0.35~0.40。In one of the embodiments, the electromechanical coupling coefficient Kp of the potassium sodium niobate based piezoelectric ceramics ranges from 0.35 to 0.40.
一种铌酸钾钠系压电陶瓷的制备方法,包括以下步骤:A preparation method of potassium sodium niobate piezoelectric ceramics, comprising the following steps:
以K2CO3、Na2CO3、Nb2O5、Sb2O3、ZrO2、Bi2O3、CaZrO3和Fe2O3为原料,根据上述通式采用固相法制备铌酸钾钠系压电陶瓷。Using K 2 CO 3 , Na 2 CO 3 , Nb 2 O 5 , Sb 2 O 3 , ZrO 2 , Bi 2 O 3 , CaZrO 3 and Fe 2 O 3 as raw materials, niobic acid was prepared by solid-phase method according to the above general formula Potassium-sodium piezoelectric ceramics.
在其中一个实施例中,上述采用固相法制备铌酸钾钠系压电陶瓷的步骤包括:In one embodiment, the above-mentioned step of preparing potassium sodium niobate piezoelectric ceramics by solid-phase method includes:
将根据上述通式称取的原料混料球磨得到第一湿法浆料;The raw material mixture weighed according to the above-mentioned general formula is ball-milled to obtain the first wet slurry;
将第一湿法浆料烘干后以830℃~870℃初次烧结5h~7h,并球磨,得到第二湿法浆料;After drying the first wet-process slurry, sintering at 830°C~870°C for 5h~7h for the first time, and ball-milling to obtain the second wet-process slurry;
将第二湿法浆料烘干后研磨得到陶瓷粉体;The second wet slurry is dried and ground to obtain ceramic powder;
向上述陶瓷粉体中加入3%(w/w)~4%(w/w)的聚乙烯醇溶液,烘干;adding 3% (w/w) to 4% (w/w) polyvinyl alcohol solution to the above-mentioned ceramic powder, and drying;
将烘干后的所述陶瓷粉体研磨后压制成陶瓷胚体;The dried ceramic powder is ground and pressed into a ceramic embryo;
将上述陶瓷配体以1090℃~1100℃再次烧结3h~5h,得到陶瓷制品;及sintering the above-mentioned ceramic ligand at 1090°C~1100°C for 3h~5h again to obtain a ceramic product; and
将上述陶瓷制品进行被银处理,并在硅油中浸泡进行极化,得到陶瓷成品。The above-mentioned ceramic product is treated with silver, and immersed in silicone oil for polarization to obtain a ceramic product.
在其中一个实施例中,在将根据通式称取的原料混料球磨得到第一湿法浆料之前,还包括合成CaZrO3的步骤,该合成CaZrO3的步骤包括:In one of the embodiments, before the raw material mixture weighed according to the general formula is ball-milled to obtain the first wet-process slurry, the step of synthesizing CaZrO 3 is also included, and the step of synthesizing CaZrO 3 includes:
将CaCO3和ZrO2按照摩尔量(0.8~1.2):1混和,并球磨,得到第一混料;及The CaCO 3 and ZrO 2 are mixed according to the molar amount (0.8-1.2): 1, and ball-milled to obtain the first mixture; and
将第一混料烘干后以1480℃~1520℃保温3h~5h,并球磨,烘干,得到CaZrO3粉体。After drying the first mixture, the temperature is kept at 1480°C to 1520°C for 3h to 5h, ball-milled, and dried to obtain CaZrO 3 powder.
在其中一个实施例中,向所述陶瓷粉体中加入3%(w/w)~4%(w/w)的聚乙烯醇溶液的步骤中,陶瓷粉体与聚乙烯醇溶液的质量比为(8~12):3。In one embodiment, in the step of adding a 3% (w/w) to 4% (w/w) polyvinyl alcohol solution to the ceramic powder, the mass ratio of the ceramic powder to the polyvinyl alcohol solution It is (8~12):3.
一种电子设备,包括上述任一实施例所述的铌酸钾钠系压电陶瓷。An electronic device includes the potassium-sodium niobate-based piezoelectric ceramic according to any one of the above embodiments.
本发明提供的三元系组分的铌酸钾钠系陶瓷压电性能优良,且居里温度较高,温度稳定性较好,可在驱动器,传感器方面获得应用,在未来取代铅基压电陶瓷具有重大意义。The potassium and sodium niobate ceramics with ternary components provided by the invention have excellent piezoelectric properties, high Curie temperature and good temperature stability, can be applied in drivers and sensors, and can replace lead-based piezoelectrics in the future. Ceramics are of great significance.
附图说明Description of drawings
图1为各实施例中制备得到的陶瓷成品圆片X射线衍射图谱;Fig. 1 is the X-ray diffraction pattern of the finished ceramic wafer prepared in each embodiment;
图2为各实施例中制备得到的陶瓷成品圆片介电温谱图;Fig. 2 is the dielectric thermogram of the finished ceramic wafer prepared in each embodiment;
图3为各实施例中制备得到的陶瓷成品圆片在1kHz时测试的电滞回线;Fig. 3 is the hysteresis loop of the ceramic finished wafer prepared in each embodiment tested at 1kHz;
图4为各实施例中制备得到的陶瓷成品圆片的介电损耗曲线。FIG. 4 is the dielectric loss curve of the finished ceramic wafer prepared in each example.
