CN114400286A - High-reliability through hole capacitor and manufacturing method - Google Patents
High-reliability through hole capacitor and manufacturing method Download PDFInfo
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- CN114400286A CN114400286A CN202210042821.6A CN202210042821A CN114400286A CN 114400286 A CN114400286 A CN 114400286A CN 202210042821 A CN202210042821 A CN 202210042821A CN 114400286 A CN114400286 A CN 114400286A
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- H01L28/00—Passive two-terminal components without a potential-jump or surface barrier for integrated circuits; Details thereof; Multistep manufacturing processes therefor
- H01L28/40—Capacitors
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L28/00—Passive two-terminal components without a potential-jump or surface barrier for integrated circuits; Details thereof; Multistep manufacturing processes therefor
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Abstract
The invention discloses a high-reliability through-hole capacitor and a manufacturing method thereof, wherein the through-hole capacitor comprises: a substrate; a capacitor structure over the substrate; and the back through hole is formed in the back of the substrate, and the upward projection of the back through hole is positioned in the non-capacitance structure area. The invention adjusts the back through hole originally opened under the capacitor structure to be opened beside the capacitor structure (non-capacitor structure area), the structure greatly improves the reliability of the capacitor: (1) the capacitor can not be failed due to a through hole etching process, a polymer cleaning process and the like; (2) the capacitor can not be failed due to the diffusion of the solder during the chip mounting; (3) the area occupied by the back through hole is effectively utilized, the area of the capacitor is greatly increased, and the cost is saved. The formed through-hole capacitor has the characteristics of high capacitance density, good heat dissipation, high reliability, small parasitic inductance and the like.
Description
Technical Field
The invention relates to the field of semiconductor production, in particular to a high-reliability through hole capacitor and a manufacturing method thereof.
Background
The capacitor is a short term for a capacitive element (capacitor), and is characterized by storing charges, so that the capacitor has a function of storing electric field energy. Common capacitor types are electrolytic capacitors, ceramic capacitors, tantalum capacitors, and the like. The capacitor is mainly used in an alternating current circuit and a pulse circuit, and generally plays a role in cutting off direct current in a direct current circuit, so that alternating current can pass through the capacitor. The application range of the method mainly comprises the following types: first, in a circuit used as a filter circuit: decoupling, filtering, bypass; as coupling elements between the front and rear stages; secondly, an LC resonance circuit is formed by the inductor, and an RC phase-shifting circuit and a time delay circuit are formed by the LC resonance circuit and the resistor; third, it is used in a single-phase ac motor to shift the phase to produce a rotating magnetic field.
In the conventional capacitor structure 2 with a backside via, a backside via 3 is opened below a capacitor region, as shown in fig. 1 (a cross-sectional view of the capacitor) and fig. 2 (a top view of the capacitor). However, this structure has the following problems: (1) the capacitor with the structure type is easy to lose efficacy, and particularly when ICP is over-etched seriously, certain solution is easy to permeate into a front capacitor area during polymer removal cleaning, so that the capacitor is lost; (2) when the chip is pasted, the solder is easy to diffuse to the front capacitor area, so that the capacitor fails; (3) in addition, the area of the capacitor and the area of the back through hole are large, and the back through hole of the capacitor structure occupies a part of the area of the capacitor, so that the utilization of the area of the capacitor is not maximized.
Disclosure of Invention
The invention aims to overcome the defects of the prior art and provide a high-reliability through hole capacitor and a manufacturing method thereof.
The purpose of the invention is realized by the following technical scheme:
in a first aspect of the present invention, a high reliability via capacitor is provided, including:
a substrate;
a capacitor structure over the substrate;
and the back through hole is formed in the back of the substrate, and the upward projection of the back through hole is positioned in the non-capacitance structure area.
