CN114400252A - A Cold Metal-Based Negative Differential Resistance MOSFET - Google Patents
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Abstract
本发明涉及一种基于冷金属的负微分电阻MOSFET管,包括上层栅介质层、下层栅介质层、设置在栅介质层上的上层删电极和下层删电极,源极、漏极以及沟道设置在上层栅介质层和下层栅介质层之间,所述源极为冷金属材质。因此,本发明具有如下优点:1、本发明采用“冷”金属作为MOSFET的源极,“冷”金属源极独特的带隙结构使其能实现优异的NDR性能。同时高迁移率半导体确保其能产生较大的峰值电流。此外,调节MOSFET的栅极电压还可以有效调控MOSFET的峰值电流和电流峰谷比。2、本发明可以提高器件的噪音容限和NDR器件的输出功率,从而提高负阻振荡器的稳定性。
The present invention relates to a negative differential resistance MOSFET tube based on cold metal, which comprises an upper gate dielectric layer, a lower gate dielectric layer, an upper layer electrode and a lower layer electrode arranged on the gate dielectric layer, and a source electrode, a drain electrode and a channel are arranged Between the upper gate dielectric layer and the lower gate dielectric layer, the source is a cold metal material. Therefore, the present invention has the following advantages: 1. The present invention uses "cold" metal as the source of the MOSFET, and the unique band gap structure of the "cold" metal source enables it to achieve excellent NDR performance. At the same time, high mobility semiconductors ensure that they can generate large peak currents. In addition, adjusting the gate voltage of the MOSFET can also effectively control the peak current and the current peak-to-valley ratio of the MOSFET. 2. The present invention can improve the noise tolerance of the device and the output power of the NDR device, thereby improving the stability of the negative resistance oscillator.
Description
技术领域technical field
本发明涉及一种负微分电阻MOSFET管,尤其是涉及一种基于冷金属的负微分电阻MOSFET管。The invention relates to a negative differential resistance MOSFET, in particular to a cold metal-based negative differential resistance MOSFET.
背景技术Background technique
现有的NDR器件,诸如隧道二极管和共振隧道二极管的导通方式都是基于电子隧穿效应,因此峰值电流很小。将其应用于振荡电路,难以保持振荡电路的稳定性。此外,较小的峰值电流和电流峰谷比也限制了NDR器件的噪声容限,在噪声较大时NDR器件难以继续保持其负阻特性。Existing NDR devices, such as tunnel diodes and resonant tunnel diodes, conduct conduction based on the electron tunneling effect, so the peak current is small. When it is applied to an oscillation circuit, it is difficult to maintain the stability of the oscillation circuit. In addition, the small peak current and current peak-to-valley ratio also limit the noise tolerance of NDR devices, and it is difficult for NDR devices to continue to maintain their negative resistance characteristics when the noise is large.
发明内容SUMMARY OF THE INVENTION
本发明主要是解决现有技术所存在的技术问题;提供了一种采用具有费米能级附近带隙的“冷”金属作为MOSFET的源极来实现NDR效应。“冷”金属源极独特的带隙结构使其能实现优异的NDR性能。同时高迁移率的半导体材料也确保MOSFET能产生极大的峰值电流。此外,通过调节MOSFET的栅极电压VGS还可以有效调控MOSFET的峰值电流和电流峰谷比。The invention mainly solves the technical problems existing in the prior art, and provides a "cold" metal with a band gap near the Fermi level as the source of the MOSFET to realize the NDR effect. The unique bandgap structure of the "cold" metal source enables excellent NDR performance. At the same time, the high mobility of the semiconductor material also ensures that the MOSFET can generate extremely high peak currents. In addition, the peak current and current peak-to-valley ratio of the MOSFET can also be effectively regulated by adjusting the gate voltage V GS of the MOSFET.
