CN114383712A - High-temperature calibration method and device for sensitivity of vibration sensor - Google Patents
High-temperature calibration method and device for sensitivity of vibration sensor Download PDFInfo
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Abstract
The invention discloses a high-temperature calibration method and a high-temperature calibration device for sensitivity of a vibration sensor, wherein the method comprises the following steps: a special support frame for calibrating the sensitivity of the vibration sensor is used for combining a vibration exciting device, a temperature field environment control device and a laser interference measurement and signal processing device which are required by the sensitivity temperature calibration into a system, so that the laser interference measurement and the temperature environment field control can be realized simultaneously during the calibration of the sensor; providing vibration excitation, and collecting output voltage signals of the sensor; collecting heterodyne laser interference signals, and extracting the phase of the interference signals by using a phase expansion method; and finally, fitting the phase of the laser interference signal and the voltage output signal by using a sine approximation method to realize the calibration of the sensitivity amplitude and the phase of the vibration sensor, solving the problem of low high-temperature sensitivity calibration precision of the conventional vibration sensor, and having high technical calibration precision and simple operation in the calibration process.
Description
Technical Field
The invention relates to the technical field of high-temperature calibration of sensitivity of a vibration sensor, in particular to a high-temperature calibration method and device of sensitivity of the vibration sensor.
Background
In recent years, with continuous progress and development of China in the research fields of space technology, aviation technology, nuclear power technology and the like, the requirements for automatic control, monitoring and detection of precise instruments are continuously improved, and the sensor is more and more important to better overcome the influence of external environmental factors. The high-temperature vibration sensor is a vibration testing instrument working in a high-temperature environment, and is widely applied to the fields of impact vibration testing in the high-temperature environment, vibration testing of high-temperature gas turbine engines, airplane gas turbines and the like. In the using process of the sensor, in order to ensure the correctness and uniformity of the measurement result and ensure that the sensor can accurately measure in a high-temperature environment, the sensitivity of the sensor must be regularly and correspondingly calibrated according to the requirements of the national metrological verification regulations (JJG233-2008 and JJG 134-. However, due to the particularity of the working environment of the high-temperature vibration sensor, the sensitivity of the high-temperature vibration sensor is not only required to be accurately measured when the high-temperature vibration sensor is calibrated, but also the temperature field environment is required to be controlled, and the measurement difficulty and the device cost are increased due to the influence of multiple factors. Therefore, most of domestic factories and detection units mostly adopt a comparison method with lower cost to carry out sensitivity high-temperature vibration calibration on the vibration sensor. The uncertainty of vibration calibration by adopting a comparison method is greater than that of vibration calibration by adopting a laser interference absolute method, and because the friction between a temperature test box and a vibration table vibration extension rod in the comparison method vibration calibration device is easy to generate deviation, the realization cost of vibration calibration is too high if a high-precision vibration table is used for performing the comparison method vibration calibration criterion, and the realization difficulty is higher.
Therefore, aiming at the defects of low calibration precision, easy error generation, high implementation cost and high implementation difficulty of the conventional high-temperature vibration sensor, the invention provides the high-temperature calibration method and device for the sensitivity of the vibration sensor, which have high calibration precision and simple and convenient operation in the calibration process.
Disclosure of Invention
The present invention is directed to a method and an apparatus for calibrating a sensitivity of a vibration sensor at a high temperature, so as to solve the problems mentioned in the background art.
In order to achieve the purpose, the invention provides the following technical scheme:
a vibration sensor sensitivity high temperature calibration method, the calibration method comprising the steps of:
s1: a special support frame for calibrating the sensitivity of the vibration sensor is used for combining a vibration excitation device, a temperature field environment control device and a laser interference measurement and signal processing device which are required by the sensitivity temperature calibration into a system, so that the laser interference measurement and the flexible control of a temperature environment field can be realized simultaneously when the sensor is calibrated;
s2, using a vibration table to generate vibration excitation, using a calibrated vibration sensor to sense vibration output voltage signals, and using a high-speed data acquisition card to acquire the sensor output voltage signals;
s3, using heterodyne laser interference vibration meter to measure the vibration information of the corrected vibration sensor, outputting interference signal light, and extracting the phase of the interference signal by phase expansion method;
and S4, fitting the laser interference signal phase and the voltage output signal by using a sine approximation method, and calculating the sensitivity amplitude and the phase shift of the vibration sensor to be corrected.