Further, the capacitance structure includes:
the lower polar plate is positioned on the substrate;
the upper-level plate is partially distributed above the lower polar plate;
the dielectric layer is positioned between the lower polar plate and the upper polar plate;
the upward projection of the back through hole has a lower polar plate and the upper-level plate is not present.
Further, the capacitor structure further includes:
and the back metal is positioned on the back of the substrate and the back through hole and is used for communicating the back through hole with the upper-level plate or communicating the back through hole with the lower polar plate.
Further, the upper plate comprises a layer of upper plate, and the capacitor structure is an MIM capacitor.
Further, the upper level board comprises a plurality of layers of upper level boards, and the capacitor structure is a stack capacitor.
Further, the via capacitor further includes:
the upper-level plate forms an air bridge structure and is connected with the first bonding pad;
and the lower polar plate extends and is connected with the second bonding pad.
Further, the lower polar plate is respectively Ti/X/Au/Ti from bottom to top, wherein X comprises Ni, Pt, Mo, Ti or does not comprise Ni, Pt, Mo and Ti.
Further, the upper-level plate is respectively Ti/Au from bottom to top.
Further, the dielectric layer is SiNx。
In a second aspect of the present invention, there is provided a method for manufacturing a high-reliability through-hole capacitor, including a front surface processing step and a back surface processing step, where the front surface processing step includes the following sub-steps:
s11: forming a first layer of metal photoetching pattern on a substrate through light resistance, exposure and development;
s12: forming a metal layer by using a vacuum evaporation method;
s13: carrying out metal stripping by using a metal stripping process to obtain a lower polar plate;
s14: depositing a dielectric layer film by using a plasma chemical vapor deposition method;
s15: forming a middle dielectric layer photoetching pattern through light resistance, exposure and development;
s16: removing the pattern area without the light resistance coverage by using dry etching;
s17: removing the photoresist;
s18: forming a second layer of metal photoetching pattern through light resistance, exposure and development;
s19: depositing a second metal layer by using a vacuum evaporation method;
s20: carrying out metal stripping by using a metal stripping process to obtain a top plate;
the back processing step comprises the following substeps:
s21: forming a back through hole photoetching pattern through light resistance, exposure and development;
s22: removing the pattern area without the light resistance coverage by using dry etching;
s23: removing the photoresist;
s24: sputtering a back seed layer;
s25: manufacturing metal on the back of the through hole by using an electroplating process;
s26: forming a back gold layer photoetching pattern through light resistance, exposure and development;
s27: removing the metal area without the photoresist coverage by using wet etching, wherein the remained area is a back gold pattern;
s28: and removing the photoresist.
The invention has the beneficial effects that:
(1) in an exemplary embodiment of the present invention, the back via originally opened under the capacitor structure is adjusted to be opened beside the capacitor structure (non-capacitor structure area), and this structure greatly improves the capacitor reliability: (1) the capacitor can not be failed due to a through hole etching process, a polymer cleaning process and the like; (2) the capacitor can not be failed due to the diffusion of the solder during the chip mounting; (3) the area occupied by the back through hole is effectively utilized, the area of the capacitor is greatly increased, and the cost is saved. The formed through-hole capacitor has the characteristics of high capacitance density, good heat dissipation, high reliability, small parasitic inductance and the like.
(2) In yet another exemplary embodiment of the present invention, a specific implementation of a capacitor structure is disclosed that employs a structure having a dielectric layer between electrode plates; meanwhile, the position of the back through hole is located in a non-capacitance structure area, specifically, the position of the back through hole is projected upwards to form a lower polar plate and not to form the upper-level plate.
(3) In still another exemplary embodiment of the present invention, a back metal is used to communicate the back via with the upper stage plate or to communicate the back via with the lower stage plate.
(4) In still another exemplary embodiment of the present invention, the capacitor includes a MIM capacitor having only upper and lower metal plates, and also includes a stack capacitor having three or more metal plates. I.e. applicable to capacitors of various structures.
