CN114396790B - Blowing and drying device and blowing and drying system - Google Patents
Blowing and drying device and blowing and drying system Download PDFInfo
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- CN114396790B CN114396790B CN202210031516.7A CN202210031516A CN114396790B CN 114396790 B CN114396790 B CN 114396790B CN 202210031516 A CN202210031516 A CN 202210031516A CN 114396790 B CN114396790 B CN 114396790B
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- air inlet
- air
- side wall
- support
- drying device
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F26—DRYING
- F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
- F26B21/00—Arrangements or duct systems, e.g. in combination with pallet boxes, for supplying and controlling air or gases for drying solid materials or objects
- F26B21/004—Nozzle assemblies; Air knives; Air distributors; Blow boxes
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B5/00—Cleaning by methods involving the use of air flow or gas flow
- B08B5/02—Cleaning by the force of jets, e.g. blowing-out cavities
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F26—DRYING
- F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
- F26B21/00—Arrangements or duct systems, e.g. in combination with pallet boxes, for supplying and controlling air or gases for drying solid materials or objects
- F26B21/001—Drying-air generating units, e.g. movable, independent of drying enclosure
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F26—DRYING
- F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
- F26B21/00—Arrangements or duct systems, e.g. in combination with pallet boxes, for supplying and controlling air or gases for drying solid materials or objects
- F26B21/06—Controlling, e.g. regulating, parameters of gas supply
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F26—DRYING
- F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
- F26B25/00—Details of general application not covered by group F26B21/00 or F26B23/00
- F26B25/06—Chambers, containers, or receptacles
- F26B25/14—Chambers, containers, receptacles of simple construction
- F26B25/18—Chambers, containers, receptacles of simple construction mainly open, e.g. dish, tray, pan, rack
- F26B25/185—Spacers; Elements for supporting the goods to be dried, i.e. positioned in-between the goods to build a ventilated stack
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Drying Of Solid Materials (AREA)
Abstract
The invention relates to the technical field of drying of parts to be dried and discloses a blowing and drying device and a blowing and drying system. The blowing and drying device comprises a support bedplate and a support side wall, wherein the support bedplate is used for being laid on a frame and comprises an upper side plate surface and a lower side plate surface which are oppositely arranged in the bedplate thickness direction; the support side wall is arranged on the upper side plate surface and surrounds at least one part of plate area of the support bedplate, the support side wall and at least one part of plate area are enclosed to form an air cavity, the upper portion of the support side wall is opened to form an air outlet of the air cavity, the support side wall is configured to be used for supporting the part to be dried so that the part to be dried supported on the support side wall can cover the air outlet, and an air inlet structure communicated with the air cavity is arranged on the wall of the air cavity. The blowing and drying device can blow and dry the parts to be dried, such as a diffuser, so that the drying time is shortened, the labor intensity is reduced, and the generation efficiency is improved.
Description
Technical Field
The invention relates to the technical field of drying of parts to be dried, in particular to a blowing and drying device and a blowing and drying system.
Background
Currently, the CVD (Chemical Vapor Deposition) film forming process is the basis of the entire integrated circuit industry and the panel industry, and directly determines the performance and reliability of semiconductor devices. For example, when the chamber of the vacuum apparatus is evacuated to a vacuum state at a high temperature, a reactive gas is introduced, a high frequency power is applied to an upper electrode (also called a diffuser) to form an electric field, the reactive gas is ionized under the action of the electric field to form a highly chemically active plasma (electrically neutral as a whole), a lower electrode and a heating susceptor provide temperature and support a glass substrate, and the plasma is combined on the glass substrate to form a desired semiconductor thin film under the action of the electric field. In the chemical vapor deposition apparatus, the diffuser has a diffusing function of uniformly diffusing a gas on a glass substrate, and also functions as a plasma electrode.
In actual production, the diffuser is degraded in performance after long-term use, and particles are easily generated, thereby causing degradation of product quality, and therefore, cleaning and maintenance are required. However, the existing cleaning and maintaining mode has the problems of long baking time (usually more than 5 hours), high energy consumption, high labor intensity of manual purging, low production efficiency and the like.