本发明针对隧道二极管峰值电流和输出功率小的缺陷,采用了具有“冷”金属源极的MOSFET来实现NDR效应。“冷”金属源极独特的带隙结构使其能实现优异的NDR性能。同时高迁移率的半导体确保MOSFET能产生极大的峰值电流。在负阻振荡器中,更大的峰值电流使MOSFET能提供更大的输出功率,确保振荡电路起振并持续振荡。此外,在电路中存在噪声时,更大的峰值电流和电流峰谷比也具有更高的噪音容限,从而保持器件的负阻特性。Aiming at the defects of small peak current and output power of the tunnel diode, the invention adopts a MOSFET with a "cold" metal source to realize the NDR effect. The unique bandgap structure of the "cold" metal source enables excellent NDR performance. At the same time, the high mobility of the semiconductor ensures that the MOSFET can generate extremely high peak currents. In negative resistance oscillators, the larger peak current enables the MOSFET to provide greater output power, ensuring that the oscillator circuit starts and continues to oscillate. In addition, in the presence of noise in the circuit, the larger peak current and current peak-to-valley ratio also have a higher noise margin, thus maintaining the negative resistance characteristics of the device.
本发明的上述技术问题主要是通过下述技术方案得以解决的:The above-mentioned technical problems of the present invention are mainly solved by the following technical solutions:
一种基于冷金属的负微分电阻MOSFET管,其特征在于,包括上层栅介质层、下层栅介质层、设置在栅介质层上的上层删电极和下层删电极,源极、漏极以及沟道设置在上层栅介质层和下层栅介质层之间,所述源极为冷金属材质。A negative differential resistance MOSFET tube based on cold metal, which is characterized in that it comprises an upper gate dielectric layer, a lower gate dielectric layer, an upper layer electrode and a lower layer electrode disposed on the gate dielectric layer, a source electrode, a drain electrode and a channel. It is arranged between the upper gate dielectric layer and the lower gate dielectric layer, and the source is made of a cold metal material.
在上述的一种基于冷金属的负微分电阻MOSFET管,沟道为本征半导体材料,漏极为p型掺杂的半导体材料。In the above-mentioned cold metal-based negative differential resistance MOSFET, the channel is an intrinsic semiconductor material, and the drain is a p-type doped semiconductor material.
在上述的一种基于冷金属的负微分电阻MOSFET管,漏极为p型重掺杂的单层MoS2。In the above-mentioned cold metal-based negative differential resistance MOSFET, the drain is p-type heavily doped monolayer MoS 2 .
在上述的一种基于冷金属的负微分电阻MOSFET管,所述沟道为单层MoS2。In the above-mentioned cold metal-based negative differential resistance MOSFET, the channel is a single-layer MoS 2 .
在上述的一种基于冷金属的负微分电阻MOSFET管,漏极为单质材料,采用NbSe2,或TaSe2中的任意一种。In the above-mentioned cold metal-based negative differential resistance MOSFET, the drain is a single material, and any one of NbSe 2 or TaSe 2 is used.
在上述的一种基于冷金属的负微分电阻MOSFET管,所述上层删电极、下层删电极均为铜电极。In the above-mentioned cold metal-based negative differential resistance MOSFET tube, the upper layer electrode and the lower layer electrode are both copper electrodes.
在上述的一种基于冷金属的负微分电阻MOSFET管,所述上层栅介质层、下层栅介质层均为SiO2材质衬底。In the above-mentioned cold metal-based negative differential resistance MOSFET, the upper gate dielectric layer and the lower gate dielectric layer are both SiO 2 material substrates.
因此,本发明具有如下优点:(1)本发明不同于现有的基于半导体材料的NDR器件,而是采用“冷”金属作为MOSFET的源极,“冷”金属源极独特的带隙结构使其能实现优异的NDR性能。同时高迁移率半导体确保其能产生较大的峰值电流。此外,调节MOSFET的栅极电压VGS还可以有效调控MOSFET的峰值电流和电流峰谷比。Therefore, the present invention has the following advantages: (1) The present invention is different from the existing NDR devices based on semiconductor materials, but uses "cold" metal as the source of the MOSFET, and the unique bandgap structure of the "cold" metal source makes the It can achieve excellent NDR performance. At the same time, high mobility semiconductors ensure that they can generate large peak currents. In addition, adjusting the gate voltage V GS of the MOSFET can also effectively control the peak current and the current peak-to-valley ratio of the MOSFET.