(5) In yet another exemplary embodiment of the present invention, a method of fabricating a high reliability via capacitor is disclosed.
Drawings
FIG. 1 is a cross-sectional view of a prior art capacitor structure;
FIG. 2 is a top view of a prior art capacitor structure;
FIG. 3 is a cross-sectional structural view of a capacitor structure provided in an exemplary embodiment of the invention;
FIG. 4 is a top view of a capacitor structure provided in an exemplary embodiment of the invention;
FIG. 5 is a flow chart of a method of fabrication provided in an exemplary embodiment of the invention
In the figure, 1-substrate, 2-capacitor structure, 201-bottom plate, 202-top plate, 203-dielectric layer, 201-air bridge structure, 2' -non-capacitor structure, 3-back via, 4-back metal, 5-first pad, 6-second pad.
Detailed Description
The technical solutions of the present invention will be described clearly and completely with reference to the accompanying drawings, and it should be understood that the described embodiments are only some embodiments, but not all embodiments, of the present invention. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
In the description of the present invention, it should be noted that directions or positional relationships indicated by "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", and the like are directions or positional relationships described based on the drawings, and are only for convenience of description and simplification of description, and do not indicate or imply that the device or element referred to must have a specific orientation, be configured and operated in a specific orientation, and thus, should not be construed as limiting the present invention.
In the description of the present invention, it should be noted that, unless otherwise explicitly stated or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meanings of the above terms in the present invention can be understood in specific cases to those skilled in the art.
The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the application. As used in this application and the appended claims, the singular forms "a", "an", and "the" are intended to include the plural forms as well, unless the context clearly indicates otherwise. It should also be understood that the term "and/or" as used herein refers to and encompasses any and all possible combinations of one or more of the associated listed items.
It is to be understood that although the terms first, second, third, etc. may be used herein to describe various information, such information should not be limited to these terms. These terms are only used to distinguish one type of information from another. For example, first information may also be referred to as second information, and similarly, second information may also be referred to as first information, without departing from the scope of the present application. The word "if" as used herein may be interpreted as "at … …" or "when … …" or "in response to a determination", depending on the context. Furthermore, the terms "first" and "second" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.
In addition, the technical features involved in the different embodiments of the present invention described below may be combined with each other as long as they do not conflict with each other.
Referring to fig. 3, fig. 3 illustrates providing a high reliability via capacitor in an exemplary embodiment of the invention, including:
a substrate 1;
a capacitor structure 2 located above the substrate 1;
and the back through hole 3 is formed in the back surface of the substrate 1, and the upward projection of the back through hole 3 is positioned in the area of the non-capacitance structure 2'.
Specifically, in the exemplary embodiment, the backside via 3 originally opened under the capacitor structure 2 as shown in fig. 1 is adjusted to be opened beside the capacitor structure (non-capacitor structure 2') so that the capacitor reliability is greatly improved: (1) the barrier metal layer is not seriously etched due to a heavier back through hole etching process, so that the capacitor fails due to failure of a back hole caused by overlarge washing pressure when a polymer in the back through hole is cleaned; (2) the situation that the capacitor fails due to failure of the back hole caused by solder diffusion in item-adding test or chip packaging is avoided; (3) the area occupied by back through-hole 3 originally is effectively utilized now, and the electric capacity of 200pF originally only needs less area now and just can reach, greatly practices thrift the cost. The formed through-hole capacitor has the characteristics of high capacitance density, good heat dissipation, high reliability, small parasitic inductance and the like.
More preferably, in an exemplary embodiment, as shown in fig. 3 and 4, the capacitive structure 2 includes:
a lower plate 201 on the substrate 1;
an upper plate 202, partially disposed above the lower plate 201;
a dielectric layer 203 positioned between the lower plate 201 and the upper plate 202;
the upward projection of the rear through-hole 3 has a lower plate 201 and no upper plate 202.