As a still further scheme of the invention: the vibration exciting device comprises a signal generator, a power amplifier, a vibration table, a ceramic transmission rod and a gold-plated film reflecting mirror, wherein the signal generator generates a stable sinusoidal signal, and the stable sinusoidal signal is amplified by the power amplifier and then drives the vibration table to vibrate. The vibrating table, the ceramic transmission rod and the gold-plated film reflecting mirror are in threaded connection, the ceramic transmission rod is connected with the vibrating table, the gold-plated film reflecting mirror is fixed on the surface of the transmission ceramic rod, and the ceramic transmission rod not only transmits the vibration generated by the vibrating table to the calibrated sensor fixed on the surface of the ceramic transmission rod, but also places the calibrated sensor in the central position of the temperature field environment.
As a still further scheme of the invention: the temperature field environment control device comprises an intelligent temperature controller, a semi-open type circular temperature cavity, aluminum silicate cotton, a sealing steel ring, incident hole glass, a heating wire and a thermocouple temperature sensor group, wherein the intelligent temperature controller controls the temperature field environment in the semi-open type circular temperature cavity, the intelligent temperature controller is connected with the heating wires and the binding posts of the thermocouple temperature sensor, the heating wires are respectively fixed on the inner wall of the semi-open circular temperature cavity and the surface of the sealing steel ring, the thermocouple temperature sensor is suspended in the semi-open circular temperature cavity, the aluminum silicate wool is filled in the semi-open circular temperature cavity to form a heat insulation layer, the incident hole glass is fixed in the through hole at the top of the semi-open circular temperature cavity, the sealing steel ring covers the through hole at the top end of the bottom support frame and forms a small gap with the ceramic transmission rod, and the small gap plays a role in heat insulation and sealing by utilizing the characteristic that air has good heat insulation performance.
As a still further scheme of the invention: laser interferometry and signal processing apparatus include heterodyne laser interferometry vibration meter, by school vibration sensor, signal processor, high-speed data collection card and computer, through high-speed data collection card synchronous acquisition heterodyne laser interferometry vibration meter output interference signal light sum by school vibration sensor output voltage signal, use computer processing, being connected with signal processor by the school sensor, signal processor and heterodyne laser interferometry vibration meter and high-speed data collection card synchronous connection, high-speed data collection card and computer link.
As a still further scheme of the invention: the special support frame comprises a bottom support frame, a support upright post, a top cross beam, a vibration meter fixing platform, a fixed pulley, a steel wire rope, a fixable sliding sleeve, a lead block, a semi-open type circular temperature cavity and a lifting handle, wherein the bottom support frame is fixedly welded with the support upright post, the support upright post is fixedly welded with the top cross beam, the top cross beam is fixedly connected with the vibration meter fixing platform, the fixed pulley is fixed at the top end of the support upright post in a threaded manner, the fixable sliding sleeve is sleeved on the support upright post and is fixed with the semi-open type circular temperature cavity together, the fixed sliding sleeve is connected with one end of the steel wire rope, the other end of the steel wire rope is connected with the lead block and is suspended in the middle of the support upright post through the fixed pulley, the lifting handle is fixed on the semi-open type circular temperature cavity, the bottom support frame in the structural frame is designed to be disc-shaped at the top end and leave a through hole at the center in order to form a closed temperature field with the semi-open type circular temperature cavity, meanwhile, the calibrated vibration sensor on the ceramic transmission rod is placed in the central position of the temperature field environment.
As a still further scheme of the invention: the method comprises the steps of directly collecting high carrier frequency laser interference signals by using a Shannon sampling theorem-based collection method, namely an NS collection method, wherein the high carrier frequency is realized by modulating a reference beam by adding a Bragg box in a heterodyne laser interferometer, the modulated reference beam interferes with a measuring beam reflected by a vibrating table to generate interference signal light carrying vibration information, and a photoelectric signal receiver is used for receiving the interference signal light. And directly adopting a voltage output signal of the calibrated vibration sensor by using a high-speed data acquisition card, and synchronously acquiring an interference signal by using the high-speed data acquisition card.
As a still further scheme of the invention: the laser interference signals are converted into electric signals through a photoelectric detector, the interference signals are converted into two paths of mutually orthogonal signals through a standard sine and cosine orthogonal base, and the phases of the two paths of interference signals are extracted through a phase expansion method to obtain a phase expression.
As a still further scheme of the invention: fitting the phase expression by using a sine approximation method, constructing a contradiction equation set, solving the contradiction equation set by using a least square method to obtain a vibration displacement expression, differentiating the vibration displacement expression to obtain the vibration speed and the acceleration of the calibrated vibration sensor, fitting the output voltage signal of the calibrated vibration sensor by using the sine approximation method to obtain the amplitude and the initial phase of the voltage signal, and calculating to obtain the sensitivity amplitude and the phase shift of the vibration sensor.