具体实施方式Detailed ways
为使本发明的上述目的、特征和优点能够更加明显易懂,下面对本发明的具体实施方式做详细的说明。在下面的描述中阐述了很多具体细节以便于充分理解本发明。但是本发明能够以很多不同于在此描述的其它方式来实施,本领域技术人员可以在不违背本发明内涵的情况下做类似改进,因此本发明不受下面公开的具体实施例的限制。In order to make the above objects, features and advantages of the present invention more clearly understood, the specific embodiments of the present invention will be described in detail below. In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present invention. However, the present invention can be implemented in many other ways different from those described herein, and those skilled in the art can make similar improvements without departing from the connotation of the present invention. Therefore, the present invention is not limited by the specific embodiments disclosed below.
除非另有定义,本文所使用的所有的技术和科学术语与属于本发明的技术领域的技术人员通常理解的含义相同。本文中在本发明的说明书中所使用的术语只是为了描述具体的实施例的目的,不是旨在于限制本发明。本文的术语“第一”、“第二”仅用于描述目的,而不能理解为指示或暗示相对重要性或者隐含指明所指示的技术特征的数量。Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs. The terms used herein in the description of the present invention are for the purpose of describing specific embodiments only, and are not intended to limit the present invention. The terms "first" and "second" herein are only used for descriptive purposes, and should not be construed as indicating or implying relative importance or implicitly indicating the number of indicated technical features.
“压电常数d33”是表征压电材料性能的最常用的重要参数之一,一般陶瓷的压电常数越高,压电性能越好,下标中的第一个数字指的是电场方向,第二个数字指的是应力或应变的方向,“33”表示极化方向与测量时的施力方向相同。"piezoelectric constant d 33 " is one of the most commonly used and important parameters to characterize the performance of piezoelectric materials. Generally, the higher the piezoelectric constant of ceramics, the better the piezoelectric performance. The first number in the subscript refers to the direction of the electric field , the second number refers to the direction of stress or strain, "33" means that the polarization direction is the same as the direction of force applied during measurement.
“机电耦合系数”:压电振子在振动过程中,将机械能转变为电能,或将电能转变为机械能,这种表示压电体中机械能与电能之间相互变换程度的一个参数就称为机电耦合系数,它是衡量压电转换性能优劣的一个综合物理量。平面机电耦合系数Kp,反映薄圆片沿厚度方向极化和电激励,作径向伸缩振动时机电耦合效应的参数。"Electromechanical coupling coefficient": During the vibration process of the piezoelectric vibrator, the mechanical energy is converted into electrical energy, or the electrical energy is converted into mechanical energy. This parameter expressing the degree of mutual transformation between mechanical energy and electrical energy in the piezoelectric body is called electromechanical coupling. Coefficient, which is a comprehensive physical quantity to measure the quality of piezoelectric conversion performance. The plane electromechanical coupling coefficient Kp reflects the polarization and electrical excitation of the thin wafer along the thickness direction, and is a parameter for the electromechanical coupling effect during radial stretching vibration.
本申请一实施方式提供了一种铌酸钾钠系压电陶瓷,该铌酸钾钠系压电陶瓷具有如下通式:(0.96-x)(K0.48Na0.52)Nb0.96Sb0.04O3-0.04(Bi0.5Na0.5)ZrO3-xCaZrO3-0.4%Fe2O3,其中,x为CaZrO3的摩尔分数,0<x≤0.02。An embodiment of the present application provides a potassium-sodium niobate-based piezoelectric ceramic, and the potassium-sodium niobate-based piezoelectric ceramic has the following general formula: (0.96-x)(K 0.48 Na 0.52 )Nb 0.96 Sb 0.04 O 3 - 0.04(Bi 0.5 Na 0.5 )ZrO 3 -xCaZrO 3 -0.4%Fe 2 O 3 , wherein x is the mole fraction of CaZrO 3 , 0<x≤0.02.
上述铌酸钾钠系压电陶瓷,在离子掺杂的三元系组分铌酸钾钠系无铅压电陶瓷引入了CaZrO3为新体系源,提高了压电陶瓷的致密度,在能够保持良好的压电性能的同时,可以使T0-T相变点稳定降到室温,减少正交、四方两相的差异,实现多晶型相变的平稳过渡,使其具有优异的温度稳定性。此外,该铌酸钾钠系压电陶瓷的制备工艺简单,原料无毒无害,适用于工业化大规模生产。The above potassium-sodium niobate series piezoelectric ceramics, CaZrO 3 is introduced as a new system source in the ion-doped ternary component potassium-sodium niobate series lead-free piezoelectric ceramics, which improves the density of the piezoelectric ceramics, and can While maintaining good piezoelectric properties, the T 0-T phase transition point can be stably lowered to room temperature, reducing the difference between the orthogonal and tetragonal phases, and realizing the smooth transition of the polymorphic phase transition, making it excellent temperature stability. sex. In addition, the preparation process of the potassium sodium niobate series piezoelectric ceramics is simple, the raw materials are non-toxic and harmless, and it is suitable for industrialized large-scale production.
在其中一个实施例中,0<x≤0.016。进一步地,0.004≤x≤0.012。In one of the embodiments, 0<x≤0.016. Further, 0.004≤x≤0.012.
