CN114392580B - Cold trap device - Google Patents
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- CN114392580B CN114392580B CN202210293631.1A CN202210293631A CN114392580B CN 114392580 B CN114392580 B CN 114392580B CN 202210293631 A CN202210293631 A CN 202210293631A CN 114392580 B CN114392580 B CN 114392580B
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D8/00—Cold traps; Cold baffles
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Abstract
The invention discloses a cold trap device, which relates to the technical field of cold traps and comprises the following components: the device comprises a cold trap cavity, a cold trap cover, a refrigeration module, a heat conduction buffering piece, a heating module, a refrigerated heating main body, a sealing device, a first sealing ring and a second sealing ring. The cold trap cavity and the refrigeration module are sealed through the sealing device; sealing the two ends of the heat-conducting buffer piece and the cold trap cavity respectively through the first sealing rings; the cold trap cavity and the cold trap cover are sealed through the second sealing ring, high sealing is achieved between each component and the cold trap cavity finally, and the heating module is arranged in the heat conducting buffer piece, so that damage to devices in the refrigeration module due to the fact that the heating temperature of the heating module is too high when the heating module is used for heating can be avoided.
Description
Technical Field
The invention relates to the technical field of cold traps, in particular to a cold trap device.
Background
The existing ultralow temperature cold trap cavity has poor sealing performance, and devices in the refrigeration module are easily damaged due to overhigh heating temperature when the heating module is used for heating;
the cooling rate of the refrigerated object (quartz glass trap, quartz glass dewatering trap, etc.) is slow;
meanwhile, the temperature rise rate of the heated objects (such as a quartz glass trap and a quartz glass dewatering trap) is low, and the temperature uniformity and the stability are poor.
Disclosure of Invention
The invention provides a cold trap device, which aims to solve the problems that in the prior art, an ultralow-temperature cold trap cavity is poor in sealing performance, and devices in a refrigerating module are easily damaged due to overhigh heating temperature when a heating module is used for heating.
The invention provides a cold trap device, comprising: the device comprises a cold trap cavity, a cold trap cover, a refrigeration module, a heat conduction buffering piece, a heating module, a refrigerated heating main body, a sealing device, a first sealing ring and a second sealing ring; a first opening and a second opening are respectively arranged on two sides of the cold trap cavity, the refrigeration module enters the cold trap cavity through the first opening of the cold trap cavity and is connected with the heat-conducting buffer piece, and the cold trap cavity and the refrigeration module are sealed through the sealing device; the heating module and the refrigerated heating main body are both arranged in the heat conduction buffer piece; the refrigerated heating main body is arranged on the cold trap cavity in a penetrating mode, two ends of the heat conduction buffering piece are connected with the cold trap cavity, and the two ends of the heat conduction buffering piece and the cold trap cavity are sealed through the first sealing rings respectively; the cold trap cover passes through the cold trap cavity the second opening with the cold trap cavity is connected, just the cold trap cavity with pass through between the cold trap cover the second sealing washer is sealed.
Optionally, the cold trap apparatus further comprises a heat conducting module; the heat conduction module is arranged in the cold trap cavity, the heat conduction module is connected with the refrigeration module, and the heat conduction module is connected with the heat conduction buffer piece.
Optionally, the refrigeration module comprises a refrigerator and a cold head fin; the heat conduction module comprises a heat conduction block; the refrigerator is connected with the cold head fin; the cold head fin is connected with the heat conducting block; the heat conduction block is connected with the heat conduction buffer piece.
Optionally, the heat conducting module further comprises a spring press sheet; the heat conduction buffer piece is arranged between the spring pressing piece and the heat conduction block, and the spring pressing piece is connected with the heat conduction block.
Optionally, the heat conducting module further comprises heat conducting silicone grease; the heat-conducting silicone grease is arranged between the heat-conducting block and the cold head fin.
Optionally, the heating module comprises a heating wire and a temperature sensor; the heating wires are arranged on the outer side of the refrigerated heating main body at intervals in a surrounding manner; the temperature sensor and the heating wire are arranged in the heat conduction buffering piece.
Optionally, the heating module further comprises a first insulating tape and a second insulating tape; the first insulating adhesive tape wraps the outer side of the temperature sensor and is connected with the heating wire; the second insulating rubberized fabric sets up the heater strip with between the heat conduction bolster, and respectively with the heater strip with the heat conduction bolster is connected.
