CN105571709A - Vibration sensor high temperature sensitivity absolute calibration method - Google Patents

Vibration sensor high temperature sensitivity absolute calibration method Download PDF

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Publication number
CN105571709A
CN105571709A CN201410636989.5A CN201410636989A CN105571709A CN 105571709 A CN105571709 A CN 105571709A CN 201410636989 A CN201410636989 A CN 201410636989A CN 105571709 A CN105571709 A CN 105571709A
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China
Prior art keywords
vibration
temperature
high temperature
test chamber
temperature test
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CN201410636989.5A
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Chinese (zh)
Inventor
朱刚
杨晓伟
闫磊
刘鑫
武东健
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China Academy of Launch Vehicle Technology CALT
Beijing Aerospace Institute for Metrology and Measurement Technology
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China Academy of Launch Vehicle Technology CALT
Beijing Aerospace Institute for Metrology and Measurement Technology
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Priority to CN201410636989.5A priority Critical patent/CN105571709A/en
Publication of CN105571709A publication Critical patent/CN105571709A/en
Pending legal-status Critical Current

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Abstract

The present invention provides a vibration sensor high temperature sensitivity absolute calibration method. The method includes the following steps that: (1) a high temperature test box is set; (2) the vibration of a standard vibration stage is conveyed to a calibrated vibration sensor in the high temperature test box through a vibration extension rod, the vibration sensor in the high temperature test box senses the vibration signals of the standard vibration stage and generates analog electrical signals, and outputs the analog electrical signals to a data acquisition card, the analog electrical signals are converted into digital signals through the data acquisition card, and the digital signals are inputted to a computer; (3) light of a laser interferometer is emitted onto the calibrated vibration sensor through a glass window on the high temperature test box, the laser interferometer measures the vibration magnitude of the vibration sensor and outputs analog electrical signals, the analog electrical signals are converted into digital signals through the data acquisition card, and the digital signals are inputted to the computer; and (4) the computer calculates the high temperature sensitivity of the vibration sensor. With the vibration sensor high temperature sensitivity absolute calibration method of the invention adopted, the problem of incapability of calibrating a vibration sensor under a high temperature environment can be solved, and the high temperature sensitivity absolute calibration of the vibration sensor can be realized.