Specifically, in this exemplary embodiment, a specific implementation of the capacitor structure 2 is disclosed, which employs a structure having a dielectric layer 203 between electrode plates; meanwhile, as for the position of the back through hole 3, it is located in the non-capacitive structure 2', specifically, the position where the lower plate 201 exists and the upper plate 202 does not exist in upward projection.
More preferably, in an exemplary embodiment, as shown in fig. 3 and 4, the capacitor structure 2 further includes:
and the back metal 4 is positioned on the back surface of the substrate 1 and the back through hole 3 and is used for communicating the back through hole 3 with the upper-level plate 202 or communicating the back through hole 3 with the lower-level plate 201.
Specifically, in this exemplary embodiment, the back metal 4 is used to communicate the back through-hole 3 with the lower-stage board 201 and the upper-stage board 202.
Preferably, in an exemplary embodiment, the upper plate 202 includes a layer of upper plate 202, and the capacitor structure 2 is a MIM capacitor; more preferably, in an exemplary embodiment, the upper board 202 includes a plurality of layers of upper boards 202, and the capacitor structure 2 is a stack capacitor.
Specifically, in the exemplary embodiment, the capacitor includes a MIM capacitor having only upper and lower metal plates, and also includes a stack capacitor having three or more metal plates. I.e. applicable to capacitors of various structures.
More preferably, in an exemplary embodiment, as shown in fig. 4, the via capacitor further includes:
a first bonding pad 5, wherein the upper board 202 forms an air bridge structure 204 connected with the first bonding pad 5, wherein the air bridge is used for preventing short circuit during testing;
and a second pad 6, wherein the lower plate 201 extends and is connected with the second pad 6.
In one of the exemplary embodiments, the first PAD 5 and the second PAD 6 are both test PADs.
More preferably, in an exemplary embodiment, the lower plate 201 is Ti/X/Au/Ti respectively from bottom to top, wherein Ti is used as a metal for increasing adhesion to the substrate, wherein X comprises Ni, Pt, Mo, Ti or none, Au is used as a conductive layer metal, and the uppermost Ti is used as a metal for increasing adhesion to the upper dielectric layer. Preferably, in an exemplary embodiment, the upper plate 202 is Ti/Au from bottom to top. Preferably, in an exemplary embodiment, the dielectric layer 203 is SiNx.
In another exemplary embodiment of the present invention, there is provided a method for manufacturing a high-reliability through-hole capacitor as described in any one of the above exemplary embodiments, as shown in fig. 5, including a front surface processing step and a back surface processing step, where the front surface processing step includes the following sub-steps:
s11: forming a first layer of metal photoetching pattern on a substrate 1 through light resistance, exposure and development; in a preferred exemplary embodiment, the photoresist used in the photolithography step S11 is negative photoresist, and the exposed area after the development is the first metal pattern (i.e., the metal pattern of the lower plate 201).
S12: forming a metal layer by using a vacuum evaporation method; in a preferred exemplary embodiment, the first layer of metal vapor deposition in step S12 is Ti/X/Au/Ti (titanium/X/gold/titanium) according to the sequence of vapor deposition, where X includes but is not limited to Ni (nickel), Pt (platinum), Mo (molybdenum), Ti (titanium), or none, and the thickness of each layer of metal is Ti (30-100 nm)/X (30-100 nm)/Au (100-1000 nm)/Ti (1-15 nm), respectively.
S13: carrying out metal stripping by using a metal stripping process to obtain a lower polar plate 201; in a preferred exemplary embodiment, in the metal stripping step S13, the photoresist on the whole wafer is removed by using the photoresist stripping liquid, the metal in the non-metal pattern region is removed along with the photoresist stripping, and only the metal in the PR-free region (photoresist region) remains; the photoresist removing liquid includes, but is not limited to, NMP (N-methylpyrrolidone).
S14: depositing a dielectric layer 203 film by using a plasma chemical vapor deposition method; in a preferred exemplary embodiment, the total thickness of the dielectric layer in step S14 is about 50 to 500nm, which is SiNx.