Disclosure of Invention
In view of at least one of the problems in the prior art as described above, it is an object of the present invention to provide a purge drying device capable of purging a part to be dried, such as a diffuser, while drying, to shorten drying time, reduce labor intensity, and improve production efficiency.
In order to achieve the above object, the present invention provides a purge drying device including a support platen for laying on a frame, the support platen including upper and lower board faces arranged oppositely in a platen thickness direction; the support side wall is arranged on the upper side plate surface and surrounds at least one part of plate area of the support bedplate, the support side wall and the at least one part of plate area form an air cavity, the upper part of the support side wall is opened to form an air outlet of the air cavity, the support side wall is configured to be used for supporting a component to be dried so that the component to be dried supported on the support side wall can cover the air outlet, and an air inlet structure communicated with the air cavity is arranged on the wall of the air cavity.
In this technical solution, because the supporting sidewall and at least a portion of the plate region enclose an air cavity, and the upper portion of the supporting sidewall is open to form an air outlet of the air cavity, and the supporting sidewall is configured to support the component to be dried so that the component to be dried supported on the supporting sidewall can cover the air outlet, in practical use, the supporting platen can be laid on the frame, and the component to be dried, such as a diffuser or other components, is supported on the supporting sidewall, and at this time, the component to be dried covers the air outlet to form a closed space, so that the component to be dried can be stably and reliably supported, at this time, the heated compressed gas can be introduced into the closed space through the air inlet structure, and the heated compressed gas entering the closed space can rapidly flow into the interior of the component to be dried under the pressure effect, so as to perform a purging operation while rapidly heating up and drying the component to be dried, for example, the heated compressed gas rapidly flows through the air holes of the diffuser to dry the diffuser while rapidly heating up and purging operation while rapidly heating up the diffuser. Therefore, the blowing and drying device can blow and dry the parts to be dried, such as the diffuser, so that the drying time is effectively shortened, the labor intensity is reduced, and the generation efficiency is improved.
In one embodiment of the invention, the air intake structure is disposed on the at least a portion of the panel section.
In one embodiment of the present invention, the air intake structure includes an air intake cover and a plurality of air intake holes, wherein the air intake cover is disposed on the lower side plate surface to form an air intake space between the air intake cover and the lower side plate surface, the plurality of air intake holes penetrate through the platen thickness of the at least a part of the plate area and are located in the air intake space, and the air intake cover is provided with an air intake pipe communicated with the air intake space.
In one embodiment of the present invention, the plurality of air intake holes are arranged in a plurality of rows and a plurality of columns at predetermined intervals, and the number of the air intake covers is the same as the number of the rows or the columns, wherein each air intake cover covers each corresponding row of the air intake holes or each corresponding column of the air intake holes.
In one embodiment of the present invention, an adjusting cover plate is movably disposed on an upper side plate surface of the at least one part of the plate area, and the adjusting cover plate can adjust the size of the opening of at least one air inlet hole.
In an embodiment of the present invention, a plurality of adjusting holes are formed on the adjusting cover plate, each adjusting hole is arranged corresponding to each air inlet hole, and when the adjusting cover plate is moved, the overlapping area of the adjusting holes and the air inlet holes can be adjusted, so as to adjust the size of the openings of the plurality of air inlet holes simultaneously.
In one embodiment of the invention, the supporting side wall is adjustable to a set position on the upper deck surface to adjust the area of the at least a portion of the panel section.
In one embodiment of the present invention, the upper plate surface is provided with a plurality of positioning holes arranged at intervals in a direction outward from a center of the upper plate surface, and the support side walls are respectively positioned to the respective positioning holes to be adjusted to the set positions.
In one embodiment of the present invention, the support sidewall comprises an annular support sidewall and a middle support sidewall, the middle support sidewall is located in a circle surrounded by the annular support sidewall to form a plurality of mutually isolated air chambers on the at least a portion of the panel region, and each air chamber is provided with the respective air inlet structure.
