CN104483014B - A kind of large power supersonic wave sensor - Google Patents
A kind of large power supersonic wave sensor Download PDFInfo
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- CN104483014B CN104483014B CN201410623651.6A CN201410623651A CN104483014B CN 104483014 B CN104483014 B CN 104483014B CN 201410623651 A CN201410623651 A CN 201410623651A CN 104483014 B CN104483014 B CN 104483014B
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Abstract
A kind of large power supersonic wave sensor, is related to piezoelectric ceramics and ultrasonic sensor technology.Including metal cylinder, piezoelectric ceramic piece and circuit board；Magnesia, scandium oxide, di-iron trioxide and alundum (Al2O3) are additionally added in the raw material for producing piezoelectric ceramic piece；Piezoelectric ceramic piece is Nian Jie with high temperature resistant adhesive with the base plate of metal cylinder, and the one side of piezoelectric ceramic piece passes through one layer of high temperature resistant adhesive of silk-screen printing；The diameter dimension of the metal cylinder is not less than 25 millimeters.Therefore ceramic material properties become " hard ", the heat that piezoelectric ceramic piece is operationally produced will not cause depolarization, make piezoelectric ceramics more stable in hot operation.In a word, inventive can be substantially improved, its KP (electromechanical coupling factor) >=60%, Tang (loss)≤0.5%, ∑ (dielectric constant)=1700 ± 200, QM (quality factor)=1100 ± 200.
Description
Technical field
The present invention relates to piezoelectric ceramics and ultrasonic sensor technology, espespecially a kind of large power supersonic wave sensor.
Background technology
Ultrasonic sensor is the sensor component developed using the piezoelectricity of piezoelectric ceramics, is widely used to work
The automatic opening-closing device of industry, information industry, guard against theft and alarm system, door, reversing automobile sensor, various electronic equipment beepboxs
Deng.When an electric signal is added on piezoelectric ceramic piece, it can produce deformation, cause sensor vibration face to send ultrasonic wave.When super
When sound wave encounters barrier, ultrasonic reflections are received back through sensor and act on piezoelectric ceramic piece, according to inverse piezoelectric effect,
Ultrasonic sensor produces an electric signal output.Using ultrasonic wave in the constant principle of same Propagation speed, according to
Time difference between transmitting and reception signal, so as to judge the distance of barrier.Ultrasonic wave encounters impurity or interface can be produced
Raw back wave, encounters mobile object and produces Doppler effect.Ultrasonic sensor is a kind of bilateral transducer, and it can be by electrically
Mechanical oscillation can be changed into and produce ultrasonic wave, while when it receives ultrasonic wave, also mechanical energy can be changed into electric energy.Ultrasound
Wave sensor detects the back wave from certain object to ultrasonic wave of the transmitting higher than 20KHz in air.
A kind of existing ultrasonic sensor for dispersing the animals such as vagrant dog, the sensor emission goes out 20KHz frequencies above
Super ultrasonic wave, can feel extremely uncomfortable when the auditory system of animal hears this signal, quickly leave.The sensor metal cylinder
Diameter is generally 10 ~ 18 mm, and the thickness of the base plate of metal cylinder is generally 0.8 ~ 1.0 mm, and voltage 9V test 10CM distances are passed
The sound pressure level of sensor is 105DB, and piezoelectric ceramic piece and metal cylinder are typically bonded as bonding agent using epoxy glue.
In actual applications, there is following three problem in the existing ultrasonic sensor for dispersing the animals such as vagrant dog：
First, due to piezoelectric ceramics temperature characterisitic reason, when the temperature of piezoelectric ceramics surrounding enviroment is higher, its piezoelectricity pottery
The piezoelectric property of porcelain is decayed more severe, when temperature reaches piezoelectric ceramics Curie temperature, can produce depolarization, causes piezoelectricity to be made pottery
Porcelain is without piezoelectric property.
Second, because bonding piezoelectric ceramic piece is generally 80 ~ 100 DEG C with the resistance to temperature of holding of the bonding agent of metal shell, easily
Make bonding agent aging, cause piezoelectric ceramic piece Nian Jie with metal shell insecure, or even produce the phenomenon such as come off, also cause sensing
Device can not work.
Third, existing ultrasonic sensor diameter is small, the ultrasonic wave sound pressure level launched is small, it is impossible to plays and drives well
Effect.
The content of the invention
The technical problem to be solved in the invention is overcome the existing ultrasonic sensor for dispersing the animals such as vagrant dog upper
State deficiency, there is provided a kind of large power supersonic wave sensor.A kind of power of large power supersonic wave sensor is big, the acoustic pressure of transmitting
Value is improved, and stability is good.