Further, the processing of the phase of the interference signal and the voltage output signal by using the sine approximation method specifically includes:
firstly, a laser interference signal is converted into an electric signal through a photoelectric detector, and the vibration table is driven by a sine signal to generate excitation, so that the receiver describes the acquired interference signal as UR(t)：
Wherein
up、
λ is interference signal peak, initial phase and wavelength respectively; v. ofp、spThe vibration speed and the displacement peak value are obtained; f. ofv、
The vibration frequency and the initial phase.
Second, interference signal U is processed by using standard sine and cosine orthogonal basisR(t) converting the signals into two paths of mutually orthogonal signals, and describing the signals as follows after digital filtering:
in the formula tiFor the sampling time, i is 0,1,2, …, N-1, and N is the number of sampling points.
③ the phase expansion method recommended by international standard ISO 16063-11 to use1(ti)、u2(ti) Extracting the phase of the interference signal to obtain:
n pi in equation (3) is a compensation phase introduced to avoid introducing phase discontinuity in the zero-crossing point of the interference signal by the arctangent function, where n is 0,1,2, …. Each time n is increased by 1, phase
Increasing pi, the vibration displacement changes lambda/4.
And fourthly, fitting the formula (3) by using a sine approximation method to obtain:
where ω is 2 π fv. Selecting phases of a plurality of sampling points to form an equation set, and using the minimumSolving the parameter A, B, C, D by two-multiplication fitting to obtain the vibration displacement s (t)i):
Fifthly, performing first order differentiation and second order differentiation on the formula (5) to obtain the vibration speed and the acceleration of the vibration sensor to be corrected, wherein the expression of the acceleration is described as follows:
wherein the amplitude of the vibration acceleration is
The vibration acceleration signal has an initial phase of
Sixthly, the output voltage signal V (t) of the calibrated sensor is fitted by utilizing a sine approximation methodi)：
V(ti)＝AScos(ωti)-BSsin(ωti)+CSti+DS (7)
To obtain a voltage V (t)i)：
Wherein the magnitude of the medium voltage signal is
The initial phase of the voltage signal is
Therefore, the sensitivity amplitude S and phase of the sensor
The calculation expression of (a) is:
as a still further scheme of the invention: the calibration device includes: the device comprises a signal generator, a power amplifier, a vibrating table, a ceramic transfer rod, a calibrated vibration sensor, a signal processor, a heterodyne laser interference vibration meter, a high-speed data acquisition card, an intelligent temperature controller, a semi-open circular temperature cavity, a computer, a bottom support frame, a support upright post, a top cross beam, a vibration meter fixing table, a fixed pulley, a steel wire rope, a lead block, a fixed sliding sleeve, a lifting handle, incident hole glass, a heating wire, a thermocouple temperature sensor, a sealing steel ring, aluminum silicate cotton and a gold-plated film reflecting mirror, wherein the signal generator provides a stable sinusoidal signal, and the stable sinusoidal signal is amplified by the power amplifier and then drives the vibrating table to generate vibration excitation; the semi-open type circular temperature cavity, the bottom support frame, the sealing steel ring and the ceramic transmission rod form a closed temperature environment field; the intelligent temperature controller controls the temperature in the closed temperature environment field through the heating wire and the thermocouple temperature sensor; the heterodyne laser interference vibration meter acquires interference signal light containing vibration information through the incident hole glass and the gold-plated film reflecting mirror; the calibrated vibration sensor is fixed on the ceramic transmission rod and senses the vibration of the vibration table to output a voltage signal; the high-speed data acquisition card synchronously acquires interference signals output by the heterodyne laser interference vibration meter and voltage signals output by the calibrated vibration sensor and transmits the interference signals and the voltage signals to the computer for calculation processing to obtain the sensitivity and the phase shift of the calibrated vibration sensor.
Compared with the prior art, the invention has the beneficial effects that:
(1) the method and the device are stable, reliable and practical, and can realize the high-temperature calibration of the sensitivity of the vibration sensor with different frequencies in the intermediate frequency range.
(2) The method realizes the high-temperature calibration of the sensitivity of the vibration sensor based on the laser interferometry, and improves the high-temperature calibration precision of the sensitivity of the vibration sensor.
(3) The method disclosed by the invention is simple and convenient to calibrate and operate, the temperature environment is flexibly controlled, the calibration and measurement difficulty is greatly reduced, and the operation error in an experiment is effectively reduced.
(4) The invention provides a high-temperature calibration method and a high-temperature calibration device for sensitivity of a vibration sensor, provides an absolute calibration method and a calibration device based on a laser interferometry, and solves the problems of low calibration precision and inconvenient operation in the calibration process in the prior calibration technology.
