CN114400195B - ATE-based universal CIS chip test system and method - Google Patents
ATE-based universal CIS chip test system and method Download PDFInfo
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Abstract
The invention discloses a universal CIS chip testing system and a universal CIS chip testing method based on ATE, wherein the system comprises the following components: the system comprises a system test module, a light source control module, a light source attenuation module, a light source calibration module, a light source module and an analysis processing module. The invention performs multi-gear control on the light source control module and the light source attenuation module to achieve the aim of high precision, thereby meeting the test light source required by a test chip, and can use the automatic test equipment to perform precise calibration operation on the light source control module, the light source attenuation module and the light source calibration module, further eliminate the change of the light intensity of the test light caused by the instability of a light source driving power supply and the change of the illumination intensity caused by the aging of a light source luminescent material, thereby eliminating the test error caused by the change of the light intensity and achieving the aim of improving the test precision.
Description
Technical Field
The invention relates to the field of integrated circuits, in particular to a universal CIS chip testing system and a universal CIS chip testing method based on ATE.
Background
The CMOS image sensor is an image sensor manufactured by using CMOS technology, and its operating principle is that a photodiode is used for photoelectric conversion at each pixel point and an amplifier and an a/D conversion circuit are used to convert an image into a stable electrical signal. Compared with a CCD image sensor, a CMOS image sensor has several key advantages: the method has the advantages of low production cost, high imaging speed, easier system integration, low power consumption, wide dynamic range, strong radiation resistance and the like, so that a CIS (CMOS Image Sensor) chip can grow rapidly. In addition, with the rapid development of smart phones, internet of things, biological recognition and life sciences, the CIS chip is also rapidly growing into one of the most glaring products in the semiconductor industry.
After the CIS chip is prepared, the CIS chip needs to be tested before being sold, so that the delivery yield is ensured. With the rapid development of the CIS chip technology, higher requirements are also put on the testing of the CIS chip. The main technical requirements are as follows: 1. the demand for test data rates is currently increasing dramatically for pixels of CIS chips up to tens of millions of pixels. Therefore, the use of a high-speed data interface is typically required to accomplish the transfer of such high pixel data volumes. Generally, there are high-speed data transmission protocols such as MIPI (Mobile Industry Processor Interface), LVDS (Low Voltage Differential Signaling) and the like. 2. The CIS chip test needs to define and use parallel light with different brightness according to different product application fields and use scenes in the mass production process, and the parallel light needs to maintain illumination intensity to be unchanged in the long-term mass production test process.
The challenge brought by the above two problems is difficult to be solved by a universal CIS chip testing scheme. Therefore, the current mainstream CIS chip test schemes all select a proper light source according to the test requirements and specifications of the product and make a corresponding test solution. However, this brings a problem that each product is a customized test solution for the test factory, and each product has different light sources, test hardware, and even different test devices. This results in a significant maintenance pressure on the hardware and requires different software calibration and exception handling mechanisms for each product, which can present a significant quality risk. Meanwhile, the test schemes all adopt customized schemes, and most of the test schemes do not consider factors such as reduction of illumination intensity caused by light source aging in the long-term mass production process. This causes quality anomalies that may occur at any time during mass production testing of the product.
Disclosure of Invention
The invention aims to provide a CIS chip testing system and method based on ATE (automatic test equipment) to realize accurate testing of a common CIS chip under the illumination intensity defined by the specification, and a light source calibration module can be used for effectively correcting the brightness of a light source, prolonging the service life of the light source and realizing automatic program maintenance in the mass production process.
In order to solve the above technical problem, the present invention provides an ATE-based universal chip test system, which includes:
the system test module is used for controlling the test light source to emit test light rays with different light intensities so as to obtain a test result of the chip;
the light source control module is connected with the system test module and controls the test light source to carry out multi-gear brightness adjustment according to the light source brightness parameters of the system test module;
the light source module is connected with the light source control module and emits a test light source according to a light source brightness control instruction of the light source control module;
the light source attenuation module is connected with the system test module, controls the light source module to carry out multi-order attenuation degree adjustment according to light source attenuation degree parameters of the system test module, and is used for testing a chip to be tested after the light source is subjected to light intensity attenuation through the light source attenuation module;
the light source calibration module is connected with the system test module and used for detecting and comparing the matching degree of the test light source and the light source required by the chip to be tested and feeding back the compensation parameters to the system test module;
and the analysis processing module is connected with the system testing module, determines a light source brightness parameter and a light source attenuation parameter of the testing light source according to the testing requirement of the chip to be tested, analyzes the sampling result of the chip to be tested, and screens out qualified chips.
