CN103360068A - Manganese antimony-doped lead zirconate titanate piezoelectric ceramic - Google Patents
Manganese antimony-doped lead zirconate titanate piezoelectric ceramic Download PDFInfo
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- CN103360068A CN103360068A CN2013102938464A CN201310293846A CN103360068A CN 103360068 A CN103360068 A CN 103360068A CN 2013102938464 A CN2013102938464 A CN 2013102938464A CN 201310293846 A CN201310293846 A CN 201310293846A CN 103360068 A CN103360068 A CN 103360068A
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Abstract
The invention discloses a manganese antimony-doped lead zirconate titanate piezoelectric ceramic and a preparation method thereof. The stoichiometric equation of the manganese antimony-doped lead zirconate titanate piezoelectric ceramic is Pb1.02(Mn1/3Sb2/3)x(Zr0.47Ti0.48)(1-x)/0.95O3, wherein x is 0.01-0.07. According to the manganese antimony-doped lead zirconate titanate piezoelectric ceramic and the preparation method thereof disclosed by the invention, based on the piezoelectric ceramic of the Pb(TiZr)O3 system, a traditional oxide mixing method is adopted, and MnO2 and Sb2O3 are added to regulate the comprehensive performance so as to prepare a high-power piezoelectric ceramic material Pb1.02(Mn1/3Sb2/3)x(Zr0.47Ti0.48)(1-x)/0.95O3 with better comprehensive performance, wherein x is 0.01-0.07, the best sintering temperature is 1,260 DEG C, d33 is 352PC/N, epsilon(r) is 1,689, and tan(delta) is 0.25%. The manganese antimony-doped lead zirconate titanate piezoelectric ceramic disclosed by the invention is mainly applied to high-voltage and high-pressure drive and is widely used in the industries such as information, war industry, electronics, aviation, oil exploration and the like.
Description
Technical field
The invention relates to the ceramic composition take composition as feature, relate in particular to Pb
1.02(Mn
1/3Sb
2/3)
x(Zr
0.47Ti
0.48)
(1-x)/0.95O
3, and the piezoelectric ceramics of x=0.01～0.07 system.
Background technology
Piezoelectric ceramics is the ferroelectric ceramic(s) of processing through artificial polarization, has piezoelectric effect.The material that can produce piezoelectric effect has a lot, comprises piezoelectric ceramics, piezoelectric monocrystal, piezoelectric semiconductor, piezoelectric high polymer, piezo-electricity composite material and piezoelectricity liquid crystal.At present, Pb-based lanthanumdoped zirconate titanates (PZT) piezoelectric ceramics is to use maximum piezoelectrics.Piezoelectric is subject to extensive concern both domestic and external owing to have the characteristics such as reaction is fast, high, the anti-interference intensity of precision is good.Be developed at present aspects such as being applied to supersonic motor, precision driver, and obtained successful application at aspects such as national defence, biomedicine, photoelectron, machinery industries.
In numerous Application Areass, the application of power-type piezoelectric ceramics is increasingly extensive.High-power (tens multikilowatts) ultrasonic cleaning engineerings that Ultrasonic C I coal connection technology in producing such as the high-power emission type ultrasonic transducer, underwater acoustic transducer, piezoelectric transformer, power-type piezoelectric ceramic vibrator, high-power metallic ultra-sonic welded technology, Ultrasonic C VD novel process, the unicircuit that rise rapidly in recent years and Nuclear power plants are supporting etc. are all take the high-performance high-power piezoelectric ceramic as the basis.High-power piezoelectric ceramic is mainly used in high-voltage and high pressure drives.For the Application Areas of different piezoelectrics, its piezoelectric parameter also has different requirements.Material as high-power acoustic-electrical transducer spare mainly applies to PZT (piezoelectric transducer), in actual applications, occupy an leading position with the application of the high-power acoustic-electrical transducer of piezo-electric type, and high-power piezo-electric type transductive material is take piezoelectric ceramics as main.The piezoceramic material that is suitable for doing transverter has three major types, the first kind is for stupalith dynamo-electric and the electroacoustic conversion, these piezoceramic materials have higher electromechanics misfortune syzygy number, under quasistatic, if do not have extra wide and special narrow frequency bandwidth requirement, the amplitude of signal belong to little then can be with this class piezoceramic material during to medium class.There is specific inductivity to be respectively (1000～2000) and (2000～5000) two classes in this class material.The Equations of The Second Kind material is low Qm value broadband piezoceramic material.This class material has the characteristics of low Qm value, can make the good especially ultrasonic transducer of performance, on testing of materials equipment and ultrasonic analysis equipment, it is very high that the specific inductivity of these materials has, about 3000, what have is very low about 300, and impedance energy and the required frequency of these materials are complementary.The 3rd class material is high power piezoelectric ceramic material and ignition and blasting piezoceramic material, general piezoelectric ceramics, because the loss of the motion (lag-effect) of electricdomain is large and its loss also sharply increases with the change of the intensity of electric field and mechanical stress, and more and more significant, high-power lower, pottery can generate heat, even burnt, in high-power ceramic, owing to added special hotchpotch, the electricdomain motion is relatively stable, and ceramic plate can be in high-power lower normal operation.Underwater acoustic transducer can be divided into emissivity and reception type and transmitting-receiving and have totally three kinds concurrently.For emission type transverter piezoceramic material, at first to satisfy high-power, high efficiency requirement, require material that high piezoelectric constant is arranged, high dynamo-electric misfortune syzygy number and high-k, require on the other hand material that high coercivity electric field ec is arranged, physical strength is good, dielectric loss tan δ, mechanic quality factor.Practice shows, can pass through suitable formula adjustment, the performance of pottery is controlled effectively, to adapt to different application.