S15: forming a photoetching pattern of the intermediate medium layer 203 through photoresist, exposure and development; in a preferred exemplary embodiment, the photoresist used in the photolithography step S15 is positive photoresist, and the exposed areas after development are the pattern areas to be opened.
S16: removing the pattern area without the light resistance coverage by using dry etching; in a preferred exemplary embodiment, the dry etching in step S16 is ion etching, and the etching gas is CxFy、SxFyAre not equal.
S17: removing the photoresist; in a preferred exemplary embodiment, the PR Strip (photoresist remover) wet stripping described in step S17 removes photoresist from the entire wafer using a photoresist removal solution including, but not limited to, NMP (N-methyl pyrrolidone).
S18: forming a second layer of metal photoetching pattern through light resistance, exposure and development; in a preferred exemplary embodiment, the photoresist used in the photolithography step S18 is negative photoresist, and the exposed area after the development is the second metal pattern (i.e., the metal pattern of the upper plate 202).
S19: depositing a second metal layer by using a vacuum evaporation method; in a preferred exemplary embodiment, the second metal layer is deposited in step S19 by Ti/Au/(Ti/Au) in sequence, and the metal thickness of each layer is Ti (30-100 nm)// Au (1000-2000 nm).
S20: carrying out metal stripping by using a metal stripping process to obtain an upper-level plate 202; in a preferred exemplary embodiment, in the metal stripping step S20, the photoresist on the whole wafer is removed by using the photoresist stripping liquid, the metal in the non-metal pattern region is removed along with the photoresist stripping, and only the metal in the PR-free region (photoresist region) remains; the photoresist removing liquid includes, but is not limited to, NMP (N-methylpyrrolidone).
The back processing step comprises the following substeps:
s21: forming a back through hole 3 photoetching pattern through light resistance, exposure and development; in a preferred exemplary embodiment, the photoresist used in the step S21 is positive photoresist with a thickness of 10-20 um, and the exposed area after development is the through hole pattern area.
S22: removing the pattern area without the light resistance coverage by using dry etching; in a preferred exemplary embodiment, the dry etching in step S22 is ion etching, and the etching gas is Cl2The etching time is 25 min.
S23: removing the photoresist; in a preferred exemplary embodiment, the wet PR Strip described in step S23 removes photoresist from the entire wafer using a photoresist removal solution including, but not limited to, NMP (N-methylpyrrolidone).
S24: sputtering a back seed layer; in a preferred exemplary embodiment, the seed layer described in step S24 is sputtered with Ti (50nm)/Au (100 nm).
S25: manufacturing through hole back metal 4 by using an electroplating process; in a preferred exemplary embodiment, in the step S25, the back gold of the via hole is formed by using an electroplating process, and the thickness of the back gold layer is controlled by adjusting the magnitude of the current, and the required thickness of the back gold layer is 4 um.
S26: forming a back gold layer photoetching pattern through light resistance, exposure and development; in a preferred exemplary embodiment, the photoresist in step S26 is a positive photoresist, and the exposed areas after developing are the areas of the pattern to be etched.
S27: removing the metal area without the photoresist coverage by using wet etching, wherein the remained area is a back gold pattern; in a preferred exemplary embodiment, in the step S27, the back gold pattern is wet-etched, the upper Au layer is etched by using a solution of iodine and potassium iodide, the lower Ti layer is etched by using hydrofluoric acid, and the etching is completed by controlling the etching time under a stable etch rate condition.
S28: removing the photoresist; in a preferred exemplary embodiment, the wet PR Strip described in step S28 removes photoresist from the entire wafer using a photoresist removal solution including, but not limited to, NMP (N-methylpyrrolidone).