Further, in the ATE-based universal chip test system, the light source brightness parameters include 1024-step gears, and the light source modules emit test light sources with different brightness at different gears.
Further, in the ATE-based universal chip test system, the light source attenuation parameter includes a 10-order attenuation, which is used to perform corresponding attenuation on the test light source.
In addition, in another aspect of the present invention, an ATE-based universal chip testing method is further provided, which employs the ATE-based universal chip testing system as described above, and includes the following steps:
the analysis processing module determines a light source brightness parameter and a light source attenuation parameter of a test light source according to the test requirement of the chip to be tested, and respectively sends the light source brightness parameter and the light source attenuation parameter to the light source control module and the light source attenuation module through the system test module;
the light source control module controls the light source module to emit a test light source with multi-gear brightness according to the light source brightness parameters;
the light source attenuation module is used for carrying out multi-order attenuation control according to the light source attenuation parameter and is used for carrying out multi-order attenuation on the test light source, and the attenuated test light source is used for testing a chip to be tested;
the light source calibration module detects the test light source, compares the test light source with the light source intensity required by the chip to be tested to obtain a compensation parameter, and feeds the compensation parameter back to the system test module;
the system test module respectively performs multi-gear adjustment on the light source control module and the light source attenuation module according to the compensation parameters to obtain test light meeting the test requirements of the chip to be tested;
entering a test program, and carrying out sampling processing and uploading test data on a chip to be tested by the system test module;
and the analysis processing module judges and screens according to the uploaded test data.
Further, in the ATE-based universal chip testing method, the obtaining of the compensation parameter includes the following steps:
detecting and comparing the light intensity of the current test light source with the light intensity difference value of the light source required by the test of the chip to be tested, adjusting the light source brightness parameter and the light source attenuation parameter according to the difference value, and feeding back the light source brightness parameter and the light source attenuation parameter to the system test module;
the system test module controls the light source module and the light source attenuation module to emit required test light sources according to the adjusted light source brightness parameter and the adjusted light source attenuation parameter;
and repeating the steps until the light intensity of the test light source is consistent with the light intensity of the light source required by the test of the chip to be tested.
Furthermore, in the test method based on the ATE general chip, a test program is entered, the chip to be tested enters a working mode and executes a test, and the system test module performs sampling processing and uploading on test image data of the chip to be tested;
and the analysis processing module judges the quality of the chip to be tested according to the uploaded test image data and screens out the chip which is qualified in the test.
Further, in the ATE-based universal chip testing method, screening out chips that pass the test includes the following steps:
comparing the return value of the image analysis operation with the chip required value, and judging the quality of the test chip according to the comparison result;
and returning the data of the quality judgment result of the test chip to the mechanical arm and the probe station of the test machine table, and classifying the test chip by the litigation mechanical arm and the probe station according to the result.
Compared with the prior art, the invention at least has the following beneficial effects:
the invention carries out multi-gear control on the light source control module and the light source attenuation module to achieve the aim of high precision, thereby meeting the test light source required by a test chip, and can use automatic test equipment to carry out precise calibration operation on the light source control module, the light source attenuation module and the light source calibration module, further eliminate the change of the light intensity of the test light caused by the unstable light source driving power supply and the change of the illumination intensity caused by the aging of the light source luminescent material, thereby eliminating the test error caused by the change of the light intensity and achieving the aim of improving the test precision.
Drawings
Fig. 1 is a schematic diagram of the overall structure of an ATE-based CIS chip testing system.
Detailed Description
While the ATE-based Universal chip test System and method of the present invention will be described in greater detail in the following with reference to the accompanying schematic drawings, in which preferred embodiments of the invention are shown, it is to be understood that one skilled in the art can modify the invention herein described while still achieving the advantageous effects of the invention. Accordingly, the following description should be construed as broadly as possible to those skilled in the art and not as limiting the invention.