Optionally, the sealing device comprises a mounting flange, a third sealing ring, a fourth sealing ring and a quick-mounting clamp; the refrigerator is connected with the mounting flange; the mounting flange is connected with the cold trap cavity; the quick-mounting clamp is respectively connected with the mounting flange and the cold trap cavity; the cold trap cavity and the mounting flange are sealed through the third sealing ring; the refrigerator and the mounting flange are sealed through the fourth sealing ring.
Optionally, the cold trap device further comprises a heat-conducting buffer compression ring; the heat conduction bolster clamping ring respectively with the heat conduction bolster and the cold-trap cavity is connected.
Optionally, the cold trap apparatus further comprises a vacuum pump connection; the vacuum pump joint is arranged on the cold trap cover.
Compared with the prior art, the technical scheme provided by the invention has the following advantages:
the cold trap device of the present invention includes: the device comprises a cold trap cavity, a cold trap cover, a refrigeration module, a heat conduction buffering piece, a heating module, a refrigerated heating main body, a sealing device, a first sealing ring and a second sealing ring; a first opening and a second opening are respectively arranged on two sides of the cold trap cavity, the refrigeration module enters the cold trap cavity through the first opening of the cold trap cavity and is connected with the heat-conducting buffer piece, and the cold trap cavity and the refrigeration module are sealed through the sealing device, so that the sealing property between the cold trap cavity and the refrigeration module is enhanced; the heating module and the refrigerated heating main body are both arranged in the heat conduction buffer piece; the refrigerated heating main body is arranged on the cold trap cavity in a penetrating mode, two ends of the heat conduction buffering piece are connected with the cold trap cavity, and the two ends of the heat conduction buffering piece and the cold trap cavity are respectively sealed through the first sealing rings, so that the sealing performance between the cold trap cavity and the heat conduction buffering piece is enhanced; the cold trap cover passes through the cold trap cavity the second opening with the cold trap cavity is connected, just the cold trap cavity with thereby pass through between the cold trap cover the second sealing washer seals up the reinforcing the cold trap cavity with leakproofness between the cold trap cover, finally each part with realize high sealed between the cold trap cavity, and pass through heating module sets up in the heat conduction bolster and can not cause the harm because of the high device in the refrigeration module of heating module's heating temperature when heating.
Drawings
The accompanying drawings, which are incorporated in and constitute a part of this specification, illustrate embodiments consistent with the invention and together with the description, serve to explain the principles of the invention.
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, and it is obvious for those skilled in the art that other drawings can be obtained according to the drawings without inventive exercise.
Fig. 1 is a front sectional view of a cold trap apparatus according to an embodiment of the present invention;
fig. 2 is a side sectional view of a cold trap apparatus according to an embodiment of the present invention;
FIG. 3 is an enlarged partial side sectional view of one of the cold trap devices of FIG. 2 in accordance with an embodiment of the present invention;
fig. 4 is a schematic structural diagram of a cold trap device according to an embodiment of the present invention.
Reference numerals
1. A refrigeration module; 2. a thermally conductive buffer; 3. a heating module; 4. a refrigerated heating body; 5. a cold trap cavity; 6. a cold trap cover; 7. a sealing device; 8. a heat conducting module; 9. a heat conducting block; 10. pressing a spring plate; 11. a refrigerator; 12. a cold head fin; 13. a first insulating tape; 14. a second insulating tape; 15. installing a flange; 16. quickly mounting a clamp; 17. the heat conduction buffer piece is pressed to the ring; 18. heating wires; 19. a temperature sensor; 20. a vacuum pump connection; 21. a first opening; 22. a second opening; 23. a first seal ring; 24. a second seal ring; 25. a third seal ring; 26. and a fourth seal ring.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention will be described in detail with reference to the accompanying drawings and the detailed description.
The technical solutions in the embodiments will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, wherein like reference numerals represent like elements in the drawings. It is apparent that the embodiments to be described below are only a part of the embodiments of the present invention, and not all of them. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
It will be understood that the terms "comprises" and/or "comprising," when used in this specification and the appended claims, specify the presence of stated features, integers, steps, operations, elements, and/or components, but do not preclude the presence or addition of one or more other features, integers, steps, operations, elements, components, and/or groups thereof.
It is also to be understood that the terminology used in the description of the embodiments of the invention herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the embodiments of the invention. As used in the description of embodiments of the present invention and the appended claims, the singular forms "a," "an," and "the" are intended to include the plural forms as well, unless the context clearly indicates otherwise.