In one embodiment of the invention, the intermediate support sidewall can be positionally adjusted to adjust the size of each of the air chambers.
In one embodiment of the invention, the purge drying apparatus comprises a frame, wherein the support deck is laid on the frame.
In addition, the invention provides a blowing and drying system, which comprises a heater, a heating controller and the blowing and drying device, wherein the heater comprises an air inlet end and an air outlet end, the heating controller can control the heater, and an air inlet structure of the blowing and drying device is communicated with the air outlet end.
Therefore, as described above, in practical use, a component to be dried, such as a diffuser or other components, can be supported on the supporting side wall, and at this time, the component to be dried will cover the air outlet so as to form a closed space by the air chamber, so that the component to be dried can be stably and reliably supported. Thus, the blowing and drying system can blow and dry the parts to be dried, such as the diffuser, so that the drying time is effectively shortened, the labor intensity is reduced, and the generation efficiency is improved.
It will be apparent that elements or features described in a single embodiment above may be used alone or in combination in other embodiments.
Drawings
In the drawings, the size and the proportion do not represent the size and the proportion of an actual product. The figures are merely illustrative and certain unnecessary elements or features have been omitted for clarity.
Fig. 1 is a schematic perspective view schematically illustrating a top view of a purge drying device according to an embodiment of the present invention.
Fig. 2 is a schematic top view of the blow drying device of fig. 1.
Fig. 3 is a schematic perspective view of the purge drying device of fig. 1 from a bottom perspective.
Fig. 4 is a schematic bottom view of the purge drying device of fig. 1.
Fig. 5 is a schematic side view of the purge drying device of fig. 1.
Fig. 6 is a schematic view exemplarily showing the size of an orifice of a regulation air intake hole in a purge drying device according to another embodiment of the present invention.
Fig. 7 is a schematic top view schematically illustrating a purge drying device according to still another embodiment of the present invention.
Fig. 8 is a simplified schematic diagram schematically illustrating a purge drying system according to an embodiment of the present invention.
Description of the reference numerals
1-a support platen, 2-a frame, 3-an upper platen, 4-a lower platen, 5-at least a portion of a platen region, 6-an air cavity, 7-an air inlet hood, 8-an air inlet, 9-an air inlet, 10-an adjusting cover plate, 11-an adjusting hole, 12-an annular support sidewall, 13-a middle support sidewall, 14-a heater, 15-a heating controller, 16-a blowing and drying device, 17-a support step, 18-a pressure regulating valve, 19-an air inlet valve, and 20-a control valve.
Detailed Description
The elastic module and the elastic pad of the present invention will be described in detail with reference to the accompanying drawings. What has been described herein is merely a preferred embodiment in accordance with the present invention and other ways of practicing the invention will occur to those skilled in the art and are within the scope of the invention.
Fig. 1 exemplarily shows a purge drying apparatus according to one embodiment of the present invention, and fig. 7 exemplarily shows a purge drying apparatus according to another embodiment of the present invention. With reference to fig. 1-6 and 7, the present invention provides a blow drying device comprising a support platen 1 and a support sidewall, wherein the support platen 1 is used for laying on a frame 2, it should be noted that "for laying on a frame 2" is used herein for illustrating the use of the support platen 1, that is, the blow drying device can be used as a stand-alone product, wherein the stand-alone product may not comprise the frame 2, and in actual use, the support platen 1 will be laid on the frame 2, and at the same time, the support platen 1 comprises an upper platen surface 3 and a lower platen surface 4 which are oppositely arranged in the thickness direction of the platen; the supporting side wall is arranged on the upper side plate surface 3 and surrounds at least one part of the plate area 5 of the supporting bedplate 1, the supporting side wall and at least one part of the plate area 5 enclose an air cavity 6, the upper part of the supporting side wall is opened to form an air outlet of the air cavity 6, the supporting side wall is configured to be used for supporting the part to be dried so that the part to be dried supported on the supporting side wall can cover the air outlet, wherein an air inlet structure communicated with the air cavity 6 is arranged on the wall of the air cavity 6, namely, the air inlet structure can be arranged on the supporting side wall of the air cavity 6 or can be arranged on the bottom wall (namely, at least one part of the plate area 5) of the air cavity 6.