Therefore, a kind of large power supersonic wave sensor of the invention uses following technical proposals：
A kind of large power supersonic wave sensor, including metal cylinder, piezoelectric ceramic piece and circuit board；One end of metal cylinder
Base plate is formed with, base plate is overall structure with metal cylinder, and the other end of metal cylinder is in open state；Circuit board and metal cylinder
The other end is equipped with；Piezoelectric ceramic piece is connected with circuit board conductive；
The material composition for producing piezoelectric ceramic piece is：
The oxide of lead, molecular formula is [Pb (Mn1/3Sb2/3)O3]0.045-[PbTiO3]0.4716-[PbZrO3]0.4834；
The oxide of nickel, molecular formula is NiO, and its weight is the 0.01% of the oxide of lead；
The oxide of cerium, molecular formula is CeO2, its weight is the 0. 02% of the oxide of lead；
The oxide of cobalt, molecular formula is CO2O3, its weight is the 0.01% of the oxide of lead；
And magnesia, scandium oxide, di-iron trioxide and alundum (Al2O3), magnesia, scandium oxide, di-iron trioxide and three
The consumption of Al 2 O respectively accounts for the 0.2%~0.6% of the oxide weight of lead.
Above-mentioned technical proposal is further elaborated：
Piezoelectric ceramic piece is Nian Jie with the base plate of metal cylinder, its bonding agent be high temperature resistant adhesive, its bonding method be,
The one side of piezoelectric ceramic piece is glued piezoelectric ceramic piece with the base plate of metal cylinder by one layer of high temperature resistant adhesive of silk-screen printing
Patch, is pressurizeed by external force and bonds the base plate of piezoelectric ceramic piece and metal cylinder, is then placed in heating 100~150 DEG C in baking oven
Solidification, 3~5 hours time, causes piezoelectric ceramic piece Nian Jie with the base plate of metal cylinder firmly, and conducting turns into an electrode surface.
The diameter dimension of the metal cylinder is not less than 25 millimeters, to improve the sound pressure level of ultrasonic sensor transmitting.
The circuit board is also equipped with contact pin, and contact pin connects with the control circuit of the device using large power supersonic wave sensor
Connect, to control high-power ultrasonics working sensor.
A kind of working mechanism of large power supersonic wave sensor of the invention is described below：
Lead titanate piezoelectric ceramics slice prescription is improved, magnesia, scandium oxide, di-iron trioxide and three oxidations are added
Two aluminium, ceramic material properties become " hard ", and the heat for causing piezoelectric ceramic piece operationally to produce will not cause depolarization.Oxidation
The presence of magnesium, scandium oxide, di-iron trioxide and alundum (Al2O3) is not to cause lead vacant, and plays oxygen vacancy.Such as K+Into original
Carry out Pb 2+Position, Mg2+、Sc 3+、Fe 3+It is original Deng entering（Ti, Zr）4+Position, in order to maintain the electroneutral of structure cell,
Need to make total valence mumber of the anion in structure cell to make corresponding reduction, then produce oxygen vacancy.When K+ instead of Pb2+When, often
2 ions produce an oxygen vacancy.And Mg2+Substitution（Ti, Zr）4+When be also that every 2 ions produce an oxygen vacancy.And
Mg 2+Substitution（Ti, Zr）4+When, then 1 Mg2+Produce an oxygen vacancy.From Mg2+Displacement apparently, may both replace Pb2 +Can also replace（Ti, Zr）4+.Although all of Mg can not be said2+Person enters（Ti, Zr）4+Position, but its property
Change explanation, have considerable Mg2+It is to be in（Ti, Zr）4+Position, for example, PZT ceramics in be not added with Fe3+Sample
Product and addition Fe3+Sample compare, 5H is not incubated equally at 1260 DEG C and is burnt till, not plus Fe3+Sample average grain diameter be
5.5 microns, mechanical quality factor QM is 300.Add 0.3%Fe2O3Sample, average grain diameter be 2.7 microns, mechanical quality
Factor QM brings up to 800.
A kind of large power supersonic wave sensor of the invention has the beneficial effect that：
1st, by adjusting piezoelectric ceramics slice prescription, magnesia, scandium oxide, di-iron trioxide and three oxidations two are added
Aluminium, can improve the Curie temperature of piezoelectric ceramics, reduce dielectric constant, and reduce loss, mechanical quality factor QM is improved, and resistivity is carried
It is high, make piezoelectric ceramics more stable in hot operation.It is not in depolarization phenomenon.