As shown in fig. 1 to 4, the present invention provides a cold trap apparatus comprising: the device comprises a cold trap cavity 5, a cold trap cover 6, a refrigeration module 1, a heat conduction buffer part 2, a heating module 3, a refrigerated heating main body 4, a sealing device 7, a first sealing ring 23 and a second sealing ring 24; a first opening 21 and a second opening 22 are respectively arranged on two sides of the cold trap cavity 5, the refrigeration module 1 enters the cold trap cavity 5 through the first opening 21 of the cold trap cavity 5 and is connected with the heat-conducting buffer member 2, and the cold trap cavity 5 and the refrigeration module 1 are sealed through the sealing device 7; the heating module 3 and the refrigerated heating main body 4 are both arranged in the heat conducting buffer piece 2; the refrigerated heating body 4 is arranged on the cold trap cavity 5 in a penetrating manner, two ends of the heat conduction buffer part 2 are connected with the cold trap cavity 5, and two ends of the heat conduction buffer part 2 and the cold trap cavity 5 are respectively sealed through the first sealing rings 23; the cold trap cover 6 passes through the cold trap cavity 5 the second opening 22 with the cold trap cavity 5 is connected, just the cold trap cavity 5 with pass through between the cold trap cover 6 the second sealing washer 24 is sealed.
Specifically, a first opening 21 and a second opening 22 are respectively arranged on two sides of the cold trap cavity 5, the refrigeration module 1 enters the cold trap cavity 5 through the first opening 21 of the cold trap cavity 5 and is connected with the heat-conducting buffer member 2, and the cold trap cavity 5 and the refrigeration module 1 are sealed through the sealing device 7, so that the sealing performance between the cold trap cavity 5 and the refrigeration module 1 is enhanced; the heating module 3 and the refrigerated heating main body 4 are arranged in the heat conducting buffer piece 2; the refrigerated heating main body 4 is arranged on the cold trap cavity 5 in a penetrating manner, two ends of the heat conduction buffering member 2 are connected with the cold trap cavity 5, and the two ends of the heat conduction buffering member 2 and the cold trap cavity 5 are respectively sealed through the first sealing rings 23, so that the sealing property between the cold trap cavity 5 and the heat conduction buffering member 2 is enhanced; cold trap lid 6 passes through cold trap cavity 5 the second opening 22 with cold trap cavity 5 is connected, just cold trap cavity 5 with pass through between the cold trap lid 6 thereby sealed reinforcing by second sealing washer 24 cold trap cavity 5 with leakproofness between the cold trap lid 6, final each part with realize highly sealed between the cold trap cavity 5, and pass through heating module 3 sets up in the heat conduction bolster 2 and can not cause the harm because of the too high device in the refrigeration module 1 of heating module 3 heating temperature when heating.
The heat conduction bolster 2 is the quartz capsule, and the quartz capsule of lower coefficient of heat conductivity is the heat conduction buffer layer between heating module 3 and refrigeration module 1, avoids causing because of the high damage of refrigeration module 1's cold head fin 12, and the quartz capsule that has smooth surface more does benefit to the sealed of resistant ultralow temperature (-120 degrees) O type first sealing washer 23 between cold trap cavity 5 and the quartz capsule simultaneously.
Further, the cold trap device further comprises a heat conducting module 8; the heat conduction module 8 is arranged in the cold trap cavity 5, the heat conduction module 8 is connected with the refrigeration module 1, and the heat conduction module 8 is connected with the heat conduction buffer piece 2.
Specifically, the heat conducting module 8 is configured to transfer low temperature from the refrigeration module 1 to the heat conducting buffer 2, so as to transfer the low temperature to the heated body 4 to be refrigerated in the heat conducting buffer 2, where the heated body 4 to be refrigerated is a trap and a water removal trap.
Further, the cold trap device further comprises a vacuum pump connection 20; the vacuum pump joint 20 is arranged on the cold trap cover 6.
Specifically, the vacuum pump connection 20 is used for pumping the gas in the cold trap cavity 5, so that the cold trap cavity 5 forms an insulated vacuum cavity.
Further, the refrigeration module 1 comprises a refrigerator 11 and a cold head fin 12; the heat conducting module 8 comprises a heat conducting block 9; the refrigerator 11 is connected with the cold head fin 12; the cold head fins 12 are connected with the heat conducting block 9; the heat conducting block 9 is connected to the heat conducting buffer 2.
