CN100548918C - A kind of low dielectric loss piezoelectric ceramic material and preparation method thereof - Google Patents

A kind of low dielectric loss piezoelectric ceramic material and preparation method thereof Download PDF

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CN100548918C
CN100548918C CNB2004100890739A CN200410089073A CN100548918C CN 100548918 C CN100548918 C CN 100548918C CN B2004100890739 A CNB2004100890739 A CN B2004100890739A CN 200410089073 A CN200410089073 A CN 200410089073A CN 100548918 C CN100548918 C CN 100548918C
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piezoelectric
dielectric loss
ceramic material
piezoelectric ceramic
low dielectric
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CN1781874A (en
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李玉臣
姚烈
董显林
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Shanghai Institute of Ceramics of CAS
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Abstract

A kind of low dielectric loss piezoelectric ceramic material and preparation method thereof belongs to the piezoelectric ceramics field.The Pb that consists of that it is characterized in that material 1-xMe x(Zr yTi 1-y) O 3+ zmol% additive, x=0.0~0.10, the composition of Me=Sr or Ba or Sr and Ba; Y=0.50~0.54; Z=0.01~2, additive are MnO 2, CaFeO 3, BiFeO 3And Li 2Among the O one or more are compound.The present invention adopts conventional solid phase reaction method, has obtained a kind of dielectric loss tg δ=0.10% (small-signal is surveyed down), tg δ=0.54% (surveying under the 400v/mm high field), mechanical quality factor Q m>1900, piezoelectric constant d 33The high power piezoelectric ceramic material of=220pC/N.The ceramic component that utilizes this material to make is assembled into various PZT (piezoelectric transducer), can obtain widespread use at aspects such as piezo-electric motor, piezoelectric actuator, Piezoelectric Vibration Feeder, all kinds of piezoelectric transformer, large power supersonic welding and ultrasonic cleaning.

Description

A kind of low dielectric loss piezoelectric ceramic material and preparation method thereof
Technical field
The present invention relates to a kind of low dielectric loss piezoelectric ceramic material and preparation method thereof, belong to the piezoelectric ceramics field.
Background technology
Along with development of modern science and technology, the application of power-type piezoelectric ceramics is increasingly extensive.As piezo-electric motor, piezoelectric actuator, Piezoelectric Vibration Feeder, all kinds of piezoelectric transformer, large power supersonic welding and ultrasonic cleaning that develops rapidly in recent years and the underwater acoustic transducer that is applied to national defence etc., all based on the high-performance high power piezoelectric ceramic material, these application are had higher requirement to piezoceramic material: electromechanical coupling factor K that (1) is higher and high mechanical quality factor Q m(2) low electrical loss and mechanical loss; (3) can bear big electric power, and have good stability.The present domestic piezoceramic material mechanical quality factor Q that has mReach more than 2000, but its dielectric loss is still than higher tg δ>0.20%.The piezoceramic material dielectric loss that has is lower, but its mechanical quality factor Q mMostly below 1000.Under high-power, pottery can generate heat, and performance reduces, even inefficacy, and this requires dielectric loss very low, could guarantee that the long-term stability of ceramic transducer is used.The present domestic mechanical quality factor Q that also do not have m>1500, but the piezoceramic material of while its dielectric loss tg δ<0.14%.In order to satisfy the requirements at the higher level that practical application proposes, we carry out more deep research to material.
Summary of the invention
The object of the present invention is to provide a kind of mechanical quality factor Q m>1500, but the piezoceramic material of while its dielectric loss tg δ<0.10%.
Concrete preparation method is: with Pb 3O 4, TiO 2, ZrO 2, SrCO 3, BaCO 3, MnCO 3, Fe 2O 3, Bi 2O 3Be raw material, press Pb 1-xMe x(Zr yTi 1-y) O 3The stoichiometry weighing of+zmol% additive, with deionized water as medium, mixed 6~8 hours through ball milling, 700~900 ℃ then, briquetting was synthetic in 1~4 hour, (forming pressure is 150~200MPa), (600~900 ℃ of plastic removals through ball milling fine grinding, oven dry, adding additives, moulding again, 0.5~3 hours), (80~140 ℃ of sintering (1200~1350 ℃/1~3 hour), cold working, ultrasonic cleaning, top electrode, polarization, 3~5kv/mm, 10~20 minutes), carry out performance test at last, can obtain for the piezo ceramic element that uses.
Effect of the present invention is to have obtained a kind of dielectric loss tg δ=0.10% (small-signal is surveyed down), tg δ=0.54% (surveying under the 400v/mm high field), mechanical quality factor Q m>1900, piezoelectric constant d 33The high power piezoelectric ceramic material of=220pC/N.
Description of drawings
Embodiment
With specific embodiment the present invention is described below, but not only is confined to embodiment.
With Pb 3O 4(technical pure), TiO 2(electrical condenser specification), ZrO 2(technical pure), SrCO 3(technical pure), BaCO 3(technical pure), MnCO 3(technical pure), Fe 2O 3(chemical pure), Bi 2O 3(chemical pure) is raw material, presses Pb 1-xMe x(Zr yTi 1-y) O 3The stoichiometry weighing of+zmol% additive, getting Me here is Sr, additive is MnO 2, work as x=0.06,0.05,0.005,0.05,0.05,0.05, y=0.53,0.53,0.52,0.52,0.52,0.52, z=0.0,1.0,0.0,0.8,1.0,1.2 prepare burden respectively,, mixed 6~8 hours through ball milling as medium with deionized water, briquetting was synthetic in 850 ℃ then/2 hours, again through the ball milling fine grinding, oven dry, adding additives, moulding (forming pressure is 180MPa), plastic removal (800 ℃/1 hour), sintering 1250 ℃/2 hours), cold working, ultrasonic cleaning, top electrode, polarize 120 ℃, 4kv/mm, 15 minutes), carry out performance test at last, can obtain for the piezo ceramic element that uses.The present invention can see Table 1 compared with the prior art, and the prescription of present embodiment and result can see Table 2.
Table 1
Figure C20041008907300051
A. Li Quan high post. the research of high-power acoustic-electric transition material and application thereof. acoustic technique, 17 volume 1 phase (1998): P26
B. Qin Tian, Li Long soil, wheel low-loss, high Qm value Pb (Nb are controlled in osmanthus 2/3Mn 1/3) O 3-Pb (Pb 2/3Mn 1/3) O 3-PZT material piezoelectricity and acousto-optic, Vol.23 No.4 Aug.2001:P296
Table 2
Figure C20041008907300061