PZT is perovskite structure, is isometric system more than Curie temperature, and following generation of Curie temperature changes mutually, and be mutually tripartite and Tetragonal this moment.Present over-all properties is: dielectric loss is about 0.3～0.4%, and namely dielectric loss is higher; d
33Be 300～330pC/N, namely piezo-electric modulus is less than normal, so its performance still has the space of further lifting, and manganese antimony codoped is expected to improve its over-all properties.
Summary of the invention
Purpose of the present invention, to solve the drawback that the lead titanate piezoelectric ceramics piezo-electric modulus is less than normal, dielectric loss is higher, on the basis of lead lanthanum zirconate titanate (PLZT) electrooptical ceramics material, carrying out rational manganese antimony mixes, the high power piezoelectric ceramic material that can be applicable to underwater acoustic transducer that a kind of piezo-electric modulus is higher, loss is little is provided
The present invention is achieved by following technical solution.
The lead titanate piezoelectric ceramics that a kind of manganese antimony mixes, its stoichiometric equation is:
Pb
1.02(Mn
1/3Sb
2/3) x (Zr
0.47Ti
0.48)
(1-x)/0.95O
3, x=0.01 in the formula～0.07;
The preparation method of the lead titanate piezoelectric ceramics that this manganese antimony mixes has following steps:
(1) batching
With raw material Pb
3O
4, ZrO
2, TiO
2, MnO
2, Sb
2O
3Press Pb
1.02(Mn
1/3Sb
2/3)
x(Zr
0.47Ti
0.48)
(1-x)/0.95O
3, and the stoichiometric ratio of x=0.01～0.07, put into ball grinder after the mixing; Ball-milling medium is deionized water and zirconia ball, ball: material: the weight ratio of water is 2:1:0.6; Again compound is put into respectively baking oven in 90 ℃ of oven dry, then put into mortar and grind, cross 40 mesh sieves;
(2) synthetic
With the powder after sieving in the step (1), put into crucible, compacting is added a cover, sealing, synthetic respectively at 900 ℃ in synthetic furnace, insulation 2h naturally cools to room temperature, comes out of the stove;
(3) secondary ball milling
The synthetic material of step (2) is put into the ball grinder ball mill pulverizing, again the synthetic material behind the ball milling is put into baking oven in 90 ℃ of oven dry, then put into mortar and grind, cross 40 mesh sieves;
(4) compressing tablet
Powder after step (3) sieved, the polyvinyl alcohol water solution that adds mass percent and be 7wt.% carries out granulation, it is smashed to pieces again, and compression moulding is blank;
(5) binder removal
The blank of step (4) is put into retort furnace, be warming up to 650 ℃ with the speed of 5 ℃/min, insulation 1h, and in 400 ℃ of insulation 0.5h, carry out organism and get rid of;
(6) sintering
Blank behind step (5) binder removal is placed on Al
2O
3On the backing plate, bury burning with bedding and padding, be warming up to 1180 ℃～1280 ℃ sintering with the temperature rise rate of 5 ℃/min, insulation 2h naturally cools to room temperature with stove, makes chemical formula and is: Pb
1.02(Mn
1/3Sb
2/3)
x(Zr
0.47Ti
0.48)
(1-x)/0.95O
3, and the piezoelectric ceramics of x=0.01～0.07;
(7) silver ink firing
Ceramic plate behind step (6) sintering polishing to smooth and even thickness is consistent, by silver, will be put into baking oven in oven dry more than 100 ℃ by the ceramic plate behind the silver, under 735 ℃, carry out burning infiltration and process;
(8) polarization
With the processing that polarizes of the ceramic plate behind step (7) silver ink firing, polarization condition is specially: the polarization temperature: 140 ℃, and polarized electric field: 3kv/mm;
(9) test piezoelectricity dielectric properties
With the piezoelectric ceramic piece after step (8) polarization, after room temperature leaves standstill 24h, test its piezoelectric property and dielectric properties.