Drawings
FIG. 1 is a schematic diagram of an apparatus according to an embodiment of the method of the present invention;
FIG. 2 is a flow chart of a method for calibrating the sensitivity of a vibration sensor at high temperature;
FIG. 3 is a schematic diagram of heterodyne sine approximation method vibration signal acquisition and demodulation calculation;
FIG. 4 is a graph of the results of high temperature calibration of the sensitivity of a vibration sensor according to an embodiment of the method of the present invention.
In the figure: a signal generator-1, a power amplifier-2, a vibration table-3, a ceramic transmission rod-4, a calibrated vibration sensor-5, a signal processor-6, a heterodyne laser interference vibration meter-7, a high-speed data acquisition card-8, an intelligent temperature controller-9, a semi-open circular temperature cavity-10, a computer-11, a bottom support frame-12 and a support upright post-13, the device comprises a top cross beam-14, a vibration meter fixing table-15, a fixed pulley-16, a steel wire rope-17, a lead block-18, a fixed sliding sleeve-19, a lifting handle-20, incident hole glass-21, a heating wire-22, a thermocouple temperature sensor-23, a sealing steel ring-24, aluminum silicate cotton-25 and a gold-plated film reflecting mirror-26.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Referring to fig. 1 to 4, in the embodiment of the present invention, the apparatus mainly includes: the device comprises a signal generator 1, a power amplifier 2, a vibration table 3, a ceramic transfer rod 4, a calibrated vibration sensor 5, a signal processor 6, a heterodyne laser interference vibration meter 7, a high-speed data acquisition card 8, an intelligent temperature controller 9, a semi-open circular temperature cavity 10, a computer 11, a bottom support frame 12, a support upright post 13, a top cross beam 14, a vibration meter fixing table 15, a fixed pulley 16, a steel wire rope 17, a lead block 18, a fixable sliding sleeve 19, a lifting handle 20, incident hole glass 21, a heating wire 22, a thermocouple temperature sensor 23, a sealing steel ring 24, aluminum silicate wool 25 and a gold-plated film reflector 26. The signal generator 1 provides a stable sinusoidal signal, the stable sinusoidal signal is amplified by the power amplifier 2, and then the vibration table 3 is driven to generate vibration excitation; the semi-open type circular temperature cavity 10, the bottom support frame 12, the sealing steel ring 24 and the ceramic transmission rod 4 form a closed temperature environment field; the intelligent temperature controller 9 controls the temperature in the closed temperature environment field through a heating wire 22 and a thermocouple temperature sensor 23; the heterodyne laser interference vibration meter 7 acquires interference signal light containing vibration information through the incident hole glass 21 and the gold-plated film reflecting mirror 26; the calibrated vibration sensor 5 is fixed on the ceramic transmission rod 4 and senses the vibration of the vibration table 3 to output a voltage signal; the high-speed data acquisition card 8 synchronously acquires the interference signal output by the heterodyne laser interference vibration meter 7 and the voltage signal output by the calibrated vibration sensor 5 and transmits the interference signal and the voltage signal to the computer 11 for calculation processing to obtain the sensitivity and the phase shift of the calibrated vibration sensor 5.
Referring to fig. 2, the calibration process of the high temperature calibration method for the sensitivity of the vibration sensor of the present invention includes the following steps:
s1: use special braced frame of vibration sensor sensitivity calibration with the required vibration excitation device of sensitivity temperature calibration, temperature field environment controlling means, laser interferometry and signal processing device make up into a system, it can realize laser interferometry and temperature environment field are nimble steerable simultaneously to ensure the sensor when the calibration, it is fixed through can fixing the sliding sleeve to upwards promote the circular temperature chamber of semi-open in the system, will be fixed in ceramic transfer pole by school vibration sensor, put down the circular temperature chamber of semi-open and make it form the closed temperature field environment with bottom sprag frame, set for the temperature value in the temperature field environment chamber through intelligent temperature controller, provide the required temperature environment field of calibration.
S2: the vibration table is controlled by the signal generator and the power amplifier to generate vibration excitation, the vibration excitation is transmitted to the calibrated vibration sensor through the ceramic transmission rod, the calibrated vibration sensor senses the vibration output voltage signal, and the high-speed data acquisition card is used for directly acquiring the output voltage signal of the calibrated vibration sensor.
S3: the heterodyne laser interference vibration meter measuring beam vertically irradiates a gold-plated film reflecting mirror through semi-open circular temperature cavity incident hole glass, obtains interference signal light containing information such as motion speed, displacement or phase and the like of a corrected vibration sensor, and extracts the phase of a heterodyne laser interference signal based on a phase expansion method.