It is to be understood that the above-described embodiments are illustrative only and not restrictive of the broad invention, and that various other modifications and changes in light thereof will be suggested to persons skilled in the art based upon the above teachings. And are neither required nor exhaustive of all embodiments. And obvious variations or modifications of the invention may be made without departing from the spirit or scope of the invention.
Claims (10)
1. A high reliability through-hole electric capacity which characterized in that: the method comprises the following steps:
a substrate;
a capacitor structure over the substrate;
and the back through hole is formed in the back of the substrate, and the upward projection of the back through hole is positioned in the non-capacitance structure area.
2. A high reliability via capacitor according to claim 1, wherein: the capacitor structure includes:
the lower polar plate is positioned on the substrate;
the upper-level plate is partially distributed above the lower polar plate;
the dielectric layer is positioned between the lower polar plate and the upper polar plate;
the upward projection of the back through hole has a lower polar plate and the upper-level plate is not present.
3. A high reliability via capacitor according to claim 2, wherein: the capacitor structure further includes:
and the back metal is positioned on the back of the substrate and the back through hole and is used for communicating the back through hole with the upper-level plate or communicating the back through hole with the lower polar plate.
4. A high reliability via capacitor according to claim 2, wherein: the upper-level plate comprises a layer of upper-level plate, and the capacitor structure is an MIM capacitor.
5. A high reliability via capacitor according to claim 2, wherein: the upper-level board comprises a plurality of layers of upper-level boards, and the capacitor structure is a stack capacitor.
6. A high reliability via capacitor according to claim 2, wherein: the via capacitor further includes:
the upper-level plate forms an air bridge structure and is connected with the first bonding pad;
and the lower polar plate extends and is connected with the second bonding pad.
7. A high reliability via capacitor according to claim 2, wherein: the lower polar plate is respectively Ti/X/Au/Ti from bottom to top, wherein X comprises Ni, Pt, Mo, Ti or does not comprise Ni, Pt, Mo and Ti.
8. A high reliability via capacitor according to claim 2, wherein: the upper-level plate is respectively Ti/Au from bottom to top.
9. A high reliability via capacitor according to claim 2, wherein: the dielectric layer is SiNx。
10. The method for manufacturing a high-reliability through-hole capacitor as claimed in any one of claims 2 to 9, wherein: the method comprises a front surface processing step and a back surface processing step, wherein the front surface processing step comprises the following substeps:
s11: forming a first layer of metal photoetching pattern on a substrate through light resistance, exposure and development;
s12: forming a metal layer by using a vacuum evaporation method;
s13: carrying out metal stripping by using a metal stripping process to obtain a lower polar plate;
s14: depositing a dielectric layer film by using a plasma chemical vapor deposition method;
s15: forming a middle dielectric layer photoetching pattern through light resistance, exposure and development;
s16: removing the pattern area without the light resistance coverage by using dry etching;
s17: removing the photoresist;
s18: forming a second layer of metal photoetching pattern through light resistance, exposure and development;
s19: depositing a second metal layer by using a vacuum evaporation method;
s20: carrying out metal stripping by using a metal stripping process to obtain a top plate;
the back processing step comprises the following substeps:
s21: forming a back through hole photoetching pattern through light resistance, exposure and development;
s22: removing the pattern area without the light resistance coverage by using dry etching;
s23: removing the photoresist;
s24: sputtering a back seed layer;
s25: manufacturing metal on the back of the through hole by using an electroplating process;
s26: forming a back gold layer photoetching pattern through light resistance, exposure and development;
s27: removing the metal area without the photoresist coverage by using wet etching, wherein the remained area is a back gold pattern;
s28: and removing the photoresist.
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| US20210296283A1 (en) * | 2020-03-20 | 2021-09-23 | Taiwan Semiconductor Manufacturing Co., Ltd. | 3d trench capacitor for integrated passive devices |
| CN112259524A (en) * | 2020-10-30 | 2021-01-22 | 华虹半导体(无锡)有限公司 | Manufacturing method of MIM capacitor in copper interconnection process |
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