In the blowing and drying device, the supporting side wall and at least a part of the plate area 5 enclose a gas cavity 6, the upper part of the supporting side wall is opened to form a gas outlet of the gas cavity 6, and the supporting side wall is configured to support the component to be dried so that the component to be dried supported on the supporting side wall can cover the gas outlet, so that in practical use, the supporting platen 1 can be laid on the frame 2, the component to be dried, such as a diffuser or other components, is supported on the supporting side wall, and the component to be dried covers the gas outlet to form a closed space, so that the component to be dried can be stably and reliably supported, at the moment, the heated compressed gas can be introduced into the closed space through the gas inlet structure, the heated compressed gas entering the closed space can rapidly flow into the inside of the component to be dried under the pressure, so as to perform blowing operation while drying the component to be rapidly heated and heating the temperature of the component to be dried, for example, the heated compressed gas can rapidly flow through the heated gas outlet of the diffuser to perform blowing operation while drying the diffuser. Therefore, the blowing and drying device can blow and dry the parts to be dried, such as the diffuser, so that the drying time is effectively shortened, the labor intensity is reduced, and the generation efficiency is improved.
As mentioned above, the air inlet structure may be provided at any position of the cavity wall of the air cavity 6. For example, in one embodiment, referring to fig. 1-5, the air inlet structure is provided on the bottom wall of the air cavity 6, i.e. on at least a portion of the panel region 5. In this way, the air inlet structure provided on at least a part of the panel region 5 may be disposed opposite to the air outlet of the air chamber 6, so that the heated compressed air introduced into the closed space from the air inlet structure may be directly blown to the part to be dried, thereby further shortening the drying time.
In addition, in the purge drying device, the gas inlet structure may include various types, regardless of the type of the gas inlet structure, as long as it can be provided on at least a part of the plate region 5 and can feed the heated compressed gas into the gas chamber 6. For example, in one type of air inlet arrangement, the air inlet arrangement comprises an air inlet duct which may extend directly through at least a portion of the panel region 5 into the air cavity 6. Alternatively, in another type of the air intake structure, referring to fig. 1 to 7, the air intake structure includes an air intake cover 7 and a plurality of air intake holes 8, wherein the air intake cover 7 is provided on the lower board surface 4 so as to enclose an air intake space between the air intake cover 7 and the lower board surface 4, the plurality of air intake holes 8 penetrate through at least a part of the thickness of the board section 5 and are located in the air intake space, and the air intake cover 7 is provided with an air intake pipe 9 communicating with the air intake space. In this way, the heated compressed air can enter the air intake space from the air intake pipe 9, then enter the air cavity 6 from the plurality of air intake holes 8 in the whole air intake space and directly blow toward the part to be dried which is covered on the air outlet.
In addition, the plurality of intake holes 8 may be irregularly arranged, or the plurality of intake holes 8 may be regularly arranged, for example, the plurality of intake holes 8 may be formed as a multi-turn intake hole. Or, referring to fig. 1, fig. 2, and fig. 7, the plurality of air inlets 8 are arranged in multiple rows and multiple columns at a predetermined interval, and any required value may be selected for the line interval and the column interval according to actual requirements, for example, 45 air inlets 8 may be arranged at a fixed predetermined interval, and the air inlets may be arranged in 5 rows and 9 columns, the line interval may be 40 to 60cm, the column interval may be 40 to 50cm, and the diameter of the air inlets 8 may be 25.4mm or other values. The air inlet hoods 7 are a plurality of rows or columns, wherein each air inlet hood 7 covers each corresponding air inlet 8 or each air inlet 8. For example, referring to fig. 3 and 4, each intake hood 7 covers each travel vent 8. Thus, the inlet hoods 7 do not cover the portions between the rows or between the columns, and accordingly the inlet space is reduced to reduce the diffusibility of the heated compressed gas into the inlet space, so that the heated compressed gas is more quickly blown toward the member to be dried at the outlet, thereby improving the drying efficiency.