2nd, metal cylinder with diameter greater than 25mm, wall thickness is 0.3mm, is highly 11mm, voltage 9Vrms test 10cm away from
From sound pressure level be 115DB.10DB is improved under the same conditions.
3rd, piezoelectric ceramic piece is Nian Jie with the base plate of metal cylinder, and its bonding agent is high temperature resistant adhesive, works as working sensor
When the heat that produces reach 120~200 DEG C, this bonding agent is fully able to bear, and bonding agent will not be aging, can keep piezoelectric ceramics
Piece is Nian Jie with metal cylinder firmly, piezoelectric ceramic piece is launched ultrasound in passing through metal cylinder during the higher-order of oscillation to air
The stream time of ripple is lengthened.
Electrical property is as follows:
4th, the performance of ultrasonic sensor of the present invention is substantially improved, its KP (electromechanical coupling factor) >=60%,
Tang (loss)≤0.5%, ∑ (dielectric constant)=1700 ± 200, QM (quality factor)=1100 ± 200.
Brief description of the drawings
Fig. 1 is decomposing schematic representation of the present invention；
Fig. 2 is schematic perspective view of the present invention.
In figure：1st, metal cylinder；11st, base plate；2nd, piezoelectric ceramic piece；3rd, circuit board；4th, contact pin.
Specific embodiment
Specific embodiment of the invention is introduced below in conjunction with the accompanying drawings.
Embodiment one
As shown in Figure 1 to Figure 2, a kind of large power supersonic wave sensor, including metal cylinder 1, piezoelectric ceramic piece 2 and circuit
Plate 3；One end of metal cylinder 1 is formed with base plate 11, and base plate 11 is overall structure with metal cylinder 1, and the other end of metal cylinder 1 is in
Open state；Circuit board 3 is equipped with the other end of metal cylinder 1；Piezoelectric ceramic piece 2 is conductively connected with circuit board 3；
The material composition for producing piezoelectric ceramic piece is：
The oxide of lead, molecular formula is [Pb (Mn1/3Sb2/3)O3]0.045-[PbTiO3]0.4716-[PbZrO3]0.4834；
The oxide of nickel, molecular formula is NiO, and its weight is the 0.01% of the oxide of lead；
The oxide of cerium, molecular formula is CeO2, its weight is the 0. 02% of the oxide of lead；
The oxide of cobalt, molecular formula is CO2O3, its weight is the 0.01% of the oxide of lead；
And magnesia, scandium oxide, di-iron trioxide and alundum (Al2O3), magnesia, scandium oxide, di-iron trioxide and three
The consumption of Al 2 O respectively accounts for the 0.2% of the oxide weight of lead.
Piezoelectric ceramic piece 2 is be bonded with the base plate 11 of metal cylinder 1, and its bonding agent is high temperature resistant adhesive, the side of its bonding
Method is that the one side of piezoelectric ceramic piece 1 passes through one layer of high temperature resistant adhesive of silk-screen printing, by piezoelectric ceramic piece 2 and metal cylinder 1
Base plate 11 is pasted, and is pressurizeed by external force and piezoelectric ceramic piece 2 is bonded with the base plate 11 of metal cylinder 1, is then placed in adding in baking oven
100~150 DEG C of solidifications of temperature, 3~5 hours time, cause piezoelectric ceramics, and 2 is be bonded with the base plate 11 of metal cylinder 1 firm, conducting
As an electrode surface.
The diameter dimension of the metal cylinder 1 is not less than 25 millimeters, to improve the sound pressure level of ultrasonic sensor transmitting.
The circuit board 3 is also equipped with contact pin 4, and contact pin 4 is electric with the control of the device using large power supersonic wave sensor
Road connects, to control high-power ultrasonics working sensor.
Embodiment two
As shown in Figure 1 to Figure 2, a kind of large power supersonic wave sensor, including metal cylinder 1, piezoelectric ceramic piece 2 and circuit
Plate 3；One end of metal cylinder 1 is formed with base plate 11, and base plate 11 is overall structure with metal cylinder 1, and the other end of metal cylinder 1 is in
Open state；Circuit board 3 is equipped with the other end of metal cylinder 1；Piezoelectric ceramic piece 2 is conductively connected with circuit board 3；
The material composition for producing piezoelectric ceramic piece is：
The oxide of lead, molecular formula is [Pb (Mn1/3Sb2/3)O3]0.045-[PbTiO3]0.4716-[PbZrO3]0.4834；
The oxide of nickel, molecular formula is NiO, and its weight is the 0.01% of the oxide of lead；
The oxide of cerium, molecular formula is CeO2, its weight is the 0. 02% of the oxide of lead；
The oxide of cobalt, molecular formula is CO2O3, its weight is the 0.01% of the oxide of lead；
And magnesia, scandium oxide, di-iron trioxide and alundum (Al2O3), magnesia, scandium oxide, di-iron trioxide and three
The consumption of Al 2 O respectively accounts for the 0.4% of the oxide weight of lead.