Its best stoichiometric equation is: Pb
1.02(Mn
1/3Sb
2/3)
x(Zr
0.47Ti
0.48)
(1-x)/0.95O
3,, wherein x is 0.05.
The Ball-milling Time of described step (1) is 3h, and drum's speed of rotation is 750 rev/mins.
The Ball-milling Time of described step (3) is 4h, and drum's speed of rotation is 750 rev/mins.
The pressure of described step (4) compression moulding is 420MPa.
The blank of described step (4) compression moulding is diameter 10mm, the cylindric blank of thickness 1～2mm.
The preferred sintering temperature of described step (6) is 1260 ℃.
The polishing thickness of the ceramic plate behind the sintering of described step (7) is 1mm.
The present invention is take the binary system piezoelectric ceramics of PZT system as the basis, adopts the mode that adds manganese antimony codoped to improve the over-all properties of PZT piezoelectric ceramics, by adjustment and the improvement of prescription with technique, has prepared the Pb with better over-all properties
1.02(Mn
1/3Sb
2/3)
x(Zr
0.47Ti
0.48)
(1-x)/0.95O
3, x=0.01 in the formula～0.07; Microwave ceramics of the present invention, its piezoelectric property and dielectric properties are: d
33=352PC/N, ε
r=1689, tan δ=0.25%.
Description of drawings
Fig. 1 is piezo-electric modulus collection of illustrative plates of the present invention;
Fig. 2 is specific inductivity collection of illustrative plates of the present invention;
Fig. 3 is dielectric loss collection of illustrative plates of the present invention.
Embodiment
The raw material Pb that the present invention adopts
3O
4, ZrO
2, TiO
2, MnO
2And Sb
2O
3, be commercially available chemical pure raw material (purity 〉=99%).
Preparation method of the present invention is as follows:
(1) batching
With raw material Pb
3O
4, ZrO
2, TiO
2, MnO
2, Sb
2O
3Press Pb
1.02(Mn
1/3Sb
2/3)
x(Zr
0.47Ti
0.48)
(1-x)/0.95O
3, and the preferred x value of x=0.01～0.07(is 0.05) stoichiometric ratio, put into ball grinder after the mixing, Ball-milling Time is 3h, drum's speed of rotation is 750 rev/mins; Ball-milling medium is deionized water and zirconia ball, ball: material: the weight ratio of water is 2:1:0.6; Again compound is put into respectively baking oven in 90 ℃ of oven dry, then put into mortar and grind, cross 40 mesh sieves;
(2) synthetic
With the powder after sieving in the step (1), put into crucible, compacting is added a cover, sealing, synthetic respectively at 900 ℃ in synthetic furnace, insulation 2h naturally cools to room temperature, comes out of the stove;
(3) secondary ball milling
With the synthetic material of step (2), put into the ball grinder ball mill pulverizing, Ball-milling Time is 4h, drum's speed of rotation is 750 rev/mins; Again the synthetic material behind the ball milling is put into baking oven in 90 ℃ of oven dry, then put into mortar and grind, cross 40 mesh sieves;
(4) compressing tablet
Powder after step (3) sieved, the polyvinyl alcohol water solution that adds mass percent and be 7wt.% carries out granulation, it is smashed to pieces again, and compression moulding is diameter 10mm, and the cylindric blank of thickness 1～2mm, typed pressure are 420MPa;
(5) binder removal
The blank of step (4) is put into retort furnace, be warming up to 650 ℃ with the speed of 5 ℃/min, insulation 1h, and in 400 ℃ of insulation 0.5h, carry out organism and get rid of;
(6) sintering
Blank behind step (5) binder removal is placed on Al
2O
3On the backing plate, bury burning with bedding and padding, be warming up to 1220 ℃～1280 ℃ sintering with the temperature rise rate of 5 ℃/min, insulation 2h naturally cools to room temperature with stove, makes chemical formula and is: Pb
1.02(Mn
1/3Sb
2/3)
x(Zr
0.47Ti
0.48)
(1-x)/0.95O
3, and the piezoelectric ceramics of x=0.01～0.07;
(7) silver ink firing
The polishing of ceramic plate behind step (6) sintering to smooth and even thickness consistent (1mm), by silver, will be put into baking oven in oven dry more than 100 ℃ by the ceramic plate behind the silver, under 735 ℃, carry out burning infiltration and process;
(8) polarization
With the processing that polarizes of the ceramic plate behind step (7) silver ink firing, polarization condition is specially: the polarization temperature: 140 ℃, and polarized electric field: 3kv/mm;
(9) test piezoelectricity dielectric properties
Piezoelectric ceramic piece with after step (8) polarization leaves standstill 24h in room temperature, uses quasistatic d
33Survey meter, ZJ-3A are tested its d
33, using the LCR survey meter, XC2810A tests its tan δ.