The invention is described in more detail in the following paragraphs by way of example with reference to the accompanying drawings. The advantages and features of the present invention will become more apparent from the following description. It is to be noted that the drawings are in a very simplified form and are not to precise scale, which is merely for the purpose of facilitating and distinctly claiming the embodiments of the present invention.
The embodiment of the invention provides a Test system based on an ATE (Automatic Test Equipment) universal chip. In this embodiment, the to-be-tested chip of the CIS chip is taken as an example for detailed description.
Specifically, as shown in fig. 1, the test system includes:
the system testing module is used for controlling the testing light source to emit testing light rays with different light intensities and acquiring a testing result of the CIS chip;
the light source control module is connected with the system test module and controls the test light source to carry out multi-gear brightness adjustment according to the light source brightness parameters of the system test module;
the light source module is connected with the light source control module and emits a test light source according to a light source brightness control instruction of the light source control module;
the light source attenuation module is connected with the system test module and the light source module, the light source module is controlled to carry out multi-stage attenuation degree adjustment according to light source attenuation degree parameters of the system test module, and the test light source is used for testing a chip to be tested after light intensity is attenuated by the light source attenuation module;
the light source calibration module is connected with the system test module and used for detecting and comparing the matching degree of the test light source and the light source required by the CIS chip and feeding back compensation parameters to the system test module;
and the analysis processing module is connected with the system testing module, determines a light source brightness parameter and a light source attenuation parameter of the testing light source according to the testing requirement of the CIS chip, analyzes the sampling result of the CIS chip and screens out qualified CIS chips.
The light source brightness parameters comprise 1024-step gears, and the light source modules emit test light sources with different brightness at different gears. The light source attenuation degree parameter comprises 10-order attenuation degree and is used for correspondingly attenuating the test light source.
In addition, in another aspect of this embodiment, a CIS chip testing method based on ATE is further provided, where the CIS chip testing method is implemented by using the ATE-based CIS chip testing system described above, and the specific testing method includes the following steps:
the analysis processing module determines a light source brightness parameter and a light source attenuation parameter of a test light source according to the test requirement of the chip to be tested, and respectively sends the light source brightness parameter and the light source attenuation parameter to the light source control module and the light source attenuation module through the system test module;
the light source control module controls the light source module to emit a test light source with multi-gear brightness according to the light source brightness parameters;
the light source attenuation module is used for carrying out multi-order attenuation control according to the light source attenuation parameter and is used for carrying out multi-order attenuation on the test light source, and the attenuated test light source is used for testing a chip to be tested;
the light source calibration module detects the test light source, compares the test light source with the light source intensity required by the chip to be tested to obtain a compensation parameter, and feeds the compensation parameter back to the system test module;
the system test module respectively performs multi-gear adjustment on the light source control module and the light source attenuation module according to the compensation parameters to obtain test light meeting the test requirements of the chip to be tested;
entering a test program, and carrying out sampling processing and uploading test data on a chip to be tested by the system test module;
and the analysis processing module judges and screens according to the uploaded test data.
Wherein, the obtaining of the compensation parameter comprises the following steps:
detecting and comparing the light intensity of the current test light source with the light intensity difference value of the light source required by the test of the chip to be tested, adjusting the light source brightness parameter and the light source attenuation parameter according to the difference value, and feeding back the light source brightness parameter and the light source attenuation parameter to the system test module;
the system test module controls the light source module and the light source attenuation module to emit required test light sources according to the adjusted light source brightness parameter and the adjusted light source attenuation parameter;
and repeating the steps until the light intensity of the test light source is consistent with the light intensity of the light source required by the test of the chip to be tested.
Entering a test program, enabling a chip to be tested to enter a working mode and execute a test, and enabling the system test module to sample and process test image data of the chip to be tested and upload the test image data;
and the analysis processing module judges the quality of the chip to be tested according to the uploaded test image data and screens out the chip which is qualified in the test.
The screening of the chips qualified in the test comprises the following steps:
comparing the return value of the image analysis operation with the chip required value, and judging the quality of the test chip according to the comparison result;
and returning the data of the quality judgment result of the test chip to the mechanical arm and the probe station of the test machine table, and classifying the test chip by the litigation mechanical arm and the probe station according to the result.
The following specific examples are given for details, and the test method is:
(1) and the analysis processing module determines a light source brightness parameter and a light source attenuation parameter of the test light source according to the test requirement of the CIS chip to be tested.