具体地,当0<x≤0.016时,上述铌酸钾钠系压电陶瓷的压电常数d33的数值范围在400pC/N~450pC/N,机电耦合系数Kp的数值范围在0.35~0.40,有较高的压电常数d33和较高的机电耦合系数Kp。Specifically, when 0<x≤0.016, the piezoelectric constant d 33 of the above potassium sodium niobate piezoelectric ceramics ranges from 400pC/N to 450pC/N, and the electromechanical coupling coefficient Kp ranges from 0.35 to 0.40. There is a higher piezoelectric constant d 33 and a higher electromechanical coupling coefficient Kp.
在其中一个实施例中,x的值为0.004、0.008或0.012。In one of the embodiments, the value of x is 0.004, 0.008 or 0.012.
在一些实施例中,上述铌酸钾钠系压电陶瓷的最大电极化强度可以达到19μC/cm2~22μC/cm2,其剩余极化强度(Pr)能达到14μC/cm2~16μC/cm2。具体地,剩余极化强度越高,则极化越充分,性能越好。In some embodiments, the maximum electric polarization strength of the potassium sodium niobate-based piezoelectric ceramics can reach 19 μC/cm 2 -22 μC/cm 2 , and the remanent polarization (Pr) can reach 14 μC/cm 2 -16 μC/cm 2 . Specifically, the higher the remanent polarization, the more sufficient the polarization and the better the performance.
具体地,本发明是通过调整x来调整CaZrO3和(K0.48Na0.52)Nb0.96Sb0.04O3的比例,以调整T、O两相比例来改进压电性能。Specifically, the present invention adjusts the ratio of CaZrO 3 and (K 0.48 Na 0.52 )Nb 0.96 Sb 0.04 O 3 by adjusting x to adjust the ratio of T and O to improve piezoelectric performance.
本申请一实施方式还提供了一种铌酸钾钠系压电陶瓷的制备方法,该制备方法包括以下步骤:An embodiment of the present application also provides a method for preparing potassium sodium niobate piezoelectric ceramics, the preparation method comprising the following steps:
以K2CO3、Na2CO3、Nb2O5、Sb2O3、ZrO2、Bi2O3、CaZrO3和Fe2O3为原料,根据上述通式采用固相法制备铌酸钾钠系压电陶瓷。Using K 2 CO 3 , Na 2 CO 3 , Nb 2 O 5 , Sb 2 O 3 , ZrO 2 , Bi 2 O 3 , CaZrO 3 and Fe 2 O 3 as raw materials, niobic acid was prepared by solid-phase method according to the above general formula Potassium-sodium piezoelectric ceramics.
具体地,采用上述化合物为原料可以有效合成铌酸钾钠系压电陶瓷。可以理解的是,在其他实施例中,可以采用其他含有上述化合物元素的碳酸盐和氧化物原料进行铌酸钾钠系压电陶瓷的制备,但其效率可能会降低。Specifically, using the above compounds as raw materials can effectively synthesize potassium sodium niobate piezoelectric ceramics. It can be understood that, in other embodiments, other carbonate and oxide raw materials containing the above-mentioned compound elements can be used for the preparation of potassium and sodium niobate piezoelectric ceramics, but the efficiency thereof may be reduced.
在一些实施例中,上述采用固相法制备铌酸钾钠系压电陶瓷的步骤包括步骤S11、步骤S12、步骤S13、步骤S14、步骤S15、步骤S16和步骤S17。具体地:In some embodiments, the above-mentioned steps of preparing potassium sodium niobate-based piezoelectric ceramics by solid-phase method include step S11 , step S12 , step S13 , step S14 , step S15 , step S16 and step S17 . specifically:
步骤S11:将根据上述通式称取的原料混料球磨得到第一湿法浆料。Step S11: Ball milling the raw material mixture weighed according to the above general formula to obtain a first wet slurry.
在一些实施例中,在步骤S11之前还包括合成CaZrO3的步骤,该合成CaZrO3的步骤包括步骤S01和步骤S02。In some embodiments, a step of synthesizing CaZrO 3 is further included before step S11, and the step of synthesizing CaZrO 3 includes step S01 and step S02.
步骤S01:将CaCO3和ZrO2按照摩尔量(0.8~1.2):1混和,并球磨,得到第一混料。Step S01 : mixing CaCO 3 and ZrO 2 according to the molar amount (0.8-1.2): 1, and ball-milling to obtain a first mixture.
进一步地,在一些实施例中,将CaCO3和ZrO2按照摩尔量1:1混和,并球磨,得到第一混料。Further, in some embodiments, CaCO 3 and ZrO 2 are mixed in a molar amount of 1:1, and ball-milled to obtain a first mixture.
步骤S02:将第一混料烘干后以1480℃~1520℃保温3h~5h,并球磨,烘干,得到CaZrO3粉体。在一个可选的具体示例中,将第一混料烘干后以1500℃保温4h,并再次球磨,烘干得到CaZrO3粉体。具体地,将第一混料烘干的温度为60℃~90℃。Step S02: After drying the first mixture, keep the temperature at 1480°C to 1520°C for 3h to 5h, ball mill and dry to obtain CaZrO 3 powder. In an optional specific example, the first mixture is dried and kept at 1500° C. for 4 hours, and then ball-milled again, and dried to obtain CaZrO 3 powder. Specifically, the temperature at which the first mixture is dried is 60°C to 90°C.