Specifically, the refrigerator 11 is a stirling refrigerator (minimum refrigeration temperature-230 ℃), and the cold head fin 12 is used for rapid heat conduction refrigeration; the heat conduction block 9 is made of red copper and is used for rapid heat transfer and refrigeration, heat conduction silicone grease is filled between the heat conduction block 9 and the cold head fin 12 and is tightly attached to the heat conduction block after filling, and the heat conduction block 9 can be rotationally adjusted and can be adjusted in position from front to back, so that the heat conduction buffer part 2 (particularly a quartz tube) can be conveniently installed.
Further, the heat conducting module 8 further comprises a spring pressing sheet 10; the heat conduction buffering piece 2 is arranged between the spring pressing piece 10 and the heat conduction block 9, and the spring pressing piece 10 is connected with the heat conduction block 9.
Specifically, the spring pressing piece 10 is used to press and fix the heat conductive buffer 2 (specifically, a quartz tube) so that the heat conductive buffer 2 is in good contact with the heat conductive block 9.
Further, the heat conducting module 8 further comprises heat conducting silicone grease; the heat-conducting silicone grease is arranged between the heat-conducting block 9 and the cold head fin 12.
Specifically, the heat-conducting silicone grease is filled between the heat-conducting block 9 and the cold head fin 12, so that the heat transfer efficiency between the heat-conducting block 9 and the cold head fin 12 is improved, and the low temperature of the cold head fin 12 is quickly transferred through the heat-conducting block 9.
Further, the heating module 3 comprises a heating wire 18 and a temperature sensor 19; the heating wires 18 are arranged on the outer side of the refrigerated heating main body 4 at intervals; the temperature sensor 19 and the heating wire 18 are both disposed in the heat-conducting buffer 2.
Specifically, the heating wire 18 is a constantan heating wire, a 0.25 ohm resistor, a 5v power supply and a large current heating, so that the refrigerated heating main body 4 is rapidly heated at a heating rate of more than 50 degrees/s, and the flexibility and toughness of the heating wire are superior to those of a nickel-chromium heating wire, thereby being convenient for winding and installation. The temperature sensor 19 is a T-type thermocouple for measuring the temperature of the refrigerated heating main body 4 within a temperature range of-200 to 260 ℃. The refrigerated heating main body 4 is a trapping trap and a dewatering trap, is made of quartz glass, and has a certain gap with the heating wire 18 (specifically, constantan heating wire), so that the trapping trap and the dewatering trap can be conveniently disassembled and assembled.
Further, the heating module 3 further includes a first insulating tape 13 and a second insulating tape 14; the first insulating adhesive tape 13 is wrapped outside the temperature sensor 19 and is connected with the heating wire 18; the second insulating adhesive 14 is disposed between the heating wire 18 and the heat-conducting buffer 2, and is connected to the heating wire 18 and the heat-conducting buffer 2, respectively.
Specifically, the first insulating tape 13 is a PTFE insulating tape, and is used as a flexible connection tape between the heating wire 18, the temperature sensor 19 (T-type thermocouple) and the heat conductive buffer 2 (quartz tube), and fixes the temperature sensor 19 (T-type thermocouple), and forms an insulating layer before the temperature sensor 19 (T-type thermocouple) contacts the heating wire 18. The second insulating rubberized fabric 14 is a PTFE insulating rubberized fabric, and the second insulating rubberized fabric 14 is used for enabling the heating wire 18 to be in close contact with the heat conduction buffer 2 (quartz tube), so that the effect of heat transfer of the second insulating rubberized fabric 14 during refrigeration is greater than the effect of heat transfer buffering of the second insulating rubberized fabric 14, and heat transfer is facilitated; the flexibility of the PTFE insulating tape is convenient for the heating module 3 to be installed in a rigid quartz tube, and the uniformity and stability of the internal temperature of the heat conduction buffering piece 2 (quartz tube) are ensured, so that the uniformity and stability of the temperature of the refrigerated heating main body 4 (trapping trap and dewatering trap) are kept.
Further, the sealing device 7 comprises a mounting flange 15, a third sealing ring 25, a fourth sealing ring 26 and a quick-assembly clamp 16; the refrigerator 11 is connected with the mounting flange 15; the mounting flange 15 is connected with the cold trap cavity 5; the fast-assembling hoop 16 is respectively connected with the mounting flange 15 and the cold trap cavity 5; the cold trap cavity 5 and the mounting flange 15 are sealed through the third sealing ring 25; the refrigerator 11 and the mounting flange 15 are sealed by the fourth sealing ring 26.