Description

A kind of vibration transducer high temperature susceptability absolute Calibrating Method
Technical field
The present invention relates to vibration measurement technical field, be specifically related to a kind of vibration transducer high temperature susceptability absolute Calibrating Method.
Background technology
Vibration transducer is widely used in links in the scientific research of defence and military, production and process of the test, is responsible for the function of monitoring and test under various environmental conditions.Find after deliberation, the sensitivity impact of temperature variation on vibration transducer is very large, this is because vibration transducer majority is made up of piezoelectric, according to the characteristic of piezoelectric, when it works beyond reference work temperature (room temperature), its output charge sensitivity will produce great changes.The test error introduced by temperature under high and low temperature environment be can not ignore, and must revise in use procedure to the sensitivity of vibration transducer.
The calibration of current vibration vibration transducer is all carry out at normal temperatures, the mode of its calibration is all that the vibration transducer be calibrated is directly installed on (as shown in Figure 1) on standard vibration machine, because standard vibration machine operating temperature range is narrower, cannot work under high and low temperature environment, calibrating installation entirety can not be put into high-temperature test chamber, the Vibrating Sensor Calibration under therefore adopting the calibration steps of this version cannot realize high/low temperature.
Summary of the invention
In order to solve the difficult problem that current vibration transducer cannot carry out calibrating in high temperature environments, the present invention proposes a kind of vibration transducer high temperature susceptability absolute Calibrating Method.
Realize the technical scheme of the object of the invention: a kind of vibration transducer high temperature susceptability absolute Calibrating Method, it comprises the steps:
(1) temperature controls: arrange a temperature-controllable built in the high-temperature test chamber of 20 DEG C ~ 800 DEG C;
(2) by school vibration transducer vibration survey: standard vibration machine is arranged on outside high-temperature test chamber, the vibration extension rod of standard vibration machine is placed in high-temperature test chamber, to be put in high-temperature test chamber by school vibration transducer and fixation on the vibration extension rod of standard vibration machine, namely standard vibration machine vibration by vibration extension rod pass in high-temperature test chamber by school vibration transducer; The vibration signal of standard vibration machine experienced by vibration transducer in high-temperature test chamber and the electric signal of generation simulation exports data collecting card to, is converted into digital signal and inputs computing machine by data collecting card;
(3) laser interferometer vibration survey: laser interferometer is arranged on outside high-temperature test chamber, the glass window on the light-transmissive hot test casing of laser interferometer is incident upon by the vibration transducer of school; Adjustment laser interferometer, makes its light focusing in the surface of sensor, and adjustment light path makes it to produce interferes; Laser interferometer measurement vibration transducer vibration level, exports analog electrical signal, is converted into digital signal and inputs computing machine by data collecting card;
(4) computer-solution: computing machine, according to the output of laser interferometer and vibration transducer, resolves vibration transducer high temperature susceptability.
A kind of vibration transducer high temperature susceptability absolute Calibrating Method as above, the standard vibration machine described in it connects power amplifier, power amplifier connecting signal source, and signal source connects computing machine; By computing machine adjustment signal source or power amplifier output voltage, according to above step (1) to the sensitivity of step (4) measuring vibrations high-temperature sensor, the amplitude linearity of sensitivity under its high temperature can be obtained; By computing machine adjustment signal source output frequency, and according to above step (1) to step (4) measuring vibrations transducer sensitivity, the frequency response of sensitivity under its high temperature can be obtained.
A kind of vibration transducer high temperature susceptability absolute Calibrating Method as above, its temperature controller connects relay, and relay connects the electrical heating wire be located in high-temperature test chamber; Temperature controller also connects the thermopair arranged in high-temperature test chamber; At the temperature value of temperature controller setting high-temperature test chamber, through Control electrical heating wire, high-temperature test chamber inside is heated; Hot test the temperature inside the box is fed back to temperature controller, after reaching set temperature value constant 10 ~ 30 minutes by thermopair.
Effect of the present invention is: the present invention proposes a kind of vibration transducer high temperature susceptability absolute Calibrating Method, solves the difficult problem cannot carrying out Vibrating Sensor Calibration in high temperature environments.Adopt this method to build the calibration of vibration transducer high temperature susceptability, the absolute calibration of vibration transducer high temperature susceptability can be realized.
Accompanying drawing explanation
Fig. 1 is vibration transducer normal temperature calibrating principle schematic diagram;
Fig. 2 is a kind of vibration transducer high temperature susceptability absolute Calibrating Method principle schematic of the present invention.
Embodiment
Below in conjunction with the drawings and specific embodiments, a kind of vibration transducer high temperature susceptability absolute Calibrating Method of the present invention is further described.
As shown in Figure 2, vibration transducer high temperature susceptability absolute Calibrating Method of the present invention, it comprises the steps:
(1) temperature controls: arrange a temperature-controllable built in the high-temperature test chamber of 20 DEG C ~ 800 DEG C; Temperature controller connects relay, and relay connects the electrical heating wire be located in high-temperature test chamber; Temperature controller also connects the thermopair arranged in high-temperature test chamber; At the temperature value of temperature controller setting high-temperature test chamber, through Control electrical heating wire, high-temperature test chamber inside is heated; Feed back hot test the temperature inside the box to temperature controller by thermopair, reach set temperature value (such as 300 DEG C) constant 10 ~ 30 minutes afterwards (such as: 15 minutes);
(2) by school vibration transducer vibration survey: standard vibration machine is arranged on outside high-temperature test chamber, the vibration extension rod of standard vibration machine is placed in high-temperature test chamber, to be put in high-temperature test chamber by school vibration transducer and fixation on the vibration extension rod of standard vibration machine, namely standard vibration machine vibration by vibration extension rod pass in high-temperature test chamber by school vibration transducer; The vibration signal of standard vibration machine experienced by vibration transducer in high-temperature test chamber and the electric signal of generation simulation exports data collecting card to, is converted into digital signal and inputs computing machine by data collecting card;
(3) laser interferometer vibration survey: laser interferometer is arranged on outside high-temperature test chamber, the glass window on the light-transmissive hot test casing of laser interferometer is incident upon by the vibration transducer of school; Adjustment laser interferometer, makes its light focusing in the surface of sensor, and adjustment light path makes it to produce interferes; Laser interferometer measurement vibration transducer vibration level, exports analog electrical signal, is converted into digital signal and inputs computing machine by data collecting card;
(4) computer-solution: computing machine, according to the output of laser interferometer and vibration transducer, resolves vibration transducer high temperature susceptability;
(5) continuous coverage: standard vibration machine connects power amplifier, power amplifier connecting signal source, signal source connects computing machine; By computing machine adjustment signal source or power amplifier output voltage, according to above step (1) to the sensitivity of step (4) measuring vibrations high-temperature sensor, the amplitude linearity of sensitivity under its high temperature can be obtained; By computing machine adjustment signal source output frequency, and according to above step (1) to step (4) measuring vibrations transducer sensitivity, the frequency response of sensitivity under its high temperature can be obtained.