Claims (3)

1, a kind of low dielectric loss piezoelectric ceramic material is characterized in that it consists of Pb 1-xMe x(Zr yTi 1-y) O 3+ zmol% additive, wherein x=0.0~0.10; Y=0.50~0.54; Z=0.01~2; Me is the compound of Sr or Ba or Sr and Ba; Additive is CaFeO 3Or BiFeO 3
2, by the preparation method of the described a kind of low dielectric loss piezoelectric ceramic material of claim 1, comprise synthetic, sintering, polarization process step, it is characterized in that:
(1) synthesis step is 700~900 ℃, and briquetting was synthetic in 1~4 hour;
(2) polarization condition is 80~140 ℃ of temperature, voltage 3~5KV/mm, 10~20 minutes time.
3, by the preparation method of the described a kind of low dielectric loss piezoelectric ceramic material of claim 2, it is characterized in that described sintering step processing condition are that temperature is 1200~1350 ℃, are incubated 1~3 hour.
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CN1986486B (en) * 2006-12-25 2011-10-05 中国科学院上海硅酸盐研究所 Piezoelectric ceramic material for high performance type-B ultrasonic diagnosis apparatus transducer and its preparing method
CN102491750A (en) * 2011-11-29 2012-06-13 佛山市亿强电子有限公司 Piezoelectric ceramic for extrusion type igniter and preparation process of piezoelectric ceramic
CN103539447B (en) * 2013-10-08 2015-07-08 江苏大学 Low-temperature sintered piezoelectric ceramic material and preparation method thereof
CN105218092B (en) * 2015-10-09 2017-08-11 中国科学院上海硅酸盐研究所 It is a kind of to be provided simultaneously with big displacement and low delayed lead zirconate titanate based piezoelectric ceramic materials and preparation method thereof
CN112759390A (en) * 2019-11-04 2021-05-07 中国科学院上海硅酸盐研究所 Has high kpPSN-PZT piezoelectric ceramic and preparation method thereof

Citations (1)

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Publication number Priority date Publication date Assignee Title
CN1267274A (en) * 1997-03-27 2000-09-20 Cts公司 Low-loss PZT ceramic compositions cofirable with silver at reduced sintering temp and process for producing same

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1267274A (en) * 1997-03-27 2000-09-20 Cts公司 Low-loss PZT ceramic compositions cofirable with silver at reduced sintering temp and process for producing same

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