Specifically, the cold trap cavity 5 is connected with the refrigerator 11 through the mounting flange 15, the mounting flange 15 is fixedly connected with the cold trap cavity 5 through a quick-assembling clamp 16 and a screw, and the cold trap cavity 5 and the mounting flange 15 are further sealed through the third sealing ring 25; the refrigerator 11 and the mounting flange 15 are further sealed by the fourth sealing ring 26. The two ends of the heat-conducting buffer 2 and the cold trap cavity 5 are sealed through the first sealing ring 23; the cold trap cavity 5 and the cold trap cover 6 are sealed through the second sealing ring 24, and finally, high sealing is realized between each component and the cold trap cavity 5, so that the cold trap cavity 5 forms a vacuum cavity with a fixed volume.
Further, the cold trap device further comprises a heat conduction buffer compression ring 17; the heat conduction buffer piece compression ring 17 is respectively connected with the heat conduction buffer piece 2 and the cold trap cavity 5.
Specifically, heat conduction bolster clamping ring 17 specifically is the quartz capsule clamping ring, heat conduction bolster clamping ring 17 is used for compressing tightly the fastening sealed cold trap cavity 5 with between the heat conduction bolster 2 (quartz capsule), prevent gas leakage. The cold trap cavity 5 mounting flange 15 cold trap lid 6 and heat conduction bolster clamping ring 17 is the PVDF material, more does benefit to and keeps warm, and its intensity is superior to PTFE, the installation of being convenient for.
The specific working mode of the cold trap device designed by the invention is as follows: the refrigerator 11 starts to refrigerate, the cold head fin 12 starts to cool, and the vacuum pump starts to pump the vacuum in the cold trap cavity 5 through the vacuum pump joint 20, so that the cold trap cavity 5 forms an adiabatic vacuum cavity. The cold-head fins 12 transmit the low temperature to the heat-conducting buffer member 2 (quartz tube) through the heat-conducting block 9, and the heat-conducting buffer member 2 (quartz tube) transmits the low temperature to the refrigerated heating main body 4 (trapping trap and dewatering trap) through the heating wire 18 (constantan heating wire), thereby achieving the low-temperature conduction process.
When the temperature needs to be raised quickly, the heating wire 18 (constantan heating wire) is controlled to heat, the temperature is measured by the temperature sensor 19 (T-shaped thermocouple), the temperature of the heating wire 18 (constantan heating wire) is raised quickly, and the high temperature is conducted to the refrigerated heating main body 4 (trapping trap or dewatering trap) quickly; in the heating process, the PTFE insulating tape and the heat conduction buffer part 2 (quartz tube) play a good role in heat transfer and buffer, and the impact of high temperature on the cold head fin 12 is avoided.
According to the cold trap device designed by the invention, the cold head fins 12, the heat conducting block 9 and the heat conducting buffer 2 (quartz tube) are skillfully and tightly connected, the heating module 3 is arranged in the heat conducting buffer 2 (quartz tube), and the refrigerated heating body 4 (trapping trap and dewatering trap) needing the alternate action of quick refrigeration and quick temperature rise is adopted, the cooling rate of the cold trap cavity 5 is more than 100 degrees/min, the temperature rise rate is more than 50 degrees/s, the temperature uniformity of a heated object is good, the influence of the temperature rise process on the refrigeration module 1 is less than 30 degrees, and the refrigerant and the cold head fins 12 are well protected; the heat conduction buffer part 2 (quartz tube) and the cold trap cavity 5 are sealed through the low-temperature first sealing ring 23, and a high sealing effect (less than 5 pa) is achieved in the whole cold trap cavity 5. The invention can be applied to the device products with stricter cold-hot alternation conditions of rapid cooling to ultralow temperature (less than-100 ℃) and rapid heating (more than 200 ℃).
It should be noted that in the description of the present invention, it is to be understood that the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "direction toward the side of the steel rail", and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of describing the present invention and simplifying the description, but do not indicate or imply that the referred device or element must have a specific orientation, be configured and operated in a specific orientation, and thus, should not be construed as limiting the present invention.
Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of the present invention, "a plurality" means two or more unless specifically defined otherwise.
In the present invention, unless otherwise expressly stated or limited, the terms "mounted," "connected," "secured," and the like are to be construed broadly and can, for example, be connected or detachably connected or integrated; can be mechanically or electrically connected; either directly or indirectly through intervening media, either internally or in any other relationship. The specific meanings of the above terms in the present invention can be understood by those skilled in the art according to specific situations.