在其中一个实施例中,在称取原料之前,还包括将将K2CO3和Na2CO3进行烘干的步骤。具体地,将K2CO3和Na2CO3放入烘箱中以200℃~250℃烘干2h~5h。In one embodiment, before weighing the raw materials, the step of drying K 2 CO 3 and Na 2 CO 3 is further included. Specifically, K 2 CO 3 and Na 2 CO 3 are put into an oven and dried at 200° C.˜250° C. for 2h˜5h.
步骤S12:将第一湿法浆料烘干后以830℃~870℃初次烧结5h~7h,并二次球磨得到第二湿法浆料。在一个可选的具体示例中,将第一湿法浆料烘干后以850℃初次烧结6h,并二次球磨得到第二湿法浆料。具体地,将第一湿法浆料烘干的温度为60℃~90℃。Step S12 : drying the first wet-process slurry, sintering at 830° C. to 870° C. for 5 h to 7 hours for the first time, and performing secondary ball milling to obtain the second wet-process slurry. In an optional specific example, the first wet-process slurry is dried and initially sintered at 850° C. for 6 hours, and then ball-milled for a second time to obtain the second wet-process slurry. Specifically, the temperature for drying the first wet slurry is 60°C to 90°C.
步骤S13:将第二湿法浆料烘干后研磨得到陶瓷粉体。Step S13: The second wet slurry is dried and ground to obtain ceramic powder.
在一些实施例中,在将第二湿法浆料烘干后研磨后,还包括过筛的步骤。将第二湿法浆料烘干的温度为60℃~90℃。In some embodiments, after the second wet-process slurry is dried and ground, the step of sieving is further included. The temperature for drying the second wet slurry is 60°C to 90°C.
步骤S14:向上述陶瓷粉体中加入3%(w/w)~4%(w/w)的聚乙烯醇溶液,烘干。Step S14: adding 3% (w/w) to 4% (w/w) polyvinyl alcohol solution to the ceramic powder, and drying.
在其中一个实施例中,陶瓷粉体与聚乙烯醇溶液的质量比为10:3。In one embodiment, the mass ratio of the ceramic powder to the polyvinyl alcohol solution is 10:3.
在一些实施例中,烘干的温度为60℃~90℃。In some embodiments, the drying temperature ranges from 60°C to 90°C.
步骤S15:将烘干后的陶瓷粉体研磨后压制成陶瓷胚体。Step S15: Grind the dried ceramic powder and press it into a ceramic embryo.
在一个可选的具体示例中,将烘干后的陶瓷粉体用模具压制成直径为11mm~13mm且厚度为0.8mm~1.2mm的陶瓷胚体。进一步地,在一些实施例中,将烘干后的陶瓷粉体用模具压制成直径为12mm且厚度为1mm的陶瓷胚体。可以理解的是,在其他一些实施例中,陶瓷胚体可以是其他规格。In an optional specific example, the dried ceramic powder is pressed into a ceramic green body with a diameter of 11 mm-13 mm and a thickness of 0.8 mm-1.2 mm by using a mold. Further, in some embodiments, the dried ceramic powder is pressed into a ceramic green body with a diameter of 12 mm and a thickness of 1 mm with a mold. It can be understood that, in other embodiments, the ceramic body can be of other specifications.
在其中一个实施例中,在将烘干后的陶瓷粉体研磨后压制成陶瓷胚体之后,还包括将所述陶瓷胚体以600℃~700℃保温1h~2h进行排胶的步骤。In one embodiment, after the dried ceramic powder is ground and pressed into a ceramic green body, the step of degumming the ceramic green body at a temperature of 600°C to 700°C for 1 hour to 2 hours is further included.
步骤S16:将上述陶瓷配体以1090℃~1100℃再次烧结3h~5h,得到陶瓷制品。Step S16 : sintering the above-mentioned ceramic ligand at 1090° C.˜1100° C. for 3 h˜5 h again to obtain a ceramic product.
步骤S17:将上述陶瓷制品进行被银处理,并在硅油中浸泡进行极化,得到陶瓷成品。Step S17 : the above-mentioned ceramic product is treated with silver, and immersed in silicone oil for polarization to obtain a ceramic product.
具体地,被银处理的步骤包括:在750℃~780℃下保温20min~30min。极化的步骤包括:将被上银电极的陶瓷在室温(25℃±5℃)下硅油浸泡中极化30min,极化电场为3kV/mm。Specifically, the step of being treated with silver includes: keeping the temperature at 750° C.˜780° C. for 20 min˜30 min. The polarizing step includes: polarizing the ceramic covered with silver electrodes in silicone oil immersion for 30min at room temperature (25°C±5°C), and the polarizing electric field is 3kV/mm.
在一些实施例中,上述球磨步骤采用行星式球磨机。可以理解的是,在其他一些实施例中,可以采用其他球磨机进行球磨,以适用于大批量生产。In some embodiments, the above-mentioned ball milling step uses a planetary ball mill. It can be understood that, in other embodiments, other ball mills can be used for ball milling, so as to be suitable for mass production.