Specifically, the system test module selects an illumination intensity requirement meeting the product test specification according to the test requirement of the CIS chip, and simultaneously substitutes the illumination intensity requirement into the analysis processing module to automatically generate an optimal light source brightness parameter S _ step1 and an optimal light source attenuation parameter S _ att 1.
(2) The light source control module and the light source attenuation module respectively carry out brightness control and attenuation control on the light source module according to the light source brightness parameter and the light source attenuation parameter, and meanwhile, the light source module is tested and compensated to obtain test light matched with the test requirement of the CIS chip.
Specifically, the light source control module comprises a 1024-gear light source controller, which can perform self-help adjustment of 1024 gears on the light intensity of the light source module, and the light source module emits light sources with different brightness at different gears; the light source attenuation module comprises 10-order automatic light source attenuation control capability, 10-order attenuation of the illumination intensity of the light source module can be realized, and the light source module can emit light sources with different attenuation brightness under different attenuation degrees.
Under each gear of the light source control module, 10-order illumination attenuation degree adjustment can be performed, namely, 10 different illumination brightness are provided under each gear. Under the common control of the light source control module and the light source attenuation module, 10240 kinds of illumination with different brightness can be formed. Recording: the attenuation 1 step under the illumination brightness of 1 st gear is C _ S1A1, the attenuation 10 step under the illumination brightness of 1024 th gear is C _ S1024A10, and so on.
The analysis processing module will finally obtain 10240 data including possible illumination intensities of all the light source control modules and the light source attenuation module M3, where the data range is: and C _ S1A 1-C _ S1024A10, and the data are substituted into the light source calibration module for relevant calibration to form a corresponding calibration algorithm revision value.
The test calibration method comprises the following steps: detecting and comparing the light intensity of the current test light source with the light intensity difference value of the CIS chip test requirement light source, and adjusting the light source brightness parameter and the light source attenuation parameter according to the difference value; and controlling the light source module to emit a test light source matched with the parameters according to the adjusted light source brightness parameters and the adjusted light source attenuation parameters, and repeating the steps until the light intensity of the test light source is matched with the light intensity of the light source required by the CIS chip test.
The analysis processing module substitutes parameters of light source brightness 'S _ step 1' and light intensity attenuation degree 'S _ att 1' required by a test product, assists a corresponding algorithm to generate calibrated parameters of light source brightness 'S _ step' and light intensity attenuation degree 'S _ att', and sends the calibrated parameters to the system test module.
(3) The CIS chip enters a test program, enters a correct working mode and executes a test, and simultaneously, the system test module performs sampling processing and uploading on image data of the CIS chip.
Specifically, the system test module controls the light source attenuation module to configure the optimal light intensity attenuation degree "S _ att" according to the product test requirements, and the light source attenuation module automatically executes related operations and configures to a correct light source attenuation gear. At the same time. The test system module controls the light source control module to configure the optimal light source brightness S _ step according to the product test requirement, and the light source control module controls the light source module to emit the illumination intensity corresponding to the configuration.
After the light source is adjusted, the system test module executes a test program and controls the chip to be tested to enter a correct working mode and execute related tests, image data obtained by the tests are uploaded to the system test module, and the system test module samples and processes the related image data.
(4) And judging the quality of the CIS chip according to the returned test data, and screening the CIS chip which is qualified in test.
Specifically, the system test module uploads the image data of the sampled chip to the analysis processing module, and the analysis processing module substitutes the data into the image algorithm operation library defined by the program to execute the relevant operation and returns the result of the relevant test value. The analysis processing module automatically compares the return value of the image analysis operation with the specification of the chip test, judges the quality of the product and transmits the related result back to the mechanical arm and the probe station so as to facilitate the mechanical arm and the probe station to classify the product.
Compared with the prior art, the invention at least has the following effects:
the invention carries out multi-gear control on the light source control module and the light source attenuation module to achieve the aim of high precision, thereby meeting the test light source required by a test chip, and can use automatic test equipment to carry out precise calibration operation on the light source control module, the light source attenuation module and the light source calibration module, further eliminate the change of the light intensity of the test light caused by the unstable light source driving power supply and the change of the illumination intensity caused by the aging of the light source luminescent material, thereby eliminating the test error caused by the change of the light intensity and achieving the aim of improving the test precision.