(2)本发明的“冷”金属源极MOSFET能够同时产生极大的电流峰谷比和峰值电流。一方面更大的电流峰谷比和峰值电流可以提高器件的噪音容限,另一方面,更高的峰值电流提高了NDR器件的输出功率,从而提高负阻振荡器的稳定性。(2) The "cold" metal source MOSFETs of the present invention are capable of generating extremely large current peak-to-valley ratios and peak currents simultaneously. On the one hand, the larger current peak-to-valley ratio and peak current can improve the noise tolerance of the device, and on the other hand, the higher peak current improves the output power of the NDR device, thereby improving the stability of the negative resistance oscillator.
附图说明Description of drawings
附图1是本发明的一种原理图;Accompanying
附图2a是一个典型的负微分电阻器件的电流电压曲线图。Figure 2a is a current-voltage curve diagram of a typical negative differential resistance device.
附图2b是在偏置电压Vb=V0时的能带对齐图。Figure 2b is a band alignment diagram at bias voltage V b =V 0 .
附图2c是在偏置电压Vb=V1时的能带对齐图。Figure 2c is a band alignment diagram at bias voltage V b =V 1 .
附图2d是在偏置电压Vb=V2时的能带对齐图。Figure 2d is a band alignment diagram at bias voltage V b =V 2 .
附图2e是在偏置电压Vb=V3时的能带对齐图。Figure 2e is a band alignment diagram at bias voltage Vb = V3 .
其中VDS对应的V0到V3,如(a)所示。虚线和对应的εS和εD代表分别是源极和漏极的费米能级。(b-e)中的白色区域对应于“冷”金属和MoS2材料的带隙,黑色箭头大小表示该偏置电压下的电流大小,虚线下的灰色区域表示费米能级以下能级被电子完全填充。其中实心小球表示电子,空心小球表示空穴。载流子数表示不同偏置电压下载流子浓度的变化。Where V DS corresponds to V 0 to V 3 , as shown in (a). The dotted line and the corresponding εS and εD represent the Fermi levels of the source and drain, respectively. The white area in ( be) corresponds to the band gap of the "cold" metal and MoS2 material, the size of the black arrow represents the magnitude of the current at this bias voltage, and the gray area under the dashed line represents the energy level below the Fermi level that is completely filled by electrons filling. The solid spheres represent electrons and the hollow spheres represent holes. The number of carriers represents the change in carrier concentration for different bias voltages.
具体实施方式Detailed ways
下面通过实施例,并结合附图,对本发明的技术方案作进一步具体的说明。The technical solutions of the present invention will be further described in detail below through examples and in conjunction with the accompanying drawings.
实施例:Example:
本发明中使用的“冷”金属不同于拥有连续态密度的普通金属材料。“冷”金属在费米能级以上存在导带带隙(ECG)或在费米能级以下存在价带带隙(EVG)。因此,本发明通过“冷”金属和高迁移率半导体的异质结实现了Ⅲ型能带对齐的异质结NDR器件。The "cold" metals used in the present invention are distinct from ordinary metallic materials possessing a continuous density of states. "Cold" metals have a conduction band gap ( ECG) above the Fermi level or a valence band gap (EVG ) below the Fermi level. Therefore, the present invention realizes a type III band-aligned heterojunction NDR device through the heterojunction of "cold" metal and high mobility semiconductor.