Piezoelectric ceramic piece 2 is be bonded with the base plate 11 of metal cylinder 1, and its bonding agent is high temperature resistant adhesive, the side of its bonding
Method is that the one side of piezoelectric ceramic piece 1 passes through one layer of high temperature resistant adhesive of silk-screen printing, by piezoelectric ceramic piece 2 and metal cylinder 1
Base plate 11 is pasted, and is pressurizeed by external force and piezoelectric ceramic piece 2 is bonded with the base plate 11 of metal cylinder 1, is then placed in adding in baking oven
100~150 DEG C of solidifications of temperature, 3~5 hours time, cause piezoelectric ceramics, and 2 is be bonded with the base plate 11 of metal cylinder 1 firm, conducting
As an electrode surface.
The diameter dimension of the metal cylinder 1 is not less than 25 millimeters, to improve the sound pressure level of ultrasonic sensor transmitting.
The circuit board 3 is also equipped with contact pin 4, and contact pin 4 is electric with the control of the device using large power supersonic wave sensor
Road connects, to control high-power ultrasonics working sensor.
Embodiment three
As shown in Figure 1 to Figure 2, a kind of large power supersonic wave sensor, including metal cylinder 1, piezoelectric ceramic piece 2 and circuit
Plate 3；One end of metal cylinder 1 is formed with base plate 11, and base plate 11 is overall structure with metal cylinder 1, and the other end of metal cylinder 1 is in
Open state；Circuit board 3 is equipped with the other end of metal cylinder 1；Piezoelectric ceramic piece 2 is conductively connected with circuit board 3；
The material composition for producing piezoelectric ceramic piece is：
The oxide of lead, molecular formula is [Pb (Mn1/3Sb2/3)O3]0.045-[PbTiO3]0.4716-[PbZrO3]0.4834；
The oxide of nickel, molecular formula is NiO, and its weight is the 0.01% of the oxide of lead；
The oxide of cerium, molecular formula is CeO2, its weight is the 0. 02% of the oxide of lead；
The oxide of cobalt, molecular formula is CO2O3, its weight is the 0.01% of the oxide of lead；
And magnesia, scandium oxide, di-iron trioxide and alundum (Al2O3), magnesia, scandium oxide, di-iron trioxide and three
The consumption of Al 2 O respectively accounts for the 0.6% of the oxide weight of lead.
Piezoelectric ceramic piece 2 is be bonded with the base plate 11 of metal cylinder 1, and its bonding agent is high temperature resistant adhesive, the side of its bonding
Method is that the one side of piezoelectric ceramic piece 1 passes through one layer of high temperature resistant adhesive of silk-screen printing, by piezoelectric ceramic piece 2 and metal cylinder 1
Base plate 11 is pasted, and is pressurizeed by external force and piezoelectric ceramic piece 2 is bonded with the base plate 11 of metal cylinder 1, is then placed in adding in baking oven
100~150 DEG C of solidifications of temperature, 3~5 hours time, cause piezoelectric ceramics, and 2 is be bonded with the base plate 11 of metal cylinder 1 firm, conducting
As an electrode surface.
The diameter dimension of the metal cylinder 1 is not less than 25 millimeters, to improve the sound pressure level of ultrasonic sensor transmitting.
The circuit board 3 is also equipped with contact pin 4, and contact pin 4 is electric with the control of the device using large power supersonic wave sensor
Road connects, to control high-power ultrasonics working sensor.
The above, is only presently preferred embodiments of the present invention, and not technical scope of the invention is imposed any restrictions.One's own profession
The technical staff of industry, under the inspiration of the technical program, can make some deformations and modification, every according to technology reality of the invention
Any modification, equivalent variations and modification that the embodiment of the confrontation above is made, still fall within the range of technical solution of the present invention.