Claims (3)

1. a vibration transducer high temperature susceptability absolute Calibrating Method, is characterized in that: the method comprises the steps:
(1) temperature controls: arrange a temperature-controllable built in the high-temperature test chamber of 20 DEG C ~ 800 DEG C;
(2) by school vibration transducer vibration survey: standard vibration machine is arranged on outside high-temperature test chamber, the vibration extension rod of standard vibration machine is placed in high-temperature test chamber, to be put in high-temperature test chamber by school vibration transducer and fixation on the vibration extension rod of standard vibration machine, namely standard vibration machine vibration by vibration extension rod pass in high-temperature test chamber by school vibration transducer; The vibration signal of standard vibration machine experienced by vibration transducer in high-temperature test chamber and the electric signal of generation simulation exports data collecting card to, is converted into digital signal and inputs computing machine by data collecting card;
(3) laser interferometer vibration survey: laser interferometer is arranged on outside high-temperature test chamber, the glass window on the light-transmissive hot test casing of laser interferometer is incident upon by the vibration transducer of school; Adjustment laser interferometer, makes its light focusing in the surface of sensor, and adjustment light path makes it to produce interferes; Laser interferometer measurement vibration transducer vibration level, exports analog electrical signal, is converted into digital signal and inputs computing machine by data collecting card;
(4) computer-solution: computing machine, according to the output of laser interferometer and vibration transducer, resolves vibration transducer high temperature susceptability.
2. a kind of vibration transducer high temperature susceptability absolute Calibrating Method according to claim 1, is characterized in that: described standard vibration machine connects power amplifier, power amplifier connecting signal source, and signal source connects computing machine; By computing machine adjustment signal source or power amplifier output voltage, according to above step (1) to the sensitivity of step (4) measuring vibrations high-temperature sensor, the amplitude linearity of sensitivity under its high temperature can be obtained; By computing machine adjustment signal source output frequency, and according to above step (1) to step (4) measuring vibrations transducer sensitivity, the frequency response of sensitivity under its high temperature can be obtained.
3. a kind of vibration transducer high temperature susceptability absolute Calibrating Method according to claim 1 and 2, is characterized in that: temperature controller connects relay, and relay connects the electrical heating wire be located in high-temperature test chamber; Temperature controller also connects the thermopair arranged in high-temperature test chamber; At the temperature value of temperature controller setting high-temperature test chamber, through Control electrical heating wire, high-temperature test chamber inside is heated; Hot test the temperature inside the box is fed back to temperature controller, after reaching set temperature value constant 10 ~ 30 minutes by thermopair.
CN201410636989.5A 2014-11-05 2014-11-05 Vibration sensor high temperature sensitivity absolute calibration method Pending CN105571709A (en)

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Cited By (7)