在图1中以具有EVG的“冷”金属和半导体构建的异质结为例,来分析其NDR机制。图1中的源极为具有EVG的“冷”金属材料,沟道和漏极分别为本征和p型掺杂的半导体材料。通过VGS的调控将半导体的带隙移动到费米能级之上。Ⅰ-Ⅳ表示各种偏置电压(VDS)下的能带对齐图。与传统的Ⅲ型能带对齐半导体异质结不同,本发明的“冷”金属异质结MOSFET在沟道中具有更宽的载流子传输路径,有利于实现更大峰值电流和电流峰谷比。当偏置电压VDS=V1时,漏极的费米能级(εD)和半导体价带顶(VBM)之间载流子的传输宽度达到最大值,电流达到峰值。当偏置电压VDS=V2时,由于“冷”金属和半导体的带隙重叠阻碍了载流子输运,电流减小并到达谷点。当偏置电压VDS=V3时,在半导体的VBM下方出现空穴的传输路径,电流开始重新上升。结果表明,εD与VBM之间载流子传输路径的宽度是决定峰值电流大小的关键因素。由于VGS反比于传输路径的宽度,因此峰值电流与VGS成反比。对于电流峰谷比,随着VGS的减小,需要更大的VDS来移动半导体的带隙使其与源极的带隙重叠。这导致在电流谷点时的εD更接近源极的VBM,使得空穴通过半导体VBM的传输效率更高,谷值电流和电流峰谷比变大。因此,电流峰谷比与VGS成正比。In Figure 1, a "cold" metal-semiconductor-constructed heterojunction with E VG is used as an example to analyze its NDR mechanism. The source in Figure 1 is a "cold" metallic material with E VG , and the channel and drain are intrinsic and p-type doped semiconductor materials, respectively. The bandgap of the semiconductor is moved above the Fermi level by the modulation of VGS . I-IV represent band alignment diagrams at various bias voltages (V DS ). Different from the traditional type III energy band-aligned semiconductor heterojunction, the "cold" metal heterojunction MOSFET of the present invention has a wider carrier transmission path in the channel, which is beneficial to achieve larger peak current and current peak-to-valley ratio . When the bias voltage V DS =V 1 , the transport width of carriers between the Fermi level (ε D ) of the drain and the valence band top (VBM) of the semiconductor reaches the maximum value, and the current reaches the peak value. When the bias voltage V DS = V 2 , the current decreases and reaches the valley point due to the band gap overlap of the "cold" metal and semiconductor hindering carrier transport. When the bias voltage V DS = V 3 , a transport path for holes appears under the VBM of the semiconductor, and the current starts to rise again. The results show that the width of the carrier transport path between ε D and VBM is the key factor determining the magnitude of the peak current. Since VGS is inversely proportional to the width of the transmission path, the peak current is inversely proportional to VGS . For the current peak-to-valley ratio, as VGS decreases, a larger VDS is required to move the semiconductor's bandgap so that it overlaps the source's bandgap. This results in that the ε D at the current valley point is closer to the VBM of the source, which makes the hole transport efficiency through the semiconductor VBM higher, and the valley current and current peak-to-valley ratio become larger. Therefore, the current peak-to-valley ratio is proportional to VGS .
图1.不同偏置电压(VDS)下的能带对齐图。εS和εD分别是源极和漏极的费米能级。红色箭头的宽度表示电流的大小。图中粉红色部分为“冷”金属和半导体材料的带隙。Figure 1. Band alignment plots at different bias voltages (V DS ). εS and εD are the Fermi levels of the source and drain, respectively. The width of the red arrow indicates the magnitude of the current. The pink part of the figure is the band gap of "cold" metal and semiconductor materials.
本发明不同于现有的重掺杂隧道二极管或是Ⅲ型能带对齐的半导体异质结,本发明采用了具有费米能级附近的带隙的“冷”金属来构建具有“冷”金属源极的MOSFET。由于“冷”金属源极独特的带隙结构使其能实现优异的NDR性能。同时高迁移率半导体确保其能产生较大的峰值电流。此外,调节MOSFET的VGS还可以有效调控MOSFET的峰值电流和电流峰谷比。Unlike existing heavily doped tunnel diodes or semiconductor heterojunctions with band-aligned type III, the present invention uses a "cold" metal with a band gap near the Fermi level to construct a "cold" metal source MOSFET. Due to the unique bandgap structure of the "cold" metal source, it can achieve excellent NDR performance. At the same time, high mobility semiconductors ensure that they can generate large peak currents. In addition, adjusting the V GS of the MOSFET can also effectively control the peak current and the current peak-to-valley ratio of the MOSFET.
本文中所描述的具体实施例仅仅是对本发明精神作举例说明。本发明所属技术领域的技术人员可以对所描述的具体实施例做各种各样的修改或补充或采用类似的方式替代,但并不会偏离本发明的精神或者超越所附权利要求书所定义的范围。The specific embodiments described herein are merely illustrative of the spirit of the invention. Those skilled in the art to which the present invention pertains can make various modifications or additions to the described specific embodiments or substitute in similar manners, but will not deviate from the spirit of the present invention or go beyond the definition of the appended claims range.
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CN112424917A (en) * | 2018-06-06 | 2021-02-26 | 港大科桥有限公司 | Metal oxide semiconductor field effect transistor with cold source |
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CN112424917A (en) * | 2018-06-06 | 2021-02-26 | 港大科桥有限公司 | Metal oxide semiconductor field effect transistor with cold source |
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