In addition, referring to fig. 6, an adjusting cover plate 10 is movably disposed on the upper side plate surface of at least a part of the plate area 5, and the adjusting cover plate can adjust the size of the opening of at least one air inlet 8. In this way, the size of the opening of the air intake hole 8 can be adjusted according to the type of the part to be dried, thereby adjusting the intake amount of the heated compressed gas, for example, when a large amount of the heated compressed gas is required, the opening of the air intake hole 8 can be enlarged to increase the intake amount of the heated compressed gas.
In addition, the adjustment cover 10 may be rotatably or movably disposed. In addition, a respective adjusting cover plate 10 can be provided at each air inlet aperture 8. Alternatively, a plurality of adjusting holes 11 are formed in the adjusting cover plate 10, each adjusting hole 11 is arranged corresponding to each air inlet 8, and the overlapping area of the adjusting holes 11 and the air inlets 8 can be adjusted when the adjusting cover plate 10 moves, such as moves or rotates, so as to adjust the size of the openings of the plurality of air inlets 8 at the same time. That is, one adjusting cover plate 10 can adjust the sizes of the openings of the plurality of air intake holes 8 at the same time. For example, the adjusting cover plate 10 can be slidably disposed on the supporting platen 1 through the cooperation of the sliding block and the sliding groove, so that the overlapping area of the plurality of adjusting holes 11 and the plurality of air intake holes 8 can be adjusted by moving the adjusting cover plate 10, so as to adjust the size of the openings of the plurality of air intake holes 8 at the same time.
In addition, in one embodiment of the purge drying device of the present application, the support side wall can be adjusted to a set position on the upper panel surface 3 to adjust the area of at least a portion of the panel section 5. Like this, can adjust the position of supporting the lateral wall on last side face 3 according to the size of waiting to dry the part to better support the part of waiting to dry of corresponding specification, thereby make same sweep drying device can support the stoving to waiting to dry the part of different size.
In addition, the position of the supporting side wall can be adjusted in various ways, for example, in one way, the upper board surface 3 is provided with a plurality of positioning holes arranged at intervals in the direction from the center of the upper board surface 3 to the outside, and the supporting side wall can be respectively positioned to each positioning hole to be adjusted to a set position, so that according to the size of the component to be dried, only the supporting side wall needs to be positioned to each positioning hole corresponding to each position to be fixed. Or, in another mode, the upper board surface 3 is provided with a plurality of releasable buckles arranged at intervals in the direction outwards from the center of the upper board surface 3, and the support side wall can be clamped to each releasable buckle. The support side walls may include end-to-end connected multi-segment side walls, and when adjusting, only one or two of the multi-segment side walls may be adjusted, for example, four segments of side walls may enclose a rectangle, and when adjusting, only the width side wall or the length side wall may be adjusted. Or, support the lateral wall and include a plurality of annular lateral walls of variation in size, when needs adjust, only need with the annular lateral wall setting of variation in size on upside face 3 can.
In addition, in one embodiment of the purge drying device, referring to fig. 7, the support sidewall comprises an annular support sidewall 12 and an intermediate support sidewall 13, the intermediate support sidewall 13 being located within the enclosure defined by the annular support sidewall 12 to form a plurality of mutually isolated air cavities on at least a portion of the panel region 5, each air cavity being provided with a respective air inlet structure. Like this, can be according to the size of a dimension of waiting to dry the part, will wait that dry the part and place on the gas outlet of its air cavity that corresponds, then only let in the compressed gas that heats to its air cavity that corresponds through its air inlet structure that corresponds and admit air, and need not let in the compressed gas that heats to other air cavities. That is, the purge drying device thus provided may dry-purge several parts to be dried at the same time, or may dry-purge parts to be dried of different sizes.
The intermediate support sidewall 13 may have a variety of shapes, for example, the intermediate support sidewall 13 may be a single strip-shaped sidewall, or may be a cross-shaped sidewall, or may be a Y-shaped sidewall, or may be an annular sidewall having a smaller diameter than the annular support sidewall 12. The number of the annular side walls may be 1 or may be plural.