S4: fitting the phase of the interference signal by a sine approximation method, and differentiating to obtain the amplitude and the initial phase of the vibration acceleration of the vibration sensor to be corrected. And similarly, fitting the output voltage signal by using a sine approximation method to obtain the amplitude and initial phase of the output signal of the vibration sensor to be corrected under each temperature field environment, and calculating to obtain the sensitivity amplitude and phase shift of the vibration sensor to be corrected.
Referring to fig. 3, a schematic diagram of the heterodyne sine approximation method vibration measurement signal acquisition and demodulation used in the high-temperature calibration method for the sensitivity of the vibration sensor of the present invention includes the following steps:
s11: and directly acquiring the laser interference signal by using an NS acquisition method based on the Shannon sampling theorem.
S12: and transmitting the acquired laser interference signals to a computer for processing through a high-speed data acquisition card.
S13: multiplying the collected heterodyne laser interference signals by a group of standard sine and cosine orthogonal bases, and converting the interference signals into two paths of mutually orthogonal interference signals.
S14: after two paths of mutually orthogonal interference signals are digitally filtered, the phase of the interference signals is extracted by using a phase expansion method.
S15: and fitting the phases by using a sine approximation method, selecting phases of a plurality of sampling points to form a contradiction equation set, and solving the contradiction equation set by using a least square method.
S16: and obtaining a vibration displacement expression by solving the contradictory equations, and differentiating the vibration displacement expression to obtain a vibration acceleration expression containing vibration acceleration amplitude and phase.
S21: and carrying out filtering amplification processing on the output voltage signal of the calibrated vibration sensor.
S22: and directly acquiring the processed voltage signal by using a high-speed data acquisition card.
S23: and fitting the voltage signal by using a positive line approximation method, selecting a plurality of sampling point phases to form a contradiction equation set, solving the contradiction equation set by using a least square method, and obtaining an output voltage expression containing the amplitude value and the initial phase of the voltage signal by solving the contradiction equation set.
S17: and calculating the acceleration sensitivity amplitude and the phase shift of the corrected vibration sensor through a vibration acceleration expression containing the vibration acceleration amplitude and the phase and an output voltage expression containing the voltage signal amplitude and the initial phase.
As a still further scheme of the invention: the vibration exciting device comprises a signal generator, a power amplifier, a vibration table, a ceramic transmission rod and a gold-plated film reflecting mirror, wherein the signal generator generates a stable sinusoidal signal, and the stable sinusoidal signal is amplified by the power amplifier and then drives the vibration table to vibrate. The ceramic transmission rod is fixed on the surface of the transmission ceramic rod, and the ceramic transmission rod not only transmits the vibration generated by the vibrating table to a calibrated sensor fixed on the surface of the ceramic transmission rod, but also places the calibrated sensor in the central position of the temperature field environment.
As a still further scheme of the invention: the temperature field environment control device comprises an intelligent temperature controller, a semi-open type circular temperature cavity, aluminum silicate cotton, a sealing steel ring, incident hole glass, a heating wire and a thermocouple temperature sensor group, wherein the intelligent temperature controller controls the temperature field environment in the semi-open type circular temperature cavity, the intelligent temperature controller is connected with the heating wire and a thermocouple temperature sensor binding post, the heating wire is respectively fixed on the inner wall of the semi-open type circular temperature cavity and the surface of the sealing steel ring, the thermocouple temperature sensor is suspended in the semi-open type circular temperature cavity, the aluminum silicate cotton is filled in the semi-open type circular temperature cavity to form a heat insulation layer, the incident hole glass is fixed in a through hole at the top of the semi-open type circular temperature cavity, the sealing steel ring covers the through hole at the top end of the bottom support frame and forms a small gap with the ceramic transmission rod, and the small gap plays a role in heat insulation and sealing by utilizing the characteristic that air has good heat insulation performance.
The laser interference measurement and signal processing device comprises a heterodyne laser interference vibration meter, a calibrated vibration sensor, a signal processor, a high-speed data acquisition card and a computer, wherein the output interference signal light of the heterodyne laser interference vibration meter and the output voltage signal of the calibrated vibration sensor are synchronously acquired through the high-speed data acquisition card, the computer is used for calculating and processing, the calibrated sensor is connected with the signal processor, the signal processor and the heterodyne laser interference vibration meter are synchronously connected with the high-speed data acquisition card, and the high-speed data acquisition card is connected with the computer.