The specific embodiment of the invention is as follows:
X=0.01, sintering temperature is 1220 ℃, 1240 ℃, 1260 ℃, 1280 ℃, is designated as respectively embodiment 1-1,1-2,1-3,1-4;
X=0.03, sintering temperature is 1220 ℃, 1240 ℃, 1260 ℃, 1280 ℃, is designated as respectively embodiment 2-1,2-2,2-3,2-4;
X=0.05, sintering temperature is 1220 ℃, 1240 ℃, 1260 ℃, 1280 ℃, is designated as respectively embodiment 3-1,3-2,3-3,3-4;
X=0.07, sintering temperature is 1220 ℃, 1240 ℃, 1260 ℃, 1280 ℃, is designated as respectively embodiment 4-1,4-2,4-3,4-4;
The piezoelectric property of above-described embodiment and dielectric properties test result see table 1 for details.
Table 1
Embodiment 3-4 is most preferred embodiment, when x=0.05, and when sintering temperature is 1260 ℃, d
33=352PC/N, ε
r=1689, tan δ=0.25%.
Fig. 1 shows, observed as can be known by figure, be total to volume for different Mn, Sb, the piezo-electric modulus of all samples is along with the rising of temperature all shows as first increases and then decreases, when sintering temperature is 1260 ℃, the piezo-electric modulus of each prescription all reaches maximum value under this temperature, and this shows that 1260 ℃ is best sintering temperature, because little in this temperature, densified sintering product, grain growing is good, is conducive to polarization, d
33Reach extreme value; Piezo-electric modulus is along with the increase of Mn, Sb content presents the trend of first increases and then decreases, as (Mn
1/3Sb
2/3During)=5%, the d of this moment
33Arrive maximum, be 352PC/N.This is because Sb
5+Ionic radius less, enter Pb (TiZr) O
3Be in the B position behind the sosoloid, make material producing bullion lead room, owing to plumbous vacant appearance, the carrying out easily of change so that electricdomain is moved, thus increase along the number on the farmland that direction of an electric field is orientated.Thereby increased remnant polarization, so that piezoelectric effect increases.And work as (Mn
1/3Sb
2/3) content when continue increasing because its phase is away from accurate homotype phase boundary, piezoelectric property worsens, d
33Reduce.
Fig. 2 shows, observed as can be known by figure, be total to volume for different Mn, Sb, the specific inductivity of all samples is along with the rising of temperature all shows as first increases and then decreases, when sintering temperature is 1260 ℃, the specific inductivity of each prescription all reaches maximum value under this temperature, and this shows that 1260 ℃ is best sintering temperature, because little in this temperature, densified sintering product, grain growing is good, is conducive to polarization, and dielectric properties are best; Specific inductivity is along with the increase of Mn, Sb content presents the trend of first increases and then decreases.Generally speaking, ε
rRelevant with donor doping, grain morphology and lattice distortion.Donor doping can effectively reduce the concentration in oxygen room, improves the mobility on farmland, makes ε
rIncrease.When Sb content was low, crystal grain was less, and the crystal lattice distortion degree is little, and void content is also lower, and the domain wall movability will be strong, ε
rShow as the trend of increase.Along with the increase of Sb content, the lattice distortion degree increases, and Grain-Boundary Phase and pore increase gradually, to the effect of the clamping down on enhancing of domain wall, so that ε
rReduce.As (Mn
1/3Sb
2/3During)=5%, the ε of this moment
rArriving maximum, take second place when reaching 1732,1260 ℃ of sintering of maximum value during 1280 ℃ of sintering, is 1689.