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Publication number Priority date Publication date Assignee Title
CN108007559A (en) * 2017-11-10 2018-05-08 西安航天动力试验技术研究所 Vibrating sensor laser calibrating equipment and method under the conditions of a kind of thermal vacuum
CN108427015A (en) * 2018-01-31 2018-08-21 中国科学院上海微系统与信息技术研究所 A kind of test device and test method of impingement accelerometer thermal sensitivity drift
CN108519499A (en) * 2018-03-27 2018-09-11 上海精密计量测试研究所 The acceleration amplitude on-line calibration system of laser vibrometer system under hot conditions
CN111412974A (en) * 2020-05-07 2020-07-14 中国船舶重工集团公司第七一五研究所 System and method for calibrating co-vibration vector sensor
CN113640546A (en) * 2021-08-18 2021-11-12 中国工程物理研究院总体工程研究所 Accelerometer temperature response calibration device and method
CN114383712A (en) * 2022-01-21 2022-04-22 中国计量科学研究院 High-temperature calibration method and device for sensitivity of vibration sensor
CN116908935A (en) * 2023-07-18 2023-10-20 中国科学院地质与地球物理研究所 Moon surface absolute calibration system and method based on moon seismograph

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CN101539587A (en) * 2009-04-21 2009-09-23 中国科学院上海微系统与信息技术研究所 Test method for sensitive direction and sensitivity of medium and high measuring range acceleration sensor
CN101968380A (en) * 2010-09-26 2011-02-09 中国计量科学研究院 Ultralow frequency vibration measurer calibration system and laser interferometer thereof
CN102353813A (en) * 2011-06-12 2012-02-15 中北大学 Broadband high range accelerometer frequency response characteristic calibrating device and method thereof
CN103954798A (en) * 2014-05-06 2014-07-30 中国工程物理研究院总体工程研究所 Testing apparatus for high temperature acceleration sensor

Patent Citations (4)

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Publication number Priority date Publication date Assignee Title
CN101539587A (en) * 2009-04-21 2009-09-23 中国科学院上海微系统与信息技术研究所 Test method for sensitive direction and sensitivity of medium and high measuring range acceleration sensor
CN101968380A (en) * 2010-09-26 2011-02-09 中国计量科学研究院 Ultralow frequency vibration measurer calibration system and laser interferometer thereof
CN102353813A (en) * 2011-06-12 2012-02-15 中北大学 Broadband high range accelerometer frequency response characteristic calibrating device and method thereof
CN103954798A (en) * 2014-05-06 2014-07-30 中国工程物理研究院总体工程研究所 Testing apparatus for high temperature acceleration sensor

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108007559A (en) * 2017-11-10 2018-05-08 西安航天动力试验技术研究所 Vibrating sensor laser calibrating equipment and method under the conditions of a kind of thermal vacuum
CN108427015A (en) * 2018-01-31 2018-08-21 中国科学院上海微系统与信息技术研究所 A kind of test device and test method of impingement accelerometer thermal sensitivity drift
CN108519499A (en) * 2018-03-27 2018-09-11 上海精密计量测试研究所 The acceleration amplitude on-line calibration system of laser vibrometer system under hot conditions
CN111412974A (en) * 2020-05-07 2020-07-14 中国船舶重工集团公司第七一五研究所 System and method for calibrating co-vibration vector sensor
CN113640546A (en) * 2021-08-18 2021-11-12 中国工程物理研究院总体工程研究所 Accelerometer temperature response calibration device and method
CN114383712A (en) * 2022-01-21 2022-04-22 中国计量科学研究院 High-temperature calibration method and device for sensitivity of vibration sensor
CN114383712B (en) * 2022-01-21 2023-11-07 中国计量科学研究院 High-temperature calibration method and device for sensitivity of vibration sensor
CN116908935A (en) * 2023-07-18 2023-10-20 中国科学院地质与地球物理研究所 Moon surface absolute calibration system and method based on moon seismograph
CN116908935B (en) * 2023-07-18 2024-04-05 中国科学院地质与地球物理研究所 Moon surface absolute calibration system and method based on moon seismograph

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Application publication date: 20160511