The special support frame comprises a bottom support frame, a support upright post, a top cross beam, a vibration meter fixing platform, a fixed pulley, a steel wire rope, a fixable sliding sleeve, a lead block, a semi-open type circular temperature cavity and a lifting handle, wherein the bottom support frame is fixedly welded with the support upright post, the support upright post is fixedly welded with the top cross beam, the top cross beam is fixedly connected with the vibration meter fixing platform, the fixed pulley is fixed at the top end of the support upright post through threads, the fixable sliding sleeve is sleeved on the support upright post and is fixed with the semi-open type circular temperature cavity together, the fixed sliding sleeve is connected with one end of the steel wire rope, the other end of the steel wire rope is connected with the lead block and is suspended in the middle of the support upright post through the fixed pulley, the lifting handle is fixed on the cavity body of the semi-open type circular temperature cavity, the bottom support frame in the structural frame is designed to be disc-shaped at the top end and is provided with a through hole at the center, and the purpose is to form a closed temperature field with the semi-open type circular temperature cavity, meanwhile, the calibrated vibration sensor on the ceramic transmission rod is placed in the central position of the temperature field environment.
The method comprises the steps of directly collecting high carrier frequency laser interference signals by using a Shannon sampling theorem-based collection method, namely an NS collection method, wherein the high carrier frequency is realized by modulating a reference beam by adding a Bragg box in a heterodyne laser interferometer, the modulated reference beam interferes with a measuring beam reflected by a vibrating table to generate interference signal light carrying vibration information, and a photoelectric signal receiver is used for receiving the interference signal light. And directly adopting a voltage output signal of the calibrated vibration sensor by using a high-speed data acquisition card, and synchronously acquiring an interference signal by using the high-speed data acquisition card.
The laser interference signals are converted into electric signals through a photoelectric detector, the interference signals are converted into two paths of mutually orthogonal signals through a standard sine and cosine orthogonal base, and the phases of the two paths of interference signals are extracted through a phase expansion method to obtain a phase expression.
Fitting the phase expression by using a sine approximation method, constructing a contradiction equation set, solving the contradiction equation set by using a least square method to obtain a vibration displacement expression, differentiating the vibration displacement expression to obtain the vibration speed and the acceleration of the calibrated vibration sensor, fitting the output voltage signal of the calibrated vibration sensor by using the sine approximation method to obtain the amplitude and the initial phase of the voltage signal, and calculating to obtain the sensitivity amplitude and the phase shift of the vibration sensor.
Further, the processing of the phase of the interference signal and the voltage output signal by using the sine approximation method specifically includes:
firstly, a laser interference signal is converted into an electric signal through a photoelectric detector, and the vibration table is driven by a sine signal to generate excitation, so that the receiver describes the acquired interference signal as UR(t)：
Wherein
up、
λ is interference signal peak, initial phase and wavelength respectively; v. ofp、spThe vibration speed and the displacement peak value are obtained; f. ofv、
The vibration frequency and the initial phase.
Second, interference signal U is processed by using standard sine and cosine orthogonal basisR(t) converting the signals into two paths of mutually orthogonal signals, and describing the signals as follows after digital filtering:
in the formula tiFor the sampling time, i is 0,1,2, …, N-1, and N is the number of sampling points.
③ the phase expansion method recommended by international standard ISO 16063-11 to use1(ti)、u2(ti) Extracting the phase of the interference signal to obtain:
n pi in equation (3) is a compensation phase introduced to avoid introducing phase discontinuity in the zero-crossing point of the interference signal by the arctangent function, where n is 0,1,2, …. Each time n is increased by 1, phase
Increasing pi, the vibration displacement changes lambda/4.
And fourthly, fitting the formula (3) by using a sine approximation method to obtain:
where ω is 2 π fv. Selecting phases of a plurality of sampling points to form an equation set, and fitting and solving the parameters A, B, C, D by using a least square method to obtain the vibration displacement s (t)i):
Fifthly, performing first order differentiation and second order differentiation on the formula (5) to obtain the vibration speed and the acceleration of the vibration sensor to be corrected, wherein the expression of the acceleration is described as follows:
wherein the amplitude of the vibration acceleration is
The vibration acceleration signal has an initial phase of
Sixthly, the output voltage signal V (t) of the calibrated sensor is fitted by utilizing a sine approximation methodi)：
V(ti)＝AScos(ωti)-BSsin(ωti)+CSti+DS (7)
To obtain a voltage V (t)i)：
Wherein the magnitude of the medium voltage signal is
The initial phase of the voltage signal is
Therefore, the sensitivity amplitude S and phase of the sensor
The calculation expression of (a) is:
example of the present embodimentThe specific parameters of the device are as follows: the vibration frequency range is 2-5000 Hz, and the maximum acceleration is 100m/s2The standard intermediate frequency vibration table is a special support frame for high-temperature calibration of the sensitivity of a vibration sensor which can flexibly adjust the position of an environmental temperature field, a temperature controller with the control range of room temperature to 500 ℃ and the control precision of +/-2 ℃, wherein the calibrated vibration sensor adopts a MODEL (MODEL: 6237M 70) high-temperature piezoelectric acceleration sensor produced by ENDEVCO company, a Germany Polytec OFV-5000 heterodyne laser interferometer with the displacement resolution up to nanometer is selected for vibration measurement, and an NI PXI-5122 high-speed data acquisition card with the frequency of 100MHz is adopted for acquiring laser interference signals and sensor output signals to the maximum extent.