In addition, the intermediate support side walls 13 can be positionally adjusted to adjust the size of the respective air chambers. Thus, the position of the side wall of the middle support can be adjusted according to the size of the air cavity required by the part to be dried so as to adjust the size of the required air cavity. For example, the intermediate support sidewall 13 includes a fixed sidewall and a swing sidewall, and one end of the swing sidewall is connected to the fixed sidewall, so that the size of each air chamber can be adjusted by adjusting the position of the swing sidewall.
In addition, in one embodiment of the purge drying device, referring to fig. 1 and 2, the inner side of the supporting sidewall is formed with a supporting step 17, and the supporting step 17 is configured to support the member to be dried. Thus, a part of the bottom of the part to be dried can be supported on the supporting step 17 and positioned in the supporting side wall, so that the supporting side wall can limit the part to be dried, and the reliability and stability of the part to be dried are improved.
Furthermore, as mentioned above, the blow drying device, as a separate product, may not comprise the frame 2, while in use the support deck 1 may be laid on the frame 2. Alternatively, in an alternative embodiment, with reference to fig. 1, the blow drying device comprises a frame 2, wherein the support deck 1 is laid on the frame 2. In this case, in use, it is only necessary to support the member to be dried, such as a diffuser, on the supporting side walls.
In addition, referring to fig. 1, the frame 2 may be provided with a walking wheel, so that the purging and drying device may be pushed to any desired position, thereby improving the convenience of use of the purging and drying device.
In addition, referring to fig. 3, 4 and 5, the frame 2 has an interior space, and the air intake structure may be provided in the interior space of the frame 2 and supporting the deck 1. In this way, the interior space of the frame 2 may provide protection to the air intake structure.
Detailed description of the drawings, fig. 1-5 show a specific embodiment of the blowing and drying device, as shown in the drawings, a frame 2 has an internal space, an upper frame of the frame 2 is formed with an opening, a support platen 1 is laid and fixed on the upper frame, a plurality of rows and columns of air inlet holes 8 are formed on the support platen 1, an annular support side wall 12 is arranged on the support platen 1, a support step 17 is formed on the inner side of the annular support side wall 12, a plurality of air inlet covers 7 are arranged on a lower side plate surface 4 of the support platen 1, each air inlet cover 7 covers each row of the plurality of air inlet holes 8, and each air inlet cover 7 is provided with an air inlet pipe 9. In this way, in practical use, a part to be dried, such as a diffuser, can be supported on the annular support sidewall 12, and a part of the bottom of the part to be dried is supported on the support step 17 to cover the air outlet, so that the air chamber is formed into a closed space, at this time, the support step 17 can provide a limit in the transverse direction for the part to be dried, so as to improve the reliability and stability of the support of the part to be dried, and then heated compressed gas, such as compressed air, enters the air inlet hood 7 from the air inlet pipe 9, then enters the closed space through each air inlet hole 8 of each row, and the heated compressed gas entering the closed space rapidly flows into the inside of the part to be dried under pressure and rapidly flows, so as to perform a blowing operation while rapidly heating up the temperature of the part to be dried, for example, the heated compressed gas rapidly flows through the air holes of the diffuser to dry the diffuser while blowing operation is performed while rapidly heating up the temperature of the diffuser for drying.
Finally, referring to fig. 8, the present application provides a purge drying system comprising a heater 14, a heating controller 15, and a purge drying device 16 as described in any of the above, wherein the heater 14 comprises an inlet end and an outlet end, the heating controller 15 is capable of controlling the heater 14 to control the heating temperature, and the inlet structure is in communication with the outlet end.
Therefore, as described above, in practical use, a component to be dried, such as a diffuser or other components, can be supported on the supporting side wall, and at this time, the component to be dried will cover the air outlet so as to form a closed space by the air chamber, so that the component to be dried can be stably and reliably supported. Thus, the blowing and drying system can blow and dry the parts to be dried, such as the diffuser, so that the drying time is effectively shortened, the labor intensity is reduced, and the generation efficiency is improved.