在一些实施例中,上述球磨步骤中以无水乙醇为球磨介质,在直径5mm氧化锆球珠和2mm氧化锆球珠的质量比为1:2的条件下进行球珠混合,使原料的质量:混合球珠的质量:无水乙醇的质量为1:8:5,球磨机以400RPM转速球磨8h~15h。具体地,利用直径5mm的氧化锆珠和直径2mm的氧化锆珠混合作为球磨的球磨珠效果最好,可以将粉体磨得更加均匀,有利于材料的性能完整表现和提升。采用该方法制备得到的陶瓷其晶粒之间非常致密,没有气孔。In some embodiments, in the above ball milling step, absolute ethanol is used as the ball milling medium, and the balls are mixed under the condition that the mass ratio of the 5mm diameter zirconia balls and the 2mm zirconia balls is 1:2, so that the quality of the raw materials is : The mass of the mixed balls: the mass of anhydrous ethanol is 1:8:5, and the ball mill is milled at 400RPM for 8h~15h. Specifically, using a mixture of zirconia beads with a diameter of 5mm and zirconia beads with a diameter of 2mm as the ball milling balls has the best effect. The ceramics prepared by this method are very dense among the grains and have no pores.
在一些实施例中,上述烧结的步骤在马弗炉中进行。具体地,马弗炉以3℃/min~5℃/min的速率进行升温。可以理解的是,在其他一些实施例中,可以采用其他热加工装置进行烧结。In some embodiments, the step of sintering above is performed in a muffle furnace. Specifically, the muffle furnace is heated at a rate of 3°C/min to 5°C/min. It is understood that in other embodiments, other thermal processing devices may be used for sintering.
在一些实施例中,上述排胶的步骤在管式炉中进行。具体地,管式炉以3℃/min~5℃/min的速率进行升温。可以理解的是,在其他一些实施例中,可以采用其他热加工装置进行排胶。In some embodiments, the step of debinding described above is performed in a tube furnace. Specifically, the tube furnace is heated at a rate of 3°C/min to 5°C/min. It can be understood that, in other embodiments, other thermal processing devices may be used for debinding.
上述铌酸钾钠系压电陶瓷的制备方法,利用工业原料,无毒无害,采用固相烧结法,其烧结温度较低,易于实现,且工艺简单,可用于工业大规模生产。The above-mentioned preparation method of potassium sodium niobate series piezoelectric ceramics utilizes industrial raw materials, is non-toxic and harmless, adopts a solid-phase sintering method, has a low sintering temperature, is easy to realize, and has a simple process, and can be used for industrial large-scale production.
本申请一实施方式还提供了一种电子设备,包括上述任一实施例所述的铌酸钾钠系压电陶瓷。An embodiment of the present application also provides an electronic device, including the potassium-sodium niobate-based piezoelectric ceramic described in any of the above embodiments.
上述电子设备包括上述铌酸钾钠系压电陶瓷,该铌酸钾钠系陶瓷压电性能优良,且居里温度较高,温度稳定性较好,可在驱动器或传感器方面获得应用,在未来取代铅基压电陶瓷的进程中具有重大意义。The above-mentioned electronic equipment includes the above-mentioned potassium-sodium niobate series piezoelectric ceramics. The potassium-sodium niobate series ceramics have excellent piezoelectric properties, high Curie temperature and good temperature stability, and can be used in drivers or sensors. It is of great significance in the process of replacing lead-based piezoelectric ceramics.
在一些实施例中,电子设备为超声换能器、水声换能器、电声换能器、陶瓷滤波器、陶瓷变压器、陶瓷鉴频器、高压发生器、红外探测器、声表面波器件、电光器件、引燃引爆装置或压电陀螺等。可以理解的是,电子设备不限于上述,还可以是其他包括有上述铌酸钾钠系压电陶瓷的设备。In some embodiments, the electronic device is an ultrasonic transducer, an underwater acoustic transducer, an electroacoustic transducer, a ceramic filter, a ceramic transformer, a ceramic frequency discriminator, a high voltage generator, an infrared detector, a surface acoustic wave device , electro-optical devices, ignition and detonation devices or piezoelectric gyroscopes, etc. It can be understood that the electronic device is not limited to the above, and may also be other devices including the above-mentioned potassium sodium niobate piezoelectric ceramics.
具体实施例specific embodiment
以下结合具体实施例进行详细说明。以下实施例如未特殊说明,则不包括除不可避免的杂质外的其他组分。实施例中采用试剂和仪器如非特别说明,均为本领域常规选择。实施例中未注明具体条件的实验方法,按照常规条件,例如文献、书本中所述的条件或者生产厂家推荐的方法实现。The following describes in detail with reference to specific embodiments. The following examples do not include other components except inevitable impurities unless otherwise specified. Unless otherwise specified, the reagents and instruments used in the examples are routinely selected in the art. The experimental methods for which specific conditions are not indicated in the examples are realized according to conventional conditions, such as conditions described in literatures, books or methods recommended by manufacturers.
实施例1Example 1
制备一种离子掺杂的三元系组分的铌酸钾钠系无铅压电陶瓷材料。A lead-free piezoelectric ceramic material of potassium sodium niobate series with ion-doped ternary components is prepared.