Fig. 3 shows, observed as can be known by figure, for different Mn, Sb volume altogether, the dielectric loss of all samples reduces first rear increase along with the rising of temperature all shows as, when sintering temperature is 1260 ℃, the dielectric loss of each prescription all reaches minimum value under this temperature, and this shows that 1260 ℃ is best sintering temperature, because little in this temperature, densified sintering product, grain growing is good, is conducive to polarization, and it is minimum that dielectric loss reaches; The dielectric loss value is along with (Mn
1/3Sb
2/3) increase of doping reduces first rear increase, Mn
2+Enter Pb (TiZr) O
3Be in the B position behind the sosoloid, make the material production oxygen vacancy, oxygen vacancy causes that structure cell shrinks and distorts, and causes the reduction of dielectric loss.As (Mn
1/3Sb
2/3During)=3%, the phase of material is positioned at Tetragonal, and dielectric loss is lower, with (Mn
1/3Sb
2/3) increase of doping, the composition of phase is positioned at accurate homotype phase boundary, and dielectric loss increases slightly, is 0.25%.
The high power piezoelectric ceramic material of the present invention's preparation is mainly used in high-voltage and high pressure drives, the dielectric loss that it is lower and higher piezoelectricity dielectric properties can satisfy the needs of practical application well, are used widely in industries such as information, military project, electronic apparatus, aviation, petroleum prospectings.
Above-mentioned description to embodiment is to be convenient to those skilled in the art can understand and apply the invention.The person skilled in the art obviously can easily make various modifications to these embodiment, and needn't pass through performing creative labour being applied in the General Principle of this explanation among other embodiment.Therefore, the invention is not restricted to the embodiment here, those skilled in the art should be within protection scope of the present invention for improvement and modification that the present invention makes according to announcement of the present invention.
Claims (8)
1. the lead titanate piezoelectric ceramics that mixes of a manganese antimony, its stoichiometric equation is:
Pb
1.02(Mn
1/3Sb
2/3)
x(Zr
0.47Ti
0.48)
(1-x)/0.95O
3, x=0.01 in the formula～0.07;
The preparation method of the lead titanate piezoelectric ceramics that this manganese antimony mixes has following steps:
(1) batching
With raw material Pb
3O
4, ZrO
2, TiO
2, MnO
2, Sb
2O
3Press Pb
1.02(Mn
1/3Sb
2/3)
X(Zr
0.47Ti
0.48)
(1-x)/0.95O
3, and the stoichiometric ratio of x=0.01～0.07, put into ball grinder after the mixing; Ball-milling medium is deionized water and zirconia ball, ball: material: the weight ratio of water is 2:1:0.6; Again compound is put into respectively baking oven in 90 ℃ of oven dry, then put into mortar and grind, cross 40 mesh sieves;
(2) synthetic
With the powder after sieving in the step (1), put into crucible, compacting is added a cover, sealing, synthetic respectively at 900 ℃ in synthetic furnace, insulation 2h naturally cools to room temperature, comes out of the stove;
(3) secondary ball milling
The synthetic material of step (2) is put into the ball grinder ball mill pulverizing, again the synthetic material behind the ball milling is put into baking oven in 90 ℃ of oven dry, then put into mortar and grind, cross 40 mesh sieves;
(4) compressing tablet
Powder after step (3) sieved, the polyvinyl alcohol water solution that adds mass percent and be 7wt.% carries out granulation, it is smashed to pieces again, and compression moulding is blank;
(5) binder removal
The blank of step (4) is put into retort furnace, be warming up to 650 ℃ with the speed of 5 ℃/min, insulation 1h, and in 400 ℃ of insulation 0.5h, carry out organism and get rid of;
(6) sintering
Blank behind step (5) binder removal is placed on Al
2O
3On the backing plate, bury burning with bedding and padding, be warming up to 1180 ℃～1280 ℃ sintering with the temperature rise rate of 5 ℃/min, insulation 2h naturally cools to room temperature with stove, makes chemical formula and is: Pb
1.02(Mn
1/3Sb
2/3)
x(Zr
0.47Ti
0.48)
(1-x)/0.95O
3, and the piezoelectric ceramics of x=0.01～0.07;
(7) silver ink firing
Ceramic plate behind step (6) sintering polishing to smooth and even thickness is consistent, by silver, will be put into baking oven in oven dry more than 100 ℃ by the ceramic plate behind the silver, under 735 ℃, carry out burning infiltration and process;
(8) polarization
With the processing that polarizes of the ceramic plate behind step (7) silver ink firing, polarization condition is specially: the polarization temperature: 140 ℃, and polarized electric field: 3kv/mm;
(9) test piezoelectricity dielectric properties
With the piezoelectric ceramic piece after step (8) polarization, after room temperature leaves standstill 24h, test its piezoelectric property and dielectric properties.