Claims (4)
1. a kind of large power supersonic wave sensor, including metal cylinder, piezoelectric ceramic piece and circuit board；One end system of metal cylinder
There is base plate, base plate is overall structure with metal cylinder, and the other end of metal cylinder is in open state；The institute of circuit board and metal cylinder
The other end is stated to be equipped with；Piezoelectric ceramic piece is connected with circuit board conductive；Characterized in that, producing the material composition of piezoelectric ceramic piece
For：
The oxide of lead, molecular formula is [Pb (Mn1/3Sb2/3)O3]0.045-[PbTiO3]0.4716-[PbZrO3]0.4834；
The oxide of nickel, molecular formula is NiO, and its weight is the 0.01% of the oxide of lead；
The oxide of cerium, molecular formula is CeO2, its weight is the 0. 02% of the oxide of lead；
The oxide of cobalt, molecular formula is CO2O3, its weight is the 0.01% of the oxide of lead；
And magnesia, scandium oxide, di-iron trioxide and alundum (Al2O3), magnesia, scandium oxide, di-iron trioxide and three oxidations
The consumption of two aluminium respectively accounts for the 0.2%~0.6% of the oxide weight of lead.
2. a kind of large power supersonic wave sensor according to claim 1, it is characterised in that：Piezoelectric ceramic piece and metal cylinder
The base plate bonding of body, its bonding agent is high temperature resistant adhesive, and the method for its bonding is that the one side of piezoelectric ceramic piece passes through screen printing
One layer of high temperature resistant adhesive of brush, piezoelectric ceramic piece and the base plate sticking of metal cylinder are pressurizeed piezoelectric ceramic piece by external force
Base plate with metal cylinder is bonded, and is then placed in 100~150 DEG C of solidifications of heating in baking oven, 3~5 hours time, causes piezoelectricity
Potsherd is Nian Jie with the base plate of metal cylinder firmly, and conducting turns into an electrode surface.
3. a kind of large power supersonic wave sensor according to claim 1, it is characterised in that：The diameter of the metal cylinder
Size is not less than 25 millimeters, to improve the sound pressure level of ultrasonic sensor transmitting.
4. a kind of large power supersonic wave sensor according to claim 1, it is characterised in that：The circuit board also with insert
Pin is equipped with, and contact pin is connected with the control circuit of the device using the large power supersonic wave sensor, described high-power to control
Ultrasonic sensor works.
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| CN110948072B (en) * | 2019-11-25 | 2021-10-19 | 广东奥迪威传感科技股份有限公司 | Production process of closed ultrasonic sensor |
| CN113689838A (en) * | 2021-08-23 | 2021-11-23 | 湖南瀚德微创医疗科技有限公司 | Method for measuring electro-acoustic conversion efficiency of medical ultrasonic transducer |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1642875A2 (en) * | 2004-09-29 | 2006-04-05 | Ngk Insulators, Ltd. | Piezoelectric/electrostrictive porcelain composition, piezoelectric/electrostrictive article, and piezoelectric/electrostrictive film type element |
| CN1892211A (en) * | 2005-07-01 | 2007-01-10 | 株式会社东芝 | Convex ultrasonic probe and ultrasonic diagnostic apparatus |
| CN101081169A (en) * | 2006-05-31 | 2007-12-05 | 株式会社东芝 | Array-type ultrasonic probe and ultrasonic diagnostic apparatus |
| CN103360068A (en) * | 2013-07-12 | 2013-10-23 | 天津大学 | Manganese antimony-doped lead zirconate titanate piezoelectric ceramic |
| CN103744074A (en) * | 2013-12-20 | 2014-04-23 | 常州波速传感器有限公司 | Novel ultrasonic sensor |
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2014
- 2014-11-07 CN CN201410623651.6A patent/CN104483014B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1642875A2 (en) * | 2004-09-29 | 2006-04-05 | Ngk Insulators, Ltd. | Piezoelectric/electrostrictive porcelain composition, piezoelectric/electrostrictive article, and piezoelectric/electrostrictive film type element |
| CN1892211A (en) * | 2005-07-01 | 2007-01-10 | 株式会社东芝 | Convex ultrasonic probe and ultrasonic diagnostic apparatus |
| CN101081169A (en) * | 2006-05-31 | 2007-12-05 | 株式会社东芝 | Array-type ultrasonic probe and ultrasonic diagnostic apparatus |
| CN103360068A (en) * | 2013-07-12 | 2013-10-23 | 天津大学 | Manganese antimony-doped lead zirconate titanate piezoelectric ceramic |
| CN103744074A (en) * | 2013-12-20 | 2014-04-23 | 常州波速传感器有限公司 | Novel ultrasonic sensor |
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