(1)合成CaZrO3:将CaCO3和ZrO2按照摩尔比1:1进行称取,放入球磨罐中,以无水乙醇作为球磨介质,以质量比为1:2的直径5mm的氧化锆珠和直径2mm的氧化锆珠混合作为球磨珠。以原料、球磨珠和无水乙醇的质量比为1:8:4的条件下,在行星式球磨机中以400RPM转速进行初次球磨15h,得到湿法浆料,将球磨好的湿法浆料放入烘箱以80℃烘30min,取出烘干的干粉过75目筛后放入坩埚中,送入箱式马弗炉以1500℃,升温速率为5℃/min保温4h,取出再次球磨,烘干,过75目筛得到CaZrO3粉体。(1) Synthesis of CaZrO 3 : Weigh CaCO 3 and ZrO 2 according to the molar ratio of 1:1, put them into a ball milling jar, use absolute ethanol as the ball milling medium, and use zirconia with a diameter of 5 mm with a mass ratio of 1:2 The beads were mixed with 2 mm diameter zirconia beads as ball milling beads. Under the condition that the mass ratio of raw materials, ball milling beads and absolute ethanol is 1:8:4, the initial ball milling is carried out in a planetary ball mill at 400RPM for 15h to obtain a wet slurry, and the ball-milled wet slurry is placed. Put it into the oven to bake at 80°C for 30min, take out the dried powder and pass it through a 75 mesh sieve, put it in a crucible, send it to a box muffle furnace at 1500°C, and keep the temperature at 5°C/min for 4h, take it out and ball-mill it again, and dry it. , passed through a 75-mesh sieve to obtain CaZrO 3 powder.
(2)计算原料质量:以K2CO3、Na2CO3、Nb2O5、Sb2O3、ZrO2、Bi2O3、CaZrO3、Fe2O3为原料,按照化学式(0.96-x)(K0.48Na0.52)Nb0.96Sb0.04O3-0.04(Bi0.5Na0.5)ZrO3-xCaZrO3-0.4%Fe2O3中x=0.004进行计算所需的各原料的质量。(2) Calculate the quality of raw materials: take K 2 CO 3 , Na 2 CO 3 , Nb 2 O 5 , Sb 2 O 3 , ZrO 2 , Bi 2 O 3 , CaZrO 3 , Fe 2 O 3 as raw materials, according to the chemical formula (0.96 -x) (K 0.48 Na 0.52 )Nb 0.96 Sb 0.04 O 3 -0.04(Bi 0.5 Na 0.5 )ZrO 3 -xCaZrO 3 -0.4% Fe 2 O 3 x=0.004 The mass of each raw material required for calculation.
(3)配料:将K2CO3和Na2CO3置于烘箱220℃下2h烘干去除水分,之后按照计算的原料质量称取,将称取原料放入球磨罐中,以无水乙醇作为球磨介质,以质量比为1:2的直径5mm的氧化锆珠和直径2mm的氧化锆珠混合作为球磨珠,在原料、球磨珠和无水乙醇的质量比为1:8:4的条件下,在行星式球磨机中以400RPM转速进行初次球磨15h,得到湿法浆料。(3) Ingredients: put K 2 CO 3 and Na 2 CO 3 in an oven at 220° C. for 2 hours to dry to remove moisture, then weigh according to the calculated mass of raw materials, put the weighed raw materials into a ball mill, and use anhydrous ethanol As the ball milling medium, zirconia beads with a diameter of 5 mm and zirconia beads with a diameter of 2 mm were mixed with a mass ratio of 1:2, and the mass ratio of raw materials, ball milling beads and absolute ethanol was 1:8:4. Then, in a planetary ball mill at 400RPM rotating speed for 15h primary ball milling, to obtain wet slurry.
(4)初次烧结:将得到的浆料放入烘箱中在80℃烘烤6~8h烘干得到干粉,之后装入坩埚中压紧,盖好坩埚盖,将其送入箱式马弗炉中850℃,升温速率为5℃/min,预烧6h。(4) Primary sintering: put the obtained slurry in an oven at 80°C for 6-8 hours to dry to obtain dry powder, then put it into a crucible and compress it tightly, cover the crucible cover, and send it into a box muffle furnace 850℃, the heating rate is 5℃/min, and the pre-burning is 6h.
(5)二次球磨:将预烧之后的块体粉碎,得到的粉体移入球磨罐中,以无水乙醇作为球磨介质,以质量比为1:2的直径5mm的氧化锆珠和直径2mm的氧化锆珠混合进行第二次球磨,在原料、球磨珠和无水乙醇的质量比为1:8:4的条件下,在行星式球磨机400RPM转速中球磨15h。(5) Secondary ball milling: pulverize the pre-sintered block, and transfer the obtained powder into a ball milling tank, use absolute ethanol as the ball milling medium, and use zirconia beads with a diameter of 5 mm and a diameter of 2 mm with a mass ratio of 1:2. The zirconia beads were mixed for the second ball milling. Under the condition that the mass ratio of raw materials, ball milling beads and absolute ethanol was 1:8:4, ball milling was carried out at a speed of 400RPM in a planetary ball mill for 15h.
(6)烘干过筛:将球磨得到的浆料放入烘箱80℃烘干,对烘干的粉料进行研磨处理,并过75目的筛网,得到粒度较细且颗粒均匀的粉体。(6) Drying and sieving: put the slurry obtained by ball milling into an oven for drying at 80°C, grind the dried powder, and pass it through a 75-mesh sieve to obtain a powder with fine particle size and uniform particle size.