In order to verify the feasibility and the calibration precision of the high-temperature calibration method for the sensitivity of the vibration sensor, the calibration method provided by the invention is utilized to realize the frequency of 160Hz and the frequency of 30m/s2And the sensitivity amplitude and the phase shift under various temperature environments during acceleration are effectively calibrated. Referring to fig. 4, a graph of the calibration result of the embodiment of the method of the present invention on the sensitivity of the vibration sensor at high temperature is shown, and the sensitivity amplitude of the vibration sensor should ideally not be affected by the temperature environment.
It is noted that, herein, relational terms such as first and second, and the like may be used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Also, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus. Without further limitation. The use of the phrase "comprising one of the elements does not exclude the presence of other like elements in the process, method, article, or apparatus that comprises the element.
Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.
Claims (9)
1. A high-temperature calibration method for sensitivity of a vibration sensor is characterized by comprising the following steps: the calibration method comprises the following steps:
s1: a special support frame for calibrating the sensitivity of the vibration sensor is used for combining a vibration excitation device, a temperature field environment control device and a laser interference measurement and signal processing device which are required by the sensitivity temperature calibration into a system, so that the laser interference measurement and the flexible control of a temperature environment field can be realized simultaneously when the sensor is calibrated;
s2, using a vibration table to generate vibration excitation, using a calibrated vibration sensor to sense vibration output voltage signals, and using a high-speed data acquisition card to acquire the sensor output voltage signals;
s3, using heterodyne laser interference vibration meter to measure the vibration information of the corrected vibration sensor, outputting interference signal light, and extracting the phase of the interference signal by phase expansion method;
and S4, fitting the laser interference signal phase and the voltage output signal by using a sine approximation method, and calculating the sensitivity amplitude and the phase shift of the vibration sensor to be corrected.
2. The vibration sensor sensitivity high-temperature calibration device according to claim 1, wherein: the vibration exciting device comprises a vibration signal generator, a power amplifier, a vibration table, a ceramic transmission rod and a gold-plated film reflecting mirror, wherein the vibration signal generator generates a stable sinusoidal signal, the vibration table is driven to vibrate after being amplified by the power amplifier, the vibration table, the ceramic transmission rod and the gold-plated film reflecting mirror are in threaded connection, the ceramic transmission rod is connected with the vibration table, the gold-plated film reflecting mirror is fixed on the surface of the transmission ceramic rod, the ceramic transmission rod not only transmits the vibration generated by the vibration table to a calibrated sensor fixed on the surface of the ceramic transmission rod, but also places the calibrated sensor in the central position of the temperature field environment.
3. The vibration sensor sensitivity high-temperature calibration device according to claim 1, wherein: the temperature field environment control device comprises an intelligent temperature controller, a semi-open type circular temperature cavity, aluminum silicate cotton, a sealing steel ring, incident hole glass, a heating wire and a thermocouple temperature sensor group, wherein the intelligent temperature controller controls the temperature field environment in the semi-open type circular temperature cavity, the intelligent temperature controller is connected with the heating wires and the binding posts of the thermocouple temperature sensor, the heating wires are respectively fixed on the inner wall of the semi-open circular temperature cavity and the surface of the sealing steel ring, the thermocouple temperature sensor is suspended in the semi-open circular temperature cavity, the aluminum silicate wool is filled in the semi-open circular temperature cavity to form a heat insulation layer, the incident hole glass is fixed in the through hole at the top of the semi-open circular temperature cavity, the sealing steel ring covers the through hole at the top end of the bottom support frame and forms a small gap with the ceramic transmission rod, and the small gap plays a role in heat insulation and sealing by utilizing the characteristic that air has good heat insulation performance.
4. The vibration sensor sensitivity high-temperature calibration device according to claim 1, wherein: laser interferometry and signal processing apparatus include heterodyne laser interferometry vibration meter, by school vibration sensor, signal processor, high-speed data collection card and computer, through high-speed data collection card synchronous acquisition heterodyne laser interferometry vibration meter output interference signal light sum by school vibration sensor output voltage signal, use computer processing, being connected with signal processor by the school sensor, signal processor and heterodyne laser interferometry vibration meter and high-speed data collection card synchronous connection, high-speed data collection card and computer link.