It will be apparent to those skilled in the art that various changes and modifications may be made in the present invention without departing from the spirit and scope of the invention. Thus, if such modifications and variations of the present invention fall within the scope of the claims of the present invention and their equivalents, the present invention is also intended to include such modifications and variations.
Claims (7)
1. An ATE-based universal chip test system, comprising:
the system test module is used for controlling the test light source to emit test light rays with different light intensities so as to obtain a test result of the chip;
the light source control module is connected with the system test module and controls the test light source to carry out multi-gear brightness adjustment according to the light source brightness parameters of the system test module;
the light source module is connected with the light source control module and emits a test light source according to a light source brightness control instruction of the light source control module;
the light source attenuation module is connected with the system test module, controls the light source module to carry out multi-order attenuation degree adjustment according to light source attenuation degree parameters of the system test module, and is used for testing a chip to be tested after the light source is subjected to light intensity attenuation through the light source attenuation module;
the light source calibration module is connected with the system test module and used for detecting and comparing the matching degree of the test light source and the light source required by the chip to be tested and feeding back the compensation parameters to the system test module;
and the analysis processing module is connected with the system testing module, determines the light source brightness parameter and the light source attenuation parameter of the testing light source according to the testing requirement of the chip to be tested, analyzes the sampling result of the chip to be tested, and screens out qualified chips.
2. The ATE-based universal chip test system according to claim 1, wherein the light source brightness parameters comprise 1024 steps, and the light source modules emit test light sources with different brightness at different steps.
3. The ATE-based universal chip test system according to claim 1, wherein the light source attenuation parameter comprises a 10-order attenuation for a corresponding attenuation of the test light source.
4. An ATE-based universal chip test method employing the ATE-based universal chip test system according to any one of claims 1 to 3, the method comprising the steps of:
the analysis processing module determines a light source brightness parameter and a light source attenuation parameter of a test light source according to the test requirement of the chip to be tested, and respectively sends the light source brightness parameter and the light source attenuation parameter to the light source control module and the light source attenuation module through the system test module;
the light source control module controls the light source module to emit a test light source with multi-gear brightness according to the light source brightness parameters;
the light source attenuation module is used for carrying out multi-order attenuation control according to the light source attenuation parameter and is used for carrying out multi-order attenuation on the test light source, and the attenuated test light source is used for testing a chip to be tested;
the light source calibration module detects the test light source, compares the test light source with the light source intensity required by the chip to be tested to obtain a compensation parameter, and feeds the compensation parameter back to the system test module;
the system test module respectively performs multi-gear adjustment on the light source control module and the light source attenuation module according to the compensation parameters to obtain test light meeting the test requirements of the chip to be tested;
entering a test program, and carrying out sampling processing and uploading test data on a chip to be tested by the system test module;
and the analysis processing module judges and screens according to the uploaded test data.
5. The ATE-based universal chip test method of claim 4, wherein the obtaining of the compensation parameter comprises the steps of:
detecting and comparing the light intensity of the current test light source with the light intensity difference value of the light source required by the test of the chip to be tested, adjusting the light source brightness parameter and the light source attenuation parameter according to the difference value, and feeding back the light source brightness parameter and the light source attenuation parameter to the system test module;
the system test module controls the light source module and the light source attenuation module to emit required test light sources according to the adjusted light source brightness parameter and the adjusted light source attenuation parameter;
and repeating the steps until the light intensity of the test light source is consistent with the light intensity of the light source required by the test of the chip to be tested.
6. The ATE-based universal chip test method as recited in claim 4, wherein a test program is entered, the chip to be tested enters an operation mode and performs a test, and the system test module samples and uploads test image data of the chip to be tested;
and the analysis processing module judges the quality of the chip to be tested according to the uploaded test image data and screens out the chip which is qualified in the test.
7. The ATE-based universal chip test method of claim 6, wherein screening for chips that pass the test comprises the steps of:
comparing the return value of the image analysis operation with the chip required value, and judging the quality of the test chip according to the comparison result;
and returning the data of the quality judgment result of the test chip to the mechanical arm and the probe station of the test machine table, and classifying the test chip by the litigation mechanical arm and the probe station according to the result.
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