(7)造粒:对研磨过筛处理得到的粉体加入质量分数为3%(w/w)~4%(w/w)的聚乙烯醇溶液,以粉体和聚乙烯醇溶液质量比为10:3,将粉体与聚乙烯醇溶液混合均匀,放入80℃烘箱烘10min把水分烘干,进行研磨处理并过75目的筛网。(7) Granulation: Add a polyvinyl alcohol solution with a mass fraction of 3% (w/w) to 4% (w/w) to the powder obtained by grinding and sieving, and the mass ratio of the powder and the polyvinyl alcohol solution is Mix the powder with the polyvinyl alcohol solution at a ratio of 10:3, put it in an oven at 80°C for 10 minutes to dry the water, grind it, and pass it through a 75-mesh sieve.
(8)压制成型:将过筛处理后得到的粉体利用模具压制成型,获得圆片型陶瓷生胚,陶瓷生胚直径为12mm,厚度为1mm。(8) Press molding: the powder obtained after the sieving treatment is pressed and molded by a mold to obtain a disc-shaped ceramic green embryo, the diameter of the ceramic green embryo is 12 mm and the thickness is 1 mm.
(9)普通烧结:将获得的陶瓷生胚放入管式炉中以650℃,升温速率为3℃/min,烧2h进行排胶处理,排胶后得到的陶瓷生胚放入管式炉中在1100℃下保温4h获得陶瓷制品。(9) Ordinary sintering: put the obtained ceramic green embryos into a tube furnace at 650°C, a heating rate of 3°C/min, and sinter for 2 hours for debinding treatment. The ceramic green embryos obtained after debinding are placed in the tube furnace. Ceramic products were obtained by holding the temperature at 1100 °C for 4 h.
(10)瓷片极化:将得到的陶瓷制品进行被银处理,在780℃下保温30min,被上银电极的陶瓷制品在室温下硅油浸泡中极化30min,极化电场为3kV/mm,经极化后放置24h即得到陶瓷成品。(10) Porcelain polarization: the obtained ceramic products were treated with silver, kept at 780°C for 30 minutes, and the ceramic products with silver electrodes were immersed in silicone oil for 30 minutes at room temperature, and the polarization electric field was 3kV/mm. After being polarized and placed for 24 hours, the finished ceramic product is obtained.
实施例2Example 2
本实施例制备离子掺杂的三元系组分的铌酸钾钠系无铅压电陶瓷材料的步骤与实施例1大致相同,其不同在于,在本实施例的步骤(2)中,化学式中x=0.008。The steps of preparing the ion-doped ternary-based potassium-sodium niobate-based lead-free piezoelectric ceramic material in this example are roughly the same as those in Example 1. The difference is that in step (2) of this example, the chemical formula where x=0.008.
实施例3Example 3
本实施例制备离子掺杂的三元系组分的铌酸钾钠系无铅压电陶瓷材料的步骤与实施例1大致相同,其不同在于,在本实施例的步骤(2)中,化学式中x=0.012。The steps of preparing the ion-doped ternary-based potassium-sodium niobate-based lead-free piezoelectric ceramic material in this example are roughly the same as those in Example 1. The difference is that in step (2) of this example, the chemical formula where x=0.012.
实施例4Example 4
本实施例制备离子掺杂的三元系组分的铌酸钾钠系无铅压电陶瓷材料的步骤与实施例1大致相同,其不同在于,在本实施例的步骤(2)中,化学式中x=0.016。The steps of preparing the ion-doped ternary-based potassium-sodium niobate-based lead-free piezoelectric ceramic material in this example are roughly the same as those in Example 1. The difference is that in step (2) of this example, the chemical formula where x=0.016.
实施例5Example 5
本实施例制备离子掺杂的三元系组分的铌酸钾钠系无铅压电陶瓷材料的步骤与实施例1大致相同,其不同在于,在本实施例的步骤(2)中,化学式中x=0。The steps of preparing the ion-doped ternary-based potassium-sodium niobate-based lead-free piezoelectric ceramic material in this example are roughly the same as those in Example 1. The difference is that in step (2) of this example, the chemical formula where x=0.
测试test
对以上各实施例中制备得到的陶瓷成品进行结构和性能测试,结果如图1~图4以及表1所示。The structures and properties of the ceramic products prepared in the above examples were tested, and the results are shown in Figures 1 to 4 and Table 1.
图1为各实施例中制备得到的陶瓷成品圆片X射线衍射图谱。由图1中左图可知,所有实施例样品均为钙钛矿结构,且无任何杂相。如图1中右图所示,对左图在2θ=45.5°处进行放大分析,双峰共存,说明正交相与四方相在室温下共存,随着x增大,衍射峰逐渐向低角度偏移,说明晶胞膨胀且峰强差越来越大,两相结晶量差距变大,压电效应变差。因此,x不应过大,即锆酸钙的添加量需要在合适的范围内。Fig. 1 is the X-ray diffraction pattern of the finished ceramic wafers prepared in each example. It can be seen from the left image in Fig. 1 that all the samples in the examples are of perovskite structure without any impurity phase. As shown in the right image in Figure 1, the left image is enlarged and analyzed at 2θ=45.5°, and the double peaks coexist, indicating that the orthorhombic phase and the tetragonal phase coexist at room temperature. As x increases, the diffraction peak gradually moves to a lower angle Offset, indicating that the unit cell expands and the peak intensity difference becomes larger and larger, the difference between the two phases of crystallinity becomes larger, and the piezoelectric effect becomes worse. Therefore, x should not be too large, that is, the addition amount of calcium zirconate needs to be within an appropriate range.