In the present invention, unless otherwise expressly stated or limited, "above" or "below" a first feature means that the first and second features are in direct contact, or that the first and second features are not in direct contact but are in contact with each other via another feature therebetween. Also, the first feature being "on," "above" and "over" the second feature includes the first feature being directly on and obliquely above the second feature, or merely indicating that the first feature is at a higher level than the second feature. A first feature being "under," "below," and "beneath" a second feature includes the first feature being directly under and obliquely below the second feature, or simply meaning that the first feature is at a lesser elevation than the second feature.
In the description herein, references to the description of the term "one embodiment," "some embodiments," "an example," "a specific example," or "some examples," etc., mean that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the invention. In this specification, the schematic representations of the terms used above should not be understood to necessarily refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples. Furthermore, various embodiments or examples described in this specification can be combined and combined by one skilled in the art.
The foregoing are merely exemplary embodiments of the present invention, which enable those skilled in the art to understand or practice the present invention. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the generic principles defined herein may be applied to other embodiments without departing from the spirit or scope of the invention. Thus, the present invention is not intended to be limited to the embodiments shown herein but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.
Claims (7)
1. A cold trap device, comprising: the device comprises a cold trap cavity, a cold trap cover, a refrigeration module, a heat conduction buffering piece, a heating module, a refrigerated heating main body, a sealing device, a first sealing ring and a second sealing ring; a first opening and a second opening are respectively arranged on two sides of the cold trap cavity, the refrigeration module enters the cold trap cavity through the first opening of the cold trap cavity and is connected with the heat-conducting buffer piece, and the cold trap cavity and the refrigeration module are sealed through the sealing device; the heating module and the refrigerated heating main body are both arranged in the heat conduction buffer piece; the refrigerated heating main body is arranged on the cold trap cavity in a penetrating mode, two ends of the heat conduction buffering piece are connected with the cold trap cavity, and the two ends of the heat conduction buffering piece and the cold trap cavity are sealed through the first sealing rings respectively; the cold trap cover is connected with the cold trap cavity through the second opening of the cold trap cavity, and the cold trap cavity and the cold trap cover are sealed through the second sealing ring;
the heating module comprises a heating wire and a temperature sensor; the heating wires are arranged on the outer side of the refrigerated heating main body at intervals in a surrounding manner; the temperature sensor and the heating wire are both arranged in the heat conduction buffer piece;
the heating module further comprises a first insulating adhesive tape and a second insulating adhesive tape; the first insulating adhesive tape wraps the outer side of the temperature sensor and is connected with the heating wire; the second insulating adhesive tape is arranged between the heating wire and the heat conduction buffering part and is respectively connected with the heating wire and the heat conduction buffering part;
the cold trap device further comprises a vacuum pump joint; the vacuum pump joint is arranged on the cold trap cover.
2. A cold trap device according to claim 1, further comprising a heat conducting module; the heat conduction module is arranged in the cold trap cavity, the heat conduction module is connected with the refrigeration module, and the heat conduction module is connected with the heat conduction buffer piece.
3. A cold trap device according to claim 2, wherein the refrigeration module comprises a refrigerator and cold head fins; the heat conduction module comprises a heat conduction block; the refrigerator is connected with the cold head fin; the cold head fin is connected with the heat conducting block; the heat conduction block is connected with the heat conduction buffer piece.
4. The cold trap device of claim 3, wherein the heat conducting module further comprises a spring blade; the heat conduction buffer piece is arranged between the spring pressing piece and the heat conduction block, and the spring pressing piece is connected with the heat conduction block.
5. A cold trap device according to claim 3, wherein the heat conducting module further comprises a heat conducting silicone grease; the heat-conducting silicone grease is arranged between the heat-conducting block and the cold head fin.
6. A cold trap device according to claim 3, wherein the sealing means comprises a mounting flange, a third sealing ring, a fourth sealing ring and a quick-fit clamp; the refrigerator is connected with the mounting flange; the mounting flange is connected with the cold trap cavity; the quick-mounting clamp is respectively connected with the mounting flange and the cold trap cavity; the cold trap cavity and the mounting flange are sealed through the third sealing ring; the refrigerator and the mounting flange are sealed through the fourth sealing ring.
7. A cold trap device according to claim 1, further comprising a thermally conductive buffer collar; the heat conduction bolster clamping ring respectively with the heat conduction bolster and the cold-trap cavity is connected.
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| CN202210293631.1A CN114392580B (en) | 2022-03-24 | 2022-03-24 | Cold trap device |
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| CN202210293631.1A CN114392580B (en) | 2022-03-24 | 2022-03-24 | Cold trap device |
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| CN114392580B true CN114392580B (en) | 2022-07-05 |
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