5. The vibration sensor sensitivity high-temperature calibration device according to claim 1, wherein: the special support frame comprises a bottom support frame, a support upright post, a top cross beam, a vibration meter fixing platform, a fixed pulley, a steel wire rope, a fixable sliding sleeve, a lead block, a semi-open type circular temperature cavity and a lifting handle, wherein the bottom support frame is fixedly welded with the support upright post, the support upright post is fixedly welded with the top cross beam, the top cross beam is fixedly connected with the vibration meter fixing platform, the fixed pulley is fixed at the top end of the support upright post in a threaded manner, the fixable sliding sleeve is sleeved on the support upright post and is fixed with the semi-open type circular temperature cavity together, the fixed sliding sleeve is connected with one end of the steel wire rope, the other end of the steel wire rope is connected with the lead block and is suspended in the middle of the support upright post through the fixed pulley, the lifting handle is fixed on the semi-open type circular temperature cavity, the bottom support frame in the structural frame is designed to be disc-shaped at the top end and leave a through hole at the center in order to form a closed temperature field with the semi-open type circular temperature cavity, meanwhile, the calibrated vibration sensor on the ceramic transmission rod is placed in the central position of the temperature field environment.
6. The vibration sensor sensitivity high-temperature calibration device according to claim 1, wherein: the method comprises the steps of directly acquiring a high-carrier-frequency laser interference signal by using an acquisition method based on Shannon sampling theorem, namely an NS acquisition method, wherein the high carrier frequency is realized by modulating a reference beam in a heterodyne laser interferometer by additionally arranging a Bragg box, the modulated reference beam interferes with a measuring beam reflected by a vibrating table to generate interference signal light carrying vibration information, a photoelectric signal receiver is used for receiving the interference signal light, a high-speed data acquisition card is used for directly acquiring a voltage output signal of a calibrated vibration sensor, and meanwhile, the high-speed data acquisition card is used for synchronously acquiring the interference signal.
7. The vibration sensor sensitivity high-temperature calibration device according to claim 1, wherein: the laser interference signals are converted into electric signals through a photoelectric detector, the interference signals are converted into two paths of mutually orthogonal signals through standard sine and cosine orthogonality, and the phases of the two paths of interference signals are extracted through a phase expansion method to obtain a phase expression.
8. The vibration sensor sensitivity high-temperature calibration device according to claim 1, wherein: fitting the phase expression by using a sine approximation method, constructing a contradiction equation set, solving the contradiction equation set by using a least square method to obtain a vibration displacement expression, differentiating the vibration displacement expression to obtain the vibration speed and the acceleration of the calibrated vibration sensor, fitting the output voltage signal of the calibrated vibration sensor by using the sine approximation method to obtain the amplitude and the initial phase of the voltage signal, and calculating to obtain the sensitivity amplitude and the phase shift of the vibration sensor.
9. The vibration sensor sensitivity high-temperature calibration device according to claim 1, wherein: the method comprises the following steps: a signal generator (1), a power amplifier (2), a vibrating table (3), a ceramic transfer rod (4), a calibrated vibration sensor (5), a signal processor (6), a heterodyne laser interference vibration meter (7), a high-speed data acquisition card (8), an intelligent temperature controller (9), a semi-open circular temperature cavity (10), a computer (11), a bottom support frame (12) and a support upright post (13), the vibration measuring device comprises a top cross beam (14), a vibration measuring instrument fixing table (15), a fixed pulley (16), a steel wire rope (17), a lead block (18), a fixed sliding sleeve (19), a lifting handle (20), incident hole glass (21), a heating wire (22), a thermocouple temperature sensor (23), a sealing steel ring (24), aluminum silicate wool (25) and a gold-plated film reflecting mirror (26), wherein a signal generator (1) provides a stable sinusoidal signal, and the stable sinusoidal signal is amplified by a power amplifier (2) and then drives a vibration table (3) to generate vibration excitation; a closed temperature environment field is formed by the semi-open type circular temperature cavity (10), the bottom support frame (12), the sealing steel ring (24) and the ceramic transfer rod (4); the intelligent temperature controller (9) controls the temperature in the closed temperature environment field through a heating wire (22) and a thermocouple temperature sensor (23); the heterodyne laser interference vibration meter (7) acquires interference signal light containing vibration information through incident hole glass (21) and a gold-plated film reflecting mirror (26); the corrected vibration sensor (5) is fixed on the ceramic transmission rod (4) and senses the vibration of the vibration table (3) to output a voltage signal; the high-speed data acquisition card (8) synchronously acquires interference signals output by the heterodyne laser interference vibration meter (7) and voltage signals output by the calibrated vibration sensor (5) and transmits the interference signals and the voltage signals to the computer (11) for calculation processing to obtain the sensitivity and the phase shift of the calibrated vibration sensor (5).
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