图2为各实施例中制备得到的陶瓷成品圆片介电温谱图。从图2中可以看出,随着x的增大,压电陶瓷材料的居里温度逐渐降低,但仍维持在200℃以上。当x=0.016时,其居里温度点对应的压电常数过低,故性能较差。FIG. 2 is a dielectric thermogram of the finished ceramic wafers prepared in each example. It can be seen from Figure 2 that as x increases, the Curie temperature of the piezoelectric ceramic material gradually decreases, but remains above 200 °C. When x=0.016, the piezoelectric constant corresponding to the Curie temperature point is too low, so the performance is poor.
图3为各实施例中制备得到的陶瓷成品圆片在1kHz时测试的电滞回线。从图3中可以看出,在4000V/mm的电场下,压电常数越大,剩余极化强度越大,值可达15.7μC/cm2,高于纯铌酸钾钠(即x=0时)的值,曲线饱和且呈近似矩形。说明在制备上述压电陶瓷的过程中适量掺杂锆酸钙有利于提高压电陶瓷的极化强度。FIG. 3 shows the hysteresis loops of the finished ceramic wafers prepared in each example at 1 kHz. It can be seen from Figure 3 that under the electric field of 4000V/mm, the larger the piezoelectric constant is, the larger the remanent polarization is, and the value can reach 15.7μC/cm 2 , which is higher than that of pure potassium sodium niobate (that is, x=0 ), the curve is saturated and approximately rectangular. It shows that proper doping of calcium zirconate in the process of preparing the above piezoelectric ceramics is beneficial to improve the polarization strength of the piezoelectric ceramics.
图4为各实施例中制备得到的陶瓷成品圆片的介电损耗曲线。从图4中可以看出,随着x的增大,其损耗也是逐渐增大的,说明其晶体缺陷也在增多,不过总体百分比还是处于一个低水平,对陶瓷压电性能影响不大。FIG. 4 is the dielectric loss curve of the finished ceramic wafer prepared in each example. It can be seen from Figure 4 that with the increase of x, the loss also increases gradually, indicating that the crystal defects are also increasing, but the overall percentage is still at a low level, which has little effect on the piezoelectric performance of the ceramic.
表1为各实施例中制备得到的陶瓷成品圆片的压电常数d33、机电耦合系数Kp、机械品质因数Qm、相对介电常数、介电损耗值以及密度统计。Table 1 shows the piezoelectric constant d 33 , the electromechanical coupling coefficient Kp, the mechanical quality factor Qm, the relative permittivity, the dielectric loss value and the density statistics of the ceramic finished wafers prepared in each example.
表1Table 1
通过对比发现,当x=0.008时,其压电常数d33=430pC/N最大,Kp=0.39最大,在其他性能差别不大情况下,优选x=0.008为本体系化学式计量比最优值。By comparison, it is found that when x=0.008, the piezoelectric constant d 33 =430pC/N is the largest, and Kp=0.39 is the largest. In the case of little difference in other properties, x=0.008 is the optimal value for the stoichiometric ratio of the system.
以上所述实施例的各技术特征可以进行任意的组合,为使描述简洁,未对上述实施例中的各个技术特征所有可能的组合都进行描述,然而,只要这些技术特征的组合不存在矛盾,都应当认为是本说明书记载的范围。The technical features of the above-described embodiments can be combined arbitrarily. For the sake of brevity, all possible combinations of the technical features in the above-described embodiments are not described. However, as long as there is no contradiction between the combinations of these technical features, All should be regarded as the scope described in this specification.
以上所述实施例仅表达了本发明的几种实施方式,其描述较为具体和详细,但并不能因此而理解为对发明专利范围的限制。应当指出的是,对于本领域的普通技术人员来说,在不脱离本发明构思的前提下,还可以做出若干变形和改进,这些都属于本发明的保护范围。应当理解的是,在本领域技术人员在本发明提供的技术方案的基础上,通过合乎逻辑的分析、推理或有限的试验得到的技术方案,均在本发明所附权利要求的保护范围内。因此,本发明专利的保护范围应以所附权利要求为准,说明书及附图可以用于解释权利要求的内容。The above-mentioned embodiments only represent several embodiments of the present invention, and the descriptions thereof are specific and detailed, but should not be construed as a limitation on the scope of the invention patent. It should be pointed out that for those of ordinary skill in the art, without departing from the concept of the present invention, several modifications and improvements can also be made, which all belong to the protection scope of the present invention. It should be understood that the technical solutions obtained by those skilled in the art through logical analysis, reasoning or limited experiments on the basis of the technical solutions provided by the present invention are all within the protection scope of the appended claims of the present invention. Therefore, the protection scope of the patent of the present invention should be based on the appended claims, and the description and drawings can be used to explain the content of the claims.
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