In addition, referring to fig. 8, the purge drying system may include a control valve 20, the control valve 20 may be provided on the intake pipe 9 between the purge drying device and the heater 14 to adjust the intake flow rate of the heated compressed gas, and a pressure regulating valve 18 and an intake valve 19 may be provided on the intake pipe of the heater 14, and the pressure regulating valve 18 may regulate the intake pressure after the intake valve 19 is opened.
Thus, in an actual use method, the position of the supporting side wall made of Teflon material can be adjusted according to the size of the diffuser, then the diffuser is hoisted to the supporting side wall, and the blowing and drying device 16 is pushed into the oven; a butterfly valve (one form of control valve 20) is then used to connect the heater 14 to the inlet pipe 9; opening an air inlet valve 19, and adjusting the pressure of the pressure regulating valve 18 to a required pressure, such as 0.3 to 0.7MPa; turning on a power switch of the heater 14, and adjusting the temperature to a required temperature, such as 60-80 ℃, on the heating controller 15; and closing the oven door, and starting heating the oven at the temperature of 60-80 ℃ for 3-5H. Like this, the diffuser carries out the diffuser and sweeps when the oven dries, shortens the activity duration, improves production efficiency, reduces the manpower and sweeps the stoving cost.
The scope of the invention is limited only by the claims. Persons of ordinary skill in the art, having benefit of the teachings of the present disclosure, will readily appreciate that alternative structures to the disclosed structures can be substituted for the possible embodiments and that the disclosed embodiments can be combined to create new embodiments that also fall within the scope of the appended claims.
Claims (8)
1. A purge drying apparatus, comprising:
the support bedplate (1), the support bedplate (1) is used for laying on the frame (2), and the support bedplate (1) comprises an upper side plate surface (3) and a lower side plate surface (4) which are oppositely arranged in the bedplate thickness direction;
the support side wall is arranged on the upper side plate surface (3) and encloses at least one part of plate area (5) of the support bedplate (1), the support side wall and the at least one part of plate area (5) enclose an air cavity (6), the upper part of the support side wall is opened to form an air outlet of the air cavity (6), the support side wall is configured to be used for supporting a component to be dried so that the component to be dried supported on the support side wall can cover the air outlet, and an air inlet structure communicated with the air cavity (6) is arranged on the wall of the air cavity (6); when the blowing and drying work is carried out, blowing gas enters the air cavity (6) from the air inlet structure and then flows into the part to be dried to flow so as to carry out blowing and drying work;
the supporting side wall can be adjusted to a set position on the upper side plate surface (3) to adjust the area of the at least one part of the plate area (5);
the air inlet structure comprises an air inlet cover (7) and a plurality of air inlet holes (8), wherein the air inlet cover (7) is arranged on the lower side plate surface (4) to form an air inlet space between the air inlet cover (7) and the lower side plate surface (4), the air inlet holes (8) penetrate through the thickness of the bedplate of at least one part of the plate area (5) and are positioned in the air inlet space, and the air inlet cover (7) is provided with an air inlet pipe (9) communicated with the air inlet space;
the air inlet holes (8) are arranged in multiple rows and multiple columns at preset intervals, the air inlet covers (7) are multiple rows or columns, and each air inlet cover (7) covers each corresponding air inlet hole (8) in each row or each column (8);
an adjusting cover plate (10) is movably arranged on the upper side plate surface of at least one part of the plate area (5), and the size of an opening of at least one air inlet hole (8) can be adjusted through the adjusting cover plate; a plurality of adjusting holes (11) are formed in the adjusting cover plate (10), each adjusting hole (11) corresponds to each air inlet hole (8) and is arranged, the overlapping area of the adjusting holes (11) and the air inlet holes (8) can be adjusted when the adjusting cover plate (10) moves, and the sizes of the openings of the air inlet holes (8) can be adjusted simultaneously.