2. the lead titanate piezoelectric ceramics that mixes of according to claim 1 manganese antimony is characterized in that described Pb
1.02(Mn
1/3Sb
2/3)
x(Zr
0.47Ti
0.48)
(1-x)/0.95O
3, wherein the preferred x value of x=0.01～0.07 is 0.05.
3. the lead titanate piezoelectric ceramics that mixes of according to claim 1 manganese antimony is characterized in that the Ball-milling Time of described step (1) is 3h, and drum's speed of rotation is 750 rev/mins.
4. the lead titanate piezoelectric ceramics that mixes of according to claim 1 manganese antimony is characterized in that the Ball-milling Time of described step (3) is 4h, and drum's speed of rotation is 750 rev/mins.
5. the lead titanate piezoelectric ceramics that mixes of according to claim 1 manganese antimony is characterized in that the pressure of described step (4) compression moulding is 420MPa.
6. the lead titanate piezoelectric ceramics that mixes of according to claim 1 manganese antimony is characterized in that the blank of described step (4) compression moulding is diameter 10mm, the cylindric blank of thickness 1～2mm.
7. the lead titanate piezoelectric ceramics that mixes of according to claim 1 manganese antimony is characterized in that the preferred sintering temperature of described step (6) is 1260 ℃.
8. the lead titanate piezoelectric ceramics that mixes of according to claim 1 manganese antimony is characterized in that the polishing thickness of ceramic plate is 1mm behind described step (7) sintering.
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| CN107382282A (en) * | 2017-09-20 | 2017-11-24 | 贵州丛源电子科技有限公司 | A kind of piezoelectric ceramics and preparation method thereof |
| CN107892567A (en) * | 2017-11-03 | 2018-04-10 | 北京工业大学 | One kind (Bi1/2K1/2)TiO3Base binary leadless piezoelectric ceramics and its preparation |
| CN113651615A (en) * | 2021-09-23 | 2021-11-16 | 无锡邦能超声科技有限公司 | Piezoceramic material and high-stability ultrasonic transducer |
| CN115417671A (en) * | 2022-07-07 | 2022-12-02 | 南京航空航天大学 | Lead zirconate titanate based piezoelectric ceramic for high-power scene and preparation method thereof |
| CN116082038A (en) * | 2022-04-26 | 2023-05-09 | 西安交通大学 | Preparation method of novel ferroelectric ceramic |
| CN116354718A (en) * | 2023-03-29 | 2023-06-30 | 南京理工大学 | Antimony manganese-lead zirconate titanate-based piezoelectric ceramic material and preparation method thereof |
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| CN104483014A (en) * | 2014-11-07 | 2015-04-01 | 东莞思威特电子有限公司 | Large power ultrasonic sensor |
| CN104483014B (en) * | 2014-11-07 | 2017-07-07 | 广东思威特智能科技股份有限公司 | A kind of large power supersonic wave sensor |
| CN107382282A (en) * | 2017-09-20 | 2017-11-24 | 贵州丛源电子科技有限公司 | A kind of piezoelectric ceramics and preparation method thereof |
| CN107892567A (en) * | 2017-11-03 | 2018-04-10 | 北京工业大学 | One kind (Bi1/2K1/2)TiO3Base binary leadless piezoelectric ceramics and its preparation |
| CN107892567B (en) * | 2017-11-03 | 2020-12-04 | 北京工业大学 | (Bi)1/2K1/2)TiO3Base binary leadless piezoelectric ceramic and preparation thereof |
| CN113651615A (en) * | 2021-09-23 | 2021-11-16 | 无锡邦能超声科技有限公司 | Piezoceramic material and high-stability ultrasonic transducer |
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| CN116354718A (en) * | 2023-03-29 | 2023-06-30 | 南京理工大学 | Antimony manganese-lead zirconate titanate-based piezoelectric ceramic material and preparation method thereof |
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