2. A blow drying device according to claim 1, characterised in that the air inlet structure is arranged on the at least a part of the plate area (5).
3. A purge drying device according to claim 1, wherein the upper side plate surface (3) is provided with a plurality of positioning holes arranged at intervals in a direction outward from the center of the upper side plate surface (3), and the supporting side walls are respectively positioned to the respective positioning holes to be adjusted to the set positions.
4. A purge drying device according to claim 1, wherein the support side walls comprise an annular support side wall (12) and an intermediate support side wall (13), the intermediate support side wall (13) being located within a circle enclosed by the annular support side wall (12) to form a plurality of mutually isolated air chambers on the at least a portion of the panel area (5), each air chamber being provided with a respective air inlet structure.
5. A purge drying device according to claim 4, wherein the intermediate support sidewall (13) is adjustable in position to adjust the size of each air chamber.
6. A purge drying device according to claim 1, characterized in that the inner side of the supporting side wall is formed with a supporting step (17), the supporting step (17) being configured for supporting the component to be dried.
7. A purge drying device according to any of claims 1-6, comprising a frame (2), wherein the support platen (1) is laid on the frame (2).
8. A purge drying system comprising a heater (14), a heating controller (15) and a purge drying device (16) according to any one of claims 1-7, wherein the heater (14) comprises an inlet end and an outlet end, the heating controller (15) is capable of controlling the heater (14), and the inlet structure and the outlet end of the purge drying device (16) are in communication.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210031516.7A CN114396790B (en) | 2022-01-12 | 2022-01-12 | Blowing and drying device and blowing and drying system |
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| Application Number | Priority Date | Filing Date | Title |
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| CN202210031516.7A CN114396790B (en) | 2022-01-12 | 2022-01-12 | Blowing and drying device and blowing and drying system |
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| CN114396790A CN114396790A (en) | 2022-04-26 |
| CN114396790B true CN114396790B (en) | 2023-04-14 |
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Family Cites Families (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102085511A (en) * | 2010-11-22 | 2011-06-08 | 深圳市华星光电技术有限公司 | Alignment film drying device and method |
| CN103274604B (en) * | 2013-04-23 | 2015-05-06 | 北京京东方光电科技有限公司 | Substrate heating equipment |
| CN106825076A (en) * | 2015-12-03 | 2017-06-13 | 天津诚强机械制造有限公司 | Milling train band processes blow device |
| CN107546101A (en) * | 2016-06-23 | 2018-01-05 | 上海新昇半导体科技有限公司 | A kind of epitaxial growth method |
| CN106524685A (en) * | 2016-12-07 | 2017-03-22 | 常州笙绿农业科技有限公司 | Drying box |
| TWM544111U (en) * | 2017-02-02 | 2017-06-21 | Tohama Co Ltd | Air-floating baking table |
| CN108534473A (en) * | 2018-03-28 | 2018-09-14 | 马鞍山绿野高科信息有限公司 | A kind of dried orange peel drying unit and its application method |
| CN209165976U (en) * | 2018-10-31 | 2019-07-26 | 无锡鸿睿电子科技有限公司 | A kind of PCB circuit board fast-drying device |
| KR102628919B1 (en) * | 2019-05-29 | 2024-01-24 | 주식회사 원익아이피에스 | Substrate processing apparatus and method using the same |
| KR102292369B1 (en) * | 2019-07-04 | 2021-08-20 | 세메스 주식회사 | Substrate drying apparatus |
| CN210474999U (en) * | 2019-07-31 | 2020-05-08 | 武汉市新裕科技有限公司 | Steel sheet surface sweeps device |
| KR102632876B1 (en) * | 2019-08-02 | 2024-02-06 | 주식회사 원익아이피에스 | Substrate processing apparatus |
| CN112344679A (en) * | 2019-10-25 | 2021-02-09 | 广东聚华印刷显示技术有限公司 | Oven and air suspension device |
| CN113091411B (en) * | 2021-04-08 | 2022-08-09 | 广东慧达康制药有限公司 | Efficient drying equipment for preparing traditional Chinese medicine decoction pieces |
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